CN100426021C - Visual inspection lighting device based on reflective light and transmission light - Google Patents
Visual inspection lighting device based on reflective light and transmission light Download PDFInfo
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- 238000011179 visual inspection Methods 0.000 title claims description 20
- 230000005540 biological transmission Effects 0.000 title abstract 4
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
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Abstract
Description
技术领域 technical field
本发明涉及用于目视检查诸如偏振膜和液晶基板等的各种检查对象的照明装置，特别是涉及基于反射光和透射光双方的目视检查用照明装置。The present invention relates to an illumination device for visual inspection of various inspection objects such as polarizing films and liquid crystal substrates, and more particularly to an illumination device for visual inspection based on both reflected light and transmitted light.
背景技术 Background technique
在用于检测诸如偏振膜等检查对象的缺陷的常规检查中，在大多数的情况下，使用在三基色荧光灯中配备了乳白色丙烯酸散射片的透射照明装置，以便使用从上述荧光灯发射经上述丙烯酸散射片并透过上述检查对象的散射光来进行目视检查。In conventional inspections for detecting defects in inspection objects such as polarizing films, in most cases, a transilluminator equipped with a milky white acrylic diffuser in a trichromatic fluorescent lamp is used so as to use light emitted from the fluorescent lamp Scattering sheet and through the scattered light of the above inspection object for visual inspection.
另一方面，专利文献1描述了下述的方法：将通过层叠偏振反射片构成的光学片作为检查对象，使光倾斜地照射在其上，以便根据从上述光学片反射的光来检查缺陷。On the other hand,
【专利文献1】特开2001-116925号公报[Patent Document 1] JP-A-2001-116925
但是，使用具备荧光灯的透射照明装置的常规检查存在下述的问题：However, routine inspections using diascopic lighting with fluorescent lamps have the following problems:
1)在三基色荧光灯中使用了乳白色丙烯酸散射片的照明装置只能用于基于透射光的检查。1) Illuminators using milky white acrylic diffusers in tri-primary fluorescent lamps can only be used for inspections based on transmitted light.
2)由于将荧光灯用于照明，故在进行检查时，不能将颜变色为适合于各种缺陷类型的不同波长的颜色。另一方面，荧光灯的光是散射光，不能照射对于缺陷观察有效的散射光以外的会聚光。再者，由于该光发散，故照度与上述照明源和上述检查对象之间距离的2次方成反比例地下降，不能进行充分照度水平下的检查。2) Since fluorescent lamps are used for illumination, it is not possible to change the color into colors of different wavelengths suitable for various types of defects at the time of inspection. On the other hand, the light of a fluorescent lamp is scattered light, and convergent light other than scattered light effective for defect observation cannot be irradiated. Furthermore, since the light diverges, the illuminance decreases in inverse proportion to the square of the distance between the illumination source and the inspection object, and inspection at a sufficient illuminance level cannot be performed.
3)在荧光灯的照明中，色温是3000至5000°K，不能得到适合于检查的接近于太阳光的6000°K的光。3) In the lighting of fluorescent lamps, the color temperature is 3000 to 5000°K, and light of 6000°K close to sunlight suitable for inspection cannot be obtained.
4)在荧光灯的照明中，上述光源的演色性程度、即表示颜色的外观是好还是差的指数(Ra)约为88。这样，在观察缺陷时，缺陷能见度和颜色能见度低，缺陷漏视率高。4) In the lighting of fluorescent lamps, the degree of color rendering of the above-mentioned light source, that is, the index (Ra) indicating whether the color appearance is good or bad is about 88. In this way, when observing defects, the defect visibility and color visibility are low, and the defect omission rate is high.
5)在基于透射光的检查中，不能根据检查对象的缺陷的类型区别缺陷的垂直位置(凹凸)。再者，由于只能使用散射光，故容易漏掉微小的缺陷。5) In the inspection based on transmitted light, the vertical position (concavity and convexity) of the defect cannot be distinguished according to the type of the defect of the inspection object. Furthermore, since only scattered light can be used, it is easy to miss tiny defects.
