CN100385227C - Piezo-electric driving type micro mixed chip - Google Patents
Piezo-electric driving type micro mixed chip Download PDFInfo
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- CN100385227C CN100385227C CNB2005100295013A CN200510029501A CN100385227C CN 100385227 C CN100385227 C CN 100385227C CN B2005100295013 A CNB2005100295013 A CN B2005100295013A CN 200510029501 A CN200510029501 A CN 200510029501A CN 100385227 C CN100385227 C CN 100385227C
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Abstract
The present invention relates to a piezo-electrically driven micro mixed chip, which belongs to the technical field of microelectronics. The micro mixed chip comprises a sealed cover layer, a passage layer and piezoelectric controllers, wherein the sealed cover layer and the passage layer are sealed together through an ionic bonding technique or a heat bonding technique. The upper side of the sealed cover layer is provided with three installing grooves for the piezoelectric controllers, the piezoelectric controllers are embedded into the three installing grooves for the piezoelectric controllers on the upper side of the sealed cover layer in a pasting mode, and the passage layer is provided with a circulating fluid passage. The micro mixed chip of the present invention combines the characteristics of a passage type mixer and a micro cavity mixer to enhance diffusion and active convection among reagents, and thus, mixing efficiency is increased. The micro mixed chip can be widely used for the real-time measurement of the concentration and the components of biologic reagents and chemical reagents, and has strong use value to both preventive medicine and environmental water source monitoring.
Description
Technical field
What the present invention relates to is a kind of chip of microelectronics technology, particularly a kind of piezo-electric drive type micro mixing chip.
Background technology
In biological chemistry and medical science check and analysis system, the mixing of biological reagent and chemical reagent is vital composition link, and the development of micro-electromechanical technology (MEMS) can be finished this function on chip.Numerous mixed methods based on different mixing principles all are used in biological reagent and the chemical reagent component mixing research, at present, micro-mixer spare can be divided into channel-type mixer and microcavity mixer, the channel-type mixer makes the diffusional effect of different reagent streams become more remarkable by constructing special microfluidic channel, thereby realizes the mixing of reagent; And the microcavity mixer is produced on on-chip airtight microchamber and driver part constitutes by one or more, externally applies mechanical motion by driver part to cause concussion, thereby promotes the mixing of different reagent in the microchamber.In microfluid system, because passage length and aperture is little, Reynolds number is less, and fluid realizes evenly mixing difficulty in the channel-type mixer higher, consuming time longer.Utilize the microcavity mixer then not only can shorten incorporation time, can also make and mix carry out more thoroughly complete, realize that for utilizing to mix the hybrid reaction system of little reaction is especially favourable.Current micro-mixer at the microlitre capacity mainly drives by pneumatic, electric field in studying, and promotes that diffusion of reagents flows in the cavity, realize mixing, under this mode, carry out owing to be blended in the small chamber, diffusion is main to rely on that external force is passive to be finished, time is longer, moreover, the utility appliance complexity of pneumatic and electric field driven itself, bulky, control complicatedly, therefore, be unfavorable for portable low-power consumption requirement such as disease epidemic disease and environment on-site supervision.
Find through the literature search to prior art: U.S. Patent number is: US2002/0023841A1, name is called: the electrophoresis current drive convection type micro-mixer (Electrohydrodynamic ConvectionMicrofluidic Mixer), the mixer of mentioning in this patent is made up of the microcavity and the electric field driven system that are produced on silica-based, realize electric field driven by the electrode that is arranged on the fluid passage to reagent in the microcavity stream, and formation fluid convection, thereby the mixing of promotion reagent.Though such system does not have mechanical driving member, yet the manufacture craft of itself is also remarkable, especially need accurate control for the external drive electric field, in addition, many biological and chemical reagent itself are especially responsive for electric field, under electric field action, can dissociate even the formation bubble, therefore, and not be suitable for this hybrid device.
Summary of the invention
The objective of the invention is to overcome deficiency of the prior art, a kind of piezo-electric drive type micro mixing chip has been proposed, make it combine the characteristics of channel-type mixer and microcavity mixer, diffusion and active convection current between different reagent are strengthened, thereby lifting mixing efficiency, shorten mixing cycle, the external control circuit and the utility appliance of this hybrid chip are simple, processing ease, because power is low, more can provide drive energy by battery, the mixing for trace reagent when being highly suitable for open-air on-the-spot investigation and monitoring is used.Chip fabrication technique is simple relatively, and stable performance has good repeatability, has solved the problem that exists in the background technology.
