CN109830419A - A kind of miniature Penning ion source - Google Patents
A kind of miniature Penning ion source Download PDFInfo
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- CN109830419A CN109830419A CN201910070225.7A CN201910070225A CN109830419A CN 109830419 A CN109830419 A CN 109830419A CN 201910070225 A CN201910070225 A CN 201910070225A CN 109830419 A CN109830419 A CN 109830419A
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Abstract
The present invention relates to superconducting cyclotron fields, disclose a kind of miniature Penning ion source, including casing, anode canister is provided in the casing, cathode is provided in the casing, the cathode is located at the both ends of the casing, the anode canister is between the cathode, insulating part is provided on the cathode, the insulating part includes first collets of the setting on the cathode for insulating with casing, the second collets on first collets for insulating with anode canister are set, third collets on first collets for insulating with casing are set, the both ends of the anode canister offer hydrogen paths, the anode canister offers extraction seam far from the side of hydrogen paths, it is logical that the gas transmission being connected to the hydrogen paths is offered on the casing.The present invention is not easy to influence the effect of plasma generation.
Description
Technical field
The present invention relates to the technical fields of superconducting cyclotron, more particularly, to a kind of miniature Penning ion source.
Background technique
Cyclotron is so that charged particle is made circumnutation jointly using magnetic field and electric field at present, during exercise through high frequency
The device that electric field accelerates repeatedly is the important instrument in high-energy physics, and wherein (superconducting cyclotron adds superconduction isochronous cyclotron
One branch of fast device) be current medical proton therapy accelerator core equipment.Medical proton therapy accelerator can be realized
Tumour is treated with proton, the Heavy ion beam in microcosmos, is the most advanced radiation therapy technology in the world today, only individually
Developed country grasps and applies the technology.
Existing general by Penning ion source generation plasma, hydrogen is entered by the hydrogen paths of anode canister side
The voltage that upper kilovolt is loaded into anode canister, between anode canister and cathode is formed by the collision of electronics and neutral gas molecule
A large amount of plasma.
Prior art among the above have the following deficiencies: due to hydrogen be by the hydrogen paths of anode canister side into
In the anode canister entered, so that the Hydrogen distribution in anode canister is uneven；To make Hydrogen distribution uniformly to be passed through compared with
More hydrogen is easy to make that big fire occurs between cathode and anode canister in this way it will cause the amounts of hydrogen being passed through is larger, while in length
Under the operation of time, it be easy to cause the insulating properties between cathode and anode canister to reduce, influences the generation of plasma.
Summary of the invention
In view of the deficienciess of the prior art, having the invention reside in a kind of miniature Penning ion source is provided and being not easy to influence
The effect that plasma generates.
To achieve the above object, the present invention provides the following technical scheme that a kind of miniature Penning ion source, including casing,
It is provided with anode canister in the casing, cathode is provided in the casing, the cathode is located at the both ends of the casing, the sun
Pole cylinder is provided with insulating part between the cathode on the cathode, the insulating part includes that setting is used on the cathode
In the first collets to insulate with casing, be used to insulate with anode canister on first collets second is set
The third collets for being used to insulate with casing on first collets, the both ends of the anode canister are arranged in collets
Offer hydrogen paths, the anode canister offers extraction seam far from the side of hydrogen paths, offers on the casing and institute
State the gas distribution channel of hydrogen paths connection.
By using above-mentioned technical proposal, hydrogen enters the both ends of anode canister through gas distribution channel and hydrogen paths, then
It is ionized, helically line moves electronics in anode canister, the neutral gas point during electron motion, in electronics and anode canister
Son collision, to form a large amount of plasma, plasma forms particle a fluid stream from seam extraction is drawn；Since hydrogen is from anode
The both ends of cylinder enter in anode canister, so that the Hydrogen distribution in anode canister is more uniform, while decreasing the hydrogen being passed through
The amount of gas keeps main vacuum better, imitates the extraction of plasma so that the plasma distribution in anode canister is more uniform
Rate is higher, and the insulating properties between cathode and anode canister is made to be not easy to reduce, to be not easy to influence the generation of plasma.
The present invention is further arranged to: the two sides of the third collets are respectively and in first collets and casing
Wall contradicts, and the both ends of second collets are contradicted with first collets and anode canister respectively.
By using above-mentioned technical proposal, the first collets and third collets insulate between cathode and casing,
Second collets insulate between cathode and anode canister, so that plasma can be generated normally.
The present invention is further arranged to: the anode canister includes the anode cavities formed in cylinder and cylinder, the anode cavities
Including intermediate cavity and positioned at intermediate cavity both ends and the end chambers that are connected to intermediate cavity, the end chambers are close to intermediate
The internal diameter of chamber is less than internal diameter of the end chambers far from intermediate cavity one end, and the hydrogen paths and end chambers connect
It is logical, the extraction seam and middle part chamber.
