CN101269962B - Niobate base leadless piezoelectric ceramic with high tension electricity coefficient and preparation method thereof - Google Patents
Niobate base leadless piezoelectric ceramic with high tension electricity coefficient and preparation method thereof Download PDFInfo
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- 239000000919 ceramic Substances 0.000 title claims abstract description 33
- 238000002360 preparation method Methods 0.000 title claims abstract description 19
- 230000005611 electricity Effects 0.000 title 1
- 239000002994 raw material Substances 0.000 claims abstract description 21
- 238000005245 sintering Methods 0.000 claims abstract description 17
- 230000010287 polarization Effects 0.000 claims abstract description 12
- 229910052709 silver Inorganic materials 0.000 claims abstract description 8
- 239000004332 silver Substances 0.000 claims abstract description 7
- 229910052749 magnesium Inorganic materials 0.000 claims abstract description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052788 barium Inorganic materials 0.000 claims abstract description 4
- 229910052791 calcium Inorganic materials 0.000 claims abstract description 4
- 230000003179 granulation Effects 0.000 claims abstract description 4
- 238000005469 granulation Methods 0.000 claims abstract description 4
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 4
- 239000001301 oxygen Substances 0.000 claims abstract description 4
- 239000007787 solid Substances 0.000 claims abstract description 4
- 229910052712 strontium Inorganic materials 0.000 claims abstract description 4
- 238000002156 mixing Methods 0.000 claims abstract description 3
- 239000000203 mixture Substances 0.000 claims description 25
- 239000011734 sodium Substances 0.000 claims description 17
- 238000001354 calcination Methods 0.000 claims description 15
- 238000000498 ball milling Methods 0.000 claims description 14
- 239000010955 niobium Substances 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 9
- 229920002994 synthetic fiber Polymers 0.000 claims description 9
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 claims description 8
- ADCOVFLJGNWWNZ-UHFFFAOYSA-N antimony trioxide Chemical compound O=[Sb]O[Sb]=O ADCOVFLJGNWWNZ-UHFFFAOYSA-N 0.000 claims description 8
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 7
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 claims description 7
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 claims description 7
- 239000010936 titanium Substances 0.000 claims description 7
- 229910052573 porcelain Inorganic materials 0.000 claims description 6
- 239000011777 magnesium Substances 0.000 claims description 5
- ZXSQEZNORDWBGZ-UHFFFAOYSA-N 1,3-dihydropyrrolo[2,3-b]pyridin-2-one Chemical compound C1=CN=C2NC(=O)CC2=C1 ZXSQEZNORDWBGZ-UHFFFAOYSA-N 0.000 claims description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 claims description 4
- 239000011230 binding agent Substances 0.000 claims description 4
- 239000011575 calcium Substances 0.000 claims description 4
- 229910000019 calcium carbonate Inorganic materials 0.000 claims description 4
- 150000004649 carbonic acid derivatives Chemical class 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- BDAGIHXWWSANSR-NJFSPNSNSA-N hydroxyformaldehyde Chemical compound O[14CH]=O BDAGIHXWWSANSR-NJFSPNSNSA-N 0.000 claims description 4
- 229910052742 iron Inorganic materials 0.000 claims description 4
- XGZVUEUWXADBQD-UHFFFAOYSA-L lithium carbonate Chemical compound [Li+].[Li+].[O-]C([O-])=O XGZVUEUWXADBQD-UHFFFAOYSA-L 0.000 claims description 4
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 claims description 4
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 claims description 4
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 4
- LKZMBDSASOBTPN-UHFFFAOYSA-L silver carbonate Substances [Ag].[O-]C([O-])=O LKZMBDSASOBTPN-UHFFFAOYSA-L 0.000 claims description 4
- 229910001958 silver carbonate Inorganic materials 0.000 claims description 4
- 229910000018 strontium carbonate Inorganic materials 0.000 claims description 4
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 229910052808 lithium carbonate Inorganic materials 0.000 claims description 3
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 claims description 3
- 239000001095 magnesium carbonate Substances 0.000 claims description 3
- 229910000021 magnesium carbonate Inorganic materials 0.000 claims description 3
- 229910052748 manganese Inorganic materials 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 229910000027 potassium carbonate Inorganic materials 0.000 claims description 3
- 229920002545 silicone oil Polymers 0.000 claims description 3
- 239000004408 titanium dioxide Substances 0.000 claims description 3
- 229910052720 vanadium Inorganic materials 0.000 claims description 3
- 229910052725 zinc Inorganic materials 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000003786 synthesis reaction Methods 0.000 claims description 2
- 235000015895 biscuits Nutrition 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 8
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract description 6
- 239000004615 ingredient Substances 0.000 abstract description 4
