CN101774244A - Method for preparing PVF sponge roller brush - Google Patents
Method for preparing PVF sponge roller brush Download PDFInfo
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- CN101774244A CN101774244A CN201010102364A CN201010102364A CN101774244A CN 101774244 A CN101774244 A CN 101774244A CN 201010102364 A CN201010102364 A CN 201010102364A CN 201010102364 A CN201010102364 A CN 201010102364A CN 101774244 A CN101774244 A CN 101774244A
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- polyvinyl formal
- mixed solution
- roller brush
- sponge roller
- bubble
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Abstract
The invention discloses a method for preparing a PVF sponge roller brush, which comprises that: a mold is vertically fixed on a vibration workbench; prepared mixed solution of polyvinyl formal is filled into the mold while being stirred at high speed; the vibration workbench is started so that bubbles in the mixed solution of polyvinyl formal collide, and are broken and polymerized into large bubbles, ascend to the top of the mixed solution of polyvinyl formal, contact with the air and are broken, so as to remove the bubbles in the pasty mixed solution of polyvinyl formal; the mold and mixed slurry are arranged in a sealed steam space so that the mixed solution of polyvinyl formal reacts and is formed, fully cooled and stripped, cleaned, and the PVF sponge roller brush with the bubble diameter less than 750mu m is prepared. The method for preparing the PVF sponge roller brush can improve the cleaning efficiency and the finished product rate of the PVF sponge roller brush, and is applicable to silicon wafer, photomask, LCD glass substrate, computer hard disc and other CMP processing procedures.
Description
Technical field
The present invention relates to a kind of manufacture method of making polyvinyl formal sponge roller brush, more particularly, relate to a kind of method that in making polyvinyl formal sponge roller brush process, is used to make polyvinyl formal sponge roller brush.
Technical background
The development of modern microelectronics industry, direction to extensive high integration develops, precision and cleanliness factor all there are the utmost point Ke requirement at quarter. particularly as later process: cmp (CMP) cleans the polyvinyl formal sponge roller brush (seeing accompanying drawing one) of usefulness, have another name called: cmp PVA brush, (abbreviating as: PVA brush or PVF brush) is made of polyvinyl formal sponge porous material.Be applicable to the PVA brush of high-end cleaning usefulness, need possess following physical characteristic and clenaing effect: effectively open the bubble rate: 83%
93%. apertures: 20 μ m
750 μ are μ m particulate (LPC) m.0.2 ~ 2.0:＜1000unit/cm3. the degree of eccentricity＜0.5mm. water absorption rate: x8 ~ x10.5; The PVA brush that is in moisture state and has a favorable elasticity is made of porous material, clean with interior arbitrary section of PVA brush and outer surface all can not contain greater than＞
The bubble of 750 μ m just can reach high accuracy, the cleaning requirement of high-cleanness, high.
The emphasis that cmp (CMP) cleans is to remove all contaminants that brings in the process of lapping.Wafer can touch eroding chemical and bear bigger ambient pressure in the process of lapping, cause its surface or subsurface zone to deform or destroy, the main purpose that the stable .CMP that has influence on device is cleaned be remove that grinding agent is residual, metal pollutant and free state ion. remove the pollutant of silicon chip surface, at first to reduce and the contacting of substrate, avoid particle to adhere to body surface again by scrubbing then with the impact of current by mechanical means or with chemical attack pollutant surface.In CMP manufacturing procedures such as silicon wafer, photomask, liquid crystal glass base, computer hard disc, because the PVA brush has excellent in flexibility, can not injure meticulous body surface, not take off the tip, can not cause secondary pollution, resistance to chemical attack, has good hydrophilicity and can be up to 10 times water absorption rate, be suitable for carrying out this class high accuracy, the rinsing requirement of high-cleanness, high, the tubercle that PVA brush outer surface is regularly arranged, can effectively increase and the contact area that is cleaned thing, this tubercle top rotation contact is rinsed body, thereby scrubs.
