CN100432677C - Acceleration sensor - Google Patents
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- CN100432677C CN100432677C CNB2006100040748A CN200610004074A CN100432677C CN 100432677 C CN100432677 C CN 100432677C CN B2006100040748 A CNB2006100040748 A CN B2006100040748A CN 200610004074 A CN200610004074 A CN 200610004074A CN 100432677 C CN100432677 C CN 100432677C
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- 230000001133 acceleration Effects 0.000 title claims abstract description 80
- 239000011553 magnetic fluid Substances 0.000 claims abstract description 68
- 239000000696 magnetic material Substances 0.000 claims abstract description 9
- 238000001514 detection method Methods 0.000 claims description 116
- 238000006073 displacement reaction Methods 0.000 claims description 53
- 239000003990 capacitor Substances 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 8
- 210000004907 gland Anatomy 0.000 claims description 7
- 239000012530 fluid Substances 0.000 claims description 5
- 238000007789 sealing Methods 0.000 claims description 5
- 239000002131 composite material Substances 0.000 claims description 3
- 238000002955 isolation Methods 0.000 claims description 3
- 230000005389 magnetism Effects 0.000 claims description 3
- 239000000725 suspension Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 3
- 229910052705 radium Inorganic materials 0.000 abstract 1
- HCWPIIXVSYCSAN-UHFFFAOYSA-N radium atom Chemical compound [Ra] HCWPIIXVSYCSAN-UHFFFAOYSA-N 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Abstract
This invention relates to one acceleration sensor, which puts one magnetic floater into one non-magnetic materials to form full magnetic fluid non-magnetic chamber, wherein, due to the magnetic floater self magnetic gradient, the magnetic fluid is under magnetic gradient to generate one force to make the floater float in the magnetic fluid and keep middle balance position along non-magnetic chamber radium; when there is acceleration, the magnetic floater move to output acceleration result signals through test device.
Description
Technical Field
The invention relates to the field of production and application of acceleration sensors, in particular to an acceleration sensor based on magnetic fluid.
Background
Acceleration sensors are commonly used in many technical fields, such as automobile motion control, automobile testing, home appliances, game products, office automation, GPS, PDA, mobile phones, vibration detection, construction equipment, and experimental equipment.
The existing acceleration sensor generally has the following structure.
One is a structure in which a steel ball is movably mounted in a housing, and the steel ball relatively moves according to mechanical vibration applied from the outside, and a switch portion designed in a predetermined arrangement according to the displacement generates on or off output.
Another acceleration sensor basically adopts a cantilever beam structure, and comprises a cantilever beam which makes an elastic deformation movement in a reciprocating manner by taking a fixed end of a supporting component fixedly arranged on a substrate as a center, and the magnitude of the external acceleration is determined by detecting the position of the cantilever beam. The common detection method is to use the cantilever beam as the movable electrode plate of the capacitor electrode, and detect the change of the capacitance value to obtain the position of the cantilever beam, thereby obtaining the external acceleration.
The acceleration sensors described above all have the disadvantage of mechanical contact, of mechanical deformation and wear, and of not being able to change the material once manufactured.
Disclosure of Invention
In view of the problems of the prior art, the present invention aims to provide an acceleration sensor, which is based on magnetic fluid and has the characteristics of high precision, wide range, high reliability, intelligence, long service life, etc.
The purpose of the invention is realized by the following technical scheme:
an acceleration sensor comprising: non-magnetic cavity, magnetic fluid, magnetism float, magnetic part and detection device, wherein:
a non-magnetic cavity: the magnetic fluid-filled sealed container is a sealed container made of nonmagnetic materials, and the interior of the sealed container is filled with magnetic fluid;
magnetic floater: the magnetic field suspension type magnetic fluid is made of magnetic materials and is suspended in magnetic fluid in a non-magnetic cavity under the action of a magnetic field;
magnetic part: the magnetic floater magnetic field generating device is composed of a magnetic material, is positioned at the outer ends of two magnetic poles of the magnetic floater and is arranged at the outer side of the non-magnetic cavity;
the detection device comprises: and the magnetic floater detecting device is arranged on the outer side of the non-magnetic cavity and used for detecting the displacement change of the magnetic floater and outputting an acceleration detection result signal.
