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CN100484879C - Manufacturing method of perovskite barium titanate powder - Google Patents

Manufacturing method of perovskite barium titanate powder Download PDF

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CN100484879C
CN100484879C CNB03127269XA CN03127269A CN100484879C CN 100484879 C CN100484879 C CN 100484879C CN B03127269X A CNB03127269X A CN B03127269XA CN 03127269 A CN03127269 A CN 03127269A CN 100484879 C CN100484879 C CN 100484879C
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barium
titanyl oxalate
barium titanate
particle diameter
barium titanyl
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CN1496961A (en
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落合一男
田边信司
菊地敦
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Nippon Chemical Industrial Co Ltd
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Abstract

Provided is a method for manufacturing perovskite-type barium titanate powder having a small mean particle diameter of <=1 [mu]m, little dispersion in particle diameter, a Ba to Ti molar ratio of about 1 with little dispersion in the ratio, high purity and excellent crystallinity. The method for manufacturing perovskite-type barium titanate powder includes: a first step of washing barium titanyl oxalate having a mean particle diameter of 50 to 300 [mu]m with water; a second step of obtaining barium titanyl oxalate having a mean particle diameter of 0.05 to 1 [mu]m by slurrying and wet-grinding the washed barium titanyl oxalate; and a third step of calcining the obtained barium titanyl oxalate having a mean particle diameter of 0.05 to 1 [mu]m at 700 to 1,200[deg.]C.

Description

钙钛矿型钛酸钡粉末的制造方法 Manufacturing method of perovskite type barium titanate powder

技术领域 technical field

本发明是关于钙钛矿型钛酸钡粉末的制造方法,特别是关于作为压电体、光电材料、电介体、半导体、传感元件等功能性陶瓷的原料有用的钙钛矿型钛酸钡粉末的制造方法。The present invention relates to a method for producing perovskite-type barium titanate powder, in particular perovskite-type titanate useful as a raw material for functional ceramics such as piezoelectrics, photoelectric materials, dielectrics, semiconductors, and sensor elements Manufacturing method of barium powder.

背景技术 Background technique

钙钛矿型钛酸钡粉末,目前作为压电体、层压陶瓷电容器等功能性陶瓷的原料使用。可是,近年来,层压陶瓷电容器,为了高容量化,而要求增加层压数或高电容率化,为此,对于作为原料的钙钛矿型钛酸钡粉末来说,要求1μm以下的微细、粒径的波动小,Ba对Ti的摩尔比(以下也称做“Ba/Ti摩尔比”)大约为1、而且其波动小,高纯度,结晶性优良。Perovskite-type barium titanate powder is currently used as a raw material for functional ceramics such as piezoelectric bodies and laminated ceramic capacitors. However, in recent years, laminated ceramic capacitors have been required to increase the number of laminations or to increase the permittivity in order to increase the capacity. For this reason, the perovskite-type barium titanate powder used as a raw material is required to be finer than 1 μm. , The fluctuation of particle size is small, the molar ratio of Ba to Ti (hereinafter also referred to as "Ba/Ti molar ratio") is about 1, and its fluctuation is small, high purity, and excellent crystallinity.

作为钙钛矿型钛酸钡粉末的制造方法来说,例如在特开昭61-146710号公报中提出,同时混合水溶性钡盐和水溶性钛盐及草酸的水溶液,通过将得到的凝胶在短时间进行强力搅拌破碎而得到的微细草酸氧钛钡(BaTiO(C2O4)·4H2O)的结晶在700~900℃进行煅烧的方法。另外,Clabaugh,W.S.等人提出,在约80℃的H2C2O4水溶液中一边激烈搅拌一边滴下TiCl4和BaCl2的水溶液,得到草酸氧钛钡,将该草酸氧钛钡进行煅烧,来制造一次颗粒的粒径分布是0.3~1.5μm、Ba/Ti摩尔比是0.987~1.003的BaTiO3的方法。As a method for producing perovskite-type barium titanate powder, for example, it is proposed in JP-A-61-146710 that a water-soluble barium salt, a water-soluble titanium salt, and an aqueous solution of oxalic acid are mixed at the same time, and the obtained gel A method in which fine barium titanyl oxalate (BaTiO(C 2 O 4 )·4H 2 O) crystals obtained by crushing with strong stirring for a short period of time are calcined at 700-900°C. In addition, Clabaugh, WS et al. proposed that an aqueous solution of TiCl 4 and BaCl 2 was dropped in an aqueous solution of H 2 C 2 O 4 at about 80°C while vigorously stirring to obtain barium titanyl oxalate, which was then calcined, A method for producing BaTiO 3 with a primary particle size distribution of 0.3 to 1.5 μm and a Ba/Ti molar ratio of 0.987 to 1.003.

【专利文献1】【Patent Document 1】

特开昭61-146710号公报(第1页)JP-A-61-146710 Bulletin (Page 1)

【非专利文献1】【Non-Patent Document 1】

Clabaugh,W.S.,et al.著“转换为高纯度钛酸钡用的草酸氧钛钡四水合物的沉淀(Precipitation of Barium Titanyl Oxalate Tetrahydrate forConversion to Barium Titanate of High Purity)”(Journal of Research of theNational Bureau of Standards),(美国),1956年,第56卷(Vol56),第5号(No.5),p.289-291。Clabaugh, W.S., et al. "Precipitation of Barium Titanyl Oxalate Tetrahydrate for Conversion to Barium Titanate of High Purity" (Journal of Research of the National Bureau of Standards), (USA), 1956, Volume 56 (Vol56), Number 5 (No.5), p.289-291.

但是,使用特开昭61-146710号公报记载的方法得到的钙钛矿型钛酸钡粉末,在其制造过程中,在晶体中进入相当量的氯,因此即使进行洗净,也难以使氯含量充分减低至数百ppm以下,而存在纯度不够,由于洗净,组成的波动也容易变大这样的问题。另外,在Clabaugh,W.S.等人提出的方法中,存在得不到平均粒径是1μm以下的微细、粒径的波动小,Ba/Ti摩尔比是大约1、而且其波动小,结晶性优良的钙钛矿型钛酸钡粉末这样的问题。However, using the perovskite-type barium titanate powder obtained by the method described in JP-A-61-146710, a considerable amount of chlorine enters the crystal during the production process, so even if it is washed, it is difficult to remove the chlorine. The content is sufficiently reduced to several hundreds of ppm or less, but there is a problem that the purity is insufficient, and the fluctuation of the composition tends to increase due to washing. In addition, in the method proposed by Clabaugh, W.S. et al., there are fine particles with an average particle size of 1 μm or less, small fluctuations in particle size, a Ba/Ti molar ratio of about 1, small fluctuations, and excellent crystallinity. The problem of perovskite barium titanate powder.

发明内容 Contents of the invention

因此,本发明的目的在于提供一种,平均粒径是1μm以下的微细、粒径的波动小,Ba/Ti摩尔比是大约1、而且其波动小,高纯度,结晶性优良的钙钛矿型钛酸钡粉末的制造方法。Therefore, an object of the present invention is to provide a perovskite whose average particle size is 1 μm or less, fine, has small particle size fluctuations, and has a Ba/Ti molar ratio of about 1, and has small fluctuations, high purity, and excellent crystallinity. The manufacture method of type barium titanate powder.

本发明人,在这样的实际情况下,反复进行深入研究的结果发现,如果将具有特定粒度特性的草酸氧钛钡进行洗净处理,就能够容易去除氯等杂质,如果再将该洗净处理后的草酸氧钛钡进行湿式粉碎处理至特定的粒径,进行煅烧,就能够得到平均粒径是1μm以下的微细、粒径的波动小,Ba/Ti摩尔比是大约1、而且其波动小,高纯度,结晶性优良的钙钛矿型钛酸钡粉末,从而完成本发明。The inventors of the present invention have found, as a result of repeated in-depth research under such actual conditions, that if the barium titanyl oxalate having a specific particle size characteristic is cleaned, impurities such as chlorine can be easily removed. The final barium titanyl oxalate is wet pulverized to a specific particle size, and then calcined to obtain fine particles with an average particle size of 1 μm or less, with small fluctuations in particle size, and a Ba/Ti molar ratio of about 1, with small fluctuations. , high purity, excellent crystallinity perovskite barium titanate powder, thus completing the present invention.

