CN109656061A - Light orientation light-source system and light allocating process - Google Patents
Light orientation light-source system and light allocating process Download PDFInfo
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- CN109656061A CN109656061A CN201910126592.4A CN201910126592A CN109656061A CN 109656061 A CN109656061 A CN 109656061A CN 201910126592 A CN201910126592 A CN 201910126592A CN 109656061 A CN109656061 A CN 109656061A
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Abstract
The present invention provides a kind of smooth orientation light-source system and light allocating process, which carries out light allocating process to a first substrate and a second substrate, and including a transmitting device and a light source module.The mobile first substrate of transmitting device and the second substrate.Light source module has an at least light-emitting component, and when the mobile first substrate of transmitting device and the second substrate pass through light source module, light-emitting component is to first substrate and the second substrate all carries out first time exposure respectively and second exposes.When carrying out the first time exposure of first substrate and the second substrate, or when carrying out second of exposure of first substrate and the second substrate, the moving direction of first substrate and the second substrate is opposite.When carrying out the first time exposure and second of exposure of the second substrate of first substrate, another substrate carries out substrate exchange, alignment and exposure angle rotation.Through the invention, can efficiently use light source module reduces the station time of light allocating process, to reduce equipment setup cost.
Description
The application is to apply on December 07th, 2012, entitled " light orientation light-source system and light allocating process ",
Application No. is the divisional applications of 201210524064.2 Chinese invention patent application
Technical field
The present invention relates to a kind of smooth orientation light-source system and light allocating process.
Background technique
With the development of science and technology flat display apparatus is widely used in various fields, especially liquid crystal display
Device, figure is frivolous, low power consumption and the advantageous characteristics such as radiationless because having, and gradually replaces conventional cathode ray tube
Display device, and be applied in the electronic product of numerous species, such as mobile phone, portable multimedia device, notebook electricity
Brain, LCD TV and LCD screen etc..
The manufacturer of liquid crystal display device is in the wide view for promoting thin film electrocrystal liquid crystal display device (TFT LCD) at present
Angle is technical, has striden into using light orientation (Photo-alignment) technology and has controlled the configuration direction of liquid crystal molecule, has mentioned whereby
The optical property and yield of high liquid crystal display device.Wherein, light alignment technique is using a ultraviolet source irradiation in a substrate
On one macromolecule membrane (alignment film), make macromolecular structure on film surface occur the photopolymerization of inhomogeneities, isomerization or
Cracking reaction lures that the chemical bonding structure on film surface generates special directionality into, further to induce liquid crystal molecule forward
Arrangement, and achieve the purpose that light orientation.Wherein, light orientation light-source system used in light alignment technique (or polarisation exposure system
System, Polarization exposure optical system) it is highest part in equipment cost.However, existing light
The design of orientation light-source system is all that one group of exposure machine (can have one or more ultraviolet tube) collocation, one substrate is flat
Platform (Substrate stage) is exposed operation (substrate stage is bearing glass substrate), therefore, the work of light allocating process
Stand the time (Tact time) be all wasted on the non-real time for exposure of substrate, such as be wasted in pair of the exchange of substrate, substrate
In quasi- or base plate exposure angle adjustment work, cause exposure machine can not by sufficiently, effectively utilize, cause to increase production capacity
When, more light orientation light-source systems and workshop installation space need to be invested, so as to build cost relative increase many for production line, is made
At liquid crystal display device, increased production cost and the competitiveness of product is declined.
Therefore, how a kind of smooth orientation light-source system and light allocating process are provided, light orientation light-source system can be efficiently used
And the station time of light allocating process is reduced, the competitiveness of product is promoted to reduce equipment setup cost, it has also become important class
One of topic.
Summary of the invention
In view of the above subject, light orientation light-source system can be efficiently used it is an object of the present invention to provide one kind and reduces light
The station time of allocating process promotes the light orientation light-source system of the competitiveness of product to reduce equipment setup cost and light is matched
To technique.