The acceleration sensor also comprises a magnetic field control device, which is used for changing the viscosity of the magnetic fluid and controlling the displacement of the magnetic floater, and specifically comprises:
controlling a coil: the magnetic floater is wound outside the non-magnetic cavity, and generates a magnetic field through an external current to change the viscosity of the magnetic fluid and control the displacement of the magnetic floater; or may also include the step of,
fixing a coil: the control coil is wound outside the coil fixing sleeve.
The detection device comprises:
shaft end detection device: the magnetic floater acceleration sensor is arranged on the outer sides of the nonmagnetic cavities at the two ends of the magnetic pole of the magnetic floater and used for detecting the displacement change of the magnetic floater and outputting an acceleration detection result signal; and/or the presence of a gas in the gas,
circumferential detection device: the magnetic floater non-magnetic cavity is arranged on the outer side of the non-magnetic cavity in the circumferential direction of the non-magnetic pole direction of the magnetic floater and used for detecting the displacement change of the magnetic floater and outputting an acceleration detection result signal.
The shaft end detection device comprises a magnetic displacement detection element: a Hall element is adopted, is positioned at the outer ends of two magnetic poles of a magnetic floater and is arranged outside a non-magnetic cavity body, the displacement of the magnetic floater is detected, and an acceleration detection result signal is output; and an isolation element can be arranged between the magnetic displacement detection element and the magnetic component;
or,
the circumferential detection device comprises a circumferential displacement detection element, the circumferential displacement detection element comprises two groups of detection capacitors, and the two groups of detection capacitors are axially and bilaterally symmetrically arranged on the outer side surface of the nonmagnetic cavity; wherein:
each group of detection capacitors comprises two semicircular or flat-plate type polar plates, and the two polar plates are axially and symmetrically arranged on the outer side surface of the non-magnetic cavity.
The detection device further comprises a signal processing module, which is specifically used for:
differentially connecting the magnetic displacement detection elements, and optimizing detected acceleration detection result signals; or,
and differentially connecting the two groups of detection capacitors, and optimizing the detected acceleration detection result signals.
The non-magnetic cavity comprises a non-magnetic outer barrel and a non-magnetic end cover, wherein:
openings are formed in two ends of the nonmagnetic outer cylinder, two nonmagnetic end covers are respectively arranged at the two ends of the nonmagnetic outer cylinder to form a nonmagnetic cavity, and the inside of the nonmagnetic cavity is filled with magnetic fluid; or,
one end of the nonmagnetic outer cylinder is provided with an opening, a nonmagnetic end cover is arranged at the opening to form a nonmagnetic cavity, and the inside of the nonmagnetic cavity is filled with magnetic fluid; or,
and a sealing ring is also arranged between the nonmagnetic outer cylinder and the nonmagnetic end cover.
The outer sides of two ends of the non-magnetic cavity are provided with grooves, and if the non-magnetic cavity is a non-magnetic end cover, the non-magnetic cavity is arranged on the non-magnetic end cover and is used for installing a detection device; or,
the non-magnetic cavity is cylindrical, a circumferential ring platform is arranged in the axial middle of the outer wall, and axial bosses are arranged at circumferentially symmetrical positions of the outer wall along the axis direction; the outer side surface of the nonmagnetic cavity is divided into four areas for mounting a detection device; or,
the non-magnetic cavity is a cuboid, and a circumferential boss is arranged in the axial middle of one of two opposite outer walls; a pair of opposite outer side surfaces of the nonmagnetic cavity is divided into four areas for mounting the detection device.
The magnetic fluid is one or a combination of magnetic fluids, magnetic composite fluids or magnetic rheological bodies; or,
the magnetic floater is in a long cylindrical shape, a spherical shape, an ellipsoidal shape or a rectangular shape.
