CN109828692A - A kind of touch-control sensor and preparation method thereof - Google Patents
A kind of touch-control sensor and preparation method thereof Download PDFInfo
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Abstract
The invention discloses a kind of touch-control sensors, and wherein touch-control sensing layer is in sandwich structure, are followed successively by conductive film layer, separation layer and conductive mesh layer.Conductive film layer includes multiple in blocky mutually isolated electrode, and separation layer includes the insulating film that electrode surface is arranged in, and the exposed counter electrode of the insulating film is along two ends of first direction;It can be serially connected by electrode in conductive film layer along the adjacent conductor wire of first direction, touch area is positioned in a first direction with realizing;Second conductor wire is bridged in a second direction with insulating film backwards to one side surface of conductive film layer, is positioned in a second direction to touch area with realizing;During the preparation process it is only necessary to align the end of the first conductor wire and block type electrode, thus the required aligning accuracy when conductive mesh layer can be greatly reduced in setting, and then increase the yields of touch-control sensor.The present invention also provides a kind of preparation methods of touch-control sensor, equally have above-mentioned beneficial effect.
Description
Technical field
The present invention relates to technical field of touch control, more particularly to a kind of touch-control sensor and a kind of preparation of touch-control sensor
Method.
Background technique
As the continuous progress of science and technology in recent years and touch-control show the development of product industry, touch sensing either from
Size or performance etc. all achieve great progress.
At this stage, the capacitance touching control inductor of metal grill (Metal Mesh) structure is since its sheet resistance is lower, cost
It is lower, the advantages that processing procedure is simple, in a large amount of touch-control sensor applied to large area.
In the prior art, the touch-control sensor of metal mesh structure generallys use double layer of metal clathrum to realize, and
It needs accurately to align between double layer of metal clathrum to reduce the visuality of metal mesh compartment, so that user can not directly use meat
Eye observes the conductor wire for constituting metal grill.And in the prior art by the difficulty of exactitude position between double layer of metal clathrum
It is larger, so how to reduce the aligning accuracy of metal mesh compartment while guaranteeing that metal clathrum has lower visual is this
Field technical staff's urgent problem.
Summary of the invention
The object of the present invention is to provide a kind of touch-control sensor, conductive mesh layer does not need exactitude position in setting;
Another object of the present invention is to provide a kind of preparation method of touch-control sensor, conductive mesh layer does not need essence in setting
Really contraposition.
In order to solve the above technical problems, the present invention provides a kind of touch-control sensor, including substrate and touch-control sensing layer;
The touch-control sensing layer is located at the substrate surface, the touch-control sensing layer include conductive film layer, conductive mesh layer,
And the separation layer between the conductive film layer and the conductive mesh layer;
The conductive film layer includes multiple in block-like electrode, mutually isolated between the adjacent electrode;The separation layer
Including with the one-to-one insulating film of the electrode, the insulating film covers the middle part of the electrode, and the exposed electrode edge
Two ends of first direction;
The conductive mesh layer includes the second conductor wire of more first conductor wires and Duo Gen, first conductor wire with it is described
Second conductor wire is mutually isolated, and first conductor wire connects described in opposite two of the adjacent electrode along the first direction
End;Second conductor wire is cross-placed on the insulating film backwards to one side surface of conductive film layer in a second direction.
Optionally, the first conduction is provided between two opposite ends of the adjacent electrode of the first direction
Unit, first conductive unit are the first conductive unit surrounded in a ring by two first conductor wires.
Optionally, first conductive unit assumes diamond in shape.
Optionally, any insulating film surface along second direction arrangement is provided with two second conductions
Line, the second conductive unit is provided between the insulating film adjacent along the second direction, and second conductive unit is to have
The second conductive unit that two second conductor wires surround in a ring.
Optionally, second conductive unit assumes diamond in shape.
Optionally, the touch-control sensor further includes the guarantor positioned at the touch-control sensing layer backwards to one side surface of substrate
Sheath.
Optionally, the substrate is flexible base board.
Optionally, the electrode is in rectangle, and the long side of the electrode is parallel to the first direction.
Optionally, first conductor wire and second conductor wire include metal conducting layer, and are led positioned at described
Blackening layer of the electric layer backwards to one side surface of substrate.
The present invention also provides a kind of preparation methods of touch-control sensor, comprising:
Touch-control sensing layer is set in substrate surface, the touch-control sensor is made;Wherein, the touch-control sensing layer includes
Conductive film layer, conductive mesh layer and the separation layer between the conductive film layer and the conductive mesh layer;The conduction
Film layer includes multiple in block-like electrode, mutually isolated between the adjacent electrode;The separation layer includes and the electrode one
One corresponding insulating film, the insulating film covers the middle part of the electrode, and the exposed electrode is along two ends of first direction
Portion;The conductive mesh layer includes the second conductor wire of more first conductor wires and Duo Gen, and first conductor wire is along described first
Direction connects two opposite ends of the adjacent electrode;Second conductor wire is cross-placed on the insulation in a second direction
Film is backwards to one side surface of conductive film layer.
