CN101297358A - Method of manufacturing magnetic recording media, magnetic recording media and magnetic read/write device - Google Patents
Method of manufacturing magnetic recording media, magnetic recording media and magnetic read/write device Download PDFInfo
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- CN101297358A CN101297358A CNA2006800397683A CN200680039768A CN101297358A CN 101297358 A CN101297358 A CN 101297358A CN A2006800397683 A CNA2006800397683 A CN A2006800397683A CN 200680039768 A CN200680039768 A CN 200680039768A CN 101297358 A CN101297358 A CN 101297358A
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Abstract
A manufacturing method which is capable of easily and inexpensively manufacturing discrete track-type magnetic recording media is provided. A method of manufacturing magnetic recording media having a main surface on which magnetic tracks 4 are disposed in a substantially concentric arrangement and on which grooves 5 for magnetically separating radially adjoining magnetic tracks 4 from one another are formed is characterized by forming on a flat substrate 1 at least a magnetic recording layer 2 so as to fabricate a workpiece 1a, then pressing a stamper having protrusions corresponding to the grooves 5 against a main surface of the workpiece so as to transfer the shape of the protrusions to the workpiece and form grooves 5 between the magnetic tracks 4.
Description
Technical field
The present invention relates to make method, magnetic recording media and the magnetic read/write apparatus of magnetic recording media.
The right of priority of the Japanese patent application No.2005-327414 that requires to submit on November 11st, 2005, the Japanese patent application No.2006-046291 that submits on February 23rd, 2006 and the U.S. Provisional Patent Application No.60/738599 that submitted on November 22nd, 2005 is incorporated herein its content with for referencial use.
Background technology
In recent years, along with the magnetic recording media that requires to use at the external memory that is used for computing machine for example hard disk increase information storage, produce the signal density that further increases per unit surface area record.In order to obtain the raising of surface recording density, need to increase linear recording density and track recording density one or both wherein.
Recently a kind of effective ways that are used to improve linear recording density that proposed are so-called perpendicular magnetic recording methods, this method utilization uses single magnetic pole magnetic head of perpendicular magnetic recording medium to come executive logging, and this perpendicular magnetic recording medium has the CoCr alloy-based magnetic recording layer that has magnetic anisotropy on the vertical direction of substrate and has the soft ferromagnetic layer of permalloy etc.
A kind of effective ways that are used to improve track recording density that proposed are such methods, and this method utilization has the discrete track-type magnetic recording media of magnetic track of magnetic decoupling to avoid producing edge noise (fringing noise) in read and write operating period.
Propose two kinds of different being used to and made the method for this discrete track-type magnetic recording media.A kind of method comprises and etches away the magnetospheric part (for example referring to patent documentation 1) that is formed on the flat base.In another approach, in the substrate that in the signal record zone, is pre-formed its protrusions and sunk part by technology, form magnetosphere (for example referring to patent documentation 2) such as jet moulding.
Patent documentation 1:JP-A 4-310621
Patent documentation 2:JP-A 9-54946
Summary of the invention
In preceding a kind of method owing in sunk area, there is not a magnetosphere, so the data of record by magnetic resolution and can obtain to be enough to utilize the signal to noise ratio (S/N ratio) of servo positioning, yet very difficult shortening is used to remove the magnetospheric dry etching time.And, must from unnecessary zone, accurately remove only magnetospheric accurate aequum, make to be difficult to set and the control etching condition.This situation causes this method to be not suitable for use in providing the common mass production processes of good yield rate.
About a kind of method in back, except utilizing the substrate wherein formed projection and sunk part, can also use with prior art in identical media fabrication process, make this method be suitable for batch process.Yet, owing to magnetosphere is retained in the sunk area, so a little less than the magnetic resolution of recorded data.And the signal to noise ratio (S/N ratio) of servosignal is little, feasible suitably positioning head.
Therefore patent documentation 2 proposes a kind of magnetizing method in the opposite direction that is used between depression and elevated regions.Yet, owing to need utilize magnetic head format, be intended to be damaged widely by the advantage of getting rid of the discrete track-type magnetic recording media that servo write operation reduces cost.And, between sunk area and elevated regions, need big difference in height, thereby reduce the flight stability of magnetic head.Equally, because the track density that increases, projection and sunk part have higher aspect ratio, make substrate more be difficult to be shaped and further make the narrowed width of sunk area.When forming magnetic recording layer on the top in this substrate, it finally blocks sunk area.In this case, a new problem arose, comprises such as the formation of the defective of peeling off with breaking of magnetic recording layer and the interference of relevant magnetic head.
In order to solve the above-mentioned shortcoming of prior art, envision the present invention.Therefore, an object of the present invention is to provide a kind of manufacture method that can easily make the discrete track-type magnetic recording media with low cost.Another object of the present invention provides such magnetic recording media.Another purpose provides a kind of magnetic read/write apparatus.
Therefore, the invention provides following summary of the invention.
(1) a kind of manufacturing has the method for the magnetic recording media of first type surface, on described first type surface, magnetic track is set by substantially concentric arrangement, and on described first type surface, be formed for groove with the mutual magnetic resolution of magnetic track of radially adjoining, described method is characterised in that, in smooth substrate, form at least magnetic recording layer to make workpiece, the pressing mold that will have the projection corresponding with described groove then is pressed on the first type surface of described workpiece, so that the shape of described projection is transferred to described workpiece and form groove between described magnetic track.
(2) according to the method for the manufacturing magnetic recording media of above-mentioned (1), it is characterized in that the top of described projection has the curved surface that satisfies relational expression 0.75W≤R≤1.25W, wherein R is the radius-of-curvature of described curved surface, and W is the width of described projection.
According to the method for the manufacturing magnetic recording media of above-mentioned (1) or (2), it is characterized in that (3) described groove has 50 to 100nm the degree of depth.
(4) according to the method for the manufacturing magnetic recording media of any one in above-mentioned (1) to (3); it is characterized in that; make wherein forming described magnetic recording layer in the described substrate and on described magnetic recording layer, forming the workpiece of protective seam, described pressing mold is pressed on the described first type surface of described workpiece then.
(5) according to the method for the manufacturing magnetic recording media of any one in above-mentioned (1) to (3), it is characterized in that, described pressing mold is pressed on the described first type surface of described workpiece, on described magnetic recording layer, form protective seam then.
(6) according to the method for the manufacturing magnetic recording media of any one in above-mentioned (1) to (5), it is characterized in that, described pressing mold is pressed on the described workpiece, up to the shape of described projection is transferred to described substrate.
