CN109297940A - One kind laser defocusing amount self-checking device and its adjusting method under micro-meter scale - Google Patents
One kind laser defocusing amount self-checking device and its adjusting method under micro-meter scale Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0202—Mechanical elements; Supports for optical elements
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- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/443—Emission spectrometry
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Abstract
The present invention relates to atomic emission detection technical fields, in particular to one kind laser defocusing amount self-checking device and its adjusting method under micro-meter scale.Described device includes a laser pen, a beam shaping system and one piece of beam splitter are configured on the central axis of laser pen transmitting light beam, the beam angle of beam splitter and laser pen is 45 °, beam splitter upper and lower sides are equipped with the micro-imaging optical system for observe and detect sample surfaces laser pen hot spot to sample surface morphology, the lower section of micro-imaging optical system is equipped with the three-dimensional objective table for carrying sample, and micro-imaging optical system and three-dimensional objective table are electrically connected with control host.Micro-imaging optical system includes the CCD camera and microcobjective positioned at beam splitter upper and lower sides.The present invention can utilize CCD camera real-time image acquisition, and real-time judge is in real time corrected laser defocusing amount, and the consistency that plasma pattern is generated on sample for guarantee laser is of great significance.
Description
Technical field:
The present invention relates to atomic emission detection technical fields, in particular to one kind laser defocusing amount under micro-meter scale
Self-checking device and its adjusting method.
Background technique:
Laser induced breakdown spectroscopy micro-region analysis technique has an analysis, and speed is fast, sample preparation is simple, operation and maintenance compared with
The advantages that facilitating can overcome the disadvantages that the deficiency of traditional micro-zone analysis method.In recent years, very high concern has been obtained.Laser and substance
The microcosmic mechanism of interaction is more complicated, and laser directly results in laser and focus on sample in the difference of sample surfaces defocusing amount
The difference of the power density on surface, so that (electron density, plasma temperature, ion are close for the plasma inner parameter excited
Degree etc.) and generated plasma pattern have biggish difference.In specific micro-zone analysis, laser beam generally passes through aobvious
Speck mirror tightly focused is in sample surfaces, so that the plasma form generated causes to visit to the defocusing amount quite sensitive of sample surfaces
It is unstable to survey the collected optic spectrum line of device institute, the result of strong influence material composition qualitative and quantitative analysis.
Summary of the invention:
In order to overcome the above-mentioned deficiencies of the prior art, the present invention provides one kind laser defocusing amount under micro-meter scale and adjusts automatically
Regulating device and its adjusting method, be mainly used in LIBS system under micro-meter scale to metal, semiconductor, animal or plant specimen etc. into
When row scanning analysis, the High Precision Automatic adjusting of laser beam defocusing amount substantially increases the precision of focusing.
To achieve the goals above, the technical solution adopted by the present invention is that:
One kind laser defocusing amount self-checking device under micro-meter scale, including a laser pen, the laser pen emit light
It is configured with a beam shaping system and one piece of beam splitter on the central axis of beam, the beam angle of the beam splitter and laser pen is
45 °, the beam splitter upper and lower sides are equipped with for carrying out observation to sample surface morphology and carrying out to sample surfaces laser pen hot spot
The micro-imaging optical system of detection, the lower section of the micro-imaging optical system are equipped with the three-dimensional loading for carrying sample
Platform, the micro-imaging optical system and three-dimensional objective table are electrically connected with control host.
The micro-imaging optical system includes CCD camera and microcobjective, the upside of the beam splitter and perpendicular to swashing
CCD camera is arranged in light pen beam center axis direction, the downside of the beam splitter and sets perpendicular to laser pen beam center axis direction
Microcobjective is set, the microcobjective is connected with piezoelectric ceramics, and the CCD camera and piezoelectric ceramics are electric with the control host
Property connection.
The segment beam of the laser pen is converged in sample surfaces by microcobjective by the beam splitter, and passes through transmission
Part focal beam spot is turned back light beam, and the hot spot brightness that the CCD camera is detected is weakened.
The piezoelectric ceramics can drive the microcobjective to move up and down, and realize that laser defocusing amount is quickly adjusted.
The three-dimensional objective table can control sample and move up and down, make institute when focusing amount is more than the piezoelectric ceramics stroke
Piezoelectric ceramics work is stated in scheduled stroke range.
The optical path that the beam shaping system generates the laser pen is adjusted, the light beam for generating the laser pen
The spot size of focus change rate maximum and laser generate the position consistency of stable plasma on sample.