The acceleration sensor also comprises an inner jacket, and the nonmagnetic cavity, the magnetic fluid, the magnetic floater and the detection device are all arranged in the inner jacket; the magnetic field control device can be arranged in the inner jacket or outside the inner jacket;
the inner jacket body comprises an inner jacket sleeve and a gland, the gland and the inner jacket sleeve are fixed by bolts, and the detection device is fixedly arranged in the inner jacket;
when the magnetic field control device is arranged outside the inner jacket, the coil fixing sleeve and the inner jacket sleeve can be integrated.
The acceleration sensor further comprises a shell, the non-magnetic cavity, the magnetic fluid, the magnetic floater and the detection device are all arranged in an inner cavity of the shell, the shell specifically comprises an outer sleeve and an outer end cover, the outer sleeve and the outer end cover are fixed through bolts, and the outer end cover is provided with mounting support legs and/or mounting holes.
According to the technical scheme provided by the invention, the acceleration sensor is characterized in that a magnetic floater is placed in a nonmagnetic cavity filled with magnetic fluid and made of nonmagnetic materials, and the magnetic fluid generates an acting force under the action of the magnetic field gradient due to the magnetic field gradient of the magnetic floater, so that the magnetic floater is suspended in the magnetic fluid and keeps a middle balance position in the radial direction of the nonmagnetic cavity; when acceleration exists, the position of the magnetic floater moves, the displacement change of the magnetic floater is detected through the detection device, and an acceleration detection result signal is output. The invention has novel structure, avoids the characteristics of the traditional cantilever beam structure and magnetic field, suspends the magnetic floater with gradient magnetic field, and can eliminate the influence of radial action; the magnetic floater is in a state of no direct contact with other mechanical parts, so that the magnetic floater has high reliability and long service life, and a special multi-medium gap combination detection capacitor and a magnetic displacement detection element are adopted during detection to detect the displacement of the magnetic motion block, and differential modes are adopted to eliminate various interferences, so that the magnetic floater has the characteristic of high precision; in addition, the invention utilizes the viscosity controllability characteristic of the magnetic fluid, changes the magnetic field intensity applied on the magnetic fluid by changing the current of the control coil, and achieves the purpose of controlling the viscosity of the magnetic fluid, thereby achieving the control of the measuring range of the acceleration sensor and realizing the characteristic of wide measuring range. The method has the characteristics of high precision, wide range, high reliability, intelligence, long service life and the like.
Drawings
Fig. 1 is a schematic perspective exploded view of an acceleration sensor according to the present invention;
FIG. 2 is a schematic structural diagram of an acceleration sensor according to the present invention;
FIG. 3 is a schematic structural diagram of a non-magnetic outer cylinder of an acceleration sensor according to the present invention;
fig. 4 is a diagram of an operating state of an acceleration sensor according to the present invention.
Detailed Description
The core of the invention is that a magnetic moving part (namely, the magnetic floater 1) is arranged in a closed container (namely, a nonmagnetic cavity) which is made of nonmagnetic material and is full of magnetic fluid 14, and the magnetic fluid 14 generates an acting force under the action of the magnetic field gradient due to the magnetic field gradient of the magnetic floater 1, so that the magnetic floater 1 is suspended in the magnetic fluid 14 and keeps a middle balance position in the radial direction of the nonmagnetic cavity; when acceleration exists, the position of the magnetic floater 1 moves, the displacement change of the magnetic floater is detected by the detection device, and an acceleration detection result signal is output.