(7) according to the method for the manufacturing magnetic recording media of any one in above-mentioned (1) to (6), it is characterized in that, described pressing mold is pressed on the described workpiece, locate attenuation in the bottom of described groove up to the thickness of described magnetic recording layer.
According to the method for the manufacturing magnetic recording media of any one in above-mentioned (1) to (6), it is characterized in that (8), described pressing mold be pressed on the described workpiece that the place, bottom at described groove disconnects up to described magnetic recording layer.
(9) according to the method for the manufacturing magnetic recording media of any one in above-mentioned (1) to (8), it is characterized in that described magnetic recording layer has perpendicular magnetic anisotropic.
(10) according to the method for the manufacturing magnetic recording media of any one in above-mentioned (1) to (9), it is characterized in that, between described substrate and described magnetic recording layer, oriented layer is set.
(11) according to the method for the manufacturing magnetic recording media of above-mentioned (10), it is characterized in that, between described substrate and described oriented layer, soft ferromagnetic layer is set.
(12) according to the method for the manufacturing magnetic recording media of any one in above-mentioned (1) to (11), it is characterized in that described substrate is made by the material that is selected from plastics, glass and aluminium alloy.
(13) a kind of magnetic recording media with first type surface; on described first type surface, magnetic track is set by substantially concentric arrangement; and on described first type surface, be formed for groove with the mutual magnetic resolution of magnetic track of radially adjoining; described medium is characterised in that; the substrate that has formed groove therein has magnetic recording layer at least and the protective seam above described magnetic recording layer that forms thereon, and described magnetic recording layer has less thickness or locates disconnection in the bottom of described groove.
(14) magnetic recording media of above-mentioned (13) is characterized in that, the bottom of described groove has the curved surface that satisfies relational expression 0.75W '≤R '≤1.25W ', and wherein R ' is the radius-of-curvature of described curved surface, and W ' is the width of described groove.
(15) magnetic recording media of above-mentioned (13), wherein said magnetic recording layer have the thickness smaller or equal to 2nm at the place, bottom of described groove.
(16) a kind of magnetic read/write apparatus, comprise magnetic recording media and magnetic head, described magnetic head writes magnetic signal described magnetic recording media and read magnetic signal from described magnetic recording media, described magnetic read/write apparatus is characterised in that, described magnetic head is single magnetic pole magnetic head, and described magnetic recording media is the magnetic recording media of above-mentioned (13) or (14).
As mentioned above, the present invention can form more highdensity magnetic track, therefore and not by means of little manufacturing complexity, restive, and can obtain easily and cheap having of making is suitable for the more discrete track-type magnetic recording media of the good magnetic characteristic of high record density such as dry etching.
Description of drawings
Fig. 1 is the schematic sectional view that illustrates according to the structure of magnetic recording media of the present invention.
Fig. 2 provides the schematic sectional view of the manufacturing step of the magnetic recording media shown in the exemplary plot 1.
Fig. 3 is the schematic front view (FV) of pressing mold.
Fig. 4 is the amplification front view of the projection on the pressing mold.
Fig. 5 provides the schematic sectional view of the manufacturing step of example pressing mold.
Fig. 6 illustrates the schematic sectional view that the structure of oriented layer wherein is set on magnetic recording media.
Fig. 7 illustrates the schematic sectional view that the structure of soft ferromagnetic layer wherein is set on magnetic recording media.
Fig. 8 is the curve map of the relation of track pitch and servosignal volume efficiency.
Fig. 9 is the curve map of the relation of track pitch and error rate.
Figure 10 is the curve map of the relation of gash depth and servosignal volume efficiency.
Figure 11 is the curve map of relation of the frequency of gash depth and manufacturing defect.
Figure 12 is the curve map of the relation of track pitch and error rate ratio.
Figure 13 is the curve map in the relation of the magnetic recording layer thickness at channel bottom place and error rate ratio.
Embodiment
Describe method in detail below in conjunction with accompanying drawing according to method, magnetic recording media and the magnetic read/write apparatus of manufacturing magnetic recording media of the present invention.Below in the explanation among the related figure, for convenience, amplify sometimes principal character is shown, so that be more readily understood their characteristic, but the relative size of each element that illustrates in the drawings can be different from physical size.
Magnetic recording media
At first, describe according to magnetic recording media of the present invention.
With reference to figure 1; according to magnetic recording media of the present invention is discrete track-type magnetic recording media (disk); it can be used for for example hard disk drive (HDD) of magnetic read/write apparatus, and at least by magnetic disk substrate 1, be formed on the magnetic recording layer 2 on the magnetic disk substrate 1 and the protective seam 3 that is formed on the magnetic recording layer 2 is formed.
This magnetic recording media has first type surface, by substantially concentric arrangement magnetic track 4 is set on this first type surface, and is formed for the groove 5 with the magnetic track 4 mutual magnetic resolution of radially adjoining on this first type surface.
The bottom 5a of groove 5 has the curved surface that satisfies relational expression 0.75W '≤R '≤1.25W ', and wherein R ' is that the radius-of-curvature and the W ' of curved surface are the width of groove.R ' ≈ R and W ' ≈ W; That is, R ' is identical with R basically, and W ' is identical with W basically.
For example, magnetic recording layer 2 is for having the magnetic film of perpendicular magnetic anisotropic.As this magnetic recording layer 2, for this ferrimagnet, easy magnetizing axis mainly is orientated on the direction perpendicular to the first type surface of magnetic disk substrate 1 with ferrimagnet.Ferrimagnet is preferably has at least 1 * 10
5The material of the magnetic anisotropy energy of erg/cc.The illustrative examples of this ferrimagnet comprises the alloy that contains cobalt and platinum, for example CoPt and CoCrPt, and the alloy that contains iron and platinum, for example FePt.In addition, can be with such as SiO
2, Cr
2O
3, ZrO
2, Al
2O
3And Ta
2O
5Oxide add in these ferrimagnets.Magnetic recording layer 2 can be made of the multiple magnetic material such as the different component of Co/Pt or Co/Pd that forms successive layers, perhaps can be made of magnetic material that forms successive layers and nonmagnetic substance.
When magnetic head contacted with medium, protective seam 3 was protected magnetic recording layers 2 not suffer erosion and is prevented to damage the surface of magnetic recording media.Conventional material known can be used for magnetic recording layer 3.The illustrative examples of protective seam 3 preferably includes by carbon and constitutes or comprise such as SiO
2Or ZrO
2The material of material.This protective seam 3 preferably has 1 to 5nm thickness.The thickness setting of this protective seam 2 can be provided the protective seam with abundant durability and allows to reduce gap between magnetic head and magnetic recording layer 2 in 1 to 5nm scope, make it possible to achieve higher recording density.
