CN109470173A - A kind of binary channels simultaneous phase shifting interference microscopic system - Google Patents
A kind of binary channels simultaneous phase shifting interference microscopic system Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
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- G—PHYSICS
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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Abstract
The present invention discloses a kind of binary channels simultaneous phase shifting interference microscopic system, is related to optical interference field, including spectrophotometric unit, reference path unit, optical path unit, combined beam unit and image acquisition units；Spectrophotometric unit is used to incident light wave being separated into the measuring beam and reference beam that transmission direction is mutually perpendicular to, plane of polarization is mutually orthogonal；Reference path unit is used for transmission reference beam and reference beam is carried out airspace phase shift；Optical path unit is used for transmission measuring beam and carries out airspace phase shift to measuring beam, and measuring beam is generated object beam after object to be measured；Combined beam unit is for carrying out conjunction beam to the dephased reference beam in airspace and object beam；Image acquisition units be divided for the light beam after pairing beam and acquisition obtains two width phase shift interference bar graphs on both channels；Cost, technical difficulty are reduced, on the basis of having airspace simultaneous phase shifting function, time domain phase shift function is also equipped with, measuring system can be also corrected.
Description
Technical Field
The invention relates to an optical interference microscope system, in particular to a dual-channel simultaneous phase shift interference microscope system.
Background
In recent decades, with the development of photoelectric image sensing technology, computer technology and image processing technology, optical phase measurement microscopy has also made great progress; the optical phase measurement microscopy has the advantages of full field, rapidness, high precision, non-contact and no damage, one or more interferograms with monotonous phase shift are collected by a photoelectric image sensor (such as a CCD (charge coupled device) and a CMOS (complementary metal oxide semiconductor)) and the phase distribution of a sample can be calculated by utilizing a phase demodulation algorithm, meanwhile, the high-precision measurement of the three-dimensional shape information of the sample is realized, and the measurement precision can reach 1/100 wavelength; has wide application in cell biology, biological tissue, organ, clinical detection and diagnosis, optical surface detection and other aspects.
Compared with other interference measurement technologies, the phase-shift interference measurement technology has the advantages of thorough background noise elimination, high measurement precision and the like, but also has the problem that a plurality of phase-shift interferograms need to be acquired by using a phase-shift device at different moments, so that the measurement result is easily influenced by external vibration and air crosstalk, and dynamic phase measurement cannot be realized. The method is characterized in that a polarized optical element is used for phase shifting orthogonal polarized light, three or four interference patterns with phase shift difference pi/2 are simultaneously formed on the target surface of a photosensitive chip of one or more cameras, and then a three-step or four-step phase shift algorithm is used for calculating the phase. There are three main ways to achieve: firstly, forming interferograms with different phase shift quantities on target surfaces of photosensitive chips of a plurality of cameras by utilizing a beam splitter prism and a polarizing device; secondly, different areas on the target surface of a photosensitive chip are simultaneously acquired with interference patterns with different phase shift quantities by using a grating or other light splitting elements and polarizing devices; and thirdly, by utilizing a polarization phase shift array device, taking four pixels as a unit on the target surface of a photosensitive chip of one camera, enabling the pixels at different positions to have a specific phase shift period, forming a phase shift interference pattern by an acquired image in a separation and interpolation mode, and obtaining phase distribution through a phase shift phase recovery algorithm to realize dynamic phase measurement.
The above methods can realize the dynamic phase measurement of spatial domain simultaneous phase shift, but have the following problems:
firstly, a plurality of image sensor systems need to ensure that a plurality of cameras synchronously acquire images, and the measurement results are greatly influenced by the inconsistent photoelectric properties and different spatial relative positions of a plurality of CCDs;
secondly, the simultaneous acquisition of a plurality of phase-shift interferograms in different areas of a single CCD target surface is limited by various conditions, for example, the diffraction direction of a grating is influenced by the wavelength, so that the method can only be applied to single-wavelength measurement but cannot be used for measuring white light or narrow-band light, the spatial resolution is insufficient, a special image sensor is required, and the like;
thirdly, the pixel mask element is expensive to manufacture, and thus, the wide commercial application is difficult to realize.
