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CN100428586C - Laser Amplifier and Laser Resonator with Multi-reflection Folding Optical Path Structure - Google Patents

Laser Amplifier and Laser Resonator with Multi-reflection Folding Optical Path Structure Download PDF

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CN100428586C
CN100428586C CNB2007100010094A CN200710001009A CN100428586C CN 100428586 C CN100428586 C CN 100428586C CN B2007100010094 A CNB2007100010094 A CN B2007100010094A CN 200710001009 A CN200710001009 A CN 200710001009A CN 100428586 C CN100428586 C CN 100428586C
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laser
reflector
optical path
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path structure
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CN101017954A (en
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巩马理
黄磊
何发红
柳强
闫平
陆丹
王�琦
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Tsinghua University
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Abstract

本发明属于激光放大器及激光谐振腔技术领域,其特征在于,包括:两片曲面反射镜,以及位于两片曲面反射镜之间的激光增益介质,还可加有位于所述光路结构以外的谐振腔腔镜,该两片曲面反射镜相对倾斜放置,构成非望远非共焦结构,射入所述光路结构的激光束通过所述两个曲面反射镜多次反射形成折叠光路,多次经过增益介质,所述激光光束在所述两片曲面反射镜的其中一片上沿其光轴正入射并被反射,沿原光路返回,在增益介质中往返双程通过,也可斜入射并被反射,在增益介质中单程通过。本发明具有:元件少,结构简单,装调容易,对误差和扰动不敏感,易于实现高效率及高光束质量的输出等优点。

The invention belongs to the technical field of laser amplifiers and laser resonators, and is characterized in that it includes: two curved reflectors, and a laser gain medium located between the two curved reflectors, and a resonator located outside the optical path structure can also be added. Cavity mirror, the two curved mirrors are placed obliquely to form a non-telescopic and non-confocal structure. The laser beam injected into the optical path structure is reflected multiple times by the two curved mirrors to form a folded optical path. Gain medium, the laser beam is normally incident on one of the two curved mirrors along its optical axis and is reflected, returns along the original optical path, passes back and forth in the gain medium, and can also be obliquely incident and reflected , a one-way pass through the gain medium. The invention has the advantages of few components, simple structure, easy assembly and adjustment, insensitive to errors and disturbances, easy to realize output with high efficiency and high beam quality, and the like.

Description

具有多次反射折叠光路结构的激光放大器及激光谐振腔 Laser Amplifier and Laser Resonator with Multi-reflection Folding Optical Path Structure

技术领域 technical field

本发明属于光学领域,尤其涉及激光放大器及激光谐振。The invention belongs to the field of optics, in particular to a laser amplifier and laser resonance.

背景技术 Background technique

由于多次反射折叠光路结构具有能减小光学长度、增加光束在介质内通过的路程及覆盖率、适用于对各种材料的等优点,因而折叠方法得到深入的研究和广泛的应用。多次反射的光路,在激光领域最早多用于气体激光器的折叠波导腔中,后来随着INNOSLAB新型固体激光器(参见Optics Letters,Vol.23,No.18,370~372)的出现,也开始用于固体激光器中。目前各种折叠光路在激光放大器及激光谐振腔的方案主要有以下三种方案:Because the multi-reflection folded optical path structure has the advantages of reducing the optical length, increasing the path and coverage of the light beam passing through the medium, and being suitable for various materials, the folding method has been deeply studied and widely used. The optical path of multiple reflections was first used in the folded waveguide cavity of gas lasers in the laser field. Later, with the emergence of INNOSLAB's new solid-state lasers (see Optics Letters, Vol.23, No.18, 370-372), it also began to be used in solid-state lasers. At present, there are three main schemes for various folded optical paths in laser amplifiers and laser resonators:

方案一,采用平面镜结构,由两片或两片以上平面镜组成反射系统。光束在上述反射镜之间多次反射形成折叠光路(参见第4703491、6654163号美国专利)。Option 1, using a plane mirror structure, the reflection system is composed of two or more plane mirrors. The light beam is reflected multiple times between the mirrors to form a folded optical path (see US Patent Nos. 4703491, 6654163).

方案二,采用两片或两片以上光学镜片组成望远系统的结构。第6256332号美国专利描述了一种望远系统,其谐振腔由4片光学镜片构成,光轴在激光增益介质外部。第6442186号美国专利描述了多种望远系统采用4片光学镜片构成光路结构,并且在其中1片光学镜片中打孔或者局部镀膜来实现激光输出;还描述了三种共焦或近共焦的望远系统,并采用3片光学镜片构成光路结构;也有采用4片光学镜片构成光路结构的。The second option is to use two or more optical lenses to form the structure of the telescopic system. US Patent No. 6256332 describes a telescopic system whose resonant cavity is composed of 4 optical mirrors, and the optical axis is outside the laser gain medium. U.S. Patent No. 6442186 describes a variety of telescopic systems that use 4 optical lenses to form an optical path structure, and one of the optical lenses is drilled or partially coated to achieve laser output; it also describes three types of confocal or near-confocal The telephoto system uses 3 optical lenses to form the optical path structure; there are also 4 optical lenses to form the optical path structure.