Make the method for magnetic recording media
Next, description is according to the method for manufacturing magnetic recording media of the present invention.
Fig. 2 provides the schematic sectional view of the manufacturing step of the above-mentioned magnetic recording media shown in the exemplary plot 1.
As shown in Figure 2, the inventive method of making magnetic recording media is characterised in that, on smooth magnetic disk substrate 1, form at least one magnetic recording layer 2 to make workpiece 1a, the pressing mold 11 that will have the projection 12 corresponding with groove 5 then is pressed on the first type surface of workpiece 1a, so that the shape of projection 12 is transferred to workpiece and form groove 5 between magnetic track 4.
Particularly, when the above-mentioned magnetic recording media shown in the shop drawings 1, as shown in Fig. 2 A, at first provide the magnetic disk substrate 1 that has been shaped and has been processed into mirrored surface at the first type surface place.
Next, as shown in Fig. 2 B,, form magnetic recording layer 2 by sputter on the magnetic disk substrate 1 of first type surface with complanation.
Then, as shown in Fig. 2 C,, form protective seam 3 by sputter on magnetic recording layer 2.
This provides the workpiece that is made of magnetic disk substrate 1 1a, has one after the other deposited magnetic recording layer 2 and protective seam 3 on this magnetic disk substrate 1.
Next, as shown in Fig. 2 D, by method for stamping pressing mold 11 is pressed on the first type surface of workpiece 1a of manufacturing.
With reference to figure 3, this pressing mold 11 with the surface of workpiece 1a contact on have the projection 12 corresponding with the shape that in fact will be formed on the groove 5 on the workpiece 1a.Shown in amplifying among Fig. 4, these projections 12 are as the phase anti-graphics (negative pattern) of groove 5 and therefore have top 12a, and this top 12a has rounded curved surface, rather than rectangle.
The pressing mold 11 that can have this projection 12 by the technology manufacturing that comprises the step that goes out as shown in Figure 5.At first, on by the substrate 13 of making, form positive resist layer 14 (a) such as the material of silicon.Next, common electron beam irradiation is carried out in the position of the sunk area by pressing mold 11 will be set therein, electron beam irradiation lower-wattage, the broad width of the surface layer part by the resist layer 14 that only exposes subsequently is to resist layer 14 double expose (b).Remove resist layer 14 (c) by developing then, subsequently surface treatment is made its conduction and carry out first nickel electroforming operation (d), in substrate 13, form plating layer 15 thus.Next, remove this plating layer 15 (e) from substrate 13.Utilize oxygen plasma to come the surface of the removed plating layer 15 of oxidation then, afterwards to its processing so that its conduction and carry out second nickel electroforming operation (f).At last, remove plating layer 15, provide pressing mold 11 (g).
Next, as shown in Fig. 2 D, this pressing mold 11 and workpiece 1a are stacked together, be placed on (not shown) on the platform then, wherein under the condition of exerting pressure pressing mold 11 is being pressed on the first type surface of workpiece 1a by piston.
At this moment, add hot-die 11 and workpiece 1a and remain on magnetic disk substrate 1 the shape maintains temperature or on.In practice of the present invention, use the non-magnetic substrate of making by for example plastics, glass or aluminium alloy as magnetic disk substrate 1, and the shape maintains temperature or on carry out the impression of certain material.That is,, pressing mold 11 is pressed on the workpiece 1a, up to because the distortion that the transfer of this projection 12 causes arrives the superficial layer of magnetic disk substrate 1 for the shape of projection 12 is transferred to magnetic disk substrate 1.
When using glass as magnetic disk substrate 1, heating-up temperature is than the height that is used for plastics.In this case, in order to prevent the deterioration of magnetic recording layer 2 grades, preferably in inert atmosphere, carry out figure transfer.
Next, as shown in Fig. 2 E, peel off pressing mold 11, between magnetic track 4, groove 5 is formed the transfer shape of projection 12 thus from workpiece 1a.At last, form the perfluorinate lubricant layer, provide thus according to magnetic recording media of the present invention.
As mentioned above, the invention enables the magnetic track 4 that can form higher density, therefore and not by means of micro-fabrication technology complexity, restive, and can be easily and make at an easy rate and have the discrete track-type magnetic recording media that is more suitable in the good magnetic characteristic of high record density such as dry etching.
As shown in Figure 4, for the projection on the pressing mold 11 12, it is favourable containing the top with the curved surface that satisfies relational expression 0.75W≤R≤1.25W, and wherein R is the radius-of-curvature of curved surface, and W is the width of projection.
Therefore, during the transfer of the shape of projection 12, because plastic yield, the projection of pressing mold 11 is pressed in each layer of being positioned at that laterally to discharge workpiece 1a on the first type surface of workpiece 1a by the 5a place, bottom that shifts the groove 5 that forms.As a result, the magnetic recording layer at 5a place, the bottom of these grooves 5 has less thickness or is disconnected.
Yet, when R＜0.75W, form flat site at 12a place, the top of projection 12, so that the horizontal discharge of each layer of workpiece 1a is inadequate.On the other hand, when R＞12.5, the top 12a of projection 12 has sharp-pointed angular shape, and this sharp-pointed angular shape makes shape be easy to the deterioration along with the repeated use of pressing mold 11, and therefore shortens the serviceable life (the repeated use number of times that it can tolerate) of pressing mold 11.The increase of the replacement frequency that is caused has reduced throughput rate, and manufacturing cost has been increased in the increase of the quantity of needed pressing mold.
And groove 5 preferably has the degree of depth more than or equal to 50nm.By having such degree of depth, the magnetic recording layer 2 that is positioned at 5a place, groove 5 bottom can be discharged when shifting fully.In addition, by projection on the first type surface of magnetic recording media and the difference in height between the concave surface portion are set in 50 in the scope of 100nm, can guarantee stable flying magnetic head characteristic.
When groove 5 had the degree of depth less than 50nm, the discharge of magnetic recording layer that is arranged in the bottom 5a of groove 5 was inadequate.If have, will produce noise in data read and write operating period, perhaps because the reduction of the output of servosignal can not obtain enough signal to noise ratio (S/N ratio)s at the 5a place, bottom that is retained in groove perpendicular to the anisotropic magnetic recording layer 2 on the direction of substrate.On the other hand, under groove 5 degree of depth greater than 100nm, head gap (head clearance) will be therein the little zone of the surface area of bossing (for example, servo area) (for example neutralizes the big zone of the surface area of bossing therein, the data area) changes in, make and to carry out stable data read and write operation.
