CN109827066A - A kind of external vacuum maintenance device and method - Google Patents
A kind of external vacuum maintenance device and method Download PDFInfo
- Publication number
- CN109827066A CN109827066A CN201811544426.8A CN201811544426A CN109827066A CN 109827066 A CN109827066 A CN 109827066A CN 201811544426 A CN201811544426 A CN 201811544426A CN 109827066 A CN109827066 A CN 109827066A
- Authority
- CN
- China
- Prior art keywords
- temperature
- low
- evaporable getter
- vacuum
- piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The present invention provides a kind of external vacuums to maintain device and method, can be realized vacuum acquirement and the maintenance of low-temperature (low temperature) vessel interlayer, and structure is simple, easy for installation, reliable operation.Apparatus of the present invention belong to external vacuum and maintain device, external can complete activation, avoid influence of the high temperature to interlayer, the vacuum keeping apparatus especially suitable for active gases；Apparatus of the present invention realize air-breathing using non-evaporable getter piece, and non-evaporable getter piece Balance Air forces down, gulp capacity is big, gettering rate is high, can effectively extract interlayer outlet and maintain higher vacuum；Non-evaporable getter piece pump of the invention is installed using flange, is easily changed inspiration piece, can effectively be extracted the gas of low-temperature (low temperature) vessel interlayer generation.
Description
Technical field
The invention belongs to vacuum acquirement and maintain technical field, and in particular to a kind of external vacuum maintains device and side
Method, the vacuum for low-temperature (low temperature) vessel interlayer maintain.
Background technique
The acquisition of laminated vacuum and maintenance are extremely important in low-temperature (low temperature) vessel, and the influence to insulation effect is very big.Vacuum interlayer
Interior residual gas is mainly H2、CO、CH4And Ar, wherein H2Average content reach 80.93%, and with the change of standing time
It is long, H2Partial pressure increasing always.It is important for effectively keeping the vacuum degree of interlayer space to have that suction sheet is set in interlayer
Effect, the vacuum life of interlayer is heavily dependent on the characteristic and charge weight of suction sheet.Low-temperature (low temperature) vessel interlayer is often used
Molecular sieve and active carbon can effectively maintain vacuum as suction sheet, but they are to H2Adsorption capacity it is poor；For H2Partial pressure
The higher problem of power can effectively extract H at present using the method for placing PdO2, but PdO price is higher, considerably increases low
The cost of warm container；Non-evaporable getter piece has stronger H2Abstraction ability, it is cheap, but its activationary temperature is higher, exceeds
Interlayer tolerable temperature, for the vacuum of active gases maintains and is not suitable for.Therefore, it is badly in need of a kind of at low cost and no sharp
The vacuum of temperature limiting living maintains product.
Summary of the invention
The present invention provides a kind of external vacuums to maintain device and method, and the vacuum that can be realized low-temperature (low temperature) vessel interlayer obtains
With maintenance, structure is simple, easy for installation, reliable operation.
To achieve the above object, external vacuum of the invention maintains device, for carrying out vacuum to low-temperature (low temperature) vessel interlayer
It maintains, including induction chamber, non-evaporable getter piece pump, temperature conditioning unit and pumping unit；
Wherein, non-evaporable getter piece pump is arranged inside induction chamber, including non-evaporable getter piece and heating rod；Its
Middle non-evaporable getter piece is mounted on heating rod；
Induction chamber is respectively communicated with pumping unit and low-temperature (low temperature) vessel interlayer by the admission line equipped with shut-off valve；Wherein, lead to
It crosses the pipeline equipped with interlayer connection valve to connect with low-temperature (low temperature) vessel interlayer, be connect by being equipped with the other pipeline for taking out valve with pumping unit；
Induction chamber is equipped with power interface, and heating rod connects temperature conditioning unit by power interface；
Temperature conditioning unit is for regulating and controlling the temperature of non-evaporable getter piece.
Wherein, the non-evaporable getter piece uses the zirconium vanadium iron non evaporable getter material of porous structure.
Wherein, the induction chamber material is stainless steel material.
Wherein, the induction chamber structure is cylindrical structure.
