CN109357796A - Wearable pressure sensor and its manufacturing method - Google Patents
Wearable pressure sensor and its manufacturing method Download PDFInfo
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- CN109357796A CN109357796A CN201811404858.9A CN201811404858A CN109357796A CN 109357796 A CN109357796 A CN 109357796A CN 201811404858 A CN201811404858 A CN 201811404858A CN 109357796 A CN109357796 A CN 109357796A
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The present invention provides the wearable pressure sensor and its manufacturing method that a kind of manufacture efficiency is high, at low cost, microstructure size is controllable and sensitivity can modulate.The sensor includes first electrode portion and second electrode portion, and first electrode portion includes first PDMS film, the first conductive layer and first electrode with micro-structure；Second electrode portion includes second PDMS film, the second conductive layer and second electrode with flat surfaces；First electrode portion and second electrode portion are laminated in the micro-structure of the first PDMS film mode opposite with the flat surfaces of the second PDMS film；Above-mentioned micro-structure includes multiple groups protrusion, and every group of protrusion includes at least one protrusion and be distributed on the surface of the first PDMS film along first direction, and each group protrusion is arranged along the second direction intersected with first direction.Sensor of the invention can have wide practical use by the variation of the variation monitoring pressure in real time of contact resistance in fields such as intelligent artificial limb, biologic medical, robots.
Description
Technical field
The invention belongs to pressure sensor manufacturing fields, and in particular to a kind of wearable pressure sensor with micro-structure
And its manufacturing method.
Background technique
Skin is the maximum perceptual organ of human body, it is both the protective barrier when mankind interact with the external world, while also being assigned
The abilities such as human tactile, the pain sensation, temperature sensing.Carry out electronic skin research intelligent artificial limb, real-time medical monitoring with diagnosis,
The fields such as artificial intelligence (robot) are significant and have a extensive future.Pressure be in numerous parameters that electronic skin can perceive very
An important physical quantity.The pressure sensor of resistance-type, because its working principle is simple, manufacturing cost is low, and small power consumption becomes
A realization pressure sensing significant design direction.
Currently, flexible resistive pressure sensor is usually by by nanometers such as nanotube (CNT), nano wire and graphenes
Material is added flexible polymer (forming elastic composite) or by (forming electricity in polymer surfaces position activity substance
Pole) it manufactures.Since flexible polymer has bigger elasticity modulus, viscoplasticity, thus flexible resistive pressure sensor is universal
There are poor sensitivity.In order to improve the sensitivity of flexible resistive pressure sensor, building flexible substrate is generally required
Micro-structure.
In low-pressure section, flexible resistive pressure sensor is often used for perceiving the pressure such as breathing, pulse；In high pressure
Section, flexible resistive pressure sensor are often used for perception pressing, pick up the pressure such as article.It is soft thus under different scenes
Property resistive pressure sensor generally requires different sensory characteristics, needs to the sensitive of flexible resistive pressure sensor
Degree is modulated.
In order to improve sensitivity, the Bao Zhenan team of Stamford uses the method for hollow beads to construct flexible substrate
Micro-structure obtains high sensitivity with this.But this method, preparation method is complicated and sensitivity is difficult to control, can not to sensitivity into
Row modulation.The team of Suzhou Institute of Nano-tech. and Nano-bionics, Chinese Academy of Sciences, using the method to silk reverse mould come structure
Build the micro-structure of flexible substrate, this method is convenient and efficient, but the size shape of micro-structure be difficult to control, can not to sensitivity into
Row modulation.The team of Pohang University of Science and Technology constructs the micro-structure of flexible substrate, the party using photoetching and chemical method
Method can be accurately controlled the geomery of micro-structure, but preparation method is excessively complicated, be not easy to quickly extensive manufacture.
The method that mainstream prepares micro-structure is photoetching process and reverse mould method, wherein photolithographic preparation process flow complexity (one
As photoetching process to undergo silicon wafer surface cleaning drying, linging, spin coating photoresist, soft dry, alignment exposure, rear dry, is development, hard
The processes such as baking, etching, detection)；Reverse mould method (pass through leaf, silk, sand paper etc. carry out reverse mould) although preparation flow it is simple,
The microstructure size structure of preparation is unable to control.Therefore, there are higher cost, preparation process are multiple for existing micro-structure preparation method
Miscellaneous and micro-structure dimensional structure is difficult to the problem of being controlled.
Therefore, it is necessary to invent that a kind of manufacture efficiency is high, at low cost, microstructure size is controllable and sensitivity can modulate can
Dress pressure sensor and its manufacturing method.
Existing technical literature
Non-patent literature 1:Chortos, A.；Liu,J.；Bao,Z.A.,Pursuing prosthetic electronic
skin.Nature Materials 2016,15(9),937-950.