The magnetic recording layer 2 at the 5a place, bottom of groove 5 preferably has the thickness smaller or equal to 2nm, is preferably smaller or equal to 1nm.By being smaller or equal to 2nm, become less in the magnetization of the magnetic recording layer 2 at 5a place, the bottom of groove with thickness setting.And, along with the bottom 5a of groove 5 shape bending with the top 12a on the pressing mold projection, the orientation offset from perpendicular with respect to substrate of magnetic recording layer 2 makes and can eliminate better because the magnetization of the magnetic recording layer 2 at the place, bottom of groove 5 and the noise that causes during data read/write, the reduction and because the deterioration of the error rate that marginalisation causes of servosignal output.Under thickness greater than 2nm, will keep magnetic anisotropy being on the direction vertical with substrate with the bottom 5a of groove, cause the noise during data read/write to produce, the reduction of servosignal output and because the deterioration of the error rate that marginalisation causes.
Preferably, the heating-up temperature during shifting is set in the above-mentioned shape maintains temperature that is at least base material but is lower than fusing point.Temperature is set in this scope can be so that the distortion that is caused by the transfer of elevated regions 12 arrives the superficial layer of magnetic disk substrate 1.This allow to suppress damage, for example distortion of transition diagram or subside, and in addition, it can also obtain enough figure differences in height, can obtain obvious and loyal transition diagram.
On the other hand, if the heating-up temperature when shifting is lower than the shape maintains temperature of base material,, can not obtain enough gash depths because the distortion that caused by figure transfer does not take place in the surface of magnetic disk substrate 1.In addition, the figure of transfer will have low intensity and will take place easily such as the damage of being out of shape or subsiding.On the contrary, the heating-up temperature when shifting is in or when being higher than fusing point, the surface of magnetic disk substrate 1 will melt and be out of shape, and makes the crystal orientation confusion of magnetic recording layer 2 and finally causes the deterioration of magnetic characteristic.In addition, because the difference between the thermal expansivity of magnetic disk substrate 1 and magnetic recording layer 2, with the problem of peeling off or breaking that is easy to cause such as magnetic recording layer 2.
In practice of the present invention,, utilize above-mentioned pressing mold 11 to carry out transfer step by after formation protective seam 3 is made workpiece 1a on magnetic recording layer 2 then at formation magnetic recording layer 2 on the magnetic disk substrate 1.
Carry out transfer step for form protective seam 3 on magnetic recording layer 2 after, the surface that is necessary to prevent magnetic recording layer 2 is owing to contact the deterioration that causes with air etc.In addition, protective seam 3 is than magnetic recording layer 2 plasticity_resistant deformation more, and therefore trends towards being retained in the 5a place, bottom of groove 5.As a result, because needn't after transfer step, provide protective seam 3 to form step thus,, make it possible to make magnetic recording media with high weather resistance so can simplify manufacturing operation.
In practice of the present invention, the film such as magnetic recording layer 2 that is discharged from by plastic yield is retained on the sidewall of groove, but owing to magnetic anisotropy is offset from the direction perpendicular to substrate, so it does not influence data read/write basically.
In practice of the present invention, state in the use after the transfer step of pressing mold 11, can also on magnetic recording layer 2, form protective seam 3.
In this case, when before forming protective seam 3, carrying out transfer step, owing on the surface of magnetic recording layer 2, do not have protective seam 3 with high rigidity, so can stably carry out plastic yield by 11 pairs of magnetic recording layers 2 of pressing mold.On the other hand, the surface of known magnetic recording layer 2 may contact with air and the therefore possibility of deterioration, preferably carries out this transfer step in inert gas atmosphere.
In addition, in practice of the present invention, after the transfer step of utilizing above-mentioned pressing mold 11, can on the surface of workpiece 1a, form protective seam 3 once more.
In this case, by covering in the above-mentioned transfer step from wherein discharging the groove of magnetic recording layer 2 and protective seam 3 with protective seam 3 again, can prevent to corrode and because the deterioration of the magnetic characteristic that causes from the oxidation of the sidewall of groove 5 etc.If form this protective seam 3 once more, this layer is preferably has good against weather and the diamond-like-carbon of abrasion resistance (DLC) film.This film preferably has the thickness smaller or equal to 5nm.
According to the material of making protective seam 3 and the mechanical property of film, exist protective seam 3 in the groove 5 wherein in transfer step, to keep and situation about not being discharged from, make it possible to realize sufficient against weather.Therefore, it is selectable whether forming protective seam 3 once more.
Alternatively, as shown in Figure 6, can have the structure that oriented layer 6 wherein is set between magnetic disk substrate 1 and magnetic recording layer 2 according to magnetic recording media of the present invention.
Oriented layer 6 is such layers, crystal orientation and crystallite dimension in the layer that this layer control directly forms above it.It preferably has about 5 to 30nm thickness.
Preferably, oriented layer 6 has the structure of hexagon closestpacking (hcp).This makes it possible to control well the vertical orientated of magnetic recording layer 2 and magnetic crystal grain size.The illustrative examples of the oriented layer 6 of the operable hcp of having structure comprises by ruthenium or comprises those that the ruthenium alloy of boron, carbon, phosphorus, silicon, aluminium, chromium, cobalt, tantalum, tungsten, praseodymium, neodymium or samarium for example makes.
Alternatively, oriented layer 6 can be stacked as multilayer by the material layer with heterogeneity or structure.For example, can use first oriented layer that has deposited second oriented layer thereon with face-centered cubic (fcc) structure with hcp structure.Like this, but can improve the orientation of magnetic recording layer 2, suppress the increase of crystallite dimension.The illustrative examples of the oriented layer 6 of the operable fcc of having structure comprises platinum and comprises for example platinum alloy of boron, carbon, phosphorus, silicon, aluminium, chromium, cobalt, tantalum, tungsten, praseodymium, neodymium or samarium; Palladium and comprise for example palldium alloy of boron, carbon, phosphorus, silicon, aluminium, chromium, cobalt, tantalum, tungsten, praseodymium, neodymium or samarium; And such as the NiFe alloy of NiFe and NiFeW.
Alternatively, as shown in Figure 7, can have the configuration that soft ferromagnetic layer 7 wherein is set between magnetic disk substrate 1 and oriented layer 6 according to magnetic recording media of the present invention.
Soft ferromagnetic layer 7 is used to increase the vertical component of the magnetic flux that is produced by magnetic head and the direction of magnetization of the magnetic recording layer 2 of record data is fixing in vertical direction more thereon.