- 229910002114 biscuit porcelain Inorganic materials 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 5
- 229910052700 potassium Inorganic materials 0.000 description 5
- 229910052708 sodium Inorganic materials 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- 229910052715 tantalum Inorganic materials 0.000 description 4
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 3
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 3
- 229910052787 antimony Inorganic materials 0.000 description 3
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 3
- 239000002585 base Substances 0.000 description 3
- 229910010293 ceramic material Inorganic materials 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 229910052744 lithium Inorganic materials 0.000 description 3
- 239000011572 manganese Substances 0.000 description 3
- 239000011591 potassium Substances 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000011701 zinc Substances 0.000 description 3
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 2
- 229910052692 Dysprosium Inorganic materials 0.000 description 2
- 229910052691 Erbium Inorganic materials 0.000 description 2
- 229910052688 Gadolinium Inorganic materials 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- 229910052779 Neodymium Inorganic materials 0.000 description 2
- 229910052777 Praseodymium Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052769 Ytterbium Inorganic materials 0.000 description 2
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 2
- -1 alkaline earth metal carbonate Chemical class 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 2
- 230000001808 coupling effect Effects 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- BITYAPCSNKJESK-UHFFFAOYSA-N potassiosodium Chemical compound [Na].[K] BITYAPCSNKJESK-UHFFFAOYSA-N 0.000 description 2
- 238000001878 scanning electron micrograph Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- FSAJRXGMUISOIW-UHFFFAOYSA-N bismuth sodium Chemical compound [Na].[Bi] FSAJRXGMUISOIW-UHFFFAOYSA-N 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- KBQHZAAAGSGFKK-UHFFFAOYSA-N dysprosium atom Chemical compound [Dy] KBQHZAAAGSGFKK-UHFFFAOYSA-N 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 229910000464 lead oxide Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- XMFOQHDPRMAJNU-UHFFFAOYSA-N lead(ii,iv) oxide Chemical compound O1[Pb]O[Pb]11O[Pb]O1 XMFOQHDPRMAJNU-UHFFFAOYSA-N 0.000 description 1
- 230000028161 membrane depolarization Effects 0.000 description 1
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 1
- PUDIUYLPXJFUGB-UHFFFAOYSA-N praseodymium atom Chemical compound [Pr] PUDIUYLPXJFUGB-UHFFFAOYSA-N 0.000 description 1
- KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- WTKKCYNZRWIVKL-UHFFFAOYSA-N tantalum Chemical compound [Ta+5] WTKKCYNZRWIVKL-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 1
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Abstract
Description
一、技术领域1. Technical field
本发明涉及一种功能陶瓷材料及其制备方法,具体地说是一种具有高压电系数的铌酸盐基无铅压电陶瓷及其制备方法。The invention relates to a functional ceramic material and a preparation method thereof, in particular to a niobate-based lead-free piezoelectric ceramic with high piezoelectric coefficient and a preparation method thereof.
二、背景技术2. Background technology
多年来普遍被使用的压电陶瓷材料主要是以锆钛酸铅(Pb(Zr,Ti)O3)为主要成分,其中氧化铅或者四氧化三铅的含量约占原材料的60%以上。这些含铅的压电陶瓷在使用和废弃后的处理过程中均会给人类的健康和生存环境带来严重的危害。The piezoelectric ceramic material that has been widely used for many years is mainly composed of lead zirconate titanate (Pb(Zr,Ti)O 3 ), wherein the content of lead oxide or trilead tetroxide accounts for more than 60% of the raw material. These lead-containing piezoelectric ceramics will bring serious harm to human health and the living environment during use and disposal.
无铅压电陶瓷通常主要有钛酸钡基(BaTiO3,简称BT)、钛酸铋钠基((Bi0.5Na0.5)TiO3,简称BNT)、铌酸钾钠基((K,Na)NbO3,简称KNN),钨青铜结构以及铋层状结构的铁电体材料。其中BT是较早得到使用的压电陶瓷,但是由于其压电性能低,特别是居里温度偏低,极大地限制其使用。BNT是一种A位复合型的具有钙钛矿结构的无铅压电材料,是一种研究较早的无铅型的铁电陶瓷,它和BT形成准同型相界组成,具有良好的压电和机电耦合性能(T.Takenaka,K.Maruyama,and K.Sakata,Jpn.J.Appl.Phys.,30(1991)2236),然而,很高的矫顽场(Ec=7.3 kV/mm),使其极化相当困难,且退极化温度较低,限制了其实际应用。Lead-free piezoelectric ceramics usually mainly include barium titanate base (BaTiO 3 , referred to as BT), bismuth sodium titanate base ((Bi 0.5 Na 0.5 )TiO 3 , referred to as BNT), potassium sodium niobate base ((K, Na) NbO 3 , referred to as KNN), a ferroelectric material with a tungsten bronze structure and a bismuth layer structure. Among them, BT is a piezoelectric ceramic that was used earlier, but its use is greatly limited due to its low piezoelectric performance, especially its low Curie temperature. BNT is an A-site complex lead-free piezoelectric material with a perovskite structure. It is an earlier researched lead-free ferroelectric ceramic. It forms a quasi-isomorphic phase boundary composition with BT and has good piezoelectricity. Electrical and electromechanical coupling properties (T.Takenaka, K.Maruyama, and K.Sakata, Jpn.J.Appl.Phys., 30(1991) 2236), however, a very high coercive field (E c =7.3 kV/ mm), making it quite difficult to polarize, and the depolarization temperature is low, which limits its practical application.
