CN101143364A - Ultrasonic detection narrow pulsewidth laser sludge remover and its sludge removing method - Google Patents
Ultrasonic detection narrow pulsewidth laser sludge remover and its sludge removing method Download PDFInfo
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- CN101143364A CN101143364A CN 200710061363 CN200710061363A CN101143364A CN 101143364 A CN101143364 A CN 101143364A CN 200710061363 CN200710061363 CN 200710061363 CN 200710061363 A CN200710061363 A CN 200710061363A CN 101143364 A CN101143364 A CN 101143364A
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Abstract
An ultrasonic detection narrow pulse wide laser cleaner includes a narrow pulse wide laser device (1), a beam adjustment transmission device (2), a moving platform device (3), an ultrasonic detection device (4), an automatic control device (5), a dust absorption recovery device (6) and an ultrasonic detection narrow pulse wide laser filth clearing method. A cleaned object surface is irradiated with narrow pulse wide lasers. And a strong vibration shock wave is produced in short time to remove filths from the medium surface. At the same time, an instrument device is used to monitor and analyze ultrasonic waves caused by the vibration during the cleaning process to ensure the good medium surface and realize the automatic cleaning process. The cleaner is used to remove various filths of oxides, corrosion matters, paint, grease marks, residues, etc. of the media surfaces of metals, semiconductors, buildings, etc. The cleaner has the advantages of good effect, non-damages, high efficiency, automation, etc.
Description
[technical field]
The present invention belongs to the laser technology application, relate to a kind of effect of utilizing narrow pulse width laser and matter interaction and remove various dirts such as the oxide of dielectric surfaces such as metal, semiconductor, building, corrosion thing, paint, oil stain, residue, utilize the formed ultrasonic signal of this effect to guarantee intact by dielectric surface after the scrubbing simultaneously, and can realize the device of automation scrubbing and the method that the ultrasonic detection narrow pulse width laser is removed dirt.
[background technology]
Any workpiece or material all can form certain pollutant in its surface in long-term use, or are attached certain material, and depositing of they is used in and can brings harm to the normal use of this material, need be removed.The means of removing dirt at present comprise manual/mechanical rubbing manipulation, chemical-agent technique etc., these conventional cleaning methods have wastes time and energy, damages workpiece, shortcoming such as with high costs, and the laser pollution removing method can overcome above-mentioned shortcoming basically as a kind of novel scrubbing means by contrast.Generally speaking, the process more complicated of laser pollution removing, at present known main mechanism can be divided into two kinds of ablation effect and dither effects.
The scrubbing mechanism of conventional laser pollution removing device mainly is the ablation effect, promptly utilize the characteristics of laser energy high concentration, by the surface of the contaminated medium of cover, make pollutant absorb laser energy and reach a high temperature, thereby make pollutant combustion decomposition or gasification method dirt removal.Principle as shown in Figure 1.Dirt is attached to surface of the work (Fig. 1 .a), select the laser of suitable wavelength to shine, make dirt absorb most of laser energy, temperature can rise after dirt absorbed laser energy, when temperature reaches the boiling point of dirt, just can produce gasification phenomenon (Fig. 1 .b), finally make it break away from (Fig. 1 .c) from sample surfaces.In this situation, we can suppose that the dirt two ends satisfy adiabatic condition, and establishing the incident laser average power density is I
0, the equation of heat conduction is then arranged:
Wherein, ρ is the density of object, and c is the specific heat capacity of object, and λ is the thermal conductivity of object, and α is the absorptivity of object to laser, and A is the absorption coefficient of object to laser, and τ is that the pulsed laser action time is laser pulse width, the 1st, and the thickness of object, a
tIt is the thermal diffusivity of object.If initial temperature T=300K, then can obtain accordingly temperature Δ T that dirt raises separate for;
When Δ T surpasses certain critical value, just can make dirt generation combustion decomposition or gasification like this, thereby dirt is removed.From formula as can be known, to must make sample be in the condition of high temperature dirt removal, promptly use high energy laser, just need the accurately control laser emission time in order to guarantee that hosqt media is not damaged simultaneously, avoid high energy laser or high temperature dirt cause thermal damage medium itself.So not only increase the cleaning cost, also limited its scope of application and object simultaneously.
