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CN100457834C - Alumina insulating coating and preparation method thereof - Google Patents

Alumina insulating coating and preparation method thereof Download PDF

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CN100457834C
CN100457834C CNB200510040770XA CN200510040770A CN100457834C CN 100457834 C CN100457834 C CN 100457834C CN B200510040770X A CNB200510040770X A CN B200510040770XA CN 200510040770 A CN200510040770 A CN 200510040770A CN 100457834 C CN100457834 C CN 100457834C
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insulating coating
coating
preparation
alumina insulating
aluminum oxide
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CN1884398A (en
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杨晔
胡坤
郑康
陈林
段雷
李勇
崔平
方前锋
田兴友
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Hefei Institutes of Physical Science of CAS
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Abstract

本发明公开了一种氧化铝绝缘涂层及其制备方法。涂层包括基底上覆有氧化铝涂层,特别是氧化铝涂层的厚度为5~30μm,其由2~8层的粒径为20~150nm的α-Al2O3颗粒与勃姆石溶胶在高温下的产物构成;方法包括溶胶-凝胶法,特别是完成步骤为:(1)将纳米级α-Al2O3粉体和水性勃姆石溶胶和无机酸或无机酸盐或有机酸或有机酸盐按照1~20∶100∶0.1~5的比例相混合,再将其球磨5~10小时后放置5~24小时得到复合浆料,(2)用复合浆料涂覆基底,再将其于80~120℃下干燥10~30分钟,之后,将其于400~700℃下热处理5~20分钟,(3)重复(2)的步骤2~8次,制得氧化铝绝缘涂层。它具有较高的击穿电压和直流电阻,可广泛地用于耐高压的电绝缘领域。

Figure 200510040770

The invention discloses an aluminum oxide insulating coating and a preparation method thereof. The coating comprises an aluminum oxide coating on a substrate, in particular, the thickness of the aluminum oxide coating is 5 to 30 μm, and the coating is composed of 2 to 8 layers of α-Al 2 O 3 particles with a particle size of 20 to 150 nm and a product of boehmite sol at high temperature; the method comprises a sol-gel method, in particular, the steps of: (1) mixing nano-scale α-Al 2 O 3 powder, aqueous boehmite sol and inorganic acid or inorganic acid salt or organic acid or organic acid salt in a ratio of 1 to 20:100:0.1 to 5, then ball milling the mixture for 5 to 10 hours and leaving the mixture for 5 to 24 hours to obtain a composite slurry; (2) coating the substrate with the composite slurry, then drying the mixture at 80 to 120°C for 10 to 30 minutes, and then heat treating the mixture at 400 to 700°C for 5 to 20 minutes; and (3) repeating step (2) 2 to 8 times to obtain the aluminum oxide insulating coating. It has high breakdown voltage and DC resistance and can be widely used in the field of high voltage resistant electrical insulation.

Figure 200510040770

Description

氧化铝绝缘涂层及其制备方法 Aluminum oxide insulating coating and preparation method thereof

技术领域technical field

本发明涉及一种绝缘涂层及制法,尤其是氧化铝绝缘涂层及其制备方法。The invention relates to an insulating coating and a preparation method, in particular to an aluminum oxide insulating coating and a preparation method thereof.

背景技术Background technique

氧化铝绝缘涂层因具有耐高温、耐酸碱腐蚀、耐磨、绝缘强度高等优点,在核能、冶金、矿山等领域有着广泛的应用前景。目前,人们为了获得它,作了一些努力,如在2000年6月出版的《大连铁道学院学报》第21卷第2期中“等离子喷涂陶瓷涂层性能的研究”一文曾公开了一种用等离子体喷涂将氧化铝喷涂在45号钢上的方法,该氧化铝涂层的厚度为40~90微米。但是,这种氧化铝涂层和其喷涂方法均存在着不足之处,首先,氧化铝涂层呈层状堆积,结合强度低,且涂层中存在大量的气孔,致使涂层疏松,从而导致其介电击穿强度较低,难以用作高性能的绝缘涂层;其次,等离子喷涂方法一是对设备的要求较高,二是作为影响涂层质量的关键因素的喷涂参数不易掌握,三是制备周期也较长,不适于大规模的工业化生产。Alumina insulating coatings have broad application prospects in nuclear energy, metallurgy, mining and other fields due to their advantages of high temperature resistance, acid and alkali corrosion resistance, wear resistance, and high dielectric strength. At present, people have made some efforts in order to obtain it. For example, in the "Research on the Properties of Plasma Sprayed Ceramic Coatings" in the "Journal of Dalian Railway Institute", Volume 21, No. 2, published in June 2000, it was once disclosed a method of using plasma Body spraying is a method of spraying aluminum oxide on No. 45 steel, and the thickness of the aluminum oxide coating is 40-90 microns. But this aluminum oxide coating and its spraying method all have weak point, at first, aluminum oxide coating is piled up in lamination, bonding strength is low, and there is a large amount of pores in the coating, causes coating to loosen, thereby causes Its dielectric breakdown strength is low, and it is difficult to be used as a high-performance insulating coating; secondly, the plasma spraying method has high requirements on equipment, and the second is that the spraying parameters, which are the key factors affecting the quality of the coating, are not easy to grasp. But the preparation period is also long, and it is not suitable for large-scale industrial production.