A kind of adjusting method of laser defocusing amount self-checking device under micro-meter scale, firstly, establishing laser
The model of defocusing amount and picture region speck pixel number, then be adjusted, specific adjusting method, comprising the following steps:
Step 1): N figures of CCD camera acquisition are utilized；
Step 2): the pixel number of the average speck of N picture is solved；
Step 3): using the model of laser defocusing amount and picture region speck pixel number, laser defocusing amount is calculated；
Step 4): driving three-dimensional objective table and piezoelectric ceramics carry out automatic focusing；
Step 5): it repeats above step 1,2,3 and 4 and then shows this when step 3 focusing amount obtained is less than 1 μm
Focusing terminates.
In step 1), 2 < N < 10.
Using the speck pixel number of the picture region of CCD camera capture, light is obtained by speck pixel number
The size of spot size.
Obtain the size of spot size using the speck pixel number of the picture region of CCD camera capture, including with
Lower step:
Step 1): first being handled picture captured by CCD camera using median filter, eliminates the spiced salt in picture
The influence of noise；
Step 2): picture is normalized (0-1), is then set suitable threshold value for picture and is carried out binaryzation；
Step 3): size of the pixel number that pixel value is 1 in solution picture as facular area size.
It is of the invention a little and beneficial effect is:
One kind laser defocusing amount self-checking device and its adjusting method under micro-meter scale provided by the invention, utilize
CCD camera obtains focused spot size image, by using calculate hot spot pixel number in picture number estimate hot spot
The variation of the difference in region drives three-dimensional objective table and the piezoelectric ceramics to cooperate, to reach laser defocusing amount in micron meter
The lower purpose automatically adjusted of degree.Which can utilize CCD camera real-time image acquisition, real-time judge, in real time to laser defocusing amount
It is corrected, the consistency that plasma pattern is generated on sample for guarantee laser is of great significance.
Detailed description of the invention:
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is the structural schematic diagram of working condition of the present invention；
Fig. 3 is the working principle of the invention schematic diagram.
In figure: 1. laser pens, 2. beam shaping systems, 3. beam splitters, 4.CCD camera, 5. microcobjectives, 6. piezoelectricity pottery
Porcelain, 7. three-dimensional objective tables, 8. laser energy choking devices, 9. laser energy attenuators, 10. diaphragms, 11. lasers, 12. computers,
13.DG645 sequence controller, 14. spectrometers, 15. optical fiber, 16. spectral collection devices, 17. wavelength are the reflecting mirror of 1064nm
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, right in the following with reference to the drawings and specific embodiments
The present invention is described in detail.
As shown in Figs. 1-2, one kind laser defocusing amount self-checking device under micro-meter scale provided by the invention, including one
Laser pen 1, regulation light source of the laser pen 1 as this focusing.It is whole that a light beam is configured on the central axis of the transmitting light beam of laser pen 1
Shape system 2 and one piece of beam splitter 3, the beam angle of beam splitter 3 and laser pen 1 are 45 °, 3 upper and lower sides of beam splitter be equipped with for pair
Sample surface morphology carries out observation and to the micro-imaging optical system that sample surfaces laser pen hot spot is detected, micro-imaging
The lower section of optical system is equipped with three-dimensional objective table 7 for carrying sample, micro-imaging optical system and three-dimensional objective table 7 with
Host is controlled to be electrically connected.
Micro-imaging optical system includes CCD camera 4 and microcobjective 5, the upside of beam splitter 3 and perpendicular to laser pen 1
Beam center axis direction be arranged CCD camera 4, the downside of beam splitter 3 and perpendicular to laser pen beam center axis direction be arranged it is micro-
Object lens 5, microcobjective 5 are connected with piezoelectric ceramics 6, and CCD camera 4 and piezoelectric ceramics 6 are electrically connected with control host.
CCD camera 4 and microcobjective 5 form micro-imaging optical system, on the one hand observe sample surface morphology,
On the other hand sample surfaces laser pen hot spot is detected.
The segment beam of laser pen 1 is converged in sample surfaces by microcobjective 5 by beam splitter 3, and passes through transmissive portion
Focal beam spot is turned back light beam, and the hot spot brightness that CCD camera 4 is detected is weakened.
The working frequency of piezoelectric ceramics 6 is high, and the response time is short, and microcobjective 5 can be driven to move up and down, realize laser from
Coke amount is quickly adjusted.
Three-dimensional objective table 7 can control sample and move up and down, make piezoelectric ceramics 6 when focusing amount is more than 6 stroke of piezoelectric ceramics
Work is in scheduled stroke range.