The laser device that present laser pollution removing device generally adopts mainly is continuous CO 2 laser device or quasi-continuous Nd:YAG laser instrument, just adopt foregoing laser ablation effect to remove dirt, though such laser pollution removing device scrubbing effect still can, but owing to adopted the ablation effect, generally have the bad control of laser energy and lack effective monitoring means, so also not only cleaning efficiency be can not improve, medium originally experience temperatures involved and sex change or impaired also are easy to make.
Therefore, be necessary very much at existing laser pollution removing principle and technical seeking breakthrough, a kind of other effects that can utilize laser and material effect of invention design, in efficient removing dirt, can realize effectively monitoring in real time, guarantee that dielectric surface is not damaged, improve simultaneously cleaning efficiency to greatest extent, thereby realize the laser pollution removing machine of automation scrubbing.
[summary of the invention]
The ultrasonic detection narrow pulse width laser spotter that relates among the present invention, with the laser pollution removing device of routine basic difference is arranged, it does not emphasize the high-energy of laser, but the narrow pulsewidth of laser, just make full use of the dither effect in the laser pollution removing, promptly by carrying out laser emission in the short time at the utmost point to being cleaned dielectric surface, it is raise in temperature is not to produce strong thermoelasticity shock wave under the very big situation, thereby overcome the adhesive force of dirt and hosqt media, dirt is removed from the dielectric surface vibration.
The principle of narrow pulse width laser scrubbing as shown in Figure 2.With the ablation effect antithesis, in this case, hosqt media has absorbed a part of laser energy (Fig. 2 .a), in some cases even can most of energy be absorbed by substrate by selecting optical maser wavelength make dirt absorb less energy.The temperature of substrate will raise and then produce thermal expansion like this, the thermal expansion meeting of substrate makes whole dirt produce heat fluctuation (Fig. 2 .b), because the whole mechanism time is very short,, be described as follows with the one-dimensional case simple computation below so thereby the strong thermoelasticity shock wave that produces makes dirt break away from (Fig. 2 .c):
It is Δ T that laser is radiated at the temperature that sample surfaces raises substrate, and its calculating can be with reference to the formula (2) of front, and difference is that what to be calculated here is that the temperature rise thereby the parameter of substrate all will change substrate into.Can calculate the heat expansion length Δ l=γ Δ Tl that is caused by temperature thus, wherein γ is the coefficient of thermal expansion of substrate, and l is a base length.Again according to Acceleration Formula α τ
2=Δ l substrate as can be known expands to the impulsive force that dirt caused
Wherein m is the dirt quality, and τ is a laser pulse width.When impulsive force F during greater than the adhesion between dirt and the substrate dirt will be eliminated.
By previous calculations as can be known for the rising Δ T ∝ I of temperature
0, and
(Power is the laser pulse energy metric density), more as can be known by formula (3)
The cube that is impulsive force and pulse width is inversely proportional to, and this shows that under the situation of same laser energy density, laser pulse is short more, generation big more to the dirt impulsive force, and also effect will be got well much than merely improving laser energy.Experiment showed, for automotive lacquer ferroalloy substrate sample (sample parameters is referring to table 1), adopt the 1064nmNd:YAG laser instrument, when laser pulse width reaches 10～20ns, pulsed laser energy is 500mJ, and spot size is 1cm
2, promptly the laser pulse energy metric density reaches 0.5J/cm
2The time, the impulsive force that laser pulse produces just can make coating agent which has to be dissolved in alcohol before use break away from sample.With respect to the laser cleaner of routine, this device only needs lower energy just can realize same cleaning performance even better, has also just reduced the cleaning cost like this.Experiment simultaneously is further illustrated under the identical experiment condition, when laser pulse width is 1ns or more in short-term, required laser energy density can be significantly less than 0.5J/cm
2If, therefore using the narrower laser instrument of pulse width as can be known, the required laser energy of laser pollution removing can be lower, better effects if.