The structure of the embodiment of the present invention is shown in fig. 1 and 2: the most basic structure of the acceleration sensor comprises: non-magnetic cavity, magnetic fluid 14, magnetic float 1, magnetic part 9 and detection device, wherein:
the nonmagnetic cavity is a closed container made of nonmagnetic materials, and the interior of the nonmagnetic cavity is filled with magnetic fluid 14; the nonmagnetic cavity comprises a nonmagnetic outer cylinder 4 and nonmagnetic end covers 13, wherein two ends of the nonmagnetic outer cylinder 4 in the embodiment are opened, two nonmagnetic end covers 13 are respectively arranged at two ends to form the nonmagnetic cavity, and the inside of the nonmagnetic cavity is filled with magnetic fluid 14. Sometimes, the non-magnetic outer cylinder 4 may be an opening at one end, a non-magnetic end cover 13 is installed at the opening to form a non-magnetic cavity, and the interior of the non-magnetic cavity is filled with magnetic fluid 14. Meanwhile, in order to better realize the sealing (mainly sealing) of the nonmagnetic cavity, a sealing ring 12 is arranged between the nonmagnetic outer cylinder 3 and the nonmagnetic end cover 13 to prevent the magnetic fluid 14 from leaking.
In this example, the outer sides of the two ends of the non-magnetic cavity are provided with grooves, that is, the non-magnetic end cap 13 is provided with grooves for installing the detection device.
As shown in fig. 3, the nonmagnetic cavity in this example is cylindrical, that is, the nonmagnetic outer cylinder 3 is cylindrical, hollow, and has two open ends, and a circumferential ring 16 is arranged at the axial middle part of the outer wall of the nonmagnetic outer cylinder 3, and axial bosses 17 are arranged at the axial symmetrical positions of the outer wall of the nonmagnetic outer cylinder 3 along the axial direction; the outer side surface of the nonmagnetic outer cylinder 3 is divided into four areas for mounting a detection device. Certainly, the non-magnetic cavity is not excluded to be a cuboid, that is, the non-magnetic outer barrel 3 is a cuboid in shape, the inner part is hollow, two ends are open, and a circumferential boss along the circumferential direction is arranged in the axial middle part of one of two groups of outer walls opposite to the cuboid; a pair of opposite outer side surfaces of the nonmagnetic outer cylinder 3 is divided into four areas for mounting a detection device.
The magnetic floater 1 is made of magnetic material and is suspended in the magnetic fluid 14 in the non-magnetic cavity under the action of a magnetic field; the magnetic floater 1 is shaped like a long cylinder, a sphere, an ellipsoid or a rectangle.
The magnetic component 9 is made of magnetic materials, is positioned at the outer ends of the two magnetic poles of the magnetic floater and is arranged at the outer side of the non-magnetic cavity;
the magnetic fluid 14 is any one of or a combination of any several of magnetic fluids such as magnetic fluid, magnetic composite fluid, or magnetic rheological fluid.
The detection device comprises: the detection device in the embodiment is a shaft end detection device which is arranged outside the nonmagnetic cavities at two ends of the magnetic pole of the magnetic floater 1 and is used for detecting the displacement change of the magnetic floater 1 and outputting an acceleration detection result signal; the shaft end detection device comprises a magnetic displacement detection element 7 which is a Hall element, is positioned at the outer ends of two magnetic poles of the magnetic floater 1, is arranged outside the non-magnetic cavity, detects the displacement of the magnetic floater 1 and outputs an acceleration detection result signal; and an isolating element 8 can be arranged between the magnetic displacement detection element 7 and the magnetic component 9; interference of the magnetic member 9 with the magnetic displacement detection element 7 is avoided.
The magnetic displacement sensing element 7, the spacer element 8 and the magnetic means 9 are placed in the above mentioned recess in the non-magnetic end cap 13.
The detection device in this example can also be a circumferential detection device, for example, in order to measure the acceleration more accurately, besides the shaft end detection device, a shaft end detection device and a circumferential detection device can be provided at the same time.
The circumferential detection device is arranged on the outer side of the circumferential nonmagnetic cavity in the nonmagnetic pole direction of the magnetic floater and used for detecting the displacement change of the magnetic floater 1 and outputting an acceleration detection result signal.