即,本发明提供一种钙钛矿型钛酸钡粉末的制造方法,其特征在于,具有:用水洗净平均粒径50~300μm的草酸氧钛钡的第一工序;将洗净后的草酸氧钛钡制成浆后,进行湿式粉碎处理,得到平均粒径0.05~1μm的草酸氧钛钡的第二工序;和,在700~1200℃温度下煅烧该平均粒径0.05~1μm的草酸氧钛钡的第三工序。That is, the present invention provides a method for producing perovskite-type barium titanate powder, which is characterized by comprising: a first step of washing barium titanyl oxalate with an average particle diameter of 50 to 300 μm with water; washing the washed oxalic acid After the barium titanyl oxalate is made into a slurry, wet pulverization is carried out to obtain the second process of barium titanyl oxalate with an average particle size of 0.05-1 μm; and, calcining the oxalic acid oxide with an average particle size of 0.05-1 μm The third process of titanium barium.

另外,上述湿式粉碎处理优选在有机溶剂中进行,该有机溶剂更优选是乙醇。In addition, the aforementioned wet pulverization treatment is preferably performed in an organic solvent, and the organic solvent is more preferably ethanol.

附图说明 Description of drawings

图1是说明在数学式1中使用的a和b的X射线衍射曲线的示意图。FIG. 1 is a schematic diagram illustrating X-ray diffraction curves of a and b used in Mathematical Formula 1. FIG.

图2是在实施例1中得到的钛酸钡的2θ=44~46°附近的X射线衍射图。FIG. 2 is an X-ray diffraction diagram around 2θ=44° to 46° of barium titanate obtained in Example 1. FIG.

图3是在比较例1中得到的钛酸钡的2θ=44~46°附近的X射线衍射图。3 is an X-ray diffraction diagram around 2θ=44 to 46° of barium titanate obtained in Comparative Example 1. FIG.

具体实施方式 Detailed ways

[钙钛矿型钛酸钡粉末的制造方法][Manufacturing method of perovskite type barium titanate powder]

(第一工序)(first process)

本发明的钙钛矿型钛酸钡粉末的制造方法的第一工序是用水洗净特定粒径的草酸氧钛钡(BaTiO(C2O4)·4H2O),去除进入该草酸氧钛钡颗粒中的氯等杂质的工序。在本发明中使用的草酸氧钛钡,平均粒径通常是50~300μm,优选是100~200μm。如果平均粒径在该范围内,则晶粒大,因而在用水洗净时,Ba和Ti的洗脱就少,而且能够有效地去除氯等杂质,因此是最佳的。再者,草酸氧钛钡颗粒是金米糖状颗粒,但在本发明中,所谓草酸氧钛钡的平均粒径,表示以用扫描电子显微镜(SEM)观察到的、至金米糖状颗粒的突起尖端部包括的最大直径作为一个金米糖状颗粒的粒径、对于多个金米糖状颗粒的该粒径的相加平均值。The first step of the production method of the perovskite type barium titanate powder of the present invention is to wash the barium titanyl oxalate (BaTiO(C 2 O 4 )·4H 2 O) with a specific particle size with water to remove the Process for impurities such as chlorine in barium particles. The barium titanyl oxalate used in the present invention has an average particle diameter of usually 50 to 300 μm, preferably 100 to 200 μm. If the average particle size is within this range, the crystal grains are large, so Ba and Ti are less eluted when washed with water, and impurities such as chlorine can be effectively removed, so it is optimal. Furthermore, the barium titanyl oxalate particles are golden rice sugar-like particles, but in the present invention, the average particle diameter of the so-called barium titanyl oxalate means the tip of the protrusions to the golden rice sugar-like particles observed with a scanning electron microscope (SEM). The largest diameter is included as the particle diameter of one golden rice candy-shaped particle, the summed average of the particle diameters for a plurality of golden rice candy-shaped particles.

如果草酸氧钛钡的平均粒径在上述范围内,如果用水洗净,就容易使进入草酸氧钛钡颗粒中的氯等杂质的含量减低至数百ppm水平,并且所得到的钙钛矿型钛酸钡粉末在洗净时,Ba和Ti的洗脱少,Ba/Ti摩尔比容易成为0.998~1.002范围内的大约是1,因此是优选的。If the average particle diameter of barium titanyl oxalate is within the above range, if it is washed with water, it is easy to reduce the content of impurities such as chlorine entering the barium titanyl oxalate particles to hundreds of ppm levels, and the obtained perovskite type When washing the barium titanate powder, the elution of Ba and Ti is small, and the Ba/Ti molar ratio tends to be about 1 in the range of 0.998 to 1.002, so it is preferable.

另一方面,如果草酸氧钛钡的平均粒径不到50μm,即使用水洗净,也难以使进入颗粒中的氯等杂质减低至数百ppm水平,并且由于Ba和Ti的洗脱,所以得到的钙钛矿型钛酸钡的Ba/Ti摩尔比难以成为0.998~1.002的范围内,因此是不可取的。另外,如果平均粒径超过300μm,粉碎效率降低,在后述的第二工序中,湿式粉碎后的粒径的波动容易变大,因此是不可取的。On the other hand, if the average particle size of barium titanyl oxalate is less than 50 μm, even if it is washed with water, it is difficult to reduce impurities such as chlorine entering the particles to hundreds of ppm levels, and due to the elution of Ba and Ti, it is obtained The Ba/Ti molar ratio of the perovskite-type barium titanate is difficult to fall within the range of 0.998 to 1.002, which is not preferable. In addition, when the average particle diameter exceeds 300 μm, the crushing efficiency is lowered, and the fluctuation of the particle diameter after wet crushing tends to increase in the second step described later, which is not preferable.

另外,在第一工序中使用的草酸氧钛钡,Ba/Ti摩尔比通常是0.998~1.002。如果草酸氧钛钡的Ba/Ti摩尔比在该范围内,就获得所得到的钙钛矿型钛酸钡的Ba/Ti摩尔比是0.998~1.002大约为1的钙钛矿型钛酸钡,因此是优选的。In addition, the barium titanyl oxalate used in the first step usually has a Ba/Ti molar ratio of 0.998 to 1.002. If the Ba/Ti molar ratio of barium titanyl oxalate is within this range, the Ba/Ti molar ratio of the obtained perovskite-type barium titanate is 0.998~1.002 which is about 1 perovskite-type barium titanate, Therefore it is preferable.

洗净中所使用的水,以离子等不污染草酸氧钛钡为准,因此优选是离子交换水、纯水、超纯水等。再有,为了提高洗净效果,在开始用工业用水等洗净后,可以再用离子交换水等进行洗净The water used for cleaning is determined not to contaminate the barium titanyl oxalate with ions and the like, so ion-exchanged water, pure water, ultrapure water, and the like are preferable. In addition, in order to improve the cleaning effect, after the initial cleaning with industrial water, etc., it can be washed with ion-exchanged water, etc.

作为第一工序中的洗净方法来说,没有特别的限制,但如果使用再浆化等进行洗净,洗净效果良好,因此是优选的。所谓再浆化是舍弃上清液后、加入纯水再进行洗净的方法。另外,洗净如果是该草酸氧钛钡中含有的氯浓度充分洗净至500ppm以下、优选是200ppm以下,就容易得到高纯度的钙钛矿型钛酸钡粉末,因此是优选的。The cleaning method in the first step is not particularly limited, but it is preferable to perform cleaning using repulp or the like because the cleaning effect is good. The so-called repulping is a method of discarding the supernatant, adding pure water, and then washing. In addition, if the concentration of chlorine contained in the barium titanyl oxalate is sufficiently washed to be 500 ppm or less, preferably 200 ppm or less, high-purity perovskite-type barium titanate powder can be easily obtained, which is preferable.

洗净处理后,根据要求进行干燥,得到洗净后的草酸氧钛钡。在本发明中,洗净后的草酸氧钛钡的物性,平均粒径通常是50~300μm,优选是100~200μm。另外,Ba/Ti摩尔比通常是0.998~1.002。而且洗净后的草酸氧钛钡,氯含量通常是500ppm以下,优选是200pm以下。再者,洗净次数不限于一次,为了洗净后的草酸氧钛钡的氯含量成为上述范围内,也可以反复进行多次。After cleaning, drying is carried out as required to obtain washed barium titanyl oxalate. In the present invention, the physical properties of the barium titanyl oxalate after washing are usually 50 to 300 μm, preferably 100 to 200 μm in average particle size. In addition, the Ba/Ti molar ratio is usually 0.998 to 1.002. In addition, the washed barium titanyl oxalate has a chlorine content of usually 500 ppm or less, preferably 200 ppm or less. In addition, the number of times of washing is not limited to one, and may be repeated several times so that the chlorine content of the barium titanyl oxalate after washing falls within the above-mentioned range.

