CN101865670A - Plane surface shape measurement method of optical fiber point-diffraction phase-shifting interferometer - Google Patents
Plane surface shape measurement method of optical fiber point-diffraction phase-shifting interferometer Download PDFInfo
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Abstract
The invention discloses a plane surface shape measurement method of an optical fiber point-diffraction phase-shifting interferometer, belonging to the technical field of optical measurement. The method comprises the following steps: firstly the spherical wave diffracted by a measuring fiber is reflected by a plane mirror to be measured, is focused on the slant end surface of a reference fiber by an auxiliary positive lens, is reflected again to combine with the spherical wave diffracted by the reference fiber and perform interference, the obtained interference pattern is analyzed and processed by the standard method to obtain the aberration caused by the plane mirror to be measured and the auxiliary positive lens; secondly, the plane mirror to be measured is removed, the end surface of the measuring fiber is moved to the conjugate position of the plane mirror to be measured, the spherical waves diffracted by the measuring fiber and the reference fiber are combined to interfere again; the aberration caused by the auxiliary positive lens is obtained through the measurement of the step; and the measurement result of the first step minus that of the second step is the aberration caused by the plane mirror to be measured, and the aberration is corrected according to the incident angle of the spherical wave to obtain the surface shape of the plane mirror to be measured. The method of the invention can be used to effectively increase the measurement precision of the plane surface shape of the optical fiber point-diffraction phase-shifting interferometer.
Description
Technical field
The invention belongs to technical field of optical precision measurement, relate to the plane surface shape measurement method on the optical fiber point-diffraction phase-shifting interferometer, can realize the holomorphism high-acruracy survey of optical flat.
Background technology
Planar optical elements is used very extensive in optical system, and its flatness is usually at one below the wavelength.Plane component generally adopts interference of light method to measure its flatness, needs the reference planes of a standard as datum plane during measurement.The dressing plate that common interferometer use optics processing and manufacturing goes out always exists certain face shape error, thereby has limited the accuracy of interferometer measurement plane surface shape as the reference plane.The accuracy of measurement of current interferometer plane surface shape can only reach λ/20～λ/50 (λ is an optical wavelength, is worth to be 632.8nm), far can not satisfy the demand of cutting edge technology researches such as ultraprecise processing and ultraviolet photolithographic.
Therefore, seek the key issue that high-precision reference planes have just become to improve interferometric method plane surface shape measuring accuracy.
Lord Rayleigh proposes to use the liquid plane to replace the reference surface of interferometer the earliest, as the datum plane of interferometry.The liquid plane has the radius-of-curvature that equates with earth surface basically, is very desirable with liquid level as reference plane, but liquid level is subject to disturb, self unevenness of mechanical shock, dust influence, thermograde, the effect of static charge molecular attraction, external magnetic field effect and liquid all can make liquid surface curvature change, when using liquid level simultaneously as the interference reference plane, the necessary horizontal clamping of tested optical flat, sagging also can the introducing than mistake in tested plane that causes owing to the universal gravitation effect, so this method like this is difficult to practicability aborning.
G.Schulz and J.Schwider propose and have developed the absolute method of inspection of optical flat of no reference plane, i.e. three plate methods: relative in twos by three planes that precision is suitable, carry out interference detection three times.Because when two face interferometries, the coordinate system of one of them face be overturn with respect to the y axle, such three equations just can only obtain three faces and distribute along the face shape error on the y axle.Three traditional plate methods have only provided the deviation of a certain radial direction of tested plane component, but not the deviations from planarity on the whole plane.For example three dull and stereotyped tests on the Zygo GPI series interferometer realize by the ThreeFlt.app application programs that carry, and can only detect face shape absolute profile on x, the y both direction by 4 multiple measurement, and its measuring accuracy reaches λ/100.Many researchers afterwards attempts expanding this measuring method by rotating tested plane increase measurement data.For example Fritz utilizes the rotational invariance of Zernike polynomial function, and match is all carried out with least square method in all corrugateds, uses the Zernike polynomial expression as basis function.The polynomial linear combination of Zernike can be write as in each corrugated like this, is divided into four groups according to the different symmetric modes on corrugated, tries to achieve three corrugateds Zernike multinomial coefficient separately respectively.This method the absolute check in plane is not only rested on the line or several lines on, but test whole plane, and programmable, be convenient to area of computer aided and handle.