The various parameters of table 1 laboratory sample
It should be noted that and only consider in the calculating of front that medium itself absorbs most of laser and is applicable to most applications, mainly is to consider that the shock strength of thermal vibration generation of medium substrate itself is bigger.In fact, medium and dirt can produce shock wave, and there is acting in conjunction simultaneously in two kinds of shock waves sometimes, equally also can reach to make dirt break away from the purpose of dielectric surface.Particularly for some special medias, such as glass, itself absorbs laser energy hardly, just need make this time dirt absorb most of laser energy, equally also can produce shock wave and make its disengaging, and only intensity is weak relatively.
Although adopt the narrow-pulse laser scrubbing can improve cleaning performance and conserve energy effectively, yet how to control cleaning process exactly in good time, both guaranteed that dirt can be eliminated in the cleaning process, make sample itself injury-free again, for improving scrubbing efficient and realizing that the automation scrubbing is most important.The principle features that the present invention is directed to the narrow-pulse laser scrubbing has designed a cover Ultrasonic Detection analytical system and has realized above-mentioned requirements.Its operation principle is as follows:
Because the principle that adopts narrow pulse width laser to produce shock wave vibratory is removed dirt, like this when laser irradiation pollutant surface, strong elastic heat wave also can excite air to produce ultrasonic wave when removing dirt, the situation of hyperacoustic intensity and sample substrate vibration has very big relation, and the intensity of substrate vibration depends on the absorbing state to laser energy.Calculating shows that the amplitude E of substrate surface is directly proportional with the energy density Power of laser, again because there are relations I ∝ E in ultrasonic signal intensity I and amplitude E
2, the ultrasonic signal intensity I ∝ Power that hence one can see that is produced
2So just set up the direct relation of ultrasonic signal and degree of cleaning, be the change that the intensity of ultrasonic signal can present certain rule along with the varied in thickness of dirt: when dirt is not eliminated since laser energy by dirt loss considerable part, thereby ultrasonic signal intensity can reduce, substrate absorbs more laser energies after dirt is eliminated, and then ultrasonic signal intensity also will obviously improve.
Therefore utilize the Ultrasonic Detection analytical system, the ultrasonic signal that produces in cleaning by the collection narrow-pulse laser, and analyze its signal situation of change, whether we just can judge dirt and be eliminated totally.Adopt Ultrasonic Detection, its benefit to be that also ultrasonic signal can not be cleaned other sounds of producing in the process and the common acoustic signals such as noise of external environment disturb, so have good anti-interference and reliability.
Ultrasonic detection narrow pulse width laser spotter designs according to above-mentioned principle, its device concrete structure as shown in Figure 3, comprise: narrow pulse width laser apparatus (31), light beam are adjusted transmitting device (32), mobile platform device (33), supersonic detection device (34), automaton (35), dust suction retracting device (36), wherein:
Narrow pulse width laser apparatus (31) is used to produce narrow pulse width laser, comprises laser bodies, Q-modulating device, cooling device, supply unit.The laser pulse width that it can be exported is in tens nanoseconds or shorter, and pulsed laser energy is 100mJ～10J.Can select dissimilar laser instruments according to the dirt of reality and the absorbing wavelength of medium, to produce the laser of ultraviolet, wave band such as infrared, visible.The control circuit of the opening and closing of laser instrument, output energy, operating frequency is connected to realize automatic control with the automaton circuit.
