CN101119009A - Method for generating third harmonic laser - Google Patents
Method for generating third harmonic laser Download PDFInfo
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- CN101119009A CN101119009A CNA2006100368413A CN200610036841A CN101119009A CN 101119009 A CN101119009 A CN 101119009A CN A2006100368413 A CNA2006100368413 A CN A2006100368413A CN 200610036841 A CN200610036841 A CN 200610036841A CN 101119009 A CN101119009 A CN 101119009A
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Abstract
The invention relates to a third harmonic laser generating method, which comprises a pumping resource, a Q switch, a duplex frequency nonlinear crystal, a triplicate frequency nonlinear crystal and a plurality of reflecting mirrors. The high power density fundamental wave light generated by the pumping resource pump acts on the duplex frequency nonlinear crystal so as to generate second harmonic laser; the second harmonic laser and the high power density fundamental wave light generated by the pumping resource pump synchronically is emitted into the triplicate frequency nonlinear crystal to be summed so as to generate third harmonic laser to be output out of a laser resonance cavity; the duplex frequency nonlinear crystal, the triplicate frequency nonlinear crystal and the pumping resource are all positioned in the laser renounce cavity. The present invention develops a diode array side pumping ultraviolet 355nm laser so as to get ultraviolet 355nm laser output with high basic mold and light conversion rate and long service life.
Description
Technical field
The present invention relates to the generation of Laser method, particularly the production method of third harmonic laser.
Background technology
In recent years, laser retrofit development is very rapid in the world, its market output value surpasses laser labelling, become the main laser industry that is only second to laser cutting and welding, and short wavelength's high power Ultra-Violet Laser is the important development direction of laser retrofit owing to have high-resolution and high the absorption.
Prior art third harmonic laser producing method can classify as three kinds.First kind is that two frequencys multiplication, frequency tripling nonlinear crystal are all outside laserresonator.Fundamental wave at first acts on the two frequency multiplication nonlinear crystals after being exported by pumping source, produces second harmonic laser, and fundamental wave and second harmonic laser acting in conjunction are carried out on the frequency tripling nonlinear crystal and frequently, produced third harmonic laser then.Referring to United States Patent (USP) US6115402, US5835513 number.This kind mode is owing to adopt the cavity external frequency multiplication technology, and laser power density only is about 20% in the chamber, and shg efficiency is lower.Often take the type of focusing for the power density that raising acts on the frequency tripling nonlinear crystal, cause frequency tripling nonlinear crystal rete to destroy easily, laser life is short.Industrial products generally adopt the compartment time to move the frequency tripling nonlinear crystal at present, and the mode of avoiding the focal beam spot long duration of action to go up on one point prolongs the rete life-span, complex structure, and control is accurate.Second kind is that two frequency multiplication nonlinear crystals are put in the chamber, and the frequency tripling nonlinear crystal sees also United States Patent (USP) US6241720 outside the chamber, US6229859 number.This mode advantage be two frequencys multiplication in the chamber, the light conversion efficiency height, shortcoming is with first kind of mode.Because frequency tripling still outside the chamber, keep away unavoidably by the type of focusing, rete destroys problem and still exists.The third is two frequencys multiplication, and frequency tripling is all in the chamber.See United States Patent (USP) US5278852, US5943351 number.This mode advantage is to utilize high power density in the chamber, need not the type of focusing can produce the triple-frequency harmonics of high light conversion efficiency.But the shortcoming that has the poor stability of the big and whole resonant cavity of first-harmonic loss.
Summary of the invention
The technical problem that institute of the present invention desire solves provide a kind of can obtain stable, light conversion efficiency is high, nonlinear crystal long service life, the easy production method of the third harmonic laser of commercialization.
Purpose of the present invention can be achieved through the following technical solutions:
A kind of production method of third harmonic laser, comprise pumping source, Q switching, two frequency multiplication nonlinear crystals, frequency tripling nonlinear crystal and a plurality of speculum, the high power density fundamental wave that the pumping source pumping produces affacts on the two frequency multiplication nonlinear crystals and produces second harmonic laser, the high power density fundamental wave that the second harmonic laser of this generation and pumping source pumping produce is injected simultaneously and is carried out on the frequency tripling nonlinear crystal and frequency, produce outside the third harmonic laser output laserresonator, two frequency multiplication nonlinear crystals, frequency tripling nonlinear crystal and pumping source all place in the laserresonator, and laserresonator is sealing or internal reflection vibration chamber.