最近几年,以碱金属铌酸盐为主要成分的陶瓷得到了广泛的重视和研究。这个体系的陶瓷通常具有较大的压电和机电耦合性能,较高的居里温度,显示出巨大的应用潜力。然而这种陶瓷很难在常规制备工艺下烧结,且易于水解,从而使其电性能得不到充分发挥。尽管通过各种掺杂改性,使其压电性能得到有效的提高,然而,目前这类陶瓷的工艺重复性差,钾钠易挥发导致化学计量的偏离,机械强度低,压电和机电性能的温度稳定性不够。目前,针对这个材料体系,开展了大量的研究工作,包括寻找新的具有准同型相界的铌酸钾钠基的组成;碱金属铌钽锑酸盐体系中的A位化学计量和K/Na比的调整;调节锂、钽和锑的相对含量;改善其电性能的热稳定性;优化烧结工艺、粉体制备工艺以及电极化工艺;织构化工艺等。这些研究工作,尽管在一定程度改善这个体系无铅压电陶瓷材料的电性能和性能稳定性,然而和PZT基组成相比其压电性能还有待进一步提高,如d33偏低,机电耦合系数不足等。所有这些都极大地限制这种无铅压电材料在器件中的实际应用。In recent years, ceramics with alkali metal niobate as the main component have received extensive attention and research. The ceramics of this system usually have large piezoelectric and electromechanical coupling properties and high Curie temperature, showing great application potential. However, this kind of ceramic is difficult to sinter under the conventional preparation process, and is easy to be hydrolyzed, so that its electrical properties cannot be fully utilized. Although the piezoelectric properties have been effectively improved through various doping modifications, the current process repeatability of this type of ceramics is poor, and potassium and sodium are easily volatile, resulting in stoichiometric deviations, low mechanical strength, and poor piezoelectric and electromechanical properties. Insufficient temperature stability. At present, a lot of research work has been carried out for this material system, including finding new potassium-sodium niobate-based compositions with quasi-isomorphic phase boundaries; A-site stoichiometry and K/Na Ratio adjustment; adjust the relative content of lithium, tantalum and antimony; improve the thermal stability of its electrical properties; optimize the sintering process, powder preparation process and electrode polarization process; texturing process, etc. Although these research works have improved the electrical properties and performance stability of this lead-free piezoelectric ceramic material to a certain extent, compared with the PZT-based composition, its piezoelectric properties still need to be further improved, such as low d 33 and electromechanical coupling coefficient. Insufficient etc. All of these greatly limit the practical application of this lead-free piezoelectric material in devices.
三、发明内容3. Contents of the invention
本发明为避免上述现有技术所存在的不足之处,旨在提供一种具有高压电系数的铌酸盐基无铅压电陶瓷,所要解决的技术问题是陶瓷组成和结构的设计,以及制备工艺的优化。The present invention aims to provide a niobate-based lead-free piezoelectric ceramic with high piezoelectric coefficient in order to avoid the disadvantages of the above-mentioned prior art. The technical problems to be solved are the design of the ceramic composition and structure, and Optimization of the preparation process.
本发明为解决技术问题所采用的技术方案是:The technical scheme that the present invention adopts for solving technical problems is:
本发明所称的一种具有高压电系数的铌酸盐基无铅压电陶瓷,特点是其组成由以下通式表达:A niobate-based lead-free piezoelectric ceramic with a high piezoelectric coefficient as claimed in the present invention is characterized in that its composition is expressed by the following general formula:
(1-z)(Nav-tKu-x-wLixHwAgt)(Nb1-x-y-wTaxSbyTiw)O3·zMαOβ…………………………(1)(1-z)(Na vt K uxw Li x H w Ag t )(Nb 1-xyw Tax Sb y Ti w )O 3 zM α O β …………………(1)
通式(1)中x、y、u、v、w、t为各元素在材料组分中所占的原子百分比,z为氧化物重量占原料总量的质量百分比;0.5<v<0.6,0≤w<0.02,v+u=1,0≤t<0.03,0.02<x<0.07,0.03<y<0.08,0≤z<5%。In the general formula (1), x, y, u, v, w, t are the atomic percentages of each element in the material components, and z is the mass percentage of the oxide weight in the total amount of raw materials; 0.5<v<0.6, 0≤w<0.02, v+u=1, 0≤t<0.03, 0.02<x<0.07, 0.03<y<0.08, 0≤z<5%.