Light beam is adjusted transmitting device (32) and is comprised light beam coupling device (321), light beam conduction device (322), laser delivery (323).Wherein the inner critical piece of light beam coupling device is coupled lens and shaping lens, can be general linear beam or flat-top distribution linear beam as required with beam shaping; The light beam conduction device can be light-conducting arm or energy-transmission optic fibre; Laser delivery inside comprises collimation lens, and outside minature solide-state laer or the LED of installing be as aligned bundle equipment (324), and three parts are refuted and are connected together and connect protection by metal-back.In order to increase work efficiency, also can to adopt the single light beam of separate unit laser instrument output to be divided into multiple laser and be coupled to several outputs respectively and work simultaneously.
Mobile platform device (33) is made up of stepper motor or mechanical arm, guide rail (331) (332), cleaning platform.Be furnished with porous and fixed mount on the cleaning platform, can place in the above as required and fixed laser output (being used for surface to be cleaned is inconvenient to move greatly) or small sample.Stepper motor (single or multiple) or mechanical arm can drive cleaning platform do two dimension, three-dimensional or more multidimensional move; Move mode can be that rectilinear motion or rotation wait other compound movements; Translational speed and precision can be regulated.Stepper motor or robot arm device circuit are connected to realize automatic control with the automaton circuit simultaneously.For simple operation, also can substitute the mobile platform device with the method for hand-held output.
Supersonic detection device (34) can receive the ultrasonic signal (341) of the special wave band that sample produces in the cleaning, and the digital/analog signal that produces is passed to automaton by data wire handle, during use receiving terminal is got final product over against being cleaned medium.
Automaton (35) mainly is the control circuit that a PLC, single-chip microcomputer or computer are formed, it can receive the signal that the supersonic detection device transmission comes, ultrasonic signal Changing Pattern program software is handled in cleaning through the narrow pulse width laser of establishment in advance again, analyze cleaning state this moment, and by connecting duty and the parameter that the narrow pulse width laser apparatus of control circuit (351) control, mobile platform device move.Automaton can also adopt Artificial Control to substitute control automatically, be that duty that automaton directly sends according to the operator is instructed duty and the parameter of controlling narrow pulse width laser apparatus, mobile platform device, and not being subjected to clean the control of state this moment, control is inoperative automatically during Artificial Control.
Dust suction retracting device (36) mainly by bleeding point (361), wireway (362), take out dirt compressor or air blast, material storage room constitutes, can be fixed on during use and be cleaned near the sample, bleeding point is over against sample, so that suction has in time been removed dirt and has been avoided it to cause secondary pollution, simultaneously dirt is reclaimed, its operating circuit is controlled by automaton.
Ultrasonic detection narrow pulse width laser involved in the present invention is removed the method for dirt, the steps include: at first according to concrete sample and dirt character, by automaton input laser works parameter or select from the parameter that equipment provides; Next utilizes the aligned bundle of laser delivery to aim at the position that will clean and adjusts the laser delivery and obtains needed spot size with being cleaned the dielectric surface distance, and sets the move mode of mobile platform device in conjunction with the sample surfaces size; Then dust suction retracting device bleeding point is placed near the sample surfaces, aims at sample surfaces, and make its work; Then start narrow pulse width laser apparatus, in carrying out the scrubbing operating process, ultrasonic signal check and analysis system can judge whether dirt can be eliminated, if cannot remove dirt, control system can progressively improve the energy of laser instrument, till dirt can be removed, if dirt can be eliminated totally, the laser energy value that control system will be recovered to preset, and control mobile platform device arrives next scrubbing position according to moving step length mobile example of setting or laser delivery, and when the laser energy value continued to be higher than certain numerical value, automaton was used this value and is substituted default laser energy value, finished whole sample surface scrubbing process so repeatedly; Close package unit at last, and take out the dirt of disposing from the material storage room of dust suction retracting device.
