CN109298405A - A kind of scanning means - Google Patents
A kind of scanning means Download PDFInfo
- Publication number
- CN109298405A CN109298405A CN201811366207.5A CN201811366207A CN109298405A CN 109298405 A CN109298405 A CN 109298405A CN 201811366207 A CN201811366207 A CN 201811366207A CN 109298405 A CN109298405 A CN 109298405A
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- China
- Prior art keywords
- angle measurement
- scanning
- light source
- scanning means
- receiving unit
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Optical Radar Systems And Details Thereof (AREA)
- Measurement Of Optical Distance (AREA)
Abstract
The present invention provides a kind of scanning means, including scan module and angle measurement module, the first pre-determined distance of scan module and angle measurement modular spacing, scan module includes scanning substrate, scanning substrate includes movable part, movable part has the first face for reflecting angle measurement light beam, angle measurement module includes light source and receiving unit, the second pre-determined distance of light source and receiving unit interval, light source is used to issue angle measurement light beam towards the first face, for the receiving side of receiving unit towards the first face, the angle measurement light beam that light source issues is reflexed to receiving unit by the first face.The invention rotates angle by the movable part that angle measurement module measures scan module, specifically the space coordinate of movable part is obtained by measuring displacement using psd position sensor, to improve the response speed of position resolution and measurement.
Description
Technical field
The present invention relates to technical field of laser detection, in particular to a kind of scanning means.
Background technique
In automatic Pilot technology, it is autonomous driving vehicle peace that context aware systems, which are basis and a vital ring,
The guarantee of full property and intelligence, in environment sensing sensor laser radar reliability, investigative range, in terms of have
There is incomparable advantage.Laser radar by emitting and receiving laser beam, analysis laser encounter after target object when turning back
Between, calculate the relative distance of target object and vehicle.
Machinery rotating type laser radar is driven by a motor reflecting mirror or drives whole mechanical-optical setup rotation, can obtain compared with
Big field range, especially integrally rotated laser radar can be directly realized by 360 ° of non-blind area measurements of horizontal direction.However machine
Since system structure is relative complex, and there are moving component, reliability needs further strengthen tool rotary laser radar.With
The continuous propulsion of automatic Pilot technology, scanning mirror laser radar be considered an important skill in solid-state laser radar scheme
Art route, by rotatable galvanometer come the light of reflection laser, to realize scanning.Scan what mirror laser radar needed
Laser emitter and receiver are relatively fewer, and system structure is relatively easy, and at work, only galvanometer is in a certain range
Interior swing, so, laser radar itself do not have to significantly be rotated again, increase the reliability of system.
Scanning mirror laser radar needs rotation or swing angle to galvanometer to measure at work, so that it is determined that respectively
Beam measures space Angle Position of the laser when encountering barrier, these space Angle Positions and has been based on time difference calculated barrier
Object distance is hindered to combine and the location and shape of barrier have been determined.Rotation of the angle measurement coil to galvanometer is generallyd use in the prior art
Turn or swing angle measures, is a kind of indirect measurement method using angle measurement coil measurement, first measures the speed of galvanometer, then
The space coordinate of galvanometer further can be just obtained by analytical Calculation, will increase system operations amount in actual use.
Summary of the invention
To solve at least one above-mentioned technical problem, first aspect present invention discloses a kind of scanning means, including scanning
Module and angle measurement module, the scan module and first pre-determined distance of angle measurement modular spacing,
The scan module includes scanning substrate, and the scanning substrate includes movable part, and the movable part has for anti-
The first face of angle measurement light beam is penetrated,
The angle measurement module includes light source and receiving unit, the light source and the receiving unit interval second it is default away from
From, the light source for issuing angle measurement light beam towards first face, the receiving side of the receiving unit is towards described first
Face, the angle measurement light beam that first face issues the light source reflex to the receiving unit.