其中,H为至少选自下列金属元素的一种:Ba(钡)、Mg(镁)、Sr(锶)、Ca(钙);所添加的MαOβ是一种或多种掺杂氧化物,M为+1~+6价且能与氧形成固态氧化物的元素,选自下列元素中至少一种元素:Na(钠)、K(钾)、Li(锂)、Ag(银)、Al(铝)、Cu(铜)、Fe(铁)、Mn(锰)、Zn(锌)、Pr(镨)、Nd(钕)、Si(硅)、Sm(钐)、Gd(钆)、La(镧)、Bi(铋)、Dy(镝)、Er(铒)、Yb(镱)、Sc(钪)、Sb(锑)、Nb(铌)、V(钒)、Ta(钽)和W(钨)。α和β分别表示相关氧化物中相应的元素M和O的原子数。Among them, H is at least one selected from the following metal elements: Ba (barium), Mg (magnesium), Sr (strontium), Ca (calcium); the added M α O β is one or more doping oxides M is an element with a valence of +1 to +6 and can form a solid oxide with oxygen, at least one element selected from the following elements: Na (sodium), K (potassium), Li (lithium), Ag (silver) , Al (aluminum), Cu (copper), Fe (iron), Mn (manganese), Zn (zinc), Pr (praseodymium), Nd (neodymium), Si (silicon), Sm (samarium), Gd (gadolinium) , La (lanthanum), Bi (bismuth), Dy (dysprosium), Er (erbium), Yb (ytterbium), Sc (scandium), Sb (antimony), Nb (niobium), V (vanadium), Ta (tantalum) and W (tungsten). α and β denote the atomic numbers of the corresponding elements M and O, respectively, in the relevant oxide.
本发明所述的具有高压电系数的铌酸盐基无铅压电陶瓷的制备方法,包括原料混合、预烧、造粒、制作素坯、排胶、烧结、被银、极化步骤,与现有技术的区别是将一定量的无水碳酸钠(Na2CO3)、无水碳酸钾(K2CO3)、碳酸锂(Li2CO3)、五氧化二铌(Nb2O5)、五氧化二钽(Ta2O5)、三氧化二锑(Sb2O3),以无水乙醇为介质球磨4~18小时,得到混合料;将混合料干燥后于800~950℃下煅烧2~6小时,再至少球磨、干燥、煅烧一次完成合成得到合成料;在合成料中加入适量的粘结剂用以造粒;成型后的样品经过排胶后于1000~1100℃下烧结1~4小时得到瓷坯;将瓷坯抛光被银电极后于硅油中极化处理10~30分钟,极化电压2~4kv/mm,极化温度20~150℃。The preparation method of the niobate-based lead-free piezoelectric ceramics with high piezoelectric coefficient according to the present invention includes the steps of mixing raw materials, pre-firing, granulating, making green body, debinding, sintering, silvering, and polarization, The difference from the prior art is that a certain amount of anhydrous sodium carbonate (Na 2 CO 3 ), anhydrous potassium carbonate (K 2 CO 3 ), lithium carbonate (Li 2 CO 3 ), niobium pentoxide (Nb 2 O 5 ), tantalum pentoxide (Ta 2 O 5 ), antimony trioxide (Sb 2 O 3 ), ball milled with absolute ethanol for 4 to 18 hours to obtain a mixture; after drying the mixture, dry it at 800 to 950 Calcining at ℃ for 2 to 6 hours, and then ball milling, drying, and calcination at least once to complete the synthesis to obtain the synthetic material; add an appropriate amount of binder to the synthetic material for granulation; Sintering at lower temperature for 1-4 hours to obtain a porcelain body; polishing the porcelain body with a silver electrode, and then polarizing it in silicone oil for 10-30 minutes, with a polarization voltage of 2-4kv/mm, and a polarization temperature of 20-150°C.
所述的“一定量”(各原料)就是按通式(1)所示的组成及其限定的比例计量后称取的量。The "certain amount" (each raw material) is the amount weighed after measuring according to the composition shown in the general formula (1) and the defined ratio thereof.
