CN100559566C - The formation method of the line of semiconductor device - Google Patents
The formation method of the line of semiconductor device Download PDFInfo
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- CN100559566C CN100559566C CNB2006101452783A CN200610145278A CN100559566C CN 100559566 C CN100559566 C CN 100559566C CN B2006101452783 A CNB2006101452783 A CN B2006101452783A CN 200610145278 A CN200610145278 A CN 200610145278A CN 100559566 C CN100559566 C CN 100559566C
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Abstract
A kind of method that forms the line of semiconductor device wherein can be improved the electrical characteristics of device by the resistance that reduces line.According to this method, form therein and give amorphous silication thing layer of formation or amorphous TiSiN layer on the Semiconductor substrate of fixed structure.On amorphous silication thing layer or amorphous TiSiN layer, form the line conductive layer.
Description
Technical field
The present invention relates generally to semiconductor device, more specifically relate to the formation method of the line of semiconductor device, wherein this method can reduce the resistance of line.
Background technology
Usually, because the live width of semiconductor device is more and more narrow and its integrated level increases, therefore required live width can not satisfy by the line forming method that adopts traditional reactive ion etching (RIE) process.Therefore, be extensive use of the line forming method of embedded (damascene) method of employing.
When adopting the line forming method of embedded method, wire material must deposit be filled in the area of the pattern that forms in the groove with the gap and contact form different during with use RIE method.
In semiconductor device, tungsten (W) is usually with the conductive layer that acts on main wire material.Under the situation of W, use WF
6As deposition gas.Therefore, be necessary before W forms that TiN, the TaN, the TiW that utilize resistance to be relatively higher than W wait and deposit barrier metal layer.Recently, because the influence of line miniaturization causes adopting usually forming TiN by the chemical vapor deposition (CVD) method with excellent step spreadability.
In addition, after forming, the TiN layer just is formed for the TiSi of ohmic contact usually
x, and depositing Ti layer (being adhesion layer) is to improve tack.
Need make the Ti/TiN layer be deposited into given thickness or thicker at deposition W (conductive layer that promptly is used for main wire material) before.Yet in the actual line structure, the Ti/TiN layer occupies most thickness.Particularly, embedded method is included in and forms Ti/TiN layer and W layer in the groove that has formed, and these are different with the RIE method.Therefore, the Ti/TiN layer has the 3D structure.This makes the Ti/TiN layer constitute most of thickness.
And because line structure becomes finer, thereby the Ti/TiN layer occupies more thickness, thereby causes the deposition of W (conductive layer that promptly is used for main wire material) and gap to fill failure.Therefore, reduce, in being used for the conductive layer of main wire material, form reason such as space and cause having problems because be used for the conductive layer volume of main wire material.As a result, line resistance increases, thereby the electrical characteristics deterioration of device.
Improving the gap filling characteristic of the conductive layer that is used for main wire material and the most convenient of electrical characteristics and the method for insuring most is to reduce the thickness of barrier metal layer, thereby reduces the weight of the conductive layer that is used for main wire material.But, if the thickness subcritical thickness of barrier metal layer then loses the former of barrier metal layer and produces effect; Thereby produce by the WF that is used to deposit W (conductive layer that promptly is used for main wire material)
6Problem, WF that the resistance that causes increases
6" F adhere to " problem, Ti layer and the WF of gas permeation to the Semiconductor substrate
6" W volcano " problem of mutual explosive reaction or the like.
For example, the gradient of groove must be set at steady state value, and the thickness of barrier metal layer must be set at critical value or bigger.Therefore, need improve the method for the resistivity of the conductive layer self that is used for main wire material.
Summary of the invention
Therefore, the present invention is absorbed in the problems referred to above, and provide a kind of method that forms the line of semiconductor device, wherein after forming, the conductive layer that is used for main wire material just forms amorphous silication thing layer or amorphous TiSiN layer, to produce the nucleus that the nucleus time-division is used in the formation conductive layer subsequently, and the resistivity of the conductive layer that reduces to form thereon, reduce the resistance of line thus.
According to an aspect, the invention provides a kind of method that forms the line of semiconductor device, be included in the step that forms amorphous silication thing layer on the Semiconductor substrate and on amorphous silication thing layer, form the line conductive layer.
This method is further comprising the steps of: before forming amorphous silication thing layer, forming adhesion layer on the Semiconductor substrate and form barrier metal layer on adhesion layer.Adhesion layer is preferably formed by Ti, and barrier metal layer for example can use that one of TiN, TaN and TiW form.