In order to achieve the above object, a kind of smooth orientation light-source system according to the present invention is to a first substrate and a second substrate
Light allocating process is carried out, and including a transmitting device and a light source module.The mobile first substrate of transmitting device and the second substrate.
Light source module has an at least light-emitting component, when transmitting device moves first substrate and the second substrate passes through light source module, hair
Optical element issues polarization light and irradiates first substrate equably to carry out first time exposure respectively to the alignment film on first substrate
Light and second of exposure and light-emitting component issue polarization light and equably irradiate the second substrate to the orientation in the second substrate
Film carries out first time exposure respectively and second exposes.Wherein, the first time exposure and the second substrate of Yu Jinhang first substrate
When exposing for the first time, the moving direction of first substrate and the second substrate is on the contrary, in second of exposure for carrying out first substrate
And the second substrate second of exposure when, the moving direction of first substrate and the second substrate is opposite.And in progress first substrate
The moving direction of exposure is opposite with moving direction when second of exposure for carrying out first substrate for the first time.In carrying out the first base
When the first time exposure of plate, the second substrate carries out substrate exchange, alignment and exposure angle rotary work, Yu Jinhang the second substrate
When second of exposure, first substrate carries out substrate exchange, alignment and exposure angle rotation.
In one embodiment, when second of exposure of Yu Jinhang first substrate and the first time of the second substrate expose, first
Substrate and the equidirectional movement of the second substrate.
In one embodiment, when carrying out first time exposure and second exposes, first substrate and the second substrate are difference
Movement is moved simultaneously.
In one embodiment, transmitting device is line style, and drives first substrate and the second substrate linear movement.
In one embodiment, light orientation light-source system further includes an at least mobile platform, is set on transmitting device.
In one embodiment, mobile platform is a mechanical platform or an air-flotation type platform.
In one embodiment, which is a first movement platform and one second mobile platform, and first movement is flat
Platform and the second mobile platform carry first substrate and the second substrate respectively, transmitting device respectively by mobile first movement platform and
Second mobile platform and move first substrate and the second substrate.
In one embodiment, transmitting device includes a linear electric machine and a guide rail or an air-flotation type mobile device.
In one embodiment, light orientation light-source system further includes a first substrate loading attachment and a second substrate loads dress
It sets, is respectively arranged at the both ends of transmitting device, and load and unload first substrate and the second substrate respectively.
In order to achieve the above object, a kind of smooth allocating process according to the present invention, wherein a first substrate and a second substrate with
One smooth orientation light-source system cooperation, light orientation light-source system includes a transmitting device and a light source module, and light source module has extremely
A few light-emitting component, when the mobile first substrate of transmitting device and the second substrate pass through light source module, light-emitting component issues polarization
Light and equably irradiation first substrate are exposed with carrying out first time exposure and second respectively to the alignment film on first substrate,
And light-emitting component issues polarization light and irradiates the second substrate equably to carry out first respectively to the alignment film in the second substrate
It secondary exposure and second exposes, light allocating process includes: that transmitting device drives first substrate to move along a first direction, to the
One substrate carries out first time exposure；Transmitting device drives first substrate and the second substrate to move along a second direction, to first
Substrate carries out second and exposes, and carries out first time exposure to the second substrate, and light-emitting component issues polarizing light irradiation first substrate；
And transmitting device drives the second substrate to move along first direction, is exposed with carrying out second to the second substrate, wherein first party
To with second direction be opposite direction.Light allocating process further includes: carrying out base plate alignment to first substrate or the second substrate respectively
And exposure angle rotation.
In one embodiment, when carrying out first time exposure and second exposes, first substrate and the second substrate are difference
Movement is moved simultaneously.
In one embodiment, light allocating process further includes: by a first substrate loading attachment in one end of transmitting device
First substrate is loaded and is unloaded；And by a second substrate loading attachment in transmitting device the other end to the second substrate
It is loaded and unloads.
In one embodiment, when the first time exposure of Yu Jinhang first substrate, the second substrate is loaded and unloads, Yu Jin
When second of exposure of row the second substrate, first substrate is loaded and unloads.