Can will comprise the soft magnetic material of iron, nickel or cobalt as soft ferromagnetic layer 7.The illustrative examples of this soft magnetic material comprises FeCo, FeCo alloy such as FeCoB and FeCoAl, FeNi, such as FeNiMo, FeNiCr, the FeNi alloy of FeNiSi and FeNiB, FeAl, such as FeAlSi, the FeAl alloy of FeAlSiCr and FeAlO, FeCr, FeCr alloy such as FeCrTi and FeCrCu, FeTa, FeTa alloy such as FeTaC and FeTaN, FeMg alloy such as FeMgO, FeZr, FeZr alloy such as FeZrN, the FeC alloy, the FeN alloy, the FeSi alloy, the FeP alloy, the FeNb alloy, FeHf, FeHf alloy such as FeHfN, FeB, FeB alloy such as FeBCr, the CoB alloy, the CoP alloy, CoNi, CoNi alloy such as CoNiB and CoNiP, NiP alloy and FeCoNi, FeCoNi alloy such as FeCoNiP and FeCoNiB.In addition, above-mentioned soft magnetic material can be to have such as Al
2O
3, ZrO
2, SiO
2, Ta
2O
5And TiO
2Oxide matrix in the material of the granular structure that disperses.
Selectively, soft ferromagnetic layer 7 can be formed the successive layers of soft magnetic material, perhaps form the successive layers of soft magnetic material and nonmagnetic substance with heterogeneity.Especially, when the structure of the ruthenium film that forms between the layer that has at soft magnetic material was provided for soft ferromagnetic layer 7, the generation that is different from the neticdomain wall of soft magnetism was suppressed, and makes it possible to suppress spike noise.
Magnetic read/write apparatus
Next, describe according to magnetic read/write apparatus of the present invention.
Magnetic read/write apparatus of the present invention mainly is made up of above-mentioned magnetic recording media, motor, wheel hub, servo control mechanism, magnetic head and controller.Can use ring head or single magnetic pole magnetic head as magnetic head, as long as it is suitable for read and write from perpendicular system.
In this magnetic read/write apparatus, the above-mentioned magnetic recording media of the application of the invention, the fringing that can reduce The noise and produce at the edge of magnetic track 3 makes track density to improve.In addition, because the magnetic track 4 of radially adjoining passes through groove 4 magnetic resolution each other, this has relaxed the restriction that magnetic head is write width.And, provide servosignal to magnetic recording media in advance, make and can repel servo writing, therefore can realize lower cost manufacturing.Like this, can obtain to be suitable for the low-cost magnetic read/write apparatus of high density recording.
Example
Provide example below with example advantageous effects of the present invention, it should be understood that, following example is not a limitation of the present invention.
Example 1
In example 1, the substrate of being made by polycarbonate is provided, and (external diameter is 48mm; Thickness is 0.508mm; Internal diameter is 15mm), and clean surface, vacuum drying in stove then (100 ℃, 1mmHg (=133.322Pa), 1 hour).
Next, substrate is placed in the film forming room of DC magnetic control sputtering system (C-3010 is made by AnelvaCorporation), and the inside of chamber is evacuated to 1 * 10
-5The end vacuum of Pa.(cobalt content is 89at% by using 89Co-4Zr-7Nb; Zirconium content is 4at%; Content of niobium is 7at%) the next thick soft ferromagnetic layer of 80nm that in this substrate, forms of target sputter, use the platinum target on soft ferromagnetic layer, to form the first thick oriented layer of 3nm, use the ruthenium target on first oriented layer, to form the second thick oriented layer of 12nm, use 65Co-10Cr-15Pt-10SiO
2(cobalt content is 65 moles of %; Chromium content is 10 moles of %; Platinum content is 15 moles of %; SiO
2Content is 10 moles of %) target forms the thick magnetosphere of 12nm on second oriented layer, and the thick protective seam of 4nm that formation is made by carbon on the magnetosphere of back, makes workpiece thus.
Next, with on the pedestal of workpiece setting in marking press and the nickel electroforming pressing mold that will be connected to the pressurizing piston end be pressed on the workpiece, (track pitch is 180nm with track pattern by impression thus; Track width is 80nm; Gash depth is 80nm) and the servo data figure transfer to workpiece.
Pressing mold its with the face of workpiece contact on have and the actual corresponding projection of shape that will transfer to workpiece.These projections as the phase anti-graphics have rounded in its end and radius-of-curvature is the curved surface of 80nm.The atomic force microscope (AFM) that use is made by Digital Instrument, the radius of curvature R of the curved surface on the projection of measurement pressing mold and the width W of projection.When shifting, pedestal and pressing mold are heated to and remain on 150 ℃.Execution is forced into 35kgf/cm
2(=343N/cm
2) pressure.
Peel off pressing mold from workpiece then, subsequently workpiece is placed in the film forming room of DC magnetic control sputtering system (C-3010 is made by Anelva Corporation), and the inside of chamber is evacuated to 1 * 10
-5The end vacuum of Pa.Next, use ethylene gas, form the protective seam of the 3nm that constitutes by diamond-like-carbon by chemical vapor deposition as parent material and 13.5MHz radio-frequency power supply.At last, on protective seam, form the lubricating layer of the thick perfluoro-ether of 2nm, thereby finish manufacturing according to the magnetic recording media of example 1.Use is measured the radius of curvature R at the channel bottom place in this magnetic recording media by the atomic force microscope that Digital Instrument makes ' and the width W ' of groove.
Introduce the magnetic recording media of example 1 in the magnetic read/write apparatus and the read and write of execution data,, confirm that head position operation and data read/write operation are suitable as its result.
Use giant magnetoresistance (GMR) device as reading the magnetic head of side, and use single magnetic pole type GMR magnetic head writing side.With oscillograph observation head position signal.Under the linear recording density of 960kFCI, assess read/write characteristics, and obtain 1 * 10
-5.7Error rate.
Example 2
In example 2, be set at 360 ℃ and the pressure in the argon atmospher is set at 2,000kgf/cm except using the temperature of tempered glass (the N5 glass of making by Hoya) as substrate, during will impressing
2(=19,613N/cm
2) outside, by with example 1 in identical method make magnetic recording media according to example 2.
Next, the magnetic recording media of example 2 is incorporated in the magnetic read/write apparatus, and carries out the data read and write,, confirm that it is suitable that head position operation and data read/write are operated as its result.
Will for read side use the GMR device and make write side for the GMR magnetic head of single magnetic pole type as magnetic head.With scope observation head position signal.Under the linear recording density of 960kFCI, assess read/write characteristics, and obtain 1 * 10
-5.5Error rate.