This method also is included in and forms after the amorphous silication thing layer, forms the step of ohmic contact layer on the interface of adhesion layer and Semiconductor substrate.Ohmic contact layer is because the metal silicide layer that the silicon ion of the metal ion of adhesion layer and Semiconductor substrate reacts to each other and forms by heat treatment process.
The heat treatment process that is used to form ohmic contact layer was preferably carried out 10 seconds-30 seconds under 600 ℃ of-900 ℃ of temperature by rapid thermal treatment (RTP) method.
The preferably amorphous WSi of amorphous silication thing layer
xLayer.Amorphous WSi
xLayer can use SiH
4And WF
6Form as source gas.
Simultaneously, amorphous silication thing layer preferably uses a kind of formation the in chemical vapor deposition (CVD) method, ald (ALD) method and the physical vapor deposition (PVD) method.When adopting the CVD method, amorphous silication thing layer is preferably formed
Thickness.When adopting the ALD method, amorphous silication thing layer is preferably formed
Thickness.
The line conductive layer is preferably by generating the W nucleus and using H on amorphous silication thing layer or TiSiN layer
2And WF
6W forms by one of CVD method and PVD method deposition.
Description of drawings
Fig. 1 is the figure that the resistivity Rs-lower thickness of PVD W is shown;
Fig. 2 A-2D illustrates the sectional view of formation according to the method for the line of the semiconductor device of first embodiment of the invention;
Fig. 3 A-3C illustrates the sectional view of formation according to the method for the line of the semiconductor device of second embodiment of the invention; With
Fig. 4 is the figure that illustrates according to comparing result between the resistivity Rs of prior art and line of the present invention.
Specific embodiments
Below, specific embodiments of the present invention is described with reference to the accompanying drawings.
Fig. 1 is the figure of resistivity (Rs)-lower thickness that PVD tungsten (W) is shown.
As seen from Figure 1, the PVD tungsten layer that is formed on the Ti/TiN layer has high resistivity value, and is respectively formed at thermal oxide layer, plasma enhancing (PE) nitride layer and Ti/TiN/WSi
xPVD tungsten layer on the layer has the low-resistivity value.
Therefore, in the present invention, on the Ti/TiN layer, form WSi
xLayer is so that divide the nucleus that is used in generation W subsequently.In addition, the crystallite dimension of deposition W thereon increases, and formation has the W layer of low-resistivity to reduce the resistance of line.At this, can use amorphous TiSiN layer to substitute amorphous WSi
xLayer is used in the nucleus of generation W subsequently with branch.
Fig. 2 A-2D illustrates the sectional view of formation according to the method for the line of the semiconductor device of first embodiment of the invention.
With reference to figure 2A, order forms adhesion layer 11, barrier metal layer 12 and amorphous silication thing layer or amorphous TiSiN layer on Semiconductor substrate 20.The adhesion layer 11 preferred Ti of employing form, and barrier metal layer 12 preferred one of TiN, TaN and TiW of adopting form amorphous silication thing layer 13 preferably amorphous WSi
xLayer.Amorphous WSi
xThe preferred SiH that adopts of layer
4And WF
6As source gas, under 350 ℃-550 ℃, form by for example one of CVD method, ALD method and PVD method.When using the CVD method, amorphous WSi
xLayer 13 is preferably formed
Thickness, when adopting the ALD method, amorphous WSi
xLayer 13 is preferably formed
Thickness.
Amorphous WSi
xLayer 13 is used for distributing and increasing the crystallite dimension of deposition block W thereon when generation is used for the nucleus of follow-up W, reduce resistivity thus.
With reference to figure 2B, on the interface of adhesion layer 11 and Semiconductor substrate 10, form ohmic contact layer 14.Ohmic contact layer 14 preferably forms by heat treatment process.If adhesion layer 11 is formed by titanium (Ti), then the Si ion of the Ti ion of adhesion layer 11 and Semiconductor substrate 10 is forced to react to each other, thereby forms TiSi
xLayer (being metal silicide layer).Heat treatment process is preferably implemented according to rapid thermal treatment (RTP) method.At this, treatment temperature preferably sets in 600 ℃ of-900 ℃ of scopes, and the processing time preferably sets in 10 seconds-30 seconds scopes.
With reference to figure 2C, on amorphous silication thing layer or amorphous TiSiN layer 13, form line conductive layer 15.
