CN109244609B - A kind of square groove structure microwave filter with dual band operation characteristic - Google Patents
A kind of square groove structure microwave filter with dual band operation characteristic Download PDFInfo
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Abstract
本发明公开了一种具有双频段工作特性的方槽结构微波滤波器。包括介质板,介质板一表面上设有金属微带,另一表面设有金属地;所述金属微带的结构为:金属微带的中部设有人工表面等离激元段,人工表面等离激元段的两端分别经过渡段与微带波导段连接;所述的人工表面等离激元段和过渡段上沿金属微带的长度方向分布有镂空的方槽,相邻两方槽间经镂空的方带连接;处于过渡段的方槽的上、下边缘均为沿过渡段向微带波导段方向渐变收敛的曲线。本发明低传输损耗、反射特性小、带外抑制性能优,抗电磁干扰能力强,适应于高频集成电路的特点。
The invention discloses a square groove structure microwave filter with dual frequency band working characteristics. Including a dielectric board, one surface of the dielectric board is provided with a metal microstrip, and the other surface is provided with a metal ground; the structure of the metal microstrip is: the middle part of the metal microstrip is provided with an artificial surface plasmon section, an artificial surface, etc. The two ends of the plasmon section are respectively connected to the microstrip waveguide section through the transition section; the artificial surface plasmon section and the transition section are distributed with hollow square grooves along the length direction of the metal microstrip. The grooves are connected by a hollowed-out square belt; the upper and lower edges of the square groove in the transition section are curves that gradually change and converge along the transition section to the direction of the microstrip waveguide section. The invention has low transmission loss, small reflection characteristics, excellent out-of-band suppression performance, strong anti-electromagnetic interference ability, and is suitable for the characteristics of high-frequency integrated circuits.
Description
技术领域technical field
本发明涉及滤波器技术领域,特别是一种具有双频段工作特性的方槽结构微波滤波器。The invention relates to the technical field of filters, in particular to a square-slot microwave filter with dual-band operating characteristics.
背景技术Background technique
当今大数据时代,随着信息的需求量成爆炸式的增长,移动通讯领域要求能制造出集成度更高的微波器件,然而随着高频集成电路尺寸的不断缩小,技术上出现了一系列问题,例如当微波器件的尺寸小到一定的程度,器件的电磁干扰噪声,RC延迟等达到极限导致器件工作不稳定,因此现有的微波器件已不能适应当今大规模微波集成电路的发展。In today's big data era, with the explosive growth of information demand, the field of mobile communication requires the manufacture of microwave devices with higher integration. However, as the size of high-frequency integrated circuits continues to shrink, a series of technological Problems, such as when the size of the microwave device is small to a certain extent, the electromagnetic interference noise and RC delay of the device reach the limit, resulting in unstable operation of the device, so the existing microwave devices can no longer adapt to the development of today's large-scale microwave integrated circuits.
发明内容Contents of the invention
本发明的目的在于,提供一种具有双频段工作特性的方槽结构微波滤波器。本发明低传输损耗、反射特性小、带外抑制性能优越,抗电磁干扰能力强,适应于高频集成电路的特点。本发明还能利用周期性方槽形成的两种不同的本征模式,使得滤波器工作于两种不同的频段,实现滤波器的一功多能。The object of the present invention is to provide a microwave filter with a square slot structure with dual-band operating characteristics. The invention has low transmission loss, small reflection characteristics, superior out-of-band suppression performance, strong anti-electromagnetic interference ability, and is suitable for the characteristics of high-frequency integrated circuits. The present invention can also utilize two different eigenmodes formed by periodic square grooves, so that the filter works in two different frequency bands, and realizes one function and multiple functions of the filter.
本发明的技术方案:一种具有双频段工作特性的方槽结构微波滤波器,包括介质板,介质板一表面上设有金属微带,另一表面设有金属地;所述金属微带的结构为:金属微带的中部设有人工表面等离激元段,人工表面等离激元段的两端分别经过渡段与微带波导段连接;所述的人工表面等离激元段和过渡段上沿金属微带的长度方向分布有镂空的方槽,相邻两方槽间经镂空的方带连接;处于过渡段的方槽的上、下边缘均为沿过渡段向微带波导段方向渐变收敛的曲线。The technical solution of the present invention: a microwave filter with a square groove structure with dual-band operating characteristics, including a dielectric plate, one surface of the dielectric plate is provided with a metal microstrip, and the other surface is provided with a metal ground; the metal microstrip The structure is: the middle part of the metal microstrip is provided with an artificial surface plasmon section, and the two ends of the artificial surface plasmon section are respectively connected to the microstrip waveguide section through a transition section; the artificial surface plasmon section and On the transition section, there are hollow square grooves distributed along the length direction of the metal microstrip, and the adjacent two square grooves are connected by hollow square strips; the upper and lower edges of the square grooves in the transition section are along the transition section to the microstrip waveguide. A curve where the segment direction gradient converges.
