CN109443248A - Total optical path trailing type high-precision three-dimensional angle measurement method and device based on grating - Google Patents
Total optical path trailing type high-precision three-dimensional angle measurement method and device based on grating Download PDFInfo
- Publication number
- CN109443248A CN109443248A CN201811479495.5A CN201811479495A CN109443248A CN 109443248 A CN109443248 A CN 109443248A CN 201811479495 A CN201811479495 A CN 201811479495A CN 109443248 A CN109443248 A CN 109443248A
- Authority
- CN
- China
- Prior art keywords
- grating
- dimensional plane
- photodetector
- dimensional
- light beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Total optical path trailing type high-precision three-dimensional angle measurement method and device based on grating belong to precision instrument manufacture and precision measurement field of measuring techniques；The present invention is using one-dimensional plane reflecting grating as Sensitive Apparatus, realize the three-dimensional perspective variable quantity measurement of Sensitive Apparatus, using one-dimensional plane transmission grating and polarization spectro microscope group as compensation mechanism, the measurement accuracy and measurement stability of angle are improved by total optical path compensation, while the measurement range of rotation angle is improved using trailing type compensation way；Method and apparatus of the invention increases the measurement range of rotation angle, methodological science is reasonable, and apparatus structure is compact while realizing three-dimensional perspective high-precision, high stability measurement.
Description
Technical field
The invention belongs to precision instrument manufacture and precision measurement field of measuring techniques, relate generally to a kind of being total to based on grating
Optical path trailing type high-precision three-dimensional angle measurement method and device.
Background technique
With high-end manufacturing continuous development, precision manufactureing processing technology and Technology Precision are proposed more
Carry out higher requirement.Important component of the high-precision three-dimensional angle measurement as high-acruracy survey, is widely used in and leads
The calibration of the attitude monitoring of rail movement, the surface profile measurement of object, precision instrument is calibrated, the geometry deformation of heavy construction measures
Equal fields, therefore small angle measurement instrument is that precision manufactureing, Precision Machining, metrology and measurement, aerospace and scientific research field must
Standby conventional instrument.
Based on the small angle measurement of optical measuring method due to the advantages that its is non-contact, precision is high, operating distance is big, many
Person and R&D institution conduct in-depth research optics small angle measurement.Currently used optics angle-measuring method mainly has following
It is several:
(Deng Lixin, Yang Jiankun, Dai Suian wait Moire fringe skill to measurement method based on auto-collimation in conjunction with Moire fringe
Three-dimensional angle-measuring method research [J] the optics and photoelectric technology of art, 2010,08 (3): 39-41.).This method combines auto-collimation
Angle measuring principle and Moire fringe angle measuring principle utilize More using the deflection angle and pitch angle of auto-collimation principle measurement reflecting mirror
Striped angle measuring principle measures rotation angle.Although this method may be implemented to realize that three-dimensional perspective measures simultaneously, but in order to realize rotation
The focal length of the measurement of corner, collimation lens cannot be excessive, therefore limits the measurement resolution of deflection angle and pitch angle, and
The spot size that CCD is obtained is larger, limits the measurement range of deflection angle and pitch angle, in addition as operating distance increases, light
Beam energy diverging, the contrast decline of striped, therefore operating distance is limited.
Auto-collimation combines method with light distortion principle.Such as: the Chinese patent of Patent No. CN103925890A is public
A kind of " a kind of three-dimensional perspective measuring system based on beam aberration " is opened.This method is using auto-collimation principle according to CCD detection
The facula position of device can measure deflection angle and pitch angle；Light beam is distorted by cylindrical lens and special tetrahedron reflecting mirror,
Rotation angle can be measured according to the change of the light spot shape of ccd detector.This method by the deformation for measuring image due to being surveyed
Rotation angle is measured, therefore can be very high to the optical performance requirements of system.Therefore machining accuracy and the installation accuracy limit of optical device
The measurement accuracy of system is made, for the existing aberration of simultaneity factor but also imaging is not perfect, systematic measurement error is larger.
Based on more Interferometer angle measurement methods (Li X, Ito S, Gao W.Measurement of six-degree-of-
freedom planar motions by using a multiprobe surface encoder[J].Optical
Engineering,2014,53(12):122405.).This method is using the optical path difference of different light beams at a distance from corresponding light beam
The deflection angle and pitch angle of ratio measurement target drone；By measure the alternate position spike of the vertical direction of different light beams in photodetector with
The ratio of corresponding light distance between clusters measures rotation angle.The measuring system is related to multiple interferometers, system complex, and measurement is easy
By environmental disturbances, it is poor to measure stability.