In one embodiment, when first substrate expose for the first time, the second substrate carries out base plate alignment and explosure angle
Degree rotation.
In one embodiment, when the second substrate carries out second of exposure, first substrate carries out base plate alignment and explosure angle
Degree rotation.
In one embodiment, transmitting device includes a linear electric machine and a guide rail or an air-flotation type mobile device.
From the above, because in light orientation light-source system and light allocating process according to the present invention, transmitting device removable the
One substrate and the second substrate, and light source module is in the first time exposure for the first time exposure and the second substrate for carrying out first substrate
When, the moving direction of first substrate and the second substrate is opposite.Alternatively, light source module in carry out second of first substrate exposure and
When second of exposure of the second substrate, the moving direction of first substrate and the second substrate is also opposite.Whereby, so that light of the invention
Orientation light-source system and light allocating process can efficiently use the light source module of light orientation light-source system and reduce light allocating process
The station time promotes the competitiveness of product to reduce equipment setup cost.
Detailed description of the invention
Figure 1A to Fig. 1 F is respectively a kind of schematic diagram of smooth orientation light-source system of present pre-ferred embodiments；
Fig. 2 is a kind of step flow chart of smooth allocating process of present pre-ferred embodiments；And
Fig. 3 is the schematic diagram of the light orientation light-source system of another state sample implementation of the present invention.
Appended drawing reference
1,1a: light orientation light-source system
11,11a: transmitting device
12,12a, 12b: light source module
121: light-emitting component
D1: first direction
D2: second direction
P1: first movement platform
P2: the second mobile platform
P3: third mobile platform
P4: the four mobile platform
P5: the five mobile platform
S01~S05: step
S1: first substrate
S2: the second substrate
S3: third substrate
S4: the tetrabasal
S5: the five substrate
Specific embodiment
Hereinafter with reference to correlative type, illustrate a kind of smooth orientation light-source system and light orientation according to present pre-ferred embodiments
Technique, wherein identical element will be illustrated with identical reference marks.
Light orientation light-source system of the invention can be applied to plane switching (in-plane switch, IPS) formula liquid crystal display
Device, fringe field switch (fringe field switching, FFS) formula liquid crystal display device, vertical orientation mode
The light allocating process of (vertical alignment mode, VA mode) liquid crystal display device or 3D liquid crystal display device.
It please refers to shown in Figure 1A to Fig. 1 F, is respectively a kind of smooth orientation light-source system 1 of present pre-ferred embodiments
Schematic diagram.
Light orientation light-source system 1 can carry out light allocating process to an a first substrate S1 and the second substrate S2.In this, not
It limits and light allocating process only is carried out to two pieces of substrates, certainly, light orientation light-source system 1 can also be carried out by substrate-replacing apparatus
The exchange of substrate and to more substrates carry out light allocating process.
As shown in Figure 1A, light orientation light-source system 1 includes a transmitting device 11 and a light source module 12.Wherein, it transmits
Device 11 can be for example comprising a linear electric machine and a guide rail, or includes an air-flotation type (Air floating) substrate moving device.
In this, transmitting device 11 is a Mechanical transformation device, and includes for linear electric machine and linear guides (figure is not shown).Separately
Outside, light orientation light-source system 1 more may include that at least a mobile platform is set on transmitting device 11.Wherein, mobile platform can be
One mechanical platform or an air-flotation type platform (Air floating stage, the moving substrate in a manner of air blowing).In this, such as scheme
Shown in 1A, light orientation light-source system 1 be with have two mobile platforms (a first movement platform P1 and one second mobile platform P2),
And respectively for mechanical movable platform.First movement platform P1 and the second mobile platform P2 are set on transmitting device 11.