前述的具有双频段工作特性的方槽结构微波滤波器中,所述的曲线为满足方程X=L1+L2*t3,Y=h*(exp(b*t-1)/(expb-1))的曲线;其中t为自变量参数,b为曲线形状系数,h为金属微带宽度;L1为微带波导段长度,L2为过渡段长度。In the aforementioned square slot structure microwave filter with dual-band operating characteristics, the curve is to satisfy the equation X=L 1 +L 2 *t 3 , Y=h*(exp(b*t-1)/(expb -1)) curve; where t is the independent variable parameter, b is the shape coefficient of the curve, h is the width of the metal microstrip; L 1 is the length of the microstrip waveguide section, and L 2 is the length of the transition section.
前述的具有双频段工作特性的方槽结构微波滤波器中,所述的h=2~8mm,L1=5~15mm,L2=10~60mm,t=0~1,b=6.5~80。In the aforementioned square groove structure microwave filter with dual-band operating characteristics, h=2-8mm, L 1 =5-15mm, L 2 =10-60mm, t=0-1, b=6.5-80 .
前述的具有双频段工作特性的方槽结构微波滤波器中,所述的介质板的厚度g=0.3~1.2mm,方槽的边长a=0.5~5.0mm,方带的宽β=0.5~3mm,方槽的周期p=1~8mm。In the aforesaid square groove structure microwave filter with dual-band operating characteristics, the thickness g of the dielectric plate=0.3~1.2mm, the side length a=0.5~5.0mm of the square groove, and the width β=0.5~5.0mm of the square band 3mm, the period of the square groove p=1~8mm.
与现有技术相比,本发明具有如下优点:Compared with prior art, the present invention has following advantage:
1.本发明在介质板的一表面设置金属微带,另一表面设置金属地,金属微带分为三段,分别是人工表面等离激元段(以下用其长度符号L3替代)、过渡段(以下用其长度符号L2替代)和微带波导段(以下用其长度符号L1替代);其中L3的两端分别经L2与L1连接;在L3和L2上、沿金属微带的长度方向分布有镂空的方槽,处于L2上的方槽的上、下边缘均为沿L2向L1方向渐变收敛的曲线;上述结构中,因处于L2上的方槽的上、下边缘均为沿L2向L1方向渐变收敛的曲线,实现了电磁场在L1和L3中传播的平稳过渡,避免了电磁场由准TEM模式转化为SSPPs模式传播时因模式和阻抗不匹配而出现的强烈的微波电场反射。1. In the present invention, a metal microstrip is arranged on one surface of the dielectric plate, and a metal ground is arranged on the other surface. The metal microstrip is divided into three sections, which are respectively the artificial surface plasmon section (substituted by its length symbol L3 below), The transition section (replaced by its length symbol L 2 below) and the microstrip waveguide section (replaced by its length symbol L 1 below); where the two ends of L 3 are connected to L 1 via L 2 respectively; on L 3 and L 2 , There are hollow square grooves distributed along the length direction of the metal microstrip, and the upper and lower edges of the square grooves on L2 are curves that converge gradually along the direction of L2 to L1 ; in the above structure, because they are on L2 The upper and lower edges of the square groove are curves that converge gradually along the direction of L 2 to L 1 , which realizes the smooth transition of electromagnetic field propagation in L 1 and L 3 , and avoids the transmission of electromagnetic field from quasi-TEM mode to SSPPs mode. Strong microwave electric field reflections due to mode and impedance mismatch.