Non-patent literature 2:Zang, Y.；Zhang,F.；Di,C.-a.；Zhu,D.,Advances of flexible
pressure sensors toward artificial intelligence and health care
applications.Materials Horizons 2015,2(2),140-156.
Non-patent literature 3:Hammock, M.L.；Chortos,A.；Tee,B.C.K.；Tok,J.B.H.；Bao,Z.,25th
anniversary article:The evolution of electronic skin(E-Skin):A brief history,
design considerations,and recent progress.Advanced Materials 2013,25(42),
5997-6038.
Summary of the invention
The present invention is in order to solve the problems in the existing technology to complete, and its purpose is to provide a kind of manufacture effects
The wearable pressure sensor and its manufacturing method that rate is high, at low cost, microstructure size is controllable and sensitivity can modulate.
In order to reach above-mentioned purpose of the invention, the present invention includes following technical scheme.
[1] a kind of wearable pressure sensor comprising first electrode portion and second electrode portion,
Above-mentioned first electrode portion includes first PDMS film with micro-structure, coated on above-mentioned first PDMS film
First conductive layer and be formed in above-mentioned first PDMS film one end first electrode；
Above-mentioned second electrode portion includes second PDMS film with flat surfaces, is coated on above-mentioned second PDMS film
The second conductive layer and be formed in above-mentioned second PDMS film one end second electrode；
Above-mentioned first electrode portion and above-mentioned second electrode portion are with the micro-structure of above-mentioned first PDMS film and above-mentioned second
The mode that the flat surfaces of PDMS film are opposite is laminated；
Above-mentioned micro-structure includes multiple groups protrusion, and every group of protrusion is comprising at least one protrusion and in above-mentioned first PDMS film
It is distributed on surface along first direction, each group protrusion is arranged along the second direction intersected with above-mentioned first direction.
[2] the wearable pressure sensor as described in above-mentioned [1], wherein the height of above-mentioned protrusion is 10~50 μm；It is above-mentioned
Spacing distance between the adjacent protrusions of micro-structure is 10~100 μm.
[3] the wearable pressure sensor as described in above-mentioned [1], wherein above-mentioned protrusion it is vertical with above-mentioned first direction
Section is roughly triangular, rectangle, square, trapezoidal, arch or semicircle；Above-mentioned protrusion is on above-mentioned first direction
Dotted or linear distribution.
[4] the wearable pressure sensor as described in above-mentioned [1], wherein above-mentioned protrusion is arranged in a manner of periodic lattice
Column.
[5] the wearable pressure sensor as described in above-mentioned [1], wherein above-mentioned first conductive layer and above-mentioned second conduction
Layer includes at least one of carbon nanotube, graphene, conductive metal particles or conductive metal nano wire；Above-mentioned carbon nanotube
Diameter is 10~80nm, length is 2~10 μm；Above-mentioned first electrode and above-mentioned second electrode include silver nano-grain.
[6] a kind of manufacturing method of wearable pressure sensor comprising following steps:
(1) PDMS substrate is prepared；
(2) it is etched using a surface of the femto-second laser to above-mentioned PDMS substrate, being formed has periodic arrangement
Microflute pattern；
(3) reverse mould is carried out as mold using the PDMS substrate for being formed with above-mentioned pattern, preparing has the micro- of periodic arrangement
First PDMS film of structure；
(4) applying conductive coating is on above-mentioned first PDMS film to form the first conductive layer, in above-mentioned first conductive layer
On one end coating nano-silver conductive thickener to form first electrode, thus be made first electrode portion；
(5) preparation has the second PDMS film of flat surfaces, and applying conductive coating is on above-mentioned flat surfaces to form
Second conductive layer, one end coating nano-silver conductive thickener on above-mentioned second conductive layer is to form second electrode, to be made
Second electrode portion；
(6) by above-mentioned first electrode portion and above-mentioned second electrode portion with the micro-structure of above-mentioned first PDMS film and above-mentioned the
The mode that the flat surfaces of two PDMS films are opposite is laminated, and wearable pressure sensor is made.
[7] manufacturing method of the wearable pressure sensor as described in above-mentioned [6], wherein above-mentioned femto-second laser is swept
Retouching rate is 10~50mm/s, and laser power is 1~10W, and umber of pulse is 800~1200kHz.
[8] manufacturing method of the wearable pressure sensor as described in above-mentioned [6], wherein above-mentioned micro-structure includes multiple
Protrusion, above-mentioned multiple protrusions are prominent from the surface of above-mentioned first PDMS film, and the edge on the surface of above-mentioned first PDMS film
First direction extends, and arranges along the second direction intersected with above-mentioned first direction.
[9] manufacturing method of the wearable pressure sensor as described in above-mentioned [6], wherein above-mentioned PDMS substrate, above-mentioned
One PDMS film and above-mentioned second PDMS film by the way that the presoma of PDMS and curing agent are mixed according to the mass ratio of 10:1,
Solidified after removing bubble in a vacuum and is obtained.