Disclosure of Invention
The invention provides a double-channel simultaneous phase shift interference microscope system aiming at the problems in the background technology, which reduces the cost and the technical difficulty, has the time domain phase shift function on the basis of having the space domain simultaneous phase shift function, can realize the time domain phase shift phase measurement, and can also correct the measurement system.
In order to achieve the above object, the present invention provides a dual-channel simultaneous phase-shifting interference microscopy system, at least comprising: the device comprises a light splitting unit, a reference light path unit, a measuring light path unit, a beam combining unit and an image acquisition unit; wherein,
the light splitting unit is used for splitting incident light waves into measuring beams and reference beams, wherein the transmission directions of the measuring beams and the reference beams are mutually vertical, and the polarization planes of the measuring beams and the reference beams are mutually orthogonal;
the reference light path unit is used for transmitting the reference light beam and performing spatial phase shift on the reference light beam;
the measuring light path unit is used for transmitting the measuring light beam, performing space domain phase shift on the measuring light beam, and generating an object light beam after the measuring light beam passes through an object to be measured;
the beam combination unit is used for combining the reference beam and the object beam after the space phase shift;
and the image acquisition unit is used for splitting the combined light beam and acquiring two phase-shift interference fringe patterns on two channels.
Preferably, the system further comprises: and the light source unit is used for generating plane light waves with uniform light intensity distribution and transmitting the plane light waves to the light splitting unit.
Preferably, the light source unit includes: the device comprises a light source generator, a polarization attenuator and a light beam expanding and collimating assembly, wherein the light source generator generates linearly polarized light waves, the linearly polarized light waves are attenuated by the polarization attenuator and the polarization direction of the light waves is rotated, and planar light waves with uniform light intensity distribution are formed by the linearly polarized light waves through the beam expanding and collimating assembly.
Preferably, the reference light path unit may be sequentially configured to: the reference beam forms a reference beam of circularly polarized light after being reflected by the first 1/4 wave plate and the first reflector;
the measuring light path unit is arranged as follows: the device comprises a first 1/2 wave plate, a second reflector and an imaging objective lens, wherein an object to be measured is arranged at the front end of the imaging objective lens, measuring light beams form linearly polarized light with a certain included angle with the horizontal direction through the first 1/2 wave plate, the linearly polarized light irradiates the surface of the object to be measured through the second reflector, and object light waves are formed through the imaging objective lens after the linearly polarized light transmits through the object to be measured.
Preferably, the reference optical path unit may be further configured to, in sequence: the reference light beam forms a circularly polarized reference light beam after being reflected by the second 1/2 wave plate, the first 1/4 wave plate and the first reflector;
the measuring light path unit is arranged as follows: the device comprises a first 1/2 wave plate, a second reflector and an imaging objective lens, wherein an object to be measured is arranged at the front end of the imaging objective lens, measuring light beams form linearly polarized light with a certain included angle with the horizontal direction through the first 1/2 wave plate, the linearly polarized light irradiates the surface of the object to be measured through the second reflector, and object light waves are formed through the imaging objective lens after the linearly polarized light transmits through the object to be measured.
Preferably, the reference optical path unit may be further configured to, in sequence: the device comprises a first 1/4 wave plate, a second 1/2 wave plate and a first reflector, wherein a reference beam forms a reference beam of circularly polarized light after being reflected by the first 1/4 wave plate, the second 1/2 wave plate and the first reflector;
the measuring light path unit is arranged as follows: the device comprises a first 1/2 wave plate, a second reflector and an imaging objective lens, wherein an object to be measured is arranged at the front end of the imaging objective lens, measuring light beams form linearly polarized light with a certain included angle with the horizontal direction through the first 1/2 wave plate, the linearly polarized light irradiates the surface of the object to be measured through the second reflector, and object light waves are formed through the imaging objective lens after the linearly polarized light transmits through the object to be measured.
Preferably, the image acquisition unit includes: the combined light beam is split by the polarization beam splitter prism to obtain two paths of light beams which are perpendicular to each other, and two phase-shift interference fringe patterns are acquired and obtained on two channels of the first photoelectric image sensor and the second photoelectric image sensor.
Preferably, the mirror is replaced by a piezoelectric ceramic to temporally phase shift the reference beam.
Preferably, said certain angle is 45 °.