针对本发明L2的方槽上、下边缘的曲线,申请人经过大量实验得出,在本发明的滤波器结构中,当L2的方槽的上、下边缘的曲线满足方程X=L1+L2*t3,Y=h*(exp(b*t-1)/(expb-1))时,电磁场传播的过渡最平稳;进一步地,申请人在不断地进行实验参数的修正时发现,本发明实现电磁场传播时平稳过渡的最佳参数如下:t=0~1,b=6.5~80,h=2~8mm,L1=5~15mm,L2=10~60mm。For the curves of the upper and lower edges of the square groove L2 of the present invention, the applicant has obtained through a large number of experiments that in the filter structure of the present invention, when the curves of the upper and lower edges of the square groove of L2 satisfy the equation X=L 1 +L 2 *t 3 , Y=h*(exp(b*t-1)/(expb-1)), the transition of electromagnetic field propagation is the most stable; further, the applicant is constantly correcting the experimental parameters It was found that the best parameters for the present invention to realize the smooth transition of electromagnetic field propagation are as follows: t=0~1, b=6.5~80, h=2~8mm, L 1 =5~15mm, L 2 =10~60mm.
2.本发明在L3上设置镂空的方槽,方槽间经镂空的方带连接。将该结构使用到本发明的微波器中,由于该周期性设置的方槽具有多种本征工作模式,利用波导端口能够激励出其中两种不同的偶模工作模式,于是本发明的滤波器就能在两种不同的微波频段工作,实现一个滤波器多种制式工作的能力。此外,该结构能让电磁场在界面传输时被束缚在方槽周围,从而大大降低了多条传输线传输时因间距太小而出现的电磁干扰,使得本发明抗干扰能力大大增强,同时也增强了本发明用于高密度微波集成电路中工作时的稳定性。不仅如此,因抗电磁干扰能力大大增强,本发明还能减小微波集成电路的金属微带间的间距以实现器件的小型化,因而能更好地适应当今大规模微波集成电路的发展。本发明还能通过调节方槽的几何尺寸来调控微波传输线的截止频率和电磁场分布,同时调整电磁波的束缚效果。申请人在进行大量的参数修正实验后发现,在本发明的微波器结构中,当方槽的边长a=0.5~5.0mm,方带的宽β=0.5~3mm,方槽周期p为1~8mm时,方槽对电磁场的束缚效果最佳。2. The present invention sets hollowed out square grooves on L 3 , and the square grooves are connected by hollowed out square belts. Applying this structure to the microwave of the present invention, since the periodically arranged square slots have multiple eigenoperating modes, two different even-mode operating modes can be excited by using the waveguide port, so the filter of the present invention It can work in two different microwave frequency bands, realizing the ability of one filter to work in multiple formats. In addition, this structure allows the electromagnetic field to be bound around the square groove when the interface is transmitted, thereby greatly reducing the electromagnetic interference that occurs due to the small spacing when multiple transmission lines are transmitted, which greatly enhances the anti-interference ability of the present invention, and also enhances the The invention is used for the stability when working in high-density microwave integrated circuits. Not only that, because the anti-electromagnetic interference ability is greatly enhanced, the invention can also reduce the distance between the metal microstrips of the microwave integrated circuit to realize the miniaturization of the device, so it can better adapt to the development of today's large-scale microwave integrated circuits. The invention can also adjust the cut-off frequency and electromagnetic field distribution of the microwave transmission line by adjusting the geometric dimension of the square groove, and at the same time adjust the confinement effect of electromagnetic waves. After carrying out a large number of parameter correction experiments, the applicant found that, in the microwave structure of the present invention, when the side length a of the square groove is a=0.5~5.0mm, the width β=0.5~3mm of the square belt, and the period p of the square groove is 1~5mm. When the thickness is 8mm, the square groove has the best binding effect on the electromagnetic field.
综上,本发明低传输损耗、反射特性小、带外抑制性能优越,抗电磁干扰能力强,适应于高频集成电路的特点。本发明还能利用周期性方槽形成的两种不同的本征模式,使得滤波器工作于两种不同的频段,实现滤波器的一功多能。To sum up, the invention has low transmission loss, small reflection characteristics, superior out-of-band suppression performance, strong anti-electromagnetic interference ability, and is suitable for the characteristics of high-frequency integrated circuits. The present invention can also utilize two different eigenmodes formed by periodic square grooves, so that the filter works in two different frequency bands, and realizes one function and multiple functions of the filter.