发明内容Contents of the invention

本发明要解决的技术问题为克服现有技术中的不足之处,提供一种可用于较高温度下、使用方便且绝缘性能优良的氧化铝绝缘涂层及其制备方法。The technical problem to be solved by the present invention is to overcome the deficiencies in the prior art and provide an aluminum oxide insulating coating that can be used at relatively high temperatures, is convenient to use and has excellent insulating properties and a preparation method thereof.

氧化铝绝缘涂层包括基底上覆有氧化铝涂层,特别是所说氧化铝涂层的厚度为5~30μm,其由2~8层的粒径为20~150nm的α-Al2O3颗粒与勃姆石溶胶在高温下的产物构成。The aluminum oxide insulating coating includes an aluminum oxide coating on the substrate, especially the thickness of the aluminum oxide coating is 5-30 μm, which consists of 2-8 layers of α-Al 2 O 3 with a particle size of 20-150 nm Particles and boehmite sols are formed at high temperatures.

氧化铝绝缘涂层的制备方法包括溶胶-凝胶法,特别是它是按以下步骤完成的:(1)、将纳米级α-Al2O3粉体和水性勃姆石溶胶和无机酸或无机酸盐或有机酸或有机酸盐按照1~20∶100∶0.1~5的比例相混合,再将其球磨5~10小时后放置5~24小时得到复合浆料;(2)、用复合浆料涂覆基底,再将其于80~120℃下干燥10~30分钟,之后,将其于400~700℃下热处理5~20分钟;(3)、重复(2)的步骤2~8次,制得氧化铝绝缘涂层。The preparation method of aluminum oxide insulating coating comprises sol-gel method, particularly it is finished by the following steps: (1), nanoscale α-Al 2 O 3 powder and aqueous boehmite sol and mineral acid or Inorganic acid salts or organic acids or organic acid salts are mixed according to the ratio of 1 to 20:100:0.1 to 5, and then ball milled for 5 to 10 hours and then placed for 5 to 24 hours to obtain a composite slurry; (2). Coat the substrate with the slurry, then dry it at 80-120°C for 10-30 minutes, and then heat-treat it at 400-700°C for 5-20 minutes; (3), repeat steps 2-8 of (2) Second, an alumina insulating coating is obtained.

作为氧化铝绝缘涂层的制备方法的进一步改进,所述的纳米级α-Al2O3粉体的粒径为20~150nm;所述的水性勃姆石溶胶的成分为γ-AlOOH、浓度为1~10wt%、pH值为2~5;所述的无机酸为硝酸或硫酸或盐酸;所述的无机酸盐为硫酸铝或硝酸铝或氯化铝;所述的有机酸为醋酸或草酸或柠檬酸;所述的有机酸盐为醋酸铝或草酸铝或柠檬酸铝;所述的球磨是将混合浆料置于球磨罐中在行星式球磨机上进行混合与研磨;所述的涂覆为浸渍或旋涂或喷涂。As a further improvement of the preparation method of the alumina insulating coating, the particle size of the nanoscale α-Al 2 O 3 powder is 20-150nm; the composition of the water-based boehmite sol is γ-AlOOH, concentration 1 to 10 wt%, and a pH value of 2 to 5; the inorganic acid is nitric acid or sulfuric acid or hydrochloric acid; the inorganic acid salt is aluminum sulfate or aluminum nitrate or aluminum chloride; the organic acid is acetic acid or oxalic acid or citric acid; the organic acid salt is aluminum acetate or aluminum oxalate or aluminum citrate; the ball mill is to place the mixed slurry in a ball mill tank to mix and grind on a planetary ball mill; Coating is by dipping or spin coating or spraying.