Wherein, first movement platform P1 and the second mobile platform P2 can respectively correspond carrying first substrate S1 and the second substrate S2, and pass
Defeated device 11 can be by driving first movement platform P1 and the second mobile platform P2 movement to move first substrate S1 and the second base
Plate S2.In the present embodiment, transmitting device 11 is line style, and can drive first movement platform P1, first substrate S1 and the second shifting
Moving platform P2, the second substrate S2 linear movement, and can simultaneously or separately move first substrate S1 the second substrate S2.
Light source module 12 has an at least light-emitting component 121, and in this, light source module 12 is with a plurality of light-emitting elements
For 121 (light-emitting component 121 of how many quantity is not shown in figure, can be one, two or three ..., depending on technique demand and
It is fixed).Wherein, light-emitting component 121 can be a fluorescent tube, and the light that fluorescent tube issues is a polarization light, and polarised light can make the first base
The molecular structure of alignment film (material is, for example, polyimide, polyimide, PI) on plate S1 or the second substrate S2 occurs uneven
Photopolymerization, isomerization or the cracking reaction of even property lure that the chemical bonding structure in orientation film surface generates special directionality into, with
Further induction liquid crystal molecule can be arranged forward and achieve the purpose that light orientation.In addition, light source module 12 can more have it is multiple partially
Mating plate (figure do not show), light is by that can form a directional light after the grade polaroids, with uniform irradiation in first substrate S1 or the
On two substrate S2.When the mobile first substrate S1 and the second substrate S2 of transmitting device 11 passes through light source module 12 respectively, shine member
The polarised light that part 121 is issued can carry out respectively first time exposure technology and second of exposure technology to first substrate S1, and right
The second substrate S2 carries out first time exposure respectively and second exposes.In other words, the first substrate S1 or the second base of the present embodiment
Plate S2 need to be each through double exposure technique, to complete its light allocating process.In this, first substrate S1 or the second substrate S2 pass through light source
When 12 module, the alignment film for the light irradiation first substrate S1 or the second substrate S2 which issues is as above-mentioned
So-called " exposure " technique.
In addition, light orientation light-source system 1 more may include a first substrate loading attachment and a second substrate loading attachment (figure
Do not show), first substrate loading attachment and the second substrate loading attachment can be for example comprising a mechanical arms, and are set to transmission dress
11 both ends are set, first substrate S1 and the second substrate S2 is loaded and unloaded (load/unload) to clamp respectively.Change speech
It, the substrate that first substrate loading attachment can carry out first substrate S1 loads and the work such as unloading, and the second substrate loading attachment
The substrate that can carry out the second substrate S2 loads and unloaded operation.In this, loading is for example not yet to be carried out with mechanical arm clamps one
The substrate of light allocating process is placed on mobile platform, and is unloaded and referred to that clamping is completed the substrate of light allocating process and leaves movement
Platform.In addition, after the completion of first substrate S1 or the second substrate S2 is loaded base can be carried out to first substrate S1 or the second substrate S2
The exposure preparation such as plate alignment and exposure angle rotation.
Hereinafter, please respectively refer to shown in Figure 1A to Fig. 1 F and Fig. 2, with the stream for the light allocating process that the present invention will be described in detail
Journey.Wherein, Fig. 2 is a kind of step flow chart of smooth allocating process of present pre-ferred embodiments.
Light allocating process of the invention may include step S01~step S03.
But, before Yu Jinhang step S01, firstly, as shown in Figure 1A, need to be filled by first substrate loading attachment in transmission
It sets 11 one end to be loaded first substrate S1, and by a second substrate loading attachment in the other end pair of transmitting device 11
The second substrate S2 is loaded, and first substrate S1 is placed on first movement platform P1, and the second substrate S2 is placed in
On second mobile platform P2.In addition, after the completion of loading, it, can also be to first substrate S1 or the second substrate if process requirement
S2 carries out the work such as base plate alignment and exposure angle rotation, to complete the preparation before exposure.
Then, then step S01 is executed, as shown in Figure 1B, transmitting device 11 drives first substrate S1 along a first direction D1
It is mobile, to carry out first time exposure to first substrate S1.At this point, first substrate S1 is individually moved, and the second substrate S2 is not moved.
