CN100527337C - Flat display of cross point cathode emission structure and manufacturing technology thereof - Google Patents
Flat display of cross point cathode emission structure and manufacturing technology thereof Download PDFInfo
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- CN100527337C CN100527337C CNB2007100545874A CN200710054587A CN100527337C CN 100527337 C CN100527337 C CN 100527337C CN B2007100545874 A CNB2007100545874 A CN B2007100545874A CN 200710054587 A CN200710054587 A CN 200710054587A CN 100527337 C CN100527337 C CN 100527337C
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Abstract
This invention relates to a flat display of a cross cathode emission structure and its process method including a sealing vacuum cavity composed of an anode glass panel, a cathode panel and a surrounding glass frame, in which, an anode conduction layer is set on the anode glass panel and a fluorescent powder layer is set on the anode conduction layer, a grid lead layer, carbon nm tube and a cross needle cathode emission structure are set on he cathode glass panel, a supporting wall structure and a getter are set between the anode glass panel and the cathode glass panel to strengthen the control function of the grid structure and increase electronic emission efficiency of carbon nm tube cathode.
Description
Technical field
The invention belongs to the mutual crossing domain in technical field of flat panel display, microelectronics science and technology field, vacuum science and technical field and nanometer science and technology field, relate to the element manufacturing of panel field emission display, be specifically related to the content of element manufacturing aspect of the panel field emission display of carbon nanotube cathod, particularly a kind of flat-panel monitor of cross point cathode emission structure and manufacture craft thereof.
Background technology
Carbon nano-tube has little tip curvature radius, and high aspect rate can be launched a large amount of electronics under the effect of extra electric field intensity, is a kind of quite outstanding cold-cathode material.Utilize carbon nano-tube as Field Emission Cathode Materials, can make field-emission plane display become thinner, brighter, more clear.The field-emitter display of carbon nanotube cathod is a kind of novel flat panel display equipment, can obtain at aspects such as portable computer, wall-hanging color television set, advanced digital tester, military helmet system, artillery systems widely applying.This display has high definition, high brightness, high-resolution and characteristics such as low in energy consumption, has become the developing direction of flat panel display equipment of future generation already.
At present, all taked grid structure to be positioned at the control model of carbon nanotube cathod superstructure in the middle of the most display device, the manufacture craft of this structure is simple, the control action of grid is more remarkable, but formed grid current is bigger than normal, grid voltage is high, and this is its disadvantage.Want to reduce operating voltage of grid structure, just need re-construct in all its bearings, take various measures to improve.Can reduce the distance between grid structure and the carbon nanotube cathod structure as much as possible, thereby reduce the grid operating voltage, this is the most direct method, also will be subjected to the restriction of the aspects such as the class of insulation of insulating material certainly.Also can be improved on the other hand, make carbon nanotube cathod under lower operating voltage, just can launch a large amount of electronics the shape of carbon nanotube cathod, thus indirect reduction operating voltage of grid structure.In addition, can also change the version of grid and control model etc.Reducing operating voltage of grid structure is that the quality system that meets the low pressure flat device requires, and also is researcher's striving direction.In the manufacturing process of practical devices, how to reach above-mentioned target so, this is the problem that ponder deeply.
In addition, in the middle of the panel field emission display spare of three-stage structure, guaranteeing that grid structure has carbon nanotube cathod under the prerequisite of good control action, also need to reduce as much as possible the total device cost, carry out reliable and stable, with low cost, function admirable, high quality devices is made.
Summary of the invention
The objective of the invention is to overcome the shortcoming and defect that exists in the above-mentioned flat-panel display device and provide a kind of with low cost, manufacturing process is reliable and stable, be made into the power height, the flat-panel monitor and the manufacture craft thereof of cross point cathode emission structure simple in structure.