相对于现有技术的有益效果是,其一,对制得的氧化铝绝缘涂层和其断面分别使用场发射扫描电子显微镜、X-射线衍射仪和涂镀层测厚仪进行表征与测试后,从得到的扫描电镜照片、X-射线衍射图谱和厚度值可知,绝缘涂层致密、无裂纹,其由粒径为20~150nm的α-Al2O3颗粒与由勃姆石溶胶在高温下的产物均匀地分布于其中所构成,其厚度为5~30μm;其二,对制得的氧化铝绝缘涂层在不同的温度下使用自动高压击穿装置和绝缘电阻测试仪进行工频交流击穿电压和直流绝缘电阻的测试,其中,涂层的厚度为21.5μm,电极的面积为0.25cm2,结果如下表:Compared with the beneficial effects of the prior art, firstly, after characterizing and testing the prepared aluminum oxide insulating coating and its section using a field emission scanning electron microscope, an X-ray diffractometer and a coating thickness gauge, From the obtained scanning electron microscope photos, X-ray diffraction patterns and thickness values, it can be known that the insulating coating is dense and free of cracks, which is composed of α-Al 2 O 3 particles with a particle size of 20-150nm and boehmite sol at high temperature. The product is uniformly distributed in it, and its thickness is 5-30 μm; second, use an automatic high-voltage breakdown device and an insulation resistance tester to conduct power-frequency AC shocks on the prepared alumina insulating coating at different temperatures. The test of breakdown voltage and DC insulation resistance, wherein the thickness of the coating is 21.5μm, and the area of the electrode is 0.25cm 2 , the results are as follows:

Figure C20051004077000041
Figure C20051004077000041

由表中可看出,涂层拥有较高的击穿电压和直流电阻,其绝缘性能优良;其三,选用纳米级α-Al2O3粉体和水性勃姆石溶胶和无机酸或无机酸盐或有机酸或有机酸盐作为制备绝缘涂层的原料,既可发挥纳米α-Al2O3陶瓷粒子的:1)阻止涂层在干燥和热处理过程中的开裂,2)能够获得比较厚的涂层,3)提高粒子之间的堆砌密度,从而提高涂层的致密度,4)使涂层的主相为α相氧化铝,而在众多的氧化铝相中α相拥有非常优良的绝缘性能的特性,又可发挥水性勃姆石溶胶的:1)作为一种高温“粘结剂”,将体系中纳米陶瓷粒子紧密地粘结在一起,2)勃姆石是氧化铝的一种前驱体,在热处理过程中可以完全转变为氧化铝,与添加的氧化铝陶瓷粒子为同一物质,妥善缓解了涂层中由于材料热膨胀系数不匹配而造成的裂纹的特性,还可发挥无机酸或无机酸盐或有机酸或有机酸盐的:1)可以调控勃姆石胶体胶凝的时间,从而获得具有一定粘度的复合浆料,便于涂覆施工,2)由于这些物质的添加,体系中电荷数量增加,利用静电稳定机制使纳米粒子在浆料体系中分散均匀,3)这种添加物在高温下要么完全分解要么产生与氧化铝同物相的材料,不会残留任何影响涂层绝缘性能的其他物质,4)这些添加物会对基体有着微弱的腐蚀、氧化作用,能在金属基底表面形成一层薄薄的致密氧化膜,该膜与氧化铝涂层匹配,提高了涂层的附着力的特性。从而妥善地解决了一次涂覆的厚度与由于材料热膨胀系数不匹配造成裂纹产生的矛盾,仅需较少的涂覆次数就可获得所需厚度的绝缘涂层;其四,经其它仪器的测试,绝缘涂层还具有较高的耐磨损、耐腐蚀、抗氧化、阻热的性能,这便于在较广阔的应用领域内大规模的使用;其五,制备工艺简单易操作,对设备要求不高,适于大规模工业化生产。It can be seen from the table that the coating has a high breakdown voltage and DC resistance, and its insulation performance is excellent; third, nano-scale α-Al 2 O 3 powder and water-based boehmite sol and inorganic acid or inorganic Salts or organic acids or organic acid salts as raw materials for the preparation of insulating coatings can play the role of nano-α-Al 2 O 3 ceramic particles: 1) prevent the coating from cracking during drying and heat treatment, 2) can obtain comparative Thick coating, 3) increase the packing density between particles, thereby increasing the density of the coating, 4) make the main phase of the coating be α-phase alumina, and the α-phase has a very good quality in many alumina phases The characteristics of insulation performance, and can also play the role of water-based boehmite sol: 1) As a high-temperature "binder", the nano-ceramic particles in the system are tightly bonded together, 2) Boehmite is the form of alumina A precursor, which can be completely transformed into alumina during heat treatment, is the same substance as the added alumina ceramic particles, which properly alleviates the characteristics of cracks in the coating caused by the mismatch of thermal expansion coefficients of materials, and can also play an important role in inorganic Acid or inorganic acid salt or organic acid or organic acid salt: 1) It can regulate the gelation time of boehmite colloid, so as to obtain a composite slurry with a certain viscosity, which is convenient for coating construction. 2) Due to the addition of these substances, The number of charges in the system increases, and the electrostatic stabilization mechanism is used to disperse the nanoparticles uniformly in the slurry system. 3) This additive will either completely decompose or produce a material in the same phase as alumina at high temperature, and will not leave any effect on the coating. 4) These additives will have a weak corrosion and oxidation effect on the substrate, and can form a thin and dense oxide film on the surface of the metal substrate. This film matches the aluminum oxide coating and improves the coating. Layer adhesion properties. Therefore, the contradiction between the thickness of one coating and the cracks caused by the mismatch of the thermal expansion coefficient of the material is properly resolved, and the insulating coating of the required thickness can be obtained with only a small number of coating times; Fourth, it has been tested by other instruments , the insulating coating also has high wear resistance, corrosion resistance, oxidation resistance, and heat resistance properties, which is convenient for large-scale use in a wider application field; fifth, the preparation process is simple and easy to operate, and the equipment requirements Not high, suitable for large-scale industrial production.