Based on reflecting grating Auto-collimation angular measurement method (Gao W, Saito Y, Muto H, et al.A three-axis
autocollimator for detection of angular error motions of a precision stage
[J].CIRP Annals-Manufacturing Technology,2011,60(1):515-518.).This method passes through measurement
The zero level of reflecting grating, positive and negative first-order diffraction direction of beam propagation are measured with the variable quantity that reflecting grating three-dimensional perspective changes
The angle change value of grating.Three-dimensional perspective measurement may be implemented in this method, but this method can not eliminate the angle drift of light source
And influence of the environment to angle measurement, simultaneously because the presence of the angle of diffraction makes this method be not suitable for long reach measurement,
And its measurement range mutually restricts due to measuring principle between pitch angle and rotation angle.
Summary of the invention
The object of the invention is in order to overcome the shortcomings of in above-mentioned existing method and device, to realize and reaching high-precision
The purpose of three-dimensional perspective measurement, proposes a kind of total optical path trailing type high-precision three-dimensional angle measurement method based on grating and dress
It sets.
The object of the present invention is achieved like this: the total optical path trailing type high-precision three-dimensional angle measurement method based on grating
The following steps are included:
1., the light beam that laser light source issues formed collimated light beam and is emitted after collimator objective；
2., 1. described in collimated light beam after one-dimensional plane transmission grating, generate positive first-order diffraction light beam, negative one grade is spread out
Irradiating light beam and Zero-order diffractive light beam；
3., 2. described in positive first-order diffraction light beam, negative one grade diffracted beam by one group of diagonal line it is orthogonal partially
One group of outgoing beam parallel with positive first-order diffraction light beam, negative one grade diffracted beam is obtained after vibration light splitting microscope group；
4., 3. described in the outgoing beam parallel with positive first-order diffraction light beam, negative one grade diffracted beam again pass by
After penetrating grating, one group of diffracted beam parallel with optical axis is obtained；
5., 2. described in Zero-order diffractive light beam impinged perpendicularly on after quarter wave plate one-dimensional plane reflecting grating generation
Positive first-order diffraction light beam, negative one grade diffracted beam, the positive first-order diffraction light beam first-order diffraction light beam, negative one grade diffracted beam are incident
One-dimensional plane transmission grating described in 2. obtains one group of outgoing beam parallel with optical axis；
6., adjustment the distance between one-dimensional plane reflecting grating and one-dimensional plane transmission grating, make 4. described in one group
The diffracted beam parallel with optical axis is with 5. one group of outgoing beam parallel with optical axis respectively along total optic path, shape
At two groups of total optical path light beams；
7., 6. in obtained two groups total optical path light beams pass through polarization spectroscope respectively, obtain four tunnels light beam to be detected；
8., 7. in the four tunnels light beam to be detected that obtains form hot spot to be detected by lens focus, while being visited using photoelectricity
Survey the location information that device detects hot spot to be detected；
9., when three-dimensional perspective generation device generates three-dimensional perspective variation, phase occurs for one-dimensional plane reflecting grating to be measured
The three-dimensional perspective variation answered detects the change in location information of hot spot to be detected, the facula position variation of acquisition with photodetector
Information is sent into computer after handling by signal processing circuit, calculate and obtain the generation three-dimensional perspective change of one-dimensional plane reflecting grating
Change；
Deflection angle α, the pitch angle β and rotation angle γ of one-dimensional plane reflecting grating to be measured are obtained as follows respectively:
In formula: Δ dA-x、ΔdB-x、ΔdC-x、ΔdD-xRespectively photodetector A, photodetector B, photodetector
C, the facula position information variable quantity in the horizontal direction that photodetector D is detected in the two neighboring sampling period；ΔdA-y、
ΔdB-y、ΔdC-y、ΔdD-yRespectively photodetector A, photodetector B, photodetector C, photodetector D are adjacent
Variable quantity of the facula position information that two sampling periods are detected in vertical direction；F is condenser lens A, condenser lens B, gathers
The focal length of focus lens C and condenser lens D；Sin Ф is the wavelength of laser and the ratio of one-dimensional plane transmission grating grating constant
Value.