On the basis of above method for separating polluted particles, in cleaning process, can also adopt Artificial Control to substitute control automatically, be duty and the parameter that the operator comes directly to control the various devices in the scrubbing process as required, comprise the work of laser instrument and stop, pulsed laser energy, repetition rate, the moving of cleaning positions, and Artificial Control can be switched use according to actual needs with automatic control.
In aforesaid method for separating polluted particles, used laser is narrow pulse width laser, and laser pulse width is in tens nanoseconds or shorter, and pulsed laser energy is 100mJ～10J; Optical maser wavelength can be all band.The all band of narrow pulse width laser wavelength can be a ultraviolet, infrared, as seen.
The present invention is directed to the deficiency of conventional laser decontamination apparatus, adopted new scrubbing principle and, had following advantage in conjunction with unique Ultrasonic Detection means:
1, scrubbing is effective, and is pollution-free.With respect to the laser pollution removing device of traditional employing ablation effect, the scrubbing of this device is thoroughly clean, can satisfy present scrubbing standard, and the various poisonous useless cigarettes of generation that can not burn in the scrubbing process, possesses the dust suction retracting device simultaneously, very environmental protection.
2, scrubbing efficient height, less energy consumption.With the paint removal is example, test shows for general enamelled coating (transmitance is not less than 0.09) and iron and steel substrate (about absorptivity 0.36), if adopt the 1064nmNd:YAG laser instrument, pulse width 10ns, single pulse energy is not less than 500mJ, repetition rate 20Hz, conservative estimation paint removal efficient can reach 5m at least
2/ h even higher, its efficient is apparently higher than conventional paint removal method.And may remove enamelled coating hardly for traditional laser cleaner low laser power like this.So just can reduce energy consumption, thereby effectively reduce the scrubbing cost, increase work efficiency.
3, owing to adopted the Ultrasonic Detection analytical system, monitor the scrubbing process in real time, can in efficient scrubbing, not damage sample surfaces, thereby can realize the automation scrubbing, can satisfy the higher instructions for uses of automaticity such as factory.
[description of drawings]
Fig. 1 is the schematic diagram of laser ablation effect scrubbing
Wherein, 11 is dirt, and 12 for substrate, and 13 be incoming laser beam, and 14 are the fusing dirt, and 15 are the dirt that gasifies, and 16 are eliminated clean part for dirt
Fig. 2 is the schematic diagram of narrow-pulse laser scrubbing
Wherein, 21 is dirt, and 22 for the laser emission substrate, and 23 be incoming laser beam, and 24 be the transmission laser bundle, and 25 is the substrate of expansion oscillating component, and 26 are the dirt power part that is hit, and 27 is dirt disengaging base part
Fig. 3 is a ultrasonic detection narrow pulse width laser spotter structural representation
Wherein, 31 is narrow pulse width laser apparatus, and 311 is outgoing laser beam, and 32 are light beam adjustment transmitting device, 321 is the light beam coupling device, 322 is the light beam conduction device, and 323 is the laser delivery, and 324 is aligned bundle equipment, 33 is the mobile platform device, 331 is cross slide way, and 332 is longitudinal rail, and 34 is supersonic detection device, 341 is ultrasonic signal, 35 is automaton, and 351 is control circuit, and 36 are the dust suction retracting device, 361 is bleeding point, 362 is wireway, and 37 are the scrubbing sample, and 371 is surface contaminants
[specific embodiment]
The present invention is further illustrated below in conjunction with the specific embodiment, but using method of the present invention and application are not limited to these embodiment.
