CN109855774B - Layered capacitive multidimensional force sensor - Google Patents
Layered capacitive multidimensional force sensor Download PDFInfo
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- CN109855774B CN109855774B CN201910065266.7A CN201910065266A CN109855774B CN 109855774 B CN109855774 B CN 109855774B CN 201910065266 A CN201910065266 A CN 201910065266A CN 109855774 B CN109855774 B CN 109855774B
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- 239000003990 capacitor Substances 0.000 claims abstract description 16
- 238000005259 measurement Methods 0.000 claims abstract description 16
- 239000000463 material Substances 0.000 claims abstract description 3
- 230000006698 induction Effects 0.000 abstract description 10
- 238000000034 method Methods 0.000 abstract description 4
- 230000008569 process Effects 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000012545 processing Methods 0.000 abstract description 2
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 206010063385 Intellectualisation Diseases 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
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Abstract
The invention discloses a layered capacitive multidimensional force sensor which consists of a deformation layer and a measurement layer. The deformation layer mainly comprises a deformation layer outer ring, a deformation layer inner ring and a snakelike structure deformation beam. Threaded holes and through holes are formed in the deformation layer, and the threaded holes and the through holes are respectively used for connecting the measuring layer and the input shaft. The deformation layer is provided with a countersunk hole on the outer ring for connection of external load. The measuring layer is provided with a sensor movable electrode part and a measuring inner ring, wherein the sensor movable electrode part comprises a vertical induction capacitor movable electrode part and a parallel induction capacitor movable electrode part. According to the invention, the measuring layer and the deformation layer are distributed in an up-and-down layered manner, different materials can be used for the measuring layer and the deformation layer, and meanwhile, the sensor is easier to process, the manufacturing cost is reduced, and the processing precision is improved, so that the measuring precision of the sensor can be improved.
Description
Technical Field
The invention belongs to the technical field of sensors, relates to a force sensor, and in particular relates to a layered capacitive multi-dimensional force sensor.
Background
The multi-dimensional force sensor can realize measurement of a space multi-dimensional force signal, is used as one of the most important sensors for realizing industrial intellectualization, and is widely applied to the fields of machining, automobile manufacturing, intelligent robots, aerospace and the like. Force sensors are of many types, and the manner of generating force signals can be classified into strain type, piezoelectric type, piezomagnetic type, optical type, capacitive type, and the like. The force sensors which are mature in the market at present are mainly electromagnetic and strain. The electromagnetic force sensor outputs two paths of angular displacement signals with phase difference, force information is obtained by combining the signals, and the sensor is a non-contact sensor without abrasion, but cannot be applied to a robot due to large volume. The strain gauge has higher sensitivity and faster response, but the structure and circuit design are complex, the force decoupling is difficult, an additional A/D converter is needed, a strain gauge is needed to be precisely adhered, the strain gauge is easy to damage, and the strain gauge is too sensitive to electromagnetic noise.
The capacitive force sensor has the advantages of good temperature stability, simple structure, strong adaptability, small electrostatic attraction, good dynamic response, capability of realizing non-contact detection and the like. However, the main structure of the capacitive multi-dimensional force sensor is very complex to process at present, so that the adding precision is not high, and the measuring precision is affected.
Disclosure of Invention
The invention aims to provide a layered capacitive multi-dimensional force sensor, which aims at the defects of the conventional capacitive multi-dimensional force sensor and adopts the upper and lower layered distribution of a measuring layer and a deformation layer.
In order to achieve the above object, the present invention adopts the following technical scheme:
A layered capacitive multidimensional force sensor mainly comprises a deformation layer 1 and a measurement layer 2, wherein the deformation layer 1at least comprises a deformation layer outer ring 3, a deformation layer inner ring 4, a snake-shaped structure deformation beam 5 and an overload protection beam 6, the deformation layer inner ring 4 is provided with a threaded hole 7 and a through hole 8, the measurement layer 2 at least comprises a measurement layer inner ring 9, a parallel plate induction capacitor movable electrode part 10 and a vertical induction capacitor movable electrode part 11, and the number of the parallel plate induction capacitor movable electrode parts 10 and the number of the vertical induction capacitor movable electrode parts 11 are all 4 and are uniformly distributed outside the measurement layer inner ring 9. The measuring layer 2 is fixedly connected to the deformation layer inner ring 4 through a threaded hole 7, the deformation beams 5 with the snakelike structure are distributed in spoke type along the outer side of the deformation layer inner ring 4, and the overload protection beams 6 are cantilever beams connected to the outer edge of the deformation layer inner ring 4 and are uniformly distributed along the outer side of the deformation layer inner ring 4 and are used for installing an overload protection device.