A kind of touch-control sensor provided by the present invention, the touching including substrate and for being positioned to user's touch area
Control inductive layer.The touch-control sensing layer is in sandwich structure, is followed successively by conductive film layer, separation layer and conductive mesh layer.Conductive film
Layer includes multiple in blocky mutually isolated electrode, and separation layer includes the insulating film that electrode surface is arranged in, and the insulating film is exposed
Counter electrode is along two ends of first direction;Conductive film layer includes the second conductor wire of more first conductor wires and Duo Gen, and first
Conductor wire two ends opposite along first direction connection adjacent electrode, i.e., can pass through electrode along the adjacent conductor wire of first direction
It is serially connected, touch area is positioned in a first direction with realizing;Second conductor wire bridges and insulate in a second direction
Film so that the first conductor wire will not be electrically connected to each other with the second conductor wire, while making second backwards to one side surface of conductive film layer
Conductor wire extends in a second direction, is positioned in a second direction to touch area with realizing;First conductor wire is led with second
The accurate positioning to touch area may be implemented in electric wire mutual cooperation;Simultaneously in preparation process it is only necessary to by the first conductor wire with
The end of block type electrode is aligned, thus the required aligning accuracy when conductive mesh layer can be greatly reduced in setting, into
And increase the yields of touch-control sensor.
The present invention also provides a kind of preparation method of touch-control sensor, it is prepared made of touch-control sensor equally have
Above-mentioned beneficial effect, is no longer repeated herein.
Detailed description of the invention
It, below will be to embodiment or existing for the clearer technical solution for illustrating the embodiment of the present invention or the prior art
Attached drawing needed in technical description is briefly described, it should be apparent that, the accompanying drawings in the following description is only this hair
Bright some embodiments for those of ordinary skill in the art without creative efforts, can be with root
Other attached drawings are obtained according to these attached drawings.
Fig. 1 is a kind of overlooking structure diagram of touch-control sensor provided by the embodiment of the present invention;
Fig. 2 is the cross-sectional view of Fig. 1;
Fig. 3 is a kind of structural schematic diagram of specific touch-control sensor provided by the embodiment of the present invention;
Fig. 4 is the first specific structural schematic diagram of the first conductive unit in Fig. 3;
Fig. 5 is second of specific structural schematic diagram of the first conductive unit in Fig. 3;
Fig. 6 is the third specific structural schematic diagram of the first conductive unit in Fig. 3;
Fig. 7 is the cross-sectional view of Fig. 3;
Fig. 8 is a kind of flow chart of touch-control sensor preparation method provided by the embodiment of the present invention;
Fig. 9 is a kind of flow chart of specific touch-control sensor preparation method provided by the embodiment of the present invention.
In figure: 1. substrates, 2. touch-control sensing layers, 21. conductive film layers, 211. electrodes, 22. separation layers, 221. insulating films,
23. conductive mesh layer, 231. first conductor wires, 232. second conductor wires, 233. first conductive units, 234. second conductive lists
Member, 24. metal conducting layers, 25. blackening layers.
Specific embodiment
Core of the invention is to provide a kind of touch-control sensor.In the prior art, the touch-control sensing of metal mesh structure
Device generallys use double layer of metal clathrum to realize, wherein needing to guarantee in water when mutually aligning double layer of metal clathrum
The flat line width for projecting the conductor wire between upper double layer of metal clathrum is equal, and this needs high aligning accuracy.Especially exist
Conductor wire is more and more intensive in conductive mesh layer at this stage, it is required that aligning accuracy it is higher, must not so when dislocation occurs
So exist be located at different metal clathrum in two conductor wire hypotelorisms in floor projection, so as to cause conductor wire can
The case where being reduced depending on property, actual linewidth is caused to be greater than theoretical line width.
And a kind of touch-control sensor provided by the present invention, including substrate and for being positioned to user's touch area
Touch-control sensing layer.The touch-control sensing layer is in sandwich structure, is followed successively by conductive film layer, separation layer and conductive mesh layer.It is conductive
Film layer includes multiple in blocky mutually isolated electrode, and separation layer includes the insulating film that electrode surface is arranged in, and the insulating film is naked
Reveal counter electrode along two ends of first direction;Conductive film layer includes the second conductor wire of more first conductor wires and Duo Gen, the
One conductor wire, two ends opposite along first direction connection adjacent electrode, i.e., can pass through electricity along the adjacent conductor wire of first direction
Pole is serially connected, and is positioned in a first direction to touch area with realizing;Second conductor wire bridge in a second direction with absolutely
Velum is backwards to one side surface of conductive film layer, so that the first conductor wire will not be electrically connected to each other with the second conductor wire, while making
Two conductor wires extend in a second direction, are positioned in a second direction to touch area with realizing;First conductor wire and second
The accurate positioning to touch area may be implemented in conductor wire mutual cooperation;It is only necessary to by the first conductor wire in preparation process simultaneously
It is aligned with the end of block type electrode, thus the required aligning accuracy when conductive mesh layer can be greatly reduced in setting,
And then increase the yields of touch-control sensor.
In order to enable those skilled in the art to better understand the solution of the present invention, with reference to the accompanying drawings and detailed description
The present invention is described in further detail.Obviously, described embodiments are only a part of the embodiments of the present invention, rather than
Whole embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art are not making creative work premise
Under every other embodiment obtained, shall fall within the protection scope of the present invention.