10., by piezoelectric ceramics control by one-dimensional plane transmission grating, polarization spectro microscope group and one-dimensional angle generation device
The rotation angle compensation mechanism of composition rotates a certain angle, which is to pass through the rotation of the one-dimensional plane reflecting grating 9. obtained
The rotation angle of corner information, rotation angle compensation mechanism is obtained by following formula:
The structure of total optical path trailing type high-precision three-dimensional angle measurement unit based on grating is: laser, collimation lens,
One-dimensional plane transmission grating is arranged successively along the direction of propagation light a；The one-dimensional plane transmission grating transmission plane and incident beam
Vertically；Polarization spectroscope A, polarization spectroscope B are placed on rear side of one-dimensional plane transmission grating, and polarization spectroscope A and polarization spectro
Mirror B diagonal line is mutually perpendicular to, and is 45 ° with laser optical axis angle；Positive first-order diffraction light beam c successively pass through polarization spectroscope A,
It is emitted after polarization spectroscope B, obtained outgoing beam g is parallel with positive first-order diffraction light beam c；Negative one grade diffracted beam d is successively passed through
It is emitted after crossing polarization spectroscope B, polarization spectroscope A, obtained outgoing beam h is parallel with negative one grade diffracted beam d；One-dimensional plane
The Zero-order diffractive light beam b that transmission grating generates impinges perpendicularly on one-dimensional plane reflecting grating by quarter wave plate, and diffraction generates just
First-order diffraction light beam e and negative one grade diffracted beam f are transmitted after polarization spectroscope A and polarization spectroscope B respectively, adjustment one
The distance between dimensional plane reflecting grating and one-dimensional plane transmission grating make positive first-order diffraction light beam e, negative one grade diffracted beam f
Light beam is total to optic path after polarization spectro microscope group with outgoing beam h, outgoing beam g respectively；Two groups of total optical path light beams pass through
Total optical path diffracted beam i, j optical path diffracted beam k, l together are generated after one-dimensional plane transmission grating；The optical path diffraction light altogether
Beam i, j after polarization spectroscope C light splitting the two-way light beam that generates respectively by after condenser lens A and condenser lens B focusing in coke
Plane forms hot spot to be measured；The two-way light beam difference that described optical path diffracted beam k, l altogether is generated after polarization spectroscope D light splitting
Hot spot to be measured is formed in focal plane after being focused by condenser lens C and condenser lens D；Photodetector A and photodetector B points
It is not installed in the focal plane of the condenser lens A, condenser lens B, photodetector C and photodetector D are pacified respectively
Mounted in the focal plane of the condenser lens C and condenser lens D；The photodetector A, photodetector B, photodetector
C, photodetector D is connected with computer respectively；Quarter wave plate, one-dimensional plane reflecting grating and three-dimensional perspective generation device rigidity
Connection；One-dimensional plane transmission grating, polarization spectroscope A, polarization spectroscope B and one-dimensional angle generation device are rigidly connected；It is described
One-dimensional plane transmission grating is identical as one-dimensional plane reflecting grating grating constant；
The laser, collimation lens, one-dimensional plane transmission grating, quarter wave plate, one-dimensional plane reflecting grating, three dimensional angular
Generation device, condenser lens B, condenser lens D, photodetector B, photodetector D, computer composition measuring beam is spent to obtain
And measuring system；
The laser, collimation lens, one-dimensional plane transmission grating, polarization spectroscope A, polarization spectroscope B, polarization spectro
Mirror C, polarization spectroscope D, photodetector A, photodetector C, condenser lens A, condenser lens C, computer form reference light
Beam acquisition, measurement and rotation angle compensation system.
The invention has the advantages that
(1), using one-dimensional plane reflecting grating as device under test, three-dimensional perspective measurement, measuring principle can be achieved at the same time
Simply, compact-sized.
(2), using total optical path measuring principle, light beam to be measured is divided into measuring beam and reference beam, and measuring beam direction becomes
Change amount include one-dimensional plane reflecting grating angle change value and beam propagation during and the angle that introduces surely of flashing float
Value, reference beam direction change amount include the angle drift value that during beam propagation and flashing introduces surely.By to measurement light
Beam and corresponding reference beam are analyzed, and the angle drift value that during beam propagation and flashing introduces surely can be eliminated
The influence for treating measuring angle obtains the angle change value of accurate reflecting grating, improve micro angle measurement measurement accuracy and
The stability of measurement for a long time.The device to become the standard with laser sending there are the diffracted beam of the angle of diffraction originally simultaneously
The parallel light beam of collimated optical beam increases operating distance, more conducively practical application while keeping probe unit more compact.
(3), using trailing type measurement method and closed-loop control and flexible mechanical deflection system, high-precision, height are being realized
While stability three-dimensional perspective measures, the measurement range of rotation angle is greatly improved, while eliminating rotation angle variation pair
The limitation of pitch angle measurement range.
Detailed description of the invention
Fig. 1 is the total optical path trailing type high-precision three-dimensional angle measurement unit structural schematic diagram based on grating
Fig. 2 is measuring beam measuring system schematic diagram
Fig. 3 is reference beam measuring system schematic diagram
In figure piece number illustrate: 1, laser 2, collimation lens 3, one-dimensional plane transmission grating 4, polarization spectroscope A 5,
Quarter wave plate 6, one-dimensional plane reflecting grating 7, three-dimensional perspective generation device 8, polarization spectroscope B 9, one-dimensional angle generate dress
Set 10, polarization spectroscope D 11, photodetector C 12, condenser lens C 13, condenser lens D 14, photodetector D 15,
Polarization spectroscope C 16, photodetector A 17,18 condenser lens B 19 of condenser lens A, photodetector B 20, computer
Specific embodiment
Specific embodiments of the present invention are described in detail with reference to the accompanying drawing.