发明内容 Contents of the invention
本发明的目的在于解决上述的问题。The object of the present invention is to solve the above-mentioned problems.
为了解决上述的问题，本发明提出一种基于反射光和透射光的目视检查用照明装置，其特征在于：在外壳的上部中配置用于发射照明光的光发射部和与上述光发射部面对的倾斜的反射镜，在上述外壳的下部中配置装有检查对象的倾斜的透射光反射镜，在上述反射镜与上述透射光反射镜之间配置菲涅耳透镜。In order to solve the above-mentioned problems, the present invention proposes a lighting device for visual inspection based on reflected light and transmitted light. As for the facing inclined mirror, an inclined transmitted light reflecting mirror on which the inspection object is installed is disposed in the lower part of the housing, and a Fresnel lens is disposed between the reflecting mirror and the transmitted light reflecting mirror.
再者，本发明提出上述的结构，其中，在左右侧配置上述光发射部和上述反射镜，同时将上述透射光反射镜配置成其目视观察一侧位于前方。Furthermore, the present invention proposes the above-mentioned structure in which the light emitting unit and the reflecting mirror are arranged on the left and right sides, and the transmitted light reflecting mirror is arranged so that the visual observation side is located in front.
再者，本发明提出上述的结构，其中，在上述菲涅耳透镜的上表面上设置液晶散射片。Furthermore, the present invention proposes the above-mentioned structure, wherein a liquid crystal scattering sheet is provided on the upper surface of the above-mentioned Fresnel lens.
再者，本发明提出上述的结构，其中，将上述光发射部经光纤与在上述外壳外安装的光源连接，将上述光发射部设置成为具有放大光束功能的透镜系统。Moreover, the present invention proposes the above-mentioned structure, wherein the light emitting part is connected to the light source installed outside the housing through an optical fiber, and the light emitting part is configured as a lens system with a function of amplifying light beams.
再者，本发明提出上述的结构，其中，上述光发射部具有变焦功能。Furthermore, the present invention proposes the above-mentioned structure, wherein the above-mentioned light emitting part has a zoom function.
再者，本发明提出上述的结构，其中，上述光发射部可安装变色滤光片。Moreover, the present invention proposes the above-mentioned structure, wherein the above-mentioned light emitting part can be equipped with a color-changing filter.
再者，本发明提出上述的结构，其中，上述光源是短弧金属卤素灯。Furthermore, the present invention proposes the above-mentioned structure, wherein the above-mentioned light source is a short-arc metal halide lamp.
在上述的结构中，利用反射镜反射从光发射部发射的照明光并照射到菲涅耳透镜上。利用菲涅耳透镜使该光会聚，该会聚光照射到透射光反射镜上的检查对象上。照射到检查对象上的照明光被反射，向位于外壳前方的观察者的眼睛的方向行进。因而，观察者可根据反射光来观察检查对象并可检察其缺陷。In the above-mentioned structure, the illuminating light emitted from the light emitting part is reflected by the reflecting mirror and irradiated onto the Fresnel lens. The light is condensed by a Fresnel lens, and the condensed light is irradiated onto the inspection object on the transmitted light mirror. The illumination light irradiated on the inspection object is reflected and travels toward the eyes of the observer located in front of the housing. Thus, the observer can observe the inspection object based on the reflected light and can inspect its defects.
由于将反射光用于目视检查，故可根据缺陷的类型来区别缺陷的垂直位置(凹凸)，另外，由于该光不是散射光，故也能容易地检测微小的缺陷。Since the reflected light is used for visual inspection, the vertical position (concavity and convexity) of the defect can be distinguished according to the type of the defect, and since this light is not scattered light, it is also possible to easily detect minute defects.
另一方面，在检查对象可透光的情况下，经菲涅耳透镜照射到检查对象上的照明光透过检查对象并被透射光反射镜反射，再次透过检查对象，呈现在观察者的眼睛前方。这样，不仅可进行基于反射光的检查，而且可进行基于透射光的检查。On the other hand, in the case that the inspection object can transmit light, the illumination light irradiated on the inspection object through the Fresnel lens passes through the inspection object and is reflected by the transmitted light reflector, then passes through the inspection object again, and appears in the observer's eyes. in front of the eyes. In this way, not only inspection based on reflected light but also inspection based on transmitted light can be performed.