[10] manufacturing method of the wearable pressure sensor as described in above-mentioned [6], wherein above-mentioned conductive coating includes carbon
At least one of nanotube, graphene, conductive metal particles or conductive metal nano wire；The concentration of above-mentioned conductive coating is 5
~10mg/ml；The diameter of above-mentioned carbon nanotube is 10~80nm, length is 2~10 μm.
Technical effect
Wearable pressure sensor according to the present invention, by using the PDMS film with micro-structure, can be improved can
Dress the sensitivity of pressure sensor.The manufacturing method of wearable pressure sensor according to the present invention, is burnt using femtosecond laser
The method of erosion carries out laser direct-writing processing to PDMS substrate under atmospheric environment, can quickly form micro-structure on a large scale, and
Can the size to micro-structure accurately controlled, so as to low cost batch production have micro-structure PDMS film, lead to
The method for crossing femtosecond laser ablation can form different microstructure aspects, can carry out to the sensitivity of pressure sensor obtained
Modulation, so as to have the wearable pressure sensor for the sensitivity being suitable under different pressures with high efficient production.
Detailed description of the invention
Fig. 1 is the schematic isometric of the wearable pressure sensor of one embodiment of the present invention.
Fig. 2 is that preparation has micro-structure in the manufacturing method for show the wearable pressure sensor of the embodiment of the present invention 1
The step of first PDMS film, wherein Fig. 2 (a) is formed on the surface of PDMS substrate by the method for femtosecond laser ablation
Microflute optical microscope photograph；Fig. 2 (b) is to be formed with PDMS obtained by the PDMS substrate of microflute carries out reverse mould as mold
The optical microscope photograph of film sections.
Fig. 3 is that the optics of the micro-structure of the first PDMS film in the wearable pressure sensor of the embodiment of the present invention 1 is aobvious
Micro mirror photo.
Fig. 4 is that the optics of the micro-structure of the first PDMS film in the wearable pressure sensor of the embodiment of the present invention 2 is aobvious
Micro mirror photo.
Fig. 5 is the electronic display of the micro-structure of the first PDMS film in the wearable pressure sensor of the embodiment of the present invention 3
Micro mirror photo.
Fig. 6 is the sensitivity test result figure of the wearable pressure sensor of the embodiment of the present invention 1.
Fig. 7 is the sensitivity test result figure of the wearable pressure sensor of the embodiment of the present invention 2.
Fig. 8 is the sensitivity test result figure of the wearable pressure sensor of the embodiment of the present invention 3.
Fig. 9 is when m- electrical response curve of the wearable pressure sensor of the embodiment of the present invention 1 under loop test
Figure.
Symbol description
1 first PDMS film
2 first conductive layers
3 first electrodes
1 ' second PDMS film
2 ' second conductive layers
3 ' second electrodes
10 wearable pressure sensors
11 first electrode portions
12 second electrode portions
Specific embodiment
Below in conjunction with preferred embodiment and Detailed description of the invention technical characteristic of the invention, this be intended to illustrate invention without
It is the limitation present invention.Attached drawing is greatly simplified in order to be illustrated, but is not drawn necessarily to scale.
It is to be appreciated that shown in the drawings is only presently preferred embodiments of the present invention, do not constitute to model of the invention
The limitation enclosed.Those skilled in the art can carry out the present invention on the basis of embodiment shown in the drawings various aobvious and easy
Modification, the modification, equivalence replacement seen, and skill under the premise of not contradicting, in different embodiments discussed below
Art feature can in any combination, and these all fall within the scope and spirit of the invention.
(wearable pressure sensor)
Firstly, being illustrated referring to Fig.1 to the wearable pressure sensor of an embodiment of the invention.Fig. 1 is this
The schematic isometric of the wearable pressure sensor of one embodiment of invention.
As shown in Figure 1, wearable pressure sensor 10 of the invention includes first electrode portion 11 and second electrode portion 12,
In, first electrode portion 11 includes the first PDMS film 1, the first conductive layer 2 and first electrode 3, and second electrode portion 12 includes second
PDMS film 1 ', the second conductive layer 2 ' and second electrode 3 '.
First PDMS film 1 is that have substrate flexible made of dimethyl silicone polymer, by minimum pressure
When can also deform.Since the first PDMS film 1 has flexibility, can deform under lesser pressure, thus sensor
Response is generated under lesser pressure, it can be ensured that the sensitivity of sensor.Do not have for the shape and size of the first PDMS film 1
It is particularly limited to, can be selected as needed.First PDMS film 1 is preferably formed into strip, and can have certain thickness
Degree, such as 1~2mm.By making thickness in the range, wearable pressure sensor 10 appearance when by external force can be made
Easily deformation occurs, it is ensured that the sensitivity of sensor, but also the whole size of wearable pressure sensor 10 can be made to become small
Type.
