CN101607376A - Substrate end-face grinder and grind judgment method - Google Patents
Substrate end-face grinder and grind judgment method Download PDFInfo
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- CN101607376A CN101607376A CNA2009101491438A CN200910149143A CN101607376A CN 101607376 A CN101607376 A CN 101607376A CN A2009101491438 A CNA2009101491438 A CN A2009101491438A CN 200910149143 A CN200910149143 A CN 200910149143A CN 101607376 A CN101607376 A CN 101607376A
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- abrasive wheel
- face
- load current
- substrate end
- attrition process
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
- B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
- B23Q15/007—Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
- B23Q15/12—Adaptive control, i.e. adjusting itself to have a performance which is optimum according to a preassigned criterion
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
The object of the present invention is to provide a kind of wear grooves degree of depth with abrasive wheel to introduce to revise key element, whether good reliability is high and adapt to the substrate end-face grinder of control, and the grinding of substrate end-face decision method.Substrate end-face grinder is characterised in that and comprises: substrate end-face is carried out the abrasive wheel of attrition process, the rotary drive assembly of this abrasive wheel and the incision inlet assembly of described abrasive wheel; The rotary drive assembly of abrasive wheel has: the correction assembly that utilizes the load current that the load current detection components of substrate end-face contact and the groove contacts side surfaces by the wear grooves that produces at abrasive wheel produce in substrate.
Description
Technical field
The present invention relates to grind the abrasive working appts of glass substrate end face such as crystal liquid substrate and judge and grind the whether good decision method of fine finishining.
Background technology
In the glass substrate that in crystal liquid substrate etc., uses, owing to have small concavo-convex and crackle at the cut-out end face, therefore for by being that mirror-like reaches generation that suppresses dust and the purpose that improves end face intensity with other end face fine finishining beyond the chamfering of crest line portion, implement attrition process.
To be the abrasive wheel that mirror-like is used as the end surface grinding of the hard-brittle material of glass substrate, use diamond abrasive grain, silicon carbide abrasive particles, CBN (cubic boron nitride) abrasive particle or cerium oxide abrasive particle, but, be preferably circumference rubber-like abrasive wheel for the fine crack that prevents abradant surface and cut etc.
For example, potting resin in fiber, and in this resin, disperse abrasive particle to use as abrasive wheel.
But, if come the end face of attrition process glass substrate with this rubber-like abrasive wheel, then have amalgamation when the incision substrate end-face, though be finish-machined to the mirror-like that suppresses fine crack, the outer peripheral face owing to the increase of attrition process number at abrasive wheel produces wear grooves.
If form wear grooves at the abrasive wheel outer peripheral face, the scope of the abrasive wheel that contacts with the end face of glass substrate then is not only the end face of glass substrate, also can expand the surface and the back side of cover glass substrate to shown in 1c, the 1d of Fig. 2 (b).
That is, the groove side that is formed at the wear grooves of abrasive wheel contacts with the surface of covered substrate and the mode at the back side, and is owing to the contact range (contact area) with abrasive wheel enlarges, big thereby contact impedance becomes.
At present, in the attrition process that the abrasive wheel by the glass substrate end face carries out, by the load current value and the predefined load current value of the abrasive wheel drive motor of abrasive wheel when the glass substrate end face contacts, control the attrition process of glass substrate end face.
For example, schematically represent as Fig. 7, before the production of glass substrate begins, load current value is set at respectively, load lower limit: LL, load proper range value: L～H, load higher limit HH, meet which setting range by the load current value of measuring, control the sendout of the abrasive wheel that contacts with the glass substrate end face.
In this control method, if the load current value of measuring in attrition process attrition process when for example L shown in (a)～H is normally carried out, and the contact pressure of abrasive wheel also is judged as suitably, and abrasive wheel continues to keep to the sendout of glass substrate end face.
In addition, if load current value when H～HH scope, abrasive wheel is judged as surplus to the contact pressure of glass substrate end face, the position of abrasive wheel is retreated (leaving from the glass substrate end face).Also have, if load current value when L～LL scope, abrasive wheel is judged as deficiency to the contact pressure of glass substrate, is advanced in the position of abrasive wheel (approaching to the glass substrate end face).Also have, load current value is judged as superfluously or insufficient on the HH or under LL the time, and attrition process is stopped.