Further, the movable part also has the second face for reflecting scanning light beam, and second face is located at described
Side of the movable part far from the angle measurement module.
As an implementation, the angle measurement module further includes light source fixing frame, and the light source is laser, described to swash
Light device is fixed on the light source fixing frame, and plane where the exit facet of the laser and the scanning substrate is default in first
Angle；
The angle measurement module further includes receiving fixed frame, and the reception fixed frame has the first mounting surface, the reception group
Part is installed on first mounting surface, and plane where first mounting surface and the scanning substrate is in the second default angle.
As an implementation, the angle measurement module further includes bracket, and the bracket has the first mounting portion and second
Mounting portion,
The light source is laser, and the laser is fixed on first mounting portion, the exit facet of the laser with
Plane where the scanning substrate is in the first default angle；
Second mounting portion has the first mounting surface, and the receiving unit is installed on first mounting surface, described
Plane where first mounting surface and the scanning substrate is in the second default angle.
Further, the receiving unit includes optical filter and position sensor, the position sensor and the optical filtering
Piece is set gradually along the direction far from first mounting surface.
Further, the receiving unit further includes pinboard, and the pinboard is connect with first mounting surface, described
Position sensor and the optical filter are successively set on the pinboard along the direction far from first mounting surface.
Preferably, the receiving unit further includes delustring cylinder, and the delustring cylinder is located at the position sensor described in
The side of scanning substrate.
Further, the delustring cylinder is in tapered configuration, cross section of the delustring cylinder close to described scanning substrate one end
Product is less than cross-sectional area of the delustring cylinder far from described scanning substrate one end.
Further, the scanning means further includes shell, and the shell is box like structure open at one end, the shell
With accommodating space, scan module setting in the accommodating space, the angle measurement module section or is entirely located in described
In accommodating space.
Further, the scanning means further includes sealing plate, and the sealing plate is installed on the open at one end of the shell, described
Scan module is installed on the sealing plate towards the side in the accommodating cavity by connector.
Further, the scanning substrate further includes the first torsional axis and third support portion, and the movable part passes through described
First torsional axis is connected with the third support portion, and the movable part can be around the first torsional axis rotary motion.
Second aspect of the present invention discloses a kind of laser radar, including scanning means described above.
By adopting the above technical scheme, scanning means of the present invention has the following beneficial effects:
1) invention rotates angle by the movable part that angle measurement module measures scan module, specifically uses psd position sensing
Device can obtain the space coordinate of movable part by measuring displacement, and position resolution is high, fast response time, and processing circuit is simple；
2) by the cooperation of the shell and the sealing plate, the angle measurement module and the scan module can be sealed for the invention
Dress is the high scanning means small in size and compact-sized of a free-standing integrated level, and can preparatory adjustment, be easily installed and make
With.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment
Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings other
Attached drawing.
Fig. 1 is the scanning means perspective view of one embodiment of the invention；
Fig. 2 is the main view of Fig. 1；
Fig. 3 is the cross-sectional view in the direction A-A in Fig. 2；
Fig. 4 is the light source fixing frame of one embodiment of the invention, receives fixed frame and movable part arrangement schematic diagram；
Fig. 5 is the scanning means perspective view of another embodiment of the present invention；
Fig. 6 is the main view of Fig. 5；
Fig. 7 is the cross-sectional view in the direction B-B in Fig. 6；
Fig. 8 is the perspective view at another visual angle of Fig. 5 scanning means；
Fig. 9 is light source, receiving unit and the bracket assembling schematic diagram of one embodiment of the invention；
Figure 10 is the scanning substrate schematic diagram of one embodiment of the invention.
