CN101583462A - Industrial machine provided with interferometric measuring means - Google Patents
Industrial machine provided with interferometric measuring means Download PDFInfo
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- CN101583462A CN101583462A CNA2006800565477A CN200680056547A CN101583462A CN 101583462 A CN101583462 A CN 101583462A CN A2006800565477 A CNA2006800565477 A CN A2006800565477A CN 200680056547 A CN200680056547 A CN 200680056547A CN 101583462 A CN101583462 A CN 101583462A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/22—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
- B23Q17/248—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods
- B23Q17/2495—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods using interferometers
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Abstract
An industrial machine (200) is described comprising: - a moving structural element (2) for adopting different positions in corresponding operating configurations of the machine (200); optoelectronic measuring means (11, 12) of a distance (d) between a first reference axis (al) and a second reference axis (a2) associated to said structural element (2); characterized in that said optoelectronic measuring means (11, 12) comprise a laser interferometer (20) and a measuring reflecting target (12) that are optically coupled to each other and each being associated with one of said reference axes, said laser interferometer including a laser source for emitting a direct electromagnetic radiation to said target (12) and interference means between a reflected electromagnetic radiation from said target and a reference electromagnetic radiation obtained from the direct electromagnetic radiation.
Description
Technical field
The present invention relates to a kind of industrial machine, and more specifically, relate to a kind of industrial machine that is provided with photoelectric measuring device.
Background technology
As used herein, " industrial machine " is meant that mechanical machine tool (for example, lathe, grinding machine, milling machine or drilling machine, boring machine) and electronics lathe (for example, laser machine, electric discharge machining apparatus), press water jet machine, coordinate measuring machine (CMM), move or manipulation machine and assembly machine.
" workpiece " be meant one can be processed machinable material, for instance, for example can be fixed to industrial machine in case processing timber, metal or plastics; And the wall part or the major part that can not be installed in the solid material on the industrial machine, but they can touch and process by industrial machine, perhaps put it briefly, " workpiece " is meant any workpiece that can be handled and be handled by industrial machine.
" processing " is meant the various operations that industrial machine can be carried out on workpiece, for instance, for example, remove material, milling, bending, polishing etc., and the surface treatment on the workpiece (such as, japanning), and other the possible operations on workpiece, such as measuring, handle, move or assembling.
More specifically, " operation " of industrial machine further is meant any function that this machine can be carried out, wherein, for example, in operating area Move tool, with this instrument remain in arbitrary position, processing work and adjust, measure or monitoring not only can carried out on the workpiece but also can performed operation on other machineries that belong to this industrial machine or structure member.
Typically, owing to when a solid material of processing (such as metalwork), need very high precision, so require workpiece accurately is positioned on the machine, and require to be used to process the instrument of this workpiece and other mechanical parts that work in-process may relate to move this work with maximal accuracy as much as possible.
Under any circumstance, such industrial machine the time all meets with stresses or vibrates in operation, and wherein said stress or vibration for example may be caused by the interaction of instrument and material to be processed or be caused or also by instrument or add mobile being caused of other related mechanical parts of man-hour by the processing (carrying out with high speed usually) of the workbench that is fixed with workpiece.
In addition, in industrial machine, can produce geometry deformation, the geometry deformation that comprises permanent type (for example, assembling or structure by the mistake of the mechanical part of forming this machine cause) and two kinds of the geometry deformations (for example, variations in temperature or the weight by the parts of forming this machine causes) of static types.
Therefore, people need profoundly to feel a kind of industrial machine, the displacement that it can may bear when operator or control module provide machine in operation or the measurement of change in size are so that determine the mismachining tolerance that caused by industrial machine in real time and increase the precision of industrial machine by using correcting measuring.In addition, can limit irregular working, and reduce the risk of mechanical breakdown simultaneously.
Typically, industrial machine is made up of interconnected stationary machine parts and one or more axles (axis) linear or that rotate.
" axle " is meant the assembly that is formed by two elements, and typically, one element is static and another element is removable with respect to first element, and they are connected to each other so that can relative motion be passed to each other by suitable motion transfering device.More specifically, " linearity " axle is meant the assembly of two elements of the relative motion of transmitting linear-type betwixt, yet " rotation " axle is meant the assembly of two elements of the relative motion of transmitting rotary type betwixt.
In linear axes, moving meter moves on retaining element slidably.For example, moving meter is moved by rotary type motor and suitable machine driven system (perhaps replacedly, directly passing through linear motor).
Typically, measure the displacement of moving meter indirectly by angle measurement system, the described angle measurement system title " solver (resolver) " or known that possesses skills in the literature with the angular encoder of rotary type motor one with respect to stationary element.Replacedly, can directly obtain measurement result by linear measurement system (it is known with the technical name linear encoder), typically, described linear measurement system comprise with the rule of stationary element one (typically, optical link (optical line, optical line)) and with the read head of moving meter one.The measurement of displacement can also use two measuring systems to carry out.
More specifically, industrial machine is made up of one or more linear axes and/or one or more turning cylinder.