The invention has the characteristics and beneficial effects that:
According to the invention, the measuring layer and the deformation layer are distributed in an up-and-down layered manner, and different materials can be used for the measuring layer and the deformation layer, so that the sensor is easier to process, the cost of the sensor is reduced, the processing precision is improved, and the measuring precision of the sensor is improved.
Drawings
FIG. 1 is an exploded perspective view of the present invention;
FIG. 2 is an assembled view of the present invention;
In the drawings, a deformation layer 1, a measuring layer 2, a deformation layer inner ring 3, a deformation layer outer ring 4, a snake-shaped structure deformation beam 5, an overload protection beam 6, a threaded hole 7, a through hole 8, a measuring layer inner ring 9, a parallel plate induction capacitor movable electrode part 10 and a vertical induction capacitor movable electrode part 11.
Detailed Description
For a better understanding of the present invention, exemplary embodiments of the present invention will be described below with reference to the accompanying drawings.
As shown in figures 1 to 2, the layered capacitive multidimensional force sensor mainly comprises a deformation layer 1 and a measurement layer 2, wherein the deformation layer 1 at least comprises a deformation layer outer ring 3, a deformation layer inner ring 4, a snake-shaped structure deformation beam 5 and an overload protection beam 6, the deformation layer inner ring 4 is provided with a threaded hole 7 and a through hole 8, the measurement layer 2 at least comprises a measurement layer inner ring 9, a parallel plate induction capacitor movable electrode part 10 and a vertical induction capacitor movable electrode part 11, and the number of the parallel plate capacitive movable electrode part 10 and the vertical capacitive movable electrode part 11 is 4 and is uniformly distributed outside the measurement layer inner ring 9. The measuring layer 2 is fixedly connected to the deformation layer inner ring 4 through a threaded hole 7, the deformation beams 5 with the snake-shaped structure are distributed in a wheel-assisted mode along the outer side of the deformation layer inner ring 4, one end of each deformation beam is connected to the inner side of the deformation layer outer ring 3, the other end of each deformation beam is connected to the inner side of the deformation layer inner ring 4, and the overload protection beams 6 are cantilever beams connected to the outer edge of the deformation layer inner ring 4 and are uniformly distributed along the outer side of the deformation layer inner ring 4 and are used for installing an overload protection device. The number of the serpentine deformed beams 5 is 4 in the figure, but in the actual production process, the number of the serpentine deformed beams 5 can be adjusted according to the magnitude of the elastic force.
The invention has the working processes that the deformation layer inner ring 4 receives external load and is transmitted to the deformation layer outer ring 3 through the snakelike structure deformation beam 5, in the transmission process, the snakelike structure deformation beam 5 deforms to cause the measuring layer 2 to slightly deflect, thereby causing the polar distance change of the capacitor, changing the capacitance value of the capacitor, collecting the change value of the capacitance through a detection circuit, and finally calculating the force in all directions through corresponding decoupling formulas.
Finally, the above description is merely a preferred embodiment of the present invention, and the present invention is not limited to the above examples, but various modifications and variations are possible. The specification and drawings are, accordingly, to be regarded in an illustrative rather than a restrictive sense. All changes that come within the meaning and range of equivalency of the claims are to be embraced within their scope.
Claims (2)
1. A layered capacitive multi-dimensional force sensor is characterized by comprising a deformation layer (1) and a measurement layer (2), wherein the deformation layer (1) at least comprises a deformation layer outer ring (3), a deformation layer inner ring (4), a snakelike structure deformation beam (5) and an overload protection beam (6), the deformation layer inner ring (4) is provided with a threaded hole (7) and a through hole (8), the measurement layer (2) is fixedly connected to the deformation layer inner ring (4) through the threaded hole (7), one end of the snakelike structure deformation beam (5) is connected to the inner side of the deformation layer outer ring (3) and the other end of the snakelike structure deformation beam is connected to the outer side of the deformation layer inner ring (4), the overload protection beam (6) is a cantilever beam connected to the outer edge of the deformation layer inner ring (4) and is used for installing an overload protection device, the measurement layer (2) and the deformation layer (1) are distributed in a split structure in an up-down layered mode, and the measurement layer (2) and the deformation layer (1) are made of different materials.
