CN100427995C

CN100427995C - Device for homogenizing light and arrangement for illuminating or focussing with said device

Info

Publication number: CN100427995C
Application number: CNB2004800423354A
Authority: CN
Inventors: 托马斯·米特拉
Original assignee: Hentze Lissotschenko Patentverwaltungs GmbH and Co KG
Current assignee: Hentze Lissotschenko Patentverwaltungs GmbH and Co KG
Priority date: 2004-03-06
Filing date: 2004-08-20
Publication date: 2008-10-22
Anticipated expiration: 2024-08-20
Also published as: WO2005085934A1; CN1997928A

Abstract

A device for homogenizing light, comprising at least one homogenizer (5, 6) having an input surface (7) and an output surface (8) for the light that is to be homogenized, in addition to, respectively, an array of cylinder lenses (9) on the input surface (7) and an array of cylinder lenses (9) on the output surface (8) of the at least one homogenizer (5, 6). The cylinder axes of the cylinder lenses (9) of the at least one homogenizer (5, 6) are oriented in a parallel manner in relation to each other. The invention also relates to an arrangement for illuminating a surface and to an arrangement for focussing the light from a laser light source into a linear focussing area.

Description

Be used to make the device of light uniformization and the structure of throwing light on this device

Technical field

The present invention relates to a kind ofly be used to make the device of light uniformization and the structure of the face that is used to throw light on.

Background technology

A kind of device of the above-mentioned type is open by United States Patent (USP) 4733944. and the wherein described device of light uniformization that makes comprises two uniformization elements that spacing is arranged mutually, and each uniformization element comprises two optical function boundary surfaces, want homogenized light pass these boundary surfaces. on these four each face, arranging a column lens array respectively to the contributive boundary surface of homogenising. each in these two even elements that spacing arranged mutually all has two cross one another column lens array. and for example the column lens array on the plane of incidence has cylinder axis on the vertical direction in a uniformization element, and the lens pillar on the exit facet has the cylinder axis on the horizontal direction.

Can make laser beam by means of this device of light uniformization that makes, for example ray that sends by excimer laser or the laser beam that penetrates by laser diode bar, not only on first direction, and it is all homogenized on the vertical second direction of direction therewith. for example under the situation in laser diode bar, can be not only on so-called fast axle by this device of light uniformization that makes, and on so-called slow axis, realize homogenising. be configured to so-called two-stage uniforming device by above-mentioned prior art known devices in addition, because want homogenized ray in each uniformization element, to experience one time homogenising. by the two-stage equipment of this device, realized the homogeneity of obviously improving than single-stage uniforming device.

Shortcoming as this two-stage uniforming device well known in the prior art, two uniformization elements are difficult to regulate. and these uniformization elements must very strictly be located mutually, wherein each uniformization element must accurately be regulated six axles altogether. and the focal length of the lens pillar of array can not freely be selected in addition, because for two separate homogenising directions, for example each in slow axis and the fast axle provides the lens pillar mutual spacing an of the best. the two-stage uniforming device of on two separate directions, working especially, they are very responsive to the focus error of lens pillar, because this both direction is not separate usually.

Summary of the invention

Based on the problems referred to above, the objective of the invention is to provide this instructions and begin the device that type is stated in the place, it can be conditioned simply. in addition in the structure that has provided the face that throws light on with the structure of light focusing to the wire focal region of lasing light emitter.

The present invention is finished by the device of the described type of beginning about the task of device, is finished by the structure of the described type of beginning about the task of the structure of the face that throws light on.

According to the invention provides a kind of device that is used to make light uniformization, it comprises: have a plane of incidence of the light that is used for wanting homogenized and first uniformization element of an exit facet; Described first uniformization element has an array and the array near the lens pillar on the exit facet or the exit facet near the lens pillar on the plane of incidence or the plane of incidence respectively; Have a plane of incidence of the light that is used for wanting homogenized and second uniformization element of an exit facet; Described second uniformization element has an array and/or the array near the lens pillar on the exit facet or the exit facet near the lens pillar on the plane of incidence or the plane of incidence, and wherein the cylinder axis of the lens pillar of first uniformization element is perpendicular to the cylinder axis of the lens pillar of second uniformization element; Wherein in these two uniformization elements, be positioned on the plane of incidence or the plane of incidence near the cylinder axis of lens pillar be parallel to respectively be positioned on the exit facet or exit facet near the cylinder axis of lens pillar, and the array in wherein said first uniformization element is formed on the substrate, and the array in described second uniformization element also is formed on the substrate.

The described uniformization element that for example is configured to substrate is finished the function of a two-stage uniforming device. for example when the laser that one of homogenising is penetrated by laser diode bar, uniformization element acts on an axle or the direction, for example only acts on slow axis or only acts on the fast axle.