(第二工序)(second process)

第二工序是将在第一工序中洗净后的草酸氧钛钡制成浆后,进行湿式粉碎处理,得到平均粒径是特定范围内的草酸氧钛钡的工序。The second step is a step of slurrying the barium titanyl oxalate washed in the first step, and then performing a wet pulverization treatment to obtain barium titanyl oxalate having an average particle diameter within a specific range.

作为在上述浆的调制中使用的溶剂来说,使用对草酸氧钛钡是惰性的溶剂,例如可举出水、甲醇、乙醇、丙醇、丁醇、甲苯、二甲苯、丙酮、二氯甲烷、乙酸乙酯、二甲基甲酰胺和二乙基醚等。其中,如果使用甲醇、乙醇、丙醇、丁醇、甲苯、二甲苯、丙酮、二氯甲烷、乙酸乙酯、二甲基甲酰胺和二乙基醚等有机溶剂且Ba和Ti的洗脱少的溶剂,就能够得到结晶性高的钙钛矿型钛酸钡粉末,因此是优选的。尤其,如果使用乙醇,就能够在800~950℃左右的低温区廉价地制造结晶性优良的钙钛矿型钛酸钡粉末,因此是特别优选的。上述溶剂可以使用一种、或二种以上组合使用。As the solvent used in the preparation of the above slurry, a solvent inert to barium titanyl oxalate is used, for example, water, methanol, ethanol, propanol, butanol, toluene, xylene, acetone, methylene chloride , ethyl acetate, dimethylformamide and diethyl ether, etc. Among them, if organic solvents such as methanol, ethanol, propanol, butanol, toluene, xylene, acetone, dichloromethane, ethyl acetate, dimethylformamide and diethyl ether are used and the elution of Ba and Ti is less If the solvent is used, the perovskite-type barium titanate powder with high crystallinity can be obtained, so it is preferable. In particular, the use of ethanol is particularly preferable because perovskite-type barium titanate powder excellent in crystallinity can be produced inexpensively at a low temperature range of about 800 to 950°C. The above solvents may be used alone or in combination of two or more.

在第二工序中,首先调制浆。通过在上述溶剂中混合洗净后的草酸氧钛钡,进行均匀的分散,而得到浆。浆的浓度,只要是能够湿式粉碎处理的程度就行,没有特别的限制,但通常是10~70重量%,优选是30~50重量%,如果是该浓度,粉碎效率就高。In the second step, pulp is prepared first. The washed barium titanyl oxalate was mixed and uniformly dispersed in the above-mentioned solvent to obtain a slurry. The concentration of the slurry is not particularly limited as long as it can be wet pulverized, but it is usually 10 to 70% by weight, preferably 30 to 50% by weight, and the pulverization efficiency is high at this concentration.

接着,使用该浆进行湿式粉碎处理。作为湿式粉碎处理的方法来说,例如可举出在湿式粉碎装置中装入该浆、进行粉碎处理的方法。作为湿式粉碎装置来说,例如可举出球磨机、珠粒磨机等。Next, a wet pulverization process is performed using this slurry. As a method of wet pulverization treatment, for example, a method of putting the slurry in a wet pulverization apparatus and performing pulverization treatment is mentioned. As a wet pulverization apparatus, a ball mill, a bead mill, etc. are mentioned, for example.

湿式粉碎处理进行至从扫描电子显微镜(SEM)求出的草酸氧钛钡的平均粒径通常成为0.05~1μm,优选成为0.05~0.8μm。如果平均粒径不到0.05μm,粉碎在技术上是困难的,并且操作变得困难,因此是不可取的。另外,如果平均粒径超过1μm,所得到的钙钛矿型钛酸钡的粒径波动容易变大,因而是不可取的。The wet pulverization treatment is performed until the average particle diameter of the barium titanyl oxalate obtained from a scanning electron microscope (SEM) is usually 0.05 to 1 μm, preferably 0.05 to 0.8 μm. If the average particle size is less than 0.05 μm, pulverization is technically difficult and handling becomes difficult, so it is not preferable. In addition, when the average particle diameter exceeds 1 μm, the fluctuation of the particle diameter of the obtained perovskite-type barium titanate tends to be large, which is not preferable.

作为在粉碎处理时装入湿式粉碎装置中的珠粒的材质来说,例如可举出氧化锆、氧化铝、二氧化硅、沸石、碳化硅、氮化硅等。其中,因为在湿式粉碎时杂质的混入少,所以以氧化锆为最佳。Examples of the material of the beads loaded into the wet pulverization apparatus during the pulverization process include zirconia, alumina, silica, zeolite, silicon carbide, silicon nitride and the like. Among them, zirconia is most preferable because there is little contamination of impurities during wet pulverization.

上述珠粒的直径通常是0.3~5mm,优选是0.3~2mm。如果直径是该范围内,则粉碎效率良好,因此是优选的。The above-mentioned beads have a diameter of usually 0.3 to 5 mm, preferably 0.3 to 2 mm. If the diameter is within this range, the grinding efficiency is good, which is preferable.

湿式粉碎处理结束后,原封不动地干燥所得到的微细的草酸氧钛钡粉末或浆。干燥方法如果是能够回收溶剂的方法,就能够降低制造成本,因此是优选的,另外,如果使用能够全量干燥湿式粉碎处理后的浆的喷雾干燥机等进行,就能够使洗脱成分再包含在草酸氧钛钡粉末中,因此是最优选的。After the wet pulverization treatment, the obtained fine barium titanyl oxalate powder or slurry is dried as it is. If the drying method is a method that can recover the solvent, it can reduce the production cost, so it is preferable. In addition, if it is carried out using a spray dryer or the like that can completely dry the slurry after the wet pulverization treatment, the eluted components can be included again in the Barium titanyl oxalate powder is therefore most preferred.

再者,在第二工序中的湿式粉碎处理前的浆或湿式粉碎处理后的浆中,根据需要也可以添加混合含副成分元素化合物。像这样如果添加混合含有副成分元素的化合物,就得到以副成分元素大致均匀地分散在颗粒表面的状态固溶的钙钛矿型钛酸钡粉末,例如能够调整使钙钛矿型钛酸钡粉末陶瓷化后的该陶瓷的介电常数等,因此是可取的。In addition, in the slurry before the wet pulverization treatment or the slurry after the wet pulverization treatment in the second step, a subsidiary component element-containing compound may be added and mixed as necessary. By adding and mixing a compound containing subcomponent elements in this way, a solid-solution perovskite-type barium titanate powder can be obtained in a state where the subcomponent elements are dispersed approximately uniformly on the particle surface. For example, the perovskite-type barium titanate can be adjusted to The dielectric constant of the ceramic after powder ceramization, etc., is therefore desirable.

作为含副成分元素化合物来说,例如可举出选自Sc、Y、La、Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、Yb、Lu稀土元素、Ba、Li、Bi、Zn、Mn、A1、Si、Ca、Sr、Co、Ni、Cr、Fe、Mg、Ti、V、Nb、Mo、W和Sn中的至少一种元素的化合物。Examples of compounds containing subcomponent elements include rare earth elements selected from the group consisting of Sc, Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, and Lu. , Ba, Li, Bi, Zn, Mn, Al, Si, Ca, Sr, Co, Ni, Cr, Fe, Mg, Ti, V, Nb, Mo, W and Sn at least one element compound.

