CN101746091A - Composite coating for abrasion-resistance and anti-corrosion treatments on surface of machine components and preparation method - Google Patents
Composite coating for abrasion-resistance and anti-corrosion treatments on surface of machine components and preparation method Download PDFInfo
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- CN101746091A CN101746091A CN200910185994A CN200910185994A CN101746091A CN 101746091 A CN101746091 A CN 101746091A CN 200910185994 A CN200910185994 A CN 200910185994A CN 200910185994 A CN200910185994 A CN 200910185994A CN 101746091 A CN101746091 A CN 101746091A
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Abstract
The invention discloses a composite coating for abrasion-resistance and anti-corrosion treatments on the surface of machine components and a preparation method thereof, which is characterized in that: the composite coating has a double layer structure, the surface layer of the double layer structure is a function layer, and a transition layer is arranged between the function layer and the surface of a component; the transition layer is a pure metal layer such as Cr layer, Ti layer or Ni layer; the function layer is a carbide layer MC, a nitride layer MN or a carbonitride layer MNC, wherein M is transition metal such as Ti, Al, Zr or Mo. The invention prepares the composite coating on the surface of the machine components under the requirements of abrasion-resistance and anti-corrosion by an unbalanced magnetron sputtering method of the physical vapor deposition. The composite coating has better performance in comparison with electrodeposited hard chromium, and has remarkable advantage in environment protection.
Description
Technical field
The present invention relates to a kind of composite coating that is applied in the component of machine surface with wear-resisting, corrosion-resistant requirement and preparation method thereof, it is wear-resistant, the decay resistance of the piece surface of material that this composite coating is used to improve with steel, non-ferrous metal, cast iron etc.
Background technology
With the parts that metal material processing such as steel, non-ferrous metal, cast iron form, be the chief component of industrial equipment, instrument, mould.Along with economic development and continuous advancement in technology, to the surface property of various components of machine, requirement especially corrosion-resistant, abrasion resistance properties is more and more higher.Tradition is to adopt electro-deposition method to be coated with hard chrome, Ni at piece surface, or adopts surface heat-treatment process that piece surface is handled, the performance requirement that has satisfied part of these method parts, but there is following shortcoming:
1, seriously polluted, the especially pollution that electrodeposition technology caused;
2, under abominable service condition, easily lost efficacy, as in parts such as piston rod, piston ring, easy to crack under the hard chromium high load condition, come off.
3, can't adapt to complicated service condition, as: under the high-temperature oxydation condition, under the high capacity, stack occasion such as corrosion-resistant, traditional hard chrome is coated with, surface heat is handled and often can't be met the demands.
For these reasons, the searching cost is lower, functional characteristics outstanding, the strong and environment friendly and pollution-free surface treatment method of adaptability is the striving direction of scientific research and industrial quarters always.
Summary of the invention
The present invention is for avoiding above-mentioned existing in prior technology weak point, provide a kind of composite coating and preparation method who is used for component of machine surface abrasion resistance damage, corrosion-resistance treatment, in the hope of the advantage that all can obtain to give prominence on the environmental-protecting performance in production cost, product function and production process.
Technical solution problem of the present invention adopts following technical scheme:
The present invention is used for the composite coating of component of machine surface abrasion resistance damage, corrosion-resistance treatment, it is characterized in that:
Described composite coating is a double-decker, and the top layer in the described double-decker is a functional layer, is transition zone between functional layer and component surface;
Described transition zone is the simple metal layer, and described simple metal layer is Cr metal level, Ti metal level or Ni metal level;
Described functional layer is carbide lamella MC, nitride layer MN or carbonitride layer MNC, and described M is transition metal Ti, Al, Zr or Mo.
The characteristics that the present invention is used for the composite coating of component of machine surface abrasion resistance damage, corrosion-resistance treatment also are:
The thickness of described transition zone is 0.1 μ m~1 μ m.
The thickness of described functional layer is 0.5 μ m~10 μ m.