Beam shaping system 2 includes the concave mirror and convex lens set gradually along the light beam of laser pen 1, beam shaping system
The optical path that 2 pairs of laser pens 1 generate is adjusted, the light for the light beam focus change rate larger part on sample for generating laser pen 1
Spot size and laser beam generate the position consistency of stable plasma.
As shown in Fig. 2, being the structural schematic diagram of working condition of the present invention.Laser 11 generates laser, and laser beam passes through
On the one hand diaphragm 10 and energy attenuator 9 optimize laser beam forward position and weaken laser energy.Secondly, light beam is whole by light beam
Shape system 22 reduces the angle of divergence of laser beam.Light beam is converged after the reflecting mirror 17 of 1064nm by focusing objective len 5 by wavelength
Gather in sample surfaces.In addition, spectral collection device 16 is connected on spectrometer by optical fiber 15.DG645 sequence controller 14 is used
Between when receiving light with spectrometer between when adjusting laser and going out light, spectrometer is enable to be collected into stronger plasma emission spectral line.
Computer 12 is used to control the operating status of whole system.
The working principle of the invention is: laser defocus volume automatic regulation method uses a laser beam focus model.Such as
Shown in Fig. 3, in the ideal case, when light beam passes through lens, if the angle of converging beam and primary optical axis is θ, it is being parallel to
It focal plane and can be indicated with the area S of the focal plane apart spot size by being obtained at h are as follows:
S=π h2tan2θ (1)
It can be seen from (1) formula the area of hot spot with to focal plane quadratic function relation is presented, the present invention is exactly to utilize this
Feature come realize laser defocusing amount automatically adjust.
A kind of adjusting method of the laser defocusing amount self-checking device under micro-meter scale, before specific implementation, firstly, building
The model of vertical laser defocusing amount and picture region speck pixel number, comprising the following steps:
Step 1): moving up and down three-dimensional objective table 7, finds the smallest point of feux rouges focal beam spot, utilizes camera shooting N
Figure, and record the mean pixel point number of hot spot this moment, 2 < N < 10.
Step 2): by 1 μm of the every movement upwards of three-dimensional objective table 7, the method for repeating step 1.Until three-dimensional objective table 7 is upward
It is 100 μm mobile.
Step 3): the relative position that the pixel number of step 2 hot spot obtained and three-dimensional objective table 7 are run utilizes
One curve matching comes out, as this model of focusing.
Step 4) finds laser beam energy stable point, adjusts beam shaping system 2, makes laser pen at this time in sample
On spot size the model obtained at 50 μm is consistent with focus model.
In the specific implementation process of laser defocusing amount automatic adjustment, comprising the following steps:
Step 1): N figures, 2 < N < 10 are acquired using CCD camera 4；
Step 2): using the method for speck pixel number estimation spot size size, the average bright of this N picture is solved
The pixel number of spot；
Step 3): using the model of laser defocusing amount and picture region speck pixel number, laser defocusing amount is calculated；
Step 4): automatic focusing is carried out by driving three-dimensional objective table 7 and piezoelectric ceramics 6；
Step 5): it repeats above step 1,2,3 and 4 and then shows this when step 3 focusing amount obtained is less than 1 μm
Focusing terminates.
Using the speck pixel number for the picture region that CCD camera 4 captures, estimated by speck pixel number
The size for the picture illumination spot size that CCD camera 4 is detected.
The picture that CCD camera 4 is detected is estimated using the speck pixel number of the picture region of the capture of CCD camera 4
The size of illumination spot size, comprising the following steps:
Step 1): first being handled picture captured by CCD camera 4 using median filter, eliminates green pepper in picture
The influence of salt noise；
Step 2): being normalized 0-1 for picture, then sets suitable threshold value for picture and carries out binaryzation；
Step 3): size of the pixel number that pixel value is 1 in solution picture as facular area size.
One kind laser defocusing amount self-checking device and its adjusting method under micro-meter scale provided by the invention, utilize
CCD camera obtains focused spot size image, by using calculate hot spot pixel number in picture number estimate hot spot
The variation of the difference in region drives three-dimensional objective table and the piezoelectric ceramics to cooperate, to reach laser defocusing amount in micron meter
The lower purpose automatically adjusted of degree.Which can utilize CCD camera real-time image acquisition, real-time judge, in real time to laser defocusing amount
It is corrected, the consistency that plasma pattern is generated on sample for guarantee laser is of great significance.
