CN101975562A - Method for measuring surface flatness of light wave array surface or optical reflective surface - Google Patents
Method for measuring surface flatness of light wave array surface or optical reflective surface Download PDFInfo
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- CN101975562A CN101975562A CN 201010520367 CN201010520367A CN101975562A CN 101975562 A CN101975562 A CN 101975562A CN 201010520367 CN201010520367 CN 201010520367 CN 201010520367 A CN201010520367 A CN 201010520367A CN 101975562 A CN101975562 A CN 101975562A
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Abstract
The invention discloses a method for measuring the surface flatness of a light wave array surface or an optical reflective surface, comprising the following steps: (1) directly irradiating a light beam emitted from a light pipe to an area to be detected, or refracting the light beam by a dioptric element to the area to be detected, wherein the area to be detected is an optical reflective surface or a light wave array surface; (2) if the area to be detected is the optical reflective surface, going to step (3); if the area to be detected is the light wave array surface, going to step (4); (3) receiving the light beam irradiated to the optical reflective surface to be detected and reflected by the optical reflective surface via a detector in the light pipe, according to the received reflected light beam, testing the deflection angle of each light beam and the gradient of the optical reflective surface to be detected corresponding to each light beam by the detector, and obtaining the surface flatness of the optical reflective surface; and (4) directly receiving the light wave of the light beam irradiated to the optical reflective surface to be detected by the detector; and if the light wave array surface received by the light pipe deflects, measuring the deflection value thereof. The method of the invention is not limited by test area and is especially good at measuring the surface flatness of the optical reflective surface with large area or the light wave array surface with large calibre.
Description
Technical field:
The invention belongs to the optical detection field, relate to a kind of optical flat detection method, especially a kind of method of measuring light wave array surface or optical reflection face surface flatness.
Background technology:
The method of light wave array surface detection at present mainly contains methods such as interferometry, Hartmann sensor measurement and hartmann shack sensor measurement; The detection of optical reflection face surface flatness, the methods of interfering of using more.
For interference technique, though stronger intuitive is arranged, precision is also than higher, and test area tends to be restricted, and is also impracticable when surface that test area is bigger or light wave array surface.
For Hartmann and Hartmann shark method, adopted small-bore diaphragm and lens arra respectively, the manufacturing accuracy of aperture diaphragm and lens arra requires very high, processes and is not easy, and the parameter of each unit can not be accomplished in full accord, so can introduce corresponding error.
Summary of the invention:
The present invention will provide the measuring method of a kind of light wave array surface and optical reflection face flatness.This measuring method is the restriction of tested person area not, particularly is good at for the light wave array surface or the larger area optical reflection face surface flatness of larger caliber.
A kind of method of measuring light wave array surface or optical reflection face surface flatness comprises the steps:
(1) set up passage of light between light pipe and zone to be measured, the light beam that light pipe is launched can directly or indirectly be mapped to zone to be measured; Described zone to be measured is optical reflection face or light wave array surface;
(2) if zone to be measured is the optical reflection face, then change step (3); If zone to be measured is the light wave array surface, then change step (4);
(3) light beam that the is mapped to optical reflection face to be measured detector that is set at light pipe inside after the reflection of optical reflection face receives, detector according to the folded light beam that receives test out the deflection angle of every light beams and every light beams the tilt quantity of corresponding optical reflection face to be measured, obtain optical reflection face surface flatness;
(4) detector that is arranged on light pipe inside receives the light wave that the light wave array surface is launched, and by calculating the deflection angle that the received light wave array surface of light pipe deflects, records the tilt value of light wave array surface.
Be provided with dioptric element between described light pipe and the zone to be measured.
Described dioptric element is level crossing, triangular prism or pentagonal prism.
The principle of work of apparatus of the present invention is such: send light beam from target generator, be detected device after the reflecting surface reflection to be measured to receive.If reflecting surface deflects, then corresponding deflection also can take place in folded light beam, and the amount of deflection of light beam is detected device and records, thereby can calculate the amount of deflection of reflecting surface.When measuring the light wave array surface, do not need target generator, can directly receive light wave,, also can record its tilt value if the received light wave array surface of light pipe deflects with detector.Here, we claim this device to be light pipe.
In actual measurement, single light pipe should be fixed on the translation equipment, adopt scan mode to measure whole zone to be measured.This zone to be measured can be the optical reflection face, also can be light wave array surface etc.For the optical reflection face, can go out its surface flatness with the folded light beam deflection angle numerical evaluation that light pipe records; For the light wave array surface,, then can calculate the flatness of light wave array surface with the numerical value of its All Ranges light wave array surface deflection that collects.