The circumferential detection device comprises a circumferential displacement detection element, the circumferential displacement detection element comprises two groups of detection capacitors 6, each group of detection capacitors 6 comprises two semicircular polar plates and four semicircular polar plates in the embodiment, the four semicircular polar plates are respectively arranged in four areas, which are separated by an axial boss 17 and a circumferential ring platform 16, on the outer side surface of the cylindrical nonmagnetic outer cylinder 3, and the axial boss 17 and the circumferential ring platform 16 play roles of positioning and isolating.
For the non-magnetic cavity in the shape of the cuboid, each group of detection capacitors 6 comprises two flat plate type polar plates, namely four flat plate type polar plates, which are respectively arranged in four areas of a pair of opposite outer side surfaces of the non-magnetic outer cylinder 3 and divided by a circumferential boss, wherein the circumferential boss plays roles of positioning and isolating.
The detection device also comprises a signal processing module, a signal processing module and a signal processing module, wherein the signal processing module is specifically used for differentially connecting the magnetic displacement detection elements and optimizing the detected acceleration detection result signals; or, the two groups of detection capacitors are differentially connected, and the detected acceleration detection result signal is optimized. The details are discussed in the principles section.
In order to better complete the measurement work, the acceleration sensor further comprises a magnetic field control device for changing the viscosity of the magnetic fluid and controlling the displacement of the magnetic floater, and specifically comprises a control coil 3 wound outside the non-magnetic cavity and generating a magnetic field by an external current to change the viscosity of the magnetic fluid and control the displacement of the magnetic floater; the control coil 3 is wound on the outer side of the coil fixing sleeve 2, and the coil fixing sleeve 2 is arranged on the outer side of the non-magnetic cavity.
The acceleration sensor also comprises an inner jacket, and the nonmagnetic cavity, the magnetic fluid 14, the magnetic floater 1, the magnetic component 9 and the detection device are all arranged in the inner jacket; the inner jacket comprises an inner jacket sleeve and a gland 10, the gland 10 and the inner jacket sleeve are fixed by bolts, and the gland 10 is in contact with the magnetic part 9 to tightly press the magnetic displacement detection element 7, the isolation element 8 and the magnetic part 9 in grooves on the non-magnetic end cover 13. The magnetic field control device can be arranged in the inner jacket or outside the inner jacket; the magnetic field control device in this example is arranged outside the inner jacket, i.e. the coil fixing sleeve 2.
In order to facilitate installation, the acceleration sensor further comprises an outer shell, the nonmagnetic cavity, the magnetic fluid 14, the magnetic floater 1, the magnetic component 9 and the detection device are all arranged in an inner cavity of the outer shell, the outer shell specifically comprises an outer sleeve 5 and an outer end cover 11, the outer sleeve 5 and the outer end cover 11 are fixed through bolts, and the outer end cover 11 is provided with installation support legs and/or installation holes. Meanwhile, the shell is made of electromagnetic shielding materials, and the whole acceleration sensor is located in the shell, so that interference of an external magnetic field on an internal sensing element is avoided, and influence of the internal magnetic field on the external environment is eliminated.
The working principle of the acceleration sensor is as follows:
the magnetic floater 1 is arranged in the non-magnetic cavity, and on one hand, the magnetic floater 1 is subjected to gravity and buoyancy of the magnetic fluid 14; on the other hand, because the magnetic floater 1 can generate magnetic field gradient itself, and the magnetic fluid 14 has its unique characteristics under the action of the magnetic field gradient, a force can be generated, so that the magnetic floater 1 is suspended in the magnetic fluid 14 and keeps a middle balance position in the radial direction of the cylindrical non-magnetic cavity; when radial acceleration exists, the position of the magnetic floater 1 is deviated in the radial direction, so that the magnetic field gradient is changed, a restoring force is generated, the magnetic floater 1 immediately restores to the middle balance position, and the magnetic floater is insensitive to the radial acceleration, and the influence of the radial acceleration is eliminated.