First PDMS film 1 has micro-structure on the surface of side, which includes multiple groups protrusion, and every group of protrusion includes
At least one protrusion.When every group of protrusion only includes a protrusion, which is long linear and across the table of the first PDMS film 1
Face extends along first direction Y be distributed as shown in Figure 1, and is arranged with along the second direction X intersected with first direction Y multiple
Above-mentioned protrusion, above-mentioned first direction Y are preferably orthogonal with above-mentioned second direction X.When every group of protrusion includes more than two protrusions,
The protrusion can be in short-term shape or spot distribution, and multiple groups protrusion edge along first direction Y on the surface of the first PDMS film 1
Intersect with first direction Y second direction X arrangement, it is therefore particularly preferred that second direction X is orthogonal with first direction Y.
Here, " long linear " and the term of " short-term shape " are relative to the width on the first PDMS film 1 in a first direction Y
For, " long linear " refers to that the length of linear protrusion is 50% or more of the above-mentioned width on first direction Y, and " short-term shape " is
The length for referring to linear protrusion is the above-mentioned width on first direction Y 5% more than and less than 50%.
The shape of above-mentioned protrusion is not particularly limited, for example, the section vertical with first direction Y of protrusion can be
Roughly triangular, rectangle, square, trapezoidal, arch or semicircle, preferably triangle or semicircle.For above-mentioned protrusion
Size be not particularly limited, for example, the height of protrusion can be 10~50 μm, the spacing distance between adjacent protrusions be can be
10~100 μm.In one preferred embodiment, protrusion is arranged in a manner of periodic lattice.
First conductive layer 2 is coated on the surface with micro-structure of above-mentioned first PDMS film 1, can be conductive by coating
Coating is formed.As conductive material contained in conductive coating, can be carbon nanotube, graphene, conductive metal particles or
At least one of conductive metal nano wire, preferably carbon nanotube.Conductive coating includes feelings of the carbon nanotube as conductive material
Under condition, the preferred diameter of carbon nanotube is 10~80nm, length is 2~10 μm.
First electrode 3 is formed on above-mentioned first conductive layer 2 and is formed in the one end of the first PDMS film 1.First electricity
Pole 3 and the first conductive layer 2 form conductive path, and can be connect by conducting wire with the resistance signal separately set detector, by sensor
Resistance signal export.First electrode 3 can by will include that the conducting paste of silver nano-grain is coated on the first conductive layer 2,
It is dried and is formed.
The second PDMS film 1 ' in second electrode portion 12 has flat surface, with first with micro-structure surface
The surface texture of PDMS film 1 is different, in addition to this, same as the first PDMS film 1, is made of dimethyl silicone polymer, and
And there is the corresponding size of the first PDMS film 1 and thickness etc., be thus conducive to the second PDMS film 1 ' and the first PDMS is thin
The suitably laminate packaging of film 1.
Second conductive layer 2 ' is formed on the flat surfaces of above-mentioned second PDMS film 1 ', can by coating conductive coating come
It is formed.As conductive material contained in conductive coating, carbon nanotube, graphene, conductive metal particles or conductive gold can be
Belong at least one of nano wire, preferably carbon nanotube.Conductive coating include carbon nanotube as conductive material in the case where, carbon
The preferred diameter of nanotube is 10~80nm, length is 2~10 μm.
Second electrode 3 ' is formed on above-mentioned second conductive layer 2 ' and is formed in the one end of the second PDMS film 1 '.Second
Electrode 3 ' and the second conductive layer 2 ' form conductive path, and can be connect by conducting wire with the resistance signal separately set detector, will pass
The resistance signal of sensor exports.Second electrode 3 ' can be by will include that the conducting paste of silver nano-grain is coated on the second conductive layer
On 2 ', it is dried and is formed.
By by first electrode portion 11 as formed above and second electrode portion 12 with the micro-structure of the first PDMS film 1 and the
The mode that the flat surfaces of two PDMS films 1 ' are opposite is laminated, and is packaged as needed, to constitute of the invention wear
Wear pressure sensor.
Wearable pressure sensor according to the present invention, the first PDMS film have micro-structure, constitute the protrusion of micro-structure
It is compressed or is deformed when by ambient pressure, thus protrusion and the contact area on the second PDMS film surface become
Change.Specifically, the protrusion and second when wearable pressure sensor is by external pressure, on the first PDMS film
The contact area of PDMS film becomes larger, and since contact area becomes larger, the resistance between wearable two electrode portion of pressure sensor becomes smaller.
The contact area increment of protrusion and the second PDMS film on first PDMS film is bigger, corresponding wearable pressure sensing
The degree that the resistance of device becomes smaller is bigger, i.e. the sensitivity of pressure sensor is better.In addition, wearable pressure sensor of the invention
In micro-structure on the second PDMS film surface can according to need and be formed as long linear, short-term shape or lattice-like etc., be suitable for
To the needs of sensitivity under different pressures.