Tradition is used to make the manufacture method of polyvinyl formal sponge roller brush, can not polyvinyl formal sponge roller brush surface and inside＞
750 μ m bubbles, thereby have clenaing effect and the low defective of yield rate.
Summary of the invention
The objective of the invention is to overcome above-mentioned defective of the prior art, a kind of method that is used to make polyvinyl formal sponge roller brush in making polyvinyl formal sponge roller brush process is provided, can remove polyvinyl formal sponge roller brush surface and inside＞
750 μ m bubbles, thus the clenaing effect that polyvinyl formal sponge roller is brushed improved, also can improve yield rate greatly.
For achieving the above object, technical scheme provided by the invention is as follows: a kind of method that is used to make polyvinyl formal sponge roller brush is provided, it is characterized in that, may further comprise the steps:
(1), with alcoholysis degree be 99% polyvinyl alcohol water solution, 5～15% formaldehyde,, 5～15% hydrochloric acid, 8～15% dehydrated potato powders form the polyvinyl formal mixed solution that has than toughness through fully stirring;
(2), prepare a shaking table, on shaking table, install mould, the mould vertical fixing is on shaking table;
(3), the polyvinyl formal mixed solution that will prepare, high-speed stirred limit, limit is fed in the mould, in the process of high-speed stirred and perfusion, sneak into a large amount of air in the polyvinyl formal mixed solution than toughness and produce a large amount of bubbles;
(4), Vibration on Start-up workbench, the vibration frequency and the vibration amplitude of limit adjustment vibrations workbench, the effusion state of limit observation bubble, the bubble of overflowing is big more many more, be best vibration frequency and the vibration amplitude that should set, bubble hit in the polyvinyl formal mixed solution is broken and aggregating into air pocket. bigger bubble has enough buoyancy air pockets in the polyvinyl formal mixed solution, rise to polyvinyl formal mixed solution top, ingress of air and breaking;
(5), the bubble that observes effusion is more and more littler, up to approaching calmness, be the best vibrations time that should set, thereby will remove greater than the bubble of Φ 750 μ m than the polyvinyl formal mixed solution interior diameter of toughness;
(6), place the vapor space of a sealing to make polyvinyl formal mix molten reaction moulding together with mixed serum on mould;
(7), fully cooling back molding. and clean, the polyvinyl formal sponge roller brush of bubble diameter obtained less than Φ 750 μ m.
The beneficial effect that is used to make the method for polyvinyl formal sponge roller brush of the present invention is: by constructing a shaking table, install mould on shaking table, the mould vertical fixing is on shaking table; With the polyvinyl formal mixed solution that has prepared, high-speed stirred limit, limit is fed in the mould, in the process of high-speed stirred and perfusion, sneaks into a large amount of air in the polyvinyl formal mixed solution than toughness and produces a large amount of bubbles; The Vibration on Start-up workbench, the vibration frequency and the vibration amplitude of limit adjustment vibrations workbench, the effusion state of limit observation bubble, the bubble of overflowing is big more many more, be best vibration frequency and the vibration amplitude that should set, bubble hit in the mixed serum is broken and aggregating into air pocket. bigger bubble has enough buoyancy air pockets in the polyvinyl formal mixed solution, rise to polyvinyl formal mixed solution top, ingress of air and breaking, thus will remove greater than the bubble of Φ 750 μ m than the polyvinyl formal mixed solution interior diameter of toughness; Place the vapor space of a sealing to make polyvinyl formal mix molten reaction moulding together with mixed serum on mould, fully cooling back molding. and clean, the polyvinyl formal sponge roller brush of bubble diameter obtained less than Φ 750 μ m.The polyvinyl formal sponge roller brush that adopts the method that is used to make polyvinyl formal sponge roller brush of the present invention to make, can improve the clenaing effect of polyvinyl formal sponge roller brush, also can improve yield rate greatly, be applicable to CMP manufacturing procedures such as silicon wafer, photomask, liquid crystal glass base, computer hard disc, satisfy and carry out this class high accuracy, the rinsing requirement of high-cleanness, high.