2. A layered capacitive multi-dimensional force sensor as in claim 1, wherein said measurement layer (2) comprises at least a measurement layer inner ring (9), parallel plate sense capacitor electrode portions (10), vertical sense capacitor electrode portions (11), said parallel plate sense capacitor electrode portions (10) being located above said overload protection beam (6), said vertical sense capacitor electrode portions (11) being located above said serpentine shaped deformation beam (5).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910065266.7A CN109855774B (en) | 2019-01-23 | 2019-01-23 | Layered capacitive multidimensional force sensor |
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| CN201910065266.7A CN109855774B (en) | 2019-01-23 | 2019-01-23 | Layered capacitive multidimensional force sensor |
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| CN109855774A CN109855774A (en) | 2019-06-07 |
| CN109855774B true CN109855774B (en) | 2024-12-17 |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112539862A (en) * | 2020-12-04 | 2021-03-23 | 法奥意威(苏州)机器人系统有限公司 | Torque measuring device for robot joint |
| CN113432761A (en) * | 2021-05-31 | 2021-09-24 | 杭州电子科技大学 | Touch sensor for robot with inertial environment compensation function and manufacturing method thereof |
| CN114454217B (en) * | 2021-12-07 | 2024-06-04 | 苏州艾利特机器人有限公司 | Redundant sensing multidimensional force sensor and force control robot |
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| CN103430000A (en) * | 2011-07-27 | 2013-12-04 | 三角力量管理株式会社 | Dynamic sensor |
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| CN107044898A (en) * | 2017-03-28 | 2017-08-15 | 东南大学 | A kind of six-dimension force sensor of flexible body structure |
| CN209416542U (en) * | 2019-01-23 | 2019-09-20 | 广西大学 | A Layered Capacitive Multidimensional Force Sensor |
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| FR2774469B1 (en) * | 1998-02-04 | 2000-03-03 | Roulements Soc Nouvelle | TORQUE SENSOR FOR ROTATING SHAFT |
| KR20010083634A (en) * | 2000-02-17 | 2001-09-01 | 윤준호 | 2-axis loadcell |
| US6809529B2 (en) * | 2001-08-10 | 2004-10-26 | Wacoh Corporation | Force detector |
| TWI383130B (en) * | 2009-07-13 | 2013-01-21 | Univ Nat Taiwan | Capacity pressure sensor and method for fabricating thereof |
| JP2012145497A (en) * | 2011-01-13 | 2012-08-02 | Fanuc Ltd | Capacitance force sensor |
| KR102330396B1 (en) * | 2016-12-02 | 2021-11-24 | 주식회사 로보터스 | Capacitive sensor |
| US11085836B2 (en) * | 2017-03-06 | 2021-08-10 | Tri-Force Management Corporation | Force sensor that detects at least one of a force in each axial direction and a moment around each axis in an XYZ three-dimensional coordinate system |
| CN207180911U (en) * | 2017-03-29 | 2018-04-03 | 广西安博特智能科技有限公司 | A kind of torque sensor based on electric capacity edge effect |
| CN207280645U (en) * | 2017-03-29 | 2018-04-27 | 广西大学 | A kind of condenser type torque sensor with ladder beam |
| CN114323396B (en) * | 2021-12-23 | 2022-11-11 | 西安交通大学 | MEMS capacitive six-axis force sensor chip and preparation process thereof |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103430000A (en) * | 2011-07-27 | 2013-12-04 | 三角力量管理株式会社 | Dynamic sensor |
| CN107044898A (en) * | 2017-03-28 | 2017-08-15 | 东南大学 | A kind of six-dimension force sensor of flexible body structure |
| CN106969864A (en) * | 2017-03-29 | 2017-07-21 | 广西安博特智能科技有限公司 | A kind of double differential condenser type torque sensor |
| CN209416542U (en) * | 2019-01-23 | 2019-09-20 | 广西大学 | A Layered Capacitive Multidimensional Force Sensor |
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