Line conductive layer 15 is by generating the W nucleus and the H that refluxes subsequently on amorphous silication thing layer or amorphous TiSiN layer 13
2And WF
6Form with deposition W.When generating the W nucleus, this nucleus is dispensed on amorphous silication thing layer or the amorphous TiSiN layer 13, thereby W is deposited on around the W nucleus that is distributed.Therefore, can obtain having the W layer of big crystallite dimension.Resistivity with W layer of big crystallite dimension is lower than the W layer with little crystallite dimension.Therefore, can reduce line resistance.The W layer preferably forms by CVD or PVD method deposition W.
With reference to figure 2D, make line conductive layer 15, amorphous silication thing layer or amorphous TiSiN layer 13, barrier metal layer 12, adhesion layer 11 and ohmic contact layer 14 order patternings by etching process.On whole surface, form insulating barrier 16.Polishing insulating barrier 16 is to expose line conductive layer 15.Thereby finish wire forming proces thus according to first embodiment of the invention.
Fig. 3 A-3C illustrates the sectional view of formation according to the method for the line of the semiconductor device of second embodiment of the invention.At this, use two telescopinies.
With reference to figure 3A, order forms first interlayer insulating film 21, etching stopping layer 22 and second interlayer insulating film 23 on Semiconductor substrate 20.In second interlayer insulating film 23 and etching stopping layer 22, form groove 24a, and in first interlayer insulating film 21, form contact hole 24b, thereby finish two embedded structures 24.First and second interlayer insulating films 21 and the 23 preferred nitride that use form, to prevent the attack to first interlayer insulating film 21 in the etching process that forms groove 24a in second interlayer insulating film 23.
Order forms adhesion layer 25, barrier metal layer 26 and amorphous silication thing layer or amorphous TiSiN layer 27 on the whole surface that comprises two embedded structures 24.
The adhesion layer 25 preferred Ti of use form, and barrier metal layer 26 preferred one of TiN, TaN and TiW of using form amorphous silication thing layer 27 preferably amorphous WSi
xLayer.Amorphous WSi
xThe layer 27 preferred SiH that uses
4And WF
6As source gas, under 350 ℃-550 ℃, form by for example one of CVD method, ALD method and PVD method.When using the CVD method, amorphous WSi
xLayer 27 is preferably formed
Thickness, when adopting the ALD method, amorphous WSi
xLayer 27 is preferably formed
Thickness.
Amorphous WSi
xLayer 27 is used for distributing and increasing the crystallite dimension of deposition block W thereon when generation is used for the nucleus of follow-up W, reduce resistivity thus.
With reference to figure 3B, on the interface of adhesion layer 25 and Semiconductor substrate 20, form ohmic contact layer 28.Ohmic contact layer 28 preferably forms by heat treatment process.If adhesion layer 25 is formed by titanium (Ti), then the Si ion of the Ti ion of adhesion layer 25 and Semiconductor substrate 20 is forced to react to each other, thereby forms TiSi
xLayer (being metal silicide layer).Heat treatment process is preferably implemented according to the RTP method.At this, treatment temperature preferably sets in 600 ℃ of-900 ℃ of scopes, and the processing time preferably sets in 20 seconds-30 seconds scopes.
With reference to figure 3C, on amorphous silication thing layer or amorphous TiSiN layer 27, form line conductive layer 29.Polish line conductive layer 29 forms line thus to expose second interlayer insulating film 23.
Line conductive layer 29 is by generating the W nucleus and the H that refluxes subsequently on amorphous silication thing layer or amorphous TiSiN layer 27
2And WF
6Form with deposition W.When generating the W nucleus, this nucleus is dispensed on amorphous silication thing layer or the amorphous TiSiN layer 27, thereby W is deposited on around the W nucleus that is distributed.Therefore, can obtain having the W layer of big crystallite dimension.Resistivity with W layer of big crystallite dimension is lower than the W layer with little crystallite dimension.Therefore, can reduce line resistance.The W layer preferably forms by CVD or PVD method deposition W.Embedded structure can not satisfy the nargin that fill in the gap.Therefore, the preferred CVD method of using with good step spreadability.
Finish wire forming proces thus according to the semiconductor device of second embodiment of the invention.In described second embodiment, line is formed in two embedded structures.Yet second embodiment can be applicable to single embedded structure, three embedded structures etc.
Fig. 4 is the figure that illustrates according to comparing result between the resistivity Rs of prior art and line of the present invention.