Wherein, more than two non-evaporable getter pieces are mounted on heating rod along the arrangement of heating rod axial direction uniform intervals
On, and pass through stainless steel washer space between adjacent two panels non-evaporable getter piece.
Wherein, it is connecting flange that induction chamber, which is equipped with an end wall surface of power interface,.
Wherein, the heating rod is made of nichrome；The temperature conditioning unit is realized using thermocouple to non-evaporable
The measurement of inspiration piece temperature.
A kind of vacuum of the invention maintains method, maintains device using above-mentioned external vacuum, includes the following steps:
Step 1, other pumping valve and shut-off valve are opened, is vacuumized induction chamber by pumping unit, vacuum degree reaches setting value
Afterwards, other pumping valve and shut-off valve are closed；
Step 2, starting heating rod heats non-evaporable getter piece, opens temperature conditioning unit to the temperature of non-evaporable getter piece
It is adjusted, reaches activationary temperature；After the temperature of non-evaporable getter piece reaches activationary temperature setting time, temperature is closed
Control unit；
Step 3, it maintains device to connect with low-temperature (low temperature) vessel interlayer the external vacuum, opens other pumping valve, utilize
After pumping unit vacuumizes linkage section, other pumping valve is closed, interlayer connection valve and shut-off valve is opened, is tieed up using external vacuum
The gas that device abstraction low-temperature (low temperature) vessel interlayer is released is held, low-temperature (low temperature) vessel laminated vacuum is maintained.
Wherein, if the vacuum degree of low-temperature (low temperature) vessel interlayer is less than setting value, disconnect the external vacuum maintain device with it is low
Warm container interlayer repeats step 2- step 3.
Wherein, in the step 1, when the internal pressure of induction chamber is less than 1 × 10-2After Pa, temperature conditioning unit, temperature control list are opened
Member control heating rod heats non-evaporable getter piece；In the step 2, make non-evaporable getter piece 400 DEG C~450
After keeping the temperature 30min or more under DEG C activationary temperature, temperature conditioning unit is closed, stops heating, naturally cools to non-evaporable getter piece
Environment temperature.
The utility model has the advantages that
Apparatus of the present invention belong to external vacuum and maintain device, external can complete activation, avoid high temperature to interlayer
It influences, the vacuum keeping apparatus especially suitable for active gases；Apparatus of the present invention realize air-breathing using non-evaporable getter piece, non-
Evaporable inspiration piece Balance Air forces down, gulp capacity is big, gettering rate is high, can effectively extract interlayer outlet and maintain compared with Gao Zhen
Reciprocal of duty cycle；Non-evaporable getter piece pump of the invention is installed using flange, is easily changed inspiration piece, can effectively extract low-temperature (low temperature) vessel folder
The gas that layer generates.
Detailed description of the invention
Fig. 1 is schematic structural diagram of the device of the invention；
Wherein, 1- interlayer connection valve；Valve is taken out by 2-；3- shut-off valve；4- induction chamber；5- non-evaporable getter piece；
6- heating rod；7- mounting flange；8- power interface；9- temperature conditioning unit；10- is evacuated unit；11- low-temperature (low temperature) vessel interlayer.
Specific embodiment
With reference to the accompanying drawing, develop simultaneously embodiment, and the present invention will be described in further detail.
External vacuum of the present invention maintains device to be used to carry out vacuum maintenance, the present embodiment device to low-temperature (low temperature) vessel interlayer 11
Structure is as shown in Figure 1, include induction chamber 4, non-evaporable getter piece pump, temperature conditioning unit 9 and pumping unit 10.
Wherein, non-evaporable getter piece pump is arranged inside induction chamber 4, including non-evaporable getter piece 5 and heating rod
6；Wherein non-evaporable getter piece 5 is mounted on heating rod 6 and along the axial uniform intervals arrangement of heating rod 6 by stainless steel pad
Space between adjacent two panels is enclosed, avoids adjacent two panels non-evaporable getter piece 5 from contacting, increases the suction of non-evaporable getter piece
Gas area improves the uniformity that non-evaporable getter piece 5 activates；Wherein, non-evaporable getter piece 5 is the zirconium using porous structure
Vanadium iron non evaporable getter material, can be used at normal temperature, have the characteristics that activationary temperature is low, gulp capacity is big；Heating rod 6
It is made of nichrome, heating efficiency is relatively high.