Preferably, after the combined light beam is split by the polarization splitting prism to obtain two paths of light beams perpendicular to each other, the size of the light beam is matched with the sizes of the photosensitive surfaces of the first photoelectric image sensor and the first photoelectric image sensor.
The invention provides a double-channel simultaneous phase shift interference microscope system, which has the following beneficial effects:
(1) the invention is a space-time mixed phase-shifting double-channel interference microscope system, combines a two-step phase-shifting algorithm, can realize static and dynamic phase measurement, and greatly reduces the cost and the technical difficulty compared with other airspace phase-shifting technologies;
(2) the interference microscope system disclosed by the patent of the invention has the time domain phase shift function on the basis of having the space domain simultaneous phase shift function, can realize time domain phase shift phase measurement (the reflector is changed into PZT on a reference light path), and can also correct the measurement system;
(3) compared with other systems, the invention is simpler, has lower difficulty in matching the space positions of the two CCDs, and has higher light energy utilization rate of the system.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
FIG. 1 is a block diagram of a two-channel simultaneous phase-shifting interference microscopy system according to a first preferred embodiment of the present invention;
FIG. 2 is a block diagram of a light source unit according to a first preferred embodiment of the present invention;
FIG. 3 is a block diagram of a reference optical path unit according to a first preferred embodiment of the present invention;
FIG. 4 is a block diagram of a measuring optical path unit according to a first preferred embodiment of the present invention;
FIG. 5 is a block diagram of an image capturing unit according to a first preferred embodiment of the present invention;
FIG. 6 is a block diagram of the overall detailed structure of a dual-channel simultaneous phase-shifting interference microscopy system according to a first preferred embodiment of the present invention;
FIG. 7 is a block diagram of a reference optical path unit according to a second preferred embodiment of the present invention;
FIG. 8 is a block diagram of a reference optical path unit according to a third preferred embodiment of the present invention;
description of the symbols:
1-a light source unit; 2-a light splitting unit; 3-a reference light path unit; 4-a measurement light path unit; 5-a beam combining unit; 6-an image acquisition unit; 101-a light source generator; 102-a polarization attenuator; 103-a beam expanding and collimating assembly; 301-a first 1/4 waveplate; 302-a first mirror; 303-second 1/2 wave plate; 401-a first 1/2 waveplate; 402-a second mirror; 403-an imaging objective lens; 601-a polarization beam splitter prism; 602-a first monochrome black and white image sensor; 603-a second monochrome black and white image sensor;
the implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that, if directional indications (such as up, down, left, right, front, and back … …) are involved in the embodiment of the present invention, the directional indications are only used to explain the relative positional relationship between the components, the movement situation, and the like in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indications are changed accordingly.
In addition, if there is a description of "first", "second", etc. in an embodiment of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, technical solutions between various embodiments may be combined with each other, but must be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.
The invention provides a double-channel simultaneous phase shift interference microscope system;
in a first preferred embodiment of the present invention, as shown in fig. 1, the present invention comprises: the device comprises a light source unit 1, a light splitting unit 2, a reference light path unit 3, a measurement light path unit 4, a beam combining unit 5 and an image acquisition unit 6; the light source unit 1 is used for generating a planar light wave with uniform light intensity distribution and transmitting the planar light wave to the light splitting unit 2; the light splitting unit 2 is used for splitting incident light waves into measuring beams and reference beams, wherein the transmission directions of the measuring beams and the reference beams are mutually vertical, and the polarization planes of the measuring beams and the reference beams are mutually orthogonal; the reference light path unit 3 is used for transmitting the reference light beam and performing spatial phase shift on the reference light beam; the measuring light path unit 4 is used for transmitting the measuring light beam, performing space domain phase shift on the measuring light beam, and generating an object light beam after the measuring light beam passes through an object to be measured; the beam combination unit 5 is used for combining the reference beam and the object beam after the spatial phase shift; the image acquisition unit 6 is used for splitting the combined light beam and acquiring two interferograms with the phase shift amount pi/2 on two channels.
