CN100542655C - In order to the cleaner composition of handling sour gas and the purification method of using it - Google Patents
In order to the cleaner composition of handling sour gas and the purification method of using it Download PDFInfo
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- CN100542655C CN100542655C CNB2005101055731A CN200510105573A CN100542655C CN 100542655 C CN100542655 C CN 100542655C CN B2005101055731 A CNB2005101055731 A CN B2005101055731A CN 200510105573 A CN200510105573 A CN 200510105573A CN 100542655 C CN100542655 C CN 100542655C
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Abstract
The invention provides a kind ofly in order to the cleaner composition of handling sour gas and the purification method of using it, wherein this cleaner composition comprises the oxide of one of containing in aluminium, silicon or the titanium at least of iron oxide and tool central hole structure; This purification method is for to contact pending sour gas to reduce this acidic gas concentration with this cleaner composition.The known purificant that the cleaner composition that the present invention makes more only contains iron oxide has higher adsorption capacity, uses this cleaner composition purified treatment sour gas to have advantages of good adsorption effect, characteristics that cost is low.
Description
Technical field
The present invention relates to a kind of cleaner composition and use its purification method, particularly a kind of in order to the cleaner composition of handling sour gas and the purification method of using it.
Background technology
The semiconductor manufacturing is a kind of industry of high-precisionization, environment that some are trickle or operation change all might influence the quality that it makes finished product, therefore the production equipment of semiconductor manufacturing and photoelectricity factory is all operated in the dust free room under strictness control, mainly contains oxidation furnace, diffusion furnace, rinse bath, developer, Ion Implantation Equipment and metal sputtering machine (CVD) etc.These production equipments all may produce pollutant when operation.Distinguish according to its handling properties, air pollutants can be divided into Acidity of Aikalinity gas, organic property gas and specific toxicity gas three classes, wherein can use a large amount of sour gas with the dry-etching processing procedure especially, these sour gas can't be utilized fully in processing procedure and become processing procedure tail gas and discharge, if can't dispose harmfulness processing procedure tail gas in the process work bench near-end, will increase rear end time airduct with the burden of air main to safe threatening in the factory.At present the method for handling these sour gas in the board near-end comprises wet washing and dry type absorption method, wherein, though wet washing is the method for present less expensive, but there is that defeated flowing line easily stops up or corrosion and breaking, pipeline switching place is because of corrosion or construction factor problem such as leak, in addition, and because of it is continuous operating type, when the processing procedure utilization rate is not high, the waste of water, electricity will be formed; And the dry type absorption method is the processing method of operation most convenient, its operation principles is by containing the absorption bucket of purificant with pending tail gas, the active group reaction on sour gas and purificant surface generates stable compound and is removed, only need in the operation when purificant is saturated, switch valve is changed the absorption bucket and is got final product.The facility of this method on using, also, therefore when the rate of capacity utilization is low, there is not the problem of operating cost waste because dry type absorption does not need the running of water and electricity.Based on above-mentioned advantage, use the manufacturer of dry type adsorption treatment harmful gases that the trend that increases is gradually arranged recently, just because of the sour gas use amount is big, need often to change adsorbent, so still exist the too high problem of running cost at present; And be adsorption material with lower-cost Immesion active carbon, except adsorption capacity is low, the worry that fire is arranged when reacting with high concentration fluorine composition, so be the serious problems that increase year by year in response to the sour gas discharge capacity at present, the development new adsorbent is instant problem.
For wet washing and the dry type absorption method of handling sour gas, the equipment vendors that have the country of semiconductor factory have developed for many years, and relevant patent as described later.Aspect damp process, JP-61-204022 and JP-62-125827 disclose a kind of alkaline aqueous solution such as NaOH that utilizes and contacts wet washing with absorption processing sour gas with gas, it has the low advantage of running cost, but easily break because of stopping up or corroding, also need periodic inspection, and as previously mentioned, it will form the waste of water with electricity when the processing procedure utilization rate is not high.Aspect dry type absorption, mainly be the various cleanser of development, its filling in the absorption bucket, is made the processing procedure tail gas stream cross again and absorbs sour gas; Related invention includes the active carbon that JP-60-68051 discloses a kind of impregnation zinc compound or alkali metal compound and handles sour gas, though this method is with low cost, adsorption capacity is low, and the worry of fire is arranged again; And the U.S.5094825 announcement is the cleanser processing ClF of main composition with di-iron trioxide
3, the product of the direct commodity in useization of this method make simply, but adsorption capacity is low excessively; It is that the cleanser of Main Ingredients and Appearance comes purification of acidic gas that U.S.5670445 (TW 265270) discloses with tri-iron tetroxide and strontium hydroxide, makes simply, but the strontium hydroxide cost is too high, and adsorption capacity still has the space of lifting; U.S.5756060 (TW 370470) then discloses with cupric oxide and manganese oxide to be the cleanser of main composition, in order to processing Halogen sour gas, but also to exist cost too high that adsorption capacity has the problem in the space of lifting again.