Total optical path trailing type high-precision three-dimensional angle measurement method of the present invention based on grating the following steps are included:
1., the light beam that laser light source issues formed collimated light beam and is emitted after collimator objective；
2., 1. described in collimated light beam after one-dimensional plane transmission grating, generate positive first-order diffraction light beam, negative one grade is spread out
Irradiating light beam and Zero-order diffractive light beam；
3., 2. described in positive first-order diffraction light beam, negative one grade diffracted beam by one group of diagonal line it is orthogonal partially
One group of outgoing beam parallel with positive first-order diffraction light beam, negative one grade diffracted beam is obtained after vibration light splitting microscope group；
4., 3. described in the outgoing beam parallel with positive first-order diffraction light beam, negative one grade diffracted beam again pass by
After penetrating grating, one group of diffracted beam parallel with optical axis is obtained；
5., 2. described in Zero-order diffractive light beam impinged perpendicularly on after quarter wave plate one-dimensional plane reflecting grating generation
Positive first-order diffraction light beam, negative one grade diffracted beam, the positive first-order diffraction light beam first-order diffraction light beam, negative one grade diffracted beam are incident
One-dimensional plane transmission grating described in 2. obtains one group of outgoing beam parallel with optical axis；
6., adjustment the distance between one-dimensional plane reflecting grating and one-dimensional plane transmission grating, make 4. described in one group
The diffracted beam parallel with optical axis is with 5. one group of outgoing beam parallel with optical axis respectively along total optic path, shape
At two groups of total optical path light beams；
7., 6. in obtained two groups total optical path light beams pass through polarization spectroscope respectively, obtain four tunnels light beam to be detected；
8., 7. in the four tunnels light beam to be detected that obtains form hot spot to be detected by lens focus, while being visited using photoelectricity
Survey the location information that device detects hot spot to be detected；
9., when three-dimensional perspective generation device generates three-dimensional perspective variation, phase occurs for one-dimensional plane reflecting grating to be measured
The three-dimensional perspective variation answered detects the change in location information of hot spot to be detected, the facula position variation of acquisition with photodetector
Information is sent into computer after handling by signal processing circuit, calculate and obtain the generation three-dimensional perspective change of one-dimensional plane reflecting grating
Change；
Deflection angle α, the pitch angle β and rotation angle γ of one-dimensional plane reflecting grating to be measured are obtained as follows respectively:
In formula: Δ dA-x、ΔdB-x、ΔdC-x、ΔdD-xRespectively photodetector A, photodetector B, photodetector
C, the facula position information variable quantity in the horizontal direction that photodetector D is detected in the two neighboring sampling period；ΔdA-y、
ΔdB-y、ΔdC-y、ΔdD-yRespectively photodetector A, photodetector B, photodetector C, photodetector D are adjacent
Variable quantity of the facula position information that two sampling periods are detected in vertical direction；F is condenser lens A, condenser lens B, gathers
The focal length of focus lens C and condenser lens D；Sin Ф is the wavelength of laser and the ratio of one-dimensional plane transmission grating grating constant
Value.
10., by piezoelectric ceramics control by one-dimensional plane transmission grating, polarization spectro microscope group and one-dimensional angle generation device
The rotation angle compensation mechanism of composition rotates a certain angle, which is to pass through the rotation of the one-dimensional plane reflecting grating 9. obtained
The rotation angle of corner information, rotation angle compensation mechanism is obtained by following formula:
The structure of total optical path trailing type high-precision three-dimensional angle measurement unit based on grating is: laser 1, collimation lens
2, one-dimensional plane transmission grating 3 is arranged successively along the direction of propagation light a；3 transmission plane of one-dimensional plane transmission grating and incidence
Beam orthogonal；Polarization spectroscope A4, polarization spectroscope B8 are placed in the rear side of one-dimensional plane transmission grating 3, and polarization spectroscope A4 with
Polarization spectroscope B8 diagonal line is mutually perpendicular to, and is 45 ° with 1 optical axis included angle of laser；Positive first-order diffraction light beam c successively passes through
It is emitted after polarization spectroscope A4, polarization spectroscope B8, obtained outgoing beam g is parallel with positive first-order diffraction light beam c；Negative one grade
Diffracted beam d is successively emitted after polarization spectroscope B8, polarization spectroscope A4, obtained outgoing beam h and negative first-order diffraction