含副成分元素化合物可以是无机物或有机物的任一种,例如可举出含有上述元素的氧化物、氢氧化物、氯化物、硝酸盐、草酸盐、羧酸盐和醇盐等。再者,在含副成分元素化合物是含有Si元素的化合物的情况下,除上述氧化物外,也可以使用硅溶胶或硅酸钠等。再有,在含副成分元素化合物的元素是金属元素的情况下,作为含副成分元素化合物,如果使用醇盐,就能够得到副成分元素特别均匀地分散在颗粒表面的钙钛矿型钛酸钡粉末,因此是优选的。上述含副成分元素化合物可以使用一种、或二种以上组合使用。The subcomponent element-containing compound may be either inorganic or organic, and examples include oxides, hydroxides, chlorides, nitrates, oxalates, carboxylates, and alkoxides containing the above-mentioned elements. In addition, when the subcomponent element-containing compound is a compound containing Si element, in addition to the above-mentioned oxides, silica sol, sodium silicate, or the like may be used. Furthermore, when the element of the compound containing the subsidiary element element is a metal element, if an alkoxide is used as the compound containing the subsidiary element element, the perovskite-type titanic acid in which the subsidiary element element is particularly uniformly dispersed on the particle surface can be obtained. Barium powder is therefore preferred. The aforementioned subcomponent element-containing compounds may be used singly or in combination of two or more kinds.

作为在湿式粉碎处理前的浆中添加混合含副成分元素化合物的方法来说,例如可举出:预先调制使含副成分元素化合物溶解在上述溶剂中的溶液或使含副成分元素化合物分散在上述溶剂中的浆,将该溶液或浆与湿式粉碎处理前的草酸氧钛钡的浆混合的方法;在湿式粉碎处理前的草酸氧钛钡的浆中直接添加混合含副成分元素化合物的方法;同时混合在第一工序得到的洗净后的草酸氧钛钡、含副成分元素化合物和上述溶剂、而调制浆的方法等。另外,作为在湿式粉碎处理后的草酸氧钛钡的浆中添加混合含副成分元素化合物的方法来说,例如可举出:预先调制在上述溶剂中溶解含副成分元素化合物的溶液,将该溶液与湿式粉碎处理后的草酸氧钛钡的浆混合的方法;在湿式粉碎处理后的草酸氧钛钡的浆中直接添加混合含副成分元素化合物的方法。其中,前者的方法,分散变得容易,因此是优选的。As a method of adding and mixing the subcomponent element-containing compound to the slurry before the wet pulverization treatment, for example, preparing a solution in which the subcomponent element-containing compound is dissolved in the above-mentioned solvent or dispersing the subcomponent element-containing compound in A slurry in the above solvent, a method of mixing the solution or slurry with a slurry of barium titanyl oxalate before wet pulverization treatment; a method of directly adding and mixing a compound containing an auxiliary component element to the slurry of barium titanyl oxalate before wet pulverization treatment ; A method of preparing a slurry by simultaneously mixing the washed barium titanyl oxalate obtained in the first step, the compound containing an accessory element element, and the above-mentioned solvent, and the like. In addition, as a method of adding and mixing an accessory element-containing compound to the barium titanyl oxalate slurry after the wet pulverization treatment, for example, a solution in which the accessory element-containing compound is prepared in advance in the above-mentioned solvent, and the A method of mixing the solution with a wet pulverized barium titanyl oxalate slurry; a method of directly adding and mixing a compound containing an auxiliary component element to the wet pulverized barium titanyl oxalate slurry. Among them, the former method is preferable since dispersion becomes easy.

含副成分元素化合物的添加量,配合作为目的的介电特性,可以任意地设定,但在含副成分元素化合物中的元素的累计量,相对于100重量份的草酸氧钛钡,例如通常是0.01~10重量份。The amount of the compound containing the subcomponent element can be arbitrarily set in accordance with the desired dielectric properties, but the cumulative amount of elements in the compound containing the subcomponent element is, for example, generally It is 0.01 to 10 parts by weight.

(第三工序)(third process)

第三工序是在规定温度下煅烧在上述第二工序中得到的平均粒径0.05~1μm的草酸氧钛钡粉末的工序,经过本工序,得到钙钛矿型钛酸钡粉末。The third step is a step of calcining the barium titanyl oxalate powder having an average particle size of 0.05 to 1 μm obtained in the above second step at a predetermined temperature. Through this step, a perovskite type barium titanate powder is obtained.

煅烧条件,煅烧温度是700~1200℃,优选是800~1100℃。将煅烧温度规定为上述范围内的理由是因为,如果不到700℃,就难以得到单相的钙钛矿型钛酸钡粉末,因此是不可取的,另一方面,如果超过1200℃,粒径的波动容易变大,因此是不可取的。另外,在本发明中,根据需要,煅烧处理可以进行几次。Calcination conditions, the calcination temperature is 700-1200°C, preferably 800-1100°C. The reason why the calcination temperature is set within the above range is that if it is less than 700°C, it is difficult to obtain a single-phase perovskite-type barium titanate powder, so it is not advisable. On the other hand, if it exceeds 1200°C, the particle The fluctuation of the diameter is easy to become large, so it is not advisable. In addition, in the present invention, the calcination treatment may be performed several times as needed.

煅烧后,进行适当地冷却,根据需要进行粉碎,就得到钙钛矿型钛酸钡粉末。再者,根据需要进行的粉碎,适合在煅烧得到的钙钛矿型钛酸钡粉末是脆弱结合的块状时等进行,但钙钛矿型钛酸钡粉末的颗粒本身是具有下述特定的平均粒径、BET比表面积的颗粒。After calcination, it is appropriately cooled and pulverized as needed to obtain perovskite-type barium titanate powder. Furthermore, pulverization according to need is suitable when the perovskite-type barium titanate powder obtained by calcination is in the form of a weakly bonded block, but the particles of the perovskite-type barium titanate powder themselves have the following specific characteristics: Particles with average particle size and BET specific surface area.

即,在第三工序结束后得到的钙钛矿型钛酸钡粉末,是从扫描电子显微镜(SEM)求出的平均粒径通常为0.05~1μm、优选为0.05~0.8μm,BET比表面积为1m2/g以上、优选为2~15m2/g,粒径的波动少的粉末。而且,除上述物性外,是氯含量通常为500ppm以下、优选为200ppm以下,并且Ba和Ti的摩尔比为0.998~1.002大约为1的结晶性优良的粉末。That is, the perovskite-type barium titanate powder obtained after the completion of the third step has an average particle diameter of usually 0.05 to 1 μm, preferably 0.05 to 0.8 μm, as measured by a scanning electron microscope (SEM), and a BET specific surface area of 1 m 2 /g or more, preferably 2 to 15 m 2 /g, and a powder with little variation in particle size. In addition to the above physical properties, it is a powder with excellent crystallinity having a chlorine content of usually 500 ppm or less, preferably 200 ppm or less, and a molar ratio of Ba to Ti of 0.998 to 1.002 or approximately 1.

这样得到的钙钛矿型钛酸钡粉末,如上所述,平均粒径微细至0.05~1μm,氯化物离子等杂质的含量少的高纯度的粉末,是粒径的波动小、结晶性优良的粉末。The perovskite-type barium titanate powder obtained in this way has an average particle diameter as fine as 0.05 to 1 μm as described above, and is a high-purity powder with low content of impurities such as chloride ions. It has small fluctuations in particle diameter and excellent crystallinity. powder.

本发明的钙钛矿型钛酸钡粉末,例如对于制造层压陶瓷电容器来说,与目前公知的添加剂、有机系粘结剂、增塑剂、分散剂等配合剂一起混合分散在合适的溶剂中,而形成浆,通过进行薄片成形,就能够得到在层压陶瓷电容器的制造中使用的陶瓷薄片。The perovskite-type barium titanate powder of the present invention, for example, for the manufacture of laminated ceramic capacitors, is mixed and dispersed in a suitable solvent together with currently known additives, organic binders, plasticizers, dispersants, etc. In this process, the slurry is formed, and by performing sheet forming, ceramic sheets used in the manufacture of laminated ceramic capacitors can be obtained.

对于从该陶瓷薄片制造层压陶瓷电容器来说,首先在该陶瓷薄片的一面印刷内部电极形成用导电糊,干燥后,层压多片上述陶瓷薄片,通过在厚度方向压接,形成层压体。接着,加热处理该层压体,进行:脱粘结剂处理,然后进行烧成,得到烧成体。再在该烧结体上涂布Ni糊、Ag糊、镍合金糊、铜糊、铜合金糊等,如果进行烘烤,就可以得到层压电容器。To manufacture a laminated ceramic capacitor from this ceramic sheet, first, a conductive paste for forming internal electrodes is printed on one surface of the ceramic sheet, and after drying, a plurality of the above-mentioned ceramic sheets are laminated and pressed together in the thickness direction to form a laminate. . Next, the laminate was heat-treated, subjected to a binder removal treatment, and then fired to obtain a fired body. Then, Ni paste, Ag paste, nickel alloy paste, copper paste, copper alloy paste, etc. are coated on the sintered body, and if baked, a laminated capacitor can be obtained.