By using above-mentioned technical proposal, hydrogen enters from end chambers, and plasma converges under the drive of electromagnetic field
It in intermediate cavity, is then left from intermediate cavity, to improve ejection efficiency.
The present invention is further arranged to: the cylinder is greater than the extraction far from the thickness for the inner wall for drawing seam side and stitches institute
In the thickness of the inner wall of side.
By using above-mentioned technical proposal, the length for drawing seam is shorter, is drawing the shifting in seam so as to shorten plasma
The dynamic time, the inner wall thickness of the other side is larger, so that hydrogen paths are longer, increases the inlet of hydrogen.
The present invention is further arranged to: first collets, the second collets and third collets are all made of boron nitride
It is made.
By using above-mentioned technical proposal, boron nitride resistivity with higher can play the effect of insulation, while nitrogen
The high-temperature stability of change boron is fine, thermal coefficient is very high, thus relatively stable in entire plasma generation process.
The present invention is further arranged to: the length for drawing seam is 5 millimeters, and width is 0.5 millimeter.
By using above-mentioned technical proposal, the bigger of the length and width of seam is drawn, to make a small amount of and continuous etc.
Gas ions are left from extraction seam, to more quickly form plasma beam.
The present invention is further arranged to: the diameter of the hydrogen paths is 2 millimeters.
By using above-mentioned technical proposal, the diameter of hydrogen paths is smaller, so as to hydrogen inlet realize compared with
Accurately to control, to keep the intake of hydrogen more accurate.
The present invention is further arranged to: the hydrogen in the anode cavities is high-purity hydrogen, and output pressure is 202.6 kPas.
By using above-mentioned technical proposal, high-purity hydrogen reduces influence of the foreign gas to ionization, and distribution pressure is
202.6 kPa.
The present invention is further arranged to: the anode canister is made of copper.
By using above-mentioned technical proposal, copper and extraneous conducting, to form ground potential.
The present invention is further arranged to: the cathode is made of the tantalum of 100% purity of low outlet.
By using above-mentioned technical proposal, tantalum itself is relatively stable, so that cathode is not easy that chemistry occurs in ionization
Reaction.
In conclusion the invention has the following advantages:
By setting anode canister and hydrogen paths, hydrogen the both ends of anode canister are entered from hydrogen paths so that hydrogen compared with
To uniformly enter in anode canister so that Hydrogen distribution in anode canister more uniformly, while decreasing the hydrogen being passed through
The amount of gas keeps main vacuum better, imitates the extraction of plasma so that the plasma distribution in anode canister is more uniform
Rate is higher, and the insulating properties between cathode and anode canister is made to be not easy to reduce, to be not easy to influence the generation of plasma.
Detailed description of the invention
Fig. 1 is schematic diagram of internal structure of the invention；
Fig. 2 is enlarged drawing at the A of Fig. 1, embodies the connection structure of main line and the first looped pipeline road.
Appended drawing reference: 1, casing；2, anode canister；21, cylinder；22, anode cavities；221, intermediate cavity；222, end chambers；
223, hydrogen paths；224, seam is drawn；3, cathode；4, insulating part；41, the first collets；42, the second collets；43, third is exhausted
Edge block；5, gas distribution channel；51, main line；52, the first looped pipeline road；53, the second looped pipeline road.
Specific embodiment
Below in conjunction with attached drawing, invention is further described in detail.
It referring to Figures 1 and 2, is a kind of miniature Penning ion source disclosed by the invention, including casing 1, casing 1 uses resistance to height
Warm high pressure, low outlet tungsten-copper alloy material be made.Anode canister 2 is fixedly connected in casing 1, anode canister 2 is made of copper, sun
Pole cylinder 2 is located at the middle part of casing 1.The both ends of casing 1 are fixedly connected with cathode 3, and cathode 3 uses the tantalum of 100% purity of low outlet
It is made.Casing 1 is located in magnetic field, and magnetic direction is parallel with the length direction of anode canister 2, magnetic field strength 5000GS-6000GS,
It is provided with insulating part 4 on cathode 3, insulating part 4 includes the first collets 41, the second collets 42 and third collets 43, and first
Collets 41, the second collets 42 and third collets 43 are all made of boron nitride and are made, and the first collets 41 are fixedly connected on yin
On pole 3, the two sides of third collets 43 are contradicted with the inner wall of casing 1 and cathode 3 respectively.The both ends of second collets 42 respectively with
First collets 41 and anode canister 2 contradict.
