CN101750027A - Three-dimensional appearance detection device - Google Patents

Abstract

The invention provides a three-dimensional shape detection device, which comprises at least two optical detection devices and an inclination angle adjusting mechanism. The inclination angle adjusting mechanism is used for mounting at least two optical detection devices thereon so as to adjust the inclination angle of the optical detection devices. When the inclination angles of the at least two optical detection devices are changed, the focuses of the at least two optical detection devices are maintained at the same position, and the object to be detected is located within the field range of the at least two optical detection devices. And after the at least two optical detection devices capture the image data and reconstruct the image, the three-dimensional shape of the object to be detected can be obtained.

Description

Three-dimensional shape detection device

technical field

The invention relates to an optical detection device, in particular to a three-dimensional shape detection device.

Background technique

Precise shape detection is a very important part of modern technology. When many components are gradually miniaturized, accurate and reliable detection technology is needed to verify the accuracy of their microstructure size or shape, so as to control the quality and manufacturing process. Among them, the measurement technology using optical non-contact detection method can obtain accurate shape data of the surface of the object to be measured in a non-destructive manner, and has been widely used in various industries.

Referring to Fig. 1, when the slope of the topographical surface of the object to be measured 12 is relatively large, the magnification of the objective lens commonly used in the optical microscope 11 is less than 20 times, and the numerical aperture in this interval is too small, which will cause the reflected light 13 on the surface of the object to be measured 12 to fail. Entering the optical microscope 11, the surface topography data of the object to be measured cannot be obtained. Therefore, the numerical interpolation method can only be used to supplement the missing shape data, but the actual shape size and roughness data cannot be measured.

Taiwan Patent TW1229186 uses a dual-view linear scanning device with an oblique light source to detect the approximate shape and size of defects. The main advantage is that it can detect large-area defects faster and determine whether the defects are protrusions or depressions. However, it is impossible to accurately measure the three-dimensional shape size of the microstructure, and it does not solve the problem that the surface signal cannot be captured when the surface slope of the shape of the object to be measured is large.

U.S. Patent No. 6,449,048 utilizes the interferometer to be tilted at an angle, which is not perpendicular to the traverse direction of the object to be measured, and can directly use the traditional vertical scanning interferometer (VSI) and phase shift interferometer (PSI) hardware to continuously scan the surface of the object to be measured. Obtain the surface topography of the object under test without using image stitching technology. However, it still fails to solve the problem of obtaining the omni-directional angular topography when the surface slope of the topography of the object to be tested is large.

QED Technology has developed a method of tilting and rotating the object to be measured to obtain surface topography data with a larger slope of the object to be measured on a larger surface. However, this method is limited to smaller samples to be tested. If the sample to be tested is too large to match the tilt, it cannot be used.

Contents of the invention

The invention aims at the cutting, embossing, grinding, and nano-processing industries of advanced manufacturing technology, and develops the common advanced detection and verification core technology of microstructure surface topography size, large-stroke nano-analysis, and high-speed measurement required by precision machinery. The invention proposes a three-dimensional shape detection device, which can effectively overcome the problem that when the surface slope of the shape of the object to be measured is relatively large, the reflected light signal on the surface of the object to be measured cannot enter the microscope, and the surface shape data of the object to be measured cannot be obtained. Whether it is a regular simple microstructure or a complex microstructure, the invention can be used to detect the microstructure, which can reach nanoscale applications.

A three-dimensional shape detection device according to an embodiment of the present invention includes at least two optical detection devices and an inclination angle adjustment mechanism. The inclination angle adjustment mechanism erects at least two optical detection devices on it to adjust the inclination angle of the optical detection devices. When the inclination angles of the at least two optical detection devices are changed, the focal points of the at least two optical detection devices are maintained at the same position (or the same focal plane), and the object to be measured is located in the field of view (Field of view) of the at least two optical detection devices )Inside. After the image data captured by the at least two optical detection devices is reconstructed, the three-dimensional shape of the object under test can be obtained.

The present invention utilizes an inclined optical detection framework to obtain surface topography data with a large slope, and can be applied to the situation where the sample to be tested is inconvenient to incline. In addition, the present invention uses the tilt angle adjustment structure to adjust the image detection device to any angle to obtain the image of the object to be tested and reconstruct the three-dimensional shape; and can detect the size of the microstructure and the size of the surface of the object to be measured.

