CN101604553A - Optical platform supporting device in vacuum container - Google Patents
Optical platform supporting device in vacuum container Download PDFInfo
- Publication number
- CN101604553A CN101604553A CNA2009100592910A CN200910059291A CN101604553A CN 101604553 A CN101604553 A CN 101604553A CN A2009100592910 A CNA2009100592910 A CN A2009100592910A CN 200910059291 A CN200910059291 A CN 200910059291A CN 101604553 A CN101604553 A CN 101604553A
- Authority
- CN
- China
- Prior art keywords
- vacuum
- optical
- optical platform
- vaccum case
- platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 49
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 3
- 238000007789 sealing Methods 0.000 abstract 2
- 238000010977 unit operation Methods 0.000 description 2
- 238000013016 damping Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
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- Vibration Prevention Devices (AREA)
- Packaging Frangible Articles (AREA)
Abstract
The invention provides a supporting device for an optical platform in a vacuum container. The vacuum shell of the optical platform supporting device in the vacuum container is directly fixed on the supporting platform through the vacuum shell support, and the optical platform support is connected with the optical platform and then fixed on the supporting platform through the vacuum shell; the optical platform support and the vacuum shell are in non-rigid contact; the upper end flange of the corrugated pipe is connected with the vacuum shell in a sealing mode, and the lower end flange of the corrugated pipe is connected with the optical platform support in a sealing mode. The optical platform supporting device in the vacuum container ensures that the optical platform in the vacuum environment is not influenced by vacuum deformation and vibration of a vacuum unit, and has higher stability.
Description
Technical field
The invention belongs to the optical precision instrument technical field, be specifically related to the bracing or strutting arrangement of high stable optical table in a kind of vacuum, especially can the isolated vacuum distortion and unit vibration to the influence of optical table.
Background technology
Existingly be used for optical table under the vacuum environment, owing to directly be supported on the vaccum case, the influence that vacuumizes distortion of housing when being subjected to vacuumizing, and the influence of unit vibration during the vacuum unit operation make optical table drift occur and rock; If this type of optical table has higher requirement to structural stability, the measure of generally taking is: 1) with vaccum case (the particularly position of support of optical platform) thickening, and the anti-deformation groove is set; 2) at vaccum case and optical table support point of attachment damping structure is set, reduces transfer of vibration.The weak point of above method is, the one, and the thickness of vaccum case, weight are increased, cause processing cost to increase, it two is fundamentally to cut off the vaccum case distortion, and the vibration of vacuum unit operation is to the influence of high stable optical table.
Summary of the invention
The technical problem to be solved in the present invention provides a kind of optical platform support device in vacuum container.
The vaccum case of optical platform support device in vacuum container of the present invention is directly fixed on the support platform by the vaccum case bearing, the optical table bearing with pass vaccum case after optical table is connected and be fixed on the support platform; The optical table bearing adopts no rigidity to contact with vaccum case; The upper flanges and the vaccum case of corrugated tube are tightly connected, and the following end flanges and the optical table bearing of corrugated tube are tightly connected.
Described corrugated tube adopts the stainless steel welding bellows.
Independently rigidity supporting structure is adopted in the optical table under the vacuum environment among the present invention and the support of vaccum case respectively, and independently not directly contact of rigid support device makes vaccum case distortion and vacuum unit vibration can not be directly delivered to optical table; The optical table bearing passes vaccum case, and does not have the rigidity contact; Connect by the flexible metal corrugated tube between vaccum case and optical table, both guaranteed the vacuum requirement, realized the rigidity isolation again, stoped transfer of vibration.
Optical platform support device in vacuum container of the present invention makes the optical table under the vacuum environment not be subjected to the influence of vacuum distortion and vacuum unit vibration, has advantages of higher stability.
Description of drawings
Fig. 1 is the cross-sectional view of optical platform support device in vacuum container embodiment of the present invention.
Among the figure, 1. vaccum case 2. vaccum case bearings 3. optical tables 4. optical table bearings 5. corrugated tubes 6. support platforms
Embodiment
The present invention is further described below in conjunction with drawings and Examples.
As shown in Figure 1, optical platform support device in vacuum container of the present invention contains: vaccum case 1, vaccum case bearing 2, optical table 3, optical table bearing 4, corrugated tube 5, support platform 6.Vaccum case 1 directly is supported on the support platform 6 by vaccum case bearing 2, after optical table 3 links with optical table bearing 4, pass vaccum case 1, be supported on the support platform 6, the upper flanges of columned metallic bellows 5 connects with vaccum case 1 seal flange, the following end flanges of corrugated tube 5 and optical table bearing 4 sealed attachment; Be to guarantee vibration isolating effect, optical table 3, optical table bearing 4 directly do not contact with 1 of vaccum case, utilize the flexible isolating vaccum case 1 of corrugated tube to be out of shape and the vacuum unit vibration to the influence of optical table 3; Corrugated tube 5 adopts the stainless steel welding bellows.