In the embodiment of the present invention, as shown in fig. 2, the light source unit 1 includes: the interferometer comprises a light source generator 101 (a laser), a polarization attenuator 102 and a beam expanding collimation assembly 103, wherein the light source generator 101 generates linear polarization laser light waves, namely, measurement light waves of the interferometer are provided, the polarization attenuator 102 can be used for adjusting the total light intensity of the measurement light waves and the light intensity ratio of reference light and the measurement light, the linear polarization light waves are attenuated by the polarization attenuator 102 and the polarization direction of the rotation light waves, and planar light waves with uniform light intensity distribution are formed after passing through the beam expanding collimation assembly 103;
in the embodiment of the invention, the light splitting unit 2 adopts a first polarization light splitting prism to split an incident light beam into a measuring light beam and a reference light beam, wherein the transmission directions of the measuring light beam and the reference light beam are mutually vertical, the polarization planes of the measuring light beam and the reference light beam are mutually orthogonal, the light beam in the vertical incidence direction is used as the reference light beam, namely, the polarization component in the x direction is transmitted to the reference plane direction, and the light beam in the horizontal incidence direction (the polarization component in the y direction;
in the embodiment of the present invention, the spatial coordinate system in the light beam transmission process is defined as: the direction of the light beam transmitted along the optical axis of the system is the z direction, the x direction is vertical to the incident surface and the z direction, the y direction is parallel to the incident surface and vertical to the z direction, and the three directions of x, y and z form a right-hand coordinate system;
in the embodiment of the present invention, as shown in fig. 3, the reference optical path unit 3 is sequentially configured as follows: the device comprises a first 1/4 wave plate 301 and a first reflector 302, wherein an included angle between the fast axis direction of the first 1/4 wave plate and the horizontal direction is 45 degrees, a reference beam passes through the first 1/4 wave plate 301, so that P light becomes a circularly polarized light beam, and the circularly polarized light beam is reflected by the first reflector 302 to form a circularly polarized reference beam;
in the embodiment of the present invention, the first mirror 302 may be replaced by piezoelectric ceramics (PZT) as a phase shift device of the time domain phase shift unit, so as to implement the time domain phase shift function of the system.
In the embodiment of the present invention, as shown in fig. 4, the measurement optical path unit 4 is configured to: the measuring device comprises a first 1/2 wave plate 401, a second reflecting mirror 402 and an imaging objective lens 403, wherein an included angle between the fast axis direction of the first 1/2 wave plate 401 and the horizontal direction is 22.5 degrees, an object to be measured (a test object is placed and fixed through an object stage) is arranged at the front end of the imaging objective lens 403, measuring light beams pass through the first 1/2 wave plate 401 to enable S light to be changed into a linearly polarized light beam with an included angle of 45 degrees with the horizontal direction, the linearly polarized light beam irradiates the surface of the object to be measured through the second reflecting mirror 402, and the linearly polarized light beam forms object light waves through the imaging objective lens 403; the imaging objective lens 403 is used for making the diffracted object light modulated and transmitted from the object to be measured 9 form a clear image on the image sensor;
in the embodiment of the invention, the beam combination unit 5 adopts a non-polarization beam splitting prism to enable the measuring beam and the reference beam to propagate in the same direction again;
in the embodiment of the present invention, as shown in fig. 5, the image capturing unit 6 includes: the combined light beam is split by the polarization beam splitter prism to obtain two paths of light beams which are perpendicular to each other, the size of the light beam is matched with the size of photosensitive surfaces of the first photoelectric image sensor 602 and the second photoelectric image sensor 603, so that P light and S light in the two paths of light respectively form interference light fields, and two phase-shift interference fringe patterns with the phase shift of 90 degrees can be simultaneously obtained on two channels through the respective acquisition and recording of the first photoelectric image sensor 602 and the second photoelectric image sensor 603.
