CN101429677A - Polycrystalline silicon ingot furnace - Google Patents
Polycrystalline silicon ingot furnace Download PDFInfo
- Publication number
- CN101429677A CN101429677A CNA2007101681255A CN200710168125A CN101429677A CN 101429677 A CN101429677 A CN 101429677A CN A2007101681255 A CNA2007101681255 A CN A2007101681255A CN 200710168125 A CN200710168125 A CN 200710168125A CN 101429677 A CN101429677 A CN 101429677A
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- Prior art keywords
- polycrystalline silicon
- furnace
- furnace bottom
- silicon ingot
- insulation base
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 32
- 239000002210 silicon-based material Substances 0.000 claims abstract description 16
- 239000000463 material Substances 0.000 claims abstract description 4
- 238000009413 insulation Methods 0.000 claims description 13
- 101700004678 SLIT3 Proteins 0.000 claims 2
- 102100027339 Slit homolog 3 protein Human genes 0.000 claims 2
- 238000005273 aeration Methods 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 239000003351 stiffener Substances 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 5
- 238000004321 preservation Methods 0.000 abstract 3
- 230000005540 biological transmission Effects 0.000 abstract 1
- 239000003638 chemical reducing agent Substances 0.000 abstract 1
- 239000003921 oil Substances 0.000 abstract 1
- 238000005266 casting Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 244000144985 peep Species 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
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- Silicon Compounds (AREA)
Abstract
The invention relates to a polycrystalline silicon ingot furnace, in particular to a solar polycrystalline silicon ingot furnace. The furnace bottom is installed on the furnace barrel through a hydraulic lifting cylinder and the furnace barrel, an observation hole is formed in the furnace bottom, a lower transmission component composed of a sliding seat, a lead screw, a speed reducer, a motor, a guide rail and the like is installed on the furnace bottom, and the sliding seat drives a heat preservation bottom plate to move through a connecting rod, so that the heat preservation bottom plate and a heat preservation cover are separated to meet the process requirement. A supporting column is arranged in the furnace bottom to support a heat conduction block, a heated polycrystalline silicon material and crucible system are arranged on the heat conduction block, the polycrystalline silicon material and crucible system are heated by a heater, and an observation hole and an inflation hole are arranged at the upper part of the furnace cover; three sets of temperature sensors are used to measure the process temperature; the hydraulic lifting oil cylinder is used for lifting the furnace bottom to realize charging and material taking.
Description
One, technical field
The present invention relates to a kind of polycrystalline silicon ingot or purifying furnace, particularly solar polysilicon ingot.
Two, background technology
Polycrystalline silicon ingot casting production method of the prior art, a kind of is that maintenance well heater and stay-warm case are motionless, moves down the crucible that fusing back polycrystalline silicon material is housed; Make and fusing back polycrystalline silicon material is housed changes with the well heater relative position, slowly shift out well heater, thereby make fusing back polycrystalline silicon material form longitudinal temperature gradient, slowly crystallization of polycrystalline silicon material finally forms polycrystalline silicon ingot casting after the fusing.Another kind is that maintenance well heater and crucible are motionless, stay-warm case moves up, make stay-warm case and break away between the insulation base plate down and form a slit, heat leaks from the slit, the crucible bottom cooling, thereby make fusing back polycrystalline silicon material form longitudinal temperature gradient, the slowly crystallization of fusing back polycrystalline silicon material finally forms polycrystalline silicon ingot casting.These two kinds of methods are in order to form the longitudinal temperature gradient of polycrystalline silicon material, and mobile piece volumes is big, weight is big, vibrate, creep easily in the moving process etc., influence the crystalline quality of polysilicon.
Three, technology contents
At the defective that above-mentioned prior art exists, it is a kind of simple in structure that the object of the invention is to provide, and motion is steadily light and handy, and is easy to install, the reliable a kind of polycrystalline silicon ingot or purifying furnace of technology.