Embodiment 1: the automotive lacquer layer of removing iron alloy surface
Implementation step:
(1) according to concrete sample and dirt character, by automaton input laser works parameter.The laser works parameter is: the laser instrument of 1064nmNd:YAG laser instrument or other type, pulse width for example is adapted to the pulsewidth of this course of work for 15ns, 10ns, 5ns or other, single pulse energy be 500mJ, 200mJ or in 100mJ～10J scope the concrete condition according to dirt determine; Repetition rate 20Hz to 60Hz scope.For the automotive lacquer of removing iron alloy surface, the laser works parameter is: 1064nmNd:YAG laser instrument, pulse width 15ns, single pulse energy 500mJ, repetition rate 20Hz.If unclear required pulsed laser energy also can be made as 0J, automaton can adopt trying division method to carry out preliminary treatment to choose suitable energy range in cleaning process; Perhaps from the parameter that automaton provides, select, have the running parameter of some scrubbing operations commonly used (such as paint removal, rust cleaning) in the software of control system in advance, so that the user selects or reference is provided with.
(2) utilize the aligned bundle of laser delivery to aim at the position that to clean and adjust the laser delivery and obtain needed spot size S, for wire hot spot S=α b (a is a spot width, and b is a hot spot length) with being cleaned the dielectric surface distance.Because spot size is corresponding with used pulsed laser energy, S=1cm is got in suggestion here
2, can do suitable adjustment again according to the actual conditions size.
(3) the moving step length L of setting mobile platform device horizontal stroke, vertical both direction
1, L
2(generally software systems are given tacit consent to L
1=a, L
2=b),, set the mobile step number n of horizontal, vertical both direction then according to the shape of scrubbing object
1, n
2, and switch step number (laterally move to switch to after what in step and vertically move, vertically move what again then switch to laterally) in step, for example for the rectangle sample of 4 * 2m, can set n
1=1000 steps, n
2=500 steps, and vertically moved for 1 step after laterally whenever moving for 1000 steps.
(4) dust suction retracting device bleeding point is placed near the sample surfaces, aims at sample surfaces, and make its work.
(5) start narrow pulse width laser apparatus, the narrow-pulse laser that laser instrument sends is adjusted transmitting device through light beam and is shone sample surfaces, and sample surfaces is carried out the paint removal operation, and dust suction this moment retracting device is also started working and in time taken the coating agent which has to be dissolved in alcohol before use of removing away recovery.
(6) in the scrubbing process, ultrasonic signal check and analysis system can judge whether coating agent which has to be dissolved in alcohol before use can be eliminated, if cannot remove coating agent which has to be dissolved in alcohol before use, control system can improve the progressively energy of laser instrument, till coating agent which has to be dissolved in alcohol before use can be removed; If coating agent which has to be dissolved in alcohol before use can be eliminated totally, the laser energy value that control system will be recovered to preset, and control mobile platform device drives sample according to the moving step length L that sets or the laser delivery moves, and just can realize so repeatedly whole sample surface automation continuous wash.And when the laser energy value continues to be higher than certain numerical value, automaton is used this value and is substituted default laser energy value, so just can obtain scrubbing energy value more accurately according to concrete sample actual conditions, this simultaneously just in cleaning process automaton can choose the principle of suitable energy range by trying division method.Test shows, paint removal efficient can reach more than the 5m2/h at least.
(7) after paint removal finishes, close package unit, and take out the dirt of disposing from the material storage room of dust suction retracting device, and recycling.
Embodiment 2: remove the medium corrosion degree rusty scale in iron plate surface
This embodiment is substantially the same manner as Example 1, and difference is:
(1) corrosion is removed required energy density than paint removal energy density height, so the laser energy in the laser works parameter should improve to some extent, can get 600mJ, and other parameters can remain unchanged.
(2) be not the very corrosion of standard for local some shape, this device has also added Artificial Control on the basis of control automatically, and the two can arbitrarily switch.Like this can be in the away rust by laser process, when the automatic scan of certain direction of laser switches to Artificial Control during near the irregular edge of corrosion, laser instrument is quit work, controlling the mobile platform device then navigates to and restarts laser instrument behind the next scrubbing position and start working, switch to automatic control simultaneously, can guarantee so accurately to remove corrosion and the metal surface of not damaging other non-corroding positions.