Induction chamber 4 is made by stainless steel material and is obtained, can reduced for placing non-evaporable getter piece pump, induction chamber 4
Deflation rate；4 structure of induction chamber is cylindrical structure, easy to process, and space utilization rate is high.4 one end wall surface of induction chamber is equipped with opening, leads to
It crosses the admission line equipped with shut-off valve 3 and is respectively communicated with pumping unit 10 and low-temperature (low temperature) vessel interlayer 11；Wherein, connected by being equipped with interlayer
The pipeline for connecing valve 1 is connect with low-temperature (low temperature) vessel interlayer 11, is connect by being equipped with the other pipeline for taking out valve 2 with pumping unit 10；Induction chamber 4
Another end wall surface is connecting flange 7, and the sealing of induction chamber 4 is realized by connecting flange 7, and connecting flange 7 is equipped with power interface
8, heating rod 6 connects temperature conditioning unit 9 by power interface 8；Heating rod 6 and power interface 8 are fixed on connecting flange 7.Due to
Connecting flange 7 is detachable, so that the activation of non-evaporable getter piece 5 is readily achieved with replacement.Connecting flange 7 uses stainless steel material
Production.
Temperature conditioning unit 9 is realized using thermocouple to non-evaporable getter piece for regulating and controlling the temperature of non-evaporable getter piece 5
The measurement of 5 temperature, and then the regulation by the control realization of heating rod 6 to 5 temperature of non-evaporable getter piece.
Pumping unit 10 be used between interlayer connection valve 1 and shut-off valve 3 connecting line and induction chamber 4 vacuumize.
Apparatus of the present invention can be with the other types suction sheet such as molecular sieve that is arranged in low-temperature (low temperature) vessel interlayer 11 etc. simultaneously
It uses, removes other residual gas using molecular sieve, protect the non-evaporable getter piece in apparatus of the present invention, while utilizing this hair
Bright device extracts H2, effectively obtain and maintain the vacuum degree of low-temperature (low temperature) vessel interlayer 11.
In use, first vacuumizing induction chamber 4 by being evacuated unit 10, temperature control list is then connected by power interface 8
Member 9, is adjusted by temperature of the temperature conditioning unit 9 to non-evaporable getter piece 5；The temperature of non-evaporable getter piece 5, which reaches, to be set
Definite value for a period of time after, non-evaporable getter piece 5 is activated, close temperature conditioning unit 9；Apparatus of the present invention and low-temperature (low temperature) vessel are pressed from both sides
Layer 11 connects, and vacuumizes linkage section using pumping unit 10, opens shut-off valve 3, device just can extract low-temperature (low temperature) vessel
The gas that interlayer 11 is released maintains 11 vacuum of low-temperature (low temperature) vessel interlayer.After non-evaporable getter piece 5 activates, working life and dimension
It is related to hold the gas flow generated in low-temperature (low temperature) vessel interlayer 11, when finding that pumping speed ability is decreased obviously, temperature conditioning unit 9 can be passed through
Carrying out heat activation work again makes non-evaporable getter piece 5 have adsorption capacity.Specific workflow includes the following steps:
Step 1, shut-off valve 3 and other pumping valve 2 are opened, induction chamber 4 is vacuumized using pumping unit 10；
When the internal pressure of induction chamber 4 is less than 1 × 10-2After Pa, shut-off valve 3 and other pumping valve 2 are closed；
Step 2, temperature conditioning unit 9 is opened, temperature conditioning unit 9 controls heating rod 6 and heats to non-evaporable getter piece 5；It is non-
After evaporable inspiration piece 5 keeps the temperature 30min or more under 400 DEG C~450 DEG C activationary temperatures, temperature conditioning unit 9 is closed, stops heating,
Inspiration piece is set to naturally cool to environment temperature；
Step 3, induction chamber 4 is connect with low-temperature (low temperature) vessel interlayer 11, opens shut-off valve 3 and other pumping valve 2, and utilize air exhauster
10 pairs of linkage sections of group vacuumize, and close other pumping valve 2, open interlayer connection valve 1, extract low-temperature (low temperature) vessel interlayer 11 by induction chamber 4
The gas of releasing maintains 11 vacuum of low-temperature (low temperature) vessel interlayer；
In 11 course of work of low-temperature (low temperature) vessel interlayer, if (low-temperature (low temperature) vessel when 5 exhaust capacity of non-evaporable inspiration piece is decreased obviously
The vacuum degree of interlayer is less than setting value), step 1~step 3 is repeated, non-evaporable getter piece is pumped and carries out heat activation again.