Fig. 1 is a structural representation of the present invention;
Referring to shown in Figure 1, polycrystalline silicon ingot or purifying furnace of the present invention comprises that furnace bottom 2 carries by hydraulic pressure Oil-lifting jar 20 is connected with stove tube 6 and is installed in support 1 by supporting leg 5, adjustment parallels 4 On, bell 9 is installed on the stove tube 6, is provided with peep hole 3 on the furnace bottom 2, is installed with by slide 25, the underdrive section of the compositions such as leading screw 26, decelerator 27, motor 28, guiding rail 29 Part, slide 25 is connected with insulation base plate 21 by connecting rod 23, and realizes close by bellows 24 Envelope, slide 25 move through connecting rod 23 drive insulation base plates 21 and move, so that insulation base plate 21 Satisfy arts demand with stay-warm case 15 disengagements. Support column 22 is housed in the furnace bottom 2 supports heat-conducting block 18, place heated polycrystalline silicon material and crucible system 16 above the heat-conducting block 18, polycrystalline silicon material reaches Crucible system 16 heats by heater 17, and the heat energy of heater 17 is passed through water-cooled Cable 11 and electrode 8 transmit, and electrode 8 is connected with bell 9 by insulation sleeve 14; Stay-warm case 15 is fixing with stove tube 6 by leg 19, and stove tube 6 is vacuum orifice 7 again, and install on bell 9 tops Peep hole 12 and air-filled pore 13; Temperature sensor 10,30,31 is used for measuring process warm Degree; Hydraulic lift(ing) cylinder 20 is used at the bottom of the elevator furnace 2, realizes charging, gets material work.
During work, start hydraulic lift(ing) cylinder 20, fall furnace bottom 2, heat-conducting block 18, the insulation end The compositions such as plate 21 and slide 25, leading screw 26, decelerator 27, motor 28, guiding rail 29 The underdrive parts; Polycrystalline silicon material and crucible system 16 are placed on the heat-conducting block 18, right After, closed lower furnace bottom 2 etc., the heating polycrystalline silicon material is until fusing; Subsequently, regulate down biography Moving, drive insulation base plate 21 and descend by technological requirement, the temperature in the stay-warm case 15 is become Change, realize the directional solidification growth of polycrystalline silicon material;
Characteristics such as the present invention has simple in structure, and motion is steadily light and handy, and is easy to install, and technology is reliable are widely used in the preparation of solar energy polycrystalline silicon ingot casting and the directional solidification growth of other material.
Claims (3)
1, a kind of polycrystalline silicon ingot or purifying furnace, comprise that furnace bottom 2 is connected with stove tube 6 by hoist cylinder 20 and by supporting leg 5, adjust parallels 4 and be installed on the support 1, bell 9 is installed on the stove tube 6, furnace bottom 2 is provided with vision slit 3, the underdrive parts of being made up of slide 25, leading screw 26, speed reduction unit 27, motor 28, guiding rail 29 etc. are installed, slide 25 is connected with insulation base plate 21 by connecting rod 23, and by corrugated tube 24 realization sealings, slide 25 moves through connecting rod 23 drive insulation base plates 21 and moves, and makes insulation base plate 21 and stay-warm case 15 disengagements satisfy arts demand.Pillar stiffener 22 is housed in the furnace bottom 2 supports heat-conducting block 18, place heated polycrystalline silicon material and crucible system 16 above the heat-conducting block 18, polycrystalline silicon material and crucible system 16 heat by well heater 17, the heat energy of well heater 17 transmits by water-cooled cable 11 and electrode 8, and electrode 8 is connected with bell 9 by insulation covering 14; Stay-warm case 15 is fixing with stove tube 6 by leg 19, and stove tube 6 is vacuum orifice 7 again, and bell 9 tops are installed with vision slit 12 and aeration aperture 13; Temperature sensor 10,30,31 is used for measuring technological temperature; Hydraulic lift(ing) cylinder 20 is used at the bottom of the elevator furnace 2, realizes charging, gets material work.
2, polycrystalline silicon ingot or purifying furnace according to claim 1 is characterized in that slide 25 moves through connecting rod 23 drive insulation base plates 21 and moves, and makes insulation base plate 21 and stay-warm case 15 disengagements satisfy arts demand.