(manufacturing method of wearable pressure sensor)
Hereinafter, the structure of the wearable pressure sensor illustrated referring to Fig.1 is to wearable pressure sensor of the invention
Manufacturing method is illustrated.
In following explanations, when not having declaration condition, those skilled in the art can press from angle of the invention
Routine test easily provides the manufacture that the condition implements wearable pressure sensor of the invention.In disclosed embodiment party
In formula, for expected purpose, the available any factor substitute equivalent with it of any element used in embodiment, including this
Literary clearly disclosed element.
The manufacturing method of wearable pressure sensor of the invention includes the following steps (1)~(6), carries out below specifically
It is bright.
Step (1)
Firstly, preparation PDMS substrate.The presoma of dimethyl silicone polymer and curing agent are mixed according to the ratio of 10:1,
Mixed composition is poured into mold, is solidified after removing bubble obtain PDMS substrate in a vacuum.As solidification
Condition solidifies 2~4 hours preferably at 60~80 DEG C.
Step (2)
PDMS substrate is placed on platform, using femto-second laser and cooperates scanning galvanometer, to step under atmospheric environment
Suddenly a surface of PDMS substrate obtained is etched in (1), forms the pattern with the microflute of periodic arrangement.As erosion
The condition at quarter, the sweep speed of femto-second laser are 10~50mm/s, preferably 20~50mm/s；Laser power is 1~10W, excellent
Select 6~10W；Umber of pulse is 800~1200kHz, preferably 1000~1200kHz.
It will be dried after PDMS substrate cleaning after etching, it is spare.
Step (3)
The PDMS substrate for being formed with above-mentioned pattern made from using in step (2) puts it into container appropriate as mold
In, the presoma of dimethyl silicone polymer and curing agent are poured into PDMS substrate according to the mixture that the ratio of 10:1 is obtained by mixing
On carry out reverse mould, in a vacuum remove bubble after solidified, solidify 2~4 hours preferably at 60~80 DEG C.After solidifying
PDMS film removing after, obtain the first PDMS film 1 of the micro-structure with periodic arrangement, micro- knot of the periodic arrangement
Structure is the protrusion of periodic arrangement corresponding with the pattern of PDMS substrate die.
Specifically, above-mentioned micro-structure includes multiple protrusions, above-mentioned multiple protrusions are prominent from the surface of the first PDMS film 1
Out, and on the surface of the first PDMS film 1 extend along first direction (Y-direction in Fig. 1), and edge and above-mentioned first direction
The second direction (X-direction in Fig. 1) of intersection arranges, and preferably first direction is orthogonal with second direction.In some preferred implementations
In mode, protrusion is formed by long linear, short-term shape or spot distribution, is particularly preferably arranged in a manner of periodic lattice.
Step (4)
The applying conductive coating on above-mentioned first PDMS film 1, then heat drying is connect with forming the first conductive layer 2
, one end on above-mentioned first conductive layer 2 is coated with nano-silver conductive thickener, first electrode 3 is formed after drying, to be made
First electrode portion 11.
It include carbon nanotube, graphene, conductive metal particles or conduction as conductive filler in above-mentioned conductive coating
At least one of metal nanometer line.The concentration of conductive filler is 5~10mg/ml in conductive coating.In a preferred implementation
It include the carbon nanotube of 6~10mg/ml in mode, in conductive coating.In the case where using carbon nanotube as conductive filler,
Used carbon nanotube be preferably diameter be 10~80nm, length is 2~10 μm.
As the solvent of conductive coating, water can be used.In order to obtain finely dispersed conductive coating, can add in the solution
Add the surfactants such as SDBS, and is dispersed using ultrasonic disperser.
As the coating method of conductive coating, brushing, rotary coating, spraying etc., but preferred method of spin coating can be enumerated.
By the concentration of adjusting conductive coating, the revolving speed of rotary coating and time, it can control and be formed by conductive layer
Thickness, to obtain conductive layer with good conductivity.
In embodiments of the present invention, carbon nanotube conducting layer is instantiated but it is also possible to be graphene as conductive layer
Conductive layer or metallic film, as long as conductive layer with good conductivity can be formed.Since carbon nanotube is compared with graphene, energy
Conductive net is formed with less dosage, and density ratio metallic particles is small, it is not easy to it is settled because of the effect of gravity, thus preferably
Conductive layer is formed using carbon nanotube.
In addition, being not particularly limited as nano-silver conductive thickener used in present embodiment, commercially available receive can be used
Rice elargol etc., as long as electrode with good conductivity can be formed after the drying.
Step (5)
The presoma of dimethyl silicone polymer and curing agent are mixed according to the ratio of 10:1, mixed composition is fallen
Enter in mold appropriate, is solidified the second PDMS film 1 ' for obtaining having flat surfaces after removing bubble in a vacuum.