Fig. 1 and Fig. 2 are please referred to, Fig. 1 is a kind of plan structure signal of touch-control sensor provided by the embodiment of the present invention
Figure;Fig. 2 is the cross-sectional view of Fig. 1.
Referring to Fig. 1 and Fig. 2, in embodiments of the present invention, the touch-control sensor includes substrate 1 and touch-control sensing layer 2;
The touch-control sensing layer 2 is located at 1 surface of substrate, the touch-control sensing layer 2 include conductive film layer 21, conductive mesh layer 23,
And the separation layer 22 between the conductive film layer 21 and the conductive mesh layer 23;The conductive film layer 21 includes multiple
It is mutually isolated between the adjacent electrode 211 in block-like electrode 211;The separation layer 22 include with the electrode 211 one by one
Corresponding insulating film 221, the insulating film 221 covers the middle part of the electrode 211, and the exposed electrode 211 is along first party
To two ends;The conductive mesh layer 23 includes more first conductor wires 231 and the second conductor wire of Duo Gen 232, and described the
One conductor wire 231 and second conductor wire 232 are mutually isolated, and first conductor wire 231 connects phase along the first direction
Two opposite ends of the adjacent electrode 211;Second conductor wire 232 is cross-placed on the insulating film in a second direction
221 backwards to 21 1 side surface of conductive film layer.
Aforesaid substrate 1 provides touch-control sensor certain structural strength for carrying touch-control sensing layer 2.Due to existing
Stage touch-control sensor usually requires to be used cooperatively with display screen, the generally transparent substrate 1 of corresponding aforesaid substrate 1.It needs
Bright, which can be rigid substrates 1, such as glass etc., be also possible to flexible base board 1, for example, PET, COP, PI, PC,
PEN etc., preferably, can be selected in embodiments of the present invention since CPI film has good corrosion resistance and mechanical performance
Use CPI film as substrate 1.
Above-mentioned touch-control sensing layer 2 is to be mainly used for the functional layer positioned to user's touch area in touch-control sensor,
In the operating condition, when user touches touch-control sensor, above-mentioned functional layer can generate the electric signal about touch area, the electricity
The electric signal that signal is typically included in the electric signal propagated in touch-control sensing layer 2 along first direction and propagates in a second direction.
By carrying out identifying the accurate positioning that may be implemented to user's touch area to above electrical signal.
In embodiments of the present invention, touch-control sensing layer 2 has generally included conductive film layer 21, conductive mesh layer 23, Yi Jiwei
Separation layer 22 between conductive film layer 21 and conductive mesh layer 23.I.e. above-mentioned touch-control sensing layer 2 is usually in sandwich,
Wherein separation layer 22 is located at intermediate, conductive mesh layer 23 and conductive film layer 21 is located at two sides.It should be noted that in the present invention
In embodiment, it can be conductive film layer 21 in above-mentioned touch-control sensing layer 2 and be in contact with substrate 1, be also possible to conductive mesh layer 23
It is in contact with substrate 1, the sequence that difference therein is only embodied in setting film layer is different, has no effect on the function of touch-control sensor.
In order to which guarantee will not corrosion failure substrate 1 when touch-control sensing layer 2 is arranged in 1 surface of substrate, it is generally the case that at this
Can an insulating layer be set between substrate 1 and touch-control sensing layer 2 in inventive embodiments, which can protect substrate 1 and making
It is not easily susceptible to damage when standby.The material of above-mentioned insulating layer can be silica (SiO2), silicon nitride (SiNx), organic macromolecule
One or more, in the embodiment of the present invention, above-mentioned insulating layer is preferably SiO2With SiNxLaminated construction.
It should also be noted that, touch-control sensor is generally divided into visible area and non-visible area domain, wherein following electrodes
211, insulating film 221, the first conductor wire 231 and the second conductor wire 232 are usually arranged at the visible area on 1 surface of substrate,
To realize the positioning to touch area;And it is usually provided in non-visible area domain and is led with above-mentioned first conductor wire 231 with second
The lead that electric wire 232 is electrically connected, the electric signal transmission that will be generated to the components such as touch-control IC, to realize to touch area
Identification.Under normal conditions, above-mentioned visible area is usually located at the center of touch-control sensor, and non-visible area domain usually surrounds in a ring
Above-mentioned visible area.
It is in block-like electrode 211 that above-mentioned conductive film layer 21, which includes multiple, mutually isolated between the adjacent electrode 211.It is logical
In normal situation, above-mentioned electrode 211 can be uniformly distributed in the visible area on 1 surface of substrate, usually along any in conductive film layer 21
The adjacent electrode 211 in direction is mutually isolated.Since above-mentioned electrode 211 is in bulk, in order to guarantee touch-control sensor visible area
With good translucency, the generally transparent conductive film of above-mentioned electrode 211, material is usually ITO, nano silver, macromolecule
Transparent conductive material etc..Since the preparation process in ito thin film at this stage is very perfect, above-mentioned electricity in embodiments of the present invention
Pole 211 is preferably ito thin film, and corresponding above-mentioned conductive film layer 21 is preferably ito film layer.