The characteristics that the present invention is used for the preparation method of composite coating of component of machine surface abrasion resistance damage, corrosion-resistance treatment are to adopt non-balance magnetically controlled sputter method to be prepared according to the following steps:
A, workpiece through deoil, anti-dandruff, and after cleaning with ultrasonic wave, oven dry places the vacuum chamber of non-balance magnetically controlled sputter filming equipment again;
B, the vacuum system of opening non-balance magnetically controlled sputter equipment make vacuum indoor pressure not be higher than 1 * 10 by vacuumizing
-3Pa;
C, with workpiece be heated to 200 ℃~500 ℃ the insulation 30 minutes; In insulating process, workpiece is carried out plasma clean;
D, use Ar gas utilize non-balance magnetically controlled sputter method to prepare transition zone as working gas, and described transition zone is Cr layer, Ti layer or Ni layer;
E, use Ar gas feed N as working gas
2Or C
2H
2Gas prepares functional layer as reacting gas;
F, parts are cooled in 100 ℃ with stove, take out to get final product.
Compared with the prior art, beneficial effect of the present invention is embodied in:
1, nitride, carbide, carbonitride and the metallic substrates adhesion of physical vapour deposition (PVD) preparation are relatively poor, and use of the present invention and component of machine metal material, functional layer film material all have the metallic film of good combination performance as transition zone.Transition zone can improve the combination on rete integral body and component of machine surface on the one hand, also can improve the decay resistance of component of machine on the other hand.
The zone that directly contacts with external environment when 2, functional layer is on active service as component of machine, performance requirement are tending towards variation.The present invention according to different environments for use, uses carbide MC, nitride MN or carbonitride MNC as film material in conjunction with magnesium-yttrium-transition metal compound good mechanical performance and decay resistance respectively.
3, the non-balance magnetically controlled sputter method among the physical vapour deposition (PVD) PVD is used in the preparation of composite coating of the present invention.In preparation process, parts integral body " is immersed " in plasma glow discharge zone, can realize the plasma clean to parts, and can improve the density of film.In addition, because intrinsic " low temperature ", " at a high speed " characteristics of magnetically controlled sputter method, composite coating involved in the present invention and preparation method can not influence the original mechanical property of parts itself.
Below by the specific embodiment, the present invention is further described.
The specific embodiment
Embodiment 1:
Substitute the application of electro-deposition hard chromium in hydraulic stem, according to the following procedure operation:
1, utilize ultrasonic cleaning equipment that hydraulic stem is cleaned, dries after, place on the work rest in the non-balance magnetically controlled sputter device;
2, vacuum system work, making vacuum indoor pressure is 1 * 10
-3Pa;
3, the hydraulic pressure rod member is heated to 200 ℃ and be incubated 0.5 hour, insulation utilizes plasma clean that rod member is further cleaned simultaneously;
4, feed argon gas in vacuum chamber, vacuum chamber pressure is adjusted to 0.1~1Pa, utilizes the non-balance magnetically controlled sputter source, uses Cr as target, deposition Cr film 0.2 μ m;
5, feed nitrogen and argon gas in vacuum chamber, vacuum chamber pressure remains unchanged, and utilizes non-balance magnetically controlled sputter, at Ar: N
2Volume flow ratio be to be coated with CrN film 6 μ m under 2: 1 the condition;
6, stop plated film, rod member is cooled in 100 ℃ with stove, take out and promptly finish.