As condition of cure, solidify 2~4 hours preferably at 60~80 DEG C.
By with same method in above-mentioned steps (4), on the flat surfaces of the second PDMS film 1 ' applying conductive apply
Material, forms the second conductive layer 2 ' after being dried, then, one end on the second conductive layer 2 ' is coated with nano-silver conductive thickener,
Second electrode 3 ' is formed after drying, so that second electrode portion 12 be made.
Step (6)
Then, by first electrode portion 11 prepared above and second electrode portion 12 with the micro-structure of the first PDMS film 1 with
The mode that the flat surfaces of second PDMS film 1 ' are opposite is laminated, and as needed encapsulates the laminated body after stacking, thus
Wearable pressure sensor 10 of the invention is made.
It, can be to being formed by by sweep speed, the laser power in control etching condition in above-mentioned steps (2)
The pattern of microflute with periodic arrangement is accurately controlled and is designed, to can be obtained by reverse mould with accurate size
First PDMS film of the micro-structure of control.
The manufacturing method of wearable pressure sensor according to the present invention, using the method for femtosecond laser ablation in big compression ring
Laser direct-writing processing is carried out to PDMS substrate under border, can quickly be formed on a large scale micro-structure (microflute), and is flown by control
The condition of second laser ablation can the size to micro-structure accurately controlled, so as to low cost batch production with micro- knot
The PDMS film of structure can form different microstructure aspects by the method for femtosecond laser ablation, can pass to pressure obtained
The sensitivity of sensor is modulated, so as to have the wearable pressure for the sensitivity being suitable under different pressures with high efficient production
Force snesor.
Embodiment
Hereinafter, being illustrated by embodiment to wearable pressure sensor of the invention and its manufacturing method.It answers
It is expressly understood, embodiment below is merely to illustrate the range being not intended to be limiting of the invention.
<manufacture of wearable pressure sensor>
(embodiment 1)
The wearable pressure sensor of the embodiment of the present invention 1 is manufactured by following steps.
The presoma of dimethyl silicone polymer and curing agent are mixed according to the ratio uniform of 10:1, by mixed combination
Object pours into mold, and bubble is removed under the vacuum environment of 0.5Torr, then solidifies 2 hours at a temperature of 60 DEG C, and PDMS is made
Substrate.
PDMS substrate obtained is cut into strip, is placed on platform, using femto-second laser and cooperates scanning galvanometer,
Under atmospheric environment with the speed of 20mm/s to PDMS substrate carry out ablation, laser power 6W, umber of pulse 1000kHz, thus
Form the pattern with the microflute of periodic arrangement.It will be dried after PDMS substrate cleaning after etching, it is spare.In Fig. 2 (a)
Show the optical microscope photograph by the PDMS substrate prepared by femtosecond laser ablation with micro-structure (microflute).
Using PDMS substrate prepared above as mold, by the presoma of dimethyl silicone polymer and curing agent according to 10:1
The mixture that is obtained by mixing of ratio pour into PDMS substrate and carry out reverse mould, after removing bubble in the vacuum of 0.5Torr,
Solidify 2 hours at 60 DEG C.By the PDMS film removing after solidification, the first PDMS for obtaining the protrusion with periodic arrangement is thin
Film.Fig. 2 (b) is shown using being formed with after the PDMS substrate of pattern shown in Fig. 2 (a) carries out reverse mould as mold, obtained
The optical microscope photograph in the section of the first PDMS film.Fig. 3 shows the protrusion on first PDMS film when amplifying 200 times
Optical microscope photograph, it can thus be seen that foring the long linear protrusion of periodic arrangement on the first PDMS film.
The SDBS surfactant of 120mg carbon nanotube and 50mg is added in 20ml deionized water, ultrasonic disperse 2 is small
When, obtain carbon nanotube conducting coating.Using rotary coating instrument with the revolving speed of 1000rpm by the carbon nanotube conducting coating spin coating
It on the surface with protrusion of the first PDMS film, is dried 1 hour in 80 DEG C, forms the first conductive layer.Then, it is led first
It is coated with nano-silver conductive glue, the heat drying at 60 DEG C in electric layer and in one end of PDMS film, so that the first conductive part be made.
The presoma of dimethyl silicone polymer and curing agent are mixed according to the ratio of 10:1, mixed composition is fallen
Enter in mold, after removing bubble in a vacuum, solidify 2 hours at 60 DEG C, obtain second PDMS film with flat surfaces,
It is carried out suitably to cut to be formed and there is the size adaptable with the size of the first PDMS film.
By method same as the first conductive layer is formed, applying conductive is applied on the flat surfaces of the second PDMS film 1
Material, forms the second conductive layer 2 after being dried, then, similarly one end coating nano-silver conductive on the second conductive layer 2 is pasted
Material forms second electrode 3 after drying, so that second electrode portion be made.