Above-mentioned separation layer 22 includes and the one-to-one insulating film 221 of the electrode 211, insulation corresponding with electrode 211
Film 221 is generally also in bulk, which can cover the middle part of above-mentioned electrode 211, and bare electrode 211 is along first direction
Two ends, i.e., a certain electrode 211 is parallel to first direction by the line of two exposed ends.Above-mentioned insulating film 221
Material can be silica (SiO2), silicon nitride (SiNx), organic macromolecule it is one or more, it is above-mentioned in the embodiment of the present invention
Insulating film 221 is preferably organic polymer film.
Above-mentioned conductive mesh layer 23 includes more first conductor wires 231 and the second conductor wire of Duo Gen 232, wherein described first
Conductor wire 231 and second conductor wire 232 are mutually isolated, i.e. the first conductor wire 231 is not electrically connected mutually with the second conductor wire 232
It connects.
Above-mentioned first conductor wire 231 two ends opposite along first direction connection adjacent electrode 211, i.e., along first direction
The first adjacent conductor wire 231 is electrically connected to each other by above-mentioned electrode 211, can by first conductor wire 231 and electrode 211
The region of user's touching is positioned in a first direction with realizing.Above-mentioned second conductor wire 232 is cross-placed in a second direction
Insulating film 221 is backwards to 21 1 side surface of conductive film layer, and the second conductor wire 232 will not occur with the first conductor wire 231 at this time
Electrical connection, while the second conductor wire 232 may be implemented in a second direction to position the region of user's touching.Usual situation
Under, first direction is mutually perpendicular to second direction.It is understood that above-mentioned electrode 211 and insulating film 221 are substantially constituted
First conductor wire 231 is serially connected by one bridge-like structure, second conductor wire of construct trans 232 along first direction.
It should be noted that in embodiments of the present invention, above-mentioned first conductor wire 231 itself does not need to be parallel to first
Direction, corresponding second conductor wire 232 itself do not need to be parallel to second direction yet.Above-mentioned first conductor wire 231 and
Two conductor wires 232 can be single layer structure and be also possible to multilayer mechanism, the material of the first conductor wire 231 and the second conductor wire 232
Matter is chosen as the metals such as Cu, Ag, Au, Al and its metallic compound.Since cost is relatively low by Cu at this stage, in the embodiment of the present invention
In preferably Cu make the first conductor wire 231 and the second conductor wire 232.
It should also be noted that, above-mentioned conductive mesh layer 23 is led in addition to above-mentioned first positioned at touch-control sensor visible area
Except electric wire 231 and the second conductor wire 232, the lead that 1 non-visible area domain of substrate is set is also typically included, wherein one
It separates line to be electrically connected with above-mentioned first conductor wire 231, another part lead is electrically connected with above-mentioned second conductor wire 232.Due to upper
State lead is usually to make simultaneously with the first conductor wire 231 and the second conductor wire 232 in the production process, corresponding above-mentioned lead
Material it is usually identical as the first conductor wire 231 and the second conductor wire 232.
Preferably, in embodiments of the present invention, above-mentioned touch-control sensor can also include being located at touch-control sensing layer 2 to carry on the back
To the protective layer of 1 one side surface of substrate.This it is protective layer used in protection touch-control sensing layer 2 be not easily susceptible to damage or corrode.Specifically,
Above-mentioned protective layer is usually organic polymer film in embodiments of the present invention, which usually covers whole face touch-control sensing layer
2。
Preferably, in embodiments of the present invention, for the ease of the setting of above-mentioned separation layer 22, above-mentioned conductive film layer 21
Electrode 211 be usually in rectangle, and to be typically parallel to above-mentioned first reversed for the long side of the electrode 211.Due to implementing in the present invention
Insulating film 221 in example in separation layer 22 needs two ends of the exposed counter electrode 211 along first direction, and electrode 211 is set
Aligning accuracy between separation layer 22 and conductive film layer 21 can be effectively reduced by being set to above-mentioned shape.Certainly, implement in the present invention
Electrode 211 can also be in other shapes in example, and the shape in relation to electrode 211 in embodiments of the present invention and is not specifically limited.
A kind of touch-control sensor provided by the embodiment of the present invention, including substrate 1 and for user's touch area carry out
The touch-control sensing layer 2 of positioning.The touch-control sensing layer 2 is in sandwich structure, is followed successively by conductive film layer 21, separation layer 22 and conduction
Clathrum 23.Conductive film layer 21 includes multiple in blocky mutually isolated electrode 211, and separation layer 22 includes being arranged in electrode 211
The insulating film 221 on surface, the exposed counter electrode 211 of insulating film 221 is along two ends of first direction;Conductive film layer 21 includes
More first conductor wires 231 and the second conductor wire of Duo Gen 232, the first conductor wire 231 connect 211 phase of adjacent electrode along first direction
Pair two ends, i.e., can be serially connected by electrode 211 along the adjacent conductor wire of first direction, with realize in a first direction
Touch area is positioned;Second conductor wire 232 is bridged in a second direction with insulating film 221 backwards to 21 side table of conductive film layer
Face so that the first conductor wire 231 will not be electrically connected to each other with the second conductor wire 232, while making the second conductor wire 232 along second
Direction extends, and is positioned in a second direction to touch area with realizing;First conductor wire 231 and 232 phase of the second conductor wire
Mutually the accurate positioning to touch area may be implemented in cooperation;It is only necessary to by the first conductor wire 231 and block in preparation process simultaneously
The end of shape electrode 211 is aligned, thus the required aligning accuracy when conductive mesh layer 23 can be greatly reduced in setting,
And then increase the yields of touch-control sensor.