The frequency tripling nonlinear crystal is in the thick waist place of laserresonator.
Fundamental wave is repeatedly total reflection in laserresonator, and second harmonic laser is primary event in laserresonator, and fundamental wave and second harmonic laser single produce the third harmonic laser output of single bundle high conversion efficiency by the frequency tripling nonlinear crystal.
Second harmonic laser and third harmonic laser are by output simultaneously behind the frequency tripling nonlinear crystal, with output tertiary wave laser after optical module conversion direction, the beam split.
The optical module that is used for conversion direction is a speculum, and the optical module that is used for beam split is an optical prism.
The waist place is provided with limit mould aperture in the laserresonator, guarantees the output of basic mode triple-frequency harmonics.
On the light path of the inherent laser generation of laserresonator polarizer is installed also.
Employed two frequency multiplication nonlinear crystals can be I class LBO or I class BBO or I class CLBO.
Employed frequency tripling crystal is I class LBO or I class BBO or I class CLBO or II class LBO or nonlinear crystals such as II class BBO or II class CLBO.
Employed fundamental wave of laser medium is: Nd:YAG or Nd:YVO
4Or crystal such as Nd:YLF or Nd:Glass or Yb:YAG or Er:YAG.
Adopting pump light source is high power semiconductor laser diode profile pump or the vertical pumping of diode end or krypton lamp, xenon lamp profile pump.
Described Q switching is acoustooptic switch or electrooptical switching or saturated sharp receipts type passive Q-switch.
Laserresonator is low-angle refrative cavity structure or 45 refrative cavity structure or Brewster angle refrative cavity structure.
The technique effect that the present invention can reach is:
The one, adopt two frequencys multiplication, frequency tripling is the frequency multiplication mode in the chamber all, utilizes high-energy-density in the chamber, improves light conversion efficiency.
The 2nd, designed position in waist and the frequency tripling nonlinear crystal chamber, make in the chamber thick waist just in time by the germ nucleus, avoid frequency tripling nonlinear crystal rete to destroy, improve laser life.
The 3rd, establish aperture limit mould at the waist place, improve zlasing mode.
The 4th, cavity resonator structure is simple, and is easy to adjust, good stability, easily suitability for industrialized production.
Description of drawings
The present invention is further described with experiment below in conjunction with accompanying drawing:
Fig. 1 is a principle of the invention schematic diagram;
Fig. 2 is the analog computation of optical resonator of the present invention figure as a result;
Fig. 3 obtains the triple-frequency harmonics power for the present invention tests;
Fig. 4 obtains triple-frequency harmonics light field figure for the present invention tests.
Specific implementation method
The production method principle of third harmonic laser as shown in Figure 1.First-harmonic is the oscillator of wavelength 1064nm, is made up of pumping source 5, Q switching 3, polarizer 4, limit mould aperture 2, end face completely reflecting mirror 1,9,45 degree speculums 6.Pumping source 5 adopts the Nd:YAG rod of high-power laser diode array profile pump, calculate and measured under different pump powers, the thermal lensing effect of Nd:YAG rod, calculated the spatial distribution that Gaussian mode transmits in the laserresonator with the optics matrix method, designed the curvature of best chamber length and end face completely reflecting mirror 1,9, made the infrared laser resonant cavity under the thermal lens wide variation, still keep stable vibration.Result of calculation as shown in Figure 2.The waist place that limit mould aperture 2 places near end face completely reflecting mirror 1 is to control first-harmonic at single-mode oscillation.At another waist, then place two frequency multiplication nonlinear crystals 8 near end face completely reflecting mirror 9.Because the infrared laser chamber is sealing or inner total reflection vibration, and with the thermal lens balance of high power pump, therefore very high intracavity power density arranged.Q switching 3 is an optoelectronic switch, can be acoustooptic switch or electrooptical switching or saturated sharp receipts type passive Q-switch.Two frequency multiplication nonlinear crystals 8 can be other nonlinear crystals such as I class LBO or I class BBO or I class CLBO.