In view of the above, based on the demand in market, be badly in need of at present developing have the adsorption capacity height, the purificant of safe and low cost of manufacture to be to solve above-mentioned discussion problem.
Summary of the invention
A main purpose of the present invention provides a kind of in order to handle the cleaner composition of sour gas, comprising:
Active ingredient comprises iron oxide; And
The carrier composition is the oxide of one of containing in aluminium, silicon or the titanium at least of tool central hole structure,
This cleaner composition mixture that this active ingredient and this carrier composition are constituted of serving as reasons wherein, this iron oxide accounts for the percentage by weight of this cleaner composition 30% to 90%, (Brunner-Emmett-Teller, BET) specific area is 60m to Blang Nore-En Maite-Taylor that this iron oxide has
2More than/the g, the BET specific area that this cleaner composition has is 60m
2More than/the g.
The cleaner composition that the present invention is above-mentioned, wherein the BET specific area that has of this cleaner composition is 130m
2/ g to 190m
2/ g.
The cleaner composition that the present invention is above-mentioned, wherein the aluminum oxide of this tool central hole structure comprises γ-alundum (Al.
The cleaner composition that the present invention is above-mentioned, wherein the mixed proportion of the aluminum oxide of this iron oxide in this cleaner composition and this tool central hole structure is an iron: the atomic ratio of aluminium is from 1:1 to 2:1.
The cleaner composition that the present invention is above-mentioned, wherein this iron oxide is di-iron trioxide, iron hydroxide, ferrous oxide or tri-iron tetroxide.
The cleaner composition that the present invention is above-mentioned, wherein this sour gas comprises the gas of halide-containing.The gas of this halide-containing comprises hydrogen chloride, boron chloride, chlorine, hydrogen fluoride, boron trifluoride, hydrogen bromide or ocratation.
The cleaner composition that the present invention is above-mentioned, it also comprises a moulding-aid agent.
The cleaner composition that the present invention is above-mentioned, wherein this moulding-aid agent comprises and contains calcium oxide or magnesium-containing oxide.
The above-mentioned cleaner composition according to the present invention, wherein this moulding-aid agent comprises calcium oxide, magnesia, calcium hydroxide or magnesium hydroxide.
The cleaner composition that the present invention is above-mentioned, wherein this moulding-aid agent accounts for the percentage by weight of this cleaner composition 5% to 30%.
The cleaner composition that the present invention is above-mentioned, wherein this moulding-aid agent accounts for the percentage by weight between this cleaner composition 15% to 20%.
The cleaner composition that the present invention is above-mentioned, it also comprises a binder.
The cleaner composition that the present invention is above-mentioned, wherein this binder can comprise sodium metasilicate, sodium formate, methylcellulose or polyvinyl alcohol.
The cleaner composition that the present invention is above-mentioned, wherein this binder accounts for the percentage by weight of this cleaner composition 1% to 10%.
The cleaner composition that the present invention is above-mentioned, wherein this binder accounts for the percentage by weight between this cleaner composition 1% to 2%.
Another main purpose of the present invention provides a kind of purification method of handling sour gas, comprises pending sour gas is contacted with cleaner composition to reduce this acidic gas concentration; Wherein this cleaner composition comprises:
Active ingredient comprises iron oxide; And
The carrier composition is the oxide of one of containing in aluminium, silicon or the titanium at least of tool central hole structure,
This cleaner composition mixture that this active ingredient and this carrier composition are constituted of serving as reasons wherein, this iron oxide accounts for the percentage by weight of this cleaner composition 30% to 90%, and the BET specific area that this iron oxide has is 60m
2More than/the g, the BET specific area that this cleaner composition has is 60m
2More than/the g.