如上所述，由于照射到检查对象上的照明光是被菲涅耳透镜会聚了的会聚光，故不管照射距离如何，都可在检查对象上得到恒定的照度水平，可利用目视观察来进行良好的检查。As described above, since the illumination light irradiated on the inspection object is converging light converged by the Fresnel lens, a constant illuminance level can be obtained on the inspection object regardless of the irradiation distance, which can be carried out by visual observation. Good check.
再者，在上述外壳的上部中的左右侧配置上述光发射部和上述反射镜，同时在上述外壳的下部中配置透射光反射镜，使其目视观察一侧位于前方。这样，上述照明光不直接照射到眼睛上，不会对眼睛产生不良影响。Furthermore, the light emitting part and the reflector are arranged on the left and right sides of the upper part of the case, and the transmitted light reflector is arranged in the lower part of the case so that the visual observation side is located at the front. In this way, the above-mentioned illuminating light is not directly irradiated to the eyes, so that the eyes will not be adversely affected.
在上述菲涅耳透镜的上表面上设置液晶散射片的结构中，上述液晶散射片可根据需要从光透射状态变更为光散射状态，从而也可将散射光用于目视检查。在该情况下，由于照明光被上述液晶散射片散射后透过上述菲涅耳透镜，故尽管照射到检查对象上的照明光是散射光，也被上述菲涅耳透镜会聚。因而，可防止因照射距离引起的照度下降。In the structure in which the liquid crystal scattering sheet is provided on the upper surface of the Fresnel lens, the liquid crystal scattering sheet can be changed from a light-transmitting state to a light-scattering state as needed, so that scattered light can also be used for visual inspection. In this case, since the illumination light is diffused by the liquid crystal scattering sheet and passes through the Fresnel lens, the illumination light irradiated on the inspection object is converged by the Fresnel lens even though it is scattered light. Therefore, a decrease in illuminance due to the irradiation distance can be prevented.
如果将上述光发射部经光纤与在上述外壳外安装的光源连接并将上述光发射部设置成为具有放大光束功能的透镜系统，则安装的自由度高并可容易地将上述光源从可见光变更为紫外光或红外光等。If the above-mentioned light-emitting part is connected to the light source installed outside the above-mentioned housing through an optical fiber and the above-mentioned light-emitting part is set as a lens system with the function of amplifying the beam, the degree of freedom of installation is high and the above-mentioned light source can be easily changed from visible light to light source. Ultraviolet light or infrared light etc.
如果上述光发射部具有变焦功能，则可根据上述检查对象的尺寸适当地调节照明光的照射范围。If the light emitting part has a zoom function, the irradiation range of the illumination light can be appropriately adjusted according to the size of the inspection object.
再者，如果上述光发射部可安装变色滤光片，则可选择光源的颜色，以便进行适合于上述检查对象的缺陷和检查目的的检查。Furthermore, if the above-mentioned light emitting part can be equipped with a color-changing filter, the color of the light source can be selected so as to perform inspection suitable for the defect of the above-mentioned inspection object and the inspection purpose.
再者，如果将平均演色性程度高的短弧金属卤素灯用作照明光的光源，则可增强缺陷能见度，降低缺陷漏视率。Furthermore, if a short-arc metal halide lamp with high average color rendering is used as the light source of the illumination light, the visibility of defects can be enhanced and the defect leakage rate can be reduced.
附图说明 Description of drawings
图1是示出本发明的目视检查用照明装置的实施例的正面一侧的示意性的剖面图。FIG. 1 is a schematic cross-sectional view showing the front side of an embodiment of an illumination device for visual inspection according to the present invention.
图2是沿图1的A-A线的剖面图。Fig. 2 is a cross-sectional view along line A-A of Fig. 1 .