方案三,采用两片或两片以上光学镜片组成其他结构的单程反射光路。第6654163号美国专利描述了采用2片光学镜片构成的光路结构,激光光束在其中单程折叠反射通过激光增益介质。第10156081号德国专利描述了采用4片光学镜片构成的光路结构,激光光束在其中单程折叠反射通过激光增益介质。Option three, using two or more optical lenses to form a one-way reflection light path of other structures. US Patent No. 6,654,163 describes an optical path structure composed of two optical lenses, in which the laser beam is folded and reflected in a single pass through the laser gain medium. German Patent No. 10156081 describes an optical path structure composed of 4 optical lenses, in which the laser beam is folded and reflected in a single pass through the laser gain medium.

此外,还有使用平面与曲面反射镜结合的多镜折叠光路系统,可以认为是上述三种方案中各方案的结合(参见第20040076210号美国专利)。In addition, there is a multi-mirror folding optical path system using a combination of plane and curved mirrors, which can be considered as a combination of the above three solutions (see US Patent No. 20040076210).

对于激光放大器及激光谐振腔而言,上述方案均有相应的不足之处:For laser amplifiers and laser resonators, the above solutions have corresponding shortcomings:

方案一中,平面反射镜对装调、对准误差以及外界扰动较为敏感,并且每次反射后,光束的反射角和宽度都会扩大一定倍数,不利于进行多次反射及控制输出光束质量。In Solution 1, the flat mirror is sensitive to adjustment, alignment errors and external disturbances, and after each reflection, the reflection angle and width of the beam will expand by a certain factor, which is not conducive to multiple reflections and control of the quality of the output beam.

方案二中,实现光路折叠的光学镜片需要构成望远系统(又称为共焦结构),其调节需要精确保证各光学镜片的间距、位置、角度等,因此,激光放大器及激光谐振腔的装调精度要求很高,对装调误差和外界扰动较为敏感,工作稳定性和可靠性较低。其中,某些光路结构由3片、4片及更多光学镜片组成,结构复杂,装调更为困难。In the second scheme, the optical lenses that realize the optical path folding need to form a telescopic system (also called a confocal structure), and its adjustment needs to accurately ensure the distance, position, angle, etc. of each optical lens. Therefore, the installation of the laser amplifier and laser resonator The adjustment accuracy is very high, it is more sensitive to the adjustment error and external disturbance, and the working stability and reliability are relatively low. Among them, some optical path structures are composed of 3, 4 or more optical lenses, which are complex in structure and more difficult to install and adjust.

方案三中,实现光路折叠的光学镜片也同样需要构成望远系统(又称为共焦结构),由于结构的限制,激光仅能在腔内单程折叠反射,单程通过激光增益介质,吸收不够充分,激光放大器及激光谐振腔的工作效率较低。同样,某些光路结构由3片、4片及更多光学镜片组成,结构复杂,装调更为困难。In the third scheme, the optical lens to realize the folding of the optical path also needs to form a telescopic system (also known as a confocal structure). Due to the limitation of the structure, the laser can only be folded and reflected in the cavity one way, and the laser gain medium can pass through the laser gain medium one way, and the absorption is not sufficient. , the working efficiency of the laser amplifier and the laser resonator is low. Similarly, some optical path structures are composed of 3, 4 or more optical lenses, which are complex in structure and more difficult to install and adjust.

发明内容 Contents of the invention

本发明的目的在于提出一种具有多次反射折叠光路结构的激光放大器及激光谐振腔。通过这种新型的光路结构,克服现有技术的缺点,能够普遍适用于激光放大器及激光谐振腔或别的光学系统。现有技术的激光放大器,采用望远结构或共焦结构,结构复杂,装调困难,不能形成往返双程反射,激光放大不够充分;现有技术的激光谐振腔,采用望远结构或共焦结构,结构复杂,装调困难,对装调误差和外界扰动较为敏感,工作稳定性和可靠性较低,不能形成往返双程反射,激光振荡效率不高。本发明提出的激光放大器及谐振腔,其中,激光光束随反射次数增加扩大或缩小不严重;激光光束在增益介质中往返双程通过,吸收充分,效率高;光学镜片数量少,结构简单,装调容易,对由装调过程和使用过程中产生的误差和干扰不敏感,激光放大器及谐振腔工作稳定,可靠性高。The object of the present invention is to provide a laser amplifier and a laser resonant cavity with a multi-reflection folded optical path structure. The novel optical path structure overcomes the disadvantages of the prior art, and can be generally applied to laser amplifiers, laser resonant cavities or other optical systems. The laser amplifier in the prior art adopts a telescopic structure or a confocal structure, which is complex in structure, difficult to install and adjust, cannot form a round-trip two-way reflection, and the laser amplification is not sufficient; the laser resonator in the prior art adopts a telescopic structure or a confocal structure. Structure, complex structure, difficult installation and adjustment, sensitive to installation and adjustment errors and external disturbances, low working stability and reliability, unable to form round-trip two-way reflection, and low laser oscillation efficiency. In the laser amplifier and resonant cavity proposed by the present invention, the expansion or shrinkage of the laser beam is not serious with the increase of the number of reflections; the laser beam passes back and forth in the gain medium, with sufficient absorption and high efficiency; the number of optical lenses is small, the structure is simple, and the installation Easy to adjust, insensitive to errors and disturbances generated during the installation and use process, the laser amplifier and resonator work stably and have high reliability.