In the embodiment of the invention, PZT is used as a phase shift device, two groups of interferograms can be collected in two channels at the same time, background phases of the two channels are respectively calculated by using an AIA algorithm, and the phase shift amount between the two channels is 1.5915 by subtracting;
in the embodiment of the invention, the derivation process of the system Jones matrix is as follows:
because the polarization attenuator has no influence on the final polarization state of the system, the laser penetrating through the polarization attenuator is set as follows:
wherein a and b are the components of the laser light in the horizontal and vertical directions, respectively;
in the embodiment of the invention, the jones matrix of the 1/2 wave plate is as follows:
wherein, α1An included angle between the fast axis direction of 1/2 wave plate and the horizontal direction, α in this embodiment1＝22.5°；
In the embodiment of the invention, the jones matrix of the 1/4 wave plate is as follows:
α is an angle between the fast axis direction of the 1/4 wave plate and the horizontal direction, and α is equal to 45 ° in this embodiment;
phase of the object isSpecular reflectionThe transmitted light of the PBS is recorded asThe reflected light is recorded as
This process can be represented by the jones matrix:
the light transmitted through BS1 is:
the light obtained on the first photo-image sensor CCD after passing through PBS2 is:
similarly, the light obtained on the second photoelectric image sensor CCD is:
in summary, the overall schematic diagram of the system is shown in fig. 6, and the spatial coordinate system during the transmission of the light beam is defined as: the direction of the light beam transmitted along the optical axis of the system is the z direction, the x direction is vertical to the incident surface and the z direction, the y direction is parallel to the incident surface and vertical to the z direction, and the three directions of x, y and z form a right-hand coordinate system; the invention provides a dual-channel interference microscope system which is based on orthogonal polarized light modulation and has the functions of spatial domain simultaneous phase shift and time domain phase shift; the system is simple, feasible and easy to operate, and is suitable for various phase demodulation algorithms. The invention uses a polarization beam splitter prism to separate measurement light and reference light, uses a lateral reflecting surface as a reference surface, adds 1/4 wave plates into the reference light to form circularly polarized light, adds 1/2 wave plates into the test light to form linearly polarized light with an included angle of 45 degrees with the horizontal direction, and the linearly polarized light is combined by a non-polarization beam splitter prism and split by the polarization beam splitter prism, and finally two interference patterns with the phase shift amount of pi/2 are recorded by two photoelectric image sensors at the same time.
In a second preferred embodiment of the present invention, as shown in fig. 1, it comprises: the device comprises a light source unit 1, a light splitting unit 2, a reference light path unit 3, a measurement light path unit 4, a beam combining unit 5 and an image acquisition unit 6; the light source unit 1 is used for generating a planar light wave with uniform light intensity distribution and transmitting the planar light wave to the light splitting unit 2; the light splitting unit 2 is used for splitting incident light waves into measuring beams and reference beams, wherein the transmission directions of the measuring beams and the reference beams are mutually vertical, and the polarization planes of the measuring beams and the reference beams are mutually orthogonal; the reference light path unit 3 is used for transmitting the reference light beam and performing spatial phase shift on the reference light beam; the measuring light path unit 4 is used for transmitting the measuring light beam, performing space domain phase shift on the measuring light beam, and generating an object light beam after the measuring light beam passes through an object to be measured; the beam combination unit 5 is used for combining the reference beam and the object beam after the spatial phase shift; the image acquisition unit 6 is used for splitting the combined light beam and acquiring two interferograms with the phase shift amount pi/2 on two channels.
In the embodiment of the present invention, as shown in fig. 2, the light source unit 1 includes: the interferometer comprises a light source generator 101, a polarization attenuator 102 and a light beam expanding and collimating assembly 103, wherein the light source generator 101 generates linearly polarized light waves, namely, measurement light waves of the interferometer are provided, the polarization attenuator 102 can be used for adjusting the total light intensity of the test light waves and the light intensity ratio of reference light to test light, the linearly polarized light waves are attenuated by the polarization attenuator 102 and the polarization direction of the light waves is rotated, and planar light waves with uniform light intensity distribution are formed after passing through the beam expanding and collimating assembly 103;
in the embodiment of the invention, the light splitting unit 2 adopts a first polarization light splitting prism to split an incident light beam into a measuring light beam and a reference light beam, wherein the transmission directions of the measuring light beam and the reference light beam are mutually vertical, the polarization planes of the measuring light beam and the reference light beam are mutually orthogonal, the light beam in the vertical incidence direction is used as the reference light beam, namely, the polarization component in the x direction is transmitted to the reference plane direction, and the light beam in the horizontal incidence direction (the polarization component in the y direction;
in the embodiment of the present invention, the spatial coordinate system in the light beam transmission process is defined as: the direction of the light beam transmitted along the optical axis of the system is the z direction, the x direction is vertical to the incident surface and the z direction, the y direction is parallel to the incident surface and vertical to the z direction, and the three directions of x, y and z form a right-hand coordinate system.