The non-magnetic end cover 13 is provided with magnetic components 9, the polarity of the magnetic components is opposite to that of the magnetic floater 1, and the magnetic components are respectively arranged on the left and the right, so that the magnetic floater 1 is always under the action of magnetic pole repulsion force. The magnetic float 1 remains axially centred in the cylindrical non-magnetic chamber when not subjected to external axial accelerations. When the magnetic floater 1 is subjected to the action of external axial acceleration, the magnetic floater 1 has a movement tendency in the axial direction relative to the cylindrical nonmagnetic cavity due to the action of inertia, and generates certain displacement. The displacement of the magnetic moving member 1 causes the force of the magnetic member 9 on the magnetic moving member 1 to change, and the end closer to the magnetic member 9 receives a larger repulsive force and the end farther from the magnetic member 9 receives a smaller repulsive force, and in the state shown in fig. 4, the repulsive force received at the left end is reduced and the repulsive force received at the right end is increased, so that the magnetic float 1 tends to move toward the center position, and when the external acceleration force is equal to the repulsive force of the magnetic member 9 on the magnetic float 1, an equilibrium position is reached. The displacement obtained by detection can be used for knowing the magnitude of the axial external acceleration.
In this example, magnetic displacement detecting element 7 adopts hall element, and the motion displacement of magnetic float 1 will accurately detect out through hall element, adopts the hall element differential connection with both sides about, eliminates some interfering signal, offsets the strong signal that the strong magnetic field that magnetic part 9 produced to hall element simultaneously to be favorable to the detection of weak signal, improve and detect the precision.
In this example, the movement displacement of the magnetic float 1 is also detected simultaneously by a special shape capacitance detection method. Two groups of multi-medium semicircular combined detection capacitors 6 with gaps are arranged on the outer layer of the cylindrical nonmagnetic cavity, and the two groups of capacitors and the capacitor plates are positioned and isolated with circumferential ring platforms by using axial bosses on the outer wall of the cylindrical nonmagnetic cavity. When the magnetic float 1 moves in the cylindrical non-magnetic cavity, the dielectric content inside the two detection capacitors 6 is caused to change, thereby changing the capacitance value of the detection capacitors. The detection capacitors on the left side and the right side are differentially connected, so that some interference signals are eliminated, and the detection precision is improved.
The coil fixing sleeve 2 is nested on the outer wall of the cylindrical non-magnetic cavity, the control coil 3 is uniformly wound on the coil fixing sleeve 2, the control coil 3 generates a magnetic field through impressed current control, so that the viscosity of the magnetic fluid 14 is controlled, the control of the viscosity of the magnetic fluid 14 can control the size of the movement displacement of the magnetic floater 1, the control of the measuring range can be realized, and the wide-range effect is achieved.
Therefore, the invention has the following advantages and beneficial effects:
1. the invention has novel structure, avoids the traditional cantilever beam structure and is an innovation on the structure principle of the existing acceleration sensor;
2. the invention adopts the magnetic fluid as an important part in the structure of the acceleration sensor, fully utilizes the unique characteristics of the magnetic fluid, utilizes the characteristic that the magnetic fluid can generate acting force under the action of a gradient magnetic field, suspends the magnetic moving part with the gradient magnetic field and can eliminate the influence of radial action at the same time;
3. the moving block is a magnetic floater 1, magnetic pole repulsion force is generated by magnetic parts arranged at two ends in the acceleration sensor, the moving block is kept to move in the axial direction, and the moving block is in a state of not directly contacting other mechanical parts, so that the reliability is high and the service life is long;
4. the acceleration sensor has high precision by adopting the principle, and the displacement of the magnetic motion block is detected by adopting a special multi-medium gap combined detection capacitor and a magnetic displacement detection element simultaneously in the detection and adopting a differential mode, so that various interferences are eliminated, and the acceleration sensor has the characteristic of high precision;