As shown in Figure 1 C, first substrate S1 is moved linearly to the side of the second substrate S2, so that first substrate S1 and the second substrate S2 are equal
Positioned at the side of transmitting device 11 (Fig. 1 C is by taking right side as an example).
Then, step S02 is executed, as shown in figure iD, transmitting device 11 drives first substrate S1 and the second substrate S2 along one
Second direction D2 is mobile, is exposed with carrying out second to first substrate S1, and carry out first time exposure to the second substrate S2.Change speech
It, is when the first time exposure of second of the exposure and the second substrate S2 that carry out first substrate S1, first substrate S1 and the second base
Plate S2 is while past second direction D2 is mobile.Wherein, first direction D1 is opposite direction with second direction D2.Such as Fig. 1 E institute
Show, first substrate S1 and the second substrate S2 are the other sides for being respectively moved to transmitting device 11 (Fig. 1 E is by taking left side as an example).?
In the present embodiment, first direction D1 is the right direction in diagram, and second direction D2 is the left direction in diagram, certainly
It can be opposite.
Come again, executes step S03, as shown in fig. 1F, transmitting device 11 drives the second substrate S2 to move along first direction D1,
It is exposed with carrying out second to the second substrate S2.In this, because in step S02, secondary exposure work is completed in first substrate S1
Skill, therefore while executing second of exposure of the second substrate S2 of step S03, the second substrate S2 is to be individually moved, at this point, the
One substrate S1 can carry out the unloading of substrate, and load another first substrate S1 on first movement platform P1.In addition, first substrate
S1 can also carry out the work such as alignment and exposure angle rotation again, to complete the preparation before exposure.At this point, can refer to shown in Figure 1A,
The second substrate S2 is completed second after exposing, and is positioned at the right side of transmitting device 11.
Due in step S03, while the second substrate S2 carries out second and exposes, before exposure is completed in first substrate S1
Therefore preparation can repeat the process of Figure 1B to Fig. 1 F, move another first substrate S1 along first direction D1, with right
Another first substrate S1 carries out exposure work for the first time.In this, when carrying out the first time exposure of another first substrate S1, because of the
The technique of re-expose is completed in two substrate S2, therefore the second substrate S2 can also carry out substrate exchange and (unload and load another second
Substrate S2), alignment and exposure angle rotation etc. expose before preparation.
Therefore, in light orientation light-source system 1 of the invention and light allocating process, as shown in Figure 1B and Fig. 1 D, Yu Jinhang
The first time exposure (mobile toward first direction D1) of first substrate S1 and the first time exposure of the second substrate S2 are (toward second direction D2
It is mobile) when, the moving direction of first substrate S1 and the second substrate S2 are opposite.
In addition, as shown in Fig. 1 D and Fig. 1 F, second of exposure (mobile toward second direction D2) of Yu Jinhang first substrate S1
And when second of the second substrate S2 exposure (mobile toward first direction D1), the moving direction of first substrate S1 and the second substrate S2
Also opposite.In other words, when expose for the first time, the moving direction of first substrate S1 and the second substrate S2 on the contrary, and in into
When second of exposure of row, first substrate S1 and the moving direction of the second substrate S2 are also opposite.
In addition, as shown in Figure 1B and Fig. 1 F, carry out first substrate S1 first time exposure and second of the second substrate S2
When exposure, first substrate S1 and the second substrate S2 are mobile toward first direction D1, and to move respectively.In addition, as shown in figure iD,
When the first time of second of the exposure and the second substrate S2 that carry out first substrate S1 exposes, first substrate S1 and the second substrate S2 are equal
It is moved toward second direction D2, and is while moving.