The object of the present invention is achieved like this, comprise by anode glass panel, cathode glass faceplate and all around glass enclose the sealed vacuum chamber that frame constitutes; Anode conductive layer and the phosphor powder layer of preparation on anode conductive layer are arranged on the anode glass panel; Grid lead layer, carbon nano-tube and cross point cathode emission structure are arranged on cathode glass faceplate; Supporting wall structure between anode glass panel and cathode glass faceplate and getter subsidiary component.
The backing material of described cross point cathode emission structure is a glass, as soda-lime glass, Pyrex, just cathode glass faceplate; The insulation paste layer that prints on the cathode glass faceplate forms insulating barrier; Metal level after the etching above the insulating barrier forms the cathode leg layer; Metal level after the etching above the cathode leg layer forms the negative electrode transition zone; The negative electrode transition zone presents round shape, and its lower surface closely contacts with the cathode leg layer; Metal level after the etching above the negative electrode transition zone forms cathode conductive layer; Cathode conductive layer presents cross point type shape, be that centre bit is equipped with a square, the center of the center of square and negative electrode transition zone coincides, and extends outward a hollow arrow respectively in the middle of the four edges of square, forms a cross shape that hollow arrow is outside; The insulation paste layer of the printing above the insulating barrier forms wall; The lower surface of wall is the plane, cover cathode leg layer and vacant insulating barrier part; There is circular apertures in the wall, exposes the negative electrode transition zone and the cathode conductive layer of bottom; The madial wall of circular apertures is perpendicular to the barrel surface of cathode glass faceplate in the wall; The upper surface major part of wall is the plane, but is an inclined plane near near circular apertures, promptly begin from the upper surface of wall downward-sloping gradually, till the interior sidewall surface position that arrives circular apertures; Metal level after the etching on the wall top incline forms the regulation and control grid layer; The regulation and control grid layer is covered with wall integral inclination face upper surface, and its fore-end will extend in parallel to the circular apertures inboard, presents vacant state; The insulation paste layer of the printing above the regulation and control grid layer forms the additional spacer layer; The additional spacer layer only covers the upper surface of regulation and control grid layer, and does not comprise front end overhanging portion regulation and control grid layer; The upper surface of additional spacer layer and the upper surface of wall are positioned on the same height; The side of additional spacer layer forms the barrel surface perpendicular to cathode glass faceplate, and its diameter is identical with the diameter of wall circular apertures, and be positioned at the wall circular apertures directly over; Metal level after the etching on the side of additional spacer layer forms two layers of regulation and control grids; Two layers of side that is positioned at the additional spacer layer of regulation and control grid form an anchor ring, are looped around the top of circular apertures; Two layers of grids of regulation and control with regulate and control grid layer and be interconnected; Metal level after the etching above the wall forms the grid lead layer; Grid lead layer and regulation and control grid layer are interconnected; The insulation paste layer of the printing above the grid lead layer forms the grid cover layer; Made of carbon nanotubes is on cathode conductive layer.
The fixed position of described cross point cathode emission structure is for being fixed on the cathode glass faceplate; The cathode leg layer can be metallic gold, silver, copper, aluminium, molybdenum, chromium, tin; The negative electrode transition zone can be metallic gold, silver, copper, aluminium, molybdenum, chromium, tin; Cathode conductive layer can be metallic iron, cobalt, nickel; The regulation and control grid layer can be metallic gold, silver, aluminium, molybdenum, chromium; The regulation and control grid can be metallic gold, silver, molybdenum, chromium, aluminium for two layers; The trend of the trend of grid lead layer and cathode leg layer is orthogonal; The grid lead layer can be metallic gold, silver, aluminium, molybdenum, chromium.