本发明提出的激光放大器,具有多次反射折叠光路结构,该光路结构包括两片曲面反射镜,以及位于两片曲面反射镜之间的激光增益介质;两片曲面反射镜相对倾斜放置,构成非望远非共焦结构;射入多次反射折叠光路结构的激光光束通过两个曲面反射镜多次反射,形成折叠光路,多次经过增益介质。The laser amplifier proposed by the present invention has a multi-reflection folded optical path structure, and the optical path structure includes two curved reflectors and a laser gain medium between the two curved reflectors; the two curved reflectors are placed obliquely to form an The telephoto non-confocal structure; the laser beam injected into the multi-reflection folded optical path structure is reflected multiple times by two curved mirrors to form a folded optical path and passes through the gain medium multiple times.

上述的激光放大器中,光路结构中两片曲面反射镜的放置,使得激光光束在两片曲面反射镜的其中一片上沿其光轴正入射并被反射,沿原光路返回,从而激光光束在曲面反射镜上的反射次数增加一倍,在增益介质中往返双程通过。In the above-mentioned laser amplifier, the placement of two curved mirrors in the optical path structure makes the laser beam incident on one of the two curved mirrors along its optical axis and is reflected, and returns along the original optical path, so that the laser beam is on the curved surface The number of reflections on the mirror is doubled, making a double pass back and forth in the gain medium.

上述的激光放大器中,光路结构中两片曲面反射镜的放置,使得激光光束在两片曲面反射镜上沿其光轴斜入射并被反射,激光光束在增益介质中单程通过。In the above-mentioned laser amplifier, the placement of the two curved mirrors in the optical path structure makes the laser beam obliquely incident on the two curved mirrors along the optical axis and reflected, and the laser beam passes through the gain medium one way.

本发明提出的激光谐振腔,具有多次反射折叠光路结构,该光路结构包括两片曲面反射镜,位于两片曲面反射镜之间的激光增益介质,以及位于光路结构之外的谐振腔腔镜;两片曲面反射镜相对倾斜放置,构成非望远非共焦结构;射入多次反射折叠光路结构的激光光束通过两个曲面反射镜多次反射,形成折叠光路,多次经过增益介质。The laser resonant cavity proposed by the present invention has a multi-reflection folded optical path structure, and the optical path structure includes two curved mirrors, a laser gain medium located between the two curved mirrors, and a resonant cavity mirror located outside the optical path structure ; Two curved mirrors are placed obliquely to form a non-telescopic and non-confocal structure; the laser beam injected into the multi-reflection folded optical path structure is reflected multiple times by the two curved mirrors to form a folded optical path and passes through the gain medium multiple times.

上述的激光谐振腔中,光路结构中两片曲面反射镜的放置,使得激光光束在两片曲面反射镜的其中一片上沿其光轴正入射并被反射,沿原光路返回,从而激光光束在曲面反射镜上的反射次数增加一倍,在增益介质中往返双程通过,折叠次数增加一倍。In the above-mentioned laser resonant cavity, the placement of two curved mirrors in the optical path structure makes the laser beam incident on one of the two curved mirrors along its optical axis and is reflected, and returns along the original optical path, so that the laser beam is in the Twice the number of reflections on the curved mirror, double the number of folds in the round-trip pass in the gain medium.

上述的激光谐振腔中,光路结构中的两片曲面反射镜的放置,使得激光光束在两片曲面反射镜上沿其光轴斜入射并被反射,激光光束在增益介质中单程通过。In the above-mentioned laser resonator, the placement of the two curved mirrors in the optical path structure makes the laser beam obliquely incident and reflected along the optical axis of the two curved mirrors, and the laser beam passes through the gain medium one way.

上述的激光谐振腔中,谐振腔腔镜是凸透镜或凹透镜。In the above-mentioned laser resonator, the cavity mirror is a convex lens or a concave lens.