But, in above-mentioned existing method, because in the judgement of the sendout of abrasive wheel, the value that only departs from initial L～H scope in the attrition process of glass substrate end face before is fed, so have the sendout and the actual inconsistent problem of polishing progress of abrasive wheel.For example, since once or exceptional value repeatedly and load current value under the situation that L～the H scope departs from, even in fact normally grind, but exceptional value once or initial exceptional value preferentially be fed, and abrasive wheel is unnecessarily advanced or retreats.For example, shown in (b), after grinding has just begun, load current value is in HH～H scope, load current value is under the situation of LL～L scope before grinding end just, the contact pressure that is actually abrasive wheel is low state, but the value of initial HH～H scope preferentially is fed and abrasive wheel is retreated.
In addition, in above-mentioned existing control method, because the setting of HH, H～L, LL is that the abrasive wheel setting state before in advance glass substrate production being begun is a benchmark, so owing to work continuously, have the inconsistent problem of load current under the state that the groove with abrasive wheel deepens.For example, through the abrasive wheel of a certain amount of glass substrate attrition process, compare groove during with the production beginning and deepen, because the increase of the contact area of coverage rate and glass substrate, load current also increases.
Therefore, also keep sendout or abrasive wheel retreats, have the problem that end surface grinding glass substrate insufficient or that do not have comprehensively to grind is sent to next procedure even in fact the contact pressure of abrasive wheel is insufficient.
In addition for example, owing to judging that by the contact area increase of coverage rate and glass substrate load current is under the exceptional value situation of (this situation surpasses the HH value), control in the mode that gives the alarm and stop the attrition process production line, so do not have exceptional value originally (this situation is overmastication) also stops the problem of production line even have.
When handling the problem of coverage rate, have in working continuously when a certain amount of ends of the attrition process of glass substrate, according to separately experience change setting, the situation of operating efficiency reduction occurs by each operator.
In so existing method, except the few goods of the goods that grind or amount of grinding or the problems such as wearing and tearing quickening, lifetime of big, the abrasive wheel of amount of grinding on the contrary also can appear not having fully in the problems referred to above.
The technology of adjusting cutting speed according to the power value of grinding stone drive motor is disclosed in the patent documentation 1,2, the mean value that discloses the processing load of calculating processing final quotation in the patent document 3 is revised the technology of approach, and these groove depth that all do not have to be formed at abrasive wheel are reflected on the approach.
Patent document 1: TOHKEMY 2004-122259 communique
Patent document 2: Japanese kokai publication hei 7-171742 communique
Patent document 3: TOHKEMY 2003-25149 number
Summary of the invention
The problem that invention will solve
The object of the present invention is to provide a kind of wear grooves degree of depth with abrasive wheel to introduce to revise key element, whether good reliability is high and adapt to the substrate end-face grinder of control, and the grinding of substrate end-face decision method.
The technical scheme of dealing with problems
The present invention relates to a kind of substrate end-face grinder, it is characterized in that comprising: the incision inlet assembly of the abrasive wheel of attrition process substrate end-face, the rotary drive assembly of this abrasive wheel, this abrasive wheel.The rotary drive assembly of abrasive wheel has: the correction assembly that utilizes the load current that the load current detection components of substrate end-face contact, the groove contacts side surfaces by the wear grooves that produces at abrasive wheel produce in substrate.
In addition, also can have comparing component, this comparing component is based on comparing by detected load current of above-mentioned load current detection components and suitable bound electric current, and the incision inlet assembly of abrasive wheel has based on what adjust sendout with the comparative result of this suitable bound electric current sends the adjustment assembly.
Here, be object with the brittle base of hard, representative is glass substrate.
Abrasive wheel is discoid rotary body, and the circumference that constitutes its periphery has abrasive particle.
Keep the method for abrasive particle that the whole bag of tricks is arranged, the present invention is that circumference is made of the rubber-like material, in this material, contain under the situation of grinding abrasive particle and have effect, be specially adapted to contain in the circumference fiberfill fibers by abrasive wheel the use of the abrasive wheel that the resin that grinds abrasive particle makes.
The invention still further relates to a kind of decision method of substrate end-face attrition process, it is characterized in that comprising: substrate end-face is carried out the rotary drive assembly of the abrasive wheel of attrition process, above-mentioned abrasive wheel and the incision inlet assembly of above-mentioned abrasive wheel; The rotary drive assembly of above-mentioned abrasive wheel has the load current detection components of utilizing the substrate end-face contact; Follow the attrition process number at this decision method, form wear grooves at above-mentioned abrasive wheel, groove side by above-mentioned wear grooves is contacted the load current that produces with the corrugated surface of substrate contacts partly to be revised, and set the upper and lower bound of suitable load current, thereby the load current when by the detected attrition process of above-mentioned load current detection components is in above-mentioned bound the time, and the judgement substrate is certified products.