In addition, we also can be fixed on light pipe on one stabilizing base, and place the dioptric element that the effect of beam angle deviation is arranged at its front end, and as level crossing, triangular prism, pentagonal prism etc., the effect that it is realized is can be with the light beam deviation.If zone to be measured is the optical reflection face, then this optical element refraction of optical beam that light pipe can be sent is to the optical reflection face, and folded light beam is refracted and finally is detected device to light pipe and receives; If zone to be measured is the light wave array surface, thereby then this optical element can refract to light wave light pipe and directly is detected device and receives.Scanning this moment, the relative position in light pipe and zone to be measured does not change, and only need mobile dioptric element, and light pipe is sent and reflect light beam on the optical reflection face and move or the light wave of zones of different is received by light pipe by dioptric element, just can finish the scanning in delegation zone.During the scanning next line, light pipe being moved to the relevant position, still is that only mobile dioptric element scans.By this way, whole sector scanning to be measured is intact.Finally, the numerical value that scanning is gathered is through handling the surface flatness that then can draw light wave array surface or optical reflection face.
Description of drawings
Fig. 1 light-pipe structure figure: 1 represents target generator, and 2 represent detector, and 3 represent optical splitter, and 4 represent lens combination, and 5 represent catoptron
The scan mode of a light pipe of Fig. 2: 6 represent light pipe, and 7 represent translation equipment, 8 representatives zone to be measured
A kind of scan mode of a light pipe in Fig. 3 invention
A kind of scan mode of a light pipe in Fig. 4 invention
A kind of scan mode of a light pipe in Fig. 5 invention
A kind of scan mode of a light pipe in Fig. 6 invention
Fig. 7 measuring principle figure of dioptric element: 6 represent light pipe, and 9 represent dioptric element, 8 representatives zone to be measured
Embodiment
Describe content of the present invention in detail below in conjunction with accompanying drawing:
Fig. 1 is the structural drawing of light pipe.Produce the optical target light beam by target generator 1, by optical splitter 3 and lens combination 4 light beam is penetrated light pipe, light beam is reflected and is detected device 2 after mirror 5 reflections and receives.If mirror deflection, beam angle also can deflection, and the position that is incident upon the light beam on the detector will change and be received record, thereby calculates the angle of mirror deflection.
Directly use light pipe to scan, then as shown in Figure 2.If zone to be measured is the optical reflection face, then be to receive the inclined degree that the folded light beam of self sending light beam calculates this regional reflex face by the light pipe detector, measure the surface flatness of whole optics reflecting surface with the mode of scanning; If measured zone is the light wave array surface, then be directly to receive the inclined degree that the light wave light velocity measurement should zone light wave array surface by the light pipe detector, also be by the scanning collection data, through handling, whole light wave array surface flatness is measured.The mode of scanning has a variety of, and as Fig. 3,4,5,6, these several modes are just given an example, but are not limited to this.
Fig. 7 is when adopting dioptric element, whole structural drawing.If zone to be measured is the optical reflection face, then send light beam by light pipe 1, on optical reflection face 3, light beam is reflected back toward light pipe to process dioptric element 2, can go out the inclined degree of measured zone by the angle change calculations of folded light beam with the refraction of optical beam.Mobile dioptric element then can scan whole optics reflecting surface.Finally, all measurement data are handled, calculated its surface flatness; If zone to be measured is the light wave array surface, then light pipe can directly be injected through dioptric element in light wave array surface part zone, thereby directly received and measure its inclined degree by light pipe, mobile dioptric element, whole zone to be measured is scanned, all data are handled, just can be calculated the flatness of light wave array surface.Here use the scan mode of a light pipe of scan mode and top usefulness of dioptric element consistent, as Fig. 3,4,5,6, these several modes also just for example, but scan mode is not limited to this.
Above content is to further describing that the present invention did in conjunction with concrete preferred implementation; can not assert that the specific embodiment of the present invention only limits to this; for the general technical staff of the technical field of the invention; without departing from the inventive concept of the premise; can also make some simple deduction or replace, all should be considered as belonging to the present invention and determine scope of patent protection by claims of being submitted to.