In this way, the both direction of laser or two axles be separated from each other homogenized in two uniformization elements that spacing arranged mutually. these two uniformization elements needn't be conditioned each other again, because for example acting on the adjusting of the lens pillar on one of two axles realizes by the reproduced production that is in the uniformization element in the franchise now. in this way, the ray performance is always in the scope of the above-mentioned manufacturing franchise of regulation. this two axles in addition, for example slow axis under a semiconductor laser bar situation and fast axle are not subjected to the influence of the focal length franchise of another beam axis respectively. and also have following possibility: being used for the focal length of the lens pillar of each on two axles during to the laser homogenising can be freely and irrespectively selected with another axle.

Also exist following may: be arranged on the exit facet or exit facet near the focusing surface of lens pillar be positioned near the plane of incidence or the plane of incidence. in this way, homogenized ray homogenization to be optimized.

Lens pillar can be configured to concavees lens and/or convex lens, perhaps is configured to grin lens (gradient index lens).

The present invention also provides a kind of structure of the face that is used to throw light on, it comprises: at least one has the semiconductor laser bar of a plurality of transmitters, these transmitters are adjacent and have spacing ground to arrange mutually on first direction, wherein the laser that penetrates by each transmitter in the divergence on first direction less than the divergence of this laser on second direction vertical with first direction; Be used for collimating at least in part the collimator of the laser that penetrates by transmitter; Be used for the ray inverting element of conversion by the laser of transmitter ejaculation, it is so constructed and is arranged in the raypath of the laser beam that is penetrated by transmitter, makes laser can exchange with the divergence on second direction in the divergence on first direction; Be used to make the device of the laser beam homogenising that penetrates by transmitter; Wherein, being used to make the device of the laser beam homogenising that is penetrated by transmitter is said apparatus.

Description of drawings

Further specify other features and advantages of the present invention below with reference to preferred embodiment shown in the accompanying drawing. in the accompanying drawing:

Fig. 1 a is the top view of the structure that is used to throw light on of the present invention;

Fig. 1 b is the side view of structure shown in Fig. 1 a;

Fig. 2 a is the top view of the structure that is used to focus on of the present invention;

Fig. 2 b is the side view of structure shown in Fig. 2 a;

Fig. 3 is the skeleton view of device of the present invention.

In some figure,, show rectangular coordinate system for more clearly expression.

Embodiment

Shown in Fig. 1 a and Fig. 1 b, a kind of structure according to the present invention comprises a semiconductor laser bar 1, it has a plurality of adjacent and be arranged in transmitter on the directions X spaced reciprocally. semiconductor laser bar 1 is just schematically represented by a rectangular block in Fig. 1 a, Fig. 1 b, Fig. 2 a and Fig. 2 b. under the situation of semiconductor laser bar, in the fast axle of what is called, promptly the Y direction or perpendicular to the divergence on the direction of the adjacent arrangement of transmitter obviously than in so-called slow axis, be that divergence on the directions X is bigger.

By Fig. 1 a and Fig. 1 b as seen, fast axis collimation instrument 2 is connected on the semiconductor laser bar 1 on the direction of propagation Z of the laser that each transmitter from semiconductor laser bar 1 penetrates. and fast axis collimation instrument 2 is configured to for example plano-convex lens pillar, its cylinder axis extends on directions X. by this lens pillar, the laser that is penetrated by each laser instrument is limited its deflection ground collimation on Y direction or fast axle. in order to finish collimation, lens pillar as fast axis collimation instrument 2 can have an aspheric surface. replacement only has a convex curvature at its exit facet lens pillar, also can adopt a lens pillar with plane of incidence of convex bending. as an alternative, being not only the plane of incidence and exit facet can be protruding and/or recessed bending.

On the Z of the direction of propagation, ray inverting element 3 is connected on the fast axis collimation instrument 2. the angle of the light of incident half-twist in ray inverting element 3, promptly the divergence of the divergence of fast axle (Y direction) and slow axis (directions X) is exchanged, thereby bigger than the divergence on directions X in the divergence on the Y direction after 3 outgoing of ray inverting element.

Ray inverting element 3 can be one basically rectangular hexahedral shape, by the piece that transparent material constitutes, not only be arranged with a plurality of lens pillar sections as the ray converter unit thereon in parallel to each other at the plane of incidence but also on exit facet. the axle of ray converter unit can be connected with the basal plane that advances along directions X of the rectangular hexahedron shape ray inverting element 3 angle α with 45 ° here.