Schematically show the first industrial machine M1 of known type in Fig. 1, it is made of linear axes AL, and is provided with rotary type motor MR, corresponding mechanical driving device MTM, linear encoder EL, rotary type encoder ER and control module UC.This control module is associated with the first industrial machine M1, so that provide the corresponding instruction signal based on the information that is produced by linear encoder EL and rotary type encoder ER to rotary type motor MR.
The first industrial machine M1 among Fig. 1 (only having a linear axes) comes processing work by the machining tool (not shown), and this workpiece can be fixed on the static or mobile parts of the stationary element of the moving meter of linear axes or this axle or this machine.Machining tool can be fixed to the moving meter of linear axes or be fixed to this stationary element or be fixed on the static or mobile parts of this machine.
In Fig. 2, schematically show the part of the industrial machine M2 of second prior art of forming by a plurality of linear axes AL1, AL2, AL3.In Fig. 2, for purpose clearly, not shown motor, mechanical driving device, measuring system and control module.
Usually, the industrial machine with a plurality of linear axes and one or more turning cylinders for example comprises the axle of relative to each other and sequentially arranging, that is, the stationary element of an axle is fixed to the moving meter of adjacent shaft.Industrial machine with a plurality of comes processing work by machining tool, and described workpiece can be fixed to the moving meter of one of them or be fixed to the stationary element of one of them or be fixed on the stationary parts of machine.Similarly, instrument can be fixed to the moving meter of one of them or be fixed to the stationary element of one of them or be fixed on the static or mobile parts of machine.Each control module can be comprised by the single control module of machine or substitute.
As shown in Figure 3 and Figure 4, the industrial machine of the prior art of representing with label 100 typically comprises: pedestal 1, as the stationary element of linear axes; And workbench 2, as the moving meter of linear axes, and be fixed to workbench and on described pedestal, slide along mobile axis X (with dashed lines is described among the figure) by the workpiece 4 that solid material is made.Industrial machine 100 also is provided with the machine tools 5 (as shown in Figure 3) that is used for rapidoprint workpiece 4.Travelling table 2 is guaranteed by the conventional motors (not shown) that is mounted to workbench or pedestal expediently and by the appropriate device that is used for the relative motion between mechanical transfer workbench and the pedestal with respect to the motion of pedestal 1.
In order to measure when industrial machine is operated travelling table 2 with respect to the displacement of pedestal 1, industrial machine 100 is equipped with linear encoder 6, described linear encoder constitute by read head 7 and with workbench 2 one so that for example with respect to not sliding in the mode of having machinery and contacting with the optical link 8 of pedestal 1 one.Optical link 8 is arranged in the suitable space that is formed on pedestal (stationary element of the linear axes) side, and therefore is parallel to the mobile axis X of industrial machine.
Linear encoder 6 allows industrial machine 100 to provide the measured value of expression travelling table along the displacement of the mobile axis of industrial machine to operator or control module.
The industrial machine 100 of prior art has such shortcoming, i.e. the quality of the measured value that is provided by linear encoder 6 and the geometry that precision strictly depends on the pedestal that optical link is installed.In fact, because optical link is firmly-fixed to the shifting axle of machine, so optical link is subjected to the influence of the distortion that pedestal 1 born when operation.And the reliability of the measured value that is provided by linear encoder all is provided in any distortion of optical link 8, and influences the proper operation of linear encoder.
Another shortcoming of industrial machine 100 as described above is the distance (being sizable sometimes) between linear encoder 6 (position of optical link 8 along pedestal 1 depended in its position) and the zone of paying close attention to most (being generally the point at the fixing described workpiece place of mobile axis) that is used for measuring.In fact, people recognize, (and workpiece is just processed simultaneously) should be noted that any geometry deformation of machine when machine operation, described geometry deformation changes the relative position between the mechanical part (they form industrial machine and workpiece), such as the position between pedestal (stationary element of linear axes) and the travelling workpiece (moving meter of linear axes), so that any undesirable displacement between aligning tool and the workpiece, though these displacements are minimum, but mainly when the expectation high precision manipulation, this displacement may damage the quality of institute's processing work.
Summary of the invention
The purpose of this invention is to provide a kind of industrial machine, it has overcome above-mentioned defective and has had than the more reliable operation of the industrial machine of above-mentioned prior art.
By realizing purpose of the present invention such as the industrial machine that limits by claim 1 and have a feature in the claim 1.
The preferred embodiment of described industrial machine is limited by 2 to 31 of appended dependent claims.
Description of drawings
To understand the present invention better from detailed description hereinafter, provide wherein embodiment with limiting examples by the reference accompanying drawing to the embodiment of the invention, in the accompanying drawings:
Fig. 1 schematically shows the perspective view of the first prior art industrial machine;
Fig. 2 schematically shows the perspective view of the part of the second prior art industrial machine;
Fig. 3 schematically shows the perspective view of the 3rd prior art industrial machine;
Fig. 4 shows the side view of the 3rd prior art industrial machine among Fig. 3;
Fig. 5 schematically shows the perspective view of the industrial machine of example according to the present invention;
Fig. 6 schematically shows the photoelectric measuring device that the industrial machine in Fig. 5 uses;
Fig. 7 schematically shows the side view of the industrial machine among Fig. 3, and wherein, protective cover prevents may be by the electromagnetic radiation that photoelectric measuring device produced among Fig. 6; And
Fig. 8 schematically shows the variant embodiment of protective cover shown in Figure 7.