As seen from Figure 4, in the prior art, the resistivity of line is about 270 ohms/square, and in the present invention, the resistivity of line is about 180 ohms/square.Therefore, can significantly reduce the resistivity of line.
As mentioned above, according to the present invention, after the conductive layer that is used for main wire material forms, just form amorphous silication thing layer or amorphous TiSiN layer, thereby generate the nucleus that the nucleus time-division is used in the formation conductive layer subsequently, and reduce the resistivity that forms conductive layer thereon.Therefore, owing to can reduce the resistance of line, thereby can improve the electrical characteristics of device.
Though make above stated specification with reference to various embodiments, those skilled in the art can make variations and modifications under the prerequisite that does not deviate from the spirit and scope of the present invention.
Claims (14)
1. method that forms the line of semiconductor device, this method may further comprise the steps:
On Semiconductor substrate, form amorphous TiSiN layer; With
On amorphous TiSiN layer, form the line conductive layer.
2. the method for claim 1, further comprising the steps of: before forming amorphous TiSiN layer,
On Semiconductor substrate, form adhesion layer; With
On adhesion layer, form barrier metal layer.
3. the method for claim 2, wherein adhesion layer comprises Ti.
4. the method for claim 2, wherein barrier metal layer comprises a kind of among TiN, TaN and the TiW.
5. the method for claim 2, also be included in form amorphous TiSiN layer after, in the step that forms ohmic contact layer at the interface of adhesion layer and Semiconductor substrate.
6. the method for claim 5 comprises that ohmic contact layer forms the metal silicide layer that the silicon ion reaction of the metal ion of adhesion layer and Semiconductor substrate is formed by heat treatment process.
7. the method for claim 6, wherein metal silicide layer is a titanium silicide layer.
8. the method for claim 6 is included under 600 ℃ of-900 ℃ of temperature and implements heat treatment process.
9. the method for claim 6 comprises according to the rapid thermal treatment method and implements heat treatment process.
10. the method for claim 6 comprises and implemented heat treatment process 10 seconds-30 seconds.
11. the process of claim 1 wherein that the line conductive layer comprises tungsten layer.
12. the method for claim 1 comprises by generating the W nucleus and deposit W on amorphous TiSiN layer forming the line conductive layer.
13. the method for claim 12 comprises and uses H
2And WF
6Deposit W.
14. the method for claim 12 comprises by a kind of W of deposition in chemical vapour deposition technique and the physical vaporous deposition.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR20060048598 | 2006-05-30 | ||
| KR1020060048598 | 2006-05-30 | ||
| KR1020060095989 | 2006-09-29 |
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| Publication Number | Publication Date |
|---|---|
| CN101083224A CN101083224A (en) | 2007-12-05 |
| CN100559566C true CN100559566C (en) | 2009-11-11 |
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| CN (1) | CN100559566C (en) |
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|---|---|---|---|---|
| KR100946036B1 (en) * | 2008-04-03 | 2010-03-09 | 주식회사 하이닉스반도체 | Method of manufacturing a semiconductor device |
| CN105244265B (en) * | 2014-07-09 | 2018-07-20 | 中芯国际集成电路制造(上海)有限公司 | A kind of semiconductor devices and preparation method thereof and electronic device |
| KR102422421B1 (en) * | 2015-06-01 | 2022-07-20 | 삼성전자주식회사 | Wiring structure and electric device employing the same |
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|---|---|---|---|---|
| KR100212015B1 (en) | 1995-11-15 | 1999-08-02 | 김영환 | Forming method for gate electrode of semiconductor device |
| KR20000041397A (en) | 1998-12-22 | 2000-07-15 | 김영환 | Method of forming gate electrode of high integrated memory device |
| KR100408730B1 (en) | 1999-12-30 | 2003-12-11 | 주식회사 하이닉스반도체 | Semiconductor device and method for manufacturing the same |
| KR20030002035A (en) | 2001-06-30 | 2003-01-08 | 주식회사 하이닉스반도체 | Method for forming thin film by atomic layer deposition and fabricating method of capacitor using the thereof |
| KR100622639B1 (en) * | 2003-11-13 | 2006-09-18 | 매그나칩 반도체 유한회사 | Method of manufacturing a semiconductor device |
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2006
- 2006-09-29 KR KR1020060095989A patent/KR100784099B1/en not_active IP Right Cessation
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| CN101083224A (en) | 2007-12-05 |
| KR100784099B1 (en) | 2007-12-10 |
| KR20070115561A (en) | 2007-12-06 |
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