On laser propagation direction Z, another collimator 4 is connected ray inverting element 3 back, thereby can obtain for example ray of 10mm * 10mm, its on the Y direction, have an appointment divergence of 11mrad (milliradian), divergence at the 3mrad that has an appointment on the directions X. the numerical value of divergence is relevant with the beamwidth of half maximum intensity (FWHM) with the ray diameter. and collimator 4 is configured to have the plano-convex lens pillar at the cylinder axis that extends on the directions X. because the deflection of laser in ray inverting element 3, collimator 4 has the orientation identical with fast axis collimation instrument 2. and the same with fast axis collimation instrument 2, collimator 4 also can have other structure. the plane of incidence especially not only, and exit facet can have protruding and/or recessed curvature.

On the Z of the direction of propagation, first uniformization element 5 is connected collimator 4 back, first uniformization element, 5 back are connected with second uniformization element, 6. uniformization elements 5 have lens pillar 9 on its plane of incidence 7 array, the cylinder axis of these lens is extending (referring to Fig. 3) on the directions X. and first uniformization element 5 has the array of lens pillar 9 on its exit facet 8 in addition, the cylinder axis of these lens extends on directions X. by the plane of incidence and the reflecting surface 7 of first uniformization element, lens pillar on 8, the laser that passes first uniformization element 5 is mutual superposition on the Y direction very effectively. by this effective stack, can realize the homogenising of laser on the Y direction as can be seen by focal region shown in first uniformization element, 5 back among Fig. 1 b.

On the Z of the direction of propagation, described structure comprises that in first uniformization element, 5 back second uniformization element, 6. these second uniformization elements 6 have a column lens array of being made up of lens pillar 9 respectively on its plane of incidence 7 and its exit facet 8, lens pillar 9 extends (referring to Fig. 3) on the Y direction. by the plane of incidence and the exit facet 7 of second uniformization element 6, column lens array on 8, the laser that passes second uniformization element 6 is mutual superposition on directions X very effectively. by this effective stack, can realize the homogenising of laser on directions X as can be seen by focal region shown in second uniformization element, 6 back among Fig. 1 a.

Here the device that is used for homogenising comprises first and second uniformization elements 5,6.Thereby laser is homogenized on both direction or axle on the whole in device of the present invention, and wherein only work on directions X in the second level, and the first order only works on the Y direction.

Uniformization element

5,6 lens pillar 9 can be configured to protruding (for example referring to Fig. 3) and/or recessed lens pillar. as an alternative, lens pillar also can be configured to grin lens (gradient index lens). in this case, lens pillar is not to be placed on the plane of incidence or the exit facet, but the substrate refractive index by a variation is formed on and forms uniformization element 5 respectively, 6 substrate inside is positioned near the plane of incidence or the exit facet.

Laser continues to penetrate from second uniformization element 6 equably, and can be used for the illumination away from a face of this device.

Embodiment according to structure of the present invention shown in Fig. 2 a and Fig. 2 b comprises a semiconductor laser bar 1. with a plurality of transmitters equally

This structure also comprises fast axis collimation instrument 2, it can image pattern 1a and the fast axis collimation instrument 2 of 1b equally design. the distance between semiconductor laser and the fast axis collimation instrument 2 can be selected greatlyyer here, makes laser have relatively large extension pass fast axis collimation instrument 2 on the Y direction after.

Structure of the present invention is comprising slow axis collimator 10 after fast axis collimation instrument 2 on the directions of rays, it is configured to the plane of incidence of slow axis collimator 10 and the lens pillar on the exit facet in the embodiment shown. and the cylinder axis of the lens pillar of slow axis collimator 10 extends on the Y direction here. and especially the slow axis collimator can so be set up, and makes the lasertron ray that penetrates respectively from each transmitter be injected on the plane of incidence each corresponding lens pillar. and each sub-ray is collimated on slow axis or at directions X by corresponding lens pillar.

Yet the embodiment of slow axis collimator 10 shown in Fig. 2 a and the 2b is telescope configurations. also have following possibility: slow axis collimator 10 be configured to one only be arranged on the face, the column lens array on for example plane of incidence or the exit facet. can utilize in addition more than two optical function, particularly the face of crooked similar lens pillar is as slow axis collimator 10.

The embodiment of structure of the present invention shown in Fig. 2 a and the 2b also is included in and is arranged in slow axis collimator 10 uniformization element 6. these uniformization elements 6 afterwards on the direction of propagation in full accord with second uniformization element 6 of structure shown in Fig. 1 a and Fig. 1 b on its structure. and the axle of the lens pillar 9 on the plane of incidence 7 and exit facet 8 extends on the Y direction here, thereby makes laser beam 3 influenced by lens pillar 9.