Specific structure in relation to touch-control sensor provided by the invention will be described in detail in following inventive embodiments.
Referring to FIG. 3, Fig. 4, Fig. 5, Fig. 6 and Fig. 7, Fig. 3 is a kind of specific touch-control provided by the embodiment of the present invention
The structural schematic diagram of inductor;Fig. 4 is the first specific structural schematic diagram of the first conductive unit in Fig. 3;Fig. 5 is in Fig. 3
The specific structural schematic diagram of second of first conductive unit;Fig. 6 is the third specific structure of the first conductive unit in Fig. 3
Schematic diagram;Fig. 7 is the cross-sectional view of Fig. 3.
It is different from foregoing invention embodiment, the embodiment of the present invention is on the basis of foregoing invention embodiment, further
The structure of touch-control sensor is specifically limited.Remaining content is described in detail in foregoing invention embodiment,
This is no longer repeated.
Referring to Fig. 3, in embodiments of the present invention, in order to reduce the line width of conductive mesh layer 23, so that the embodiment of the present invention
Provided touch-control sensor has higher accuracy in positioning, at two ends opposite along first direction adjacent electrode 211
The first conductive unit 233 is provided between portion, first conductive unit 233 is to be enclosed in a ring by two first conductor wires 231
At the first conductive unit 233.
Two first conductor wires 231 are being provided between the adjacent electrode 211 of first direction, this two first conductive
Line 231 can constitute the first conductive unit 233 of an annular;First conductive unit 233 adjacent along first direction passes through above-mentioned electricity
Pole 211 is serially connected, and is positioned in a first direction to the region of user's touching with realizing.Under normal conditions, above-mentioned first
Conductive unit 233 assumes diamond in shape.Certainly, the first conductive unit 233 can also be in other shapes in embodiments of the present invention, and related the
The shape of one conductive unit 233 in embodiments of the present invention and is not specifically limited.
Correspondingly, in order to enable touch-control sensor provided by the embodiment of the present invention positioning when have higher accuracy,
Any 221 surface of insulating film arranged in a second direction is provided with two second conductor wires 232 in embodiments of the present invention, along institute
It states and is provided with the second conductive unit 234 between the adjacent insulating film 221 of second direction, second conductive unit 234 is
The second conductive unit 234 for thering are two second conductor wires 232 to surround in a ring.
221 surface of a full line insulating film arranged in a second direction is provided with two second conductor wires 232, this two
Many places intersect between second conductor wire 232, and the intersection point between two second conductor wires 232 is usually located at 221 table of insulating film
Face, to constitute the ring-type second surrounded by two second conductor wires 232 between insulating film 221 adjacent in a second direction
Conductive unit 234.Second conductive unit 234 is serially connected in a second direction, to realize in a second direction to user's touching
Region is positioned.Under normal conditions, above-mentioned second conductive unit 234 assumes diamond in shape.Certainly, it second leads in embodiments of the present invention
Electric unit 234 can also be in other shapes, and the shape in relation to the second conductive unit 234 is not done specifically in embodiments of the present invention
It limits.
It should be noted that between above-mentioned first conductive unit 233 and the second conductive unit 234 usually require mutually every
From not being electrically connected between i.e. the first conductive unit 233 and the second conductive unit 234.
Conductive mesh layer 23 is arranged to the reduction conductive mesh layer that above structure can increase in embodiments of the present invention
The line width of visible area in 23, so that touch-control sensor positioning accuracy with higher.Under normal conditions, above-mentioned conductive mesh
The line width of visible area is usually less than 5 μm in compartment 23.Correspondingly, drawing for non-visible area domain is arranged in conductive mesh layer 23
The line width and line-spacing of line are usually less than 20 μm.
Referring to fig. 4 to Fig. 6, specifically, specific in embodiments of the present invention provide the specific of three kind of first conductive unit 233
Structure.The first constitutes and is not directly contacted between two first conductor wires 231 of same first conductive unit 233 referring to fig. 4,
It is mutually disconnected between the end that this two first conductor wires 231 are in contact with same electrode 211, only passes through the mutually electricity of electrode 211
Connection;It referring to Fig. 5, constitutes and passes through a Duan Chengzhi between two first conductor wires 231 of same first conductive unit 233 for second
The conductor wire of line directly contacts, since the resistance of conductor wire is usually less than the resistance of transparent cake electrode, linearly by one section
Conductor wire will be connected with each other and can effectively reduce between end that two first conductor wires 231 are in contact with same electrode 211
The resistance of conductive mesh layer 23;The third referring to Fig. 6, constitute same first conductive unit 233 two first conductor wires 231 it
Between also directly contacted by one section of curved conductor wire, so that the resistance of conductive mesh layer 23 be effectively reduced.