Harmonic wavelength is 532nm, is made up of I class two frequency multiplication nonlinear crystals 8, end face completely reflecting mirror 1,9 and 45 degree mirrors 6.6 plating high transmissions of 1064nm of 45 degree mirrors and the high reflection of 355nm, 532nm three look films.The second harmonic laser forming process is as follows: from the next fundamental wave of end face completely reflecting mirror 1 direction, in two frequency multiplication nonlinear crystals 8, produce second harmonic laser, second harmonic laser is through 9 total reflections of end face completely reflecting mirror, work together on the frequency tripling nonlinear crystal 7 with fundamental wave, again from 45 degree mirrors, 6 total reflections output from 9 total reflections of end face completely reflecting mirror.
The triple-frequency harmonics wavelength is 355nm, is made up of frequency tripling nonlinear crystal 7,45 degree mirrors 6 and Amici prism 10, for one way reflects export structure by nonlinear crystal, has low-loss, single beam output characteristic.Forming process is as follows: the fundamental wave and the second harmonic laser that come from end face completely reflecting mirror 9 directions incide on the frequency tripling nonlinear crystal 7 simultaneously, produce third harmonic laser with frequency, this third harmonic laser and remaining second harmonic laser are through the 6 reflection outputs of 45 degree mirrors, after Amici prism 10 beam split, export, promptly obtain third harmonic laser.Design frequency tripling nonlinear crystal 7 is in the thick waist place chamber in, avoids too high power density to act in the chamber in and causes frequency tripling nonlinear crystal 7 superficial films destruction on the frequency tripling nonlinear crystal 7, the raising laser life-span.The waist place is provided with aperture limit mould in the chamber, guarantees the output of basic mode triple-frequency harmonics.Employed frequency tripling nonlinear crystal 7 is I class LBO or I class BBO or I class CLBO or II class LBO or nonlinear crystals such as II class BBO or II class CLBO.
Fundamental wave of laser medium used in the present invention is: Nd:YAG or Nd:YVO
4Or crystal such as Nd:YLF or Nd:Glass or Yb:YAG or Er:YAG.Adopting pump light source is high power semiconductor laser diode profile pump or the vertical pumping of diode end or krypton lamp, xenon lamp profile pump.Laser resonator structure can be low-angle refrative cavity structure or 45 refrative cavity structure or Brewster angle refrative cavity structure.May add as 1/2 wave plate, optical modules such as lens in the chamber.
In summary, fundamental wave is repeatedly total reflection in resonant cavity, and second harmonic laser is primary event in resonant cavity, and fundamental wave and second harmonic laser single produce the third harmonic laser output of single bundle high conversion efficiency by the frequency tripling nonlinear crystal.Second harmonic laser and third harmonic laser are exported simultaneously, use the optical module beam split, promptly obtain required third harmonic laser.
Experimental result
According to technique scheme, set up frequency tripling experimental provision in the heavy-duty diode laser array profile pump Nd:YAG laser cavity.Experimental result as shown in Figure 3, Figure 4, Fig. 3 is the experimental result (frequency is 10KHZ) of the pairing triple-frequency harmonics power of different input currents and pulse width variation curve.The triple-frequency harmonics optical field distribution figure that Fig. 4 records for experiment.
Claims (13)
1. the production method of a third harmonic laser, comprise pumping source, Q switching, two frequency multiplication nonlinear crystals, frequency tripling nonlinear crystal and a plurality of speculum, it is characterized in that: the high power density fundamental wave that the pumping source pumping produces affacts on the two frequency multiplication nonlinear crystals and produces second harmonic laser, the high power density fundamental wave that the second harmonic laser of this generation and pumping source pumping produce is injected simultaneously and is carried out on the frequency tripling nonlinear crystal and frequency, produce outside the third harmonic laser output laserresonator, two frequency multiplication nonlinear crystals, frequency tripling nonlinear crystal and pumping source all place in the laserresonator, and laserresonator is sealing or internal reflection vibration chamber.