3, polycrystalline silicon ingot or purifying furnace according to claim 1 and 2 is characterized in that furnace bottom 2 is by hydraulic lift(ing) cylinder 20 realization liftings; Furnace bottom 2 is provided with vision slit 3.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101681255A CN101429677A (en) | 2007-11-07 | 2007-11-07 | Polycrystalline silicon ingot furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007101681255A CN101429677A (en) | 2007-11-07 | 2007-11-07 | Polycrystalline silicon ingot furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101429677A true CN101429677A (en) | 2009-05-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007101681255A Pending CN101429677A (en) | 2007-11-07 | 2007-11-07 | Polycrystalline silicon ingot furnace |
Country Status (1)
| Country | Link |
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| CN (1) | CN101429677A (en) |
Cited By (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101805922A (en) * | 2010-04-27 | 2010-08-18 | 王敬 | Heat shielding and ingot furnace with same |
| CN101851782A (en) * | 2010-05-19 | 2010-10-06 | 绍兴县精功机电研究所有限公司 | Double-cavity heat-insulation cage of second single crystal silicon ingot production furnace |
| CN101871124A (en) * | 2010-06-02 | 2010-10-27 | 王敬 | System for manufacturing polycrystalline ingot with improved charging capability |
| CN101892518A (en) * | 2010-07-08 | 2010-11-24 | 王敬 | System and method for manufacturing polycrystalline ingots |
| CN101906657A (en) * | 2010-07-08 | 2010-12-08 | 王敬 | System for manufacturing single crystal ingot |
| CN101928003A (en) * | 2010-08-24 | 2010-12-29 | 佳科太阳能硅(厦门)有限公司 | Solar polycrystalline silicon bell-type DS purifying furnace |
| CN101949059A (en) * | 2010-08-23 | 2011-01-19 | 清华大学 | Multi-axle simultaneously-lifting device of photovoltaic polycrystalline silicon ingot furnace bottom |
| CN102002755A (en) * | 2010-12-14 | 2011-04-06 | 上海晨华电炉有限公司 | Crystalline silicon ingot furnace thermal field structure with two-stage thermal insulation cage |
| CN102009176A (en) * | 2010-06-10 | 2011-04-13 | 常州天合光能有限公司 | Silicon powder vacuum compaction device and method thereof |
| CN102425005A (en) * | 2011-12-08 | 2012-04-25 | 常州天合光能有限公司 | Lower furnace body directional solidification system of polycrystal silicon ingot casting furnace and ingot casting technology |
| CN102425006A (en) * | 2011-12-30 | 2012-04-25 | 常州天合光能有限公司 | Method for growing ingot polycrystalline silicon by directional solidification method and thermal field thereof |
| CN102703979A (en) * | 2012-04-28 | 2012-10-03 | 浙江上城科技有限公司 | Self-adaptive sapphire crystallization furnace |
| CN102747412A (en) * | 2011-04-21 | 2012-10-24 | 江苏协鑫硅材料科技发展有限公司 | Device and application method for growing single-crystal silicon by directional solidification method |
| CN102925960A (en) * | 2012-11-27 | 2013-02-13 | 英利能源（中国）有限公司 | Method for reducing central defects of silicon ingots and ingot casting furnace using same |
| CN102965727A (en) * | 2012-12-10 | 2013-03-13 | 英利能源（中国）有限公司 | Polycrystalline silicon ingot and casting method thereof |
| CN103409790A (en) * | 2013-08-01 | 2013-11-27 | 安徽大晟新能源设备科技有限公司 | Lower heater lifting mechanism of pseudo-single crystal silicon ingot furnace |
| CN103409795A (en) * | 2013-08-01 | 2013-11-27 | 安徽大晟新能源设备科技有限公司 | Crucible platform lifting mechanism of pseudo-single crystal silicon ingot furnace |
| WO2016082525A1 (en) * | 2014-11-27 | 2016-06-02 | 吕铁铮 | Device for moving small heat insulating plate at bottom of polycrystalline silicon ingot furnace and polycrystalline silicon ingot furnace |
| CN106868585A (en) * | 2017-04-23 | 2017-06-20 | 连云港清友新能源科技有限公司 | For the thermal field structure of oversize silicon ingot |
| CN109663899A (en) * | 2017-10-16 | 2019-04-23 | 通用电气公司 | Method for casting mould |
| US11123790B2 (en) | 2017-10-16 | 2021-09-21 | General Electric Company | Apparatus for casting a mold |
-
2007
- 2007-11-07 CN CNA2007101681255A patent/CN101429677A/en active Pending
Cited By (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101805922A (en) * | 2010-04-27 | 2010-08-18 | 王敬 | Heat shielding and ingot furnace with same |
| CN101851782A (en) * | 2010-05-19 | 2010-10-06 | 绍兴县精功机电研究所有限公司 | Double-cavity heat-insulation cage of second single crystal silicon ingot production furnace |
| CN101871124A (en) * | 2010-06-02 | 2010-10-27 | 王敬 | System for manufacturing polycrystalline ingot with improved charging capability |