Embodiment 2:
Substituting surperficial heat treatment technics is application in the drift in diel, operation according to the following procedure:
1, utilize ultrasonic cleaning equipment that drift is cleaned, dries after, place on the work rest in the non-balance magnetically controlled sputter device;
2, vacuum system work and to make vacuum indoor pressure be 1 * 10
-3Pa;
3, drift is heated to 200 ℃ and be incubated 0.5 hour, insulation utilizes plasma clean that drift is further cleaned simultaneously;
4, feed argon gas in vacuum chamber, vacuum chamber pressure is adjusted to 0.1~1Pa, utilizes non-balance magnetically controlled sputter source deposition Cr film 0.1 μ m;
5, feed nitrogen and argon gas in vacuum chamber, vacuum chamber pressure remains unchanged, and utilizes non-balance magnetically controlled sputter, adopts Al and Cr target, at Ar: N
2Volume flow ratio is condition under to be coated with CrAlN film 4 μ m at 2: 1;
6, stop plated film, drift is cooled in 100 ℃ with stove, take out and promptly finish.
Claims (4)
1. be used for the composite coating of component of machine surface abrasion resistance damage, corrosion-resistance treatment, it is characterized in that:
Described composite coating is a double-decker, and the top layer in the described double-decker is a functional layer, is transition zone between functional layer and component surface;
Described transition zone is the simple metal layer, and described simple metal layer is Cr metal level, Ti metal level or Ni metal level;
Described functional layer is carbide lamella MC, nitride layer MN or carbonitride layer MNC, and described M is transition metal Ti, Al, Zr or Mo.
2. the composite coating that is used for component of machine surface abrasion resistance damage, corrosion-resistance treatment according to claim 1, the thickness that it is characterized in that described transition zone is 0.1 μ m~1 μ m.
3. the composite coating that is used for component of machine surface abrasion resistance damage, corrosion-resistance treatment according to claim 1, the thickness that it is characterized in that described functional layer is 0.5 μ m~10 μ m.
4. a claim 1 is described is used for that the component of machine surface abrasion resistance decreases, the preparation method of the composite coating of corrosion-resistance treatment, it is characterized in that adopting non-balance magnetically controlled sputter method to be prepared according to the following steps:
A, workpiece through deoil, anti-dandruff, and after cleaning with ultrasonic wave, oven dry places the vacuum chamber of non-balance magnetically controlled sputter filming equipment again;
B, the vacuum system of opening non-balance magnetically controlled sputter equipment make vacuum indoor pressure not be higher than 1 * 10 by vacuumizing
-3Pa;
C, with workpiece be heated to 200 ℃~500 ℃ the insulation 30 minutes; In insulating process, workpiece is carried out plasma clean;
D, use Ar gas utilize non-balance magnetically controlled sputter method to prepare transition zone as working gas, and described transition zone is Cr layer, Ti layer or Ni layer;
E, use Ar gas feed N as working gas
2Or C
2H
2Gas prepares functional layer as reacting gas;
F, parts are cooled in 100 ℃ with stove, take out to get final product.
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CN200910185994A CN101746091A (en) | 2009-12-17 | 2009-12-17 | Composite coating for abrasion-resistance and anti-corrosion treatments on surface of machine components and preparation method |
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CN200910185994A CN101746091A (en) | 2009-12-17 | 2009-12-17 | Composite coating for abrasion-resistance and anti-corrosion treatments on surface of machine components and preparation method |
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CN102595833A (en) * | 2011-01-05 | 2012-07-18 | 鸿富锦精密工业(深圳)有限公司 | Aluminum or aluminum alloy shell and manufacturing method thereof |