Mode the above is only the implementation of the present invention is not intended to limit the scope of the present invention.It is all in the present invention
Spirit and principle within any modification, equivalent replacement, improvement, extension etc., be all contained in protection scope of the present invention
It is interior.
Claims (10)
1. one kind laser defocusing amount self-checking device under micro-meter scale, it is characterised in that: described including a laser pen (1)
A beam shaping system (2) and one piece of beam splitter (3), the beam splitting are configured on the central axis of laser pen (1) transmitting light beam
The beam angle of mirror (3) and laser pen (1) is 45o, and beam splitter (3) upper and lower sides are equipped with for carrying out to sample surface morphology
Observation and to the micro-imaging optical system that sample surfaces laser pen hot spot is detected, under the micro-imaging optical system
Side is equipped with three-dimensional objective table (7) for carrying sample, the micro-imaging optical system and three-dimensional objective table (7) with control
Host is electrically connected.
2. the laser defocusing amount self-checking device according to claim 1 under micro-meter scale, it is characterised in that: described aobvious
Micro- imaging optical system includes CCD camera (4) and microcobjective (5), the upside of the beam splitter (3) and perpendicular to laser pen
(1) beam center axis direction setting CCD camera (4), the downside of the beam splitter (3) and perpendicular to laser pen beam center axis side
To setting microcobjective (5), the microcobjective (5) is connected with piezoelectric ceramics (6), the CCD camera (4) and piezoelectric ceramics
(6) it is electrically connected with the control host.
3. the laser defocusing amount self-checking device according to claim 2 under micro-meter scale, it is characterised in that: described point
The segment beam of the laser pen (1) is converged in sample surfaces by microcobjective (5) by Shu Jing (3), and passes through transmissive portion
Focal beam spot is turned back light beam, and the hot spot brightness that the CCD camera (4) is detected is weakened.
4. the laser defocusing amount self-checking device according to claim 2 under micro-meter scale, it is characterised in that: the pressure
Electroceramics (6) can drive the microcobjective (5) to move up and down, and realize that laser defocusing amount is quickly adjusted.
5. the laser defocusing amount self-checking device according to claim 2 under micro-meter scale, it is characterised in that: described three
Objective table (7) are tieed up when focusing amount is more than the piezoelectric ceramics (6) stroke, sample is can control and moves up and down, the piezoelectricity is made to make pottery
Porcelain (6) works in scheduled stroke range.
6. the laser defocusing amount self-checking device according to claim 2 under micro-meter scale, it is characterised in that: the light
The optical path that beam orthopedic systems (2) generate the laser pen (1) is adjusted, and the light beam for generating the laser pen (1) is in sample
The spot size of focus change rate maximum and laser generate the position consistency of stable plasma on product.
7. a kind of adjusting using the described in any item laser defocusing amount self-checking devices under micro-meter scale of claim 2-6
Method, it is characterised in that: firstly, establishing the model of laser defocusing amount Yu picture region speck pixel number, then it is adjusted,
Specific adjusting method, comprising the following steps:
Step 1): N figures of CCD camera (4) acquisition are utilized；
Step 2): the pixel number of the average speck of N picture is solved；
Step 3): using the model of laser defocusing amount and picture region speck pixel number, laser defocusing amount is calculated；
Step 4): driving three-dimensional objective table (7) and piezoelectric ceramics (6) carry out automatic focusing；
Step 5): it repeats above step 1,2,3 and 4 and then shows this focusing when step 3 focusing amount obtained is less than 1 μm
Terminate.
8. the adjusting method of the laser defocusing amount self-checking device according to claim 7 under micro-meter scale, feature
It is: in step 1), 2 < N < 10.
9. the adjusting method of the laser defocusing amount self-checking device according to claim 7 under micro-meter scale, feature
It is: using the speck pixel number of the picture region of CCD camera (4) capture, light is obtained by speck pixel number
The size of spot size.
10. the adjusting method of the laser defocusing amount self-checking device according to claim 9 under micro-meter scale, feature
It is: obtains the size of spot size using the speck pixel number of the picture region of CCD camera (4) capture, including with
Lower step:
Step 1): first being handled picture captured by CCD camera (4) using median filter, eliminates the spiced salt in picture
The influence of noise；
Step 2): picture is normalized (0-1), is then set suitable threshold value for picture and is carried out binaryzation；
Step 3): size of the pixel number that pixel value is 1 in solution picture as facular area size.
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| CN109884032A (en) * | 2019-02-19 | 2019-06-14 | 中国科学院合肥物质科学研究院 | The pinpoint laser induced breakdown spectroscopy detection system of ablation point and method |
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