Anode canister 2 includes cylinder 21 and anode cavities 22, and anode cavities 22 are located in cylinder 21, and the two sides of anode cavities 22 are opened respectively
Equipped with hydrogen paths 223 and draw seam 224.Anode cavities 22 include intermediate cavity 221 and end chambers 222, intermediate cavity 221
Internal diameter is 10mm, and end chambers 222 are located at the both ends of intermediate cavity 221 and are connected to intermediate cavity 221, and end chambers 222 are remote
Internal diameter from 221 one end of intermediate cavity is 15mm, and the total length of anode canister 2 is 20mm.It is provided in each end chambers 222
One hydrogen paths 223, the diameter of hydrogen paths 223 are 2mm, draw the middle part that seam 224 is located at intermediate cavity 221, draw seam
224 length is 5mm, width 0.5mm, and cylinder 21 is greater than far from the thickness for the inner wall for drawing 224 sides of seam draws 224 institutes of seam
In the thickness of the inner wall of side.
Gas distribution channel 5 is offered on casing 1, gas distribution channel 5 includes main line 51, the first looped pipeline road 52 and the second looped pipeline road
53, the both ends on the first looped pipeline road 52 and the second looped pipeline road 53 are connected to main line 51 and hydrogen paths 223 respectively, main line 51,
53 groups of first looped pipeline road 52 and the second looped pipeline road are shaped to " F " shape.
The implementation principle of the present embodiment are as follows: the high-purity hydrogen that 202.6 kPas of output pressure position is logical through gas distribution channel 7 and hydrogen
Road 223 enters the both ends of anode canister 2, and hydrogen flowing quantity is 3sccm-4sccm at this time, then loads 1.5Kv-3Kv's in cathode 3
Voltage is ionized, and helically line moves electronics in anode canister 2, the neutrality during electron motion, in electronics and anode canister 2
Gas molecule collision, to form a large amount of plasma, plasma forms particle a fluid stream from 224 extraction of seam is drawn；Due to
Hydrogen enters in anode canister 2 from the both ends of anode canister 2, so that the Hydrogen distribution in anode canister 2 is more uniform, while also subtracting
The amount for the hydrogen being passed through is lacked, so that the plasma distribution in anode canister 2 is more uniform, has kept main vacuum better, make
The ejection efficiency of gas ions is higher, and the insulating properties between cathode 3 and anode canister 2 is made to be not easy to reduce, to be not easy to influence plasma
The generation of body.
The embodiment of present embodiment is presently preferred embodiments of the present invention, not limits protection of the invention according to this
Range, therefore: the equivalence changes that all structures under this invention, shape, principle are done, should all be covered by protection scope of the present invention it
It is interior.
Claims (10)
1. a kind of miniature Penning ion source is provided with anode canister (2), institute in the casing (1) it is characterized in that: including casing (1)
It states and is provided with cathode (3) in casing (1), the cathode (3) is located at the both ends of the casing (1), and the anode canister (2) is located at institute
It states between cathode (3), is provided with insulating part (4) on the cathode (3), the insulating part (4) includes being arranged in the cathode (3)
On the first collets (41) for insulating with casing (1), setting is used on first collets (41) and anode
Cylinder (2) insulate the second collets (42), be arranged on first collets (41) for insulating with casing (1)
Third collets (43), the both ends of the anode canister (2) offer hydrogen paths (223), and the anode canister (2) is far from hydrogen
The side in channel (223) offers extraction seam (224), offers on the casing (1) and to be connected to the hydrogen paths (223)
Gas distribution channel (5).
2. a kind of miniature Penning ion source according to claim 1, it is characterized in that: the two sides of the third collets (43)
Respectively with the inner wall of first collets (41) and casing (1) contradict, the both ends of second collets (42) respectively with institute
It states the first collets (41) and anode canister (2) contradicts.
3. a kind of miniature Penning ion source according to claim 1, it is characterized in that: the anode canister (2) includes cylinder
(21) and cylinder (21) in formed anode cavities (22), the anode cavities (22) include intermediate cavity (221) and be located at intermediate cavity
Room (221) both ends and the end chambers (222) being connected to intermediate cavity (221), the end chambers (222) are close to intermediate cavity
(221) internal diameter of one end is less than the internal diameter of the end chambers (222) far from intermediate cavity (221) one end, the hydrogen paths
(223) it is connected to end chambers (222), the extraction seam (224) and middle part chamber.
4. a kind of miniature Penning ion source according to claim 3, it is characterized in that: the cylinder (21) is far from extraction seam
(224) thickness of the inner wall of side is greater than the thickness of the inner wall for drawing seam (224) side.
5. a kind of miniature Penning ion source according to claim 1, it is characterized in that: first collets (41), second
Collets (42) and third collets (43) are all made of boron nitride and are made.