附图说明Description of drawings

下面结合附图对本发明的优选方式作进一步详细的描述。The preferred modes of the present invention will be further described in detail below in conjunction with the accompanying drawings.

图1给出了利用(a)纯水性勃姆石溶胶,(b)10份纳米级α-Al2O3粉体和100份水性勃姆石溶胶,以及(c)10份纳米级α-Al2O3粉体和100份水性勃姆石溶胶和2份无机酸或无机酸盐或有机酸或有机酸盐的浆料所制备涂层的单次涂覆厚度。由图可看出,经过一次涂覆后,(c)的涂层的厚度约为5μm,在三个样品中最大;Figure 1 shows the use of (a) pure water-based boehmite sol, (b) 10 parts of nano-sized α-Al 2 O 3 powder and 100 parts of water-based boehmite sol, and (c) 10 parts of nano-sized α -The single coating thickness of the coating prepared by the slurry of Al 2 O 3 powder and 100 parts of aqueous boehmite sol and 2 parts of inorganic acid or salt of inorganic acid or organic acid or salt of organic acid. It can be seen from the figure that after one coating, the coating thickness of (c) is about 5 μm, which is the largest among the three samples;

图2是对经两次涂覆的绝缘涂层用美国FEI公司Sirion 200 FEG型场发射扫描电子显微镜观察涂层的表面和断面的形貌后拍摄的照片,其中,(a)图为绝缘涂层的表面形貌图,(b)图为绝缘涂层的断面形貌图;Figure 2 is a photo taken after observing the surface and cross-sectional morphology of the insulating coating with the Sirion 200 FEG type field emission scanning electron microscope of FEI Company of the United States, where (a) is the insulating coating The surface topography of the layer, (b) is the cross-sectional topography of the insulating coating;

图3是对绝缘涂层用荷兰Philips公司X’pert-PRO型X-射线衍射仪判别涂层的物相图,其中,横坐标为2θ角,纵坐标为相对强度,由此可看出,涂层的主相为α-Al2O3相结构,还有少量由勃姆石溶胶经热处理所形成的γ-Al2O3相结构;Fig. 3 is the phase diagram of the insulating coating using the X'pert-PRO type X-ray diffractometer of the Netherlands Philips company to distinguish the coating, wherein the abscissa is a 2θ angle, and the ordinate is a relative intensity, as can be seen from this, The main phase of the coating is α-Al 2 O 3 phase structure, and there is a small amount of γ-Al 2 O 3 phase structure formed by heat treatment of boehmite sol;

图4是对绝缘涂层使用常州微特电机总厂CW2672H型自动高压击穿装置测量其工频交流击穿电压后得到的交流介电击穿电压与温度的关系图,其中,横坐标为温度,纵坐标为击穿电压,涂层厚度为21.5μm。Figure 4 is a graph of the relationship between the AC dielectric breakdown voltage and temperature obtained after measuring the power frequency AC breakdown voltage of the insulating coating using the CW2672H automatic high-voltage breakdown device of Changzhou Micro & Special Motor General Factory, where the abscissa is temperature , the ordinate is the breakdown voltage, and the coating thickness is 21.5 μm.