The purification method of the processing sour gas that the present invention is above-mentioned, wherein the BET specific area that has of this cleaner composition is 150m
2/ g to 190m
2/ g.
The purification method of the processing sour gas that the present invention is above-mentioned, wherein the aluminum oxide of this tool central hole structure comprises γ-alundum (Al.
The purification method of the processing sour gas that the present invention is above-mentioned, wherein the mixed proportion of the aluminum oxide of this iron oxide in this cleaner composition and this tool central hole structure is an iron: the atomic ratio of aluminium is from 1:1 to 2:1.
The purification method of the processing sour gas that the present invention is above-mentioned, wherein this iron oxide is di-iron trioxide, iron hydroxide, ferrous oxide or tri-iron tetroxide.
The purification method of the processing sour gas that the present invention is above-mentioned, wherein this sour gas comprises the gas of halide-containing.The gas of this halide-containing comprises hydrogen chloride, boron chloride, chlorine, hydrogen fluoride, boron trifluoride, hydrogen bromide or ocratation.
The purification method of the processing sour gas that the present invention is above-mentioned, it also comprises a moulding-aid agent.
The purification method of the processing sour gas that the present invention is above-mentioned, wherein this moulding-aid agent comprises and contains calcium oxide or magnesium-containing oxide.
The purification method of the processing sour gas that the present invention is above-mentioned, wherein this moulding-aid agent comprises calcium oxide, magnesia, calcium hydroxide thing or magnesium hydroxide.
The purification method of the processing sour gas that the present invention is above-mentioned, wherein this moulding-aid agent accounts for the percentage by weight of this cleaner composition 5% to 30%.
The purification method of the processing sour gas that the present invention is above-mentioned, wherein this moulding-aid agent accounts for the percentage by weight between this cleaner composition 15% to 20%.
The purification method of the processing sour gas that the present invention is above-mentioned, it also comprises a binder.
The purification method of the processing sour gas that the present invention is above-mentioned, wherein this binder can comprise sodium metasilicate, sodium formate, methylcellulose or polyvinyl alcohol.
The purification method of the processing sour gas that the present invention is above-mentioned, wherein this binder accounts for the percentage by weight of this cleaner composition 1% to 10%.
The purification method of the processing sour gas that the present invention is above-mentioned, wherein this binder accounts for the percentage by weight between this cleaner composition 1% to 2%.
The known purificant that the cleaner composition that the present invention makes more only contains iron oxide has higher adsorption capacity, uses this cleaner composition purified treatment sour gas to have advantages of good adsorption effect, characteristics that cost is low.
The specific embodiment
The present invention will further describe in detail by following preferred embodiment, but these specific embodiments only are to illustrate as an example, but not in order to limit scope of the present invention.
The invention provides a kind of in order to handle the cleaner composition of sour gas, this cleaner composition comprises at least one active ingredient and at least one structural promotor/carrier composition, wherein to account for the weight percent of cleaner composition be 30% to 90% to this active ingredient, and all the other are this carrier structure promoter/carrier composition.Generally speaking, the active ingredient of the optionally optional apparatus high-specific surface area of this active ingredient for example comprises the BET specific area and is at least 60m
2The iron oxide of/g, and this carrier composition comprises the oxide of one of containing in aluminium, silicon or the titanium at least of tool central hole structure.
Generally speaking, cleaner composition of the present invention has 60m
2The BET specific area that/g is above; Preferably, this cleaner composition can have scope for from 130m
2/ g to 190m
2The BET specific area of/g.
The ratio of the active ingredient of cleaner composition of the present invention and structural promotor/carrier composition needs within the specific limits, when active ingredient is too low, promptly can't reach competitive adsorption capacity; When the carrier composition was too low, ferriferous oxide will be gathered into larger particles, and the internal layer ferriferous oxide can't be utilized, and relatively also reduced its adsorption capacity.
In one embodiment of this invention, cleaner composition comprises the active ingredient of 30% to 90% percentage by weight and aluminium, silicon or the titanyl compound of a tool central hole structure.Preferably, the mixed proportion of active ingredient in this cleaner composition and aluminum oxide is an iron: the atomic ratio of aluminium is from 1:1 to 2:1.More preferably, the active ingredient of this cleaner composition comprises the iron oxide that contains di-iron trioxide, iron hydroxide, ferrous oxide or tri-iron tetroxide, and the aluminium of tool central hole structure, silicon or titanyl compound the best can comprise γ-alundum (Al.