Should be noted in the discussion above that same or analogous element will be represented with identical label in whole accompanying drawings.
The specific embodiment
The example of the industrial machine of representing with label 200 is described on the whole now with reference to Fig. 5 and Fig. 6.
As used herein, should be understood that, " operation " of industrial machine further is meant any function that this machine can be carried out, wherein, for example, in operating area Move tool, with instrument remain in arbitrary position, processing work and adjust, measure or monitoring not only can carried out on the workpiece but also can performed operation on other machineries that belong to industrial machine or structure member." processing " further is meant the various operations that industrial machine can be carried out on workpiece, such as, remove material, bending, polishing etc., and the surface treatment on the workpiece (such as japanning).
Industrial machine 200 (for example milling machine) comprising: the retaining element of pedestal 1 or linear axes (only referring to " pedestal "); And moving structure element 2, workpiece 4 mechanically is connected on this moving structure element by the suitable fixture (not shown) of use such as adjustable jaw.
Should be noted in the discussion above that in other embodiment of industrial machine 200 workpiece 4 can mechanically be connected directly to pedestal 1 or physically be positioned over the outside of industrial machine 200.
Should see further that the type of workpiece 4 also depends on the type of industrial machine and desired processing.Remove at raw material under the situation of machine tool, workpiece is reasonably made by solid material, typically is metal, timber or plastics.
Return the description to industrial machine among Fig. 5 200 now, structural detail 2 has realized that the mobile axis X (in this example, pedestal 1 is vertical) along industrial machine is slidingly coupled to pedestal 1.For this reason, moving structure element 2 preferably is provided with suitable groove 9, these grooves 9 towards pedestal 1 so that snugly be engaged in the respective rib 10 that is formed on the pedestal.Above-mentioned being slidingly connected allows moving structure element 2 can adopt the diverse location of the corresponding operating structure of representing industrial machine 200 with respect to pedestal 1.
Should further contemplate, realize may be operably coupled under the situation of pedestal 1 at machine tools 50, above-mentioned being slidingly connected allows a plurality of mutual alignments between machine tools 50 (other processing unit (plant)s perhaps in general) and the workpiece 4.
Typically, moving meter 2 is guaranteed by the corresponding mechanical transmission component (also not shown among the figure) of traditional rotary type motor (not shown) that is fixed to moving structure element 2 and relative motion between moving structure element 2 and pedestal 1 with respect to moving of stationary element 1.Replacedly, the rotary type motor can be fixed to pedestal 1.In addition, can substitute described rotary type motor for moving structure element 2 provides other mobile devices, wherein for example, linear motor, pneumatic actuation system or piezoelectric actuated system.
Preferably, the target 12 of photoelectric measuring device can be fixed to moving structure element 2 by suitable fixed system (such as the magnetic type system that comprises one or more magnets).
In more detail, and particularly with reference to Fig. 6, electrooptical device 11 comprises laser self-mixing interference instrument 20 (itself is for known), for example, monotype semiconductor diode laser Hitachi model HL8325G, the laser self-mixing interference instrument is fit to launch direct electromagnetic radiation from corresponding input/output end port (not shown) to target 12, and receives the suitable part by the electromagnetic radiation of target reflection again on described port.Laser self-mixing interference instrument 20 further defines the interference cavity between direct electromagnetic radiation and reflecting electromagnetic radiation.Preferably, direct electromagnetic radiation and reflecting electromagnetic radiation have the direction of propagation of the mobile axis X that is parallel to moving structure element 2 with respect to pedestal 1.
What should further note is, in order to promote to the transmission of the direct electromagnetic radiation of target 12 and from the transmission of target 12 to the reflecting electromagnetic radiation of interferometer 20, therefore improved the quality of measuring by the laser self-mixing interference instrument, photoelectric measuring device 11 can be advantageously provided one or more optoelectronic components, for instance, such as optical lens, attenuator or amplifier (not shown), they are such as between the input/output end port and target of interferometer.
Viewpoint from operation, the laser self-mixing interference instrument is based on laser self-mixing effect (itself is known), when reflecting electromagnetic radiation during, when reflecting electromagnetic radiation is represented direct electromagnetic radiation a part of from the target that moves, when reflecting electromagnetic radiation coherently (coherently) reenter interference cavity and in interference cavity, the laser self-mixing effect can take place when directly electromagnetic radiation interacts, cause a plurality of parameter changes of direct electromagnetic radiation, for example (as example), Laser emission threshold value, Laser emission power, wavelength, spectral width.Advantageously, can monitor so that infer the information of distance between expression interferometer and the running target Laser emission power.
After being similar to interference mentioned above, laser self-mixing interference instrument 20 is applicable to output optical interference signals SO.By handling this optical interference signals, as hereinafter described, interferometer can be traced back at first axis of reference a1 defined in the industrial machine 200 and the measured value apart from d between the second axis of reference a2.
In more detail, and according to example described herein, the first axis of reference a1 is static and is associated with laser self-mixing interference instrument 20 that the second axis of reference a2 is associated with target 12 simultaneously, and the second axis of reference a2 and then be associated in general, with moving structure element 2.