Referring to Fig. 7, preferably, in embodiments of the present invention, first conductor wire 231 and second conductor wire
232 include metal conducting layer 24, and positioned at the metal conducting layer 24 backwards to the blackening layer of 1 one side surface of substrate
25.I.e. the first conductor wire 231 and the second conductor wire 232 are usually double-deck laminated construction in embodiments of the present invention, wherein
Structure towards 1 side of substrate is metal conducting layer 24, and the structure backwards to 1 side of substrate is blackening layer 25.
Above-mentioned metal conducting layer 24 is mainly used for responding the touching of user, generates and conduct electric signal;Above-mentioned blackening layer
25 color is mainly that black is either dark, and the material of the blackening layer 25 is usually copper nitride (CuNx) etc. colors it is deeper, lead to
Often also with the material of higher antiseptic property.Since extraneous light can inject touch-control sensor from the external world, and above-mentioned metal is led
Electric layer 24 is usually to light reflectivity with higher.Setting blackening layer 25 can effectively absorb extraneous ring in embodiments of the present invention
The light that touch-control sensor is injected in border makes so that the visuality of the first conductor wire 231 and the second conductor wire 232 be effectively reduced
The first conductor wire 231 and the second conductor wire 232 of touch-control sensor visible area can not with the naked eye be seen clearly by obtaining user.Specifically
, be arranged above-mentioned blackening layer 25 usually can by visible area in conductive mesh layer 23 to the reflectivity of light be reduced to 20% with
Under.
A kind of touch-control sensor provided by the embodiment of the present invention, it is conductive single by the way that first is arranged in conductive mesh layer 23
Member 233 and the second conductive unit 234 can effectively improve the positioning accuracy of touch-control sensor;It can be with by setting blackening layer 25
Touch-control sensor visible area is effectively reduced to the reflectivity of light.
A kind of preparation method of touch-control sensor provided by the present invention is introduced below, preparation side described below
Method can correspond to each other reference with the structure of the touch-control sensor of foregoing description.
Referring to FIG. 8, Fig. 8 is a kind of flow chart of touch-control sensor preparation method provided by the embodiment of the present invention.
Referring to Fig. 8, in embodiments of the present invention, the preparation method of the touch-control sensor may include:
S101: touch-control sensing layer is set in substrate surface, touch-control sensor is made.
In embodiments of the present invention, the touch-control sensing layer includes conductive film layer, conductive mesh layer and leads positioned at described
Separation layer between electrolemma layer and the conductive mesh layer;The conductive film layer includes multiple in block-like electrode, adjacent described
It is mutually isolated between electrode;The separation layer include with the one-to-one insulating film of the electrode, described in insulating film covering
The middle part of electrode, and the exposed electrode is along two ends of first direction;The conductive mesh layer includes more first conductions
The second conductor wire of line and Duo Gen, first conductor wire connect described in opposite two of the adjacent electrode along the first direction
End;Second conductor wire is cross-placed on the insulating film backwards to one side surface of conductive film layer in a second direction.
Specific structure in relation to touch-control sensor is described in detail in foregoing invention embodiment, is no longer gone to live in the household of one's in-laws on getting married herein
It states.In this step, touch-control sensing layer can be set in substrate surface, the concrete technology in relation to touch-control sensing layer is arranged will be following
It is described in detail in inventive embodiments, is no longer repeated herein.
Preferably, before this step, in order to guarantee will not to corrode brokenly when touch-control sensing layer is arranged in substrate surface
Under normal conditions a layer insulating first can be arranged in substrate surface before touch-control sensing layer is arranged in this step in bad substrate,
Specific material in relation to insulating layer is described in detail in foregoing invention embodiment.Specifically, in this step, can pass through
Insulating layer is arranged in substrate surface in sputter technique.
Preferably, improving the use of touch-control sensor to protect touch-control sensing layer to be not easily susceptible to damage or corrode
A protective layer can be arranged in touch-control sensing layer surface after setting up touch-control sensing layer in service life.In relation to the specific of protective layer
The related contents such as material are described in detail in foregoing invention embodiment, are no longer repeated herein.Specifically, in this step
In, above-mentioned protective layer can be set by being first coated with OC (over coating) glue, then by the mode of OC adhesive curing.
A kind of preparation method of touch-control sensor provided by the embodiment of the present invention, it is prepared made of touch-control sensor exist
It is only necessary to align the end of the first conductor wire and block type electrode in preparation process, thus conductive mesh can be greatly reduced
Compartment required aligning accuracy in setting, to increase the yields of touch-control sensor.
Specific steps in relation to touch-control sensor preparation method provided by the invention will be done in detail in following inventive embodiments
It is thin to introduce.
Referring to Fig. 9, Fig. 9 is a kind of process of specific touch-control sensor preparation method provided by the embodiment of the present invention
Figure.
Referring to Fig. 9, in embodiments of the present invention, the preparation method of the touch-control sensor may include:
S201: in substrate surface sputter insulating layer.
S202: in the first conductive layer of surface of insulating layer sputter.