In general, the present invention can comprise the gas of halide-containing in order to the sour gas of handling, preferably, the gas of this halide-containing can be hydrogen chloride, boron chloride, chlorine, hydrogen fluoride, boron trifluoride, hydrogen bromide or ocratation.
One method that is suitable for preparing cleaner composition of the present invention comprises the following step: an amount of iron content predecessor is dissolved in the proper amount of deionized water, iron is precipitated with the hydroxide state, behind super-dry and heating steps, certainly in this solution Separation of Solid and Liquid to make the BET specific area be 60m
2The cleaner composition that/g is above after adding moulding-aid agent/promoter thereafter and fully mixing, adds binder again with as final cleaner composition.
Cleaner composition of the present invention employed moulding-aid agent/promoter in above-mentioned steps comprises typically and contains calcium oxide or magnesium-containing oxide that preferably, this moulding-aid agent also can comprise calcium oxide, magnesia, calcium hydroxide or magnesium hydroxide.It should be noted that this moulding-aid agent generally accounts for the percentage by weight of this cleaner composition 5% to 30%, more preferably accounts for the percentage by weight between this cleaner composition 15% to 20%.
Cleaner composition of the present invention employed binder in above-mentioned steps usually comprises sodium metasilicate, sodium formate, methylcellulose or polyvinyl alcohol.It should be noted that this binder generally accounts for the percentage by weight of this cleaner composition 1% to 10%, more preferably this binder preferably accounts for the percentage by weight between this cleaner composition 1% to 2%.
Aluminium, silicon or the titanyl compound of central hole structure of the present invention (mesoporous) can use sol-gal process (sol-gel) preparation, or buys commercial product.
The present invention also discloses a kind of purification method of handling sour gas, comprise pending sour gas is contacted with cleaner composition to reduce this acidic gas concentration that wherein this cleaner composition is the oxide that comprises one of containing in aluminium, silicon or the titanium at least of iron oxide, tool central hole structure.Typically, this sour gas can comprise the gas of halide-containing, and preferably, the gas of this halide-containing can be hydrogen chloride, boron chloride, chlorine, hydrogen fluoride, boron trifluoride, hydrogen bromide or ocratation.
Following examples further specify the present invention, and the personnel that are familiar with this technology can clearlyer thus know enforcement of the present invention.But these embodiment should not be regarded as limitation of the scope of the invention.
Comparative example 1
With di-iron trioxide (Fe
2O
3) the powder extrusion forming is broken again, the particle of screening particle diameter 0.425～0.85mm is used purificant as test, and in addition, this type of iron oxide compound can be arbitrary shape or any form, need not be via any special purification process, promptly can be used for carrying out processing thereafter.
The test of purificant adsorption capacity
Comparative example of the present invention and embodiment all with hydrogen chloride (HCl) as test gas.
The purificant 30ml filling that will prepare during test is in the stainless steel test chamber of internal diameter 27mm, and filling length is equivalent to 52mm.Test chamber and system pipeline pass to nitrogen earlier after half an hour, flow feeding with linear speed 0.6cm/sec is the hydrogen chloride gas of 30000ppm with the nitrogen dilution again, surpass the threshold value of 300ppm until the hydrogen cloride concentration of the port of export of test chamber, the hydrogen chloride gas scale of construction that is fed is the purificant adsorption capacity.Gas flow is in mass flow control (Mass Flow Controller) control, the port of export gas concentration of test chamber is then carried out continuous monitoring with Fourier transformation infrared spectrometer (FTIR), be the time of breaking out to detect when chlorine hydride gas concentration reaches 300ppm, again it be converted into adsorption capacity.
Embodiment 1
Take by weighing an amount of ferric nitrate (Fe (NO
3)
39H
2O), be dissolved in the proper amount of deionized water, and be γ-alundum (Al (γ-Al of the ratio adding Merck ﹠ Co., Inc. production of 1:1 according to iron/aluminium
2O
3), adjust pH value of aqueous solution with NaOH again, make iron with hydroxide state precipitation, afterwards in air after super-dry, heating, making the BET surface area is 150m
2The cleaner composition of/g, add 5% magnesium oxide powder as moulding-aid agent/promoter, after fully mixing, add sodium metasilicate as binder, 120 ℃ of heating are 2 hours after the extrusion modling, and the in addition broken again and particle that screens particle diameter 0.425-0.85mm is as the test cleaner composition.It is 150m that prepared cleaner composition is analyzed specific area through the BET method
2/ g.Carry out the test of purificant adsorption capacity with the test condition identical with comparative example 1, test result is as shown in table 1.