Embodiment 3: remove paint or other dirts with local shape irregular (the body surface radian is bigger) body surface
According to concrete sample and dirt character, by automaton input laser works parameter.The laser works parameter is: the laser instrument of 1064nmNd:YAG laser instrument or other type, pulse width for example is adapted to the pulsewidth of this course of work for 15ns, 10ns, 5ns or other, single pulse energy be 500mJ, 200mJ or in 100mJ～10J scope the concrete condition according to dirt determine; Repetition rate 20Hz to 60Hz scope.If unclear required pulsed laser energy also can be made as 0J, automaton can adopt trying division method to carry out preliminary treatment to choose suitable energy range in cleaning process; Perhaps from the parameter that the FEEDBACK CONTROL control device provides, select, have the running parameter of some scrubbing operations commonly used (such as paint removal, rust cleaning) in the software of control system in advance, so that the user selects or reference is provided with.
For the dirt of removing object surface shape rule part position, this embodiment is substantially the same manner as Example 1, difference is the dirt for local surfaces out-of-shape position, can adopt hand-held laser delivery to carry out the paint removal operation, and not by the mobile platform device, adopt Artificial Control simultaneously, other running parameters remain unchanged.
Ultrasonic detection narrow pulse width laser spotter involved in the present invention has overcome the shortcoming of conventional laser decontamination apparatus, has fine The scrubbing effect, simultaneously more energy-conservation, higher scrubbing efficient is not damaged sample itself, automation scrubbing and environmental protection etc. are excellent The point. Can adapt to the higher places of automaticity such as factory, range of application is very extensive.
Claims (10)
1. the ultrasonic detection narrow pulse width laser spotter that can remove the substrate surface contaminant, it is characterized in that this device comprises narrow pulse width laser apparatus (1), light beam is adjusted transmitting device (2), mobile platform device (3), supersonic detection device (4), automaton (5), dust suction retracting device (6), this device utilizes narrow pulse width laser and object extremely short character action time, at first the laser that narrow pulse width laser device is produced carries out spot shaping and is transferred to being cleaned body surface by light beam adjustment transmitting device, laser be cleaned object interaction and produce the dirt that strong shock wave vibratory can be removed body surface, supersonic detection device can be gathered the formed ultrasonic signal of vibration simultaneously, and send automaton analysis to, automaton analyzes cleaning state and timely control cleaning process according to the ultrasonic signal Changing Pattern, thereby dielectric surface is intact when guaranteeing that dirt is eliminated.
2. according to the described ultrasonic detection narrow pulse width laser of claim 1 spotter, the output laser that it is characterized in that narrow pulse width laser apparatus is narrow pulse width laser, and laser pulse width is in tens nanoseconds or shorter, and pulsed laser energy is 100mJ～10J; Optical maser wavelength can be all band; The control circuit of the opening and closing of laser instrument, output energy, operating frequency is connected to realize automatic control with the automaton circuit.
3. according to the described ultrasonic detection narrow pulse width laser of claim 2 spotter, all band that it is characterized in that the optical maser wavelength of narrow pulse width laser apparatus can be a ultraviolet, infrared, as seen.
4. according to the described ultrasonic detection narrow pulse width laser of claim 1 spotter, it is characterized in that light beam adjustment transmitting device comprises light beam coupling device, light beam conduction device, laser delivery, wherein the inner critical piece of light beam coupling device is coupled lens and shaping lens; The light beam conduction device can be light-conducting arm or energy-transmission optic fibre; Laser delivery inside comprises collimation lens, and outside installation minature solide-state laer or LED are as aligned bundle, and package unit connects protection by metal-back.