Description of drawings

Fig. 1 is a schematic diagram showing an existing three-dimensional shape detection device;

2 to 4 are schematic diagrams showing a three-dimensional shape detection device according to an embodiment of the present invention;

5 and 6 are conceptual diagrams showing the three-dimensional shape detection device of the present invention.

Description of main component symbols:

11 Optical microscope 12 Object to be tested

13 reflected light

20 Three-dimensional shape detection device 21 Optical detection device

22 Optical detection device 23 Arc track

25 Hub 26 Object to be tested

27 Rotating platform 28 Moving platform

30 Motor 31 Lead screw

43 connecting shaft 44 connecting shaft

50 Three-dimensional shape detection device 51 Optical detection device

52 Optical detection device 53 Tilt angle adjustment device

55 Object to be tested 60 Three-dimensional shape detection device

61 Direction angle adjustment mechanism

Detailed ways

The implementation method of the three-dimensional shape detection system framework provided by the present invention will be illustrated as follows with reference to the accompanying drawings, but the implementation is only for illustration and not for limitation.

As shown in FIG. 2 , the three-dimensional shape detection device 20 mainly includes two optical detection devices 21 and 22 , which are located on two sides of an arc track 23 . The optical detection device 21 utilizes the hinge 25 to slide on the arc track 23, and the optical detection device 22 also utilizes the hinge (its setting position is similar to the position of the hinge 25 relative to the optical detection device 21, but it is just blocked by the optical detection system 22 and not seen in the Among the figure) slide in arc track 23. The arc track 23 is integrally formed and has good rigidity, which can improve the precision of the moving position of the optical detection devices 21 and 22 .

The inclination angles of the optical detection devices 21 and 22 can be adjusted according to the path of the arc track 23 , that is, the arc track 23 is a tilt angle adjustment mechanism. The arc center of the arc track 23 is the focus imaging point of the optical detection devices 21 and 22, when the inclination angle of the optical detection devices 21 and 22 is changed, the focus of the optical detection devices 21 and 22 is maintained at the same position (same focal plane) at any time. ). In addition, in order to make the position of the object under test 26 fall within the field of view of the optical detection devices 21 and 22, or to obtain an omnidirectional image of the object under test 26, the rotating platform 27 and the moving platform of the object under test can be used to 28 to assist in completing the imaging work.

The optical detection devices 21 and 22 are respectively tilted at a fixed angle to take images once. The size of the fixed angle depends on the surface slope of the object under test 26, and then the images obtained are stitched together by software to reconstruct the shape of the object under test 26. appearance. In addition, depending on the complexity of the shape and structure of the object under test 26, whether it is necessary to add a rotating platform 27 and a moving platform 28 for the object under test 26 to change different viewing angles or detection positions to obtain a three-dimensional topography image at all angles.

The actual application of the above-mentioned three-dimensional shape detection device 20 can be the structure shown in FIG. 3 and FIG. 4 , wherein FIG. 3 shows a three-dimensional structure, and FIG. 4 is a side view. Rotate the lead screw 31 via two sets of stepping motors 30, and move the connection shafts 43 and 44 connected to the optical detection devices 21 and 22, so that the hub 25 (the other hub is not shown in the figure) of each optical detection device 21 and 22 can be Sliding on the arc track 23. Then the images respectively obtained by the optical detection devices 21 and 22 can be stitched together by software to reconstruct the shape of the object under test. In addition, depending on the complexity of the shape and structure of the object to be tested, it is determined whether the rotation of the object to be tested and the moving platform are required to change different viewing angles or detection positions to obtain a three-dimensional image of the shape in all directions.

In practical applications, the above-mentioned embodiments are not limited, and the arc track can also be replaced by other tilt angle adjustment mechanisms, such as linkage mechanism, X-Y plane displacement platform, rotating platform and other achievable mechanisms. The optical detection devices 21 and 22 include optical microscopes, interferometers, and the like.