The present invention avoids non-evaporable getter piece 5 from swashing by the way that non-evaporable getter piece 5 to be isolated with low-temperature (low temperature) vessel interlayer 11
High temperature when living damages interlayer, maintains so as to be applied to the vacuum of low-temperature (low temperature) vessel interlayer 11, substitutes expensive oxygen
Change palladium gettering material；The present invention can directly be utilized to existing low-temperature (low temperature) vessel or simple transformation, while can easily replace air-breathing
Piece, it is easy to use.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (10)
1. a kind of external vacuum maintains device, for carrying out vacuum maintenance to low-temperature (low temperature) vessel interlayer (11), which is characterized in that packet
Include induction chamber (4), non-evaporable getter piece pump, temperature conditioning unit (9) and pumping unit (10)；
Wherein, the setting of non-evaporable getter piece pump is internal in induction chamber (4), including non-evaporable getter piece (5) and heating rod
(6)；Wherein non-evaporable getter piece (5) is mounted on heating rod (6)；
Induction chamber (4) is respectively communicated with pumping unit (10) and low-temperature (low temperature) vessel interlayer by the admission line equipped with shut-off valve (3)
(11)；Wherein, it is connect by being equipped with the pipeline of interlayer connection valve (1) with low-temperature (low temperature) vessel interlayer (11), by being equipped with other pumping valve (2)
Pipeline with pumping unit (10) connect；Induction chamber (4) is equipped with power interface (8), and heating rod (6) passes through power interface (8)
It connects temperature conditioning unit (9)；
Temperature conditioning unit (9) is for regulating and controlling the temperature of non-evaporable getter piece (5).
2. external vacuum as described in claim 1 maintains device, which is characterized in that the non-evaporable getter piece (5) is adopted
With the zirconium vanadium iron non evaporable getter material of porous structure.
3. external vacuum as described in claim 1 maintains device, which is characterized in that induction chamber (4) material is stainless
Steel material.
4. external vacuum as described in claim 1 maintains device, which is characterized in that induction chamber (4) structure is cylinder
Structure.
5. external vacuum as described in claim 1 maintains device, which is characterized in that more than two non-evaporables are inhaled
Gas piece (5) is mounted on heating rod (6) along the axial uniform intervals arrangement of heating rod (6), and passes through stainless steel washer space between adjacent
Two panels non-evaporable getter piece.
6. external vacuum as described in claim 1 maintains device, which is characterized in that induction chamber (4) is equipped with power interface (8)
An end wall surface be connecting flange (7).
7. external vacuum as described in claim 1 maintains device, which is characterized in that the heating rod (6) is closed using nickel chromium triangle
Gold production；The temperature conditioning unit (9) realizes the measurement to non-evaporable getter piece (5) temperature using thermocouple.
8. a kind of vacuum maintains method, device is maintained using external vacuum as described in claim 1, which is characterized in that packet
Include following steps:
Step 1, other pumping valve (2) and shut-off valve (3) are opened, is vacuumized induction chamber (4) by pumping unit (10), vacuum degree reaches
To after setting value, other pumping valve (2) and shut-off valve (3) are closed；
Step 2, starting heating rod (6) heating non-evaporable getter piece (5) opens temperature conditioning unit (9) to non-evaporable getter piece
(5) temperature is adjusted, and reaches activationary temperature；When the temperature of non-evaporable getter piece (5) reaches activationary temperature setting
Between after, close temperature conditioning unit (9)；
Step 3, maintain device to connect with low-temperature (low temperature) vessel interlayer (11) external vacuum, open other pumping valve (2) with
And shut-off valve (3), after being vacuumized linkage section using pumping unit (10), other pumping valve (2) is closed, is opened interlayer connection valve (1),
The gas for maintaining device abstraction low-temperature (low temperature) vessel interlayer (11) to release using external vacuum maintains low-temperature (low temperature) vessel interlayer (11) true
It is empty.