Example 3
In example 3, except use have thereon the aluminium substrate of the NiP plating layer that forms and will impress during temperature be set at 300 ℃, by with example 1 in identical method manufacturing according to the magnetic recording media of example 3.
Next, the magnetic recording media of example 3 is incorporated in the magnetic read/write apparatus, and carries out the data read and write,, confirm that it is suitable that head position operation and data read/write are operated as its result.
Will for read side use the GMR device and make write side for the GMR magnetic head of single magnetic pole type as magnetic head.With oscillograph observation head position signal.Under the linear recording density of 960kFCI, assess read/write characteristics, and obtain 1 * 10
-5.3Error rate.
Comparative example 1
In comparative example 1, the substrate of being made by polycarbonate is provided, and (external diameter is 48mm; Thickness is 0.508mm; Internal diameter is 15mm), and the clean surface, vacuum drying in stove then (100 ℃, 1mmHg (=133.322Pa), 1 hour).
Next, substrate is placed in the film forming room of DC magnetic control sputtering system (C-3010 is made by AnelvaCorporation), and the inside of chamber is evacuated to 1 * 10
-5The end vacuum of Pa.(cobalt content is 89at% by using 89Co-4Zr-7Nb; Zirconium content is 4at%; Content of niobium is 7at%) the target sputter, in this substrate, form the thick soft ferromagnetic layer of 80nm, use the platinum target on soft ferromagnetic layer, to form the first thick oriented layer of 3nm, use the ruthenium target on first oriented layer, to form the second thick oriented layer of 12nm, use 65Co-10Cr-15Pt-10SiO
2(cobalt content is 65 moles of %; Chromium content is 10 moles of %; Platinum content is 15 moles of %; SiO
2Content is 10 moles of %) target forms the thick magnetosphere of 12nm on second oriented layer, and the thick protective seam of 4nm that formation is made by carbon on the magnetosphere of back, thus make workpiece.
Next, protective seam is applied the thermosetting resist, form resist layer by dipping.Then with on the pedestal of workpiece setting in marking press, and the nickel electroforming pressing mold that will be connected to the pressurizing piston end is pressed on the workpiece, thus by impression with track pattern and servo data figure transfer to workpiece.
Under 150 ℃ temperature, cure workpiece 10 minutes then to solidify resist layer.
Next, workpiece setting in vacuum system, and is removed resist layer in the sunk area that is retained in figure by the ion beam milling that uses argon gas, use SF subsequently
6Replace this gas and remove protective seam, magnetosphere and oriented layer in the sunk area by reaction etching.
From the surface removal resist layer of workpiece, subsequently workpiece is placed in the film forming room of DC magnetic control sputtering system (C-3010 is made by Anelva Corporation) then, and the inside of chamber is evacuated to 1 * 10
-5The end vacuum of Pa.Next, use the radio-frequency power supply of ethylene gas, form the protective seam of the 3nm that makes by diamond-like-carbon by chemical vapor deposition as parent material and 13.5MHz.At last, on protective seam, form the lubricating layer of the thick perfluoro-ether of 2nm, finish manufacturing thus according to the magnetic recording media of comparative example 1.Track pattern on the magnetic recording media in the comparative example 1 has the track pitch of 180nm, the track width of 100nm and the gash depth of 30nm.
Introduce the magnetic recording media of comparative example 1 in the magnetic read/write apparatus and the read and write of execution data,, confirm that head position operation and data read/write operation are suitable as its result.
Will for read side use the GMR device and make write side for the GMR magnetic head of single magnetic pole type as magnetic head.With oscillograph observation head position signal.Under the linear recording density of 960kFCI, assess read/write characteristics, and obtain 1 * 10
-4.8Error rate.
Comparative example 2
In comparative example 2, the substrate of being made by polycarbonate is provided, and (external diameter is 48mm; Thickness is 0.508mm; Internal diameter is 15mm), and pressing mold is pressed on the surface of substrate, so that impression, and shift track pattern and servo data thus.Clean the surface of this substrate then, thereafter in stove to its carry out vacuum drying (100 ℃, 1mmHg (=133.322Pa), 1 hour).
Next, substrate is placed in the film forming room of DC magnetic control sputtering system (C-3010 is made by AnelvaCorporation), and the inside of chamber is evacuated to 1 * 10
-5The end vacuum of Pa.(cobalt content is 89at% by using 89Co-4Zr-7Nb; Zirconium content is 4at%; Content of niobium is 7at%) the target sputter, in this substrate, form the thick soft ferromagnetic layer of 80nm, use the platinum target on soft ferromagnetic layer, to form the first thick oriented layer of 3nm, use the ruthenium target on first oriented layer, to form the second thick oriented layer of 12nm, use 65Co-10Cr-15Pt-10SiO
2(cobalt content is 65 moles of %; Chromium content is 10 moles of %; Platinum content is 15 moles of %; SiO
2Content is 10 moles of %) target, on second oriented layer, form the thick magnetosphere of 12nm, on the magnetosphere of back, form the thick protective seam of making by carbon of 4nm, and the last thick perfluoro-ether lubricating layer of 2nm that on protective seam, forms.
Introduce the medium that is produced in the servo write device and utilize magnetic head to pass through strong write current DC format servo area, by weak write current magnetic reversal in elevated regions only, make magnetic recording media thus subsequently according to comparative example 2.The magnetic track that is written on the magnetic recording media of comparative example 2 has the track pitch of 180nm, the track width of 80nm and the gash depth of 80nm.
The magnetic recording media of comparative example 2 is incorporated in the magnetic read/write apparatus, and carries out the data read and write.
Will for read side use the GMR device and make write side for the GMR magnetic head of single magnetic pole type as magnetic head.With oscillograph observation head position signal.Do not have to obtain to be enough to the signal intensity and the signal to noise ratio (S/N ratio) of positioning head,, can not suitably carry out the head position operation as its result.Under the linear recording density of 960kFCI, assess read/write characteristics, and obtain 1 * 10
-2.3Error rate.With oscilloscope measurement magnetic track waveform, has irregular amplitude so observe data waveform.In addition, head position is poor, as its result, finds the data read/write fluctuation of service.
Comparative example 3
In comparative example 3, the substrate of being made by polycarbonate is provided, and (external diameter is 48mm; Thickness is 0.508mm; Internal diameter is 15mm), and clean surface, vacuum drying in stove then (100 ℃, 1mmHg (=133.322Pa), 1 hour).