Then, first electrode portion obtained and second electrode portion is thin with the micro-structure of the first PDMS film and the 2nd PDMS
Post package is laminated in the mode that the flat surfaces of film are opposite, so that the wearable pressure sensor of the embodiment of the present invention 1 be made.
(embodiment 2)
In addition to carrying out ablation, the figure of the microflute with periodic arrangement of formation to PDMS substrate using femto-second laser
Case, and reverse mould is carried out as mold, it is formed other than the first PDMS film of the short-term shape protrusion with periodic arrangement, is used
Same condition and method, are made the wearable pressure sensor of embodiment 2.
Fig. 4 shows optical microscope photograph of the protrusion when amplifying 200 times on the first PDMS film of embodiment 2, by
This can be seen that the short-term shape protrusion that periodic arrangement is formd on the first PDMS film.
(embodiment 3)
In addition to carrying out ablation, the figure of the microflute with periodic arrangement of formation to PDMS substrate using femto-second laser
Case, and carry out reverse mould as mold, formed the first PDMS film of spot-like projections for being arranged in a manner of periodic lattice with
Outside, using same condition and method, the wearable pressure sensor of embodiment 3 is made.
Fig. 5 shows electron micrograph of the protrusion when amplifying 500 times on the first PDMS film of embodiment 3, by
This can be seen that the spot-like projections that periodic lattice arrangement is formd on the first PDMS film.
<sensitivity test of wearable pressure sensor>
Pressure-electrical response test is carried out to wearable pressure sensor obtained in Examples 1 to 3, and according to test
As a result the sensitivity of wearable pressure sensor is calculated.Fig. 6 shows the sensitivity test of the wearable pressure sensor of embodiment 1
As a result, Fig. 7 shows the sensitivity test of the wearable pressure sensor of the embodiment of the present invention 2 as a result, Fig. 8 display present invention is implemented
The sensitivity test result of the wearable pressure sensor of example 3.
The sensitivity of wearable pressure sensor passes through following calculatings.
As can be seen from figures 6 to 8, abscissa is the pressure (kPa) applied to pressure sensor, and ordinate indicates under each pressure
Resistance change rate, by Δ R/R0It is indicated, wherein R0Indicate resistance value when not applying pressure, Δ R is indicated after applying pressure
Resistance value R and R0Difference.To the Drawing of Curve tangent line of resistance change rate major part, the value of the tangent line characterizes the sensitive of sensor
Degree, the absolute value of the value is bigger, indicates that sensitivity is higher.
As seen from Figure 6, the sensitivity with the pressure sensor of long linear protrusion of embodiment 1 is -0.107kPa-1。
As seen from Figure 7, the sensitivity of the pressure sensor with short-term shape protrusion of embodiment 2 is -0.345kPa-1。
As seen from Figure 8, the spirit of the pressure sensor with the spot-like projections arranged with periodic lattice of embodiment 3
Sensitivity is -1.82kPa-1。
There is the sensitivity of the pressure sensor of the spot-like projections arranged with periodic lattice it can be seen from the above results
The sensitivity of highest, the pressure sensor with short-term shape protrusion is taken second place, and has the sensitive of the pressure sensor of long linear protrusion
It spends relatively small., it can be said that relative to long linear protrusion or short-term shape protrusion, the contact of the spot-like projections on the first PDMS film
Area is small, and when wearable pressure sensor is by external pressure, the spot-like projections and the 2nd PDMS on the first PDMS film are thin
The contact area increment of film is larger, and the degree that the resistance of corresponding wearable pressure sensor becomes smaller is bigger, thus sensitivity compared with
It is high.Different microstructure aspects can be formed by the method for femtosecond laser ablation, it can be to the sensitive of pressure sensor obtained
Degree is modulated, so as to have the wearable pressure sensor for the sensitivity being suitable under different pressures with high efficient production.
<loop test of wearable pressure sensor is tested>
Loop test test is carried out to wearable pressure sensor made from embodiment 1, test applies pressure sensor
Electrical response curve when the pressure and release of 5kPa, test result are shown in Fig. 9.Abscissa is the period in figure, and ordinate is electricity
It hinders (k Ω), as can be seen from Figure, wearable pressure sensor prepared by the present invention is followed by 10000 times or more
When ring, good electrical response is still shown, there is good sensitivity and reliability.
Finally, it is to be understood that the explanation of above embodiment and embodiment is to illustrate in all respects, limit is not constituted
System, can carry out various improvement in the range without departing substantially from spirit of the invention.The scope of the present invention is by claims come table
Show, rather than indicated by above embodiment or embodiment.Furthermore the scope of the present invention includes with claims etc.
Being had altered in the same meaning and range.
Industrial utilizability
Wearable pressure sensor according to the present invention, by using the PDMS film with micro-structure, can be improved can
Dress the sensitivity of pressure sensor.Micro-structure in wearable pressure sensor of the invention on second PDMS film surface can
To be formed as long linear, short-term shape or lattice-like etc. as needed, it is suitable for the needs under different pressures to sensitivity.