上述的激光谐振腔中,在多次反射折叠光路结构与谐振腔腔镜之间,还设置倍频器件、调Q器件、锁模器件,构成相应的激光光路。In the above-mentioned laser resonator, a frequency doubling device, a Q-switching device, and a mode-locking device are also arranged between the multi-reflection folded optical path structure and the resonator cavity mirror to form a corresponding laser optical path.

本发明与现有技术相比,具有以下优点:本发明的激光放大器及激光谐振腔中的光路结构采用曲面反射镜相对倾斜放置,构成非望远非共焦结构的折叠光路,结构简单,使用光学元件少,对于两个曲面反射镜地位置、距离和角度,要求不严格,装调容易,对误差和扰动不敏感,实际操作性强;激光光束在较小的激光增益介质的体积内可实现往返双程多次反射,多次通过增益介质,并且经过多次反射后光束宽度变化不大,更易于实现高功率及高光束质量的输出;能够同时适用于激光放大器及激光谐振腔。Compared with the prior art, the present invention has the following advantages: the optical path structure in the laser amplifier and the laser resonator of the present invention adopts curved surface reflectors to be placed obliquely to form a folded optical path with a non-telescopic and non-confocal structure, and the structure is simple and easy to use. There are few optical components, the requirements for the position, distance and angle of the two curved mirrors are not strict, the installation and adjustment are easy, insensitive to errors and disturbances, and the practical operability is strong; the laser beam can be controlled within a small volume of the laser gain medium Realize round-trip multiple reflections, pass through the gain medium multiple times, and the beam width does not change much after multiple reflections, and it is easier to achieve high-power and high-beam quality output; it can be applied to both laser amplifiers and laser resonators.

附图说明 Description of drawings

图1为本发明提出的激光谐振腔的第一实施例的示意图。FIG. 1 is a schematic diagram of a first embodiment of a laser resonator provided by the present invention.

图2为本发明提出的激光谐振腔的第二实施例的示意图。FIG. 2 is a schematic diagram of a second embodiment of the laser resonator provided by the present invention.

图3为本发明提出的激光谐振腔的第三实施例的示意图。FIG. 3 is a schematic diagram of a third embodiment of the laser resonator provided by the present invention.

图4为本发明提出的激光谐振腔的第四实施例的示意图。FIG. 4 is a schematic diagram of a fourth embodiment of the laser resonator provided by the present invention.

图5为本发明提出的激光谐振腔的第五实施例的示意图。FIG. 5 is a schematic diagram of a fifth embodiment of the laser resonator provided by the present invention.

图6为本发明提出的激光谐振腔的第六实施例的示意图。FIG. 6 is a schematic diagram of a sixth embodiment of the laser resonator provided by the present invention.

图7为本发明提出的激光谐振腔的第七实施例的示意图。FIG. 7 is a schematic diagram of a seventh embodiment of the laser resonator provided by the present invention.

图8为本发明提出的激光谐振腔的第八实施例的示意图。FIG. 8 is a schematic diagram of an eighth embodiment of the laser resonator provided by the present invention.

图9为本发明提出的激光放大器的第一实施例的示意图。FIG. 9 is a schematic diagram of the first embodiment of the laser amplifier proposed by the present invention.

图10为本发明提出的激光放大器的第二实施例的示意图。FIG. 10 is a schematic diagram of a second embodiment of the laser amplifier proposed by the present invention.

具体实施方式 Detailed ways

本发明提出的具有多次反射折叠光路结构的激光谐振腔如图1所示,包括反射镜1、反射镜1的法线光轴2、腔镜6、激光增益介质7、反射镜8、反射镜8的法线光轴3,其中,5、10表示激光光束,4、9、11指示泵浦光泵浦方向。其中,凸面反射镜8的法线光轴3水平放置,凹面反射镜1的法线光轴2倾斜放置,构成非望远非共焦光路结构。在凸面反射镜8和凹面反射镜1构成的非望远非共焦多次折叠光路结构之外,垂直于光束5放置腔镜6,构成激光谐振腔。在腔镜6与光路结构之间,也可放入其他器件,如倍频器件、调Q器件、锁模器件等。The laser resonant cavity with multi-reflection folded optical path structure proposed by the present invention is shown in Figure 1, including a reflector 1, a normal optical axis 2 of the reflector 1, a cavity mirror 6, a laser gain medium 7, a reflector 8, a reflector The normal optical axis 3 of the mirror 8, wherein 5 and 10 indicate the laser beam, and 4, 9 and 11 indicate the pumping direction of the pumping light. Wherein, the normal optical axis 3 of the convex reflector 8 is placed horizontally, and the normal optical axis 2 of the concave reflector 1 is placed obliquely, forming a non-telescopic and non-confocal optical path structure. In addition to the non-telescopic and non-confocal multiple folded optical path structure formed by the convex reflector 8 and the concave reflector 1, a cavity mirror 6 is placed perpendicular to the light beam 5 to form a laser resonant cavity. Between the cavity mirror 6 and the optical path structure, other devices, such as frequency doubling devices, Q-switching devices, and mode-locking devices, can also be placed.