It remarks additionally below to attached drawing:
1- scan module；10- scanning substrate；101- movable part；The first face 1011-；The second face 1012-；102- first is turned round
Shaft；103- third support portion；104- reflecting mirror；The second torsional axis of 105-；106- outline border；
2- angle measurement module；21- light source；22- receiving unit；23- light source fixing frame；24- receives fixed frame；241- first
Support part；The second support portion of 242-；25- bracket；The first mounting portion of 251-；The second mounting portion of 252-；26- optical filter；27- switching
Plate；28- position sensor；29- delustring cylinder；
3- shell；4- sealing plate.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description.Obviously, described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art without creative labor it is obtained it is all its
His embodiment, shall fall within the protection scope of the present invention.
" one embodiment " or " embodiment " referred to herein, which refers to, may be included at least one implementation of the invention
A particular feature, structure, or characteristic.In the description of the present invention, it is to be understood that, term " on ", "lower", "top", "bottom" etc.
The orientation or positional relationship of instruction is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of the description present invention and letter
Change description, rather than the device or element of indication or suggestion meaning must have a particular orientation, with specific orientation construct and
Operation, therefore be not considered as limiting the invention.In addition, term " first ", " second " are used for description purposes only, and cannot
It is interpreted as indication or suggestion relative importance or implicitly indicates the quantity of indicated technical characteristic.Define as a result, " the
One ", the feature of " second " can be expressed or what is implied includes one or more of the features.Moreover, term " first ",
" second " etc. is to be used to distinguish similar objects, without being used to describe a particular order or precedence order.It should be understood that in this way
The data used are interchangeable under appropriate circumstances, so that the embodiment of the present invention described herein can be in addition to scheming herein
Sequence other than those of showing or describe is implemented.
In conjunction with shown in Fig. 1-Figure 10, the embodiment of the present invention provides a kind of scanning means, including scan module 1 and angle measurement module
2, the scan module 1 and the angle measurement module 2 are spaced the first pre-determined distance, and the scan module 1 includes scanning substrate 10, institute
The side that angle measurement module 2 is located at the scanning substrate 10 is stated, the scanning substrate 10 includes movable part 101, the movable part 101
With the first face 1011 for reflecting angle measurement light beam,
The angle measurement module 2 is used to measure the rotation angle of the movable part 101, and the angle measurement module 2 includes light source 21
With receiving unit 22, the light source 21 and the receiving unit 22 are spaced the second pre-determined distance, the light outgoing side of the light source 21
To towards first face 1011, the receiving side of the receiving unit 22 is towards first face 1011, first face 1011
Light beam for issuing the light source 21 reflexes to the receiving unit 22.
In some embodiments, the movable part 101 also has the second face 1012 for reflecting scanning light beam, and described the
Two faces 1012 are located at side of the movable part 101 far from the angle measurement module 2.
In some embodiments, as shown in Figure 3 and Figure 4, the angle measurement module 2 further includes light source fixing frame 23, the light
Source 21 is laser, and the laser is fixed on the light source fixing frame 23, the exit facet of the laser and the scanning
10 place plane of substrate is in the first default angle；
The angle measurement module 2 further includes receiving fixed frame 24, and the reception fixed frame 24 has the first mounting surface, described to connect
It receives component 22 to be installed on first mounting surface, first mounting surface and the 10 place plane of scanning substrate are pre- in second
If angle.Specifically, the reception fixed frame 24 includes the first support portion 241 and the second support portion 242, first support portion
241 connect with second support portion 242, and second support portion 242 is wedge structure, and first mounting surface is the wedge
The inclined-plane of shape structure.
In some embodiments, as shown in Figure 5-Figure 7, the angle measurement module 2 can not include the light source fixing frame 23
With the reception fixed frame 24, the angle measurement module 2 only includes bracket 25, corresponding by the light source fixing frame 23 and the reception
The function solid type of fixed frame 24 is integrated on the bracket 25, and the bracket 25 has the first mounting portion 251 and the second installation
Portion 252,
The light source 21 is laser, and the laser is fixed on first mounting portion 251, the outgoing of the laser
Face and the 10 place plane of scanning substrate are in the first default angle；
Second mounting portion 252 has the first mounting surface, and the receiving unit 22 is installed on first mounting surface,
First mounting surface and the 10 place plane of scanning substrate are in the second default angle.For example, the first default angle is
60 degree, the second default angle is 60 degree.It should be noted that in other embodiments, the first default angle and institute
It states the second default angle and is not limited to 60 degree, can also be 45 degree etc. or the first default angle and the degree of the second predetermined angle not phase
Deng specific degree, which can according to need, makes adjustment.