In sum, the plane interference measuring technique is divided into two classes substantially, and a class is the relative interferometric method that reference plane is arranged, and another kind of is the absolute interferometry of no reference plane.The advantage that the reference plane method is arranged is only to need one-shot measurement can obtain the result, the efficiency of measurement height, but precision is subject to the precision of reference planes.The advantage of no reference plane method is to obtain higher measuring accuracy, but the measuring process more complicated, its holomorphism measurement result that will obtain tested plane need repeatedly be exchanged and rotate, and measures number of times usually all more than 5 times, and efficiency of measurement is very low.And the positioning of rotating of interior mechanical mechanism can be introduced more error source, and its precision is directly restricting the measuring accuracy of net result.
The key that realizes the optical flat high-acruracy survey is to seek even more ideal reference corrugated.Consider that from precision this corrugated can not only be confined to plane wave front.Usually, can produce the spherical wave of approximate ideal by means of aperture point diffraction, the size of aperture has determined the numerical aperture of diffraction light and has departed from the error of spherical wave.If hole diameter is 4 λ, promptly diffracted beam is when numerical aperture 0.2, and the diffraction spherical aberration in its far field is less than λ/10
4, this precision is considerably beyond present known various with reference to the corrugated.For actual measurement, it can be considered desirable corrugated with reference to sphere.End face with the flexible optical fibre fibre core replaces aperture just to constitute the optical fiber point-diffraction interferometer.
The reference spherical wave front that the some diffraction produces is dispersed, thereby naturally is suitable for measuring concave spherical surface, but can't directly apply to plane surveying.It is preceding by tested flat mirror reflects to suppose to put diffracted wave, then remain spherical wave front before the reflection wave, but carry the face shape information of tested level crossing, as long as the reference sphere ground roll of this spherical wave and another root optical fiber diffraction is interfered the face shape information that can obtain tested level crossing.
Based on above-mentioned principle, and by introduce the one flat plate beam splitter realize with reference to the corrugated with 200910237426.8) and " a kind of absolute interferometric method of plane shape of optical plane " (application number: 201010001177.5) realized measuring measure converging of corrugated Chinese patent application " a kind of optical fiber point-diffraction phase-shifting interference measuring method of plane shape of optical plane " (application number: based on the plane surface shape of optical fiber point-diffraction movable phase interfere technology.
But above-mentioned two kinds of methods all need the dull and stereotyped beam splitter aberration correction of introducing itself.In fact, dull and stereotyped beam splitter is not only just brought additional aberrations in parallel light path, uses dull and stereotyped beam splitter will bring the principle aberration in the some optical diffraction of dispersing.Especially the aberration of bringing at heavy-calibre planar measuring process middle plateform beam splitter is just bigger, even well beyond the aberration of tested level crossing itself, this has just brought difficulty to aberration separation and plane surface shape measurement.
Summary of the invention
The objective of the invention is: for overcoming in the existing fiber point diffraction plane surface shape measurement technology, thereby introduce the defective that bigger additional aberrations influences measuring accuracy, propose a kind of new measuring method because of using dull and stereotyped beam splitter to cause.
Its ultimate principle is: by reducing the aberration that intermediate optical elements is introduced as far as possible, thereby further improve the plane surface shape measuring accuracy on the optical fiber point-diffraction phase-shifting interferometer.The present invention replaces dull and stereotyped beam splitter to realize converging of reference light and measuring light by using an auxiliary positive lens, and the end face of reference optical fiber is polished to 28 degree inclined-planes, realized a kind of new plane surface shape measurement method on the optical fiber point-diffraction phase-shifting interferometer thus.
The objective of the invention is to be achieved through the following technical solutions.