In this step, which would generally ito film layer.
S203: the first photoresist layer is coated in the first conductive layer surface.
In embodiments of the present invention, each film layer structure in touch-control sensing layer is prepared especially by yellow light technique.
S204: being exposed and develop to the first photoresist layer, to form the first conductive layer pattern in the first photoresist layer.
S205: the first conductive layer is performed etching through the first photoresist layer, conductive film layer is made.
In embodiments of the present invention, it is in block-like electrode, phase between the adjacent electrode that the conductive film layer, which includes multiple,
Mutually isolation.In this step, selected etching liquid is usually ITO etching liquid.
S206: the first photoresist layer of removing.
S207: the first OC glue-line is coated on conductive film layer surface.
In embodiments of the present invention, the material of the separation layer between conductive film layer and conductive mesh layer is specially OC glue
The material formed after solidification.
S208: the first OC glue-line is successively exposed, is developed, it is admittedly roasting after form separation layer.
In embodiments of the present invention, the separation layer includes and the one-to-one insulating film of the electrode, the insulating film
The middle part of the electrode is covered, and the exposed electrode is along two ends of first direction.
S209: in the second conductive layer of insulation surface sputter.
In embodiments of the present invention, the second conductive layer is usually metal layer.Preferably, above-mentioned second conductive layer is usual
It is the metal conducting layer for being located at surface of insulating layer including two layers: one layer, another layer is the blackening layer positioned at metallic conduction layer surface.
S210: the second photoresist layer is coated in the second conductive layer surface.
S211: being exposed and develop to the second photoresist layer, to form the second conductive layer pattern in the second photoresist layer.
S212: the second conductive layer is performed etching through the second photoresist layer, conductive mesh layer is made.
In embodiments of the present invention, the conductive mesh layer includes the second conductor wire of more first conductor wires and Duo Gen, institute
It states the first conductor wire and connects two opposite ends of the adjacent electrode along the first direction;Second conductor wire edge
Second direction is cross-placed on the insulating film backwards to one side surface of conductive film layer.In this step, selected etching liquid is logical
It is often metal etch liquid.
S213: the second photoresist layer of removing.
S214: the 2nd OC glue-line is coated in conductive grid layer surface.
In embodiments of the present invention, the material positioned at the protective layer of touch-control sensing layer surface is specially and is formed after OC adhesive curing
Material.
S215: protective layer is formed after being baked admittedly to the 2nd OC glue-line.
A kind of preparation method of touch-control sensor provided by the real-time example of the present invention, prepares touch-control especially by yellow light technique
Inductor.
Each embodiment in this specification is described in a progressive manner, the highlights of each of the examples are with it is other
The difference of embodiment, same or similar part may refer to each other between each embodiment.
Professional further appreciates that, unit described in conjunction with the examples disclosed in the embodiments of the present disclosure
And algorithm steps, can be realized with electronic hardware, computer software, or a combination of the two, in order to clearly demonstrate hardware and
The interchangeability of software generally describes each exemplary composition and step according to function in the above description.These
Function is implemented in hardware or software actually, the specific application and design constraint depending on technical solution.Profession
Technical staff can use different methods to achieve the described function each specific application, but this realization is not answered
Think beyond the scope of this invention.
The step of method described in conjunction with the examples disclosed in this document or algorithm, can directly be held with hardware, processor
The combination of capable software module or the two is implemented.Software module can be placed in random access memory (RAM), memory, read-only deposit
Reservoir (ROM), electrically programmable ROM, electrically erasable ROM, register, hard disk, moveable magnetic disc, CD-ROM or technology
In any other form of storage medium well known in field.
Finally, it is to be noted that, herein, relational terms such as first and second and the like be used merely to by
One entity or operation are distinguished with another entity or operation, without necessarily requiring or implying these entities or operation
Between there are any actual relationship or orders.Moreover, the terms "include", "comprise" or its any other variant meaning
Covering non-exclusive inclusion, so that the process, method, article or equipment for including a series of elements not only includes that
A little elements, but also including other elements that are not explicitly listed, or further include for this process, method, article or
The intrinsic element of equipment.In the absence of more restrictions, the element limited by sentence "including a ...", is not arranged
Except there is also other identical elements in the process, method, article or apparatus that includes the element.
A kind of touch-control sensor provided by the present invention and a kind of preparation method of touch-control sensor have been carried out in detail above
It is thin to introduce.Used herein a specific example illustrates the principle and implementation of the invention, and above embodiments are said
It is bright to be merely used to help understand method and its core concept of the invention.It should be pointed out that for the ordinary skill of the art
, without departing from the principle of the present invention, can be with several improvements and modifications are made to the present invention for personnel, these improvement
It is also fallen within the protection scope of the claims of the present invention with modification.