The effect of invention
In the present invention, increase along with attrition process quantity, by the wear grooves of paying attention to forming at the abrasive wheel outer peripheral face, the abrasive wheel that groove side flute profile contact substrate is surperficial and the back side causes that adds owing to wear grooves increases part as correction value to the load current of rotary driving motor, and set the upper limit and the lower limit of load current, thus attrition process whether good judgement come right and easily.
In addition, unnecessarily become many owing to suppressed the incision sendout of abrasive wheel, thus the life-span that is expected to improve abrasive wheel.
Also have, the number of times that stops of machining production line reduces, and has improved production performance.
Description of drawings
Fig. 1 represents the control flow chart that the present invention relates to.
Fig. 2 represents the control system of abrasive wheel and the variation of wearing and tearing.
Fig. 3 represents the load current legend.
Fig. 4 represents the outward appearance oblique view of lapping device.
Fig. 5 represents the drive division of abrasive wheel.
Fig. 6 represents the drive division and the profile thereof of abrasive wheel.
Fig. 7 represents the decision method that existing attrition process is whether good.
Symbol description
10 abrasive wheels
14 slot parts
The specific embodiment
Embodiments of the present invention are described below with reference to the accompanying drawings.
Fig. 4 represents the outward appearance oblique view of the lapping device that the present invention relates to, and Fig. 5 represents the grinding mechanism part.
Fig. 6 represents to take off the state of lid 14 of abrasive wheel and the profile of A-A line direction.
As shown in Figure 4, in the present embodiment, a pair of rotary driving motor 20a, 20b are set, they are by (X-axis, Z axle), (U axle, W axle) Position Control, thereby can carry out attrition process simultaneously at the both sides of glass substrate end face, but are not limited in this mode.
In addition, schematically show as Fig. 2, the abrasive wheel 10 that uses in the present embodiment is circumferences 11 for making resin and be filled in the fiber and silicon carbide abrasive particles being scattered in the resin.
Here, the sendout of abrasive wheel is sent servomotor (M2) control by incision.
Shown in Fig. 2 (a), make the outer peripheral face of the circumference 11 of abrasive wheel 10 be contacted with the end face 1a of glass substrate 1, during attrition process, obtain load current figure as shown in Figure 3.
The transverse axis of Fig. 3 is the attrition process time, and the longitudinal axis is the load current value of rotary driving motor 20.
Expression W axle side and X-axis side.
If the end face of abrasive wheel 10 contact glass substrates then load current rise, but usually easily at contact beginning (s) generation peak point current when contacting end (e).
In addition, abrasive wheel 10 shown in Fig. 2 (a) plays shown in Fig. 2 (b) from brand-new state, be accompanied by the increase of attrition process sheet number, outer peripheral face at abrasive wheel forms the slot part 14 that produces owing to wearing and tearing, even therefore normal the grinding, slot part 14 also can deepen gradually, thereby contact area increases and load current rises.
When the outer peripheral face at abrasive wheel 10 formed slot part 14, though the bottom 12 of slot part is contacted with the end face 1a of glass substrate, the side 13 that also becomes slot part was covered in the flute profile contact of the surperficial 1c and the back side 1d of glass substrate.
In the example shown in Fig. 2, though implement chamfering 1b in the crest line portion of glass substrate 1, chamfering 1b is effective as required.
In addition, the thickness of glass substrate 1 as shown in Figure 2 shows as big than reality, and abrasive wheel 10 shows as minimum, is actually abrasive wheel 10 simultaneously and moves up and down use in Fig. 2, forms a plurality of grooves.
Of the present invention being characterized as revised the load current increase part that causes owing to this flute profile contact and carried out machining control.
Decision-making system example according to the control of the present invention of the flowchart text of Fig. 1 and certified products, defective work.
At first, before beginning, attrition process measures the groove depth of abrasive wheel 10.There is no particular limitation for measuring assembly, but be preferably contactless automatic instrumentation.
Shown in step S1, S2, degree according to groove depth is revised, for example the initial setting electric current with the control electric current of the motor under a situation that does not almost have groove is a benchmark, under groove depth is moderate b situation, judge with 120% of initial setting electric current whether load current is good, under the bigger c situation of groove depth, judge with 140% of initial setting electric current whether load current is good.