It holds, in light orientation light-source system 1 of the invention and light allocating process, transmitting device 11 moves first substrate
S1 and the second substrate S2, and light source module 12 is exposed in the first time of the first time exposure and the second substrate S2 that carry out first substrate S1
The moving direction of light time, first substrate S1 and the second substrate S2 are opposite.Alternatively, light source module 12 is in carrying out the of first substrate S1
When second of exposure of re-expose and the second substrate S2, the moving direction of first substrate S1 and the second substrate S2 are also opposite.By
This, so that light orientation light-source system 1 of the invention and light allocating process can efficiently use the light source module of light orientation light-source system 1
12 and reduce station time (Tact time) of light allocating process, the competitiveness of product is promoted to reduce equipment setup cost.
In addition, shown in referring to figure 3., for the schematic diagram of the light orientation light-source system 1a of another state sample implementation of the present invention.
In this state sample implementation, primary difference is that, light orientation light-source system 1a has with light orientation light-source system 1
Transmitting device 11a is to enclose to be set as ring-type, and light orientation light-source system 1a has first movement platform P1~the 5th mobile platform P5,
And the carrying substrate S5 of first substrate S1~the 5th can be respectively corresponded.Certainly it is not limited thereto, can also match in response to process requirements
It sets and is higher than 5 groups or mobile platform and substrate less than 5 groups.In the present embodiment, transmitting device 11a can be by driving first movement
Five mobile platform P5 of platform P1~the is mobile and moves the substrate S5 of first substrate S1~the 5th and passes through light source module 12a, 12b.In
This, moving direction can also be moved counterclockwise certainly for clockwise.
As shown in figure 3, the grade light-emitting components 121 of light source module 12a are sent out when a substrate passes through light source module 12a
Light out can irradiate the substrate, this is the first time exposure technology of the substrate.Pass through light source module 12b when the substrate is mobile
When, the light that the grade light-emitting components 121 of light source module 12b are issued irradiates the substrate, this is second of exposure of the substrate
Technique.In this way, the light allocating process of the achievable substrate.
By taking first substrate S1 as an example, after first substrate S1 completes to load work (substrate exchange), first substrate S1 can be into
Row base plate alignment and exposure angle rotation etc. exposure before preparation, then counterclockwise sequentially by light source module 12a,
12b, to complete exposure technology twice.When wherein, at the second substrate S2 that first substrate S1 is moved to Fig. 3, at this time second
Substrate S2 is moved at light source module 12a simultaneously, and so on, the 5th substrate P 5 is movable at former first substrate S1.By
Light orientation (re-expose) technique is completed in the 5th substrate S5, thus can be carried out at the position former first substrate S1 substrate unloading and
The work of the substrate exchanges such as loading.In other words, when the first substrate S1 of Fig. 3 is moved to the next position, the 5th substrate S5 can also be same
When be moved at former first substrate S1, to carry out the work such as substrate exchange.
In conclusion because in light orientation light-source system and light allocating process according to the present invention, transmitting device removable the
One substrate and the second substrate, and light source module is in the first time exposure for the first time exposure and the second substrate for carrying out first substrate
When, the moving direction of first substrate and the second substrate is opposite.Alternatively, light source module in carry out second of first substrate exposure and
When second of exposure of the second substrate, the moving direction of first substrate and the second substrate is also opposite.Whereby, so that light of the invention
Orientation light-source system and light allocating process can efficiently use the light source module of light orientation light-source system and reduce light allocating process
The station time promotes the competitiveness of product to reduce equipment setup cost.
The foregoing is merely illustratives, rather than are restricted person.It is any without departing from spirit and scope of the invention, and to it
The equivalent modifications or change of progress, are intended to be limited solely by the range of claims.