另外,例如在环氧树脂、聚酯树脂、聚酰亚胺树脂等树脂中配合本发明的钙钛矿型钛酸钡粉末,如果形成树脂薄片、树脂薄膜、粘结剂等,就能够作为印刷配线板或多层印刷配线板等的材料、用于抑制内部电极和电介体层的收缩差的相同材料、电极陶瓷电路基板、玻璃陶瓷电路基板和电路周围材料使用。In addition, for example, if the perovskite-type barium titanate powder of the present invention is mixed with resins such as epoxy resin, polyester resin, and polyimide resin, if it is formed into a resin sheet, a resin film, an adhesive, etc., it can be used as a printed material. Materials such as wiring boards or multilayer printed wiring boards, the same materials used to suppress the shrinkage difference between internal electrodes and dielectric layers, electrode ceramic circuit boards, glass ceramic circuit boards, and circuit surrounding materials are used.

另外,本发明所得到的钙钛矿型钛酸钡粉末,能够适合作为排气去除、化学合成等反应时所使用的催化剂、或赋予防带静电、清理效果的印刷色料的表面改性材料使用。In addition, the perovskite-type barium titanate powder obtained in the present invention can be suitably used as a catalyst used in reactions such as degassing and chemical synthesis, or as a surface modification material for printing colorants that impart antistatic and cleaning effects use.

再者,在本发明的钙钛矿型钛酸钡粉末制造方法的第一工序中使用的草酸氧钛钡,例如可使用以下的草酸氧钛钡的制造方法来制造。In addition, barium titanyl oxalate used in the first step of the method for producing perovskite-type barium titanate powder of the present invention can be produced, for example, using the following method for producing barium titanyl oxalate.

[草酸氧钛钡的制造方法][Manufacturing method of barium titanyl oxalate]

在特定温度下使在水中溶解四氯化钛和氯化钡而形成的A液和在水中溶解草酸而形成的B液接触,进行熟化后,通过固液分离,就能够制造在第一工序中使用的特定粒度的草酸氧钛钡。At a specific temperature, liquid A formed by dissolving titanium tetrachloride and barium chloride in water is contacted with liquid B formed by dissolving oxalic acid in water, and after aging, it can be produced by solid-liquid separation. In the first process The specific particle size of barium titanyl oxalate used.

能够在该方法中使用的四氯化钛、氯化钡和草酸,如果是能够工业地得到的,就没有特别的限制,但为了得到高纯度的草酸氧钛钡或钙钛矿型钛酸钡粉末,优选使用杂质含量少的。Titanium tetrachloride, barium chloride, and oxalic acid that can be used in this method are not particularly limited if they are industrially available, but in order to obtain high-purity barium titanyl oxalate or perovskite type barium titanate For powder, it is preferable to use one with less impurity content.

反应操作,首先,调制在水中溶解四氯化钛和氯化钡而形成的A液和在水中溶解草酸而形成的B液。A液是含有四氯化钛和氯化钡的水溶液,但四氯化钛和氯化钡的溶解顺序没有特别的限制,可以同时溶解,也可以溶解一个后再溶解另一个。For the reaction operation, first, liquid A obtained by dissolving titanium tetrachloride and barium chloride in water, and liquid B obtained by dissolving oxalic acid in water were prepared. Liquid A is an aqueous solution containing titanium tetrachloride and barium chloride, but the dissolving order of titanium tetrachloride and barium chloride is not particularly limited, they can be dissolved at the same time, or one can be dissolved and then the other can be dissolved.

A液,氯化钡中的Ba对四氯化钛中的Ti的摩尔比(Ba/Ti)通常是1.0~1.5,优选是1.0~1.2,如果是这样的摩尔比,草酸氧钛钡的Ba/Ti摩尔比就容易成为0.998~1.002,因此是优选的。In liquid A, the molar ratio (Ba/Ti) of Ba in barium chloride to Ti in titanium tetrachloride is usually 1.0 to 1.5, preferably 1.0 to 1.2. If it is such a molar ratio, the Ba of barium titanyl oxalate The /Ti molar ratio is easily 0.998 to 1.002, which is preferable.

另外,A液中的氯化钡的浓度,换算成BaCl2的浓度,通常是1~10重量%,优选是5~8重量%,如果是这样的浓度,就以高收率得到草酸氧钛钡,因此是优选的。另外,A液中的四氯化钛的浓度,换算成TiCl4的浓度,通常是1~10重量%,优选是5~8重量%,如果是这样的浓度,就以高收率得到草酸氧钛钡,因此是优选的。In addition, the concentration of barium chloride in liquid A is usually 1 to 10% by weight, preferably 5 to 8% by weight in terms of BaCl2 concentration. If it is such a concentration, titanyl oxalate can be obtained in high yield. Barium is therefore preferred. In addition, the concentration of titanium tetrachloride in liquid A is usually 1 to 10% by weight, preferably 5 to 8% by weight in terms of TiCl4 concentration. If it is such a concentration, oxalic acid oxygen can be obtained in high yield. Titanium barium is therefore preferred.

另外,上述B液,草酸的浓度通常是5~70重量%,优选是10~40重量%,如果是这样的浓度,就以高收率得到草酸氧钛钡,因此是优选的。In addition, the concentration of oxalic acid in the liquid B is usually 5 to 70% by weight, preferably 10 to 40% by weight. Such a concentration is preferable because barium titanyl oxalate can be obtained in high yield.

作为A液和B液的接触方法,可举出在A液搅拌下添加B液的方法、或在搅拌下在B液中添加A液的方法。B液对上述A液的添加量或A液对B液的添加量,B液中的草酸对A液中的Ti的摩尔比(草酸/Ti),如果通常成为2.1~2.3地添加,就能够以高收率得到草酸氧钛钡,因此是优选的。另外,搅拌速度,只要是包含从添加开始至反应终了期间生成的草酸氧钛钡的浆时常显示流动性的状态就可以,没有特别的限制。As a contact method of liquid A and liquid B, the method of adding liquid B with stirring liquid A, or the method of adding liquid A to liquid B with stirring are mentioned. The amount of liquid B added to the above liquid A or the amount of liquid A added to liquid B, and the molar ratio (oxalic acid/Ti) of oxalic acid in liquid B to Ti in liquid A (oxalic acid/Ti) can be added if they are usually 2.1 to 2.3. Barium titanyl oxalate is obtained in high yield and is therefore preferred. In addition, the stirring speed is not particularly limited as long as the slurry containing barium titanyl oxalate generated from the addition to the end of the reaction always shows fluidity.

在本发明中,通过或使向反应体系连续或断续供给的A液或B液的添加时间变长,或由于提高添加温度,生成的草酸氧钛钡的粒径就容易变大。为此,在本发明中,该A液和B液的接触,在A液或B液中添加的另一种溶液的添加温度,通常是50~90℃,优选是50~70℃,添加时间是0.5小时以上,优选是1小时以上,以一定速度连续地进行,如果是这样,所得到的草酸氧钛钡就成为Ba/Ti摩尔比大约是1、而且波动小的品质稳定的草酸氧钛钡,而且,在后述的熟化反应中能够以短时间得到上述范围内的平均粒径,因此是优选的。再者,在A液或B中添加的另一种溶液的温度,没有特别的限制,但如果在与上述添加温度相同的范围内,反应操作就变得容易,因此是优选的。In the present invention, the particle size of the barium titanyl oxalate produced tends to be large by either making the addition time of liquid A or liquid B supplied continuously or intermittently to the reaction system longer, or by increasing the temperature of addition. For this reason, in the present invention, the contact of the A liquid and the B liquid, the addition temperature of another solution added in the A liquid or the B liquid, is usually 50~90°C, preferably 50~70°C, the addition time Be more than 0.5 hour, preferably more than 1 hour, carry out continuously at a certain speed, if so, the barium titanyl oxalate obtained just becomes the Ba/Ti molar ratio is about 1, and the stable quality titanyl oxalate of little fluctuation Barium is also preferable because it can obtain an average particle diameter within the above-mentioned range in a short time in the aging reaction described later. Furthermore, the temperature of another solution added to the A liquid or B is not particularly limited, but if it is within the same range as the above-mentioned addition temperature, the reaction operation becomes easy, so it is preferable.