A kind of manufacture craft of flat-panel monitor of cross point cathode emission structure, its manufacture craft is as follows:
1) making of cathode glass faceplate: whole plate glass is carried out scribing, produce cathode glass faceplate;
2) making of insulating barrier: on cathode glass faceplate, print insulation paste, behind baking, sintering process, form insulating barrier;
3) making of cathode leg layer: on insulating barrier, prepare a metal level, form the cathode leg layer after the etching;
4) making of negative electrode transition zone: on the cathode leg layer, prepare a metal level, form the negative electrode transition zone after the etching;
5) making of cathode conductive layer: on the negative electrode transition zone, prepare a metal level, form cathode conductive layer after the etching;
6) making of wall: printing insulation paste on insulating barrier forms wall behind baking, sintering process;
7) making of regulation and control grid layer: on the wall inclined plane, prepare a metal level, form the regulation and control grid layer after the etching;
8) making of additional spacer layer: printing insulation paste on the regulation and control grid layer forms the additional spacer layer behind baking, sintering process;
9) making of two layers of grids of regulation and control: on the side of additional spacer layer, prepare a metal level, form two layers of regulation and control grids after the etching;
10) making of grid lead layer: on the upper surface of wall, prepare a metal level, form the grid lead layer after the etching;
11) the tectal making of grid: printing insulation paste on the grid lead layer forms the grid cover layer behind baking, sintering process;
12) cleaning surfaces of cross point cathode emission structure is handled: clean is carried out on the surface to cross point cathode emission structure, removes impurity and dust;
13) preparation of carbon nano-tube: with made of carbon nanotubes on cathode conductive layer;
14) making of anode glass panel: whole plate glass is carried out scribing, produce the anode glass panel;
15) making of anode conductive layer: evaporation one deck tin indium oxide rete on the anode glass panel; Form anode conductive layer after the etching;
16) making of insulation paste layer: at the non-display area printing insulation paste layer of anode conductive layer;
17) making of phosphor powder layer: the viewing area printing phosphor powder layer on anode conductive layer;
18) device assembling: with cathode glass faceplate, anode glass panel, supporting wall structure and all around glass enclose frame and be assembled together, and getter is put in the middle of the cavity, fix with glass powder with low melting point.Around face glass, smeared glass powder with low melting point, fixed with clip.
19) finished product is made: the device that has assembled is carried out packaging technology form finished parts.
Described step 16 is specially the non-display area printing insulation paste layer at anode conductive layer, is used to prevent the parasitic electrons emission; Through overbaking (baking temperature: 150 ℃, retention time: 5 minutes) afterwards, be placed on and carry out high temperature sintering (sintering temperature: 580 ℃, retention time: 10 minutes) in the sintering furnace.
Described step 17 is specially the viewing area printing phosphor powder layer on anode conductive layer; In the middle of baking oven, toast (baking temperature: 120 ℃, the retention time: 10 minutes).
The device that described step 19 is specially having assembled carries out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.
The present invention has following good effect:
At first, in described cross point cathode emission structure, on cathode conductive layer, cathode conductive layer then is the cross shape that presents the hollow arrow shape with made of carbon nanotubes.Like this, can greatly increase the electron emission area of carbon nanotube cathod, make more carbon nanotube cathod all participate in the electronics emission, help to improve the display brightness of device.Make full use of the endemism that the marginal position of carbon nanotube cathod can be launched a large amount of electronics, helped further improving the electronic transmitting efficiency of carbon nanotube cathod.
Secondly, in described cross point cathode emission structure, grid structure is improved.The grid lead layer is used for external voltage is delivered to device inside, also plays the function of picture element matrix addressing simultaneously; The regulation and control grid layer then can convert external voltage to the strong electric field intensity on top, carbon nanotube cathod surface, forces carbon nano-tube to launch a large amount of electronics; Two layers of grids of regulation and control play auxiliary also have when forcing carbon nanotube cathod emitting electrons function to the function that focuses on of the electron beam of process.Grid structure and cathode construction height are integrated together, help lend some impetus to the Highgrade integration development of integral device;
In addition, in described cross point cathode emission structure, do not adopt special structure fabrication material, do not adopt special device making technics yet, this has just further reduced the cost of manufacture of whole flat-panel display device to a great extent, simplify the manufacturing process of device, can carry out large-area element manufacturing, helped carrying out business-like large-scale production.