在原料混合时还可以加入一定量的二氧化钛(TiO2)和碱土金属碳酸盐如碳酸钡(BaCO3)或/和碳酸锶(SrCO3)或/和碳酸钙(CaCO3)或/和碳酸镁(MgCO3)一道混合球磨,所谓的“一定量”含义同上。A certain amount of titanium dioxide (TiO 2 ) and alkaline earth metal carbonate such as barium carbonate (BaCO 3 ) or/and strontium carbonate (SrCO 3 ) or/and calcium carbonate (CaCO 3 ) or/and carbonate can also be added when the raw materials are mixed Magnesium (MgCO 3 ) is mixed and ball milled together, and the meaning of the so-called "certain amount" is the same as above.
在原料混合时还可以加入一定量的碳酸银(Ag2CO3)一道混合球磨。所谓“一定量”含义同上。When the raw materials are mixed, a certain amount of silver carbonate (Ag 2 CO 3 ) can also be added together for ball milling. The so-called "a certain amount" has the same meaning as above.
在原料混合时还可以加入一定量的掺杂元素M的氧化物或碳酸盐一道混合球磨。所谓“一定量”(掺杂料)含义同上。When the raw materials are mixed, a certain amount of oxides or carbonates of the doping element M can be added together for ball milling. The so-called "certain amount" (doping material) has the same meaning as above.
具体制备工艺如下:Concrete preparation process is as follows:
a、将无水碳酸钠、无水碳酸钾、碳酸锂、碳酸钡(或者是碳酸锶、碳酸钙、碳酸镁)、二氧化钛、碳酸银、五氧化二铌、五氧化二钽、三氧化二锑以及用于掺杂元素M的氧化物或者碳酸盐等原料,按照通式(1)的组成和限定的比例计量称料配料;a. Anhydrous sodium carbonate, anhydrous potassium carbonate, lithium carbonate, barium carbonate (or strontium carbonate, calcium carbonate, magnesium carbonate), titanium dioxide, silver carbonate, niobium pentoxide, tantalum pentoxide, antimony trioxide And raw materials such as oxides or carbonates used for doping element M, according to the composition of the general formula (1) and the ratio of the limits, the ingredients are measured and weighed;
b、配好的原料以无水乙醇为介质,球磨4~18小时得到球磨混合料后,干燥后在氧化铝坩埚中以800~950℃的温度煅烧2~6小时;重复球磨混料和干粉煅烧一次,完成煅烧预合成得到合成料;b. The prepared raw materials use absolute ethanol as the medium, and after ball milling for 4 to 18 hours to obtain the ball milling mixture, after drying, calcinate in an alumina crucible at a temperature of 800 to 950°C for 2 to 6 hours; repeat ball milling and dry powder Calcining once to complete the pre-composition of calcination to obtain the synthetic material;
c、合成料再次经过球磨工艺磨细后,加入粘结剂造粒,再经成型和排胶,最后在1000~1100℃温度下烧结时间为1~4小时得到瓷坯;c. After the synthetic material is finely ground by ball milling process again, adding binder to granulate, then molding and debinding, and finally sintering at 1000-1100°C for 1-4 hours to obtain porcelain body;
d、将瓷坯经过抛光处理后被银电极,后在硅油中加电压极化,极化电压为2~4kV/mm,极化温度为25~150℃,极化时间为10~30分钟;d. After polishing the ceramic body, it is polarized by a silver electrode, and then applied a voltage in silicone oil. The polarization voltage is 2-4kV/mm, the polarization temperature is 25-150°C, and the polarization time is 10-30 minutes;
e、按照IRE的标准制成压电陶瓷样品进行压电和机电耦合性能的测试。e. According to the standard of IRE, the piezoelectric ceramic samples are made to test the piezoelectric and electromechanical coupling performance.
本发明提出的一种具有高压电系数的铌酸盐基无铅压电陶瓷及其制备方法,其有益效果体现在:A niobate-based lead-free piezoelectric ceramic with a high piezoelectric coefficient and a preparation method thereof proposed by the present invention have beneficial effects as follows:
1、本发明陶瓷组成是一种具有高压电系数的无铅系的环境协调性的压电陶瓷,其制备工艺稳定,可以采用传统压电陶瓷的制备技术和工业用原料获得,具有实用性。1. The ceramic composition of the present invention is a lead-free piezoelectric ceramic with high piezoelectric coefficient and environmental coordination. Its preparation process is stable, and it can be obtained by using traditional piezoelectric ceramic preparation technology and industrial raw materials. It has practicability .