法线光轴2、3相交于凹面反射镜1的中心,交角为α,假设光轴3为水平方向,且激光光束5与光轴3成θ角,则二者应满足如下公式所述的关系。设反射镜1半径R1,反射镜8半径R2,反射镜1与反射镜8的中心间距L,光束5与反射镜8的交点与光轴3距离h,经过N个来回(一个来回定义为:首先经过反射镜8反射,经过传播L距离到反射镜1,然后经反射镜1反射,再次传播L距离至反射镜8)。光束5最终正入射到反射镜8上面,沿方向光轴3传播并被反射,又反方向沿方向光轴3传播,最后反方向沿着原光路折叠传播,形成往返的两次折叠光路。采用矩阵光学传输理论,反射镜1的传输矩阵M1、自由空间传输L的传输矩阵M2、反射镜8的传输矩阵M3分别为:The normal optical axes 2 and 3 intersect at the center of the concave mirror 1, and the intersection angle is α. Assuming that the optical axis 3 is in the horizontal direction, and the laser beam 5 forms an angle θ with the optical axis 3, the two should satisfy the following formula relation. Let the radius R1 of the reflector 1, the radius R2 of the reflector 8, the distance L between the centers of the reflector 1 and the reflector 8, and the distance h between the intersection point of the light beam 5 and the reflector 8 and the optical axis 3 pass through N round trips (one round trip is defined as: Firstly, it is reflected by the mirror 8, travels L distance to the mirror 1, and then is reflected by the mirror 1, and travels L distance to the mirror 8 again). The light beam 5 is finally incident on the mirror 8, propagates along the optical axis 3 and is reflected, and propagates along the optical axis 3 in the opposite direction, and finally folds and propagates along the original optical path in the opposite direction, forming a double folded optical path back and forth. Using the matrix optical transmission theory, the transmission matrix M1 of mirror 1, the transmission matrix M2 of free space transmission L, and the transmission matrix M3 of mirror 8 are respectively:

Mm 11 == 11 00 -- 22 // RR 11 11 ,, Mm 22 == 11 LL 00 11 ,, Mm 33 == 11 00 -- 22 // RR 22 11 ..

共轴时传播一个来回传输矩阵M满足:When coaxial, a round-trip transmission matrix M satisfies:

M=M3M2M1M2 M=M 3 M 2 M 1 M 2

N次反射后在凸面镜前的光束矩阵满足:The beam matrix in front of the convex mirror after N reflections satisfies:

hh ′′ θθ ′′ == Mm NN hh θθ

采用增广矩阵方法表示反射镜1倾斜的影响,由于反射镜1初始失调量为

Figure C20071000100900065
,经过N次反射后,在反射镜8中心前的高度失调量Δh和角度失调量Δθ为:The augmented matrix method is used to represent the influence of the tilt of the mirror 1, since the initial misalignment of the mirror 1 is
Figure C20071000100900065
, after N times of reflection, the height misalignment Δh and angle misalignment Δθ in front of the center of mirror 8 are:

ΔhΔh ΔθΔθ == ΣΣ kk == 11 NN Mm kk 00 αα

加入倾斜后,应满足:After adding tilt, it should satisfy:

00 00 == Mm NN hh θθ ++ ΔhΔh ΔθΔθ

经计算,当L=25mm,R1=625mm,R2=516mm,h=9mm时,调节θ和α可使激光光束在反射镜1上反射6次,即激光光束10方向传播至激光光束5方向一共通过增益介质14次,且在增益介质上部较为密集,以板条形固体增益介质为例,泵浦光可以从增益介质上部沿泵浦方向11注入,以达到较高的系统效率。泵浦光也可以从水平泵浦方向4、9注入增益介质。After calculation, when L=25mm, R1=625mm, R2=516mm, and h=9mm, adjusting θ and α can make the laser beam reflect 6 times on the mirror 1, that is, the direction of the laser beam 10 propagates to the direction of the laser beam 5. Pass through the gain medium 14 times, and the upper part of the gain medium is relatively dense. Taking the slab-shaped solid gain medium as an example, the pump light can be injected from the upper part of the gain medium along the pumping direction 11 to achieve higher system efficiency. Pump light can also be injected into the gain medium from the horizontal pump direction 4,9.