具体实施方式Detailed ways

首先用常规方法制得或从市场购得粒径为20~150nm的α-Al2O3粉体、水性勃姆石溶胶和无机酸、无机酸盐、有机酸、有机酸盐。接着:Firstly, α-Al 2 O 3 powder with a particle size of 20-150 nm, aqueous boehmite sol, inorganic acid, inorganic acid salt, organic acid, and organic acid salt are prepared by conventional methods or purchased from the market. then:

实施例1:按以下步骤完成制备:1)、将纳米级α-Al2O3粉体和水性勃姆石溶胶和无机酸按照1∶100∶0.1的比例相混合,其中,纳米级α-Al2O3粉体的粒径为150nm,水性勃姆石溶胶的成分为γ-AlOOH、浓度为1wt%、pH值为2,无机酸为硝酸(或硫酸或盐酸),再将混合浆料置于球磨罐中在行星式球磨机上进行混合与研磨5小时后放置5小时得到复合浆料;2)、对铜基底打磨、去油和清洗后用复合浆料涂覆于其上,涂覆的方式为喷涂(或浸渍或旋涂),再将其于80℃下干燥30分钟,之后,将其于400℃下热处理20分钟;3)、重复2)的步骤2次,制得如图2、图3和图4所示的氧化铝绝缘涂层。Embodiment 1: Complete the preparation according to the following steps: 1), mix nanoscale α-Al 2 O 3 powder with aqueous boehmite sol and inorganic acid according to the ratio of 1:100:0.1, wherein, nanoscale α- The particle size of the Al 2 O 3 powder is 150nm, the composition of the water-based boehmite sol is γ-AlOOH, the concentration is 1wt%, the pH value is 2, and the inorganic acid is nitric acid (or sulfuric acid or hydrochloric acid), and then the mixed slurry Put it in a ball mill tank, mix and grind on a planetary ball mill for 5 hours, and then place it for 5 hours to obtain a composite slurry; 2), after polishing, degreasing and cleaning the copper substrate, apply it with a composite slurry, and apply The method is spraying (or dipping or spin coating), then drying it at 80°C for 30 minutes, and then heat-treating it at 400°C for 20 minutes; 3), repeat the steps of 2) twice, and the obtained 2. The aluminum oxide insulating coating shown in Figure 3 and Figure 4.

实施例2:按以下步骤完成制备:1)、将纳米级α-Al2O3粉体和水性勃姆石溶胶和无机酸按照5∶100∶1.5的比例相混合,其中,纳米级α-Al2O3粉体的粒径为110nm,水性勃姆石溶胶的成分为γ-AlOOH、浓度为3wt%、pH值为3,无机酸为硝酸(或硫酸或盐酸),再将混合浆料置于球磨罐中在行星式球磨机上进行混合与研磨6小时后放置10小时得到复合浆料;2)、对铜基底打磨、去油和清洗后用复合浆料涂覆于其上,涂覆的方式为喷涂(或浸渍或旋涂),再将其于90℃下干燥25分钟,之后,将其于480℃下热处理17分钟;3)、重复2)的步骤4次,制得近似于图2和如图3、图4所示的氧化铝绝缘涂层。Embodiment 2: Complete the preparation according to the following steps: 1), mix nanoscale α-Al 2 O 3 powder with water-based boehmite sol and inorganic acid according to the ratio of 5:100:1.5, wherein, nanoscale α- The particle size of the Al 2 O 3 powder is 110nm, the composition of the water-based boehmite sol is γ-AlOOH, the concentration is 3wt%, the pH value is 3, and the inorganic acid is nitric acid (or sulfuric acid or hydrochloric acid), and then the mixed slurry Put it in a ball mill tank, mix and grind on a planetary ball mill for 6 hours, and then place it for 10 hours to obtain a composite slurry; 2), after polishing, degreasing and cleaning the copper substrate, apply it with a composite slurry, and apply The method is spraying (or dipping or spin coating), then drying it at 90°C for 25 minutes, and then heat-treating it at 480°C for 17 minutes; 3), repeat the steps of 2) 4 times, and obtain a similar Figure 2 and the aluminum oxide insulating coating shown in Figure 3 and Figure 4.