In the embodiment of the present invention, as shown in fig. 7, the reference optical path unit 3 may further be sequentially configured as follows: the second 1/2 wave plate 303, the first 1/4 wave plate 301 and the first reflector 302, the second 1/2 wave plate 303 has an included angle of 22.5 degrees between the fast axis direction and the horizontal direction, and the first 1/4 wave plate 301 has an included angle of 0 degree or 90 degrees between the fast axis direction and the horizontal direction; the reference beam passes through the second 1/2 wave plate 303 and the first 1/4 wave plate 301, so that the P light becomes a circularly polarized light, and the circularly polarized light reference beam is formed after the P light is reflected by the first reflecting mirror 302;
in the embodiment of the present invention, the first mirror 302 may be replaced by piezoelectric ceramics (PZT) as a phase shift device of the time domain phase shift unit, so as to implement the time domain phase shift function of the system.
In the embodiment of the present invention, as shown in fig. 4, the measurement optical path unit 4 is configured to: the measuring device comprises a first 1/2 wave plate 401, a second reflector 402 and an imaging objective lens 403, wherein an included angle between the fast axis direction of the first 1/2 wave plate 401 and the horizontal direction is 22.5 degrees, an object to be measured is arranged at the front end of the imaging objective lens 403, measuring light beams pass through the first 1/2 wave plate 401 to enable S light to become a linear polarized light beam with an included angle of 45 degrees with the horizontal direction, the linear polarized light beam irradiates the surface of the object to be measured through the second reflector 402, and the linear polarized light beam forms object light waves through the imaging objective lens 403 after transmitting the object to be; the imaging objective lens 403 is used for making the diffracted object light modulated and transmitted from the object to be measured 9 form a clear image on the image sensor;
in the embodiment of the present invention, the beam combining unit 5 combines the light beams by using a non-polarization beam splitting prism;
in an embodiment of the present invention, the image capturing unit 6 includes: the combined light beam is split by the polarization beam splitter prism to obtain two paths of light beams which are perpendicular to each other, the size of the light beam is matched with the size of photosensitive surfaces of the first photoelectric image sensor 602 and the second photoelectric image sensor 603, so that P light and S light in the two paths of light respectively form interference light fields, and two phase-shift interference fringe patterns with the phase shift of 90 degrees can be simultaneously obtained on two channels through the respective acquisition and recording of the first photoelectric image sensor 602 and the second photoelectric image sensor 603.
In the embodiment of the present invention, the derivation process of the calculation of the light wave has been described in the first preferred embodiment, and will not be repeated here;
in a third preferred embodiment of the present invention, as shown in fig. 1, comprises: the device comprises a light source unit 1, a light splitting unit 2, a reference light path unit 3, a measurement light path unit 4, a beam combining unit 5 and an image acquisition unit 6; the light source unit 1 is used for generating a planar light wave with uniform light intensity distribution and transmitting the planar light wave to the light splitting unit 2; the light splitting unit 2 is used for splitting incident light waves into measuring beams and reference beams, wherein the transmission directions of the measuring beams and the reference beams are mutually vertical, and the polarization planes of the measuring beams and the reference beams are mutually orthogonal; the reference light path unit 3 is used for transmitting the reference light beam and performing spatial phase shift on the reference light beam; the measuring light path unit 4 is used for transmitting the measuring light beam, performing space domain phase shift on the measuring light beam, and generating an object light beam after the measuring light beam passes through an object to be measured; the beam combination unit 5 is used for combining the reference beam and the object beam after the spatial phase shift; the image acquisition unit 6 is used for splitting the combined light beam and acquiring two interferograms with the phase shift amount pi/2 on two channels.