Claims (2)
1. optical platform support device in vacuum container, it is characterized in that: the vaccum case of described bracing or strutting arrangement (1) is directly fixed on the support platform (6) by the vaccum case bearing, optical table bearing (4) with pass vaccum case (1) after optical table (3) is connected and be fixed on the support platform (6); Optical table bearing (4) adopts no rigidity to contact with vaccum case (1); The upper flanges of corrugated tube (5) and vaccum case (1) are tightly connected, and the following end flanges of corrugated tube (5) and optical table bearing (4) are tightly connected.
2. according to the described optical platform support device in vacuum container of claim 1, it is characterized in that: described corrugated tube (5) adopts the stainless steel welding bellows.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2009100592910A CN101604553A (en) | 2009-05-15 | 2009-05-15 | Optical platform supporting device in vacuum container |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2009100592910A CN101604553A (en) | 2009-05-15 | 2009-05-15 | Optical platform supporting device in vacuum container |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101604553A true CN101604553A (en) | 2009-12-16 |
Family
ID=41470241
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2009100592910A Pending CN101604553A (en) | 2009-05-15 | 2009-05-15 | Optical platform supporting device in vacuum container |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101604553A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102818587A (en) * | 2012-07-27 | 2012-12-12 | 北京中科科仪股份有限公司 | Vacuum operating platform with damping mechanism |
| CN103940589A (en) * | 2014-03-25 | 2014-07-23 | 中国科学院长春光学精密机械与物理研究所 | Vibration isolation mechanism of optical detection frame in vacuum container |
| CN104597581A (en) * | 2015-02-12 | 2015-05-06 | 中国科学院光电研究院 | Mounting and adjusting device of extreme ultraviolet reflection lens |
| CN104615171A (en) * | 2014-12-25 | 2015-05-13 | 北京仿真中心 | Supporting platform for low-temperature vacuum cold cabin |
| CN113188764A (en) * | 2021-04-16 | 2021-07-30 | 中国科学院西安光学精密机械研究所 | Temperature test box with vibration isolation platform |
| CN113981409A (en) * | 2021-12-27 | 2022-01-28 | 中国工程物理研究院应用电子学研究所 | Vacuum optical airtight cabin without negative pressure stress |
-
2009
- 2009-05-15 CN CNA2009100592910A patent/CN101604553A/en active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102818587A (en) * | 2012-07-27 | 2012-12-12 | 北京中科科仪股份有限公司 | Vacuum operating platform with damping mechanism |
| CN102818587B (en) * | 2012-07-27 | 2014-08-20 | 北京中科科仪股份有限公司 | Vacuum operating platform with damping mechanism |
| CN103940589A (en) * | 2014-03-25 | 2014-07-23 | 中国科学院长春光学精密机械与物理研究所 | Vibration isolation mechanism of optical detection frame in vacuum container |
| CN103940589B (en) * | 2014-03-25 | 2016-06-01 | 中国科学院长春光学精密机械与物理研究所 | The vibration isolating mechanism of optical detection frame in a kind of vacuum vessel |
| CN104615171A (en) * | 2014-12-25 | 2015-05-13 | 北京仿真中心 | Supporting platform for low-temperature vacuum cold cabin |
| CN104615171B (en) * | 2014-12-25 | 2017-01-25 | 北京仿真中心 | Supporting platform for low-temperature vacuum cold cabin |
| CN104597581A (en) * | 2015-02-12 | 2015-05-06 | 中国科学院光电研究院 | Mounting and adjusting device of extreme ultraviolet reflection lens |
| CN104597581B (en) * | 2015-02-12 | 2017-06-13 | 中国科学院光电研究院 | A kind of debugging device of extreme ultraviolet reflecting optics |
| CN113188764A (en) * | 2021-04-16 | 2021-07-30 | 中国科学院西安光学精密机械研究所 | Temperature test box with vibration isolation platform |
| CN113981409A (en) * | 2021-12-27 | 2022-01-28 | 中国工程物理研究院应用电子学研究所 | Vacuum optical airtight cabin without negative pressure stress |
| CN113981409B (en) * | 2021-12-27 | 2022-03-15 | 中国工程物理研究院应用电子学研究所 | Vacuum optical airtight cabin without negative pressure stress |
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Legal Events
| Date | Code | Title | Description |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20091216 |