Below in conjunction with drawings and Examples the method that is used to make polyvinyl formal sponge roller brush of the present invention is described further.
Description of drawings
Fig. 1 is that the method that is used to make polyvinyl formal sponge roller brush of the present invention is removed the schematic diagram of the process of steeping;
Fig. 2 is the partial cross-sectional perspective view that is used to make the mould that method adopts of polyvinyl formal sponge roller brush of the present invention;
Fig. 3 is the partial cross-sectional perspective view that the mould that method adopts that is used to make polyvinyl formal sponge roller brush of the present invention is connected with the shaking table limit.
The specific embodiment
Below the preferred example that is used to make the method for polyvinyl formal sponge roller brush of the present invention, therefore do not limit protection scope of the present invention.
With reference to Fig. 1, a kind of method that is used to make polyvinyl formal sponge roller brush is provided, it is characterized in that, may further comprise the steps:
(1), with alcoholysis degree be 99% polyvinyl alcohol water solution, 5～15% formaldehyde,, 5～15% hydrochloric acid, 8～15% dehydrated potato powders form the polyvinyl formal mixed solution that has than toughness through fully stirring;
(2), prepare a shaking table, on shaking table, install mould, the mould vertical fixing is on shaking table;
(3), the polyvinyl formal mixed solution that will prepare, high-speed stirred limit, limit is fed in the mould, in the process of high-speed stirred and perfusion, sneaks into a large amount of air in the polyvinyl formal mixed solution than toughness and produces a large amount of gas;
(4), the Vibration on Start-up workbench, the vibration frequency and the vibration amplitude of limit adjustment vibrations workbench, the effusion state of limit observation bubble, the bubble of overflowing is big more many more, be best vibration frequency and the vibration amplitude that should set, in inner sleeve 3 perfusion polyvinyl formal mixed solution 8 time, in pouring into kind, form minute bubbles 9, bubble hit in the polyvinyl formal mixed solution is broken and aggregate into air pocket 10. bigger bubbles and in the polyvinyl formal mixed solution, have enough buoyancy air pockets 10, rise to polyvinyl formal mixed solution top, ingress of air and breaking;
(5), the bubble that observes effusion is more and more littler, up to approaching calmness, be the best vibrations time that should set, thereby will remove greater than the bubble of Φ 750 μ m than the polyvinyl formal mixed solution interior diameter of toughness;
(6), place the vapor space of a sealing to make polyvinyl formal mix molten reaction moulding together with mixed serum on mould;
(7), fully cooling back molding. and clean, the polyvinyl formal sponge roller brush of bubble diameter obtained less than Φ 750 μ m.
The bubble diameter that adopts the polyvinyl formal sponge roller brush that the method that is used to make polyvinyl formal sponge roller brush of the present invention makes is for being Φ 20 μ m
750 μ m.
With reference to Fig. 2, Fig. 3, a kind of mould that is used to make the method for polyvinyl formal sponge roller brush of the present invention that is used for is provided, comprise base 1, also comprise the outer sleeve 2 of fixedlying connected with base 1, be set in the inner sleeve 3 on outer sleeve 2 madial walls, be provided with a plug 4 along inner sleeve 3 central axis, fixedly connected with base 1 in the lower end of this plug 4, be evenly equipped with the cone-shaped hole 5 of the tubercle moulding that is used for polyvinyl formal sponge roller brush on inner sleeve 3 madial walls, plug 4 upper ends and inner sleeve 3 upper openings form charging aperture 6, and the shaking table 7 that base 1 is arranged on bottom it is fixedly connected.
The foregoing description is a preferred implementation of the present invention; but embodiments of the present invention are not restricted to the described embodiments; other any do not deviate from change, the modification done under spiritual essence of the present invention and the principle, substitutes, combination, simplify; all should be the substitute mode of equivalence, be included within protection scope of the present invention.