图3是用于示意性地说明透射光反射镜的调节动作的沿图1的B-B线的剖面图。Fig. 3 is a cross-sectional view along line B-B in Fig. 1 for schematically explaining the adjustment operation of the transmitted light mirror.
图4是用于示意性地说明反射镜的调节动作的沿图3的C-C线的剖面图。Fig. 4 is a cross-sectional view along line C-C in Fig. 3 for schematically explaining the adjustment operation of the mirror.
图5是示意性地示出在菲涅耳透镜上设置液晶散射片的结构的剖面图。5 is a cross-sectional view schematically showing a structure in which a liquid crystal scattering sheet is provided on a Fresnel lens.
具体实施方式 Detailed ways
以下将参照附图描述实现本发明的模式。Modes for carrying out the invention will be described below with reference to the drawings.
图1是示出本发明的目视检查用照明装置的实施例的正面一侧的示意性剖面图。图2是沿图1的A-A线的剖面图。图3是用于示意性地说明镜调节动作的沿图1的B-B线的剖面图。图4是用于示意性地说明镜调节动作的沿图3的C-C线的剖面图。FIG. 1 is a schematic sectional view showing the front side of an embodiment of the lighting device for visual inspection of the present invention. Fig. 2 is a cross-sectional view along line A-A of Fig. 1 . Fig. 3 is a cross-sectional view along line B-B in Fig. 1 for schematically explaining the mirror adjustment operation. Fig. 4 is a cross-sectional view along line C-C in Fig. 3 for schematically explaining the mirror adjustment operation.
在这些图中，符号1表示形成为前方开口的箱状的外壳。在外壳1的上部，在图的左侧安装用于发射照明光的光发射部2，在图的右侧安装倾斜的反射镜3，使其面对光发射部2。如图4中所示，在外壳1中以可旋转的方式安装反射镜3的框部4，以使其倾斜角可调。但是，在按与光发射部2的相对位置关系适当地调节了上述倾斜角后，可保持该倾斜角不变。In these figures,
在外壳1的下部，将倾斜的透射光反射镜5配置成其目视观察一侧位于前方。再者，在上述外壳中，在反射镜3与透射光反射镜5之间配置菲涅耳透镜6。如图3中所示，可使透射光反射镜5的框部7旋转和移动，以便能随时调节其倾斜角，可适当地调节目视观察方向。倾斜角调节机构可以是任意的。In the lower part of the
符号8表示安装在外壳1外部的光源，将光源8经光纤9与外壳1中的光发射部2连接。将光发射部2设置成为具有放大从光源8经光纤9传播的光束的功能的透镜系统。
在上述的结构中，从光源8经光纤9传播到光发射部2的照明光束被放大，该放大了的光束照射到反射镜3上。利用反射镜3反射从光发射部2发射的照明光，然后照射到菲涅耳透镜6上。利用菲涅耳透镜6会聚该光，该会聚光照射到透射光反射镜5上的检查对象10上。In the above structure, the illuminating beam transmitted from the
如上述那样照射到检查对象10上的照明光被检查对象10反射并向位于外壳1的前方的观察者的眼睛方向行进。因而，观察者可根据该反射光观察检查对象10以检查其缺陷。The illumination light irradiated on the
另一方面，在检查对象10如偏振膜等那样可透光的情况下，经菲涅耳透镜6照射到检查对象10上的照明光透过检查对象10到达透射光反射镜5，被其反射，再次透过检查对象10，呈现在观察者的眼睛前方。这样，在检查对象10可透光的情况下，不仅可进行基于反射光的检查，而且可进行基于透射光的检查。On the other hand, when the
如上所述，由于照射到检查对象10上的照明光是由菲涅耳透镜6会聚了的会聚光，故不管照射距离如何，都可在检查对象10上得到恒定的照度，可利用目视观察来进行良好的检查。As described above, since the illumination light irradiated on the
再者，在外壳1上部的左右侧配置光发射部2和反射镜3，同时在外壳1的下部配置透射光反射镜5，使其目视观察一侧位于前方。这样，上述照明光不直接照射到眼睛上，不会对眼睛产生不良影响。如图2中所示，用遮光板11覆盖外壳1的上部开口，可进一步改善防止上述不良影响的效果。Furthermore, the