Claims (16)
1. a kind of smooth orientation light-source system carries out light allocating process to a first substrate and a second substrate, which is characterized in that institute
Stating light orientation light-source system includes:
One transmitting device, the mobile first substrate and the second substrate；And
One light source module has an at least light-emitting component,
Wherein, described when the mobile first substrate of the transmitting device and the second substrate pass through the light source module
Light-emitting component issue polarization light and equably irradiate the first substrate with to the alignment film on the first substrate respectively into
Row exposure for the first time and second exposure and the light-emitting component issue polarization light and equably irradiate the second substrate with
It carries out first time exposure respectively to the alignment film in the second substrate and second exposes,
Wherein, when the first time exposure of the first time exposure and the second substrate that carry out the first substrate,
The first substrate and the moving direction of the second substrate in described second for carrying out the first substrate on the contrary, expose
When exposing for described second of light and the second substrate, the moving direction of the first substrate and the second substrate on the contrary,
And in the moving direction for the first time exposure for carrying out the first substrate and described second of the progress first substrate
Moving direction when exposure is opposite；
When carrying out the first time exposure of the first substrate, the second substrate carries out substrate exchange, alignment and exposure
Angle rotary work, when described second for carrying out the second substrate exposes, the first substrate carries out substrate exchange, right
The rotation of quasi- and exposure angle.
2. smooth orientation light-source system according to claim 1, which is characterized in that in carrying out described the of the first substrate
When the first time of re-expose and the second substrate exposes, the first substrate and the equidirectional shifting of the second substrate
It is dynamic.
3. smooth orientation light-source system according to claim 1, which is characterized in that in carrying out the first time exposure and described
When second of exposure, the first substrate is to move or move simultaneously respectively with the second substrate.
4. smooth orientation light-source system according to claim 1, which is characterized in that the transmitting device is line style, and is driven
The first substrate and the second substrate linear movement.
5. smooth orientation light-source system according to claim 1, which is characterized in that the smooth orientation light-source system further includes:
An at least mobile platform is set on the transmitting device.
6. smooth orientation light-source system according to claim 5, which is characterized in that the mobile platform is a mechanical platform
An or air-flotation type platform.
7. smooth orientation light-source system according to claim 5, which is characterized in that the mobile platform is flat for a first movement
Platform and one second mobile platform, the first movement platform and second mobile platform carry the first substrate and institute respectively
The second substrate is stated, the transmitting device moves institute by the mobile first movement platform and second mobile platform respectively
State first substrate and the second substrate.
8. smooth orientation light-source system according to claim 1, which is characterized in that the transmitting device includes a linear electric machine
And guide rail or an air-flotation type mobile device.
9. smooth orientation light-source system according to claim 1, which is characterized in that the smooth orientation light-source system further includes:
One first substrate loading attachment and a second substrate loading attachment are respectively arranged at the both ends of the transmitting device, and divide
The first substrate and the second substrate are not loaded and unloaded.
10. a kind of smooth allocating process, which is characterized in that a first substrate and a second substrate are matched with a smooth orientation light-source system
It closes, the smooth orientation light-source system includes a transmitting device and a light source module, and the light source module has at least one luminous member
Part, when the transmitting device moves the first substrate and the second substrate passes through the light source module, the luminous member
Part issues polarization light and irradiates the first substrate equably to carry out first respectively to the alignment film on the first substrate
Secondary exposure and second of exposure and the light-emitting component issue polarization light and equably irradiate the second substrate to described
Alignment film in the second substrate carries out first time exposure respectively and second exposes, and the smooth allocating process includes:
The transmitting device drives the first substrate to move along a first direction, to carry out described first to the first substrate
Secondary exposure；
The transmitting device drives the first substrate and the second substrate to move along a second direction, to first base
Plate carries out described second and exposes, and carries out the first time exposure to the second substrate, and the light-emitting component issues polarization
Light irradiates the first substrate；And
The transmitting device drives the second substrate to move along the first direction, to carry out described the to the second substrate
Re-expose, wherein the first direction and the second direction are opposite direction；
The smooth allocating process further includes:
Base plate alignment is carried out to the first substrate or the second substrate respectively and exposure angle rotates.
11. smooth allocating process according to claim 10, which is characterized in that in carrying out the first time exposure and described the
When re-expose, the first substrate is to move or move simultaneously respectively with the second substrate.
12. smooth allocating process according to claim 10, which is characterized in that the smooth allocating process further includes:
The first substrate is loaded and is unloaded in one end of the transmitting device by a first substrate loading attachment；And
The other end by a second substrate loading attachment in the transmitting device is loaded and unloads to the second substrate.