A液和B液的接触终了后,进行熟化反应。如果进行这种熟化反应,随着促进所生成的草酸氧钛钡的晶粒长大,而结束反应,因此能够得到具有上述范围内的平均粒径、Ba/Ti摩尔比为0.998~1.002、组成的波动小的草酸氧钛钡。After the contact of liquid A and liquid B is completed, aging reaction is performed. If such an aging reaction is carried out, the reaction is terminated as the crystal grain growth of the produced barium titanyl oxalate is accelerated, so it is possible to obtain a compound having an average particle diameter within the above range, a Ba/Ti molar ratio of 0.998 to 1.002, and a composition The fluctuation of barium titanyl oxalate is small.

熟化条件,熟化温度通常是50℃以上,优选是50~90℃的温度,进行0.5小时以上、优选1小时以上的熟化反应。再者,所谓熟化温度是指A液和B液接触后的混合物全体的温度。熟化结束后,使用常规方法进行固液分离,得到平均粒径通常是50~300μm、优选是100~200μm的草酸氧钛钡。Aging conditions, the aging temperature is usually 50° C. or higher, preferably 50 to 90° C., and the aging reaction is carried out for 0.5 hour or longer, preferably 1 hour or longer. In addition, aging temperature means the temperature of the whole mixture after A liquid and B liquid contact. After the aging, the solid-liquid separation is carried out by a conventional method to obtain barium titanyl oxalate with an average particle size of usually 50-300 μm, preferably 100-200 μm.

上述草酸氧钛钡的制造方法,例如能够在上述钙钛矿型钛酸钡粉末制造方法的第一工序中使用的平均粒径为50~300μm的草酸氧钛钡的调制中使用。The method for producing barium titanyl oxalate described above can be used, for example, to prepare barium titanyl oxalate having an average particle diameter of 50 to 300 μm used in the first step of the method for producing perovskite-type barium titanate powder.

【实施例】【Example】

以下,通过实施例更详细地说明本发明,但本发明不受这些实施例的限制。Hereinafter, the present invention will be described in more detail by way of examples, but the present invention is not limited by these examples.

实施例1Example 1

(草酸氧钛钡的制造工序)(Manufacturing process of barium titanyl oxalate)

调制在4100ml水中溶解600g(2.456mol)氯化钡二水盐和444g(2.342mol)四氯化钛的混合溶液,以此作为A液。接着,调制在1500ml的70℃温水中溶解620g草酸的草酸水溶液,以此作为B液。一边使B液保持在70℃,一边在搅拌下用120分钟向A中滴下B液,再在70℃搅拌1小时下进行熟化。冷却后,进行过滤,回收草酸氧钛钡。在表1中示出所得到的草酸氧钛钡的物性值。根据扫描电子显微镜(SEM)照片求出平均粒径。A liquid A was prepared by dissolving 600 g (2.456 mol) of barium chloride dihydrate and 444 g (2.342 mol) of titanium tetrachloride in 4100 ml of water. Next, an oxalic acid aqueous solution in which 620 g of oxalic acid was dissolved in 1500 ml of 70° C. warm water was prepared, and this was prepared as B liquid. While keeping liquid B at 70°C, liquid B was dripped into A over 120 minutes with stirring, and aging was performed while stirring at 70°C for 1 hour. After cooling, filter and recover the barium titanyl oxalate. Table 1 shows the physical property values of the obtained barium titanyl oxalate. The average particle diameter was calculated|required from the scanning electron microscope (SEM) photograph.

表1Table 1

  草酸氧钛钡的物性值 平均粒径 120μm Physical properties of barium titanyl oxalate The average particle size 120μm

(第一工序)(first process)

用4.5升蒸馏水将回收的草酸氧钛钡进行三次再浆化,仔细地进行洗净。接着,在105℃下进行干燥,得到1000g草酸氧钛钡。在表2中示出所得到的草酸氧钛钡的物性值。The recovered barium titanyl oxalate was repulped three times with 4.5 liters of distilled water and washed carefully. Next, drying was performed at 105° C. to obtain 1000 g of barium titanyl oxalate. Table 2 shows the physical property values of the obtained barium titanyl oxalate.

基于荧光X射线分析的值计算出Ba/Ti摩尔比。另外,根据扫描电子显微镜(SEM)照片求出平均粒径。用离子色谱法测定氯离子浓度。The Ba/Ti molar ratio was calculated based on the value of the fluorescent X-ray analysis. Moreover, the average particle diameter was calculated|required from the scanning electron microscope (SEM) photograph. Chloride concentration was determined by ion chromatography.

表2Table 2

  草酸氧钛钡的物性值 Ba/Ti摩尔比 1.000 平均粒径 120μm 氯含量 100ppm Physical properties of barium titanyl oxalate Ba/Ti molar ratio 1.000 The average particle size 120μm Chlorine content 100ppm

(第二工序)(second process)

将加入60g在第一工序中调制的草酸氧钛钡和140ml乙醇形成的浆装入容量700ml的球磨机中,向其中放入1070g的

Figure C03127269D0012132544QIETU
氧化锆球,进行湿式粉碎处理。接着在105℃下全量干燥湿式粉碎处理后的浆,得到平均粒径是0.7μm的草酸氧钛钡。Put the slurry formed by adding 60 g of barium titanyl oxalate prepared in the first process and 140 ml of ethanol into a ball mill with a capacity of 700 ml, and put 1070 g of
Figure C03127269D0012132544QIETU
Zirconia balls are wet pulverized. Next, the whole amount of the wet pulverized slurry was dried at 105° C. to obtain barium titanyl oxalate with an average particle diameter of 0.7 μm.

(第三工序)(third process)

将10g在第二工序得到的草酸氧钛钡试样在大气下、在900℃下进行4小时煅烧处理,得到钛酸钡试样。10 g of the barium titanyl oxalate sample obtained in the second step was calcined at 900° C. for 4 hours in the air to obtain a barium titanate sample.

求出所得到的钛酸钡试样的Ba/Ti摩尔比、BET比表面积、结晶度、平均粒径、粒径的波动和氯含量。结果示于表3和表4中。另外,在图2中示出钛酸钡的X射线衍射图。The Ba/Ti molar ratio, BET specific surface area, crystallinity, average particle diameter, fluctuation in particle diameter, and chlorine content of the obtained barium titanate sample were determined. The results are shown in Table 3 and Table 4. In addition, an X-ray diffraction pattern of barium titanate is shown in FIG. 2 .

再有,基于荧光X射线分析值计算出Ba/Ti摩尔比。另外,作为射线源使用Cu-Kα线,利用X射线衍射装置(日本フイリツプス株式会社制,型号为X′PartMPD)测定钛酸钡试样,按照下述计算式求出结晶度。结晶度,得到的值越大,表示结晶性越优良。在图1中示意性地表示在下述式中的a和b的求出方法。In addition, the Ba/Ti molar ratio was calculated based on the fluorescent X-ray analysis value. In addition, a barium titanate sample was measured with an X-ray diffractometer (manufactured by Nippon Phillips Co., Ltd., model X'PartMPD) using Cu-Kα rays as a radiation source, and the degree of crystallinity was determined according to the following calculation formula. As for the degree of crystallinity, the larger the obtained value, the better the crystallinity. Fig. 1 schematically shows how to obtain a and b in the following formula.

结晶度=a/bCrystallinity = a/b

(a:2θ=45.38°附近的晶格面(200)面的衍射峰c的强度。b:2θ=44.86°附近的晶格面(002)面的衍射峰d和上述晶格面(200)面的衍射峰c间的谷部e的强度)。利用X射线衍射装置的机械换算手段求出衍射峰c、衍射峰d和谷部e。(a: The intensity of the diffraction peak c of the lattice plane (200) near 2θ=45.38°. b: The diffraction peak d of the lattice plane (002) near 2θ=44.86° and the above-mentioned lattice plane (200) The intensity of the valley e between the diffraction peaks c of the surface). Diffraction peak c, diffraction peak d, and trough e were obtained using the mechanical conversion means of the X-ray diffraction apparatus.