Go out as shown in Figure 5, the first axis of reference a1 and the second axis of reference a2 (with dashed lines draws) be parallel to each other and all with mobile axis X quadrature.Consider that defined (directly or reflection) electromagnetic radiation has the direction of propagation that is parallel to mobile axis X as indicated above, thus apart from d also along identical orientation measurement.
Substituting in the embodiment of this describing mode, interferometer 20 can be mounted to moving structure element 2, and vice versa, and target 12 can be fixed to pedestal 1.In this case, the first axis of reference a1 is static and can be related with target 12 that and the second axis of reference a2 is corresponding to laser interferometer 20.
As shown in Figure 6, electrooptical device 11 further comprises the photodetector 21 of known type (such as photodiode), and this photodetector be fit to receive the input optical interference signals SO that provided by interferometer 20 this signal is converted to corresponding output first signal of telecommunication SE1.Should be noted in the discussion above that photodiode also can be integrated in the big envelope interior (laser diode) of interferometer 20.
Replacedly, electrooptical device 11 can be suitable for directly providing proportional second signal of telecommunication SE2 with measured displacement d to the operator.
Control module UC also is provided with hardware (typically being microprocessor and corresponding memory) and the software of itself, so that control and manage industrial machine 200 based on measured apart from d.
As example, when industrial machine adds man-hour to workpiece 4, control module UC can carry out measured apart from the value of d and the contrast operation who before had been stored in the predetermined value in the described memory by its microprocessor.When being different from predetermined value (except the tolerance that is allowed) apart from d, control module UC can control motor so that moving structure element 2 moves when measured, thereby makes range recovery between interferometer 20 and the target 12 for to equate with predetermined value.
Aforesaid control type is very favorable, reason is, with reference to the exemplary industrial machine that is used for processing work 4 among Fig. 5, structural detail 2 may influence the crudy of workpiece 4 and the performance of industrial machine 200 and/or employed instrument 50 along rib 10 with respect to changing of distance between the unexpected displacement of pedestal 1 and target 12 and the interferometer 20 thereupon.Advantageously, when processing work 4, control module UC carries out the monitoring to distance between interferometer 20 and the target 12, thereby this distance is complementary with the predetermined value of suitably using and operating corresponding to industrial machine 200.
Referring now to another preferred embodiment as shown in Figure 7, this industrial machine 200 can be provided with structure 60 with variable-length input/output end port and the target 12 with protection laser interferometer 20.
Especially, should be noted in the discussion above that protection structure 60 extends to target such as the input/output end port from interferometer, limits the interior zone that direct electromagnetic radiation and reflecting electromagnetic radiation can be propagated thus.
In addition, protection structure 60 comprises: for example, the interconnected tube element of a plurality of telescopicallies, when changing with respect to pedestal 1 with the position of convenient moving structure element 2, these tube elements extend and shrink along mobile axis X.For this purpose, should see that protection structure 60 advantageously has and is connected to first end of photoelectric measuring device 11 at the input/output end port place and is connected to moving structure element 2 and second end concordant with target 12.Should be noted in the discussion above that the cross section in a plurality of tube elements can be an Any shape, be preferably circle.
Should further see, preferably, by being connected inserting two that suitable packing ring or other sealing devices realize above being mentioned between first end and the electrooptical device 11 and between second end and the moving structure element 2 respectively.
With reference to Fig. 8; as substituting to described a plurality of tube elements; industrial machine 200 can comprise the protection structure of bellows-type; this protection structure has variable-length; also represent with label 60; it is applicable to carries out identical defencive function, and is applicable to along with the variation of the relative position between moving structure element 2 and the pedestal 1 along the mobile axis X extension and the contraction of industrial machine.In addition, should be noted in the discussion above that among Fig. 8 bellows structure with Fig. 7 in protection structure 60 on all four modes be connected to electrooptical device 11 and moving structure element 2.
Advantageously; can in the protection structure 60 among Fig. 7 and Fig. 8, arrange a plurality of sensors; these sensors are arranged to mutual link (chained), and these sensors are suitable for detecting the physical parameter such as finding in the electromagnetic radiation propagation regions, as temperature, pressure, humidity.It is particularly advantageous monitoring these parameters, because this way allows the environmental condition that electromagnetic radiation (directly electromagnetic radiation and reflecting electromagnetic radiation) is propagated is kept continuously and/or observation discretely, thereby if necessary, can proofread and correct the measurement fluctuation that causes by gradient (gradient).
Normally; as substituting to structure (Fig. 7) with tube element and bellows structure (Fig. 8); industrial machine 200 can comprise any structure similar to said structure; and this structure is suitable for when the position of moving structure element changes with respect to pedestal; carry out identical defencive function by extending with shrinking, vice versa.
Should further contemplate; under interchangeable situation; promptly for example under with the situation of photoelectric measuring device 11 with target 12 directly is integrated in pedestal 1 in, can not be provided with and protect structure 60 by the hollow space of arranging along the mobile axis X of machine that utilizes pedestal easily at industrial machine 200.In this case, the input/output end port of electromagnetic radiation, interferometer 20 and target 12 are all advantageously protected by the inner space of industrial machine 200, thereby do not need the help of suitable protection structure certainly.