2、本发明通过调节钾/钠比、银、锑、钽、碱土金属钛酸盐的含量以及适量氧化物的掺杂改性,可以获得位于准同型相界附近的陶瓷组成,从而达到优异的压电系数和可实用的平面机电耦合性能,良好的机械强度和温度稳定性。2. The present invention can obtain a ceramic composition located near the quasi-isomorphic phase boundary by adjusting the ratio of potassium/sodium, the content of silver, antimony, tantalum, and alkaline earth metal titanate, and the doping modification of an appropriate amount of oxides, so as to achieve excellent Piezoelectric coefficient and practical planar electromechanical coupling performance, good mechanical strength and temperature stability.
3、该无铅压电陶瓷的d33可达350pC/N,kp可达50%,介电常数εr为1550,损耗角正切tanδ<0.03,Tc可高达310℃;且时间稳定性好,工艺简单,可用于制作驱动器、发声器、超声换能器、谐振器等器件的材料。3. The d 33 of the lead-free piezoelectric ceramic can reach 350pC/N, the k p can reach 50%, the dielectric constant εr is 1550, the loss tangent tanδ<0.03, and the Tc can be as high as 310℃; and the time stability Well, the process is simple, and it can be used to make materials for drivers, sound generators, ultrasonic transducers, resonators and other devices.
四、附图说明4. Description of drawings
图1为本发明实施例1中组成为(Na0.518K0.432Li0.045Ag0.005)(Nb0.90Ta0.045Sb0.55)O3,在1090℃的温度下烧结3小时后样品的扫描电镜照片。Fig. 1 is a scanning electron micrograph of a sample with the composition (Na 0.518 K 0.432 Li 0.045 Ag 0.005 )(Nb 0.90 Ta 0.045 Sb 0.55 )O 3 in Example 1 of the present invention after sintering at 1090°C for 3 hours.
图2为本发明实施例2中组成为(Na0.510K0.44Li0.04Ag0.005Ba0.005)(Nb0.895Ta0.04Sb0.06Ti0.005)O3+0.2wt%CuO的陶瓷样品在不同频率下的介电常数-温度曲线。Figure 2 shows the dielectric properties of ceramic samples with the composition (Na 0.510 K 0.44 Li 0.04 Ag 0.005 Ba 0.005 )(Nb 0.895 Ta 0.04 Sb 0.06 Ti 0.005 )O 3 +0.2wt%CuO at different frequencies in Example 2 of the present invention Constant-temperature curve.
五、具体实施方式5. Specific implementation
按照配方(1-z)(Nav-tKu-x-wLixHwAgt)(Nb1-x-y-wTaxSbyTiw)O3·zMαOβ来计算各组分的用量,将原料按重量百分比称取。According to formula (1-z)( Navt K uxw Li x H w Ag t )(Nb 1-xyw Tax Sb y Ti w )O 3 ·zM α O β to calculate the amount of each component, raw materials by weight Percentage weighing.
式中x、y、u、v、w、t为各元素在材料组分中所占的原子百分比,z为氧化物重量占原料总量的质量百分比;0.5<v<0.6,0≤w<0.02,v+u=1,0≤t<0.03,0.02<x<0.07,0.03<y<0.08,0≤z<5%。In the formula, x, y, u, v, w, t are the atomic percentages of each element in the material components, and z is the mass percentage of the oxide weight in the total amount of raw materials; 0.5<v<0.6, 0≤w< 0.02, v+u=1, 0≤t<0.03, 0.02<x<0.07, 0.03<y<0.08, 0≤z<5%.
其中,H为至少选自下列金属元素的一种:Ba、Mg、Sr、Ca;所添加的MαOβ是一种或多种掺杂氧化物,M为+1~+6价且能与氧形成固态氧化物的元素,选自下列元素中至少一种:Na、K、Li、Ag、Al、Cu、Fe、Mn、Zn、Pr、Nd、Si、Sm、Gd、La、Bi、Dy、Er、Yb、Sc、Sb、Nb、V、Ta和W。α和β分别表示相关氧化物中相应的元素M和O的原子数。在制备工艺中,M以其氧化物或者碳酸盐原料的形式来添加。Wherein, H is at least one selected from the following metal elements: Ba, Mg, Sr, Ca; the added M α O β is one or more doped oxides, M is +1 to +6 valence and can Elements that form solid oxides with oxygen are selected from at least one of the following elements: Na, K, Li, Ag, Al, Cu, Fe, Mn, Zn, Pr, Nd, Si, Sm, Gd, La, Bi, Dy, Er, Yb, Sc, Sb, Nb, V, Ta and W. α and β denote the atomic numbers of the corresponding elements M and O, respectively, in the relevant oxide. In the preparation process, M is added in the form of its oxide or carbonate raw material.