在以倍率20000倍进行电子显微镜观察试样时,以测定任意抽取的200个以上颗粒的粒径时的标准偏差σ评价粒径的波动。该标准偏差σ小者表示粒径的波动少。另外,利用离子色谱法测定钛酸钡的氯含量。When observing a sample with an electron microscope at a magnification of 20,000 times, the fluctuation in the particle diameter was evaluated as the standard deviation σ when measuring the particle diameters of 200 or more randomly selected particles. A smaller standard deviation σ indicates less variation in particle size. In addition, the chlorine content of barium titanate was measured by ion chromatography.

实施例2及3Example 2 and 3

在第三工序中,除了草酸氧钛钡试样的煅烧温度规定为920℃(实施例2)或940℃(实施例3)以外,与实施例1相同地制作,得到钛酸钡试样,求出Ba/Ti摩尔比、BET比表面积、结晶度、平均粒径、粒径的波动和氯含量。结果示于表3和表4中。In the third step, except that the calcining temperature of the barium titanyl oxalate sample is specified as 920° C. (Example 2) or 940° C. (Example 3), it is produced in the same manner as in Example 1 to obtain a barium titanate sample. The Ba/Ti molar ratio, BET specific surface area, crystallinity, average particle size, fluctuation in particle size, and chlorine content were determined. The results are shown in Table 3 and Table 4.

比较例1Comparative example 1

(草酸氧钛钡的制造工序和第一工序)(Manufacturing process and first process of barium titanyl oxalate)

与实施例1相同地实施草酸氧钛钡的制造工序和第一工序,得到1000g表2所示物性的草酸氧钛钡试样。The production process of barium titanyl oxalate and the first step were carried out in the same manner as in Example 1 to obtain 1000 g of barium titanyl oxalate samples with physical properties shown in Table 2.

(第一工序后的工序)(process after the first process)

将200g这种草酸氧钛钡试样在大气下、在900℃下进行4小时煅烧处理,得到钛酸钡试样。200 g of this barium titanyl oxalate sample was calcined at 900° C. for 4 hours in the air to obtain a barium titanate sample.

接着,在容量700ml的球磨机中加入60g所得到的钛酸钡试样和140ml乙醇形成浆,向其中放入1070g的

Figure C03127269D0012132544QIETU
氧化锆球,进行湿式粉碎处理。接着在105℃下全量干燥湿式粉碎处理后的浆,得到钛酸钡试样。Next, 60 g of the obtained barium titanate sample and 140 ml of ethanol were added into a ball mill with a capacity of 700 ml to form a slurry, and 1070 g of
Figure C03127269D0012132544QIETU
Zirconia balls are wet pulverized. Next, the entire amount of the wet pulverized slurry was dried at 105° C. to obtain a barium titanate sample.

关于所得到的钛酸钡试样,以与实施例1相同的手法求出Ba/Ti摩尔比、BET比表面积、结晶度、平均粒径、粒径的波动和氯含量。结果示于表3和表4中。另外,在图2中示出所得到的钛酸钡的X射线衍射图。For the obtained barium titanate samples, the Ba/Ti molar ratio, BET specific surface area, crystallinity, average particle diameter, fluctuation in particle diameter, and chlorine content were determined in the same manner as in Example 1. The results are shown in Table 3 and Table 4. In addition, an X-ray diffraction pattern of the obtained barium titanate is shown in FIG. 2 .

比较例2~4Comparative example 2-4

在第一工序后的工序中,除了将草酸氧钛钡试样的煅烧温度规定为920℃(比较例2)、940℃(比较例3)或1000℃(比较例4)以外,与比较例1相同地制作,得到钛酸钡试样,求出Ba/Ti摩尔比、BET比表面积、结晶度、平均粒径、粒径的波动和氯含量。结果示于表3和表4中。In the process after the first process, except that the calcining temperature of the barium titanyl oxalate sample is specified as 920 ° C (comparative example 2), 940 ° C (comparative example 3) or 1000 ° C (comparative example 4), the same as the comparative example 1 was produced in the same manner to obtain a barium titanate sample, and the Ba/Ti molar ratio, BET specific surface area, crystallinity, average particle diameter, fluctuation in particle diameter, and chlorine content were determined. The results are shown in Table 3 and Table 4.

表3table 3

  煅烧温度(℃)     Ba/Ti摩尔比 BET比表面积(m<sup>2</sup>/g)      结晶度 实施例1 900 1.000 5.7 2.4 实施例2 920 1.000 4.6 3.2 实施例3 940 1.000 3.6 4.2 比较例1 900 1.000 5.4 比较例2 920 1.000 4.5 比较例3 940 1.000 4.3 比较例4 1000 1.000 4.1 0.5 Calcination temperature (℃) Ba/Ti molar ratio BET specific surface area (m<sup>2</sup>/g) Crystallinity Example 1 900 1.000 5.7 2.4 Example 2 920 1.000 4.6 3.2 Example 3 940 1.000 3.6 4.2 Comparative example 1 900 1.000 5.4 Comparative example 2 920 1.000 4.5 Comparative example 3 940 1.000 4.3 Comparative example 4 1000 1.000 4.1 0.5

表4Table 4

  平均粒径(μm)    粒径的波动标准偏差σ 氯含量(ppm)  实施例1 0.39 0.12 85 实施例2 0.43 0.13 84 实施例3 0.48 0.11 81 比较例1 0.44 0.25 89 比较例2 0.48 0.26 87 比较例3 0.53 0.24 85 比较例4 0.60 0.25 81 Average particle size (μm) Standard deviation of particle size fluctuation σ Chlorine content (ppm) Example 1 0.39 0.12 85 Example 2 0.43 0.13 84 Example 3 0.48 0.11 81 Comparative example 1 0.44 0.25 89 Comparative example 2 0.48 0.26 87 Comparative example 3 0.53 0.24 85 Comparative example 4 0.60 0.25 81

根据表3和表4的结果知道以下的事实。即,由实施例1~3可知,利用本发明的制造方法得到的钛酸钡,是粒径1μm以下的微细颗粒,高纯度,结晶性良好,粒径的波动少。另外,由比较例1~4可知,在不进行本发明的第二工序的情况下,如果不在1000℃以上的高温进行加热处理,就得不到结晶性良好的钛酸钡。另外,由比较例1~4可知,在不进行本发明的第二工序的情况下,即使在煅烧后进行粉碎处理,因为粗颗粒或微细颗粒多,所以在钛酸钡中也残留草酸氧钛钡的骨架,另外,即使进行粉碎处理,因为粗颗粒或微细颗粒多,所以粒径的波动也大,另外,用X射线衍射分析没有检测出2θ=44.86°附近的002面的衍射峰,结晶性差。From the results of Table 3 and Table 4, the following facts are known. That is, as can be seen from Examples 1 to 3, the barium titanate obtained by the production method of the present invention is fine particles with a particle diameter of 1 μm or less, high purity, good crystallinity, and little fluctuation in particle diameter. In addition, as can be seen from Comparative Examples 1 to 4, barium titanate with good crystallinity cannot be obtained unless the second step of the present invention is performed without heat treatment at a high temperature of 1000° C. or higher. In addition, as can be seen from Comparative Examples 1 to 4, when the second step of the present invention is not performed, titanyl oxalate remains in the barium titanate even if the pulverization treatment is performed after calcination, because there are many coarse particles or fine particles. In addition, even if the barium skeleton is pulverized, there are many coarse particles or fine particles, so the fluctuation in particle size is large. In addition, the diffraction peak of the 002 plane near 2θ = 44.86° was not detected by X-ray diffraction analysis, and the crystallization Poor sex.

实施例4Example 4

(草酸氧钛钡的制造工序和第一工序)(Manufacturing process and first process of barium titanyl oxalate)

与实施例1相同地实施草酸氧钛钡的制造工序和第一工序,得到1000g表2所示物性的草酸氧钛钡试样。The production process of barium titanyl oxalate and the first step were carried out in the same manner as in Example 1 to obtain 1000 g of barium titanyl oxalate samples with physical properties shown in Table 2.

(第二工序)(second process)

在容量700ml的球磨机中,添加140ml乙醇和丁醇钇,该丁醇钇的加入量,相对于生成的钛酸钡,换算成氧化钇为1重量%。接着,在球磨机中放入在第一工序中调制的60g草酸氧钛钡和1070g的

Figure C03127269D0012132544QIETU
氧化锆球,进行湿式粉碎处理。140 ml of ethanol and yttrium butoxide were added to a ball mill with a capacity of 700 ml. The amount of yttrium butoxide added was 1% by weight in terms of yttrium oxide relative to the barium titanate produced. Then, put 60g of barium titanyl oxalate and 1070g of barium titanyl oxalate prepared in the first process into the ball mill
Figure C03127269D0012132544QIETU
Zirconia balls are wet pulverized.