In the embodiment of the present invention, as shown in fig. 2, the light source unit 1 includes: the interferometer comprises a light source generator 101, a polarization attenuator 102 and a light beam expanding and collimating assembly 103, wherein the light source generator 101 generates linearly polarized light waves, namely, measurement light waves of the interferometer are provided, the polarization attenuator 102 can be used for adjusting the total light intensity of the test light waves and the light intensity ratio of reference light to test light, the linearly polarized light waves are attenuated by the polarization attenuator 102 and the polarization direction of the light waves is rotated, and planar light waves with uniform light intensity distribution are formed after passing through the beam expanding and collimating assembly 103;
in the embodiment of the invention, the light splitting unit 2 adopts a first polarization light splitting prism to split an incident light beam into a measuring light beam and a reference light beam, wherein the transmission directions of the measuring light beam and the reference light beam are mutually vertical, the polarization planes of the measuring light beam and the reference light beam are mutually orthogonal, the light beam in the vertical incidence direction is used as the reference light beam, namely, the polarization component in the x direction is transmitted to the reference plane direction, and the light beam in the horizontal incidence direction (the polarization component in the y direction;
in the embodiment of the present invention, the spatial coordinate system in the light beam transmission process is defined as: the direction of the light beam transmitted along the optical axis of the system is the z direction, the x direction is vertical to the incident surface and the z direction, the y direction is parallel to the incident surface and vertical to the z direction, and the three directions of x, y and z form a right-hand coordinate system.
In the embodiment of the present invention, as shown in fig. 8, the reference optical path unit 3 may further be sequentially configured as follows: the device comprises a first 1/4 wave plate 301, a second 1/2 wave plate 303 and a first reflector 302, wherein an included angle between the fast axis direction of the first 1/4 wave plate 301 and the horizontal direction is 45 degrees, an included angle between the fast axis direction of the second 1/2 wave plate 303 and the horizontal direction is 45 degrees, a reference light beam passes through the first 1/4 wave plate 301 and the second 1/2 wave plate 303, so that the P light becomes a circularly polarized light beam, and the circularly polarized light beam is formed after being reflected by the first reflector 302;
in the embodiment of the present invention, the first mirror 302 may be replaced by piezoelectric ceramics (PZT) as a phase shift device of the time domain phase shift unit, so as to implement the time domain phase shift function of the system.
In the embodiment of the present invention, as shown in fig. 4, the measurement optical path unit 4 is configured to: the measuring device comprises a first 1/2 wave plate 401, a second reflector 402 and an imaging objective lens 403, wherein an included angle between the fast axis direction of the first 1/2 wave plate 401 and the horizontal direction is 22.5 degrees, an object to be measured is arranged at the front end of the imaging objective lens 403, measuring light beams pass through the first 1/2 wave plate 401 to enable S light to become a linear polarized light beam with an included angle of 45 degrees with the horizontal direction, the linear polarized light beam irradiates the surface of the object to be measured through the second reflector 402, and the linear polarized light beam forms object light waves through the imaging objective lens 403 after transmitting the object to be; the imaging objective lens 403 is used for making the diffracted object light modulated and transmitted from the object to be measured 9 form a clear image on the image sensor;
in the embodiment of the present invention, the beam combining unit 5 combines the light beams by using a non-polarization beam splitting prism;
in an embodiment of the present invention, the image capturing unit 6 includes: the combined light beam is split by the polarization beam splitter prism to obtain two paths of light beams which are perpendicular to each other, the size of the light beam is matched with the size of photosensitive surfaces of the first photoelectric image sensor 602 and the second photoelectric image sensor 603, so that P light and S light in the two paths of light respectively form interference light fields, and two phase-shift interference fringe patterns with the phase shift of 90 degrees can be simultaneously obtained on two channels through the respective acquisition and recording of the first photoelectric image sensor 602 and the second photoelectric image sensor 603.
In the embodiment of the present invention, the derivation process of the calculation of the light wave has been described in the first preferred embodiment, and will not be repeated here;
the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, and all modifications and equivalents of the present invention, which are made by the contents of the present specification and the accompanying drawings, or directly/indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (10)
1. A dual channel simultaneous phase-shifting interference microscopy system, comprising at least: the device comprises a light splitting unit, a reference light path unit, a measuring light path unit, a beam combining unit and an image acquisition unit; wherein,
the light splitting unit is used for splitting incident light waves into measuring beams and reference beams, wherein the transmission directions of the measuring beams and the reference beams are mutually vertical, and the polarization planes of the measuring beams and the reference beams are mutually orthogonal;
the reference light path unit is used for transmitting the reference light beam and performing spatial phase shift on the reference light beam;
the measuring light path unit is used for transmitting the measuring light beam, performing space domain phase shift on the measuring light beam, and generating an object light beam after the measuring light beam passes through an object to be measured;
the beam combination unit is used for combining the reference beam and the object beam after the space phase shift;
and the image acquisition unit is used for splitting the combined light beam and acquiring two phase-shift interference fringe patterns on two channels.