9. vacuum as claimed in claim 8 maintains method, which is characterized in that if the vacuum degree of low-temperature (low temperature) vessel interlayer (11) is less than
Setting value disconnects the external vacuum and maintains device and low-temperature (low temperature) vessel interlayer (11), repeats step 2- step 3.
10. vacuum as claimed in claim 8 maintains method, in the step 1, when induction chamber (4) internal pressure less than 1 ×
10-2It after Pa, opens temperature conditioning unit (9), non-evaporable getter piece (5) is heated in temperature conditioning unit (9) control heating rod (6)；
In the step 2, after so that non-evaporable getter piece (5) is kept the temperature 30min or more under 400 DEG C~450 DEG C activationary temperatures, temperature is closed
It controls unit (9), stops heating, non-evaporable getter piece (5) is made to naturally cool to environment temperature.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811544426.8A CN109827066A (en) | 2018-12-17 | 2018-12-17 | A kind of external vacuum maintenance device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811544426.8A CN109827066A (en) | 2018-12-17 | 2018-12-17 | A kind of external vacuum maintenance device and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109827066A true CN109827066A (en) | 2019-05-31 |
Family
ID=66859610
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811544426.8A Pending CN109827066A (en) | 2018-12-17 | 2018-12-17 | A kind of external vacuum maintenance device and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109827066A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114928934A (en) * | 2022-06-20 | 2022-08-19 | 中国科学院近代物理研究所 | Fixing device for accelerator vacuum chamber non-evaporable getter sheet and using method thereof |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1995016166A1 (en) * | 1993-12-10 | 1995-06-15 | Saes Getters S.P.A. | Vacuum stabilizer and method for the manufacture thereof |
| CN102117723A (en) * | 2010-01-05 | 2011-07-06 | 中国科学院物理研究所 | Vacuum air pumping device |
| CN102814146A (en) * | 2012-08-02 | 2012-12-12 | 上海交通大学 | High-efficiency hydrogen removal device in high-vacuum multilayer heat-insulation cryogenic container |
| CN102938356A (en) * | 2012-10-23 | 2013-02-20 | 北京市北分仪器技术有限责任公司 | Vacuum maintaining system for vacuum device |
| CN103808383A (en) * | 2013-12-24 | 2014-05-21 | 兰州空间技术物理研究所 | Working volume measuring device and method for reducing device wall air outlet error |
| CN104235598A (en) * | 2013-06-21 | 2014-12-24 | 青岛康威龙日用品有限公司 | Interlayer adsorbent box of thermal insulating container |
| CN104728075A (en) * | 2013-12-19 | 2015-06-24 | 北京有色金属研究总院 | Internal-heating type getter element and high-pumping-speed getter pump |
| CN204805943U (en) * | 2015-06-10 | 2015-11-25 | 汇达重工股份有限公司 | Novel low temperature container manages to find time device |
| JP6016159B2 (en) * | 2012-12-21 | 2016-10-26 | 大学共同利用機関法人 高エネルギー加速器研究機構 | Non-evaporable getter pump |
| CN106224202A (en) * | 2016-08-31 | 2016-12-14 | 兰州空间技术物理研究所 | A kind of non-evaporable adsorption pump utilizing electrical heating to activate |
| CN108119329A (en) * | 2017-12-20 | 2018-06-05 | 南京华东电子真空材料有限公司 | A kind of compact-sized sundstrand pump of big pumping speed |
-
2018
- 2018-12-17 CN CN201811544426.8A patent/CN109827066A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1995016166A1 (en) * | 1993-12-10 | 1995-06-15 | Saes Getters S.P.A. | Vacuum stabilizer and method for the manufacture thereof |
| CN102117723A (en) * | 2010-01-05 | 2011-07-06 | 中国科学院物理研究所 | Vacuum air pumping device |