Description of drawings
Fig. 1 has provided the vertical structure schematic diagram of cross point cathode emission structure;
Fig. 2 has provided the transversary schematic diagram of cross point cathode emission structure;
Fig. 3 has provided the schematic top plan view of negative electrode in the cross point cathode emission structure;
Fig. 4 has provided and has had the structural representation cross point cathode emission structure emitting structural, the carbon nanotube field emission flat-panel screens.
Embodiment
Below in conjunction with drawings and Examples the present invention is further specified, but the present invention is not limited to these embodiment.
Described a kind of flat-panel monitor that has cross point cathode emission structure, comprise by anode glass panel [13], cathode glass faceplate [1] and all around glass enclose the sealed vacuum chamber that frame [18] is constituted; Anode conductive layer [14] and the phosphor powder layer [16] of preparation on anode conductive layer are arranged on the anode glass panel; Grid lead layer [10], carbon nano-tube [12] and cross point cathode emission structure are arranged on cathode glass faceplate; Supporting wall structure between anode glass panel and cathode glass faceplate [17] and getter [19] subsidiary component.
Described cross point cathode emission structure comprises cathode glass faceplate [1], insulating barrier [2], cathode leg layer [3], negative electrode transition zone [4], cathode conductive layer [5], wall [6], regulation and control grid layer [7], additional spacer layer [8], regulation and control grid two layers of [9], grid lead layer [10], grid cover layer [11] and carbon nano-tube [12] part.
The backing material of described cross point cathode emission structure is a glass, as soda-lime glass, Pyrex, just cathode glass faceplate; The insulation paste layer that prints on the cathode glass faceplate forms insulating barrier; Metal level after the etching above the insulating barrier forms the cathode leg layer; Metal level after the etching above the cathode leg layer forms the negative electrode transition zone; The negative electrode transition zone presents round shape, and its lower surface closely contacts with the cathode leg layer; Metal level after the etching above the negative electrode transition zone forms cathode conductive layer; Cathode conductive layer presents cross point type shape, be that centre bit is equipped with a square, the center of the center of square and negative electrode transition zone coincides, and extends outward a hollow arrow respectively in the middle of the four edges of square, forms a cross shape that hollow arrow is outside; The insulation paste layer of the printing above the insulating barrier forms wall; The lower surface of wall is the plane, cover cathode leg layer and vacant insulating barrier part; There is circular apertures in the wall, exposes the negative electrode transition zone and the cathode conductive layer of bottom; The madial wall of circular apertures is perpendicular to the barrel surface of cathode glass faceplate in the wall; The upper surface major part of wall is the plane, but is an inclined plane near near circular apertures, promptly begin from the upper surface of wall downward-sloping gradually, till the interior sidewall surface position that arrives circular apertures; Metal level after the etching on the wall top incline forms the regulation and control grid layer; The regulation and control grid layer is covered with wall integral inclination face upper surface, and its fore-end will extend in parallel to the circular apertures inboard, presents vacant state; The insulation paste layer of the printing above the regulation and control grid layer forms the additional spacer layer; The additional spacer layer only covers the upper surface of regulation and control grid layer, and does not comprise front end overhanging portion regulation and control grid layer; The upper surface of additional spacer layer and the upper surface of wall are positioned on the same height; The side of additional spacer layer forms the barrel surface perpendicular to cathode glass faceplate, and its diameter is identical with the diameter of wall circular apertures, and be positioned at the wall circular apertures directly over; Metal level after the etching on the side of additional spacer layer forms two layers of regulation and control grids; Two layers of side that is positioned at the additional spacer layer of regulation and control grid form an anchor ring, are looped around the top of circular apertures; Two layers of grids of regulation and control with regulate and control grid layer and be interconnected; Metal level after the etching above the wall forms the grid lead layer; Grid lead layer and regulation and control grid layer are interconnected; The insulation paste layer of the printing above the grid lead layer forms the grid cover layer; Made of carbon nanotubes is on cathode conductive layer.