Light beam d is parallel；The Zero-order diffractive light beam b that one-dimensional plane transmission grating 3 generates impinges perpendicularly on one-dimensional plane by quarter wave plate 5
Reflecting grating 6, diffraction generate positive first-order diffraction light beam e and negative one grade diffracted beam f pass through respectively polarization spectroscope A4 and partially
It is transmitted after vibration spectroscope B8, adjustment the distance between one-dimensional plane reflecting grating 6 and one-dimensional plane transmission grating 3 make positive level-one
Light beam is total to light after polarization spectro microscope group with outgoing beam h, outgoing beam g respectively by diffracted beam e, negative one grade diffracted beam f
Road transmission；Two groups of total optical path light beams generate total optical path diffracted beam i, j optical path diffraction together after one-dimensional plane transmission grating 3
Light beam k, l；The two-way light beam that described optical path diffracted beam i, j altogether is generated after polarization spectroscope C15 light splitting is respectively by focusing
Hot spot to be measured is formed in focal plane after lens A17 and condenser lens B18 focusing；Described optical path diffracted beam k, l altogether are by inclined
In focal plane after the two-way light beam that generates is focused by condenser lens C12 and condenser lens D13 respectively after vibration spectroscope D10 light splitting
Form hot spot to be measured；Photodetector A16 and photodetector B19 is respectively installed in the condenser lens A17, condenser lens
The focal plane of B18, photodetector C11 and photodetector D14 are respectively installed in the condenser lens C12 and focusing
The focal plane of lens D13；The photodetector A16, photodetector B19, photodetector C11, photodetector
D14 is connected with computer 20 respectively；Quarter wave plate 5, one-dimensional plane reflecting grating 6 and three-dimensional perspective generation device 7 are rigidly connected；
One-dimensional plane transmission grating 3, polarization spectroscope A4, polarization spectroscope B8 and one-dimensional angle generation device 9 are rigidly connected；Described one
Dimensional plane transmission grating 3 is identical as 6 grating constant of one-dimensional plane reflecting grating；
The laser 1, collimation lens 2, one-dimensional plane transmission grating 3, quarter wave plate 5, one-dimensional plane reflecting grating 6, three
Tie up angle generation device 7, condenser lens B18, condenser lens D13, photodetector B19, photodetector D14, computer 20
Form measuring beam acquisition and measuring system；
The laser 1, collimation lens 2, one-dimensional plane transmission grating 3, polarization spectroscope A4, polarization spectroscope B8, partially
Shake spectroscope C15, polarization spectroscope D10, photodetector A16, photodetector C11, condenser lens A17, condenser lens
C12, computer 20 form reference beam acquisition, measurement and rotation angle compensation system.
Illustrate the course of work of measuring beam acquisition and measuring system below with reference to Fig. 1 and Fig. 2: the laser 1 is emitted
Light beam by collimation lens 2 collimation after become collimated light beam a, after collimated light beam a impinges perpendicularly on one-dimensional plane transmission grating 3
The Zero-order diffractive light beam b of generation continues to impinge perpendicularly on one-dimensional plane reflecting grating 6, after 6 diffraction of one-dimensional plane reflecting grating
It generates positive first-order diffraction light beam d and negative one grade diffracted beam e, positive first-order diffraction light beam d and negative one grade diffracted beam e is incident again
Generate the diffracted beam f parallel with collimated light beam a and diffracted beam g respectively to one-dimensional plane transmission grating 3, diffracted beam f with
After diffracted beam g distinguishes line focus lens D13 and condenser lens B18 focusing, by photodetector D14 and photodetector B19
It receives respectively, forms measuring signal, measuring signal includes the three-dimensional perspective change information and various light of one-dimensional plane transmission grating
Beam drift disturbing signal.
As shown in Fig. 2, when three-dimensional perspective variation occurs for one-dimensional plane reflecting grating 6, positive first-order diffraction light beam e and negative
First-order diffraction light beam f becomes diffracted beam e1 and diffracted beam f1 respectively, and diffracted beam e1 and diffracted beam f1 are by one-dimensional flat
Face transmission grating 3 becomes diffracted beam i1 and diffracted beam k1 after acting on.Diffracted beam i and diffracted beam i1, diffracted beam k with
Direction of propagation changing value between diffracted beam k1 changes as 6 three-dimensional perspective of one-dimensional plane reflecting grating changes, therefore logical
The changing value for crossing measuring beam direction calculates 6 three-dimensional perspective changing value of one-dimensional plane reflecting grating.