In some embodiments, the laser can be solid state laser, gas laser, semiconductor diode laser
Device and optical fiber laser etc..
In some embodiments, as shown in figs. 4 and 7, the receiving unit 22 includes optical filter 26, pinboard 27 and position
Sensor 28 is set, the pinboard 27, the position sensor 28 and the optical filter 26 are along separate first mounting surface
Direction is set gradually, and the pinboard 27 is connect with first mounting surface, and the optical filter 26 is for filtering out preset wavelength
Optical signal other than range.In other embodiments, the receiving unit 22 can not also include pinboard, the position
Sensor 28 and the optical filter 26 are directly arranged on the first mounting surface along the direction far from first mounting surface.Institute's rheme
Setting sensor 28 is psd position sensor, for measuring the position coordinates of the movable part 101.It can using psd position sensor
To obtain the space coordinate of movable part 101 by measuring displacement, position resolution is high, fast response time, and processing circuit is simple.
In some embodiments, as shown in figures 7 and 9, the receiving unit 22 further includes delustring cylinder 29, the delustring cylinder
29 are located at the position sensor 28 towards the side of the scanning substrate 10, and the delustring cylinder 29 can be barrel and be parallel to each other
Straight tube, moreover it is preferred that the delustring cylinder 29 can also be in tapered configuration, i.e. barrel gradually collapse from bottom to top
Cylinder, that is to say, that cross-sectional area of the delustring cylinder 29 close to described 10 one end of scanning substrate is less than the delustring cylinder 29 far from institute
State the cross-sectional area of 10 one end of scanning substrate.Specifically, the tapered configuration can be the bucket-shaped structure in side, cone structure or funnel
Shape structure etc..The top of the delustring cylinder 29 is arranged close to the first face 1011 of the movable part 101, but does not interfere described movable
The rotation in portion 101.The adverse effect that the delustring cylinder 29 is used to eliminate stray light in scanning means for psd position sensor,
It is passed so that the angle measurement light beam only issued from the light source 21 reflexes to the position psd via the first face 1011 of the movable part 101
On sensor.Moreover it is preferred that it is uniformly coated with extinction material on the inner wall of the delustring cylinder 29, for absorbing stray light, with
Prevent stray light from reflexing on psd position sensor via the inner wall of delustring cylinder 29.In possible embodiment, the delustring
The cross section of cylinder 29 can also be polygon.
In some embodiments, as shown in Figure 1 and Figure 5, the scanning means further includes shell 3, and the shell 3 is one end
The box like structure of opening, the shell 3 have accommodating space, and the survey in the accommodating space is arranged in the scan module 1
Corner Block List Representation 2 can be positioned partially or entirely in the accommodating space.
In some embodiments, as shown in figure 3, the shell 3 have with the opposite the first side wall of the opening, described the
One side wall is equipped with through-hole, when the light source fixing frame 23 and the reception fixed frame 24 are separately provided, the light source fixing frame
23 and the fixed frame 24 that receives be fixed on the periphery of the through-hole by connector respectively, the laser is towards the opening
One end extend in the accommodating space, the receiving unit 22 is positioned partially or entirely in the accommodating space.Possible
Embodiment in, the light source fixing frame 23 and the reception fixed frame 24 can be fixed on first side by connector
The inner wall of wall, the first side wall does not need to open up the through-hole at this time.