The fixed position of described cross point cathode emission structure is for being fixed on the cathode glass faceplate; The cathode leg layer can be metallic gold, silver, copper, aluminium, molybdenum, chromium, tin; The negative electrode transition zone can be metallic gold, silver, copper, aluminium, molybdenum, chromium, tin; Cathode conductive layer can be metallic iron, cobalt, nickel; The regulation and control grid layer can be metallic gold, silver, aluminium, molybdenum, chromium; The regulation and control grid can be metallic gold, silver, molybdenum, chromium, aluminium for two layers; The trend of the trend of grid lead layer and cathode leg layer is orthogonal; The grid lead layer can be metallic gold, silver, aluminium, molybdenum, chromium.
A kind of manufacture craft of flat-panel monitor of cross point cathode emission structure, its manufacture craft is as follows:
1) making of cathode glass faceplate [1]: the dull and stereotyped soda-lime glass of integral body is carried out scribing, produce cathode glass faceplate;
2) making of insulating barrier [2]: on cathode glass faceplate, print insulation paste, behind baking, sintering process, form insulating barrier;
3) making of cathode leg layer [3]: on insulating barrier, prepare a metal molybdenum layer, form the cathode leg layer after the etching;
4) making of negative electrode transition zone [4]: on the cathode leg layer, prepare a metal molybdenum layer, form the negative electrode transition zone after the etching;
5) making of cathode conductive layer [5]: on the negative electrode transition zone, prepare a metal nickel dam, form cathode conductive layer after the etching;
6) making of wall [6]: printing insulation paste on insulating barrier forms wall behind baking, sintering process;
7) making of regulation and control grid layers [7]: on the wall inclined plane, prepare a metallic chromium layer, form the regulation and control grid layer after the etching;
8) making of additional spacer layer [8]: printing insulation paste on the regulation and control grid layer forms the additional spacer layer behind baking, sintering process;
9) making of regulation and control grid two layers [9]: on the side of additional spacer layer, prepare a metallic chromium layer, form two layers of regulation and control grids after the etching;
10) making of grid lead layer [10]: on the upper surface of wall, prepare a metallic chromium layer, form the grid lead layer after the etching;
11) making of grid cover layer [11]: printing insulation paste on the grid lead layer forms the grid cover layer behind baking, sintering process;
12) cleaning surfaces of cross point cathode emission structure is handled: clean is carried out on the surface to cross point cathode emission structure, removes impurity and dust;
13) preparation of carbon nano-tube [12]: with made of carbon nanotubes on cathode conductive layer;
14) reprocessing of carbon nano-tube: carbon nano-tube is carried out reprocessing, improve field emission characteristics;
15) making of anode glass panel [13]: the dull and stereotyped soda-lime glass of integral body is carried out scribing, produce the anode glass panel;
16) making of anode conductive layer [14]: evaporation one deck tin indium oxide rete on the anode glass panel; Form anode conductive layer after the etching;
17) making of insulation paste layer [15]: at the non-display area printing insulation paste layer of anode conductive layer;
18) making of phosphor powder layer [16]: the viewing area printing phosphor powder layer on anode conductive layer;
19) device assembling: with cathode glass faceplate, anode glass panel, supporting wall structure [17] and all around glass enclose frame [18] and be assembled together, and getter [19] is put in the middle of the cavity, fix with glass powder with low melting point.Around face glass, smeared glass powder with low melting point, fixed with clip;
20) finished product is made: the device that has assembled is carried out packaging technology form finished parts.
Described step 17 is specially the non-display area printing insulation paste layer at anode conductive layer, is used to prevent the parasitic electrons emission; Through overbaking (baking temperature: 150 ℃, retention time: 5 minutes) afterwards, be placed on and carry out high temperature sintering (sintering temperature: 580 ℃, retention time: 10 minutes) in the sintering furnace.
Described step 18 is specially the viewing area printing phosphor powder layer on anode conductive layer; In the middle of baking oven, toast (baking temperature: 120 ℃, the retention time: 10 minutes).
The device that described step 20 is specially having assembled carries out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.