Embodiment 2
The step that repeats embodiment 1 is with the preparation cleaner composition, but is that the ratio of 2:1 is with an amount of ferric nitrate and γ-alundum (Al (γ-Al with iron/aluminium
2O
3) mix.It is 188m that prepared cleaner composition is analyzed specific area through the BET method
2/ g.Carry out the test of purificant adsorption capacity with the test condition identical with comparative example 1, test result is as shown in table 1.
Table 1
| Experiment numbers | The main composition | BET (m 2/g) | Adsorption capacity (kg HCl/kg adsorbent) |
| Comparative example 1 | Fe 2O 3 | 3.4 | 0.005 |
| Embodiment 1 | Fe/Al＝1:1 | 150 | 0.46 |
| Embodiment 2 | Fe/Al＝2:1 | 188 | 0.66 |
Show that by last table 1 result the known purificant that is more only contained iron oxide by the cleaner composition of the obtained embodiment of the invention 1 of active ingredient of the iron oxide that adds γ-alundum (Al and embodiment 2 has higher adsorption capacity.Wherein, because of containing higher Fe/Al ratio, so its absorption content more is better than the cleaner composition of the embodiment of the invention 1 in the cleaner composition of the embodiment of the invention 2.
Among the above embodiment only with the oxide of aluminium as structural promotor/carrier composition, replace the oxide of aluminium also can obtain identical effect with silicon or titanyl compound.
Though the present invention discloses as above with preferred embodiment; right its is not in order to limit the present invention; any personnel that are familiar with this technology; without departing from the spirit and scope of the present invention; can do further improvement and variation on this basis, so the scope that claims were defined that protection scope of the present invention is worked as with the application is as the criterion.
Claims (36)
1. one kind in order to handle the cleaner composition of sour gas, comprising:
Active ingredient comprises iron oxide; And
The carrier composition is the oxide of one of containing in aluminium, silicon or the titanium at least of tool central hole structure,
This cleaner composition mixture that this active ingredient and this carrier composition are constituted of serving as reasons wherein, this iron oxide accounts for the percentage by weight of this cleaner composition 30% to 90%, and the BET specific area that this iron oxide has is 60m
2More than/the g, the BET specific area that this cleaner composition has is 60m
2More than/the g.
2. according to claim 1 in order to handle the cleaner composition of sour gas, wherein the BET specific area that has of this cleaner composition is 130m
2/ g to 190m
2/ g.
3. according to claim 1 in order to handle the cleaner composition of sour gas, wherein the aluminum oxide of this tool central hole structure comprises γ-alundum (Al.
4. according to claim 1 in order to handle the cleaner composition of sour gas, wherein the mixed proportion of the aluminum oxide of this iron oxide in this cleaner composition and this tool central hole structure is an iron: the atomic ratio of aluminium is from 1:1 to 2:1.
5. according to claim 1 in order to handle the cleaner composition of sour gas, wherein this iron oxide is di-iron trioxide, iron hydroxide, ferrous oxide or tri-iron tetroxide.
6. according to claim 1 in order to handle the cleaner composition of sour gas, wherein this sour gas comprises the gas of halide-containing.
7. according to claim 6 in order to handle the cleaner composition of sour gas, wherein the gas of this halide-containing comprises hydrogen chloride, boron chloride, chlorine, hydrogen fluoride, boron trifluoride, hydrogen bromide or ocratation.
8. according to claim 1 in order to handle the cleaner composition of sour gas, it also comprises a moulding-aid agent.
9. according to claim 8 in order to handle the cleaner composition of sour gas, wherein this moulding-aid agent comprises and contains calcium oxide or magnesium-containing oxide.
10. according to Claim 8 or 9 described in order to handle the cleaner compositions of sour gas, wherein this moulding-aid agent comprises calcium oxide, magnesia, calcium hydroxide or magnesium hydroxide.
11. according to Claim 8 or 9 described in order to handle the cleaner compositions of sour gas, wherein this moulding-aid agent accounts for the percentage by weight of this cleaner composition 5% to 30%.