Illustrate the course of work of reference beam acquisition, measurement and rotation angle compensation system: institute below with reference to Fig. 1 and Fig. 3
The light beam for stating the outgoing of laser 1 becomes collimated light beam a after the collimation of collimation lens 2, and collimated light beam a impinges perpendicularly on one-dimensional
Positive first-order diffraction light beam c and negative one grade diffracted beam d are generated after plane transmission grating 3, positive first-order diffraction light beam c successively passes through partially
It is again incident on one-dimensional plane transmission grating 3 after vibration spectroscope A4 and polarization spectroscope B8, obtains parallel with collimated light beam a spread out
Irradiating light beam j, negative one grade diffracted beam d are successively again incident on one-dimensional plane after polarization spectroscope A8 and polarization spectroscope B4
Transmission grating 3, obtains the diffracted beam l parallel with collimated light beam a, and adjustment one-dimensional plane transmission grating 3 and one-dimensional plane reflect
The distance between grating 6, so that diffracted beam j and diffracted beam i, diffracted beam l and diffracted beam k are total to optic path, diffraction
Light beam i and diffracted beam k is light beam to be measured, and diffracted beam j and diffracted beam l are reference beam, diffracted beam j and diffracted beam
Line focus lens C12 and condenser lens A17 is focused l respectively after polarization spectroscope D15 and polarization spectroscope C10 reflection respectively
Afterwards, it is received respectively by photodetector C11 and photodetector A16, forms reference signal, reference signal is floated comprising various light beams
Move disturbing signal；
Rotation angle compensation mechanism by one-dimensional plane transmission grating 3, one-dimensional angle generation device 9, polarization spectroscope A4, partially
Shake spectroscope B8 composition.Wherein one-dimensional angle generation device 9 is mainly made of controller and one-dimensional angle deflection arrangement.Controller control
It makes one-dimensional angle deflection arrangement to rotate around the direction vertical with collimated light beam a, the output signal of controller has following formula to provide:
。
Claims (2)
1. a kind of total optical path trailing type high-precision three-dimensional angle measurement method based on grating, it is characterised in that: the method packet
Include following steps:
1., laser light source issue light beam form collimated light beam after collimator objective and be emitted；
2., 1. described in collimated light beam after one-dimensional plane transmission grating, generate positive first-order diffraction light beam, negative one grade diffraction light
Beam and Zero-order diffractive light beam；
3., 2. described in positive first-order diffraction light beam, negative one grade diffracted beam by one group of diagonal line it is orthogonal polarization point
One group of outgoing beam parallel with positive first-order diffraction light beam, negative one grade diffracted beam is obtained after light microscopic group；
4., 3. described in the outgoing beam parallel with positive first-order diffraction light beam, negative one grade diffracted beam again pass by transmitted light
After grid, one group of diffracted beam parallel with optical axis is obtained；
5., 2. described in Zero-order diffractive light beam impinged perpendicularly on after quarter wave plate one-dimensional plane reflecting grating generate positive one
Grade diffracted beam, negative one grade diffracted beam, 2. the positive first-order diffraction light beam first-order diffraction light beam, negative one grade diffracted beam are incident on
Described in one-dimensional plane transmission grating obtain one group of outgoing beam parallel with optical axis；
6., adjustment the distance between one-dimensional plane reflecting grating and one-dimensional plane transmission grating, make 4. described in one group and light
The parallel diffracted beam of axis is with 5. one group of outgoing beam parallel with optical axis respectively along total optic path, formation two
The total optical path light beam of group；
7., 6. in obtained two groups total optical path light beams pass through polarization spectroscope respectively, obtain four tunnels light beam to be detected；
8., 7. in the four tunnels light beam to be detected that obtains form hot spot to be detected by lens focus, while utilizing photodetector
Detect the location information of hot spot to be detected；
9., when three-dimensional perspective generation device generates three-dimensional perspective variation, one-dimensional plane reflecting grating to be measured occurs corresponding
Three-dimensional perspective variation, the change in location information of hot spot to be detected, the facula position change information of acquisition are detected with photodetector
It is sent into computer after handling by signal processing circuit, calculates and obtains the generation three-dimensional perspective variation of one-dimensional plane reflecting grating；
Deflection angle α, the pitch angle β and rotation angle γ of one-dimensional plane reflecting grating to be measured are obtained as follows respectively:
In formula: Δ dA-x、ΔdB-x、ΔdC-x、ΔdD-xRespectively photodetector A, photodetector B, photodetector C, light
The facula position information variable quantity in the horizontal direction that electric explorer D is detected in the two neighboring sampling period；ΔdA-y、Δ
dB-y、ΔdC-y、ΔdD-yRespectively photodetector A, photodetector B, photodetector C, photodetector D are adjacent two
Variable quantity of the facula position information that a sampling period is detected in vertical direction；F is condenser lens A, condenser lens B, focuses
The focal length of lens C and condenser lens D；Sin Ф is the wavelength of laser and the ratio of one-dimensional plane transmission grating grating constant.