为了更好地证明本发明的有益效果,申请进行了如下实验:申请人设计一个具有双频段工作特性的方槽结构微波滤波器样品,正面结构如图1,样品的参数如表1。In order to better prove the beneficial effect of the present invention, the applicant has carried out the following experiments: the applicant designed a microwave filter sample with a square groove structure with dual-band operating characteristics, the front structure is shown in Figure 1, and the parameters of the sample are shown in Table 1.
表1具有双频段工作特性的方槽结构微波滤波器样品各部分参数(单位:mm)Table 1 Parameters of each part of the microwave filter sample with a square slot structure with dual-band operating characteristics (unit: mm)
该样品的介质板采用介电常数为6.15的基片,对该样品单元结构本征模式的计算结果如图4所示。列举了前两个偶模本征模,其中模式1频带范围为0~10.56GHz,模式2频带范围为14.36~17.05GHz,且为负群速本征模。由单元结构构成的滤波器(如图1所示)特性曲线经时域有限积分计算如图3所示,图3中S11为滤波器反射系数,S21为滤波器传输系数,该样品为双通带滤波器,其第一频段为低通带,-3dB带宽为0~10.31GHz,样品在该通带内插损很小,大于-0.9dB,纹波抖动优于0.45dB,通带内反射小于-12.2dB,带外抑制特性优,其矩形系数(3dB带宽与40dB带宽之比)可达到0.96。第二频段为带通频带,-3dB带宽为14.73~18.69GHz,样品在该通带内最低插损小于-0.91dB,纹波抖动优于2.5dB,通带内反射小于-10.8dB。由图3,图4可知,滤波器的双工作频带分别对应于本征模1和本征模2,其中本征模2具有负群速。由上述可知,该滤波器样品具有一个器件、多种通讯制式的工作能力(即一功多能),继而能有效减少通讯系统中器件个数,缩小设备体积。同时由图3可得,该滤波器样品的带外抑制性能优越。The dielectric plate of this sample uses a substrate with a dielectric constant of 6.15, and the calculation results of the eigenmodes of the sample unit structure are shown in Figure 4. The first two even-mode eigenmodes are listed, in which the frequency band of mode 1 is 0-10.56 GHz, and the frequency band of mode 2 is 14.36-17.05 GHz, and they are negative group velocity eigenmodes. The characteristic curve of the filter (as shown in Figure 1) composed of unit structure is calculated by time-domain finite integration as shown in Figure 3. In Figure 3, S 11 is the filter reflection coefficient, S 21 is the filter transmission coefficient, and the sample is Dual passband filter, the first frequency band is low passband, the -3dB bandwidth is 0~10.31GHz, the insertion loss of the sample in this passband is very small, greater than -0.9dB, the ripple jitter is better than 0.45dB, the passband The internal reflection is less than -12.2dB, and the out-of-band suppression characteristic is excellent, and its square coefficient (ratio of 3dB bandwidth to 40dB bandwidth) can reach 0.96. The second frequency band is a band-pass band, the -3dB bandwidth is 14.73-18.69GHz, the lowest insertion loss of the sample in this pass-band is less than -0.91dB, the ripple jitter is better than 2.5dB, and the internal reflection of the pass-band is less than -10.8dB. It can be seen from Figure 3 and Figure 4 that the dual operating frequency bands of the filter correspond to eigenmode 1 and eigenmode 2, respectively, where eigenmode 2 has a negative group velocity. From the above, it can be seen that the filter sample has the ability to work in multiple communication systems with one device (that is, one function with multiple functions), which can effectively reduce the number of devices in the communication system and reduce the size of the equipment. At the same time, it can be seen from Figure 3 that the out-of-band suppression performance of the filter sample is superior.
对图1滤波器样品工作于5GHz时的表面电场分布做计算,结果如图5所示,对图1滤波器样品工作于18GHz时的表面电场分布做计算,结果如图6所示,由图5,6得知,样品在通带内工作时,电场为偶模式,与其本征模态对应,电场能量被局域于滤波器方槽的周围,向四周扩散很小,这使得滤波器抗电磁干扰的能力大大加强。Calculate the surface electric field distribution of the filter sample in Figure 1 when it works at 5 GHz, and the results are shown in Figure 5. Calculate the surface electric field distribution when the filter sample in Figure 1 works at 18 GHz, and the results are shown in Figure 6. 5,6 It is known that when the sample works in the passband, the electric field is an even mode, which corresponds to its eigenmode, and the electric field energy is localized around the square slot of the filter, and the diffusion to the surrounding is very small, which makes the filter resistant The ability of electromagnetic interference is greatly enhanced.