Claims (3)
1. a method that is used to make polyvinyl formal sponge roller brush is characterized in that, may further comprise the steps:
(1), with alcoholysis degree be 99% polyvinyl alcohol water solution, 5～15% formaldehyde,, 5～15% hydrochloric acid, 8～15% dehydrated potato powders form the polyvinyl formal mixed solution that has than toughness through fully stirring;
(2), prepare a shaking table, on shaking table, install mould, the mould vertical fixing is on shaking table;
(3), the polyvinyl formal mixed solution that will prepare, high-speed stirred limit, limit is fed in the mould, in the process of high-speed stirred and perfusion, sneak into a large amount of air in the polyvinyl formal mixed solution than toughness and produce a large amount of bubbles;
(4), Vibration on Start-up workbench, the vibration frequency and the vibration amplitude of limit adjustment vibrations workbench, the effusion state of limit observation bubble, the bubble of overflowing is big more many more, be best vibration frequency and the vibration amplitude that should set, bubble hit in the polyvinyl formal mixed solution is broken and aggregating into air pocket. bigger bubble has enough buoyancy air pockets in the polyvinyl formal mixed solution, rise to polyvinyl formal mixed solution top, ingress of air and breaking;
(5), the bubble that observes effusion is more and more littler, up to approaching calmness, be the best vibrations time that should set, thereby will remove greater than the bubble of Φ 750 μ m than the polyvinyl formal mixed solution interior diameter of toughness;
(6), place the vapor space of a sealing to make polyvinyl formal mix molten reaction moulding together with mixed serum on mould;
(7), fully cooling back molding. and clean, the polyvinyl formal sponge roller brush of bubble diameter obtained less than Φ 750 μ m.
2. a polyvinyl formal sponge roller brush that adopts the described method of claim 1 to make is characterized in that, bubble diameter is for being Φ 20 μ m-750 μ m in the described polyvinyl formal sponge roller brush.
3. mould that adopts the described method of claim 1, comprise base (1), it is characterized in that, also comprise the outer sleeve (2) of fixedlying connected with base (1), be set in the inner sleeve (3) on outer sleeve (2) madial wall, be provided with a plug (4) along inner sleeve (3) central axis, fixedly connected with base (1) in the lower end of this plug (4), be evenly equipped with the cone-shaped hole (5) of the tubercle moulding that is used for polyvinyl formal sponge roller brush on inner sleeve (3) madial wall, plug (4) upper end forms charging aperture (6) with inner sleeve (3) upper opening, and the shaking table (7) that base (1) is arranged on bottom it is fixedly connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010102364A CN101774244A (en) | 2010-01-28 | 2010-01-28 | Method for preparing PVF sponge roller brush |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010102364A CN101774244A (en) | 2010-01-28 | 2010-01-28 | Method for preparing PVF sponge roller brush |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101774244A true CN101774244A (en) | 2010-07-14 |
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ID=42510898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010102364A Pending CN101774244A (en) | 2010-01-28 | 2010-01-28 | Method for preparing PVF sponge roller brush |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105600940A (en) * | 2016-03-18 | 2016-05-25 | 河海大学 | Preparation method and preparation device for self-collapsible type long-acting and sustained release water quality purifying filler brick |
| CN110509503A (en) * | 2019-09-09 | 2019-11-29 | 李杰鹏 | Injection mold for pipeline production |
-
2010
- 2010-01-28 CN CN201010102364A patent/CN101774244A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105600940A (en) * | 2016-03-18 | 2016-05-25 | 河海大学 | Preparation method and preparation device for self-collapsible type long-acting and sustained release water quality purifying filler brick |
| CN105600940B (en) * | 2016-03-18 | 2018-01-30 | 河海大学 | From the preparation method and preparation facilities of defeated and dispersed type long-acting slow-release purification of water quality filler brick |
| CN110509503A (en) * | 2019-09-09 | 2019-11-29 | 李杰鹏 | Injection mold for pipeline production |
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Application publication date: 20100714 |