In addition, in this structure, although photoelectric measuring device and target are similar to the optical link on the industrial machine of prior art and locate along pedestal 1 (stationary element on the linear axes), but regardless of range of displacement measurement d, photoelectric measuring device 11 and target 12 all have and keep economic advantages cheaply, and are different from optical link or any other rule that the increase cost along with numerical value d also increases.
Among unshowned in the drawings another embodiment, industrial machine 200 can comprise the optical measurement instrument of other and optical measurement instrument 11 all fours, and they are arranged as and target 12 optically-coupled, is applicable to measure any angular displacement of moving structure parts 2 with respect to pedestal 1.The rotation of target 12 around first and second pivot centers represented in each measurable angular displacement, described first and second pivot centers mutually orthogonal and all perpendicular to launch from optical measurement instrument and by the electromagnetic radiation direction of propagation of target reflection/diffusion.
Among unshowned in the drawings another embodiment, be firmly-fixed to moving structure element 2 (if suitably handle at target 12, the wall of moving structure element 2 also can be used as reflection/diffusion target) afterwards, can advantageously align with so-called micro-tensioning system from hybrid laser interferometer 20, this micro-tensioning system is accurately pinned by being used to adjust the fixture of screw then.This scheme has also been guaranteed following advantage except unusual compactness: speed and the precision between industrial machine 200 alignment epoch, flexibility is set, prevents and resist mechanical stress and long-term in essence reliability during the processing of workpiece 4.
In addition, what industrial machine 200 can be provided with other also is the measurement mechanism of photovoltaic type, for instance, and for example, one or more linear encoders, angular encoder or solver encoder, they all with above with reference to the described measurement mechanism all fours of prior art.These devices be applicable to measurement can with the distance between other axiss of reference that each structure member of industrial machine is associated, wherein, measured value can with by the laser self-mixing interference instrument measured combine (integrate) apart from d.
In the alternative embodiment of the foregoing description, industrial machine 200 have the photoelectric measuring device 11 that is positioned on pedestal 1 sidepiece and with the target 12 of moving structure element 2 one, thereby make target and measurement mechanism 11 optically-coupled, to be used to measure between moving meter 12 and the pedestal 1 relative displacement along mobile axis X (linear axes).This specific structure is structurally closely similar with the linear encoder of prior art, has cost benefit and operator and assembles very simple; Simultaneously its allow the measure linear encoder any distortion between non-detectable pedestal 1 and the moving structure element 2.
In addition, should be noted in the discussion above that (not shown) in another embodiment, for example, industrial machine 200 can be replacedly or to be provided with measurement mechanism, all measuring probes as known per se with the combined mode of machining tool 50.
Should be understood that, so far, only described some exemplary embodiments according to industrial machine of the present invention.In addition, should consider, can think that also aforesaid industrial machine only is the part of a more complicated industrial machine.
Now, will be described the example of the operation of industrial machine 200 during workpiece 4 processing with further reference to Fig. 5.
Particularly, will consider such situation, i.e. this processing and utilization machining tool 50 (for example, being mechanically connected to the drill bit of industrial machine 200) manufacturing hole in workpiece 4, described hole preferably has the direction with mobile axis X quadrature.
During the preparatory processing step, workpiece 4 is fixed to moving structure element 2 by suitable pawl.When this machine is connected (energising), make photoelectric measuring device 11 move.Then, operator's operating motor of machine, so that moving structure element 2 moves with respect to pedestal 1, so that make industrial machine adopt first operative configuration, this first operative configuration is used for that selected precalculated position is in the described hole of processing in the workpiece 4 during design procedure.If necessary, for the ease of realizing first operative configuration of machine, the operator can also adjust machine tool 50, so that this machine tool aligns with workpiece 4 or close workpiece 4.
When having realized the first above-mentioned operative configuration, photoelectric measuring device 11 provides corresponding to first predetermined value apart from d between the laser interferometer 20 of described first operative configuration and the target 12.Then, this first predetermined value is stored in the memory of control module UC, or replacedly, can from the series of values in the same memory that before was stored in unit UC, selects this first predetermined value.
Viewpoint from operation, when the operator gives an order, industrial machine 200 begins workpiece 4 is processed, and simultaneously electrooptical device 11 and control module UC are activated to be used to monitor and make equating with first predetermined value apart from the d maintenance between interferometer 20 and the target 12.In the example described herein, in fact, seem it is important, during processing,, should remain unchanged as far as possible apart from d for the ease of manufacturing hole on respect to the orthogonal direction of mobile axis X.
In more detail, in order to carry out described monitoring, during processing work 4, laser self-mixing interference instrument 20 is launched direct electromagnetic radiation from input/output end port to target 12.When target 12 receives these direct electromagnetic radiation, target and then can be with the input/output end port of this ELECTROMAGNETIC RADIATION REFLECTION/diffusion to interferometer 20.By coherently entering the laser cavity of interferometer 20, because interferometer effect mentioned above, institute reflect/electromagnetic radiation of diffusion allows the interferometer generation to represent the optical signal SO apart from d between target 12 and the interferometer 20.
Subsequently, photodetector 21 sensed light signal SO also are converted into the first corresponding signal of telecommunication SE1, and this first signal of telecommunication and then be sent to the input of processing unit UP.Processing unit is handled first signal of telecommunication SE1, to produce second signal of telecommunication SE2 apart from d that also represents between laser measured interferometer 20 and the target 12.