It is right under atmospheric environment using the method for femtosecond laser ablation in the manufacture of wearable pressure sensor of the invention
PDMS substrate carries out laser direct-writing processing, can quickly form micro-structure on a large scale, and can carry out to the size of micro-structure
Accurate control, manufacturing process is simple, at low cost, can have the PDMS film of micro-structure with high efficient production, so that Gao Ling be made
The wearable pressure sensor of sensitivity.Different microstructure aspects can be formed by the method for femtosecond laser ablation, it can be to system
The sensitivity of the pressure sensor obtained is modulated, so as to have the sensitivity being suitable under different pressures with high efficient production
Wearable pressure sensor.Wearable pressure sensor with micro-structure of the invention can pass through the variation of contact resistance
The variation of monitoring pressure in real time, this excellent performance are widely used in fields such as intelligent artificial limb, biologic medical, robots
Prospect.
Claims (10)
1. a kind of wearable pressure sensor, which is characterized in that including first electrode portion and second electrode portion,
The first electrode portion includes first PDMS film with micro-structure, coated in first on first PDMS film
Conductive layer and be formed in first PDMS film one end first electrode；
The second electrode portion includes second PDMS film with flat surfaces, coated on second PDMS film
Two conductive layers and be formed in second PDMS film one end second electrode；
The first electrode portion and the second electrode portion are thin with the micro-structure of first PDMS film and the 2nd PDMS
The mode that the flat surfaces of film are opposite is laminated；
The micro-structure includes multiple groups protrusion, and every group of protrusion is comprising at least one protrusion and on the surface of first PDMS film
On along first direction be distributed, each group protrusion along intersects with the first direction second direction arrangement.
2. wearable pressure sensor as described in claim 1, which is characterized in that the height of the protrusion is 10~50 μm；
Spacing distance between the adjacent protrusions of the micro-structure is 10~100 μm.
3. wearable pressure sensor as described in claim 1, which is characterized in that the protrusion is hung down with the first direction
Straight section is roughly triangular, rectangle, square, trapezoidal, arch or semicircle；The protrusion is in said first direction
In dotted or linear distribution.
4. wearable pressure sensor as described in claim 1, which is characterized in that the protrusion is in a manner of periodic lattice
Arrangement.
5. wearable pressure sensor as described in claim 1, which is characterized in that first conductive layer and described second is led
Electric layer includes at least one of carbon nanotube, graphene, conductive metal particles or conductive metal nano wire；The carbon nanotube
Diameter be 10~80nm, length is 2~10 μm；The first electrode and the second electrode include silver nano-grain.
6. a kind of manufacturing method of wearable pressure sensor, which comprises the following steps:
(1) PDMS substrate is prepared；
(2) it is etched using a surface of the femto-second laser to the PDMS substrate, being formed has the micro- of periodic arrangement
The pattern of slot；
(3) reverse mould is carried out as mold using the PDMS substrate for being formed with the pattern, prepares the micro-structure with periodic arrangement
The first PDMS film；
(4) applying conductive coating is on first PDMS film to form the first conductive layer, on first conductive layer
One end is coated with nano-silver conductive thickener to form first electrode, so that first electrode portion be made；
(5) preparation has the second PDMS film of flat surfaces, and applying conductive coating is on the flat surfaces to form second
Conductive layer, one end coating nano-silver conductive thickener on the second conductive layer is to form second electrode, to be made second
Electrode portion；
(6) by the first electrode portion and the second electrode portion with the micro-structure of first PDMS film and described second
The mode that the flat surfaces of PDMS film are opposite is laminated, and wearable pressure sensor is made.
7. the manufacturing method of wearable pressure sensor as claimed in claim 6, which is characterized in that the femto-second laser
Sweep speed is 10~50mm/s, and laser power is 1~10W, and umber of pulse is 800~1200kHz.
8. the manufacturing method of wearable pressure sensor as claimed in claim 6, which is characterized in that the micro-structure includes more
A protrusion, the multiple protrusion is prominent from the surface of first PDMS film, and on the surface of first PDMS film
It extends in a first direction, and is arranged along the second direction intersected with the first direction.
9. the manufacturing method of wearable pressure sensor as claimed in claim 6, which is characterized in that the PDMS substrate, institute
It states the first PDMS film and second PDMS film and passes through the mass ratio by the presoma of PDMS and curing agent according to 10:1
Mixing is solidified after removing bubble obtained in a vacuum.
10. the manufacturing method of wearable pressure sensor as claimed in claim 6, which is characterized in that the conductive coating packet
At least one of carbon nanotubes, graphene, conductive metal particles or conductive metal nano wire；The concentration of the conductive coating
For 5~10mg/ml；The diameter of the carbon nanotube is 10~80nm, length is 2~10 μm.
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