对图1滤波器样品工作于12GHz时的表面电场分布做计算,结果如图7所示。对图1滤波器样品工作于21GHz时的表面电场分布做计算,结果如图8所示。由图7,8得知,该滤波器在12GH和21GHz工作时,均为滤波器带外,电场能量由滤波器输入端口输入后,迅速衰减,无法传播到输出端。无法传达到输出端就说明,超过这一频率的电磁信号会被有效隔离,从而实现滤波功能,也就是滤除不需要的干扰信号。Calculate the surface electric field distribution of the filter sample in Figure 1 when it works at 12GHz, and the results are shown in Figure 7. Calculate the surface electric field distribution of the filter sample in Figure 1 when it works at 21GHz, and the results are shown in Figure 8. It can be seen from Figures 7 and 8 that when the filter operates at 12GH and 21GHz, it is out of the filter band, and the electric field energy is rapidly attenuated after being input from the input port of the filter, and cannot be transmitted to the output end. If it cannot be transmitted to the output terminal, it means that the electromagnetic signal exceeding this frequency will be effectively isolated, so as to realize the filtering function, that is, to filter out unnecessary interference signals.
附图说明Description of drawings
图1是本发明的正面结构示意图;Fig. 1 is the front structure schematic diagram of the present invention;
图2是本发明的反面结构示意图;Fig. 2 is the reverse structure schematic diagram of the present invention;
图3是样品的S参数曲线图;Fig. 3 is the S parameter curve diagram of sample;
图4是滤波器单元结构的本征模色散关系曲线图(插图从左至右分别为模1和模2电场分布图);Fig. 4 is the eigenmode dispersion relation curve diagram of the filter unit structure (the illustrations are the electric field distribution diagrams of mode 1 and mode 2 respectively from left to right);
图5是滤波器样品工作于第一通带5GHz时的垂直表面电场分布图;Fig. 5 is the vertical surface electric field distribution diagram when the filter sample works in the first passband 5GHz;
图6是滤波器样品工作于第二通带18GHz时的垂直表面电场分布图;Fig. 6 is the vertical surface electric field distribution diagram when the filter sample works at the second passband 18GHz;
图7滤波器样品工作于12GHz时的垂直表面电场分布;Figure 7 The vertical surface electric field distribution of the filter sample when it works at 12GHz;
图8滤波器样品工作于21GHz时的垂直表面电场分布。Figure 8 The vertical surface electric field distribution of the filter sample when it works at 21GHz.
附图中的标记为:1-介质板,2-金属微带,21-人工表面等离激元段,22-过渡段,23-微带波导段,24-方槽,25-方带,26-曲线,3-金属地。The marks in the drawings are: 1-dielectric plate, 2-metal microstrip, 21-artificial surface plasmon section, 22-transition section, 23-microstrip waveguide section, 24-square groove, 25-square strip, 26-curve, 3-metal land.
具体实施方式Detailed ways
下面结合附图和实施例对本发明作进一步的说明,但并不作为对本发明限制的依据。The present invention will be further described below in conjunction with the accompanying drawings and embodiments, but not as a basis for limiting the present invention.
实施例。一种具有双频段工作特性的方槽结构微波滤波器,构成如图1和2所示,包括介质板1,介质板1一表面上设有金属微带2,另一表面设有金属地3;所述金属微带2的结构为:金属微带2的中部设有人工表面等离激元段21,人工表面等离激元段21的两端分别经过渡段22与微带波导段23连接;所述的人工表面等离激元段21和过渡段22上沿金属微带2的长度方向分布有镂空的方槽24,相邻两方槽24间经镂空的方带25连接;处于过渡段22的方槽24的上、下边缘均为沿过渡段22向微带波导段23方向渐变收敛的曲线26。Example. A microwave filter with a square groove structure with dual-band operating characteristics, as shown in Figures 1 and 2, including a dielectric plate 1, a metal microstrip 2 is provided on one surface of the dielectric plate 1, and a metal ground 3 is provided on the other surface The structure of the metal microstrip 2 is: the middle part of the metal microstrip 2 is provided with an artificial surface plasmon section 21, and the two ends of the artificial surface plasmon section 21 respectively pass through a transition section 22 and a microstrip waveguide section 23 Connection; the artificial surface plasmon section 21 and the transition section 22 are distributed with hollow square grooves 24 along the length direction of the metal microstrip 2, and the adjacent two square grooves 24 are connected by hollow square strips 25; The upper and lower edges of the square groove 24 of the transition section 22 are curves 26 that converge gradually along the transition section 22 to the direction of the microstrip waveguide section 23 .