The plane surface shape measurement method of optical fiber point-diffraction phase-shifting interferometer.May further comprise the steps:
The first step is disposed following measurement mechanism, comprises beam splitting system, measuring optical fiber, auxiliary positive lens, tested level crossing, reference optical fiber, imaging lens, ccd video camera, computing machine; Beam splitting system comprises laser instrument, adjustable neutral density filter, 1/2 wave plate, polarization beam splitter prism, first right-angle prism, second right-angle prism, first quarter wave plate, second quarter wave plate, piezoelectric ceramics, first polaroid, second polaroid, second microcobjective and second microcobjective.
Second step: enter the light beam of measuring optical fiber from beam splitting system, at the end face generation diffraction of measuring optical fiber; Reflecting on tested level crossing surface before the diffracted wave, is the spherical wave front that carries tested plane minute surface shape information before the reflection wave, and its centre of sphere is arranged in the measuring optical fiber end face at the formed picture point P of tested level crossing place; Described spherical wave front converges to the inclined end face of reference optical fiber through assisting positive lens, forms after the inclined end face reflection of reference optical fiber and measures wavefront; Converge and interfere from the reference spherical wave front of the inclined end face diffraction of reference optical fiber and above-mentioned measurement wavefront; Gather interferogram through imaging lens, ccd video camera, send into computing machine and handle and analyze with standard method, the ripple that obtains tested level crossing and auxiliary positive lens is poor.
The 3rd step: remove tested level crossing, it is motionless to fix other optical elements simultaneously; The end face of measuring optical fiber is moved to above-mentioned picture point P place; Converge to the inclined end face of reference optical fiber from the spherical wave of measuring optical fiber end face diffraction through assisting positive lens, after the inclined end face reflection of reference optical fiber, form and measure wavefront; Converge from the reference spherical wave front of the inclined end face diffraction of reference optical fiber and above-mentioned measurement wavefront and to interfere; Gather interferogram through imaging lens, ccd video camera, send into computing machine and handle and analyze with standard method, the ripple that obtains auxiliary positive lens is poor.
The 4th step: the result who obtains with second step deducts the result that the 3rd step obtained, and the ripple that obtains tested level crossing is poor.Then, this ripple difference is carried out pointwise correction at the incident angle of tested level crossing before by the diffracted wave of measuring optical fiber, obtain the face shape result of tested level crossing.Face shape acquisition methods is as follows:
At first, definition
For the tested level crossing that obtains coordinate points (i, the ripple of j) locating is poor, its unit is a wavelength, F (i, j) be tested level crossing (i, face shape error j) then has:
Wherein: k
I, j=cos[α (i, j)]/2, (i is at (i, incident angle j), k before the diffracted wave of measuring optical fiber j) to α
I, jFor at (i, correction factor j);
Then, by tested level crossing in that (i, (i j), further obtains the result of tested plane minute surface shape to face shape error F j).
Beneficial effect
The inventive method advantage of existing fiber point diffraction plane surface shape measurement technology relatively both at home and abroad is: use an auxiliary positive lens as intermediate optical elements, because desirable positive lens is not brought additional aberration into to the spherical wave front conversion, dull and stereotyped beam splitter then can be introduced the principle aberration to spherical wave front.Use positive lens will reduce the aberration that the intermediate optical system brings into greatly, thereby improved the plane surface shape measuring accuracy on the optical fiber point-diffraction phase-shifting interferometer through the good optical design.