Claims (6)
1, a kind of flat-panel monitor of cross point cathode emission structure, comprise by anode glass panel (13), cathode glass faceplate (1) and all around glass enclose the sealed vacuum chamber that frame (18) is constituted; Be arranged on anode conductive layer (14) and the phosphor powder layer (16) of preparation on anode conductive layer on the anode glass panel; Supporting wall structure between anode glass panel and cathode glass faceplate (17) and getter subsidiary component (19) is characterized in that:
Cathode glass faceplate is provided with grid lead layer (10), carbon nano-tube (12) and cross point cathode emission structure;
The backing material of described cross point cathode emission structure is soda-lime glass or Pyrex, i.e. cathode glass faceplate; The insulation paste layer that prints on the cathode glass faceplate forms insulating barrier; Metal level after the etching above the insulating barrier forms the cathode leg layer; Metal level after the etching above the cathode leg layer forms the negative electrode transition zone; The negative electrode transition zone presents round shape, and its lower surface closely contacts with the cathode leg layer; Metal level after the etching above the negative electrode transition zone forms cathode conductive layer; Cathode conductive layer presents cross point type shape, be that centre bit is equipped with a square, the center of the center of square and negative electrode transition zone coincides, and extends outward a hollow arrow respectively in the middle of the four edges of square, forms a cross shape that hollow arrow is outside; The insulation paste layer of the printing above the insulating barrier forms wall; The lower surface of wall is the plane, covers cathode leg layer and vacant insulating barrier part; There is circular apertures in the wall, exposes the negative electrode transition zone and the cathode conductive layer of bottom; The madial wall of circular apertures is perpendicular to the barrel surface of cathode glass faceplate in the wall; The upper surface major part of wall is the plane, but is an inclined plane near near circular apertures, promptly begin from the upper surface of wall downward-sloping gradually, till the interior sidewall surface position that arrives circular apertures; Metal level after the etching on the wall top incline forms the regulation and control grid layer; The regulation and control grid layer is covered with wall integral inclination face upper surface, and its fore-end will extend in parallel to the circular apertures inboard, presents vacant state; The insulation paste layer of the printing above the regulation and control grid layer forms the additional spacer layer; The additional spacer layer only covers the upper surface of regulation and control grid layer, and does not comprise front end overhanging portion regulation and control grid layer; The upper surface of additional spacer layer and the upper surface of wall are positioned on the same height; The side of additional spacer layer forms the barrel surface perpendicular to cathode glass faceplate, and its diameter is identical with the diameter of wall circular apertures, and be positioned at the wall circular apertures directly over; Metal level after the etching on the side of additional spacer layer forms two layers of regulation and control grids; Two layers of side that is positioned at the additional spacer layer of regulation and control grid form an anchor ring, are looped around the top of circular apertures; Two layers of grids of regulation and control with regulate and control grid layer and be interconnected; Metal level after the etching above the wall forms the grid lead layer; Grid lead layer and regulation and control grid layer are interconnected; The insulation paste layer of the printing above the grid lead layer forms the grid cover layer; Made of carbon nanotubes is on cathode conductive layer.
2, the flat-panel monitor of cross point cathode emission structure according to claim 1 is characterized in that: the fixed position of described cross point cathode emission structure is for being fixed on the cathode glass faceplate; The cathode leg layer is one of metal gold, silver, copper, aluminium, molybdenum, chromium, tin; The negative electrode transition zone is one of metal gold, silver, copper, aluminium, molybdenum, chromium, tin; Cathode conductive layer is one of metallic iron, cobalt, nickel; The regulation and control grid layer is one of metal gold, silver, aluminium, molybdenum, chromium; The regulation and control grid is one of metal gold, silver, molybdenum, chromium, aluminium for two layers; The trend of the trend of grid lead layer and cathode leg layer is orthogonal; The grid lead layer is one of metal gold, silver, aluminium, molybdenum, chromium.