12. according to claim 10 in order to handle the cleaner composition of sour gas, wherein this moulding-aid agent accounts for the percentage by weight of this cleaner composition 5% to 30%.
13. according to claim 11 in order to handle the cleaner composition of sour gas, wherein this moulding-aid agent accounts for the percentage by weight between this cleaner composition 15% to 20%.
14. according to claim 12 in order to handle the cleaner composition of sour gas, wherein this moulding-aid agent accounts for the percentage by weight between this cleaner composition 15% to 20%.
15. according to claim 1 in order to handle the cleaner composition of sour gas, it also comprises a binder.
16. according to claim 15 in order to handle the cleaner composition of sour gas, wherein this binder comprises sodium metasilicate, sodium formate, methylcellulose or polyvinyl alcohol.
17. according to claim 15 or 16 described cleaner compositions in order to the processing sour gas, wherein this binder accounts for the percentage by weight of this cleaner composition 1% to 10%.
18. according to claim 17 in order to handle the cleaner composition of sour gas, wherein this binder accounts for the percentage by weight between this cleaner composition 1% to 2%.
19. a purification method of handling sour gas comprises:
Pending sour gas is contacted with cleaner composition;
Wherein this cleaner composition comprises:
Active ingredient comprises iron oxide; And
The carrier composition is the oxide of one of containing in aluminium, silicon or the titanium at least of tool central hole structure,
This cleaner composition mixture that this active ingredient and this carrier composition are constituted of serving as reasons wherein, this iron oxide accounts for the percentage by weight of this cleaner composition 30% to 90%, and the BET specific area that this iron oxide has is 60m
2More than/the g, the BET specific area that this cleaner composition has is 60m
2More than/the g.
20. the purification method of processing sour gas according to claim 19, wherein the BET specific area that has of this cleaner composition is 150m
2/ g to 190m
2/ g.
21. the purification method of processing sour gas according to claim 19, wherein the aluminum oxide of this tool central hole structure comprises γ-alundum (Al.
22. the purification method of processing sour gas according to claim 19, wherein the mixed proportion of the aluminum oxide of this iron oxide in this cleaner composition and this tool central hole structure is an iron: the atomic ratio of aluminium is from 1:1 to 2:1.
23. the purification method of processing sour gas according to claim 19, wherein this iron oxide is di-iron trioxide, iron hydroxide, ferrous oxide or tri-iron tetroxide.
24. the purification method of processing sour gas according to claim 19, wherein this sour gas comprises the gas of halide-containing.
25. the purification method of processing sour gas according to claim 24, wherein the gas of this halide-containing comprises hydrogen chloride, boron chloride, chlorine, hydrogen fluoride, boron trifluoride, hydrogen bromide or ocratation.
26. the purification method of processing sour gas according to claim 19, it also comprises a moulding-aid agent.
27. the purification method of processing sour gas according to claim 26, wherein this moulding-aid agent comprises and contains calcium oxide or magnesium-containing oxide.
28. according to the purification method of claim 26 or 27 described processing sour gas, wherein this moulding-aid agent comprises calcium oxide, magnesia, calcium hydroxide thing or magnesium hydroxide.
29. according to the purification method of claim 26 or 27 described processing sour gas, wherein this moulding-aid agent accounts for the percentage by weight of this cleaner composition 5% to 30%.
30. the purification method of processing sour gas according to claim 28, wherein this moulding-aid agent accounts for the percentage by weight of this cleaner composition 5% to 30%.
31. the purification method of processing sour gas according to claim 29, wherein this moulding-aid agent accounts for the percentage by weight between this cleaner composition 15% to 20%.
32. the purification method of processing sour gas according to claim 30, wherein this moulding-aid agent accounts for the percentage by weight between this cleaner composition 15% to 20%.
33. the purification method of processing sour gas according to claim 19, it also comprises a binder.
34. the purification method of processing sour gas according to claim 33, wherein this binder comprises sodium metasilicate, sodium formate, methylcellulose or polyvinyl alcohol.
35. according to the purification method of claim 33 or 34 described processing sour gas, wherein this binder accounts for the percentage by weight of this cleaner composition 1% to 10%.
36. the purification method of processing sour gas according to claim 35, wherein this binder accounts for the percentage by weight between this cleaner composition 1% to 2%.
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