实施例3:按以下步骤完成制备:1)、将纳米级α-Al2O3粉体和水性勃姆石溶胶和无机酸按照10∶100∶3的比例相混合,其中,纳米级α-Al2O3粉体的粒径为85nm,水性勃姆石溶胶的成分为γ-AlOOH、浓度为5wt%、pH值为3.5,无机酸为硝酸(或硫酸或盐酸),再将混合浆料置于球磨罐中在行星式球磨机上进行混合与研磨7.5小时后放置15小时得到复合浆料;2)、对铜基底打磨、去油和清洗后用复合浆料涂覆于其上,涂覆的方式为喷涂(或浸渍或旋涂),再将其于100℃下干燥20分钟,之后,将其于550℃下热处理13分钟;3)、重复2)的步骤5次,制得近似于图2和如图3、图4所示的氧化铝绝缘涂层。Embodiment 3: Complete preparation according to the following steps: 1), mix nanoscale α-Al 2 O 3 powder with water-based boehmite sol and inorganic acid according to the ratio of 10:100:3, wherein, nanoscale α- The particle size of the Al2O3 powder is 85nm , the composition of the water-based boehmite sol is γ-AlOOH, the concentration is 5wt%, the pH value is 3.5, and the inorganic acid is nitric acid (or sulfuric acid or hydrochloric acid), and then the mixed slurry Put it in a ball mill tank, mix and grind on a planetary ball mill for 7.5 hours, and place it for 15 hours to obtain a composite slurry; 2), after polishing, degreasing and cleaning the copper substrate, apply it with a composite slurry, and apply The method is spraying (or dipping or spin coating), then drying it at 100°C for 20 minutes, and then heat-treating it at 550°C for 13 minutes; 3), repeat the steps of 2) 5 times, and obtain a similar Figure 2 and the aluminum oxide insulating coating shown in Figure 3 and Figure 4.

实施例4:按以下步骤完成制备:1)、将纳米级α-Al2O3粉体和水性勃姆石溶胶和无机酸按照15∶100∶4的比例相混合,其中,纳米级α-Al2O3粉体的粒径为55nm,水性勃姆石溶胶的成分为γ-AlOOH、浓度为8wt%、pH值为4,无机酸为硝酸(或硫酸或盐酸),再将混合浆料置于球磨罐中在行星式球磨机上进行混合与研磨9小时后放置20小时得到复合浆料;2)、对铜基底打磨、去油和清洗后用复合浆料涂覆于其上,涂覆的方式为喷涂(或浸渍或旋涂),再将其于110℃下干燥15分钟,之后,将其于630℃下热处理9分钟;3)、重复2)的步骤6次,制得近似于图2和如图3、图4所示的氧化铝绝缘涂层。Embodiment 4: Complete the preparation according to the following steps: 1), mix nanoscale α-Al 2 O 3 powder with aqueous boehmite sol and inorganic acid according to the ratio of 15:100:4, wherein, nanoscale α- The particle size of the Al 2 O 3 powder is 55nm, the composition of the water-based boehmite sol is γ-AlOOH, the concentration is 8wt%, the pH value is 4, and the inorganic acid is nitric acid (or sulfuric acid or hydrochloric acid), and then the mixed slurry Put it in a ball mill tank, mix and grind it on a planetary ball mill for 9 hours, and place it for 20 hours to obtain a composite slurry; 2), after polishing, degreasing and cleaning the copper substrate, apply it with a composite slurry, and apply The method is spraying (or dipping or spin coating), then drying it at 110°C for 15 minutes, and then heat-treating it at 630°C for 9 minutes; 3), repeat the steps of 2) 6 times, and obtain a Figure 2 and the aluminum oxide insulating coating shown in Figure 3 and Figure 4.