6. a kind of miniature Penning ion source according to claim 1, it is characterized in that: the length for drawing seam (224) is 5
Millimeter, width are 0.5 millimeter.
7. a kind of miniature Penning ion source according to claim 1, it is characterized in that: the diameter of the hydrogen paths (223)
It is 2 millimeters.
8. a kind of miniature Penning ion source according to claim 3, it is characterized in that: the hydrogen inputted in the anode cavities (22)
Gas is high-purity hydrogen, and output pressure is 202.6 kPas.
9. a kind of miniature Penning ion source according to claim 1, it is characterized in that: the anode canister (2) is made of copper.
10. a kind of miniature Penning ion source according to claim 1, it is characterized in that: the cathode (3) is using low outlet
The tantalum of 100% purity is made.
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| CN201910070225.7A CN109830419B (en) | 2019-01-24 | 2019-01-24 | Miniature penning ion source |
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| CN201910070225.7A CN109830419B (en) | 2019-01-24 | 2019-01-24 | Miniature penning ion source |
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| CN109830419B CN109830419B (en) | 2020-05-19 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111681937A (en) * | 2020-06-09 | 2020-09-18 | 中国科学院合肥物质科学研究院 | Cold cathode penning ion source device for high-energy ion implanter |
| CN113488364A (en) * | 2021-07-13 | 2021-10-08 | 迈胜医疗设备有限公司 | Multi-particle hot cathode penning ion source and cyclotron |
| CN115188648A (en) * | 2022-09-08 | 2022-10-14 | 合肥中科离子医学技术装备有限公司 | Internal penning source structure and cyclotron |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101045989A (en) * | 2007-04-30 | 2007-10-03 | 大连理工大学 | Low energy ion implanter based on great area DC pulse plasma |
| CN101128911A (en) * | 2005-02-28 | 2008-02-20 | 爱普斯碧德股份有限公司 | System and process for high-density, low-energy plasma enhanced vapor phase epitaxy |
| US20120104273A1 (en) * | 2010-11-02 | 2012-05-03 | Twin Creeks Technologies, Inc. | Ion Source and a Method of Generating an Ion Beam Using an Ion Source |
| CN103038387A (en) * | 2011-08-02 | 2013-04-10 | 新柯隆株式会社 | Method for forming silicon carbide thin film |
| CN106098517A (en) * | 2016-07-29 | 2016-11-09 | 中国原子能科学研究院 | Miniature Penning ion source under a kind of highfield |
| CN106128928A (en) * | 2016-07-29 | 2016-11-16 | 中国原子能科学研究院 | The deriving structure of miniature Penning ion source under a kind of highfield |
-
2019
- 2019-01-24 CN CN201910070225.7A patent/CN109830419B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101128911A (en) * | 2005-02-28 | 2008-02-20 | 爱普斯碧德股份有限公司 | System and process for high-density, low-energy plasma enhanced vapor phase epitaxy |
| CN101045989A (en) * | 2007-04-30 | 2007-10-03 | 大连理工大学 | Low energy ion implanter based on great area DC pulse plasma |
| US20120104273A1 (en) * | 2010-11-02 | 2012-05-03 | Twin Creeks Technologies, Inc. | Ion Source and a Method of Generating an Ion Beam Using an Ion Source |
| CN103038387A (en) * | 2011-08-02 | 2013-04-10 | 新柯隆株式会社 | Method for forming silicon carbide thin film |
| CN106098517A (en) * | 2016-07-29 | 2016-11-09 | 中国原子能科学研究院 | Miniature Penning ion source under a kind of highfield |
| CN106128928A (en) * | 2016-07-29 | 2016-11-16 | 中国原子能科学研究院 | The deriving structure of miniature Penning ion source under a kind of highfield |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111681937A (en) * | 2020-06-09 | 2020-09-18 | 中国科学院合肥物质科学研究院 | Cold cathode penning ion source device for high-energy ion implanter |
| CN111681937B (en) * | 2020-06-09 | 2021-04-06 | 中国科学院合肥物质科学研究院 | Cold cathode penning ion source device for high-energy ion implanter |
| CN113488364A (en) * | 2021-07-13 | 2021-10-08 | 迈胜医疗设备有限公司 | Multi-particle hot cathode penning ion source and cyclotron |
| CN113488364B (en) * | 2021-07-13 | 2024-05-14 | 迈胜医疗设备有限公司 | Multi-particle hot cathode penning ion source and cyclotron |
| CN115188648A (en) * | 2022-09-08 | 2022-10-14 | 合肥中科离子医学技术装备有限公司 | Internal penning source structure and cyclotron |
| CN115188648B (en) * | 2022-09-08 | 2022-12-23 | 合肥中科离子医学技术装备有限公司 | Internal penning source structure and cyclotron |
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