如上所述，在本发明中，如图5中示意性地示出的那样，可在菲涅耳透镜6的上表面上设置液晶散射片12。在本实施例中，例如如果根据需要施加控制电压等，则可将液晶散射片12从光透射状态变更为光散射状态，这样可进行基于散射光的目视检查。As described above, in the present invention, as schematically shown in FIG. 5 , the liquid crystal scattering sheet 12 may be provided on the upper surface of the
在该情况下，由于照明光被液晶散射片12散射并在其后透过菲涅耳透镜6，故照射到检查对象10上的照明光虽被散射但仍会被菲涅耳透镜6会聚。因而，可防止因照射距离引起的照度下降。In this case, since the illumination light is diffused by the liquid crystal scattering sheet 12 and then passes through the
在以上描述的实施例中，将光发射部2经光纤9与在外壳1的外部安装的光源8连接。这样，安装的自由度高并可容易地将上述光源从可见光变更为紫外光或红外光等。In the embodiments described above, the
再者，如果将诸如短弧金属卤素灯等的平均演色性程度高的光源用作光源8，则可增强缺陷能见度，降低缺陷漏视率，因为表示演色性程度即光源的颜色能见度的指数(Ra)在金属卤素灯的情况下高达约95，而荧光灯的该指数约为88。Furthermore, if a light source with a high average color rendering such as a short-arc metal halide lamp is used as the
再者，如果光发射部2具有变焦功能，则可根据检查对象10的尺寸适当地调节照明光的照射范围。Furthermore, if the
再者，如果光发射部可安装变色滤光片，则可选择光源的颜色，以便进行适合于上述检查对象的缺陷和检查目的的检查。Furthermore, if a color-changing filter can be mounted on the light-emitting portion, the color of the light source can be selected for inspection suitable for the defect and inspection purpose of the above-mentioned inspection object.
同时，在本发明中，除了以上描述的要素外，还可安装通用放大器、基准偏振片和低压钠灯。这样，可提供能进行更高级的目视检查的照明装置。在上述装置的前面、即观察者的前面安装上述通用放大器和上述基准偏振片。在光发射部2之上安装上述低压钠灯。Meanwhile, in the present invention, in addition to the above-described elements, a general-purpose amplifier, a reference polarizer, and a low-pressure sodium lamp may also be installed. In this way, it is possible to provide a lighting device capable of performing a higher-level visual inspection. The above-mentioned universal amplifier and the above-mentioned reference polarizing plate are installed in front of the above-mentioned device, that is, in front of the observer. Above the
由于本发明具有上述结构，因此，根据反射光和透射光，不仅可进行偏振膜、液晶基板等的目视检查，而且可进行印刷物原版、仿生学等的目视检查。再者，如果将光源适当地例如从可见光灯变更为紫外或红外灯，则可将上述照明光用于农业领域中的自然食品的发育和畜产品的发育，也可用于半导体的曝光装置，能以低成本提供具有优良性能的照明装置。Since the present invention has the above structure, it is possible to perform not only visual inspection of polarizing films, liquid crystal substrates, etc., but also visual inspections of original prints, bionics, etc., based on reflected light and transmitted light. Furthermore, if the light source is appropriately changed, for example, from a visible light lamp to an ultraviolet or infrared lamp, the above-mentioned illumination light can be used in the development of natural food and livestock products in the agricultural field, and can also be used in semiconductor exposure devices. A lighting device with excellent performance is provided at low cost.