And whether good judgment standard also needs suitably to set according to the material of wheel and the size of substrate, and present embodiment has only Three Estate, but also more grades can be set, and also can set pro rata according to groove depth.
To have considered that the control electric current of groove depth begins the attrition process of glass substrate (S3), from grinding begin to finishing in time course n time, measure motor load electric current (S4), set its mean value (S5) and in order to implement the lower limit (S6) of the load current value of suitable attrition process according to fluctuation, similarly, the upper limit (S7) of the load current value under the situation that the incision sendout of setting abrasive wheel 10 is strong excessively.
By like this with on average the setting of n data, thereby improved the judgement precision.
If set like this, then can set the lower limit and the upper limit of load current according to groove depth, so under the situation in load current is in its scope, keep continuity ground to continue to carry out the automatic grinding (S8) of next glass substrate.
Suppose to surpass under the situation of the management upper limit at load current value, the sendout that servomotor 30 is sent in the incision of the glass substrate of next time reduces, and can prevent the inordinate wear of abrasive wheel.
On the other hand, load current value reaches under the situation of lower limit of suitable current value, be judged to be amount of grinding and tail off, set the upper limit, the lower limit (S10) that current value is set load current, and carry out attrition process (S11) once more according to this judgement according to attrition process once more.
Load current value is less than processing setting value once more, in order to control pressurization at the glass substrate of next time, adjusts sendout (S12) according to its degree.
And, processing under the situation about reaching more than 3 times once more, become warning and report to the police, becoming under the situation of warning the setting of change device (S13).
In addition, in this case, also can replace reporting to the police warning and the control of automaticallying switch are so that mobile abrasive wheel and make new grinding groove formation.
Use such lapping device,, can reduce stopping automatically of machining production line, improve accepted product percentage by detecting certified products, defective work and the sendout of attrition process.
Claims (5)
1, a kind of substrate end-face grinder is characterized in that comprising: substrate end-face is carried out the rotary drive assembly of the abrasive wheel of attrition process, described abrasive wheel and the incision inlet assembly of described abrasive wheel;
The rotary drive assembly of described abrasive wheel has: the correction assembly that utilizes the load current that the load current detection components of substrate end-face contact and the groove contacts side surfaces by the wear grooves that produces at described abrasive wheel produce in substrate.
2, substrate end-face grinder according to claim 1, it is characterized in that having comparing component, described comparing component is based on comparing by detected load current of described load current detection components and suitable bound electric current, and the incision inlet assembly of described abrasive wheel has based on what adjust sendout with the comparative result of described suitable bound electric current sends the adjustment assembly.
3, a kind of decision method of substrate end-face attrition process is characterized in that comprising: substrate end-face is carried out the rotary drive assembly of the abrasive wheel of attrition process, described abrasive wheel and the incision inlet assembly of described abrasive wheel;
The rotary drive assembly of described abrasive wheel has the load current detection components of utilizing the substrate end-face contact;
Follow the attrition process number, form wear grooves at described abrasive wheel, groove side by described wear grooves is contacted the load current that produces with the corrugated surface of substrate contacts partly to be revised, and set the upper and lower bound of suitable load current, thereby the load current when by the detected attrition process of described load current detection components is in described bound the time, and the judgement substrate is certified products.
4, the decision method of substrate end-face attrition process according to claim 3 is characterized in that, described abrasive wheel is that circumference is made of the rubber-like material, and contains the grinding abrasive particle in the described material.