By the lens pillar 9 that passes uniformization element 6, each of laser beam ray is very effectively in mutual superposition on the slow-axis direction or on directions X. and the laser that penetrates from uniformization element 6 can be set at the concentrating element 11 that direction of propagation Z goes up uniformization element 6 back and focus on. and concentrating element 11 is configured to rotational symmetric plano-convex lens in the embodiment shown. and concentrating element 11 also can have other structure, for example be a biconvex lens or a plurality of lens that concur. these lens can be with laser beam 10 on fast axle or focus on the Y direction, and simultaneously as field lens only be used on the slow axis or the uniformization element 6. that on directions X, works can in fact be positioned at a plane as the focus of the lens of concentrating element 11 here, the field of laser is used as the lens homogenising of field lens on slow-axis direction on this plane.

Yet the laser beam that passes uniformization element 10 among Fig. 2 a and Fig. 2 b just schematically is illustrated. by each lens pillar 9, the light that passes it is interrupted on a plurality of different directions. by plano-convex spherical lens as concentrating element 11 or field lens, the sub-ray that in a linearity focal region each is mapped to equal angular on the field lens is deflected on the identical position, thus make in the focal region from the laser beam part of each sub-ray of original laser ray on the directions X or be evenly distributed on the slow-axis direction on its width.

In the focal region of concentrating element 11 with laser focusing to a linearity, extend on directions X this focal region, and have very little extension on the Y direction. for example have following possibility: there is following possibility in the focal region in addition less than 1mm or less than 0.5mm. on the Y direction or in the extension on the quick shaft direction: the linearity focal region on the directions X or the width on the slow-axis direction greater than 5mm or greater than between the exit facet of 20mm. concentrating element 11 and the linearity focal region can be quite big apart from d, for example greater than 50mm, especially greater than 200mm.

Claims

1. be used to make the device of light uniformization, it comprises:

Have a plane of incidence (7) of the light that is used for wanting homogenized and first uniformization element (5) of an exit facet (8);

Described first uniformization element (5) have respectively one the plane of incidence (7) go up or the plane of incidence (7) near the array of lens pillar (9) and one on the exit facet (8) or near the array of the lens pillar (9) the exit facet (8);

Have a plane of incidence (7) of the light that is used for wanting homogenized and second uniformization element (6) of an exit facet (8);

Described second uniformization element (6) have one the plane of incidence (7) go up or the plane of incidence (7) near the array of lens pillar (9) and/or one on the exit facet (8) or near the array of the lens pillar (9) the exit facet (8), wherein the cylinder axis of the lens pillar (9) of first uniformization element (5) is perpendicular to the cylinder axis of the lens pillar (9) of second uniformization element (6);

It is characterized in that, at these two uniformization elements (5,6) in, be positioned at that the plane of incidence (7) is gone up or the plane of incidence (7) near the cylinder axis of lens pillar (9) be parallel to respectively be positioned at that exit facet (8) is gone up or exit facet (8) near the cylinder axis of lens pillar (9), and

Array in wherein said first uniformization element (5) is formed on the substrate, and the array in described second uniformization element (6) also is formed on the substrate.

2. device as claimed in claim 1 is characterized in that, be arranged on that exit facet (8) is gone up or exit facet (8) near the focal plane of lens pillar (9) be set in the plane of incidence (7) or near the plane of incidence (7).

3. device as claimed in claim 1 or 2 is characterized in that lens pillar is configured to recessed and/or convex lens, perhaps is configured to gradient index lens.

4. be used to the to throw light on structure of a face, it comprises:

-at least one has the semiconductor laser bar (1) of a plurality of transmitters, these transmitters are gone up adjacent and are had spacing ground to arrange mutually in first direction (X), wherein the laser that penetrates by each transmitter in the divergence on first direction (X) less than the divergence of this laser (9) on second direction (Y) vertical with first direction (X);

-be used for collimating at least in part the collimator (2,4) of the laser that penetrates by transmitter;

-be used for the ray inverting element (3) of the laser that conversion penetrated by transmitter, it is so constructed and is arranged in the raypath of the laser beam that is penetrated by transmitter, makes laser can exchange with the divergence on second direction in the divergence on first direction (X);

-be used to make the device of the laser beam homogenising that penetrates by transmitter;

It is characterized in that being used to make the device of the laser beam homogenising that is penetrated by transmitter is device as claimed in claim 1.

5. the structure of the face that is used to throw light on as claimed in claim 4 is characterized in that collimator (2,4) comprises fast axis collimation instrument (2), and it is used for the collimation of laser on second direction (Y) that penetrated by transmitter.

6. as the structure of claim 4 or the 5 described faces that are used to throw light on, it is characterized in that collimator (2,4) comprises be used for collimator (4) that the laser beam that transmitter penetrates is collimated on first direction (X).