接着,在105℃下全量干燥湿式粉碎处理后的浆,得到在平均粒径为0.7μm的表面附着钇的草酸氧钛钡。Next, the entire amount of the slurry after the wet pulverization treatment was dried at 105° C. to obtain barium titanyl oxalate having yttrium adhered to the surface with an average particle diameter of 0.7 μm.

(第三工序)(third process)

将10g在表面附着钇的草酸氧钛钡在大气下、在1100℃下进行4小时煅烧处理,得到氧化钇固溶的钛酸钡试样。10 g of barium titanyl oxalate with yttrium attached to the surface was calcined at 1100° C. for 4 hours in the air to obtain a barium titanate sample in which yttrium oxide was solid-dissolved.

对于该钛酸钡试样,使用与实施例:1相同的方法求出Ba/Ti摩尔比、BET比表面积、结晶度、平均粒径、粒径的波动、氯含量和钇含量。另外利用ICP(电感耦合等离子体)分析法求出Y的量。结果示于表5中。For this barium titanate sample, the Ba/Ti molar ratio, BET specific surface area, crystallinity, average particle diameter, fluctuation in particle diameter, chlorine content, and yttrium content were determined in the same manner as in Example 1. In addition, the amount of Y was determined by an ICP (inductively coupled plasma) analysis method. The results are shown in Table 5.

实施例5Example 5

(预备工序和第一工序)(preparatory process and first process)

与实施例1相同地实施预备工序和第一工序,得到1000g表2所示物性的草酸氧钛钡试样。The preparatory step and the first step were carried out in the same manner as in Example 1 to obtain 1000 g of a barium titanyl oxalate sample with the physical properties shown in Table 2.

(第二工序)(second process)

在容量700ml的球磨机中放入60g在第一工序得到的草酸氧钛钡试样、0.6g氧化钇(平均粒径0.1μm)、140ml乙醇和1070g的

Figure C03127269D0012132544QIETU
氧化锆球,进行湿式粉碎处理。接着,在105℃下全量干燥湿式粉碎处理后的浆,得到氧化钇和平均粒径为0.7μm的草酸氧钛钡的混合物。In a ball mill with a capacity of 700ml, put 60g of the barium titanyl oxalate sample obtained in the first process, 0.6g of yttrium oxide (average particle size 0.1μm), 140ml of ethanol and 1070g of
Figure C03127269D0012132544QIETU
Zirconia balls are wet pulverized. Next, the entire amount of the wet pulverized slurry was dried at 105° C. to obtain a mixture of yttrium oxide and barium titanyl oxalate having an average particle diameter of 0.7 μm.

(第三工序)(third process)

接着,将所得到的氧化钇和草酸氧钛钡的混合物在大气下、在1100℃下进行4小时煅烧处理。得到在表面附着氧化钇的钛酸钡试样。Next, the obtained mixture of yttrium oxide and barium titanyl oxalate was calcined at 1100° C. for 4 hours in the atmosphere. A barium titanate sample having yttrium oxide attached to the surface was obtained.

对于该钛酸钡试样,使用与实施例1相同的方法求出Ba/Ti摩尔比、BET比表面积、结晶度、平均粒径、粒径的波动、氯含量和钇含量。另外利用ICP(电感耦合等离子体)分析法求出Y的量。结果示于表5中。For this barium titanate sample, the Ba/Ti molar ratio, BET specific surface area, crystallinity, average particle size, fluctuation in particle size, chlorine content, and yttrium content were determined by the same method as in Example 1. In addition, the amount of Y was determined by an ICP (inductively coupled plasma) analysis method. The results are shown in Table 5.

表5table 5

  实施例4 实施例5 Ba/Ti摩尔比 1.000 1.000 Y<sub>2</sub>O<sub>3</sub>含量(重量%) 0.98 1.01 氯含量(ppm) 87 83 BET比表面积(m<sup>2</sup>/g) 4.4 4.0 平均粒径(μm) 0.41 0.58 粒径的标准偏差σ 0.08 0.13 结晶度 5.3 4.8 Example 4 Example 5 Ba/Ti molar ratio 1.000 1.000 Y<sub>2</sub>O<sub>3</sub> content (weight%) 0.98 1.01 Chlorine content (ppm) 87 83 BET specific surface area (m<sup>2</sup>/g) 4.4 4.0 Average particle size (μm) 0.41 0.58 Standard deviation σ of particle size 0.08 0.13 Crystallinity 5.3 4.8

对于含有实施例4和实施例5得到的钇的钛酸钡试样,使用SEM-EDX(日本电子社制)进行钇的绘图的结果,实施例4和实施例5都没有看到钇的偏析,均匀地分散在粉体表面,但实施例4一方与实施例5进行比较可知,钇更均匀地分散。As a result of mapping the barium titanate samples containing yttrium obtained in Examples 4 and 5 using SEM-EDX (manufactured by JEOL Ltd.), no segregation of yttrium was observed in Examples 4 and 5. , evenly dispersed on the surface of the powder, but comparing Example 4 with Example 5, it can be seen that yttrium is more uniformly dispersed.

发明的效果The effect of the invention

按照本发明的钙钛矿型钛酸钡粉末的制造方法,能够制造平均粒径是1μm以下的微细、粒径的波动小,Ba/Ti摩尔比大约是1、而且其波动小,高纯度,结晶性优良的钙钛矿型钛酸钡粉末。According to the manufacturing method of the perovskite-type barium titanate powder of the present invention, it is possible to manufacture fine particles with an average particle size of 1 μm or less, with small particle size fluctuations, a Ba/Ti molar ratio of about 1, and small fluctuations and high purity. Perovskite-type barium titanate powder with excellent crystallinity.

Claims (2)

1.一种钙钛矿型钛酸钡粉末的制造方法,其特征在于,具有:1. a manufacture method of perovskite type barium titanate powder, is characterized in that, has: 用水洗净平均粒径为50~300μm的草酸氧钛钡的第一工序,所述平均粒径为50~300μm的草酸氧钛钡是使在水中溶解四氯化钛和氯化钡所形成的A液和在水中溶解草酸所形成的B液在50~90℃进行接触、在50~90℃进行0.5小时以上熟化后、进行固液分离所得到;The first step of washing with water the barium titanyl oxalate with an average particle diameter of 50 to 300 μm, which is formed by dissolving titanium tetrachloride and barium chloride in water It is obtained by contacting liquid A and liquid B formed by dissolving oxalic acid in water at 50-90°C, aging at 50-90°C for more than 0.5 hours, and then performing solid-liquid separation; 将该洗净后的草酸氧钛钡制成浆后,在乙醇中进行湿式粉碎处理,得到平均粒径为0.05~1μm的草酸氧钛钡的第二工序;和After making the washed barium titanyl oxalate into a slurry, wet pulverization treatment in ethanol to obtain the second step of barium titanyl oxalate with an average particle size of 0.05-1 μm; and 将该平均粒径为0.05~1μm的草酸氧钛钡在700~1200℃下进行煅烧的第三工序。The third step of calcining the barium titanyl oxalate having an average particle diameter of 0.05 to 1 μm at 700 to 1200° C. is performed. 2.根据权利要求1所述的钙钛矿型钛酸钡粉末的制造方法,其特征在于,在第二工序中的湿式粉碎处理前的浆或湿式粉碎处理后的浆中,添加混合选自稀土类元素、Ba、Li、Bi、Zn、Mn、Al、Si、Ca、Sr、Co、Ni、Cr、Fe、Mg、Ti、V、Nb、Mo、W和Sn中的至少一种元素的化合物。2. the manufacture method of perovskite type barium titanate powder according to claim 1 is characterized in that, in the slurry before the wet pulverization treatment in the second step or the slurry after the wet pulverization treatment, add and mix selected from At least one of rare earth elements, Ba, Li, Bi, Zn, Mn, Al, Si, Ca, Sr, Co, Ni, Cr, Fe, Mg, Ti, V, Nb, Mo, W and Sn compound.
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