5. the invention utilizes the controllability characteristic of the viscosity of the magnetic fluid, changes the magnetic field intensity applied on the magnetic fluid by controlling the current of the coil, and achieves the aim of controlling the viscosity of the magnetic fluid, thereby achieving the control of the measuring range of the acceleration sensor and realizing the characteristic of wide measuring range.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (11)
1. An acceleration sensor, characterized by comprising: non-magnetic cavity, magnetic fluid, magnetism float, magnetic part and detection device, wherein:
a non-magnetic cavity: the magnetic fluid-filled sealed container is a sealed container made of nonmagnetic materials, and the interior of the sealed container is filled with magnetic fluid;
magnetic floater: the magnetic field suspension type magnetic fluid is made of magnetic materials and is suspended in magnetic fluid in a non-magnetic cavity under the action of a magnetic field;
magnetic part: the magnetic floater magnetic field generating device is composed of a magnetic material, is positioned at the outer ends of two magnetic poles of the magnetic floater and is arranged at the outer side of the non-magnetic cavity;
the detection device comprises: the magnetic floater displacement sensor is arranged on the outer side of the nonmagnetic cavity and used for detecting the displacement change of the magnetic floater and outputting an acceleration detection result signal;
the outer sides of two ends of the nonmagnetic cavity are provided with grooves for mounting a detection device, the nonmagnetic cavity is cylindrical, the axial middle part of the outer wall is provided with a circumferential annular table, the outer wall is provided with axial bosses at circumferentially symmetrical positions along the axial direction, and the outer side surface of the nonmagnetic cavity is divided into four areas for mounting the detection device;
the magnetic field control device is arranged outside the nonmagnetic cavity and used for changing the viscosity of the magnetic fluid and controlling the displacement of the magnetic floater, and comprises a control coil which is wound outside the nonmagnetic cavity and generates a magnetic field through an external current to change the viscosity of the magnetic fluid and control the displacement of the magnetic floater.
2. An acceleration sensor, characterized by comprising: non-magnetic cavity, magnetic fluid, magnetism float, magnetic part and detection device, wherein:
a non-magnetic cavity: the magnetic fluid-filled sealed container is a sealed container made of nonmagnetic materials, and the interior of the sealed container is filled with magnetic fluid;
magnetic floater: the magnetic field suspension type magnetic fluid is made of magnetic materials and is suspended in magnetic fluid in a non-magnetic cavity under the action of a magnetic field;
magnetic part: the magnetic floater magnetic field generating device is composed of a magnetic material, is positioned at the outer ends of two magnetic poles of the magnetic floater and is arranged at the outer side of the non-magnetic cavity;
the detection device comprises: the magnetic floater displacement sensor is arranged on the outer side of the nonmagnetic cavity and used for detecting the displacement change of the magnetic floater and outputting an acceleration detection result signal;
the outer sides of two ends of the non-magnetic cavity are provided with grooves for mounting a detection device, the non-magnetic cavity is a cuboid, and the axial middle parts of two opposite groups of outer walls are provided with circumferential bosses; a pair of opposite outer side surfaces of the nonmagnetic cavity is divided into four areas for mounting a detection device;
the magnetic field control device is arranged outside the nonmagnetic cavity and used for changing the viscosity of the magnetic fluid and controlling the displacement of the magnetic floater, and comprises a control coil which is wound outside the nonmagnetic cavity and generates a magnetic field through an external current to change the viscosity of the magnetic fluid and control the displacement of the magnetic floater.
3. The acceleration sensor of claim 1 or 2, wherein the magnetic field control device further comprises a coil fixing sleeve, the coil fixing sleeve is sleeved outside the non-magnetic cavity, and the control coil is wound outside the coil fixing sleeve.