制备工艺的具体步骤如下:The concrete steps of preparation technology are as follows:
1、将无水碳酸钠、无水碳酸钾、碳酸锂、碳酸钡(或者是碳酸锶、碳酸钙、碳酸镁)、二氧化钛、碳酸银、五氧化二铌、五氧化二钽、三氧化二锑以及用于掺杂元素M的氧化物或者碳酸盐等原料,按照通式(1)的组成和限定的比例计量称料配料;1. Anhydrous sodium carbonate, anhydrous potassium carbonate, lithium carbonate, barium carbonate (or strontium carbonate, calcium carbonate, magnesium carbonate), titanium dioxide, silver carbonate, niobium pentoxide, tantalum pentoxide, antimony trioxide And raw materials such as oxides or carbonates used for doping element M, according to the composition of the general formula (1) and the ratio of the limits, the ingredients are measured and weighed;
2、配好的原料以无水乙醇为介质,球磨4~18小时得到球磨混合料后,干燥后在氧化铝坩埚中以800~950℃的温度煅烧2~6小时;重复球磨混料和干粉煅烧一次,完成煅烧预合成得到合成料;2. The prepared raw materials use absolute ethanol as the medium, and after ball milling for 4 to 18 hours to obtain the ball milling mixture, after drying, calcinate in an alumina crucible at a temperature of 800 to 950°C for 2 to 6 hours; repeat ball milling and dry powder Calcining once to complete the pre-composition of calcination to obtain the synthetic material;
3、合成料再次经过球磨工艺磨细后,加入粘结剂造粒,再经成型和排胶,最后在1000~1100℃温度下烧结时间为1~4小时得到瓷坯;3. After the synthetic material is ground again by ball milling process, adding binder to granulate, then molding and debinding, and finally sintering at 1000-1100°C for 1-4 hours to obtain porcelain blank;
4、将瓷坯经过抛光处理后被银电极,后在硅油中加电压极化,极化电压为2~4kV/mm,极化温度为25~150℃,极化时间为10~30分钟;4. Polish the ceramic body and then apply a voltage to the silicon oil to polarize it with a silver electrode. The polarization voltage is 2-4kV/mm, the polarization temperature is 25-150°C, and the polarization time is 10-30 minutes;
5、按照IRE的标准制成压电陶瓷样品进行压电和机电耦合性能的测试。5. According to the standard of IRE, the piezoelectric ceramic samples are made to test the piezoelectric and electromechanical coupling performance.
实施例1:按上述的实施方式依次进行各步骤,其中Embodiment 1: Carry out each step successively according to above-mentioned embodiment mode, wherein
步骤1中,按v=0.523,t=0.005,x=0.045,y=0.055,z=0进行取值。组合物的表达式为:(Na0.518K0.432Li0.045Ag0.005)(Nb0.90Ta0.045Sb0.055)O3;In step 1, values are selected according to v=0.523, t=0.005, x=0.045, y=0.055, and z=0. The expression of the composition is: (Na 0.518 K 0.432 Li 0.045 Ag 0.005 )(Nb 0.90 Ta 0.045 Sb 0.055 )O 3 ;
步骤2中,煅烧温度为900℃,煅烧时间为5h;In step 2, the calcination temperature is 900°C, and the calcination time is 5h;
步骤3中,烧结温度为1080℃,烧结时间为3h;In step 3, the sintering temperature is 1080°C, and the sintering time is 3h;
获得的样品自然表面的扫描电镜照片如图1所示,其它相关的性能如表1:The scanning electron micrograph of the natural surface of the sample obtained is shown in Figure 1, and other relevant properties are shown in Table 1:
表1Table 1
实施例2:按上述的实施方式依次进行各步骤,其中Embodiment 2: Carry out each step successively according to above-mentioned embodiment mode, wherein
步骤1中,按v=0.515,t=0.005,w=0.005,x=0.04,y=0.06,z=0.2%进行取值。组合物的表达式为:(Na0.510K0.44Li0.04Ag0.005Ba0.005)(Nb0.895Ta0.04Sb0.06Ti0.005)O3·0.2wt%CuO;In step 1, values are selected according to v=0.515, t=0.005, w=0.005, x=0.04, y=0.06, z=0.2%. The expression of the composition is: (Na 0.510 K 0.44 Li 0.04 Ag 0.005 Ba 0.005 )(Nb 0.895 Ta 0.04 Sb 0.06 Ti 0.005 )O 3 ·0.2wt% CuO;
步骤2中,煅烧温度为860℃,煅烧时间为5h;In step 2, the calcination temperature is 860°C, and the calcination time is 5h;
步骤3中,烧结温度为1070℃,烧结时间为3h;In step 3, the sintering temperature is 1070°C, and the sintering time is 3h;