CN102605318A (en) * | 2011-01-19 | 2012-07-25 | 鸿富锦精密工业(深圳)有限公司 | Aluminum or aluminum alloy shell and method for manufacturing same |
CN102650052A (en) * | 2011-02-28 | 2012-08-29 | 鸿富锦精密工业(深圳)有限公司 | Aluminum or aluminum alloy shell and method for producing same |
CN103290358A (en) * | 2013-06-18 | 2013-09-11 | 合肥力恒液压系统有限公司 | Antiwear and anticorrosion composite coating for mechanical part surface, and preparation method thereof |
CN104149415A (en) * | 2014-08-19 | 2014-11-19 | 中国科学院长春应用化学研究所 | Rare earth magnesium alloy and preparation method thereof |
CN104233185A (en) * | 2014-08-21 | 2014-12-24 | 中国人民解放军空军工程大学 | Integral integrating method of sensing element and metal substrate based on PVD |
CN104325738A (en) * | 2014-10-20 | 2015-02-04 | 辽宁科技大学 | Hard coating of cold-rolling disc flying shear and preparation method of hard coating |
CN104480443A (en) * | 2014-12-08 | 2015-04-01 | 中国人民解放军装甲兵工程学院 | Hard and tough nano composite ZrAlCuN coating and preparation method thereof |
CN105039921A (en) * | 2015-06-10 | 2015-11-11 | 上海大学 | Rigid PVD repairing plated layer of piston-rod surface in remanufacturing process, and preparation method of rigid PVD repairing plated layer |
CN107587108A (en) * | 2017-08-09 | 2018-01-16 | 广东欧珀移动通信有限公司 | The processing method of terminal, the housing of terminal and housing |
CN111916588A (en) * | 2020-08-31 | 2020-11-10 | 惠州亿纬锂能股份有限公司 | Cap and battery with same |
RU2822279C1 (en) * | 2024-01-09 | 2024-07-03 | федеральное государственное автономное образовательное учреждение высшего образования "Пермский национальный исследовательский политехнический университет" | Method of producing wear-resistant multilayer coating for high-speed processing |
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2009
- 2009-12-17 CN CN200910185994A patent/CN101746091A/en active Pending
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102595833A (en) * | 2011-01-05 | 2012-07-18 | 鸿富锦精密工业(深圳)有限公司 | Aluminum or aluminum alloy shell and manufacturing method thereof |
CN102605318A (en) * | 2011-01-19 | 2012-07-25 | 鸿富锦精密工业(深圳)有限公司 | Aluminum or aluminum alloy shell and method for manufacturing same |
CN102650052A (en) * | 2011-02-28 | 2012-08-29 | 鸿富锦精密工业(深圳)有限公司 | Aluminum or aluminum alloy shell and method for producing same |
CN103290358A (en) * | 2013-06-18 | 2013-09-11 | 合肥力恒液压系统有限公司 | Antiwear and anticorrosion composite coating for mechanical part surface, and preparation method thereof |
CN104149415A (en) * | 2014-08-19 | 2014-11-19 | 中国科学院长春应用化学研究所 | Rare earth magnesium alloy and preparation method thereof |
CN104233185A (en) * | 2014-08-21 | 2014-12-24 | 中国人民解放军空军工程大学 | Integral integrating method of sensing element and metal substrate based on PVD |
CN104325738A (en) * | 2014-10-20 | 2015-02-04 | 辽宁科技大学 | Hard coating of cold-rolling disc flying shear and preparation method of hard coating |
CN104480443A (en) * | 2014-12-08 | 2015-04-01 | 中国人民解放军装甲兵工程学院 | Hard and tough nano composite ZrAlCuN coating and preparation method thereof |
CN104480443B (en) * | 2014-12-08 | 2017-06-13 | 中国人民解放军装甲兵工程学院 | A kind of hard tough nano combined ZrAlCuN coatings and preparation method thereof |
CN105039921A (en) * | 2015-06-10 | 2015-11-11 | 上海大学 | Rigid PVD repairing plated layer of piston-rod surface in remanufacturing process, and preparation method of rigid PVD repairing plated layer |
CN107587108A (en) * | 2017-08-09 | 2018-01-16 | 广东欧珀移动通信有限公司 | The processing method of terminal, the housing of terminal and housing |
CN111916588A (en) * | 2020-08-31 | 2020-11-10 | 惠州亿纬锂能股份有限公司 | Cap and battery with same |
RU2822279C1 (en) * | 2024-01-09 | 2024-07-03 | федеральное государственное автономное образовательное учреждение высшего образования "Пермский национальный исследовательский политехнический университет" | Method of producing wear-resistant multilayer coating for high-speed processing |
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Application publication date: 20100623 |