图2为本发明提出的具有多次反射折叠光路结构的激光谐振腔的第二实施例,包括反射镜1、反射镜1的法线光轴2、腔镜6、激光增益介质7、反射镜8、反射镜8的法线光轴3,其中,5、10表示激光光束,4、9、11指示泵浦光泵浦方向。其中,凸面反射镜8的法线光轴3水平放置,凹面反射镜1的法线光轴2倾斜放置,构成非望远非共焦光路结构。在凸面反射镜8和凹面反射镜1构成的非望远非共焦多程折叠光路结构之外,腔镜6垂直于激光光束5放置,构成激光谐振腔。在腔镜6与光路结构之间,也可放入其他器件,如倍频器件、调Q器件、锁模器件等,实现激光输出。Fig. 2 is the second embodiment of the laser cavity with multi-reflection folded optical path structure proposed by the present invention, including reflector 1, normal optical axis 2 of reflector 1, cavity mirror 6, laser gain medium 7, reflector 8. The normal optical axis 3 of the reflector 8, wherein 5 and 10 indicate the laser beam, and 4, 9 and 11 indicate the pumping direction of the pumping light. Wherein, the normal optical axis 3 of the convex reflector 8 is placed horizontally, and the normal optical axis 2 of the concave reflector 1 is placed obliquely, forming a non-telescopic and non-confocal optical path structure. In addition to the non-telescopic non-confocal multi-pass folded optical path structure formed by the convex reflector 8 and the concave reflector 1, the cavity mirror 6 is placed perpendicular to the laser beam 5 to form a laser resonant cavity. Other devices, such as frequency doubling devices, Q-switching devices, and mode-locking devices, can also be placed between the cavity mirror 6 and the optical path structure to realize laser output.

其中,h、θ和α应满足:Among them, h, θ and α should satisfy:

00 00 == Mm NN -- 11 Mm 33 hh θθ ++ ΣΣ Mm kk 00 αα

同样,在L=25mm,R1=625mm,R2=516mm,h=9mm的条件下,调节θ和α可使激光光束在凹面镜上反射7次,即激光光束11方向传播至激光光束5方向一共通过增益介质16次,且增益介质上部较为密集,以板条形固体增益介质为例,泵浦光可以从增益介质上部沿泵浦方向11注入,以达到较高的系统效率,另外,泵浦光也可以从水平泵浦方向4、9注入增益介质。Similarly, under the conditions of L=25mm, R1=625mm, R2=516mm, and h=9mm, adjusting θ and α can make the laser beam reflect 7 times on the concave mirror, that is, the direction of the laser beam 11 propagates to the direction of the laser beam 5. The gain medium passes through the gain medium 16 times, and the upper part of the gain medium is relatively dense. Taking the slab-shaped solid gain medium as an example, the pump light can be injected from the upper part of the gain medium along the pumping direction 11 to achieve higher system efficiency. In addition, the pump light Light can also be injected into the gain medium from the horizontal pump direction 4,9.

对于上述2个实施例,反射镜1和反射镜8的相对位置、激光光束5的出射方向等的改变,激光谐振腔的光路结构对应有其他多种组合情况(图3~图8),同样可以采用所述矩阵光学理论进行类似的分析和计算。图3~图8的具体描述,与图1~图2类似。其中,凸面反射镜8与凹面反射镜1的法线光轴相对倾斜放置,构成非望远非共焦光路结构。在凸面反射镜8和凹面反射镜1构成的非望远非共焦多程折叠光路结构之外,腔镜6垂直于激光光束5放置,构成激光谐振腔。在腔镜6与光路结构之间,也可放入其他器件,如倍频器件、调Q器件、锁模器件等,实现激光输出。图3中,凹面反射镜1的法线光轴倾斜放置,激光光束5从光路结构的左边出射,多次反射后的激光光束正入射至凹面反射镜1,反射后沿原光路返回;图4中,凸面反射镜8的法线光轴倾斜放置,激光光束5从光路结构的左边出射,多次反射后激光光束正入射至凸面反射镜8,反射后沿原光路返回;图5中,凹面反射镜1的法线光轴倾斜放置,激光光束5从光路结构的右边出射,多次反射后激光光束正入射至凹面反射镜1,反射后沿原光路返回;图6中,凸面反射镜8的法线光轴倾斜放置,激光光束5从光路结构的右边出射,多次反射后激光光束正入射至凹面反射镜1,反射后沿原光路返回;图7中,凹面反射镜1的法线光轴倾斜放置,激光光束5从光路结构的右边出射,多次反射后激光光束正入射至凸面反射镜8,反射后沿原光路返回;图8中,凸面反射镜8的法线光轴倾斜放置,激光光束5从光路结构的右边出射,多次反射后激光光束正入射至凸面反射镜8,反射后沿原光路返回。其他具体细节在此不再赘述。For above-mentioned 2 embodiments, the relative position of reflecting mirror 1 and reflecting mirror 8, the change of the outgoing direction of laser beam 5 etc., the light path structure of laser resonator correspondingly has other multiple combinations (Fig. 3~Fig. 8), similarly Similar analyzes and calculations can be performed using the matrix optics theory. The specific descriptions of FIGS. 3 to 8 are similar to those of FIGS. 1 to 2 . Wherein, the normal optical axis of the convex reflector 8 and the concave reflector 1 is placed obliquely relative to each other, forming a non-telescopic and non-confocal optical path structure. In addition to the non-telescopic non-confocal multi-pass folded optical path structure formed by the convex reflector 8 and the concave reflector 1, the cavity mirror 6 is placed perpendicular to the laser beam 5 to form a laser resonant cavity. Other devices, such as frequency doubling devices, Q-switching devices, and mode-locking devices, can also be placed between the cavity mirror 6 and the optical path structure to realize laser output. In Fig. 3, the normal optical axis of the concave reflector 1 is placed obliquely, the laser beam 5 emerges from the left side of the optical path structure, the laser beam after multiple reflections is incident on the concave reflector 1, and returns along the original optical path after reflection; Fig. 4 Among them, the normal optical axis of the convex mirror 8 is placed obliquely, and the laser beam 5 emerges from the left side of the optical path structure. After multiple reflections, the laser beam is incident on the convex mirror 8, and returns along the original optical path after reflection; in Fig. 5, the concave The normal optical axis of the reflector 1 is placed obliquely, and the laser beam 5 exits from the right side of the optical path structure. After multiple reflections, the laser beam is incident on the concave reflector 1, and returns along the original optical path after reflection; in Fig. 6, the convex reflector 8 The normal optical axis of is placed obliquely, and the laser beam 5 emerges from the right side of the optical path structure. After multiple reflections, the laser beam is incident on the concave reflector 1, and returns along the original optical path after reflection; in Fig. 7, the normal of the concave reflector 1 The optical axis is placed obliquely, and the laser beam 5 emerges from the right side of the optical path structure. After multiple reflections, the laser beam is incident on the convex reflector 8, and returns along the original optical path after reflection; in Figure 8, the normal optical axis of the convex reflector 8 is inclined Placed, the laser beam 5 emerges from the right side of the optical path structure, and after multiple reflections, the laser beam is incident on the convex mirror 8, and returns along the original optical path after reflection. Other specific details will not be repeated here.