10., controlled by piezoelectric ceramics and be made of one-dimensional plane transmission grating, polarization spectro microscope group and one-dimensional angle generation device
Rotation angle compensation mechanism rotate a certain angle, which is to pass through the rotation angle of the one-dimensional plane reflecting grating 9. obtained
The rotation angle of information, rotation angle compensation mechanism is obtained by following formula:
2. a kind of total optical path trailing type high-precision three-dimensional angle measurement unit based on grating, it is characterised in that: laser (1),
Collimation lens (2), one-dimensional plane transmission grating (3) are arranged successively along the direction of propagation light a；The one-dimensional plane transmission grating
(3) transmission plane is vertical with incident beam；Polarization spectroscope A (4), polarization spectroscope B (8) are placed in one-dimensional plane transmission grating (3)
Rear side, and polarization spectroscope A (4) and polarization spectroscope B (8) diagonal line is mutually perpendicular to, and is with laser (1) optical axis included angle
45°；Positive first-order diffraction light beam c is successively emitted after (8) by polarization spectroscope A (4), polarization spectroscope B, obtained outgoing beam
G is parallel with positive first-order diffraction light beam c；Negative one grade diffracted beam d is successively after polarization spectroscope B (8), polarization spectroscope A (4)
Outgoing, obtained outgoing beam h are parallel with negative one grade diffracted beam d；The zero-order diffraction light that one-dimensional plane transmission grating (3) generates
Beam b is impinged perpendicularly on one-dimensional plane reflecting grating (6) by quarter wave plate (5), the positive first-order diffraction light beam e and bear that diffraction generates
First-order diffraction light beam f is transmitted after polarization spectroscope A (4) and polarization spectroscope B (8) respectively, adjusts one-dimensional plane reflected light
The distance between grid (6) and one-dimensional plane transmission grating (3) make positive first-order diffraction light beam e, negative one grade diffracted beam f respectively with
Outgoing beam h, outgoing beam the g light beam after polarization spectro microscope group are total to optic path；Two groups of total optical path light beams are by one-dimensional flat
Face transmission grating (3) generates total optical path diffracted beam i, j optical path diffracted beam k, l together afterwards；Described optical path diffracted beam i, j altogether
The two-way light beam generated after polarization spectroscope C (15) light splitting is focused by condenser lens A (17) and condenser lens B (18) respectively
Hot spot to be measured is formed in focal plane afterwards；Two for being total to optical path diffracted beam k, l and being generated after polarization spectroscope D (10) light splitting
Road light beam is respectively by forming hot spot to be measured in focal plane after condenser lens C (12) and condenser lens D (13) focusing；Photodetector
A (16) and photodetector B (19) is respectively installed in the focal plane of the condenser lens A (17), condenser lens B (18),
Photodetector C (11) and photodetector D (14) is respectively installed in the condenser lens C (12) and condenser lens D (13)
Focal plane；The photodetector A (16), photodetector B (19), photodetector C (11), photodetector D
(14) it is connected respectively with computer (20)；Quarter wave plate (5), one-dimensional plane reflecting grating (6) and three-dimensional perspective generation device (7)
Rigid connection；One-dimensional plane transmission grating (3), polarization spectroscope A (4), polarization spectroscope B (8) and one-dimensional angle generation device
(9) it is rigidly connected；The one-dimensional plane transmission grating (3) is identical as one-dimensional plane reflecting grating (6) grating constant；
The laser (1), collimation lens (2), one-dimensional plane transmission grating (3), quarter wave plate (5), one-dimensional plane reflecting grating
(6), three-dimensional perspective generation device (7), condenser lens B (18), condenser lens D (13), photodetector B (19), photodetection
Device D (14), computer (20) composition measuring beam obtains and measuring system；
The laser (1), collimation lens (2), one-dimensional plane transmission grating (3), polarization spectroscope A (4), polarization spectroscope B
(8), polarization spectroscope C (15), polarization spectroscope D (10), photodetector A (16), photodetector C (11), condenser lens A
(17), condenser lens C (12), the acquisition of computer (20) composition reference beam, measurement and rotation angle compensation system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811479495.5A CN109443248B (en) | 2018-12-05 | 2018-12-05 | Common-path following type high-precision three-dimensional angle measuring method and device based on grating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811479495.5A CN109443248B (en) | 2018-12-05 | 2018-12-05 | Common-path following type high-precision three-dimensional angle measuring method and device based on grating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109443248A true CN109443248A (en) | 2019-03-08 |
| CN109443248B CN109443248B (en) | 2020-07-24 |
Family
ID=65557032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811479495.5A Expired - Fee Related CN109443248B (en) | 2018-12-05 | 2018-12-05 | Common-path following type high-precision three-dimensional angle measuring method and device based on grating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109443248B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114994938A (en) * | 2022-07-19 | 2022-09-02 | 中国科学院长春光学精密机械与物理研究所 | Dispersion enhanced optical element and spectrum beam combining, locking and measuring structure |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4422763A (en) * | 1978-12-08 | 1983-12-27 | Rca Corporation | Automatic photomask alignment system for projection printing |