After this, the set control module UC of industrial machine receives described second signal of telecommunication SE2, and by microprocessor wherein this second signal of telecommunication is converted to corresponding numerical data.Then, control module UC compares described numerical data and first predetermined value that is stored in the respective memory.
When numerical data is different from first predetermined value, control module UC is operating motor automatically, so that with respect to pedestal 1 move described moving structure element 2 and and then travelling workpiece 4, thereby make industrial machine 200 second operative configuration of being adopted during the processing be back to first operative configuration designed by the operator and that set, so as in workpiece 4 machining hole correctly.
On the contrary, when numerical data is consistent with first predetermined value, owing to measured still equals first predetermined value apart from d, so control module UC can not send any order to motor, and because industrial machine 200 remains on first operative configuration, therefore this processing is carried out in correct mode.
The above 26S Proteasome Structure and Function of being discussed with reference to industrial machine 200 is described, and allows those skilled in the art instruction of the present invention to be applied to the industrial machine of any other type on the basis of this simple knowledge in field.
Although be described with reference to the laser self-mixing interference instrument, but when the interferometer that uses another type substitutes the laser self-mixing interference instrument, instruction of the present invention also is effective, such as, known Michelson (Michelson) laser interferometer own, it is suitable for cooperating optically with target 12.
Michelson type laser interferometer comprises lasing light emitter (such as, helium-neon frequency stabilization source), is used for producing direct electromagnetic radiation to running target.In addition, the Michelson laser interferometer for example comprises static retroreflector and beam splitter, such as direct electromagnetic radiation with by the separating and reorganization (interferences) device of the respective electrical magnetic radiation of running target reflection and/or diffusion, so that the estimation target is with respect to the displacement (if present) in described source.The Michelson laser interferometer operationally is associated with photodetector and control module, and the operation of control module is described in the above by reference laser self-mixing interference instrument 20.
As substituting of laser self-mixing interference instrument 20 or Michelson laser interferometer, also can use to be suitable for Doppler (Doppler) laser interferometer of cooperating optically with target 12.
For example, this interferometer comprises he-Ne laser, beam modulator/separator and the combiner that is used to launch direct electromagnetic radiation, in this combiner, interfering from producing between the reference electromagnetic radiation that direct electromagnetic radiation obtained from the reflecting electromagnetic radiation of target and by modulator/separator.The example of Doppler laser interferometer has been described in US-A-4715706.
Can see, purpose of the present invention can be achieved fully, reason is, industrial machine described herein comprises laser interferometer, this laser interferometer is suitable for guaranteeing to measure the influence of the geometry deformation that is not subjected to the axle that is associated with it, thereby is different from for example what happens in the industrial machine that is provided with linear encoder and optical link.
Should be noted that, advantageously, the measurement of distance is insensitive to the distortion of partial structurtes between laser interferometer and the target, and only guaranteed simultaneously monitoring, and this dynamic displacement is by the displacement that sets and given by the combination that changes caused displacements for how much with the dynamic displacement of the target of mobile axis rigidity one.
In addition, the structure of this industrial machine (it integrally is fixed to pedestal 1 by suitable magnetic type fixed system with photoeletric measuring system) is different from the structure of integrating the industrial machine of linear encoder in the prior art, because regardless of the distance between interferometer and the target, this is configured in the low-cost bigger measurement adaptability that has down.
Comprise that it is especially favourable using the scheme of laser self-mixing interference instrument, because it saves cost and installation easily, and owing to the set optics quantity of interferometer is few, thereby can guarantee good effect and certainty of measurement.
For example compare with aforesaid prior art linear encoder, the versatility when being its structure of selection by use another advantage that laser interferometer obtained, it can be suitable for adapting to the geometry of industrial machine.
Use the electrooptical device of laser interferometer on the location of selecting target according to the measurement that will carry out, further to provide bigger freedom.For this reason, can consider (reflection or diffusion) target is positioned at the position of as close as possible workpiece.This may bring very big advantage, minimizes because it makes by the caused measure error of geometry deformation that takes place between focus (workpiece) and the measurement point (reflecting target).
Should be noted in the discussion above that also advantageously laser interferometer not only can be used during processing work, but also can during the general operation of machine, use as mentioned above, and also be used to calibrate the industrial machine that interferometer is fixed or is associated usually.
In addition, advantageously and also more specifically, the laser self-mixing interference instrument allows to measure assembly (module) and the direction of displacement that passage is known target immediately by single interference.
Another advantage is, in the market can low-down cost have bought to be used for laser self-mixing interference and to measure needed optoelectronic components (such as, semiconductor diode), and these optoelectronic components demonstrates prolonged operating reliability and durability.Especially, except having low cost, these devices have good compactedness and robustness, thereby make that the self-mixed interference instrument is desirable in typical industrial.
In addition, but should consider that Michelson and Doppler laser interferometer also bought on the market, and also can provide good performance and confirmed reliability in these are used, therefore, they also are intended to be contained in the scope of the present invention.