2. The dual channel simultaneous phase shifting interference microscopy system of claim 1, further comprising: and the light source unit is used for generating plane light waves with uniform light intensity distribution and transmitting the plane light waves to the light splitting unit.
3. The dual-channel simultaneous phase-shifting interference microscopy system as claimed in claim 2, wherein the light source unit comprises: a light source generator, a polarization attenuator and a beam expanding and collimating assembly, wherein,
the light source generator generates linearly polarized light waves, the linearly polarized light waves are attenuated by the polarization attenuator and the polarization direction of the light waves is rotated, and planar light waves with uniform light intensity distribution are formed after the linearly polarized light waves pass through the beam expanding collimation assembly.
4. The dual-channel simultaneous phase-shifting interference microscopy system of claim 1,
the reference light path unit can be sequentially arranged as follows: the reference beam forms a reference beam of circularly polarized light after being reflected by the first 1/4 wave plate and the first reflector;
the measuring light path unit is arranged as follows: the device comprises a first 1/2 wave plate, a second reflector and an imaging objective lens, wherein an object to be measured is arranged at the front end of the imaging objective lens, measuring light beams form linearly polarized light with a certain included angle with the horizontal direction through the first 1/2 wave plate, the linearly polarized light irradiates the surface of the object to be measured through the second reflector, and object light waves are formed through the imaging objective lens after the linearly polarized light transmits through the object to be measured.
5. The dual-channel simultaneous phase-shifting interference microscopy system of claim 1,
the reference light path unit can be further sequentially set as follows: the reference light beam forms a circularly polarized reference light beam after being reflected by the second 1/2 wave plate, the first 1/4 wave plate and the first reflector;
the measuring light path unit is arranged as follows: the device comprises a first 1/2 wave plate, a second reflector and an imaging objective lens, wherein an object to be measured is arranged at the front end of the imaging objective lens, measuring light beams form linearly polarized light with a certain included angle with the horizontal direction through the first 1/2 wave plate, the linearly polarized light irradiates the surface of the object to be measured through the second reflector, and object light waves are formed through the imaging objective lens after the linearly polarized light transmits through the object to be measured.
6. The dual-channel simultaneous phase-shifting interference microscopy system of claim 1,
the reference light path unit can be further sequentially set as follows: the device comprises a first 1/4 wave plate, a second 1/2 wave plate and a first reflector, wherein a reference beam forms a reference beam of circularly polarized light after being reflected by the first 1/4 wave plate, the second 1/2 wave plate and the first reflector;
the measuring light path unit is arranged as follows: the device comprises a first 1/2 wave plate, a second reflector and an imaging objective lens, wherein an object to be measured is arranged at the front end of the imaging objective lens, measuring light beams form linearly polarized light with a certain included angle with the horizontal direction through the first 1/2 wave plate, the linearly polarized light irradiates the surface of the object to be measured through the second reflector, and object light waves are formed through the imaging objective lens after the linearly polarized light transmits through the object to be measured.
7. The dual channel simultaneous phase shifting interference microscopy system of claim 1, wherein the image acquisition unit comprises: the combined light beam is split by the polarization beam splitter prism to obtain two paths of light beams which are perpendicular to each other, and two phase-shift interference fringe patterns are acquired and obtained on two channels of the first photoelectric image sensor and the second photoelectric image sensor.
8. The dual channel simultaneous phase-shifting interference microscopy system as claimed in claim 4 or claim 5 or claim 6 wherein the mirror is replaced with a piezo-ceramic to temporally phase shift the reference beam.
9. The dual channel simultaneous phase shifting interference microscopy system as claimed in claim 4 or claim 5 or claim 6 wherein the certain angle is 45 °.
10. The dual-channel simultaneous phase-shifting interference microscope system as claimed in claim 7, wherein the combined beam is split by the polarization splitting prism to obtain two beams perpendicular to each other, and the size of the beam is matched with the size of the photosensitive surfaces of the first photoelectric image sensor and the first photoelectric image sensor.
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