| CN101339012A (en) * | 2008-08-26 | 2009-01-07 | 北京交通大学 | Rolling angle measurement method and device based on grating |
| CN103292744A (en) * | 2013-06-06 | 2013-09-11 | 西安交通大学 | Roll angle measuring device and method based on diffraction grating displacement |
| JP2014228490A (en) * | 2013-05-24 | 2014-12-08 | 太陽誘電株式会社 | Displacement measurement device and displacement measurement method |
| CN104613900A (en) * | 2014-12-05 | 2015-05-13 | 郑州轻工业学院 | Full optical path drift compensation high-precision roll angle measuring method and device |
| CN106052569A (en) * | 2016-08-11 | 2016-10-26 | 哈尔滨工业大学 | Heterodyne one/two-dimensional raster-displacement coarse/fine measurement system |
| CN108775878A (en) * | 2018-05-31 | 2018-11-09 | 中国科学院高能物理研究所 | Grating Heterodyne Interferometer System Based and its roll angle measurement method |
-
2018
- 2018-12-05 CN CN201811479495.5A patent/CN109443248B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4422763A (en) * | 1978-12-08 | 1983-12-27 | Rca Corporation | Automatic photomask alignment system for projection printing |
| CN101339012A (en) * | 2008-08-26 | 2009-01-07 | 北京交通大学 | Rolling angle measurement method and device based on grating |
| JP2014228490A (en) * | 2013-05-24 | 2014-12-08 | 太陽誘電株式会社 | Displacement measurement device and displacement measurement method |
| CN103292744A (en) * | 2013-06-06 | 2013-09-11 | 西安交通大学 | Roll angle measuring device and method based on diffraction grating displacement |
| CN104613900A (en) * | 2014-12-05 | 2015-05-13 | 郑州轻工业学院 | Full optical path drift compensation high-precision roll angle measuring method and device |
| CN106052569A (en) * | 2016-08-11 | 2016-10-26 | 哈尔滨工业大学 | Heterodyne one/two-dimensional raster-displacement coarse/fine measurement system |
| CN108775878A (en) * | 2018-05-31 | 2018-11-09 | 中国科学院高能物理研究所 | Grating Heterodyne Interferometer System Based and its roll angle measurement method |
Non-Patent Citations (2)
| Title |
|---|
| GAO W ET AL.: "A three-axis autocollimator for detection of angular error motions of a precision stage", 《CIRP ANNALS - MANUFACTURING TECHNOLOGY》 * |
| 邓立新等: "莫尔条纹技术的三维测角方法研究", 《光学与光电技术》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114994938A (en) * | 2022-07-19 | 2022-09-02 | 中国科学院长春光学精密机械与物理研究所 | Dispersion enhanced optical element and spectrum beam combining, locking and measuring structure |
| CN114994938B (en) * | 2022-07-19 | 2022-10-25 | 中国科学院长春光学精密机械与物理研究所 | Dispersion enhanced optical element and spectrum beam combining, locking and measuring structure |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109443248B (en) | 2020-07-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107228638B (en) | The method and apparatus that five degree of freedom error based on beam drift compensation measures simultaneously | |
| CN102176086B (en) | Two-dimensional photoelectric auto-collimation method and device of polarized light plane mirror reference common-path compensation | |
| CN109470176B (en) | High-precision three-dimensional angle measuring method and device based on double gratings | |
| CN104848802B (en) | Normal tracking mode differential confocal non-spherical measuring method and system | |
| CN111412832B (en) | Semiconductor laser six-degree-of-freedom error measurement system based on interferometer module | |
| CN207180619U (en) | Three-dimensional small angle error simultaneous measuring apparatus based on beam drift compensation | |
| CN106767395B (en) | One kind being used for the efficient measuring system of six geometric error high resolution of linear guide and method | |
| CN104913732B (en) | The normal tracking mode non-spherical measuring method and system interfered based on recombination laser | |
| CN105181298A (en) | Multiple reflection type laser con-focal long focal length measuring method and device | |
| CN103542813A (en) | Laser diameter measuring instrument based on boundary differential and environmental light self-calibration | |
| CN113687521B (en) | Low-aberration high-precision two-dimensional photoelectric auto-collimation method and device based on wavefront correction | |
| CN104913733B (en) | The normal tracking mode non-spherical measuring method and system interfered based on multiwavelength laser | |
| CN113483696A (en) | Large-size X-ray reflector interference splicing measurement system and method | |
| CN109470177A (en) | Three-dimensional perspective measurement method and device based on double grating | |
| CN113639675B (en) | Method and device for measuring nanoradian-level three-dimensional angle based on deformable mirror compensation | |
| CN109579744B (en) | Following type three-dimensional photoelectric auto-collimation method and device based on grating | |
| CN102445854A (en) | Workpiece table vertical position measuring system | |
| CN113720279B (en) | Method and device for measuring nanoradian-level three-dimensional angle based on spatial light modulation | |
| CN113310434B (en) | Method for measuring perpendicularity of two-dimensional linear motion platform | |
| CN109443248A (en) | Total optical path trailing type high-precision three-dimensional angle measurement method and device based on grating | |
| Quan et al. | Design and Testing of a Compact Optical Angle Sensor for Pitch Deviation Measurement of a Scale Grating with a Small Angle of Diffraction | |
| CN113639665B (en) | High-stability nanoradian magnitude angle measurement method and device based on drift amount feedback | |
| CN113483726B (en) | Method and system for measuring three-dimensional angle motion error in miniaturized and high-precision manner | |
| CN215598336U (en) | Large-size X-ray reflector interference splicing measurement system | |
| CN109443249A (en) | High precision roll angle measurement method and device based on transmission grating |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200724 Termination date: 20201205 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |