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CN109980059A - A kind of electrode has the LED chip structure of opening - Google Patents

A kind of electrode has the LED chip structure of opening Download PDF

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Publication number
CN109980059A
CN109980059A CN201910307212.7A CN201910307212A CN109980059A CN 109980059 A CN109980059 A CN 109980059A CN 201910307212 A CN201910307212 A CN 201910307212A CN 109980059 A CN109980059 A CN 109980059A
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CN
China
Prior art keywords
electrode
opening
led chip
chip structure
epitaxial structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910307212.7A
Other languages
Chinese (zh)
Inventor
杨勇志
叶佩青
吕永建
苏丽娣
林锋杰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xiamen Qian Zhao Semiconductor Technology Co Ltd
Original Assignee
Xiamen Qian Zhao Semiconductor Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xiamen Qian Zhao Semiconductor Technology Co Ltd filed Critical Xiamen Qian Zhao Semiconductor Technology Co Ltd
Priority to CN201910307212.7A priority Critical patent/CN109980059A/en
Publication of CN109980059A publication Critical patent/CN109980059A/en
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/36Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
    • H01L33/38Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Led Devices (AREA)

Abstract

The present invention provides a kind of LED chip structure of the electrode with opening, electrode including epitaxial structure and on the epitaxial structure, the top of the electrode is arranged close to the epitaxial structure, the bottom of the electrode is arranged far from the epitaxial structure, and the electrode is equipped at least one opening extended from the bottom of the electrode to the top of the electrode.Extra welding compound is adsorbed by the opening set by electrode, to avoid occurring globoid in welding process, therefore semiconductor chip is not in effectively increase the flatness of light-emitting surface because of the phenomenon that offset caused by welding and inclination.Especially on display and visualization product, have many advantages, such as that light emission direction is consistent, colour mixture is uniform.

Description

A kind of electrode has the LED chip structure of opening
Technical field
The present invention relates to the LED chip structures that emitting semiconductor technical field more particularly to a kind of electrode have opening.
Background technique
Light emitting diode be widely used in the advantages that its service life length, good luminous performance, energy conservation and environmental protection life lighting, The fields such as signal lamp, outdoor panchromatic large display screen.Existing light-emitting diode chip for backlight unit is usually made of epitaxial structure and electrode, Electrode is welded by the welding compounds such as tin cream and external circuit.
However, welding compound is by high temperature when welding when light-emitting diodes pipe size is smaller (such as Mini LED and Micro LED) It is melted into liquid, the surface tension of light emitting diode is especially big, and extra welding compound easily becomes the globoid of protrusion, to lead Photoluminescence diode is easy to appear the problems such as offset, inclination.
Summary of the invention
In view of this, it is an object of the present invention to: a kind of LED chip structure of the electrode with opening is provided, so that LED chip The problems such as being not in offset, inclination in welding.
To achieve the above object, the technical solution adopted by the present invention are as follows:
A kind of electrode has the LED chip structure of opening, and the electrode including epitaxial structure and on the epitaxial structure is described The top of electrode is arranged close to the epitaxial structure, and the bottom of the electrode is arranged far from the epitaxial structure, and the electrode is set The opening for thering is at least one to extend from the bottom of the electrode to the top of the electrode.
Preferably, the opening and the side wall of the electrode have distance.
Preferably, the opening includes in round and polygon along the section figure for being parallel to the electrode base direction It is at least one.
Preferably, the opposite side wall of electrode described in the open communication.
Preferably, the opening includes trapezoidal, triangle, semicircle along the section figure perpendicular to the electrode base direction At least one of shape and ellipse.
Preferably, the cross-sectional area of the opening is gradually contracted from the bottom of the electrode to the top-direction of the electrode It is small.
Preferably, the quantity of the opening is two or more, and more than two openings are uniform and are spaced apart.
Preferably, the opening has coarse side wall.
Preferably, one end of the bottom far from the electrode that is open and the top of the electrode have distance.
Preferably, described be open extends to the top of the electrode from the bottom of the electrode.
As can be seen from the above description, electrode of the invention has the LED chip structure of opening, pass through the opening set by electrode Extra welding compound is adsorbed, to avoid occurring globoid in welding process, therefore semiconductor chip be not in because The phenomenon that offset caused by welding and inclination, effectively increase the flatness of light-emitting surface.Especially in display and visualization product On, have many advantages, such as that light emission direction is consistent, colour mixture is uniform.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this The embodiment of invention for those of ordinary skill in the art without creative efforts, can also basis The attached drawing of offer obtains other attached drawings.
Fig. 1 is the schematic diagram that the electrode of the embodiment of the present invention has the LED chip structure of opening;
Fig. 2-9 is the structural schematic diagram of the electrode of the embodiment of the present invention;
Figure 10 is the schematic diagram that the electrode of the embodiment of the present invention one has the LED chip structure of opening;
Figure 11 is the schematic diagram that the electrode of the embodiment of the present invention two has the LED chip structure of opening;
Figure 12 is the corresponding structural representation of preparation method that the electrode of the embodiment of the present invention four has the LED chip structure of opening Figure;
Figure 13 is the corresponding structural representation of preparation method that the electrode of the embodiment of the present invention five has the LED chip structure of opening Figure.
1, epitaxial structure;2, electrode;21, it is open;3, photoresist layer.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.
As shown in Figure 1, the embodiment of the present invention provides a kind of LED chip structure of the electrode with opening, including epitaxial structure 1 With the electrode 2 being set on the epitaxial structure 1, the electrode 2 includes the bottom and top being oppositely arranged, and the connection bottom The side wall in portion and top.
The LED chip structure can be flip chip structure, formal dress chip structure, vertical chip structure or other LED Chip structure.The electrode 2 is including but not limited to cylindric, cube shape, hemisphere shape.
The top of the electrode 2 is arranged close to the epitaxial structure 1, and the bottom of the electrode 2 is far from the epitaxial structure 1 Setting, wherein the electrode 2 is equipped at least one opening extended from the bottom of the electrode 2 to the top of the electrode 2 21。
Further, the opening 21 has distance with the side wall of the electrode 2, in poroid, is illustrated in figure 2 electrode Bottom schematic view.On the one hand, extra welding compound is adsorbed into poroid opening 21, so that semiconductor chip welding is smooth, On the other hand, it is used as stability column after the welding compound solidification in poroid opening 21, effectively prevent semiconductor chip to deviate, so that core Piece is accurately positioned.Optionally, the opening 21 can be triangle along the section figure for the bottom direction for being parallel to the electrode 2 The polygons such as shape, rectangular, hexagon, or round or other figures with closed area, being illustrated in figure 3 opening is respectively The electrode base schematic diagram of rectangular, triangle, pentagon and hexagon.The opening 21 can also be the combination of former figures.
Further, the opposite side wall of the 21 connection electrode 2 of opening, it is in the form of slot.As shown in Figure 4.Wherein Fig. 4 is left Figure is the bottom schematic view of cylindrical electrode 2, and Fig. 4 right figure is the bottom schematic view of cube shape electrode 2.Opening 21 is made into channel-shaped, Other than it will not generate offset and inclination when semiconductor can be made to weld, also have the advantages that manufacture craft is simple.Optionally, slot The opening 21 of shape includes trapezoidal, triangle, semicircle and ellipse along the section figure perpendicular to 2 bottom direction of electrode One of shape or multiple combinations, wherein cross-sectional area of the opening 21 close to 2 top of electrode is less than the opening 21 Cross-sectional area close to 2 bottom of electrode is illustrated in figure 5 the electrode side of opening respectively trapezoidal, triangle and ellipse Wall schematic diagram.
Further, it is described opening 21 cross-sectional area from the bottom of the electrode 2 to the top-direction of the electrode 2 by Tapered small, i.e. the side wall of opening 21 is oblique.To increase the contact area of welding compound Yu electrode 2, welding compound is improved With the mutual grip of electrode 2, and 21 size of opening close to 2 bottom of electrode is larger, and absorption of being more convenient for is set to electrode 2 bottom Welding compound.
Further, the quantity of the opening 21 is two or more, more than two 21 uniform and intervals point that are open Cloth, if Fig. 6 left figure show the electrode base schematic diagram equipped with multiple pore-like openings, as Fig. 6 right figure is shown equipped with multiple slots The electrode sidewall schematic diagram of shaped opening.