The present invention is achieved through the following technical solutions, the present invention includes: sealing cap rock, channel layer and piezo controller.Connected mode is: sealing cap rock and channel layer are sealed by ionic bonding technology or thermal bonding technology, piezo controller embeds in three mounting grooves of sealing cap rock upside in sticking obedient mode, channel layer forms the circulating fluid passage with etching or mould pressing process, when piezo controller during according to certain logical order and frequency vibrations, the electricity of piezo controller causes crooked crush seal cap rock respective regions distortion, thereby constitute Micropump on the sheet, drive the reagent mixing of in the circulating fluid passage, moving.
Chip of the present invention is used and is made in package shape by glass or makrolon material, on the sealing cap rock, be provided with reagent sample input port, reagent sample delivery outlet, form the circulating fluid passage at channel layer with etching or mould pressing process, upside at the sealing cap rock has been made three piezo controller mounting grooves, in order to realize the piezo controller driven effect, downside at the sealing cap rock, the projected position of piezo controller mounting groove, need splash-proofing sputtering metal titanium in advance, prevent chip this zone of bonding when ionic bonding or thermal bonding sealing.
Three piezo controllers of chip of the present invention rely on certain logical order to act on its lower channel layer circulating fluid passage, its certain sequence is opened, closure thereby make, this unlatching and closed logical order are such, the pass open open and close close open, switch leaves, switch closes, switch and pass switch, getting optimal value after it is optimized by certain frequency curve at interval determines, by this logic switch order, drive on the formation sheet, can in the circulating fluid passage, obtain driving force to promote the mixed flow of reagent.
Hybrid chip among the present invention is utilized earlier vacuum action to import two or more waiting by the reagent sample input port successively and is mixed the bench teat agent when carrying out the trace reagent mixing, starts piezo controller thereafter and mixes, and mix reagent is derived by the reagent sample delivery outlet.
The present invention has substantial characteristics and progress, hybrid chip of the present invention combines the characteristics of channel-type mixer and microcavity mixer, overcome the shortcoming of channel-type mixer mixing velocity length slowly consuming time and making of microcavity mixer and complicated operation, diffusion and active convection current between different reagent are strengthened, thereby lifting mixing efficiency, shorten mixing cycle, the shortcoming that cost of manufacture is high and compatible not strong, pass through Micrometer-Nanometer Processing Technology, not only reduced device volume greatly, reduced cost, also made its mass be processed into possibility.In addition, chip of the present invention can be used as micro-system and forms device and integrate with reagent detection or reaction member.Can be widely used in the The real time measure of biological reagent, chemical agent concentration and component, all have very strong practical value for preventive medicine, environmental water systems monitoring.
Description of drawings
Fig. 1 is a structural representation of the present invention
Fig. 2 is a decomposition texture synoptic diagram of the present invention
Fig. 3 structure rear view of the present invention
Embodiment
As Figure 1-3, the present invention includes: sealing cap rock 1, channel layer 2, piezo controller 4.Connected mode is: sealing cap rock 1 is sealed by ionic bonding technology or thermal bonding technology with channel layer 2, and piezo controller 4 embeds in three piezo controller mounting grooves 3 of sealing cap rock upside in sticking obedient mode.Sealing cap rock 1 upside is provided with three piezo controller mounting grooves 3, in order to realize piezo controller 4 driven effect, at sealing cap rock 1 upside reagent sample input/output port 5 is arranged, at the downside of sealing cap rock 1, the projected position of piezo controller mounting groove 3, be provided with Titanium sputtering zone 7, prevent chip this zone of bonding when ionic bonding or thermal bonding sealing.
Sealing cap rock 1 is that glass or makrolon material are made.Circulating fluid passage 6 is to be made on glass or makrolon material by etching or mould pressing technology.
Channel layer 2 forms circulating fluid passage 6 with etching or mould pressing process, when piezo controller 4 during according to certain logical order and frequency vibrations, the electricity of piezo controller 4 causes crooked crush seal cap rock respective regions distortion, thereby constitute Micropump on the sheet, drive the reagent mixing of in the circulating fluid passage, moving.