Claims (3)
1. a method of measuring light wave array surface or optical reflection face surface flatness is characterized in that, comprises the steps:
(1) set up passage of light between light pipe and zone to be measured, the light beam that light pipe is launched can directly or indirectly be mapped to zone to be measured; Described zone to be measured is optical reflection face or light wave array surface;
(2) if zone to be measured is the optical reflection face, then change step (3); If zone to be measured is the light wave array surface, then change step (4);
(3) light beam that the is mapped to optical reflection face to be measured detector that is set at light pipe inside after the reflection of optical reflection face receives, detector according to the folded light beam that receives test out the deflection angle of every light beams and every light beams the tilt quantity of corresponding optical reflection face to be measured, obtain optical reflection face surface flatness;
(4) detector that is arranged on light pipe inside receives the light wave that the light wave array surface is launched, and by calculating the deflection angle that the received light wave array surface of light pipe deflects, records the tilt value of light wave array surface.
2. a kind of according to claim 1 method of measuring light wave array surface or optical reflection face surface flatness is characterized in that: be provided with dioptric element between described light pipe and the zone to be measured.
3. as a kind of method of measuring light wave array surface or optical reflection face surface flatness as described in the claim 2, it is characterized in that: described dioptric element is level crossing, triangular prism or pentagonal prism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN 201010520367 CN101975562A (en) | 2010-10-26 | 2010-10-26 | Method for measuring surface flatness of light wave array surface or optical reflective surface |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201010520367 CN101975562A (en) | 2010-10-26 | 2010-10-26 | Method for measuring surface flatness of light wave array surface or optical reflective surface |
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| CN101975562A true CN101975562A (en) | 2011-02-16 |
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| CN 201010520367 Pending CN101975562A (en) | 2010-10-26 | 2010-10-26 | Method for measuring surface flatness of light wave array surface or optical reflective surface |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103105282A (en) * | 2013-01-18 | 2013-05-15 | 上海亨通宏普通信技术有限公司 | Device and method for angular measurement of fiber array or chip |
| CN106524953A (en) * | 2017-01-04 | 2017-03-22 | 南通沃特光电科技有限公司 | Flatness detecting method for stator laminates |
| CN106524954A (en) * | 2016-12-21 | 2017-03-22 | 南通沃特光电科技有限公司 | Flatness detection method of rotor lamination |
| CN106767568A (en) * | 2016-12-15 | 2017-05-31 | 贵州虹轴轴承有限公司 | A kind of bearing ball surfacing detection means |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2803466A1 (en) * | 1978-01-27 | 1979-08-02 | Erhard Dipl Ing Debler | Optical flatness measurement using collimated light - integrates reflected light after direction changes caused by prismatic reflection |
| CN101210796A (en) * | 2006-12-30 | 2008-07-02 | 财团法人石材暨资源产业研究发展中心 | Device for measuring flatness |
-
2010
- 2010-10-26 CN CN 201010520367 patent/CN101975562A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2803466A1 (en) * | 1978-01-27 | 1979-08-02 | Erhard Dipl Ing Debler | Optical flatness measurement using collimated light - integrates reflected light after direction changes caused by prismatic reflection |
| CN101210796A (en) * | 2006-12-30 | 2008-07-02 | 财团法人石材暨资源产业研究发展中心 | Device for measuring flatness |
Non-Patent Citations (1)
| Title |
|---|
| 《冶金设备》 20060630 杨光辉等 一种新的带钢平坦度在线检测方法的研究 第4-8页 1-3 , 第3期 2 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103105282A (en) * | 2013-01-18 | 2013-05-15 | 上海亨通宏普通信技术有限公司 | Device and method for angular measurement of fiber array or chip |
| CN103105282B (en) * | 2013-01-18 | 2015-08-12 | 江苏亨通光网科技有限公司 | A kind of device and method fiber array or chip being carried out to measurement of angle |
| CN106767568A (en) * | 2016-12-15 | 2017-05-31 | 贵州虹轴轴承有限公司 | A kind of bearing ball surfacing detection means |
| CN106767568B (en) * | 2016-12-15 | 2019-03-05 | 贵州虹轴轴承有限公司 | A kind of bearing ball surfacing detection device |
| CN106524954A (en) * | 2016-12-21 | 2017-03-22 | 南通沃特光电科技有限公司 | Flatness detection method of rotor lamination |
| CN106524953A (en) * | 2017-01-04 | 2017-03-22 | 南通沃特光电科技有限公司 | Flatness detecting method for stator laminates |
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Application publication date: 20110216 |