By be arranged it is multiple uniformly and the opening 21 that is spaced apart, welding compound can by uniform adsorption, LED chip structure by Power is uniform, further improves the planarization of LED chip structure welding, and makees jointly after the welding compound solidification in multiple openings 21 For LED chip structure, ensure that LED chip structure will not generate offset to a greater extent.The opening 21 is described in connection When the opposite side wall of electrode 2 is arranged, multiple openings 21 can be parallel to each other, and be evenly spaced on as shown in 7 left figures, can also hand over Fork distribution, shown in right figure as shown in Figure 7, for the absorption uniformity for improving welding compound, by electrode 2 after 21 cross-distributions of the opening It is divided into the identical region of multiple areas.
Further, the opening 21 has coarse side wall.
Coarse side wall setting, the contact surface of welding compound and electrode 2 further increases, to further improve welding compound Adsorptivity and the stability of welding, especially in small size semiconductor chip using upper, effect is more significant.
Further, it is described opening 21 bottoms far from the electrode 2 one end and the electrode 2 top have away from From as shown in Figure 8.
Further, the opening 21 extends to the top of the electrode 2 from the bottom of the electrode 2, as shown in Figure 9.
From the foregoing, it is described opening 21 can penetrating electrode 2 be connected to epitaxial structure 1, can also be not through electrode 2.Opening 21 penetrating electrode 2, the structure setting are by a relatively simple in technique.Opening is 21 not through electrode 2, that is, be open 21 bottoms and outer Prolong structure 1 and is not likely to produce cavity so that welding compound comes into full contact with after entering opening 21 with 21 inner walls of opening with distance, improves The stability of welding.
As shown in Figure 10, the embodiment of the present invention one are as follows:
A kind of LED chip structure of the electrode with opening, the electrode 2 including epitaxial structure 1 and on the epitaxial structure 1, The electrode 2 includes the bottom and top being oppositely arranged, and the side wall of the connection bottom and top.The top of the electrode 2 Portion is arranged close to the epitaxial structure 1, and the bottom of the electrode 2 is arranged far from the epitaxial structure 1.
The electrode 2 is equipped with the opening 21 that more than two bottoms from the electrode extend to the top of the electrode, The opening 21 is rounded poroid, and the opening 21 and the side wall distance of the electrode 2 are arranged, more than two openings 21 Uniformly and it is spaced apart.
In a preferred embodiment, the aperture of above-mentioned opening from the bottom of the electrode to the top-direction of the electrode by It is tapered small.
As shown in figure 11, the embodiment of the present invention two are as follows:
A kind of LED chip structure of the electrode with opening, the electrode 2 including epitaxial structure 1 and on the epitaxial structure 1, The electrode 2 includes the bottom and top being oppositely arranged, and the side wall of the connection bottom and top.The top of the electrode 2 Portion is arranged close to the epitaxial structure 1, and the bottom of the electrode 2 is arranged far from the epitaxial structure 1.
The electrode 2 is equipped with the opening that more than two bottoms from the electrode 2 extend to the top of the electrode 2 21, more than two openings 21 are uniform and are spaced apart, 21 trapezoidal channel-shaped of the opening, described in 21 connection of opening The opposite two side walls of electrode 2, wherein cross-sectional area of the opening 21 close to 2 top of electrode is less than the opening 21 Cross-sectional area close to 2 bottom of electrode.
The embodiment of the present invention three are as follows:
A kind of electrode has the LED chip structure of opening, and the electrode including epitaxial structure and on the epitaxial structure is described Electrode includes the bottom and top being oppositely arranged, and the side wall of the connection bottom and top.The top of the electrode is close The epitaxial structure setting, the bottom of the electrode is arranged far from the epitaxial structure.
The electrode is equipped with the opening that more than two bottoms from the electrode extend to the top of the electrode, described Opening has coarse side wall, and the bottom of the opening and the epitaxial structure have distance.
The present embodiment can also be applied to above-described embodiment one and embodiment two.
In an alternative embodiment, described be open is extended to the top of the electrode by the bottom of the electrode, and described Epitaxial structure connection.
The embodiment of the present invention four are as follows:
A kind of electrode corresponding to above-described embodiment has the preparation method for the LED chip structure being open, comprising:
Electrode 2 is made by modes such as etchings on epitaxial structure 1;
Photoresist layer 3 is coated in the bottom of the electrode 2;
Mutually independent etching area and non-etched areas are marked off on the photoresist layer 3;
The photoresist layer 3 of the etching area is removed to expose the electrode 2, shown in obtained structure such as Figure 12 (a);
Then the part exposed after removal photoresist layer to the electrode 2 is etched, and is formed separate from the electrode 2 The opening 21 that one end of the epitaxial structure 1 extends to the electrode 2 close to one end of the epitaxial structure 1, obtained structure As shown in Figure 12 (b).
The specific setting of the opening can refer to the various embodiments described above, and details are not described herein again.
The embodiment of the present invention five are as follows:
A kind of electrode corresponding to above-described embodiment has the preparation method for the LED chip structure being open, comprising:
Photoresist layer 3 is coated on epitaxial structure 1;
Mutually independent etching area and non-etched areas are marked off on the photoresist layer;
The photoresist layer 3 for removing the etching area exposes the epitaxial structure 1;
In side of the photoresist layer 3 far from the epitaxial structure 1 and the extension exposed after removing photoresist layer Body structure surface coats one layer of electrode 2, shown in obtained structure such as Figure 13 (a);
Electrode 2 of the photoresist layer 3 far from 1 side of epitaxial structure, obtained structure such as Figure 13 (b) are removed using gold process is torn It is shown, and the remaining photoresist layer 3 of removal, one end from the electrode 2 far from the epitaxial structure 1 is obtained to the electrode 2 openings 21 extended close to one end of the epitaxial structure 1, as shown in Figure 13 (c).
The specific setting of the opening can refer to the various embodiments described above, and details are not described herein again.
In above-mentioned preparation method, first passes through photoresist layer and limits electrode zone and open area, be coated with electrode, In, partial electrode can be directly coated on epitaxial structure, and partial electrode is then coated on photoresist layer, therefore by tearing gold Degumming process removes extra electrode (electrode layer i.e. on photoresist layer) and the electrode with opening can be obtained in photoresist.
In conclusion the LED chip structure with opening provided by the invention, it is extra to be adsorbed by opening set by electrode Welding compound, the problems such as chip is not in inclination, offset in welding, it is excellent to have that light-emitting surface is smooth, light emission direction is consistent etc. Point is applied and can reach wider viewing angle on light-emitting diode display, will not generate polarisation phenomenon, and can be improved display Colour mixture uniformity.
It should be noted that all the embodiments in this specification are described in a progressive manner, each embodiment weight Point explanation is the difference from other embodiments, and the same or similar parts between the embodiments can be referred to each other.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, as defined herein General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, of the invention It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one The widest scope of cause.