Claims (3)
1. piezo-electric drive type micro mixing chip, comprise: sealing cap rock (1), channel layer (2), it is characterized in that, also comprise: piezo controller (4), sealing cap rock (1) is sealed by ionic bonding technology or thermal bonding technology with channel layer (2), sealing cap rock (1) upside is provided with three piezo controller mounting grooves (3), piezo controller (4) embeds in three piezo controller mounting grooves (3) of sealing cap rock upside in sticking obedient mode, and channel layer (2) is provided with circulating fluid passage (6);
At the downside of sealing cap rock (1), the projected position of piezo controller mounting groove (3), be provided with Titanium sputtering zone (7).
2. piezo-electric drive type micro mixing chip according to claim 1 is characterized in that, at sealing cap rock (1) upside reagent sample input/output port (5) is arranged.
3. according to claim 1 or 2 described piezo-electric drive type micro mixing chips, it is characterized in that sealing cap rock (1) is glass or makrolon material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100295013A CN100385227C (en) | 2005-09-08 | 2005-09-08 | Piezo-electric driving type micro mixed chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100295013A CN100385227C (en) | 2005-09-08 | 2005-09-08 | Piezo-electric driving type micro mixed chip |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007101605035A Division CN101187609B (en) | 2005-09-08 | 2005-09-08 | Piezo-electric drive type micro mixing chip |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1737528A CN1737528A (en) | 2006-02-22 |
| CN100385227C true CN100385227C (en) | 2008-04-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100295013A Expired - Fee Related CN100385227C (en) | 2005-09-08 | 2005-09-08 | Piezo-electric driving type micro mixed chip |
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| CN (1) | CN100385227C (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110554184A (en) * | 2019-09-12 | 2019-12-10 | 深圳市科瑞达生物技术有限公司 | Chemiluminescent microfluidic chip |
| CN110794150A (en) * | 2019-10-30 | 2020-02-14 | 中山生物工程有限公司 | Recyclable blood type automatic analysis device and blood type analysis method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6190034B1 (en) * | 1995-10-03 | 2001-02-20 | Danfoss A/S | Micro-mixer and mixing method |
| EP1360987A2 (en) * | 2002-05-01 | 2003-11-12 | Hewlett-Packard Company | Mixing apparatus |
| US20040231990A1 (en) * | 2003-05-22 | 2004-11-25 | Aubry Nadine Nina | Electrohydrodynamic microfluidic mixer using transverse electric field |
| CN1584043A (en) * | 2004-05-27 | 2005-02-23 | 上海交通大学 | Spiral microchannel polymerase chain reacting chip |
| CN1645141A (en) * | 2005-01-20 | 2005-07-27 | 上海交通大学 | Polydimethylsiloxane based microorgan reagent analyzing and testing chip |
-
2005
- 2005-09-08 CN CNB2005100295013A patent/CN100385227C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6190034B1 (en) * | 1995-10-03 | 2001-02-20 | Danfoss A/S | Micro-mixer and mixing method |
| EP1360987A2 (en) * | 2002-05-01 | 2003-11-12 | Hewlett-Packard Company | Mixing apparatus |
| US20040231990A1 (en) * | 2003-05-22 | 2004-11-25 | Aubry Nadine Nina | Electrohydrodynamic microfluidic mixer using transverse electric field |
| CN1584043A (en) * | 2004-05-27 | 2005-02-23 | 上海交通大学 | Spiral microchannel polymerase chain reacting chip |
| CN1645141A (en) * | 2005-01-20 | 2005-07-27 | 上海交通大学 | Polydimethylsiloxane based microorgan reagent analyzing and testing chip |
Non-Patent Citations (4)
| Title |
|---|
| 一种新型压电驱动微流体混合器. 孙长敬等.微细加工技术，第2期. 2005 |
| 一种新型压电驱动微流体混合器. 孙长敬等.微细加工技术，第2期. 2005 * |
| 微混合器研究进展. 朱丽等.微纳电子技术，第4期. 2005 |
| 微混合器研究进展. 朱丽等.微纳电子技术，第4期. 2005 * |
Also Published As
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|---|---|
| CN1737528A (en) | 2006-02-22 |
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Granted publication date: 20080430 Termination date: 20100908 |