实施例5:按以下步骤完成制备:1)、将纳米级α-Al2O3粉体和水性勃姆石溶胶和无机酸按照20∶100∶5的比例相混合,其中,纳米级α-Al2O3粉体的粒径为20nm,水性勃姆石溶胶的成分为γ-AlOOH、浓度为10wt%、pH值为5,无机酸为硝酸(或硫酸或盐酸),再将混合浆料置于球磨罐中在行星式球磨机上进行混合与研磨10小时后放置24小时得到复合浆料;2)、对铜基底打磨、去油和清洗后用复合浆料涂覆于其上,涂覆的方式为喷涂(或浸渍或旋涂),再将其于120℃下干燥10分钟,之后,将其于700℃下热处理5分钟;3)、重复2)的步骤8次,制得近似于图2和如图3、图4所示的氧化铝绝缘涂层。Example 5: Complete the preparation according to the following steps: 1), mix nanoscale α-Al 2 O 3 powder with aqueous boehmite sol and inorganic acid according to the ratio of 20:100:5, wherein, nanoscale α- The particle size of the Al 2 O 3 powder is 20nm, the composition of the water-based boehmite sol is γ-AlOOH, the concentration is 10wt%, the pH value is 5, and the inorganic acid is nitric acid (or sulfuric acid or hydrochloric acid), and then the mixed slurry Put it in a ball mill tank, mix and grind on a planetary ball mill for 10 hours, and then place it for 24 hours to obtain a composite slurry; 2), after polishing, degreasing and cleaning the copper substrate, apply it with a composite slurry, and apply The method is spraying (or dipping or spin coating), then drying it at 120°C for 10 minutes, and then heat-treating it at 700°C for 5 minutes; 3), repeat the steps of 2) 8 times, and obtain a similar Figure 2 and the aluminum oxide insulating coating shown in Figure 3 and Figure 4.

再分别以无机酸盐或有机酸或有机酸盐来替换无机酸,其中,无机酸盐为硫酸铝或硝酸铝或氯化铝、有机酸为醋酸或草酸或柠檬酸、有机酸盐为醋酸铝或草酸铝或柠檬酸铝,以及再选用半导体或超导体来作为基底,重复上述实施例1~5,同样制得如或近似于图2和如图3、图4所示的氧化铝绝缘涂层。Then replace the inorganic acid with inorganic acid salt or organic acid or organic acid salt, wherein the inorganic acid salt is aluminum sulfate or aluminum nitrate or aluminum chloride, the organic acid is acetic acid or oxalic acid or citric acid, and the organic acid salt is aluminum acetate Or aluminum oxalate or aluminum citrate, and select semiconductor or superconductor again as substrate, repeat above-mentioned embodiment 1~5, also make as or approximate to the aluminum oxide insulating coating shown in Fig. 2 and Fig. 3, Fig. 4 .

显然,本领域的技术人员可以对本发明的氧化铝绝缘涂层及其制备方法进行各种改动和变型而不脱离本发明的精神和范围。这样,倘若本发明的这些修改和变型属于本发明权利要求及其等同技术的范围之内,则本发明也意图包含这些改动和变型在内。Apparently, those skilled in the art can make various changes and modifications to the alumina insulating coating and its preparation method of the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalent technologies, the present invention also intends to include these modifications and variations.

Claims (6)

1, a kind of preparation method of alumina insulating coating comprises sol-gel method, it is characterized in that finishing according to the following steps:
1.1, be α-Al of 20~150nm with particle diameter 2O 3Powder and water-based boehmite sol and organic acid or organic acid salt are according to 1~20: 100: 0.1~5 ratio is mixed mutually, its ball milling was placed after 5~10 hours obtained composite mortar in 5~24 hours again;
1.2, use the composite mortar coated substrate, again with its in 80~120 ℃ dry 10~30 minutes down, afterwards, with it in 400~700 ℃ of following thermal treatments 5~20 minutes;
1.3, repeat 1.2 step 2~8 time, make alumina insulating coating.
2, the preparation method of alumina insulating coating according to claim 1, the composition that it is characterized in that the water-based boehmite sol is that γ~AlOOH, concentration are that 1~10wt%, pH value are 2~5.
3, the preparation method of alumina insulating coating according to claim 1 is characterized in that organic acid is acetic acid or oxalic acid or citric acid.
4, the preparation method of alumina insulating coating according to claim 1 is characterized in that organic acid salt is Burow Solution or oxalic acid aluminium or Tiorco 677.
5, the preparation method of alumina insulating coating according to claim 1 is characterized in that ball milling is to place ball grinder to mix and grinding mixed slurry on planetary ball mill.
6, the preparation method of alumina insulating coating according to claim 1 is characterized in that being applied to dipping or spin coating or spraying.
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