4. Acceleration sensor according to claim 1 or 2, characterized in that said detection means comprise:
shaft end detection device: the magnetic floater acceleration sensor is arranged on the outer sides of the nonmagnetic cavities at the two ends of the magnetic pole of the magnetic floater and used for detecting the displacement change of the magnetic floater and outputting an acceleration detection result signal;
the shaft end detection device comprises a magnetic displacement detection element: a Hall element is adopted, is positioned at the outer ends of two magnetic poles of a magnetic floater and is arranged outside a non-magnetic cavity body, the displacement of the magnetic floater is detected, and an acceleration detection result signal is output; an isolation element is arranged between the magnetic displacement detection element and the magnetic part;
circumferential detection device: the peripheral detection device comprises a peripheral displacement detection element, the peripheral displacement detection element comprises two groups of detection capacitors, and the detection capacitors are axially and bilaterally symmetrically arranged on the outer side surface of the nonmagnetic cavity;
the two groups of detection capacitors respectively comprise two semicircular or flat-plate type polar plates, and the two polar plates are axially and symmetrically arranged on the outer side surface of the non-magnetic cavity.
5. The acceleration sensor of claim 4, wherein the detection device further comprises a signal processing module, the signal processing module is configured to differentially connect the magnetic displacement detection elements to optimize the detected acceleration detection result signal.
6. The acceleration sensor of claim 4, wherein the detection device further comprises a signal processing module, and the signal processing module is configured to differentially connect the two sets of detection capacitors to optimize the detected acceleration detection result signal.
7. The acceleration sensor of claim 1 or 2, characterized in that the non-magnetic cavity comprises a non-magnetic outer cylinder and a non-magnetic end cap, wherein:
one end or two ends of the nonmagnetic outer cylinder are opened, and when one end is opened, a nonmagnetic end cover is arranged at the opening end to form a nonmagnetic cavity; when the two ends are open, the two open ends are respectively provided with a non-magnetic end cover to form a non-magnetic cavity.
8. The acceleration sensor of claim 7, characterized in that a sealing ring is provided between the non-magnetic outer cylinder and the non-magnetic end cap.
9. The acceleration sensor of claim 1 or 2, characterized in that the magnetic fluid is one or a combination of two of a magnetic composite fluid or a magnetic rheological fluid; the magnetic floater is spherical, ellipsoidal or rectangular.
10. The acceleration sensor of claim 1 or 2, characterized in that the acceleration sensor further comprises an inner jacket, wherein the non-magnetic cavity, the magnetic fluid, the magnetic float and the detection device are all arranged in the inner jacket;
the inner jacket comprises an inner jacket sleeve and a gland, and the gland and the inner jacket sleeve are fixed by bolts to fixedly install the detection device in the inner jacket.
11. The acceleration sensor according to claim 1 or 2, characterized in that the acceleration sensor further comprises an outer housing, the non-magnetic cavity, the magnetic fluid, the magnetic float and the detection device are all disposed in an inner cavity of the outer housing, the outer housing specifically comprises an outer sleeve and an outer end cover, the outer sleeve and the outer end cover are fixed by bolts, and the outer end cover is provided with mounting legs or mounting holes.
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CN102650649B (en) * | 2011-02-28 | 2014-08-20 | 北京中联博韬科技咨询有限公司 | Accelerometer |
CN104049108B (en) * | 2014-07-01 | 2017-01-11 | 重庆材料研究院有限公司 | Acceleration sensor based on magneto-rheological elastic body |
CN111609870B (en) * | 2015-01-29 | 2022-04-01 | 万渡江 | Large-scale production method of micro-electromechanical system sensor |
CN104765007A (en) * | 2015-04-22 | 2015-07-08 | 北京交通大学 | Magnetic liquid magnetic induction intensity sensor |
US10180445B2 (en) * | 2016-06-08 | 2019-01-15 | Honeywell International Inc. | Reducing bias in an accelerometer via current adjustment |
CN108508230B (en) * | 2017-02-27 | 2021-07-23 | 川崎重工业株式会社 | Acceleration sensor assembly |
CN107957506B (en) * | 2017-10-11 | 2019-11-19 | 杭州电子科技大学 | A kind of three-dimensional acceleration detection method |
CN108548940A (en) * | 2018-06-22 | 2018-09-18 | 西安交通大学 | A kind of acceleration transducer |
CN114526730B (en) * | 2022-01-21 | 2023-06-30 | 华南理工大学 | Motion speed estimation method and device based on magnetic gradient |
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