制备的无铅压电陶瓷样品的在不同频率下的介电常数对温度的变化曲线如图2所示,其它相关性能如表2:The variation curves of the dielectric constant versus temperature of the prepared lead-free piezoelectric ceramic samples at different frequencies are shown in Figure 2, and other related properties are shown in Table 2:
表2Table 2
实施例3:按上述的实施方式依次进行各步骤,其中Embodiment 3: Carry out each step successively according to above-mentioned embodiment mode, wherein
步骤1中,按v=0.515,t=0.005,w=0.005,x=0.04,y=0.06,z=0.2%进行取值。组合物的表达式为:(Na0.510K0.44Li0.04Ag0.005Ba0.005)(Nb0.895Ta0.04Sb0.06Ti0.005)O3·0.2wt%MnO2;In step 1, values are selected according to v=0.515, t=0.005, w=0.005, x=0.04, y=0.06, z=0.2%. The expression of the composition is: (Na 0.510 K 0.44 Li 0.04 Ag 0.005 Ba 0.005 )(Nb 0.895 Ta 0.04 Sb 0.06 Ti 0.005 )O 3 ·0.2wt% MnO 2 ;
步骤2中,煅烧温度为860℃,煅烧时间为5h;In step 2, the calcination temperature is 860°C, and the calcination time is 5h;
步骤3中,烧结温度为1070℃,烧结时间为3h;In step 3, the sintering temperature is 1070°C, and the sintering time is 3h;
制备的无铅压电陶瓷样品的相关性能如表3:The relevant properties of the prepared lead-free piezoelectric ceramic samples are shown in Table 3:
表3table 3
实施例4:按上述的实施方式依次进行各步骤,其中Embodiment 4: Carry out each step successively according to above-mentioned embodiment mode, wherein
步骤1中,按v=0.523,t=0.005,x=0.045,y=0.055,z=0.25%进行取值。组合物的表达式为:(Na0.518K0.432Li0.045Ag0.005)(Nb0.90Ta0.045Sb0.055)O3·0.25%Fe2O3;In step 1, values are selected according to v=0.523, t=0.005, x=0.045, y=0.055, z=0.25%. The expression of the composition is: (Na 0.518 K 0.432 Li 0.045 Ag 0.005 )(Nb 0.90 Ta 0.045 Sb 0.055 )O 3 ·0.25% Fe 2 O 3 ;
步骤2中,煅烧温度为900℃,煅烧时间为5h;In step 2, the calcination temperature is 900°C, and the calcination time is 5h;
步骤3中,烧结温度为1060℃,烧结时间为2h;In step 3, the sintering temperature is 1060°C, and the sintering time is 2h;
制备的无铅压电陶瓷样品的相关性能如表4:The relevant properties of the prepared lead-free piezoelectric ceramic samples are shown in Table 4:
表4Table 4
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JP2018160535A (en) * | 2017-03-22 | 2018-10-11 | セイコーエプソン株式会社 | Piezoelectric element and piezoelectric element application device |
CN108689711A (en) * | 2018-06-13 | 2018-10-23 | 合肥工业大学 | A kind of thermostable type sodium niobate based leadless piezoelectric ceramics and preparation method thereof |
CN109650885B (en) * | 2018-12-11 | 2022-02-08 | 中国科学院上海硅酸盐研究所 | A kind of lanthanum-doped silver niobate lead-free antiferroelectric energy storage ceramic material and preparation method thereof |
CN110128139A (en) * | 2019-06-19 | 2019-08-16 | 哈尔滨理工大学 | A KNN-based ceramic with high voltage and high ferroelectric properties and its preparation method |
CN110642622B (en) * | 2019-10-24 | 2021-09-24 | 桐乡清锋科技有限公司 | Potassium-sodium niobate-based leadless piezoelectric ceramic and manufacturing process and application thereof |
CN113880575B (en) * | 2021-11-16 | 2023-03-21 | 江苏波速传感器有限公司 | Doped lead manganese niobate-lead zirconate titanate piezoelectric ceramic material and preparation method thereof |
CN116813339B (en) * | 2023-05-12 | 2024-09-06 | 广东奥迪威传感科技股份有限公司 | Leadless piezoelectric ceramic and preparation method thereof |
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CN101024573A (en) * | 2007-01-30 | 2007-08-29 | 合肥工业大学 | Multi-element sodium-potassium niobate series lead-free piezoelectric ceramic and preparing method |
CN101037332A (en) * | 2007-04-20 | 2007-09-19 | 四川大学 | Multi constituent niobate lead-free piezoelectric ceramics |
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