Claims (31)
1. an industrial machine (200) comprising:
-moving structure element (2) is used for adopting diverse location at the corresponding operating structure of described machine (200);
The photoelectric measuring device (11,12) of the distance (d) between-the first axis of reference (a1) and second axis of reference (a2), described second axis of reference is associated with described structural detail (2);
It is characterized in that, described photoelectric measuring device (11,12) comprise optically-coupled each other and the laser interferometer (20) that is associated with one of them described axis of reference separately and measurement reflecting target (12), described laser interferometer comprises: lasing light emitter is used for launching direct electromagnetic radiation to described target (12); And from the reflecting electromagnetic radiation of described target and from the interference device between the reference electromagnetic radiation that described direct electromagnetic radiation obtained.
2. industrial machine according to claim 1 (200), further comprise control module (UC), described control module produces the command signal that is used for described moving structure element (2) as described measuring distance (d) function, and described machine (200) can adopt described operative configuration based on described command signal.
3. industrial machine according to claim 2 (200) further comprises the device (50) that is used for processing and/or measuring workpieces (4); Described moving structure element (2) allows a plurality of mutual alignments between described processing and/or measurement mechanism (50) and the described workpiece (4).
4. industrial machine according to claim 3 (200), wherein, described workpiece (4) is mechanically connected to described moving structure element (2), so that be moved when described workpiece is processed.
5. industrial machine according to claim 3 (200), wherein, described processing and/or measurement mechanism (50) are mechanically connected to described moving structure element (2).
6. industrial machine according to claim 1 (200), wherein, described measurement target (12) is mounted to described moving structure element (2), and described interferometer (20) is and be associated with described first axis of reference (a1).
7. industrial machine according to claim 1 (200), wherein, described interferometer (20) is mounted to described moving structure element (2), and described measurement target (12) is static and is associated with described first axis of reference (a1).
8. industrial machine according to claim 1 (200), further comprise the supporting base (1) that is used for described moving structure element (2), described moving structure element (2) is connected to described pedestal (1) slidably according to the mobile axis (X) of described industrial machine (200).
9. industrial machine according to claim 8 (200), wherein, described laser interferometer (20) is fixed to described pedestal (1).
10. industrial machine according to claim 1 (200), wherein, described photoelectric measuring device (11,12) further comprise photodetector (21), described photodetector is suitable for the interference light signal (SO) that is provided by described laser interferometer (20) being provided and being suitable for described interference light signal is converted to corresponding first signal of telecommunication (SE1).
11. industrial machine according to claim 10 (200), wherein, described photoelectric measuring device (11,12) further comprise processing unit (UP), described processing unit is suitable for receiving and handles described first signal of telecommunication (SE1) so that second signal of telecommunication (SE2) of the described measuring distance of expression (d) to be provided.
12. industrial machine according to claim 11 (200), wherein, described control module (UC) is suitable for receiving described second signal of telecommunication (SE2) is used for described moving structure element (2) with control mobile device.
13. industrial machine according to claim 12 (200), wherein, described mobile device comprises the motor that is mechanically connected to described moving structure element (2).
14. according to claim 2 and 11 described industrial machines (200), wherein, described control module (UC) is suitable for receiving described second signal of telecommunication (SE2) is used for described workpiece (4) with control described processing and/or measurement mechanism (50).
15. industrial machine according to claim 1 (200); further comprise and be used to protect the output port of described interferometer (20) and described measurement target is (12) and structure that have variable-length (60); one end of described structure (60) is connected to described moving structure element (2); and extend to described measurement target (12) from described output port, to limit the interior zone that electromagnetic radiation can be propagated.
16. industrial machine according to claim 15 (200), wherein, described protection structure (60) comprises the interconnected a plurality of tube elements of telescopically.
17. industrial machine according to claim 15 (200), wherein, described protection structure (60) is a bellows type.
18. industrial machine according to claim 3 (200), wherein, described processing and/or measurement mechanism (50) comprise the machine tool that is used to process described workpiece (4).
19. industrial machine according to claim 3 (200), wherein, described processing and/or measurement mechanism (50) comprise measuring probe.
20. according to claim 18 and 19 described industrial machines (200), wherein, described processing and/or measurement mechanism (50) comprise described machining tool and described measuring probe.
21. industrial machine according to claim 10 (200), wherein, described photodetector (21) is a photodiode.
22. according at least one described industrial machine (200) in the aforementioned claim, wherein, described laser interferometer (20) comprises semiconductor laser diode or he-Ne laser.
23. according at least one described industrial machine (200) in the aforementioned claim, wherein, described laser interferometer (20) is the laser self-mixing interference instrument.
24. industrial machine according to claim 23 (200), wherein, the lasing light emitter of described laser self-mixing interference instrument (20) is such: limit interference cavity between described direct electromagnetic radiation and the reflecting electromagnetic radiation from described target (12).
25. with 24 described industrial machines (200), wherein, described direct electromagnetic radiation has the direction of propagation that is parallel to described mobile axis (X) according to Claim 8.
26. according at least one described industrial machine (200) in the claim 1 to 22, wherein, described laser interferometer (20) is Michelson laser interferometer or Doppler laser interferometer.
27. industrial machine according to claim 1 (200), wherein, described photoelectric measuring device (11,12) further comprises at least one second laser interferometer, and described at least one second laser interferometer is optically coupled to described measurement target.