5, the decision method of substrate end-face attrition process according to claim 3 is characterized in that, described abrasive wheel is made by containing the resin that grinds abrasive particle in the circumference fiberfill fibers.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008157301 | 2008-06-17 | ||
| JP2008-157301 | 2008-06-17 | ||
| JP2008157301A JP5270974B2 (en) | 2008-06-17 | 2008-06-17 | Substrate end face polishing apparatus and polishing determination method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101607376A true CN101607376A (en) | 2009-12-23 |
| CN101607376B CN101607376B (en) | 2014-07-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200910149143.8A Active CN101607376B (en) | 2008-06-17 | 2009-06-17 | Substrate end-face grinder and grind judgment method |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5270974B2 (en) |
| KR (1) | KR101605484B1 (en) |
| CN (1) | CN101607376B (en) |
| SG (1) | SG158041A1 (en) |
| TW (1) | TWI458593B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102069451A (en) * | 2010-11-03 | 2011-05-25 | 广州遂联自动化设备有限公司 | Current-based intelligent compensation control method used on polishing and grinding equipment |
| CN103534064A (en) * | 2011-05-27 | 2014-01-22 | 信越半导体株式会社 | Method for adjusting position of polishing head in heightwise direction, and method for polishing workpiece |
| CN106041667A (en) * | 2016-05-20 | 2016-10-26 | 京东方科技集团股份有限公司 | Base plate and edging detection method, alignment method and device thereof |
| CN106378679A (en) * | 2016-09-12 | 2017-02-08 | 成都中光电科技有限公司 | Judgment method for grinding edge burning of TFT glass substrate |
| CN107331230A (en) * | 2016-10-28 | 2017-11-07 | 湖南机电职业技术学院 | A kind of intelligence manufacture production, teaching ＆ research platform processed towards Metal Flake handicraft |
| CN109470906A (en) * | 2018-09-28 | 2019-03-15 | 彩虹（合肥）液晶玻璃有限公司 | A kind of operating current acquisition device and method |
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| CN103313822B (en) * | 2011-01-21 | 2016-04-20 | 株式会社捷太格特 | Grinding anomaly monitoring method and grinding abnormality monitoring apparatus |
| CN105619243B (en) * | 2016-01-05 | 2017-08-29 | 京东方科技集团股份有限公司 | Grind cutter head and lapping device |
| JP2017148931A (en) * | 2016-02-19 | 2017-08-31 | 株式会社荏原製作所 | Polishing device and polishing method |
| TWI811249B (en) * | 2017-11-09 | 2023-08-11 | 瑞士商格勞斯頓瑞士有限公司 | Method for machining a glass pane |
| KR102308602B1 (en) * | 2017-11-21 | 2021-10-05 | (주) 세명유리 | A plate glass polishing apparatus with automatic adjustment of polishing wheel pressure |
| CN110653711A (en) * | 2019-11-07 | 2020-01-07 | 宿州市国凯机械制造有限公司 | Polishing machine with automatic cutter compensation function |
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| CN102069451A (en) * | 2010-11-03 | 2011-05-25 | 广州遂联自动化设备有限公司 | Current-based intelligent compensation control method used on polishing and grinding equipment |
| CN103534064A (en) * | 2011-05-27 | 2014-01-22 | 信越半导体株式会社 | Method for adjusting position of polishing head in heightwise direction, and method for polishing workpiece |
| US9333618B2 (en) | 2011-05-27 | 2016-05-10 | Shin-Etsu Handotai Co., Ltd. | Method for adjusting height position of polishing head and method for polishing workpiece |
| CN103534064B (en) * | 2011-05-27 | 2016-08-31 | 信越半导体株式会社 | The control method of the short transverse position of grinding head and the Ginding process of workpiece |
| CN106041667A (en) * | 2016-05-20 | 2016-10-26 | 京东方科技集团股份有限公司 | Base plate and edging detection method, alignment method and device thereof |
| US10464190B2 (en) | 2016-05-20 | 2019-11-05 | Boe Technology Group Co., Ltd. | Substrate, edge polishing detection method and device and positioning method and device for the same, exposure apparatus and evaporation device |
| CN106378679A (en) * | 2016-09-12 | 2017-02-08 | 成都中光电科技有限公司 | Judgment method for grinding edge burning of TFT glass substrate |
| CN107331230A (en) * | 2016-10-28 | 2017-11-07 | 湖南机电职业技术学院 | A kind of intelligence manufacture production, teaching ＆ research platform processed towards Metal Flake handicraft |
| CN109470906A (en) * | 2018-09-28 | 2019-03-15 | 彩虹（合肥）液晶玻璃有限公司 | A kind of operating current acquisition device and method |
| CN113344308A (en) * | 2020-02-17 | 2021-09-03 | 华晨宝马汽车有限公司 | Quality monitoring method, system, equipment and medium based on polishing operation data |
| CN113344308B (en) * | 2020-02-17 | 2024-01-05 | 华晨宝马汽车有限公司 | Quality monitoring method, system, equipment and medium based on polishing operation data |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201008704A (en) | 2010-03-01 |
| SG158041A1 (en) | 2010-01-29 |
| TWI458593B (en) | 2014-11-01 |
| JP5270974B2 (en) | 2013-08-21 |
| JP2009297865A (en) | 2009-12-24 |
| CN101607376B (en) | 2014-07-16 |
| KR20090131268A (en) | 2009-12-28 |
| KR101605484B1 (en) | 2016-03-23 |
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