上述8个实施例中,所描述的激光谐振腔的多次反射折叠光路结构同样适用于激光放大器,可以构成相对应的激光放大器。以图1所示的本发明提出的第一实施例为例,图9给出该实施例对应的激光放大器的第一实施例。In the above eight embodiments, the described multi-reflection folded optical path structure of the laser resonator is also applicable to the laser amplifier, and can constitute a corresponding laser amplifier. Taking the first embodiment of the present invention shown in FIG. 1 as an example, FIG. 9 shows a first embodiment of a laser amplifier corresponding to this embodiment.

图9中,凸面反射镜8的法线光轴3水平放置,凹面反射镜1的法线光轴2倾斜放置,构成非望远非共焦光路结构。在凸面反射镜8和凹面反射镜1构成的非望远非共焦多程折叠光路结构之外,待放大的主振荡器的激光光束12,通过偏振反射镜13、λ/2波片15,法拉第旋转器16,射入多次反射折叠光路结构的激光放大器,折叠光路结构的具体参数同图1中所示一致,因此由偏振反射镜反射输出,如激光光束14所示,同样,泵浦光可沿方向4、激光光束经过放大后沿激光光束12原路返回,再次经过法拉第旋转器16,λ/2波片15,9或方向11注入。In FIG. 9 , the normal optical axis 3 of the convex reflector 8 is placed horizontally, and the normal optical axis 2 of the concave reflector 1 is placed obliquely, forming a non-telescopic and non-confocal optical path structure. Outside the non-telescopic non-confocal multi-pass folded optical path structure formed by the convex reflector 8 and the concave reflector 1, the laser beam 12 of the main oscillator to be amplified passes through the polarizing reflector 13 and the λ/2 wave plate 15, The Faraday rotator 16 is injected into the laser amplifier of the folded optical path structure of multiple reflections, and the specific parameters of the folded optical path structure are consistent with those shown in Figure 1, so the reflection output by the polarizing reflector is shown in the laser beam 14. Similarly, the pump The light can be injected along the direction 4, the laser beam is amplified and then along the original path of the laser beam 12, and then injected through the Faraday rotator 16, the λ/2 wave plate 15, 9 or the direction 11.

与此类似,对于本发明的其他7个实施例,分别对应激光放大器的实施例,在此不再逐一赘述。Similarly, for the other seven embodiments of the present invention, they respectively correspond to embodiments of laser amplifiers, and will not be repeated here.