前述的曲线26为满足方程X=L1+L2*t3,Y=h*(exp(b*t-1)/(expb-1))的曲线;其中t为自变量参数,b为曲线形状系数,h为金属微带2宽度;L1为微带波导段23长度,L2为过渡段22长度。The aforementioned curve 26 is a curve satisfying the equation X=L 1 +L 2 *t 3 , Y=h*(exp(b*t-1)/(expb-1)); wherein t is an independent variable parameter, and b is Curve shape factor, h is the width of the metal microstrip 2; L 1 is the length of the microstrip waveguide section 23, and L 2 is the length of the transition section 22.
前述的h=2~8mm,L1=5~15mm,L2=10~60mm,t=0~1,b=6.5~80。The aforementioned h=2-8mm, L 1 =5-15mm, L 2 =10-60mm, t=0-1, b=6.5-80.
前述的介质板1的厚度g=0.3~1.2mm,方槽24的边长a=0.5~5.0mm,方带25的宽β=0.5~3.0mm,方槽24的周期p=1~8mm。所述的人工表面等离激元段21的长度L3可根据滤波器的大小进行设置,该参数仅对滤波器的大小有影响,不影响滤波器性能。人工表面等离激元段21的长度可参考L3=20~80mm。The thickness g of the aforementioned dielectric plate 1 is 0.3-1.2 mm, the side length a of the square groove 24 is 0.5-5.0 mm, the width β of the square belt 25 is 0.5-3.0 mm, and the period p of the square groove 24 is 1-8 mm. The length L 3 of the artificial surface plasmon segment 21 can be set according to the size of the filter, and this parameter only affects the size of the filter and does not affect the performance of the filter. The length of the artificial surface plasmon segment 21 may refer to L 3 =20-80 mm.
工作原理:准TEM模式的电磁场由左边的微带波导段23传输到过渡段22,在过渡段22中逐渐渐变为SSPPs模式的电磁场,且在过渡段22中准TEM模式和SSPPs模式的电磁场共存,当人工表面等离激元段21时,完全转化为SSPPs模式的电磁场,并在L3进行传输,传输后SSPPs模式电磁场又经过右边的过渡段转化为准TEM模式的电磁场由右边的微带波导段输出。当电磁场在微带波导段23传播,该段内电磁场的模式为准TEM模式,该模式电磁场被束缚在微带波导段23与金属地3间的介质内;在过渡段22传播时,该段内准TEM模式与SSPPs模式共存,其中准TEM模式电磁场被束缚在过渡段22与金属地3间的介质内,SSPPs模式电磁场被束缚在方槽周围;在L3进行传播时,该段内为SSPPs模式,该模式电磁场被束缚在方槽周围。Working principle: The electromagnetic field of the quasi-TEM mode is transmitted from the left microstrip waveguide section 23 to the transition section 22, and gradually becomes the electromagnetic field of the SSPPs mode in the transition section 22, and the electromagnetic fields of the quasi-TEM mode and the SSPPs mode coexist in the transition section 22 , when the artificial surface plasmon segment 21, it is completely transformed into the electromagnetic field of the SSPPs mode, and is transmitted at L 3 , after the transmission, the electromagnetic field of the SSPPs mode is transformed into the electromagnetic field of the quasi-TEM mode through the transition section on the right, which is formed by the microstrip on the right Waveguide segment output. When the electromagnetic field propagates in the microstrip waveguide section 23, the mode of the electromagnetic field in this section is a quasi-TEM mode, and this mode electromagnetic field is bound in the medium between the microstrip waveguide section 23 and the metal ground 3; when the transition section 22 propagates, the section The internal quasi-TEM mode and the SSPPs mode coexist, and the electromagnetic field of the quasi-TEM mode is bound in the medium between the transition section 22 and the metal ground 3, and the electromagnetic field of the SSPPs mode is bound around the square groove; when propagating in L 3 , in this section is SSPPs mode, where the electromagnetic field is bound around the square slot.
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