Description of drawings
Fig. 1 is the second step synoptic diagram of a kind of plane surface shape measurement method on the optical fiber point-diffraction phase-shifting interferometer;
Fig. 2 is the 3rd a step synoptic diagram of a kind of plane surface shape measurement method on the optical fiber point-diffraction phase-shifting interferometer;
Fig. 3 is the end surface shape and the wavefront synoptic diagram of reference optical fiber;
Wherein, 1-laser instrument; The adjustable neutral density filter of 2-; The 3-1/2 wave plate; The 4-polarization beam splitter prism; 5-right-angle prism A; 6-right-angle prism B; 7-first quarter wave plate; 8-second quarter wave plate; The 9-piezoelectric ceramics; 10-first polaroid; 11-second polaroid; 12-first microcobjective; 13-second microcobjective; The 14-measuring optical fiber; 15-assists positive lens; The tested level crossing of 16-; The end face of 17-measuring optical fiber 14 is about the conjugation picture point P of tested level crossing 16; The 18-reference optical fiber; The 19-imaging lens; The 20-CCD video camera; The 21-computing machine, the 22-lock pin; The 23-axis; The 24-normal line of butt end; 25-diffracted beam axis; 26-incident measuring beam; The measuring beam of 27-reflection; Before the 28-diffracted wave.
Embodiment
Below in conjunction with drawings and Examples the specific embodiment of the present invention is described in further details.
The plane surface shape measurement method of optical fiber point-diffraction phase-shifting interferometer may further comprise the steps:
The first step is disposed a cover measurement mechanism, as shown in Figure 1 and Figure 2, comprising: beam splitting system, measuring optical fiber 14, auxiliary positive lens 15, tested level crossing 16, reference optical fiber 18, imaging lens 19, ccd video camera 20, computing machine 21;
Wherein, beam splitting system comprises laser instrument 1, adjustable neutral density filter 2,1/2 wave plate 3, polarization beam splitter prism 4, first right-angle prism 5, second right-angle prism 6, first quarter wave plate 7, second quarter wave plate 8, piezoelectric ceramics 9, first polaroid 10, second polaroid 11, first microcobjective 12 and second microcobjective 13.
Second step: it is poor with the ripple of auxiliary positive lens 15 to obtain tested level crossing 16, and method is as follows:
As shown in Figure 1, linearly polarized light by laser instrument 1 outgoing is decayed by adjustable neutral density filter 2, by inciding polarization beam splitter prism 4 behind 1/2 wave plate, the 3 adjustment polarization directions, be broken down into the mutually perpendicular two bunch polarized lights in polarization direction, a branch of transmission (measuring beam), a branch of reflection (reference beam).Two bunch polarized lights respectively by the process of first right-angle prism 5 and second right-angle prism, 6 reflected back polarization beam splitter prisms 4 in, all distinguish twice through first quarter wave plate 7 and second quarter wave plate 8, its polarization direction changes 90 degree separately, previous transmitted light beam will reflect, and realize that by piezoelectric ceramics 9 step-lengths are the phase shift of pi/2, and previous folded light beam is with transmission.Adjust its polarization direction by first polaroid 10, second polaroid 11 respectively from two bundle crossed polarized lights of polarization beam splitter prism 4 outgoing, and then, be coupled to measuring optical fiber 14 and reference optical fiber 18 respectively respectively by first microcobjective 12, second microcobjective 13.Through tested level crossing 16 reflections, is the spherical wave front that carries 16 shape information of tested level crossing from the spherical wave of the end face diffraction of measuring optical fiber 14 before the reflection wave, and its centre of sphere is arranged in the end face of measuring optical fiber 14 at tested level crossing 16 formed virtual image point P17 places.Described spherical wave front converges to the inclined end face of reference optical fiber 18 through assisting positive lens 15, forms after the inclined end face reflection of reference optical fiber 18 and measures wavefront; Converge from the reference sphere ground roll of the inclined end face diffraction of reference optical fiber 18 and above-mentioned measurement wavefront and to interfere; Gather interferogram through imaging lens 19, ccd video camera 20, send into computing machine 21 and carry out Treatment Analysis by four step phase shift algorithms or five step phase shift algorithms, it is poor with the ripple of auxiliary positive lens 15 to obtain tested level crossing 16.
In said process, can adjust the relative intensity of reference beam and measuring beam by rotation 1/2 wave plate 3 and first polaroid 10, second polaroid 11, and by moving the optical path difference of first right-angle prism, 5 adjustment reference beams and measuring beam, to reach best fringe contrast.Obviously, it is poor that this pacing amount result not only contains the ripple of tested level crossing 16, and it is poor to contain the ripple that auxiliary positive lens 15 introduces.