28. according at least one described industrial machine (200) in the aforementioned claim, further comprise be used to measure can with other devices of distance between other axiss of reference that the corresponding construction parts of described industrial machine are associated, wherein, described measuring distance can combine with the distance (d) by described laser interferometer measurement.
29. industrial machine according to claim 28 (200), wherein, described other measurement mechanisms are in the group that comprises angular encoder, solver, linear encoder.
30. industrial machine according to claim 1 (200), wherein, described laser interferometer (20) can be used to calibrate described industrial machine (200).
31. according at least one the described industrial machine (200) in the aforementioned claim, wherein, described industrial machine comprise lathe, laser cutting machine, coordinate measuring machine, press water jet machine, move or the group of manipulation machine, assembly machine in.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/IT2006/000780 WO2008056383A1 (en) | 2006-11-08 | 2006-11-08 | Industrial machine provided with interferometric measuring means |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101583462A true CN101583462A (en) | 2009-11-18 |
Family
ID=38222077
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2006800565477A Pending CN101583462A (en) | 2006-11-08 | 2006-11-08 | Industrial machine provided with interferometric measuring means |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP2089183A1 (en) |
| CN (1) | CN101583462A (en) |
| WO (1) | WO2008056383A1 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102407417A (en) * | 2010-12-08 | 2012-04-11 | 昆山市瑞捷精密模具有限公司 | Arbitrary angle vertical welding jig |
| CN102407414A (en) * | 2010-11-26 | 2012-04-11 | 昆山市瑞捷精密模具有限公司 | Vertical welding jig |
| CN103501961A (en) * | 2011-06-16 | 2014-01-08 | 三菱重工业株式会社 | Machine tool |
| CN109732402A (en) * | 2019-03-14 | 2019-05-10 | 西安交通大学 | Multi-thread lathe space geometry error measure discrimination method based on laser interferometer |
| CN110631514A (en) * | 2018-05-18 | 2019-12-31 | 安徽大学 | Pentagonal prism type angle sensing measurement device and method based on multi-longitudinal mode self-mixing effect |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| EP3696631B1 (en) | 2019-02-13 | 2023-04-05 | SCM Group S.p.A. | Machining centre for machining wooden pieces, equipped with a measuring system |
| CN112113509B (en) * | 2019-06-20 | 2022-06-17 | 上海微电子装备（集团）股份有限公司 | Gantry type measuring device and gantry type measuring method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4715706A (en) | 1986-10-20 | 1987-12-29 | Wang Charles P | Laser doppler displacement measuring system and apparatus |
| US5940180A (en) * | 1994-10-11 | 1999-08-17 | Giddings & Lewis | Laser interferometer measurement system for use with machine tools |
| JP5264034B2 (en) * | 2000-06-21 | 2013-08-14 | ヨー ウント エルンスト リンク ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディートゲゼルシャフト | Cutting tool for cutting a workpiece provided with a tool part and a shank, and an apparatus for machining a workpiece provided with a receiving part for cutting tool |
| DE10031687A1 (en) * | 2000-06-29 | 2002-01-17 | Rexroth Star Gmbh | Linear motion device with laser measurement equipment e.g. glass dimension measuring scale, has inner bore on movable runner for accommodating laser beam reflector |
| US6873880B2 (en) * | 2001-12-26 | 2005-03-29 | Lockheed Martin Corporation | Machine for performing machining operations on a workpiece and method of controlling same |
-
2006
- 2006-11-08 EP EP06821769A patent/EP2089183A1/en not_active Withdrawn
- 2006-11-08 CN CNA2006800565477A patent/CN101583462A/en active Pending
- 2006-11-08 WO PCT/IT2006/000780 patent/WO2008056383A1/en active Application Filing
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102407414A (en) * | 2010-11-26 | 2012-04-11 | 昆山市瑞捷精密模具有限公司 | Vertical welding jig |
| CN102407417A (en) * | 2010-12-08 | 2012-04-11 | 昆山市瑞捷精密模具有限公司 | Arbitrary angle vertical welding jig |
| CN103501961A (en) * | 2011-06-16 | 2014-01-08 | 三菱重工业株式会社 | Machine tool |
| CN103501961B (en) * | 2011-06-16 | 2016-06-08 | 三菱重工工作机械株式会社 | Lathe |
| CN110631514A (en) * | 2018-05-18 | 2019-12-31 | 安徽大学 | Pentagonal prism type angle sensing measurement device and method based on multi-longitudinal mode self-mixing effect |
| CN110631512A (en) * | 2018-05-18 | 2019-12-31 | 安徽大学 | External incident type angle sensing measuring device and method for bi-orthogonal plane mirror based on multi-longitudinal-mode self-mixing effect |
| CN110631512B (en) * | 2018-05-18 | 2021-08-06 | 安徽大学 | External incident type angle sensing measuring device and method for bi-orthogonal plane mirror based on multi-longitudinal-mode self-mixing effect |
| CN109732402A (en) * | 2019-03-14 | 2019-05-10 | 西安交通大学 | Multi-thread lathe space geometry error measure discrimination method based on laser interferometer |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2089183A1 (en) | 2009-08-19 |
| WO2008056383A1 (en) | 2008-05-15 |
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