| CN102814146A (en) * | 2012-08-02 | 2012-12-12 | 上海交通大学 | High-efficiency hydrogen removal device in high-vacuum multilayer heat-insulation cryogenic container |
| CN102938356A (en) * | 2012-10-23 | 2013-02-20 | 北京市北分仪器技术有限责任公司 | Vacuum maintaining system for vacuum device |
| JP6016159B2 (en) * | 2012-12-21 | 2016-10-26 | 大学共同利用機関法人 高エネルギー加速器研究機構 | Non-evaporable getter pump |
| CN104235598A (en) * | 2013-06-21 | 2014-12-24 | 青岛康威龙日用品有限公司 | Interlayer adsorbent box of thermal insulating container |
| CN104728075A (en) * | 2013-12-19 | 2015-06-24 | 北京有色金属研究总院 | Internal-heating type getter element and high-pumping-speed getter pump |
| CN103808383A (en) * | 2013-12-24 | 2014-05-21 | 兰州空间技术物理研究所 | Working volume measuring device and method for reducing device wall air outlet error |
| CN204805943U (en) * | 2015-06-10 | 2015-11-25 | 汇达重工股份有限公司 | Novel low temperature container manages to find time device |
| CN106224202A (en) * | 2016-08-31 | 2016-12-14 | 兰州空间技术物理研究所 | A kind of non-evaporable adsorption pump utilizing electrical heating to activate |
| CN108119329A (en) * | 2017-12-20 | 2018-06-05 | 南京华东电子真空材料有限公司 | A kind of compact-sized sundstrand pump of big pumping speed |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114928934A (en) * | 2022-06-20 | 2022-08-19 | 中国科学院近代物理研究所 | Fixing device for accelerator vacuum chamber non-evaporable getter sheet and using method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102847733B (en) | Aluminum foil vacuum low-temperature oil removing process and equipment | |
| CN104764632B (en) | Contactless Full-automatic gas keeps sample device | |
| CN201180900Y (en) | High-efficiency air suction heating mechanism in low-temperature liquid tank interlayer evacuation course | |
| CN109827066A (en) | A kind of external vacuum maintenance device and method | |
| CN202057186U (en) | High temperature high pressure high vacuum resistant tube furnace | |
| CN208418161U (en) | A kind of gas cylinder pretreatment unit | |
| CN101893383B (en) | Method and device for vacuumizing and filling inert gases in industrial furnace | |
| CN202430524U (en) | Clothes drying cabinet | |
| CN201653069U (en) | Air bottle dryer | |
| CN207498060U (en) | A kind of self-regulation nitrogen making machine | |
| CN208475819U (en) | A kind of energy free dehumidifying heated baking system | |
| CN208349734U (en) | A kind of dry dehydrater of feed | |
| CN211068069U (en) | Intelligent traditional chinese medicine does not have juice and evaporates system device | |
| CN212035559U (en) | Air-conditioned space heating system | |
| CN207763251U (en) | A kind of auxiliary thermal of gas | |
| CN208635251U (en) | A kind of wind-energy water heater of stable structure | |
| CN107692275A (en) | Effectively improve the drying device and method of vitamin C retention rate in fruit-vegetable dried product | |
| CN204830806U (en) | High vacuum baking equipment | |
| CN206227510U (en) | A kind of food vacuum low temperature drying equipment | |
| CN205226868U (en) | Cryogenic insulation gas cylinder evacuating device | |
| CN205678423U (en) | Low-temperature bottle pumped vacuum systems | |
| CN107421255B (en) | Drying chamber for root of purple-flowered peucedanum drying | |
| CN103816689B (en) | MVR evaporator | |
| CN208649299U (en) | A kind of heating plant of anaerobic fermentation tank | |
| CN206739767U (en) | A kind of device that may be implemented in line vacuum drying |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20190531 |