Next, substrate is placed in the film forming room of DC magnetic control sputtering system (C-3010 is made by AnelvaCorporation), and the inside of chamber is evacuated to 1 * 10
-5The end vacuum of Pa.(cobalt content is 89at% by using 89Co-4Zr-7Nb; Zirconium content is 4at%; Content of niobium is 7at%) the target sputter, in this substrate, form the thick soft ferromagnetic layer of 80nm, use the platinum target on soft ferromagnetic layer, to form the first thick oriented layer of 3nm, use the ruthenium target on first oriented layer, to form the second thick oriented layer of 12nm, use 65Co-10Cr-15Pt-10SiO
2(cobalt content is 65 moles of %; Chromium content is 10 moles of %; Platinum content is 15 moles of %; SiO
2Content is 10 moles of %) target, on second oriented layer, form the thick magnetosphere of 12nm, and on the magnetosphere of back, form the thick protective seam of making by carbon of 4nm, and on protective seam, form the thick perfluoro-ether lubricating layer of 2nm.
The medium that is produced is introduced in the servo write device, and, made magnetic recording media according to comparative example 3 by using special-purpose magnetic head to write for example servosignal of prearranged signals.The track pattern that forms on the magnetic recording media of comparative example 3 has the track pitch of 180nm and the track width of 100nm.
The magnetic recording media of example 3 is incorporated in the magnetic read/write apparatus, and carries out the data read and write.As a result, confirm that head position operation and data read/write operation are suitable.
Will for read side use the GMR device and make write side for the GMR magnetic head of single magnetic pole type as magnetic head.With oscillograph observation head position signal.Under the linear recording density of 960kFCI, assess read/write characteristics, and obtain 1 * 10
-4.2Error rate.
Following table 1 illustrates the head position of example 1 and comparative example 1 to 3 and the result of read/write characteristics (error rate) assessment.In table 1, " well " expression head position is good, and " bad " expression head position is poor.
Table 1
| Head position | Error rate (Log X) | |
| Example 1 | Well | -5.7 |
| Comparative example 1 | Well | -4.8 |
| Comparative example 2 | Bad | -2.3 |
| Comparative example 3 | Well | -4.2 |
By the result shown in the table 1 clearly, in example 1, can carry out head position and error rate good than example 1 to 3 frequently.Particularly, different with comparative example 1, in example 1, do not produce the deterioration of the magnetic characteristic that causes by magnetospheric shaping, can obtain frequently than better error rate in the example 1.And in example 1, head position makes it possible to improve the degree of accuracy that error rate is measured than good in comparative example 2.And, noise ratio the lacking in comparative example 3 that the magnetic track edge in example 1 occurs, make it possible to obtain better error rate.
Next, make the sample with different track pitchs of example 1 and comparative example 1 to 3, and compare the servosignal volume efficiency.The result is shown in Figure 8.Servosignal volume efficiency shown in Fig. 8 is for based on the medium by the track pitch with 260nm of the method manufacturing of comparative example 3 being the normalized value of 1 value.
Make the sample with different track pitchs of example 1 and comparative example 1 to 3.Relative error rate in Fig. 9.
By the result shown in Fig. 8 and 9 clearly, in example 1, technology also obtains good servosignal volume efficiency being lower than under the track pitch of 180nm, even and the less deterioration of error rate only takes place also under the track pitch of 160nm.
Next, in example 1 and comparative example 1 and 2, when each type is made 5,000 magnetic recording disks, according to the data computation turnout that is obtained.For applying, up to the formative operation of servo area, determine turnout from substrate manufacturing (clean or molded) to lubricating layer.Turnout for embodiment according to the present invention 1 and comparative example 1 and 2 has been shown in the following table 2.
Table 2
| Turnout (pph) | |
| Example 1 | 457 |
| Comparative example 1 | 138 |
| Comparative example 2 | 345 |
By the result in the table 2 clearly, the throughput rate in the productivity ratio comparative example 1 and 2 in the example 1 of the present invention is good.In comparative example 1, magnetospheric shaping spended time makes it can not obtain good turnout.In comparative example 2, after the production of medium, servo area must be formatted (in projection and the sunk area in the opposite direction magnetization), so reduce turnout.
Next, in example 1, manufacturing has the medium of different gash depths (difference in height of projection and sunk area), and the servosignal volume efficiency that is relatively produced in Figure 10.Servosignal volume efficiency shown in Figure 10 is based on the normalized value that medium by the track pitch with 260nm of the method manufacturing of comparative example 3 is 1 value.
By the result shown in Figure 10, can under 10 gash depths that arrive in the scope of 100nm, obtain good servosignal volume efficiency, but 50 to 100nm scope is more preferred.Under the gash depth less than 10nm, servosignal intensity significantly weakens.On the other hand, greater than under the 100nm, servosignal intensity increases, but the amplitude of the signal intensity of every magnetic track becomes big.Under 150nm, the accurate measurement of signal is impossible.In addition, when 180nm was above, because the contact between magnetic head and the medium, picked up signal itself became impossible.This look like by the decline of the flying height of the magnetic head in the servo area and thus the reduction of flight stability cause.Therefore, by gash depth is set at smaller or equal to 100nm, can guarantee the stability of flying magnetic head.
Next, make the medium that is used for example 1 with different gash depths according to the present invention, and shown in Figure 11 by the result that measurement obtained to simple medium manufacturing.Figure 11 is illustrated in the ratio of the disk that has damage field in figure in 100 magnetic recording disks making according to example 1.By the result shown in Figure 11 clearly, the incidence of figure manufacturing defect increases under the gash depth more than the 100nm.
Next, Figure 12 illustrates the error rate that method utilization by example 1 has the magnetic recording media of making at the pressing mold of the different rounding degree of projection top end and with different track pitchs.Error rate shown in following acquisition Figure 12.When the error rate during to given magnetic track is used as datum line with data recording under the density at 960kFCI.Next, data are similarly write the magnetic track of radially adjoining, measure the error rate of given magnetic track subsequently.Determine then back one error rate with at ratio with the datum line error rate of data recording before the adjacent track.
By the measurement result shown in Figure 12 clearly, when the projection on the press mold comprised the top of the curved surface with 0.75W≤R, the deterioration of the error rate that is caused to adjacent magnetic track by data recording was very low, and wherein R is the radius-of-curvature of curved surface and W is the width of projection.On the other hand, when 0.75W＞R, under narrow track pitch, when with data recording during to adjacent magnetic track, because tangible deterioration appears in fringing in error rate.