3, a kind of manufacture craft of flat-panel monitor of cross point cathode emission structure as claimed in claim 1 is characterized in that, its manufacture craft is as follows:
1) making of cathode glass faceplate (1): whole plate glass is carried out scribing, produce cathode glass faceplate;
2) making of insulating barrier (2): on cathode glass faceplate, print insulation paste, behind baking, sintering process, form insulating barrier;
3) making of cathode leg layer (3): on insulating barrier, prepare a metal level, form the cathode leg layer after the etching;
4) making of negative electrode transition zone (4): on the cathode leg layer, prepare a metal level, form the negative electrode transition zone after the etching;
5) making of cathode conductive layer (5): on the negative electrode transition zone, prepare a metal level, form cathode conductive layer after the etching;
6) making of wall (6): printing insulation paste on insulating barrier forms wall behind baking, sintering process;
7) making of regulation and control grid layers (7): on the wall inclined plane, prepare a metal level, form the regulation and control grid layer after the etching;
8) making of additional spacer layer (8): printing insulation paste on the regulation and control grid layer forms the additional spacer layer behind baking, sintering process;
9) making of regulation and control grid two layers (9): on the side of additional spacer layer, prepare a metal level, form two layers of regulation and control grids after the etching;
10) making of grid lead layer (10): on the upper surface of wall, prepare a metal level, form the grid lead layer after the etching;
11) making of grid cover layer (11): printing insulation paste on the grid lead layer forms the grid cover layer behind baking, sintering process;
12) cleaning surfaces of cross point cathode emission structure is handled: clean is carried out on the surface to cross point cathode emission structure, removes impurity and dust;
13) preparation of carbon nano-tube (12): with made of carbon nanotubes on cathode conductive layer;
14) making of anode glass panel (13): plate glass is carried out scribing, make the anode glass panel;
15) making of anode conductive layer (14): evaporation one deck tin indium oxide rete on the anode glass panel; Form anode conductive layer after the etching;
16) making of insulation paste layer (15): at anode conductive layer non-display area printing insulation paste layer;
17) making of phosphor powder layer (16): the viewing area printing phosphor powder layer on anode conductive layer;
18) device assembling: with cathode glass faceplate, anode glass panel, supporting wall structure (17) and all around glass enclose frame (18) and be assembled together, and getter (19) is put in the middle of the cavity, fix with glass powder with low melting point;
19) finished product is made: the device that has assembled is carried out packaging technology form finished parts.
4, the manufacture craft of the flat-panel monitor of cross point cathode emission structure according to claim 3 is characterized in that: described step 16 is specially the non-display area printing insulation paste layer at anode conductive layer, is used to prevent the parasitic electrons emission; Through overbaking, baking temperature: 150 ℃, the retention time: 5 minutes, afterwards, be placed on and carry out high temperature sintering in the sintering furnace, sintering temperature: 580 ℃, the retention time: 10 minutes.
5, the manufacture craft of the flat-panel monitor of cross point cathode emission structure according to claim 3 is characterized in that: described step 17 is specially the viewing area printing phosphor powder layer on anode conductive layer; In the middle of baking oven, toast baking temperature: 120 ℃, the retention time: 10 minutes.
6, the manufacture craft of the flat-panel monitor of cross point cathode emission structure according to claim 3 is characterized in that: the device that described step 19 is specially having assembled carries out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100545874A CN100527337C (en) | 2007-06-19 | 2007-06-19 | Flat display of cross point cathode emission structure and manufacturing technology thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100545874A CN100527337C (en) | 2007-06-19 | 2007-06-19 | Flat display of cross point cathode emission structure and manufacturing technology thereof |
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| Publication Number | Publication Date |
|---|---|
| CN101090058A CN101090058A (en) | 2007-12-19 |
| CN100527337C true CN100527337C (en) | 2009-08-12 |
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| CNB2007100545874A Expired - Fee Related CN100527337C (en) | 2007-06-19 | 2007-06-19 | Flat display of cross point cathode emission structure and manufacturing technology thereof |
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