In some embodiments, as shown in fig. 7, the shell 3 have with the opposite the first side wall of the opening, described the
One side wall is equipped with through-hole, and the light source fixing frame 23 and 24 integral type of reception fixed frame are integrated on the bracket 25
When, the bracket 25 is fixed on side of the first side wall far from the opening by connector, and the laser is towards institute
The one end for stating opening extends in the through-hole, the receiving unit 22 pass through the through-hole, 22 part of receiving unit or
It is entirely located in the accommodating space.In possible embodiment, the bracket 25 can be fixed on described by connector
The inner wall of the first side wall, the first side wall does not need to open up the through-hole at this time.
In some embodiments, as shown in Figure 1 and Figure 5, the scanning means further includes sealing plate 4, and the sealing plate 4 is installed on
The open at one end of the shell 3, the scan module 1 are installed on the sealing plate 4 towards in the accommodating cavity by connector
Side.By the cooperation of the shell 3 and the sealing plate 4, the angle measurement module 2 and the scan module 1 can be encapsulated as
The high scanning means of one integrated level, and can preparatory adjustment, be easily installed and use.
In some embodiments, as shown in Figure 10, the scanning substrate 10 further includes the first torsional axis 102 and third support
Portion 103, the movable part 101 are connected by first torsional axis 102 with the third support portion 103, the movable part 101
It can be around 102 rotary motion of the first torsional axis；When the movable part 101 is located at initial position, the movable part 101 with
The third support portion 103 is in the same plane.It should be noted that in other embodiments, the scanning substrate 10 can
Only to have the first torsional axis 102, scanning means is uniaxial Scan Architecture at this time, can be used for carrying out optics in one-dimensional direction
Scanning.
In some embodiments, as shown in Figure 10, the movable part 101 includes reflecting mirror 104,105 and of the second torsional axis
Outline border 106, the outline border 106 are connect by first torsional axis 102 with the third support portion 103, the reflecting mirror 104
It is connect by second torsional axis 105 with the outline border 106, i.e., the described reflecting mirror 104 can have two torsional axis, described
First torsional axis 102 is used as slow scanning axis, and second torsional axis 105 is used as fast scan axis, the fast scan axis and slow scanning
Axis has difference on the frequency, and the reflecting mirror 104 can be realized raster scanning.Specifically, first torsional axis 102 and described
Two torsional axis 105 can be mutually perpendicular to, and be for respectively forming the mode of resonance of different directions, such as horizontal resonance mould and vertical resonance
Mould.Specifically, the reflecting mirror 104 has towards first face 1011 of the angle measurement module 2 and far from the angle measurement mould
Second face 1012 of block 2.
In some embodiments, the scan module 1 further includes magnet assembly and driving coil, and the magnet assembly is used for
Generate magnetic field, the magnetic field have the driving coil magnetic-field component planar；The driving coil is set to institute
It states on movable part 101, for when inputting driving current, stress to rotate and the movable part 101 is driven to revolve in the magnetic field
Turn.
In some embodiments, the scanning means can also include various circuit boards, conducting wire etc..
The embodiment of the present invention also provides a kind of laser radar, including scanning means described above.
The foregoing is merely presently preferred embodiments of the present invention, is not intended to limit the invention, it is all in spirit of the invention and
Within principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (12)
1. a kind of scanning means, which is characterized in that including scan module (1) and angle measurement module (2), the scan module (1) and
The angle measurement module (2) is spaced the first pre-determined distance,
The scan module (1) includes scanning substrate (10), and the scanning substrate (10) includes movable part (101), described movable
Portion (101) has the first face for reflecting angle measurement light beam,
The angle measurement module (2) includes light source (21) and receiving unit (22), the light source (21) and the receiving unit (22)
It is spaced the second pre-determined distance, the light source (21) is used to issue angle measurement light beam, the receiving unit (22) towards first face
Receiving side towards first face, the angle measurement light beam that first face issues the light source (21) reflexes to described connect
It receives component (22).