2. the production method of third harmonic laser according to claim 1, it is characterized in that: the frequency tripling nonlinear crystal is in the thick waist place of laserresonator.
3. the production method of third harmonic laser according to claim 1, it is characterized in that: fundamental wave is repeatedly total reflection in laserresonator, second harmonic laser is primary event in laserresonator, and fundamental wave and second harmonic laser single produce the third harmonic laser output of single bundle high conversion efficiency by the frequency tripling nonlinear crystal.
4. according to the production method of claim 1 or 3 described third harmonic lasers, it is characterized in that: second harmonic laser and third harmonic laser are by output simultaneously behind the frequency tripling nonlinear crystal, with output tertiary wave laser after optical module conversion direction, the beam split.
5. the production method of third harmonic laser according to claim 4, it is characterized in that: the optical module that is used for conversion direction is a speculum, the optical module that is used for beam split is an optical prism.
6. the production method of third harmonic laser according to claim 1 is characterized in that: the waist place is provided with limit mould aperture in the laserresonator, guarantees the output of basic mode triple-frequency harmonics.
7. the production method of third harmonic laser according to claim 1 is characterized in that: on the light path of the inherent laser generation of laserresonator polarizer is installed also.
8. the production method of third harmonic laser according to claim 1, it is characterized in that: employed two frequency multiplication nonlinear crystals can be I class LBO or I class BBO or I class CLBO.
9. the production method of third harmonic laser according to claim 1, it is characterized in that: employed frequency tripling crystal is I class LBO or I class BBO or I class CLBO or II class LBO or nonlinear crystals such as II class BBO or II class CLBO.
10. the production method of third harmonic laser according to claim 1, it is characterized in that: employed fundamental wave of laser medium is: Nd:YAG or Nd:YVO
4Or crystal such as Nd:YLF or Nd:Glass or Yb:YAG or Er:YAG.
11. the production method of third harmonic laser according to claim 1 is characterized in that: adopting pump light source is high power semiconductor laser diode profile pump or the vertical pumping of diode end or krypton lamp, xenon lamp profile pump.
12. the production method of third harmonic laser according to claim 1 is characterized in that: described Q switching is acoustooptic switch or electrooptical switching or saturated sharp receipts type passive Q-switch.
13. the production method of third harmonic laser according to claim 1 is characterized in that: laserresonator is low-angle refrative cavity structure or 45 refrative cavity structure or Brewster angle refrative cavity structure.
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102214892A (en) * | 2011-05-12 | 2011-10-12 | 中国科学院理化技术研究所 | Laser based on bulk laser self-frequency conversion material cascade effect |
| CN102292671A (en) * | 2008-11-21 | 2011-12-21 | 埃奥利特系统公司 | Device for extending the service life of a non-linear optical system subjected to the radiation of an intense laser beam and non-linear optical source including said device |
| CN102510002A (en) * | 2011-12-29 | 2012-06-20 | 苏州德龙激光有限公司 | Semiconductor diode single-end pumped 355nm ultraviolet laser |
| CN103682974A (en) * | 2013-12-16 | 2014-03-26 | 北京工业大学 | Method for generating third-harmonic-generation ultraviolet laser through fold resonating cavity |
| CN106483733A (en) * | 2016-10-25 | 2017-03-08 | 广东工业大学 | A kind of quasi-phase matched basic mode triple-harmonic filling method based on optical fiber |