The 3rd step: the ripple that obtains auxiliary positive lens 15 separately is poor, and method is as follows:
As shown in Figure 2, on the basis in second step, keep auxiliary positive lens 15, reference optical fiber 18, imaging lens 19, ccd video camera 20 and other optical elements to maintain static, remove tested level crossing 16.The end face of measuring optical fiber 14 is moved to picture point P17 place; Converge to the inclined end face of reference optical fiber 18 from the spherical wave front of measuring optical fiber 14 end face diffraction through assisting positive lens 15, after the inclined end face reflection of reference optical fiber 18, form and measure wavefront; Converge and interfere from the reference sphere ground roll of the inclined end face diffraction of reference optical fiber 18 and above-mentioned measurement wavefront; Gather interferogram through imaging lens 19, ccd video camera 20, send into computing machine 21 and carry out Treatment Analysis by four step phase shift algorithms or five step phase shift algorithms.
In the said process, realize that by computing machine 22 control piezoelectric ceramics 9 step-length is the phase shift of pi/2; Adjust the relative intensity of reference light and measuring light by rotating 1/2 wave plate 3 and first polaroid 10, second polaroid 11; Adjust the optical path difference of reference light and measuring light by moving first right-angle prism 5, to reach best fringe contrast.Obviously, it is poor that this pacing amount result only contains the ripple of assisting positive lens 15 to introduce.
The 4th step: the result who obtains with second step deducts the result that the 3rd step obtained, and the ripple that obtains tested level crossing 16 is poor.Then, this ripple difference is carried out pointwise correction at the incident angle of tested level crossing 16 before by the diffracted wave of measuring optical fiber 14, obtain the face shape result of tested level crossing.Face shape acquisition methods is as follows:
Definition
For the tested level crossing 16 that obtains by above-mentioned steps coordinate points (i, the ripple of j) locating is poor, its unit is a wavelength, F (i, j) be tested level crossing 15 (i, face shape error j) then has:
Wherein: k
I, j=cos[α (i, j)]/2, (i is at (i, incident angle j), k before the diffracted wave of measuring optical fiber 14 j) to α
I, jBe at (i, correction factor j);
Then, by tested level crossing 16 in that (i, (i j), further obtains the result of 16 shapes of tested level crossing to face shape error F j).
In the said process, the end face of described reference optical fiber 18 requires to be polished to the inclined-plane, and its angle of inclination is calculated as follows:
The end surface shape of reference optical fiber 18 and wavefront as shown in Figure 3, the related lock pin of the end face of reference optical fiber 18 22 is angled the inclined-plane of α by whole polishing, end face is coated with semi-transparent semi-reflecting film.Wherein the axis 23 of reference optical fiber 18 is α with normal line of butt end 24 angles, and the diffracted beam axis 25 of reference optical fiber 18 is β with normal line of butt end 24 angles of reference optical fiber 18, and according to refraction law, and to get air refraction be 1, has:
nsinα＝sinβ
The fiber core refractive index of getting reference optical fiber 18 is n=1.5, if expect the refraction angle of β=45 °, the end slope angle that can be calculated reference optical fiber 18 by following formula is: 28 ° of α ≈.Promptly when the end face of reference optical fiber 18 is polished to 28 ° of inclined-planes, the incident measuring beam 26 that carries tested plane surface shape information incides the end face of reference optical fiber 18 with 45, the measuring beam 27 of its reflection will be turned back 90 °, just overlap with the diffracted wave of reference optical fiber 18 preceding 28 and produce interference.