5. according to the described ultrasonic detection narrow pulse width laser of claim 1 spotter, mobile platform device wherein is made up of stepper motor or mechanical arm, guide rail, cleaning platform, it is characterized in that being furnished with porous and fixed mount on the cleaning platform, can place and fixed laser output or small sample; Stepper motor (single or multiple) or mechanical arm can drive cleaning platform do two dimension, three-dimensional or more multidimensional move; Move mode can be that rectilinear motion or rotation wait other compound movements; Translational speed and precision can be regulated.
6. according to the described ultrasonic detection narrow pulse width laser of claim 1 spotter, it is characterized in that supersonic detection device, it is the ultrasonic signal that can receive the special wave band that sample produces in the cleaning, and produce digital/analog signal to control system, come test sample to clean the device of situation by specific analytical method.
7. according to the described ultrasonic detection narrow pulse width laser of claim 1 spotter, automaton wherein mainly is the control circuit that a PLC, single-chip microcomputer or computer are formed, it is characterized in that automaton can receive the signal of supersonic detection device feedback, and utilize the ultrasonic signal Changing Pattern that produces in the corresponding narrow pulse width laser cleaning to analyze the cleaning state, and control the duty and the parameter of narrow pulse width laser apparatus, mobile platform device thus.
8. according to the described ultrasonic detection narrow pulse width laser of claim 7 spotter, it is characterized in that automaton can adopt Artificial Control to substitute control automatically, be that duty that automaton directly sends according to the operator is instructed duty and the parameter of controlling narrow pulse width laser apparatus, mobile platform device, and not being subjected to clean the control of state this moment, control is inoperative automatically during Artificial Control.
9. according to claim 7,8 one of them described ultrasonic detection narrow pulse width laser spotter, it is characterized in that the dust suction retracting device mainly by bleeding point, wireway, take out dirt compressor or air blast, material storage room constitutes, can be fixed on during use and be cleaned near the sample, bleeding point is over against sample, so that suction has in time been removed dirt and has been avoided it to cause secondary pollution, simultaneously dirt is reclaimed, its operating circuit is controlled by automaton.
10. a ultrasonic detection narrow pulse width laser is removed the method for dirt, it is characterized in that this method for separating polluted particles is, at first according to concrete sample and dirt character, by automaton input laser works parameter or from the parameter that automaton provides, select; Next utilizes the aligned bundle of laser delivery to aim at the position that will clean and adjusts the laser delivery and obtains needed spot size with being cleaned the dielectric surface distance, and sets the move mode of mobile platform device in conjunction with the sample surfaces size; Then dust suction retracting device bleeding point is placed near the sample surfaces, aims at sample surfaces, and make its work; Then start narrow pulse width laser apparatus, in the scrubbing process, ultrasonic signal check and analysis system can judge whether dirt can be eliminated, if cannot remove dirt, control system can progressively improve the energy of laser instrument, till dirt can be removed, if dirt can be eliminated totally, the laser energy value that control system will be recovered to preset, and control mobile platform device arrives next scrubbing position according to moving step length mobile example of setting or laser delivery, and when the laser energy value continued to be higher than certain numerical value, automaton was used this value and is substituted default laser energy value, finished whole sample surface scrubbing process so repeatedly; Close package unit at last, and take out the dirt of disposing from the material storage room of dust suction retracting device; In cleaning process, also can adopt manually operated method to substitute control automatically, be duty and the parameter that the operator can come directly to control the various devices in the scrubbing process as required, comprise the work of laser instrument and stop, pulsed laser energy, repetition rate, moving of cleaning positions, and Artificial Control can be switched use according to actual needs with automatic control; Removing the used laser of dirt is narrow pulse width laser, and laser pulse width is in tens nanoseconds or shorter, and pulsed laser energy is 100mJ～10J; Optical maser wavelength can be all band; The all band of used narrow pulse width laser wavelength can be a ultraviolet, infrared, as seen.
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| CN102059457A (en) * | 2010-10-29 | 2011-05-18 | 深圳市大族激光科技股份有限公司 | Laser paint-removing system and method |
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2007
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