Claims (10)

1. the LED chip structure that a kind of electrode has opening, which is characterized in that including epitaxial structure and be set to the epitaxial structure On electrode, the top of the electrode is arranged close to the epitaxial structure, and the bottom of the electrode is set far from the epitaxial structure It sets, the electrode is equipped at least one opening extended from the bottom of the electrode to the top of the electrode.
2. electrode according to claim 1 have opening LED chip structure, which is characterized in that it is described opening with it is described The side wall of electrode has distance.
3. the LED chip structure that electrode according to claim 2 has opening, which is characterized in that the opening is along parallel Section figure in the electrode base direction includes at least one of round and polygon.
4. the LED chip structure that electrode according to claim 1 has opening, which is characterized in that the open communication institute State the opposite side wall of electrode.
5. the LED chip structure that electrode according to claim 4 has opening, which is characterized in that the opening is along vertical Section figure in the electrode base direction includes at least one of trapezoidal, triangle, semicircle and ellipse.
6. electrode according to claim 1 have opening LED chip structure, which is characterized in that the opening it is transversal Area is gradually reduced from the bottom of the electrode to the top-direction of the electrode.
7. the LED chip structure that electrode according to claim 1 has opening, which is characterized in that the quantity of the opening For two or more, more than two openings are uniform and are spaced apart.
8. the LED chip structure that electrode according to claim 1 has opening, which is characterized in that the opening has thick Rough side wall.
9. the LED chip structure that electrode according to claim 1 has opening, which is characterized in that described to be open far from institute The top of one end and the electrode for stating the bottom of electrode has distance.
10. the LED chip structure that electrode according to claim 1 has opening, which is characterized in that the opening is described in The bottom of electrode extends to the top of the electrode.
CN201910307212.7A 2019-04-17 2019-04-17 A kind of electrode has the LED chip structure of opening Pending CN109980059A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112909153A (en) * 2019-12-03 2021-06-04 深圳市聚飞光电股份有限公司 Flip LED chip, circuit board and electronic equipment
WO2021134488A1 (en) * 2019-12-31 2021-07-08 重庆康佳光电技术研究院有限公司 Light-emitting diode chip, display panel, and electronic device
CN113745384A (en) * 2020-05-29 2021-12-03 成都辰显光电有限公司 Semiconductor device, LED chip and transfer method thereof

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JP2003174195A (en) * 2001-12-07 2003-06-20 Abel Systems Inc Light emitting diode
JP2007123409A (en) * 2005-10-26 2007-05-17 Citizen Electronics Co Ltd Light emitting diode chip
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Cited By (4)

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Publication number Priority date Publication date Assignee Title
CN112909153A (en) * 2019-12-03 2021-06-04 深圳市聚飞光电股份有限公司 Flip LED chip, circuit board and electronic equipment
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CN113745384B (en) * 2020-05-29 2023-09-22 成都辰显光电有限公司 Semiconductor device, LED chip and transfer method thereof

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