Claims (1)
1. the plane surface shape measurement method of an optical fiber point-diffraction phase-shifting interferometer is characterized in that may further comprise the steps:
The first step is disposed a cover measurement mechanism, comprising: beam splitting system, measuring optical fiber (14), auxiliary positive lens (15), tested level crossing (16), reference optical fiber (18), imaging lens (19), ccd video camera (20), computing machine (21);
Wherein, beam splitting system comprises laser instrument (1), adjustable neutral density filter (2), 1/2 wave plate (3), polarization beam splitter prism (4), first right-angle prism (5), second right-angle prism (6), first quarter wave plate (7), second quarter wave plate (8), piezoelectric ceramics (9), first polaroid (10), second polaroid (11), first microcobjective (12) and second microcobjective (13);
Second step: it is poor with the ripple of auxiliary positive lens (15) to obtain tested level crossing (16), and method is as follows:
Linearly polarized light by laser instrument (1) outgoing is decayed by adjustable neutral density filter (2), by inciding polarization beam splitter prism (4) behind 1/2 wave plate (3) the adjustment polarization direction, be broken down into the mutually perpendicular two bunch polarized lights in polarization direction, a branch of transmission, a branch of reflection; Two bunch polarized lights are respectively by in the process of first right-angle prism (5) and second right-angle prism (6) reflected back polarization beam splitter prism (4), all distinguish twice through first quarter wave plate (7) and second quarter wave plate (8), its polarization direction changes 90 degree separately, previous transmitted light beam will reflect, and realize that by piezoelectric ceramics (9) step-length is the phase shift of pi/2, and previous folded light beam is with transmission;
Adjust its polarization direction by first polaroid (10), second polaroid (11) respectively from two bundle crossed polarized lights of polarization beam splitter prism (4) outgoing, and then, be coupled to measuring optical fiber (14) and reference optical fiber (18) respectively by first microcobjective (12), second microcobjective (13); Reflect through tested level crossing (16) from the spherical wave of the end face diffraction of measuring optical fiber (14), for carrying the spherical wave front of tested level crossing (16) face shape information, its centre of sphere is arranged in the end face of measuring optical fiber (14) at the formed virtual image point P of tested level crossing (16) place before the reflection wave; Described spherical wave front converges to the inclined end face of reference optical fiber (18) through assisting positive lens (15), forms after the inclined end face reflection of reference optical fiber (18) and measures wavefront; Converge from the reference sphere ground roll of the inclined end face diffraction of reference optical fiber (18) and above-mentioned measurement wavefront and to interfere; Gather interferogram through imaging lens (19), ccd video camera (20), send into computing machine (21) and carry out Treatment Analysis by standard method, it is poor with the ripple of auxiliary positive lens (15) to obtain tested level crossing (16);
The 3rd step: the ripple that obtains auxiliary positive lens (15) separately is poor, and method is as follows:
On the basis in second step, keep auxiliary positive lens (15), reference optical fiber (18), imaging lens (19), ccd video camera (20) and other optical elements to maintain static, remove tested level crossing (16); The end face of measuring optical fiber (14) is moved to picture point P place; Converge to the inclined end face of reference optical fiber (18) from the spherical wave front of measuring optical fiber (14) end face diffraction through assisting positive lens (15), after the inclined end face reflection of reference optical fiber (18), form and measure wavefront; Converge and interfere from the reference sphere ground roll of the inclined end face diffraction of reference optical fiber (18) and above-mentioned measurement wavefront; Gather interferogram through imaging lens (19), ccd video camera (20), send into computing machine (21) and carry out Treatment Analysis by standard method;
The 4th step: the result who obtains with second step deducts the result that the 3rd step obtained, and the ripple that obtains tested level crossing 16 is poor; Then, this ripple difference is carried out pointwise correction by the preceding incident angle at tested level crossing (16) of the diffracted wave of measuring optical fiber (14), obtain the face shape result of tested level crossing; Face shape acquisition methods is as follows:
Definition
For the tested level crossing (16) that obtains by above-mentioned steps coordinate points (i, the ripple of j) locating is poor, its unit is a wavelength, F (i, j) be tested level crossing (15) (i, face shape error j) then has:
Wherein: k
I, j=cos[α (i, j)]/2, (i is at (i, incident angle j), k before the diffracted wave of measuring optical fiber (14) j) to α
I, jBe at (i, correction factor j);
Then, by tested level crossing (16) in that (i, (i j), further obtains the result of tested level crossing (16) face shape to face shape error F j).
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