| CN107350640A (en) * | 2017-08-15 | 2017-11-17 | 成都新柯力化工科技有限公司 | A kind of high-efficiency multi-wavelength laser boring method |
| CN107946891A (en) * | 2017-12-14 | 2018-04-20 | 湖北工业大学 | A kind of high-power ultraviolet solid-state laser |
| CN108092127A (en) * | 2016-11-17 | 2018-05-29 | 中国航空工业集团公司北京航空制造工程研究所 | One kind moves back the electric-optically Q-switched structure of pressure type and Q-regulating method |
| CN110061412A (en) * | 2019-04-11 | 2019-07-26 | 中国科学院理化技术研究所 | A kind of ultraviolet solid-state laser apparatus suitable for optic communication |
| CN110286542A (en) * | 2019-07-26 | 2019-09-27 | 南京钻石激光科技有限公司 | The device that three multiplying power of laser emission generates |
| CN116266026A (en) * | 2022-06-15 | 2023-06-20 | 深圳市通甪吉祥科技有限合伙企业(有限合伙) | Laser processing device and laser ablation equipment |
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2006
- 2006-07-31 CN CNB2006100368413A patent/CN100499297C/en not_active Expired - Fee Related
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102292671A (en) * | 2008-11-21 | 2011-12-21 | 埃奥利特系统公司 | Device for extending the service life of a non-linear optical system subjected to the radiation of an intense laser beam and non-linear optical source including said device |
| CN102292671B (en) * | 2008-11-21 | 2015-10-07 | 埃奥利特系统公司 | Extend by nonlinear optical system serviceable life of intense laser beam radiation equipment and comprise the non-linear light source of this equipment |
| CN102214892B (en) * | 2011-05-12 | 2012-12-12 | 中国科学院理化技术研究所 | Laser based on bulk laser self-frequency conversion material cascade effect |
| CN102214892A (en) * | 2011-05-12 | 2011-10-12 | 中国科学院理化技术研究所 | Laser based on bulk laser self-frequency conversion material cascade effect |
| CN102510002A (en) * | 2011-12-29 | 2012-06-20 | 苏州德龙激光有限公司 | Semiconductor diode single-end pumped 355nm ultraviolet laser |
| CN103682974A (en) * | 2013-12-16 | 2014-03-26 | 北京工业大学 | Method for generating third-harmonic-generation ultraviolet laser through fold resonating cavity |
| CN106483733A (en) * | 2016-10-25 | 2017-03-08 | 广东工业大学 | A kind of quasi-phase matched basic mode triple-harmonic filling method based on optical fiber |
| CN106483733B (en) * | 2016-10-25 | 2022-09-06 | 广东工业大学 | Quasi-phase matching fundamental mode third harmonic conversion method based on optical fiber |
| CN108092127B (en) * | 2016-11-17 | 2020-09-08 | 中国航空制造技术研究院 | Voltage-reducing type electro-optical Q-switching structure and Q-switching method |
| CN108092127A (en) * | 2016-11-17 | 2018-05-29 | 中国航空工业集团公司北京航空制造工程研究所 | One kind moves back the electric-optically Q-switched structure of pressure type and Q-regulating method |
| CN107350640A (en) * | 2017-08-15 | 2017-11-17 | 成都新柯力化工科技有限公司 | A kind of high-efficiency multi-wavelength laser boring method |
| CN107946891A (en) * | 2017-12-14 | 2018-04-20 | 湖北工业大学 | A kind of high-power ultraviolet solid-state laser |
| CN107946891B (en) * | 2017-12-14 | 2019-09-17 | 湖北工业大学 | A kind of high-power ultraviolet solid-state laser |
| CN110061412A (en) * | 2019-04-11 | 2019-07-26 | 中国科学院理化技术研究所 | A kind of ultraviolet solid-state laser apparatus suitable for optic communication |
| CN110286542A (en) * | 2019-07-26 | 2019-09-27 | 南京钻石激光科技有限公司 | The device that three multiplying power of laser emission generates |
| CN116266026A (en) * | 2022-06-15 | 2023-06-20 | 深圳市通甪吉祥科技有限合伙企业(有限合伙) | Laser processing device and laser ablation equipment |
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Address after: 518051 Dazu laser building, 9 new West Road, North Nanshan District high tech park, Shenzhen, Guangdong Patentee after: HANS LASER TECHNOLOGY INDUSTRY GROUP CO., LTD. Address before: No. 5 road 518057 in Guangdong province Shenzhen city Nanshan District high tech park of Pine Hill Factory District No. 8 Patentee before: Dazu Laser Sci. & Tech. Co., Ltd., Shenzhen |
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