Claims (10)
1. a kind of touch-control sensor, which is characterized in that including substrate and touch-control sensing layer;
The touch-control sensing layer is located at the substrate surface, the touch-control sensing layer include conductive film layer, conductive mesh layer and
Separation layer between the conductive film layer and the conductive mesh layer;
The conductive film layer includes multiple in block-like electrode, mutually isolated between the adjacent electrode;The separation layer includes
With the one-to-one insulating film of the electrode, the insulating film covers the middle part of the electrode, and the exposed electrode is along first
Two ends in direction;
The conductive mesh layer includes the second conductor wire of more first conductor wires and Duo Gen, first conductor wire and described second
Conductor wire is mutually isolated, and first conductor wire connects two opposite ends of the adjacent electrode along the first direction
Portion;Second conductor wire is cross-placed on the insulating film backwards to one side surface of conductive film layer in a second direction.
2. touch-control sensor according to claim 1, which is characterized in that opposite along the adjacent electrode of the first direction
Two ends between be provided with the first conductive unit, first conductive unit is to be in by two first conductor wires
The first conductive unit that annular surrounds.
3. touch-control sensor according to claim 2, which is characterized in that first conductive unit assumes diamond in shape.
4. touch-control sensor according to claim 1, which is characterized in that any along the described exhausted of second direction arrangement
Velum surface is provided with two second conductor wires, is provided with second between the insulating film adjacent along the second direction
Conductive unit, second conductive unit are the second conductive unit for having two second conductor wires to surround in a ring.
5. touch-control sensor according to claim 4, which is characterized in that second conductive unit assumes diamond in shape.
6. touch-control sensor according to claim 1, which is characterized in that the touch-control sensor further includes being located at the touching
Inductive layer is controlled backwards to the protective layer of one side surface of substrate.
7. touch-control sensor according to claim 1, which is characterized in that the substrate is flexible base board.
8. touch-control sensor according to claim 1, which is characterized in that the electrode is in rectangle, the long side of the electrode
It is parallel to the first direction.
9. according to claim 1 to touch-control sensor described in any one of 8 claims, which is characterized in that described first is conductive
Line and second conductor wire include metal conducting layer, and positioned at the conductive layer backwards to the black of one side surface of substrate
Change layer.
10. a kind of preparation method of touch-control sensor characterized by comprising
Touch-control sensing layer is set in substrate surface, the touch-control sensor is made;Wherein, the touch-control sensing layer includes conduction
Film layer, conductive mesh layer and the separation layer between the conductive film layer and the conductive mesh layer;The conductive film layer
Including it is multiple be in block-like electrode, it is mutually isolated between the adjacent electrode;The separation layer includes a pair of with the electrode one
The insulating film answered, the insulating film covers the middle part of the electrode, and the exposed electrode is along two ends of first direction;Institute
Stating conductive mesh layer includes the second conductor wire of more first conductor wires and Duo Gen, and first conductor wire connects along the first direction
Connect two opposite ends of the adjacent electrode;Second conductor wire is cross-placed on the insulating film backwards in a second direction
One side surface of conductive film layer.
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110473856A (en) * | 2019-08-12 | 2019-11-19 | 广东工业大学 | A kind of multidirectional detection switch of flexibility and preparation method thereof |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012094115A (en) * | 2010-09-30 | 2012-05-17 | Fujifilm Corp | Electrostatic capacitive touch panel |
CN103106953A (en) * | 2013-02-06 | 2013-05-15 | 南昌欧菲光科技有限公司 | Conducting film and preparation method thereof and touch screen comprising the same |
CN103176652A (en) * | 2013-03-08 | 2013-06-26 | 南昌欧菲光科技有限公司 | Touch screen and manufacturing method of touch screen |
JP2015064790A (en) * | 2013-09-25 | 2015-04-09 | 大日本印刷株式会社 | Touch panel sensor, touch panel device and display device |
US20160085339A1 (en) * | 2013-05-16 | 2016-03-24 | Sharp Kabushiki Kaisha | Touch panel substrate and electronic apparatus |
CN209199076U (en) * | 2019-02-02 | 2019-08-02 | 蓝思科技(长沙)有限公司 | A kind of touch-control sensor and a kind of touch-control display panel |
-
2019
- 2019-02-02 CN CN201910106386.7A patent/CN109828692B/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012094115A (en) * | 2010-09-30 | 2012-05-17 | Fujifilm Corp | Electrostatic capacitive touch panel |
CN103106953A (en) * | 2013-02-06 | 2013-05-15 | 南昌欧菲光科技有限公司 | Conducting film and preparation method thereof and touch screen comprising the same |
CN103176652A (en) * | 2013-03-08 | 2013-06-26 | 南昌欧菲光科技有限公司 | Touch screen and manufacturing method of touch screen |
US20160085339A1 (en) * | 2013-05-16 | 2016-03-24 | Sharp Kabushiki Kaisha | Touch panel substrate and electronic apparatus |
JP2015064790A (en) * | 2013-09-25 | 2015-04-09 | 大日本印刷株式会社 | Touch panel sensor, touch panel device and display device |
CN209199076U (en) * | 2019-02-02 | 2019-08-02 | 蓝思科技(长沙)有限公司 | A kind of touch-control sensor and a kind of touch-control display panel |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110473856A (en) * | 2019-08-12 | 2019-11-19 | 广东工业大学 | A kind of multidirectional detection switch of flexibility and preparation method thereof |
CN110473856B (en) * | 2019-08-12 | 2023-05-12 | 广东工业大学 | Flexible multidirectional detection switch and preparation method thereof |
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