13. smooth allocating process according to claim 12, which is characterized in that in described the first of the progress first substrate
When secondary exposure, the second substrate is loaded and unloads, described when described second for carrying out the second substrate exposes
First substrate is loaded and unloads.
14. smooth allocating process according to claim 10, which is characterized in that Yu Suoshu first substrate carries out the first time
When exposure, the second substrate carries out base plate alignment and exposure angle rotation.
15. smooth allocating process according to claim 10, which is characterized in that Yu Suoshu the second substrate carries out described second
When exposure, the first substrate carries out base plate alignment and exposure angle rotation.
16. smooth allocating process according to claim 10, which is characterized in that the transmitting device include a linear electric machine and
One guide rail or an air-flotation type mobile device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910126592.4A CN109656061A (en) | 2012-12-07 | 2012-12-07 | Light orientation light-source system and light allocating process |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210524064.2A CN103852938A (en) | 2012-12-07 | 2012-12-07 | Optical alignment light source system and optical alignment process |
| CN201910126592.4A CN109656061A (en) | 2012-12-07 | 2012-12-07 | Light orientation light-source system and light allocating process |
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| Application Number | Title | Priority Date | Filing Date |
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| JP5344105B1 (en) * | 2013-03-08 | 2013-11-20 | ウシオ電機株式会社 | Polarizing light irradiation apparatus for photo-alignment and polarized light irradiation method for photo-alignment |
| JP5892210B2 (en) * | 2014-08-04 | 2016-03-23 | 岩崎電気株式会社 | Optical alignment device |
| JP5928629B1 (en) * | 2015-03-23 | 2016-06-01 | ウシオ電機株式会社 | Photo-alignment apparatus and photo-alignment method |
| CN106501976A (en) * | 2016-12-20 | 2017-03-15 | 惠科股份有限公司 | Panel processing device |
| CN108594539B (en) * | 2018-03-12 | 2021-09-17 | 昆山龙腾光电股份有限公司 | Alignment method and alignment system |
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| TW546700B (en) * | 2000-03-14 | 2003-08-11 | Nikon Corp | Alignment method, exposure method, exposure apparatus and device manufacturing method |
| TW200848945A (en) * | 2007-02-02 | 2008-12-16 | Fujifilm Corp | Pattern forming apparatus and method |
| JP2010072615A (en) * | 2008-08-21 | 2010-04-02 | Nsk Ltd | Scan exposure apparatus and method for conveying substrate in scan exposure apparatus |
| CN102004358A (en) * | 2009-09-01 | 2011-04-06 | 优志旺电机株式会社 | Manufacturing method and device of a liquid crystal panel |
| CN102655073A (en) * | 2011-03-04 | 2012-09-05 | 日新离子机器株式会社 | Ion beam illumination method and device |
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| JP4968165B2 (en) * | 2008-04-24 | 2012-07-04 | ウシオ電機株式会社 | Polarized light irradiation device for photo-alignment |
| KR100911459B1 (en) * | 2008-08-06 | 2009-08-11 | 삼성전자주식회사 | Method of forming an alignment layer, method of manufacturing liquid crystal display apparatus using the same and apparatus for forming the alignment layer |
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| TW546700B (en) * | 2000-03-14 | 2003-08-11 | Nikon Corp | Alignment method, exposure method, exposure apparatus and device manufacturing method |
| TW200848945A (en) * | 2007-02-02 | 2008-12-16 | Fujifilm Corp | Pattern forming apparatus and method |
| JP2010072615A (en) * | 2008-08-21 | 2010-04-02 | Nsk Ltd | Scan exposure apparatus and method for conveying substrate in scan exposure apparatus |
| CN102004358A (en) * | 2009-09-01 | 2011-04-06 | 优志旺电机株式会社 | Manufacturing method and device of a liquid crystal panel |
| CN102655073A (en) * | 2011-03-04 | 2012-09-05 | 日新离子机器株式会社 | Ion beam illumination method and device |
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