2. scanning means according to claim 1, which is characterized in that the movable part (101) also has sweeps for reflecting
The second face of light beam is retouched, second face is located at side of the movable part (101) far from the angle measurement module (2).
3. scanning means according to claim 1, which is characterized in that the angle measurement module (2) further includes light source fixing frame
(23), the light source (21) is laser, and the laser is fixed on the light source fixing frame (23), and the laser goes out
Plane is in the first default angle where penetrating face and the scanning substrate (10)；
The angle measurement module (2) further includes receiving fixed frame (24), and the reception fixed frame (24) has the first mounting surface, described
Receiving unit (22) is installed on first mounting surface, and first mounting surface is in plane where the scanning substrate (10)
Second default angle.
4. scanning means according to claim 1, which is characterized in that the angle measurement module (2) further includes bracket (25), institute
Stating bracket (25) has the first mounting portion and the second mounting portion,
The light source (21) is laser, and the laser is fixed on first mounting portion, the exit facet of the laser with
Plane where the scanning substrate (10) is in the first default angle；
Second mounting portion has the first mounting surface, and the receiving unit (22) is installed on first mounting surface, described
Plane where first mounting surface and the scanning substrate (10) is in the second default angle.
5. scanning means according to claim 3 or 4, which is characterized in that the receiving unit (22) includes optical filter
(26) and position sensor (28), the position sensor (28) and the optical filter (26) are along separate first mounting surface
Direction is set gradually.
6. scanning means according to claim 5, which is characterized in that the receiving unit (22) further includes pinboard
(27), the pinboard (27) connect with first mounting surface, the position sensor (28) and the optical filter (26) edge
Direction far from first mounting surface is successively set on the pinboard (27).
7. scanning means according to claim 6, which is characterized in that the receiving unit (22) further includes delustring cylinder
(29), the delustring cylinder (29) is located at side of the position sensor (28) towards the scanning substrate (10).
8. scanning means according to claim 7, which is characterized in that the delustring cylinder (29) is in tapered configuration, described to disappear
Cross-sectional area of the light cylinder (29) close to the scanning substrate (10) one end is less than the delustring cylinder (29) far from the scanning substrate
(10) cross-sectional area of one end.
9. according to scanning means described in claim 5 any one, which is characterized in that the scanning means further includes shell
(3), the shell (3) is box like structure open at one end, and the shell (3) has accommodating space, and the scan module (1) sets
It sets in the accommodating space, the angle measurement module (2) is positioned partially or entirely in the accommodating space.
10. scanning means according to claim 9, which is characterized in that the scanning means further includes sealing plate (4), described
Sealing plate (4) is installed on the open at one end of the shell (3), and the scan module (1) is installed on the sealing plate (4) by connector
Side towards in the accommodating cavity.
11. scanning means according to any one of claims 1-4, which is characterized in that the scanning substrate (10) is also wrapped
The first torsional axis and third support portion are included, the movable part (101) passes through first torsional axis and the third support portion phase
Even, the movable part (101) can be around the first torsional axis rotary motion.
12. a kind of laser radar, which is characterized in that including scanning means described in claim 1-11 any one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811366207.5A CN109298405B (en) | 2018-11-16 | 2018-11-16 | Scanning device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811366207.5A CN109298405B (en) | 2018-11-16 | 2018-11-16 | Scanning device |
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| CN109298405A true CN109298405A (en) | 2019-02-01 |
| CN109298405B CN109298405B (en) | 2021-01-01 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110456326A (en) * | 2019-08-31 | 2019-11-15 | 上海禾赛光电科技有限公司 | A kind of scanning means and laser radar and operating method including it |
| CN110780279A (en) * | 2019-10-30 | 2020-02-11 | 上海禾赛光电科技有限公司 | Scanning mirror assembly and lidar comprising same |
| CN111766585A (en) * | 2019-03-13 | 2020-10-13 | 探维科技(北京)有限公司 | Laser radar |
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