| CN101871124B (en) * | 2010-06-02 | 2013-01-16 | 王敬 | System for manufacturing polycrystalline ingot with improved charging capability |
| CN102009176A (en) * | 2010-06-10 | 2011-04-13 | 常州天合光能有限公司 | Silicon powder vacuum compaction device and method thereof |
| CN102009176B (en) * | 2010-06-10 | 2013-03-27 | 常州天合光能有限公司 | Silicon powder vacuum compaction device and method thereof |
| CN101892518B (en) * | 2010-07-08 | 2013-01-16 | 王敬 | System and method for manufacturing polycrystalline ingots |
| CN101906657A (en) * | 2010-07-08 | 2010-12-08 | 王敬 | System for manufacturing single crystal ingot |
| CN101906657B (en) * | 2010-07-08 | 2013-04-03 | 王敬 | System for manufacturing single crystal ingot |
| CN101892518A (en) * | 2010-07-08 | 2010-11-24 | 王敬 | System and method for manufacturing polycrystalline ingots |
| CN101949059A (en) * | 2010-08-23 | 2011-01-19 | 清华大学 | Multi-axle simultaneously-lifting device of photovoltaic polycrystalline silicon ingot furnace bottom |
| CN101949059B (en) * | 2010-08-23 | 2012-04-18 | 清华大学 | Multi-shaft synchronous lifting device for furnace bottom of photovoltaic polycrystalline silicon ingot furnace |
| CN101928003A (en) * | 2010-08-24 | 2010-12-29 | 佳科太阳能硅(厦门)有限公司 | Solar polycrystalline silicon bell-type DS purifying furnace |
| CN101928003B (en) * | 2010-08-24 | 2012-10-24 | 佳科太阳能硅(龙岩)有限公司 | Solar polycrystalline silicon bell-type DS purifying furnace |
| CN102002755A (en) * | 2010-12-14 | 2011-04-06 | 上海晨华电炉有限公司 | Crystalline silicon ingot furnace thermal field structure with two-stage thermal insulation cage |
| CN102747412B (en) * | 2011-04-21 | 2015-11-25 | 江苏协鑫硅材料科技发展有限公司 | For device and the using method thereof of growing single-crystal silicon by directional solidification method |
| CN102747412A (en) * | 2011-04-21 | 2012-10-24 | 江苏协鑫硅材料科技发展有限公司 | Device and application method for growing single-crystal silicon by directional solidification method |
| CN102425005A (en) * | 2011-12-08 | 2012-04-25 | 常州天合光能有限公司 | Lower furnace body directional solidification system of polycrystal silicon ingot casting furnace and ingot casting technology |
| CN102425006A (en) * | 2011-12-30 | 2012-04-25 | 常州天合光能有限公司 | Method for growing ingot polycrystalline silicon by directional solidification method and thermal field thereof |
| CN102703979B (en) * | 2012-04-28 | 2015-04-22 | 浙江上城科技有限公司 | Self-adaptive sapphire crystallization furnace |
| CN102703979A (en) * | 2012-04-28 | 2012-10-03 | 浙江上城科技有限公司 | Self-adaptive sapphire crystallization furnace |
| CN102925960A (en) * | 2012-11-27 | 2013-02-13 | 英利能源（中国）有限公司 | Method for reducing central defects of silicon ingots and ingot casting furnace using same |
| CN102925960B (en) * | 2012-11-27 | 2015-09-09 | 英利能源（中国）有限公司 | Reduce the ingot furnace of methods and applications the method for defect in the middle part of silicon ingot |
| CN102965727B (en) * | 2012-12-10 | 2015-05-13 | 英利能源（中国）有限公司 | Polycrystalline silicon ingot and casting method thereof |
| CN102965727A (en) * | 2012-12-10 | 2013-03-13 | 英利能源（中国）有限公司 | Polycrystalline silicon ingot and casting method thereof |
| CN103409795A (en) * | 2013-08-01 | 2013-11-27 | 安徽大晟新能源设备科技有限公司 | Crucible platform lifting mechanism of pseudo-single crystal silicon ingot furnace |
| CN103409790A (en) * | 2013-08-01 | 2013-11-27 | 安徽大晟新能源设备科技有限公司 | Lower heater lifting mechanism of pseudo-single crystal silicon ingot furnace |
| CN103409790B (en) * | 2013-08-01 | 2016-02-03 | 安徽大晟新能源设备科技有限公司 | The lower well heater hoisting appliance of accurate single-crystal ingot casting furnace |
| WO2016082525A1 (en) * | 2014-11-27 | 2016-06-02 | 吕铁铮 | Device for moving small heat insulating plate at bottom of polycrystalline silicon ingot furnace and polycrystalline silicon ingot furnace |
| CN106868585A (en) * | 2017-04-23 | 2017-06-20 | 连云港清友新能源科技有限公司 | For the thermal field structure of oversize silicon ingot |
| CN109663899A (en) * | 2017-10-16 | 2019-04-23 | 通用电气公司 | Method for casting mould |
| US11123791B2 (en) | 2017-10-16 | 2021-09-21 | General Electric Company | Method for casting a mold |
| US11123790B2 (en) | 2017-10-16 | 2021-09-21 | General Electric Company | Apparatus for casting a mold |
| CN109663899B (en) * | 2017-10-16 | 2022-04-05 | 通用电气公司 | Method for casting a mould |
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| C06 | Publication | ||
| PB01 | Publication | ||
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
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Open date: 20090513 |