Claims (7)
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005-178290 | 2005-06-17 | ||
| JP2005178290A JP2006349576A (en) | 2005-06-17 | 2005-06-17 | Illumination device for visual inspection using reflected light and transmitted light |
| JP2005178290 | 2005-06-17 |
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| CN1880983A CN1880983A (en) | 2006-12-20 |
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| CNB2006100928468A Expired - Fee Related CN100426021C (en) | 2005-06-17 | 2006-06-16 | Visual inspection lighting device based on reflective light and transmission light |
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| JP (1) | JP2006349576A (en) |
| KR (1) | KR100873057B1 (en) |
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| CN101592812B (en) * | 2009-06-23 | 2012-05-23 | 友达光电（苏州）有限公司 | Display panel and pixel defect check method thereof |
| CN103803125A (en) * | 2014-02-24 | 2014-05-21 | 江苏新美星包装机械股份有限公司 | LED lamp inspection device in beverage production line |
| CN109459877B (en) * | 2018-08-15 | 2021-04-06 | 中国电子科技集团公司第五十五研究所 | Display screen band frame attaching method, attaching device and display thereof |
| CN110907474A (en) * | 2019-12-10 | 2020-03-24 | 江苏奥蓝工程玻璃有限公司 | Defect collecting device for glass coating visual inspection |
| CN116359230B (en) * | 2023-05-26 | 2023-08-29 | 北京博兴远志科技有限公司 | Permanent magnet surface concave-convex defect detection system and method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11295242A (en) * | 1998-04-10 | 1999-10-29 | Matsushita Electric Ind Co Ltd | X-ray substrate inspection equipment and visible light reflective film for x-ray |
| JP2001116925A (en) * | 1999-10-20 | 2001-04-27 | Sumitomo Chem Co Ltd | Optical sheet inspection method |
| JP2004101403A (en) * | 2002-09-11 | 2004-04-02 | Tokyo Seimitsu Co Ltd | Visual inspection device |
| JP2004163664A (en) * | 2002-11-13 | 2004-06-10 | Dainippon Printing Co Ltd | Method of inspecting cholesteric liquid crystal layer, inspection apparatus therefor and method of manufacturing cholesteric liquid crystal layer |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07272679A (en) * | 1994-03-31 | 1995-10-20 | Toshiba Lighting & Technol Corp | Short arc metal halide lamp, discharge lamp lighting device and liquid crystal projector |
| JP3201922B2 (en) * | 1995-03-03 | 2001-08-27 | 東芝機械株式会社 | Electron beam drawing device and stage position measuring device |
| JPH09222396A (en) * | 1996-02-19 | 1997-08-26 | Toray Ind Inc | Defect inspection method and device |
| JP2925539B1 (en) * | 1998-07-10 | 1999-07-28 | オリンパス光学工業株式会社 | Lighting equipment for macro inspection |
| KR100400455B1 (en) * | 2001-04-26 | 2003-10-01 | 엘지전자 주식회사 | lighting apparatus for inspected board |
| WO2003102562A1 (en) * | 2002-05-31 | 2003-12-11 | Olympus Corporation | Macro illumination device |
| KR100508190B1 (en) * | 2003-11-11 | 2005-08-17 | 주식회사 에이디피엔지니어링 | A Flood Light for appearance inspection of LCD surface |
-
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- 2005-06-17 JP JP2005178290A patent/JP2006349576A/en active Pending
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11295242A (en) * | 1998-04-10 | 1999-10-29 | Matsushita Electric Ind Co Ltd | X-ray substrate inspection equipment and visible light reflective film for x-ray |
| JP2001116925A (en) * | 1999-10-20 | 2001-04-27 | Sumitomo Chem Co Ltd | Optical sheet inspection method |
| JP2004101403A (en) * | 2002-09-11 | 2004-04-02 | Tokyo Seimitsu Co Ltd | Visual inspection device |
| JP2004163664A (en) * | 2002-11-13 | 2004-06-10 | Dainippon Printing Co Ltd | Method of inspecting cholesteric liquid crystal layer, inspection apparatus therefor and method of manufacturing cholesteric liquid crystal layer |
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| CN1880983A (en) | 2006-12-20 |
| TW200702658A (en) | 2007-01-16 |
| KR100873057B1 (en) | 2008-12-11 |
| KR20060132476A (en) | 2006-12-21 |
| JP2006349576A (en) | 2006-12-28 |
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