图10为本发明提出的具有多次反射折叠光路结构的激光放大器的第二实施例,包括反射镜1、反射镜1的法线光轴2、激光增益介质7、反射镜8、反射镜8的法线光轴3,其中,5、10表示激光光束,6、9指示泵浦光泵浦方向。其中,凹面反射镜1的法线光轴2水平放置,凸面反射镜8的法线光轴3倾斜放置,构成非望远非共焦光路结构。待放大的主振荡器的激光光束5,射入具有多次反射折叠光路结构的激光放大器,经过多次反射,激光光束在激光增益介质7中单程通过,沿激光光束10输出。Fig. 10 is the second embodiment of the laser amplifier with multi-reflection folded optical path structure proposed by the present invention, including a mirror 1, a normal optical axis 2 of the mirror 1, a laser gain medium 7, a mirror 8, and a mirror 8 The normal optical axis 3 of , where 5 and 10 indicate the laser beam, and 6 and 9 indicate the pumping direction of the pumping light. Wherein, the normal optical axis 2 of the concave reflector 1 is placed horizontally, and the normal optical axis 3 of the convex reflector 8 is placed obliquely, forming a non-telescopic and non-confocal optical path structure. The laser beam 5 of the main oscillator to be amplified is injected into the laser amplifier with a multi-reflection folded optical path structure. After multiple reflections, the laser beam passes through the laser gain medium 7 one way and is output along the laser beam 10 .

Claims (4)

1.一种激光放大器,其特征在于:所述激光放大器具有多次反射折叠光路结构,该光路结构包括一片凹面反射镜、一片凸面反射镜以及激光增益介质,所述激光增益介质位于所述凹面反射镜和所述凸面反射镜之间;所述凹面反射镜和所述凸面反射镜相对倾斜放置,构成非望远非共焦结构;所述凹面反射镜的法线光轴和所述凸面反射镜的法线光轴相交于所述凹面反射镜或所述凸面反射镜的中心,射入所述光路结构的激光光束在所述凹面反射镜和所述凸面反射镜之间多次反射从而多次经过所述激光增益介质,然后正入射至所述凹面反射镜或所述凸面反射镜,反射后沿原光路返回,射出所述光路结构。1. A laser amplifier, characterized in that: the laser amplifier has multiple reflection folded optical path structures, the optical path structure comprises a concave reflector, a convex reflector and a laser gain medium, and the laser gain medium is positioned at the concave surface between the reflector and the convex reflector; the concave reflector and the convex reflector are relatively inclined to form a non-telescopic and non-confocal structure; the normal optical axis of the concave reflector and the convex reflector The normal optical axis of the mirror intersects the center of the concave reflector or the convex reflector, and the laser beam injected into the optical path structure is reflected multiple times between the concave reflector and the convex reflector so that After passing through the laser gain medium for a second time, it is normally incident on the concave reflector or the convex reflector, returns along the original optical path after reflection, and exits the optical path structure. 2.一种激光谐振腔,其特征在于:所述激光谐振腔包括多次反射折叠光路结构以及位于该光路结构之外的谐振腔腔镜,所述光路结构包括一片凹面反射镜、一片凸面反射镜以及激光增益介质,所述激光增益介质位于所述凹面反射镜和所述凸面反射镜之间;所述凹面反射镜和所述凸面反射镜相对倾斜放置,构成非望远非共焦结构;所述凹面反射镜的法线光轴和所述凸面反射镜的法线光轴相交于所述凹面反射镜或所述凸面反射镜的中心,射入所述光路结构的激光光束在所述凹面反射镜和所述凸面反射镜之间多次反射从而多次经过所述激光增益介质,然后正入射至所述凹面反射镜或所述凸面反射镜,反射后沿原光路返回,从所述谐振腔腔镜出射。2. A laser resonant cavity, characterized in that: the laser resonant cavity includes a multi-reflection folded optical path structure and a resonant cavity cavity mirror positioned outside the optical path structure, and the optical path structure includes a concave reflector, a convex reflector A mirror and a laser gain medium, the laser gain medium is located between the concave reflector and the convex reflector; the concave reflector and the convex reflector are relatively inclined to form a non-telescopic and non-confocal structure; The normal optical axis of the concave reflector and the normal optical axis of the convex reflector intersect at the center of the concave reflector or the convex reflector, and the laser beam entering the optical path structure is on the concave surface Multiple reflections between the reflector and the convex reflector, thereby passing through the laser gain medium multiple times, and then being normal incident on the concave reflector or the convex reflector, returning along the original optical path after reflection, from the resonance Laparoscopic exit. 3.根据权利要求2所述的激光谐振腔,其特征在于,所述谐振腔腔镜是凸透镜或凹透镜。3. The laser resonator according to claim 2, wherein the cavity mirror is a convex lens or a concave lens. 4.根据权利要求2所述的激光谐振腔,其特征在于,所述激光谐振腔还包括在所述光路结构与所述谐振腔腔镜之间设置的倍频器件、调Q器件或锁模器件。4. The laser resonator according to claim 2, wherein the laser resonator further comprises a frequency doubling device, a Q-switching device or a mode-locking device arranged between the optical path structure and the resonator cavity mirror device.
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CN110021872B (en) * 2019-05-21 2024-04-09 南京钻石激光科技有限公司 Multi-pass optical amplifier with single gain medium
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