CN100592959C - 用于形成微结构的装置和致动器 - Google Patents
用于形成微结构的装置和致动器 Download PDFInfo
- Publication number
- CN100592959C CN100592959C CN200580012801A CN200580012801A CN100592959C CN 100592959 C CN100592959 C CN 100592959C CN 200580012801 A CN200580012801 A CN 200580012801A CN 200580012801 A CN200580012801 A CN 200580012801A CN 100592959 C CN100592959 C CN 100592959C
- Authority
- CN
- China
- Prior art keywords
- actuator
- ram
- along
- cutter
- fast
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/32—Feeding working-spindles
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Turning (AREA)
- Machine Tool Units (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Optical Elements Other Than Lenses (AREA)
- Disintegrating Or Milling (AREA)
- Saccharide Compounds (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102004020990.1 | 2004-04-23 | ||
| DE102004020990A DE102004020990B4 (de) | 2004-04-23 | 2004-04-23 | Vorrichtung und Verfahren zur Erzeugung von Mikrostrukturen |
| DE202004011815.7 | 2004-07-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1946514A CN1946514A (zh) | 2007-04-11 |
| CN100592959C true CN100592959C (zh) | 2010-03-03 |
Family
ID=34223637
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200580012801A Expired - Fee Related CN100592959C (zh) | 2004-04-23 | 2005-04-13 | 用于形成微结构的装置和致动器 |
Country Status (4)
| Country | Link |
|---|---|
| CN (1) | CN100592959C (de) |
| AT (4) | ATE416061T1 (de) |
| DE (6) | DE102004020990B4 (de) |
| TW (1) | TW200534949A (de) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005044087A1 (de) * | 2005-09-08 | 2007-03-15 | Schott Ag | Aktor zur Bewegung eines Werkzeuges |
| US7328638B2 (en) * | 2005-12-27 | 2008-02-12 | 3M Innovative Properties Company | Cutting tool using interrupted cut fast tool servo |
| JP5031459B2 (ja) | 2007-06-27 | 2012-09-19 | 株式会社アルバック | 粗微移動装置及びそれを備えた液体供給装置 |
| DE102010029242A1 (de) * | 2010-05-21 | 2011-11-24 | Index-Werke Gmbh & Co. Kg Hahn & Tessky | Führungseinrichtung und Werkzeugmaschine mit einer derartigen Führungseinrichtung |
| CN102152131B (zh) * | 2011-02-28 | 2012-06-13 | 西安理工大学 | 滚珠丝杠副压电致动器串联宏微驱动及导轨装置 |
| AT511468B1 (de) * | 2011-04-20 | 2012-12-15 | Fill Gmbh | Dämpfungsrolle |
| DE102011101935B4 (de) * | 2011-05-18 | 2014-10-09 | Wsengineering Gmbh & Co.Kg | Werkzeughalter mit axialem Ausweichmechanismus und Verfahren zur Herstellung eines Werkzeughalters mit einem Ausweichmechanismus |
| AT511330B1 (de) * | 2011-06-03 | 2012-11-15 | Piezocryst Advanced Sensorics | Sensor für die messung von druck und/oder kraft |
| CN103567459B (zh) * | 2012-07-20 | 2016-06-08 | 鸿准精密模具（昆山）有限公司 | 具有非回转曲面的工件 |
| DE102013104923B3 (de) * | 2013-05-14 | 2014-09-11 | Hochschule Furtwangen | Vorrichtung zur vibrationsunterstützten Werkstückbearbeitung |
| DE102014005543B3 (de) | 2014-04-16 | 2015-02-19 | Innolite Gmbh | Verfahren und Vorrichtung zur ultrapräzisen Bearbeitung einer gewölbten und eisenhaltigen Negativfläche eines Formeinsatzes, Formeinsatz sowie ein damit hergestelltes optisches Element |
| TWI579537B (zh) * | 2015-12-09 | 2017-04-21 | 財團法人金屬工業研究發展中心 | Method of extracting dynamic vibration frequency |
| JP7413001B2 (ja) * | 2019-12-20 | 2024-01-15 | デクセリアルズ株式会社 | ロール金型製造方法、ロール金型製造装置およびプログラム |
| JP7343384B2 (ja) * | 2019-12-20 | 2023-09-12 | デクセリアルズ株式会社 | ロール金型製造方法、ロール金型製造装置およびプログラム |
| CN116576095B (zh) * | 2023-05-12 | 2024-06-07 | 烟台东德氢能技术有限公司 | 一种隔膜压缩机与电机对中调整方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE59100077D1 (de) * | 1990-01-24 | 1993-05-19 | Ciba Geigy Ag | Vorrichtung zum herstellen einer kontaktlinse mit insbesondere asphaerischer vorder- und/oder rueckflaeche. |
| US5467675A (en) * | 1993-11-15 | 1995-11-21 | North Carolina State University | Apparatus and method for forming a workpiece surface into a non-rotationally symmetric shape |
| GB2314452A (en) * | 1996-06-17 | 1997-12-24 | Rank Taylor Hobson Ltd | Electromechanical actuator |
| DE19952996A1 (de) * | 1999-11-04 | 2001-05-10 | Heidelberger Druckmasch Ag | Gravierorgan für elektronische Graviermaschine |
| WO2003101666A2 (en) * | 2002-05-29 | 2003-12-11 | Massachusetts Institute Of Technology | Rotary fast tool servo system and methods |
-
2004
- 2004-04-23 DE DE102004020990A patent/DE102004020990B4/de not_active Expired - Fee Related
- 2004-07-28 DE DE202004011815U patent/DE202004011815U1/de not_active Expired - Lifetime
-
2005
- 2005-04-12 TW TW094111430A patent/TW200534949A/zh unknown
- 2005-04-13 DE DE502005007003T patent/DE502005007003D1/de active Active
- 2005-04-13 DE DE502005005644T patent/DE502005005644D1/de active Active
- 2005-04-13 DE DE502005004658T patent/DE502005004658D1/de active Active
- 2005-04-13 AT AT05732039T patent/ATE416061T1/de not_active IP Right Cessation
- 2005-04-13 AT AT06026119T patent/ATE427184T1/de not_active IP Right Cessation
- 2005-04-13 AT AT06026134T patent/ATE410261T1/de not_active IP Right Cessation
- 2005-04-13 DE DE502005006144T patent/DE502005006144D1/de active Active
- 2005-04-13 AT AT06026120T patent/ATE400402T1/de not_active IP Right Cessation
- 2005-04-13 CN CN200580012801A patent/CN100592959C/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| ATE427184T1 (de) | 2009-04-15 |
| ATE400402T1 (de) | 2008-07-15 |
| DE502005005644D1 (de) | 2008-11-20 |
| DE502005006144D1 (de) | 2009-01-15 |
| TW200534949A (en) | 2005-11-01 |
| DE502005007003D1 (de) | 2009-05-14 |
| DE202004011815U1 (de) | 2005-02-24 |
| CN1946514A (zh) | 2007-04-11 |
| ATE416061T1 (de) | 2008-12-15 |
| DE102004020990A1 (de) | 2005-11-17 |
| DE502005004658D1 (de) | 2008-08-21 |
| DE102004020990B4 (de) | 2008-05-21 |
| ATE410261T1 (de) | 2008-10-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100303 Termination date: 20130413 |