Next, Figure 13 illustrates the result who obtains in the measurement by the error rate of making the medium with different magnetic recording layer 2 thickness (residual thickness) at channel bottom 5a place.Track pitch is set to 160nm, and the difference in height between projection and the sunk part is set to 80nm.The rounding degree of the top end by changing the projection on the pressing mold changes the thickness at the magnetic recording layer 2 at channel bottom 5a place.
Error rate ratio shown in following acquisition Figure 13.Use error rate when under the density at 960kFCI data recording being arrived given magnetic track as datum line.Next, data are similarly write the magnetic track of radially adjoining, measure the error rate of given magnetic track subsequently.Determine then back one error rate with at ratio with the datum line error rate of data recording before the adjacent track.
Transmission electron microscope (TEM) by the cross section is measured the thickness at the magnetic recording layer 2 at 5a place, the bottom of groove 5, and this meter is shown the average thickness of the magnetic recording layer 2 at the 5a place, bottom that is retained in groove.
By the result shown in Figure 13 clearly, be smaller or equal to 2nm by thickness setting with the magnetic recording layer 2 at the 5a place, bottom of groove 5, preferably smaller or equal to 1nm, the error rate deterioration that is caused by fringing reduces.On the other hand, when when the reservation of channel bottom place is thicker than the magnetosphere of 2nm, produce the error rate deterioration that causes by fringing.
Next, table 3 illustrates the measurement result to the pressing mold life-span.Table 3 illustrates the quantity that presents the disk that time from original shape deformation of 10% makes by the shape that is formed on the sunk area in the figure on the magnetic recording media that utilizes same pressing mold manufacturing.The upper limit of the number of disks of manufacturing is set at 5,000.The deterioration of shape is represented not observe in the place that does not have numerical value to charge in this table.
Table 3
| The ratio (R/W) of the outstanding width and the radius-of-curvature of curved surface | The quantity of disk |
| 0.5 | |
| 0.75 | |
| 1 | |
| 1.25 | 4350 |
| 1.4 | 1300 |
By the result shown in the table 3 clearly, pressing mold has the acceptable long-life when R≤1.25W, and wherein R is the radius-of-curvature of the curved surface of bossing, and W is the width of bossing.On the other hand, when R＞1.25W, since the deterioration of end shape, the lost of life of pressing mold.
Industrial usability
The invention enables and to form more highdensity magnetic track, and not by means of micro-fabrication technology complexity, restive such as dry etching, therefore can be easily and cheaply make and have the discrete track-type magnetic recording media that is suitable for than the good magnetic characteristic of high record density.
Claims (16)
1. a manufacturing has the method for the magnetic recording media of first type surface, by substantially concentric arrangement magnetic track is set on described first type surface, and is formed for the groove with the mutual magnetic resolution of magnetic track of radially adjoining on described first type surface,
Described method is characterised in that, in smooth substrate, form at least magnetic recording layer to make workpiece, the pressing mold that will have the projection corresponding with described groove then is pressed on the first type surface of described workpiece, so that the shape of described projection is transferred to described workpiece and form groove between described magnetic track.
2. according to the method for the manufacturing magnetic recording media of claim 1, it is characterized in that the top of described projection has the curved surface that satisfies relational expression 0.75W≤R≤1.25W, wherein R is the radius-of-curvature of described curved surface, and W is the width of described projection.
3. according to the method for the manufacturing magnetic recording media of claim 1 or 2, it is characterized in that described groove has 50 to 100nm the degree of depth.
4. according to the method for the manufacturing magnetic recording media of claim 1; it is characterized in that; make wherein forming described magnetic recording layer in the described substrate and on described magnetic recording layer, forming the workpiece of protective seam, described pressing mold is pressed on the described first type surface of described workpiece then.
5. according to the method for the manufacturing magnetic recording media of claim 1, it is characterized in that, described pressing mold is pressed on the described first type surface of described workpiece, on described magnetic recording layer, form protective seam then.
6. according to the method for the manufacturing magnetic recording media of claim 1, it is characterized in that, described pressing mold is pressed on the described workpiece, up to the shape of described projection is transferred to described substrate.
7. according to the method for the manufacturing magnetic recording media of claim 1, it is characterized in that, described pressing mold be pressed on the described workpiece, up to the thickness of described magnetic recording layer in the place's attenuation of the bottom of described groove.
8. according to the method for the manufacturing magnetic recording media of claim 1, it is characterized in that, described pressing mold be pressed on the described workpiece that the place, bottom at described groove disconnects up to described magnetic recording layer.
9. according to the method for the manufacturing magnetic recording media of claim 1, it is characterized in that described magnetic recording layer has perpendicular magnetic anisotropic.
10. according to the method for the manufacturing magnetic recording media of claim 1, it is characterized in that, between described substrate and described magnetic recording layer, oriented layer is set.
11. the method according to the manufacturing magnetic recording media of claim 10 is characterized in that, between described substrate and described oriented layer soft ferromagnetic layer is set.
12. the method according to the manufacturing magnetic recording media of claim 1 is characterized in that described substrate is made by the material that is selected from plastics, glass and aluminium alloy.
13. the magnetic recording media with first type surface is provided with magnetic track by substantially concentric arrangement on described first type surface, and is formed for the groove with the mutual magnetic resolution of magnetic track of radially adjoining on described first type surface,
Described medium is characterised in that the substrate that has formed groove therein has magnetic recording layer at least and the protective seam above described magnetic recording layer that forms thereon, and described magnetic recording layer has less thickness or locates disconnection in the bottom of described groove.
14. the magnetic recording media of claim 13 is characterized in that, the bottom of described groove has the curved surface that satisfies relational expression 0.75W '≤R '≤1.25W ', and wherein R ' is the radius-of-curvature of described curved surface, and W ' is the width of described groove.
15. the magnetic recording media of claim 13, wherein said magnetic recording layer have the thickness smaller or equal to 2nm at the place, bottom of described groove.
16. a magnetic read/write apparatus comprises magnetic recording media and magnetic head, described magnetic head writes magnetic signal described magnetic recording media and read magnetic signal from described magnetic recording media,
Described magnetic read/write apparatus is characterised in that described magnetic head is single magnetic pole magnetic head, and described magnetic recording media is the magnetic recording media of claim 13 or 14.
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|---|---|---|---|
| JP327414/2005 | 2005-11-11 | ||
| JP2005327414 | 2005-11-11 | ||
| JP046291/2006 | 2006-02-23 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102403448A (en) * | 2010-09-13 | 2012-04-04 | 索尼公司 | Memory element and memory |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102403448A (en) * | 2010-09-13 | 2012-04-04 | 索尼公司 | Memory element and memory |
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