In summary, the concept of the present invention is shown in FIG. 5 , a three-dimensional shape detection device 50 includes two optical detection devices 51 , 52 and an inclination angle adjustment mechanism 53 . The optical detection devices 51, 52 use the tilt angle adjustment mechanism 53 to adjust the tilt angle position, so that when the tilt angles of the optical detection devices 51 and 52 are changed, their focal points are still kept at the same position (same focal plane) at any time, so as to focus on the object to be measured. 55 for shape detection. The three-dimensional shape detection device 50 can be applied to detect regular and simple microstructures, such as the brightness enhancement film (BEF) in the backlight module and the like.

If it is necessary to detect complex structures such as curved surfaces or cones, the detection of complex microstructures cannot be completed by relying on two sets of optical detection devices and tilt angle adjustment mechanisms alone, but it needs to be equipped with a mechanism that can adjust the direction angle of the object detection work. Referring to FIG. 6, a three-dimensional shape detection device 60 includes, in addition to two optical detection devices 51, 52 and an inclination angle adjustment mechanism 53, an object orientation angle adjustment mechanism 61, which may include, for example, the The rotary platform 27 and the mobile platform 28.

In a word, the present invention utilizes a tilting optical detection framework to obtain surface topography data with a large slope, and can be applied to situations where the sample to be tested is inconvenient to tilt. In addition, the present invention uses the tilt angle adjustment structure to adjust the image detection device to any angle to obtain the image of the object to be tested and reconstruct the three-dimensional shape; and can detect the size of the microstructure and the size of the surface of the object to be measured.

In terms of application, for example, the roller core processing machine used in the backlight module of the flat panel display industry can directly detect the processing accuracy on the processing machine after the processing is completed, without unloading the workpiece for inspection. If the processing accuracy is detected to be insufficient, then It can save time and improve efficiency by avoiding the trouble of positioning and processing on the machine again. Another example is that it can be applied to microstructure detection and optical component morphology detection in the semiconductor industry, flat panel display industry, and optical component industry. The present invention can be used in the framework of the microscope bracket to detect the three micro-topography of the microstructure of the sample to be tested, especially to overcome the problem of surface detection with a large slope; or to detect the object to be measured with a larger surface (such as an aspheric mirror) The shape and size of the machine can accurately grasp the product quality and improve the process efficiency.

The technical content and technical features of the present invention have been disclosed above, but those skilled in the art may still make various replacements and modifications based on the teachings of the present invention without departing from the spirit of the present invention. Therefore, the protection scope of the present invention should not be limited to the disclosure of the implementation examples, but should include various replacements and modifications that do not depart from the present invention, and are covered by the scope of the claims.

Claims (10)

1. a detector for three-dimensional appearance is characterized in that, comprises:

At least two optical detection apparatuss;

One bevel angle adjustment mechanism sets up this two optical detection apparatus on it at least, to adjust the angle of inclination of this at least two optical detection apparatus;

Wherein when the angle of inclination of this at least two optical detection apparatus changed, the focus of this at least two optical detection apparatus maintained same position, and makes determinand be positioned at the field range of this at least two optical detection apparatus.

2. detector for three-dimensional appearance according to claim 1 is characterized in that: this bevel angle adjustment mechanism is an arc orbit.

3. detector for three-dimensional appearance according to claim 2, it is characterized in that: this at least two optical detection apparatus is provided with hinge, and utilize this hinge to make this at least two optical detection apparatus on arc orbit, move, to adjust the angle of inclination of this optical detection apparatus.

4. detector for three-dimensional appearance according to claim 2 is characterized in that: this arc orbit is formed in one.

5. detector for three-dimensional appearance according to claim 1 is characterized in that: this bevel angle adjustment mechanism is linkage assembly, X-Y plane displacement platform or rotation platform.

6. detector for three-dimensional appearance according to claim 1 is characterized in that: other comprises the deflection adjusting mechanism, to adjust the orientation angle of this determinand.

7. detector for three-dimensional appearance according to claim 6 is characterized in that: this deflection adjusting mechanism comprises a mobile platform and a rotation platform.

8. detector for three-dimensional appearance according to claim 1 is characterized in that: this at least two optical detection apparatus respectively arrange in pairs or groups one group of motor, lead screw and coupling shaft, and to drive moving of this at least two optical detection apparatus.

9. detector for three-dimensional appearance according to claim 1 is characterized in that: this optical detection apparatus comprises optical microscope, interferometer.

10. detector for three-dimensional appearance according to claim 1 is characterized in that: the focus of this optical detection apparatus maintains same focal plane.

Images