CN109212907A - A method of manufacture black matrix" film - Google Patents
A method of manufacture black matrix" film Download PDFInfo
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- CN109212907A CN109212907A CN201811308278.XA CN201811308278A CN109212907A CN 109212907 A CN109212907 A CN 109212907A CN 201811308278 A CN201811308278 A CN 201811308278A CN 109212907 A CN109212907 A CN 109212907A
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- film
- matrix
- black matrix
- organic solvent
- pump
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
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- General Physics & Mathematics (AREA)
- Optical Filters (AREA)
Abstract
The invention discloses a kind of methods for manufacturing black matrix" film, including black carbon particles are dissolved in after organic solvent and are coated on glass substrate by filling device again by being pumped into after filter, and by vacuumizing, prebake conditions, firing is dried and formed after development.The present invention is filtered with multilayer film superimposion, liquid forms orderly regular matrix in glass baseplate surface with photoresist, and toasting is final matrix shape, and coated film makes defect situation be greatly improved, film surface is smooth, can final optimization pass colored filter performance, there is help to the raising of display effect.
Description
Technical field
The invention belongs to photosensitive material chemical technology fields, and in particular to a method of manufacture black matrix" film.
Background technique
Currently, the colored display of thin film transistor liquid crystal display technology (abbreviation LCD-TFT) is by colored filter (letter
Claim CF) come what is completed, colored filter is a kind of a kind of diaphragm that can show optical characteristics, can choose different-waveband
Light filters out other unwanted light by generally selecting red, green, blue (abbreviation RGB) three kinds of colors as three primary colors, by
RGB forms pixel and forms the light of seven kinds of different colours, and human eye is made to receive some light black matrix" of saturation as one
Narrow wire frame keeps apart other three primary colors on the surface of glass substrate, prevents colour mixture, and making one will not colour mixture conduct in viewing
A component part, black matrix" play important function to colour developing in colored filter
The general technology process of black-matrix material: transparent glass substrate is cleaned first, using coating machine in glass
One layer of black photoresist is coated on surface, is controlled film thickness appropriate, is put into VCD and extracts organic solvent out, removes glass edge
Photoresist, the substrate after film is placed in heating plate progress prebake conditions certain time, after be put into and cool down at room temperature, it is exposed
After be put in developing machine and develop, rear baking and formed according to certain regularly arranged black matrix" figure
The characteristics of due to photoresist itself, it is readily incorporated impurity in the fabrication process, thereby increases and it is possible to during influencing subsequent technique
Homogeneity.
Summary of the invention
Goal of the invention: in view of the above-mentioned deficiencies in the prior art, it is an object of the present invention to provide a kind of manufacture black matrix" film
Method.
Technical solution: in order to achieve the above object of the invention, the present invention is specifically achieved like this: a kind of manufacture black square
The method of battle array film, comprising the following steps:
(1) black carbon particles are dissolved in organic solvent, are stirred to form black glue solution；
(2) by the black glue solution in container by being sent into filling device after being pumped into filter；
(3) black glue solution is coated on transparent glass substrate by filling device, forms the coating with matrix shape；
(4) it is vacuumized by VCD and extracts the organic solvent of 80 ~ 85wt% on transparent glass substrate in coating out, one layer of formation is wet
Film makes remaining organic solvent and black carbon particles in coating rest on glass baseplate surface；
(5) glass substrate is put in the prebake conditions that 80 ~ 90 DEG C, 70 ~ 90s are carried out in heating plate, the residue controlled in wet film is organic
Solvent, which all volatilizees away, forms dry film；
(6) it is exposed on dry film surface, stays in the Matrix Pattern of rule above；
(7) develop to Matrix Pattern, unexposed portion is washed away, form prefabricated matrix；
(8) prefabricated matrix is placed in 230 DEG C of baking oven, fires 30min, is cooled to room temperature then at dustless indoor seasoning；
(9) matrix that will be cooled to room temperature detects defect under equipment, controls defect within 400, obtains improved
Black matrix" film.
Wherein, the pump is continuous power device, and filter is multilayer filter membrane superimposion.
Wherein, the pump is diaphragm pump, magnetic drive pump, axial-flow pump or gear pump.
Wherein, step (1) organic solvent is selected from propylene glycol methyl ether acetate, glycol monoethyl ether, ethylene glycol only son
Ether, diethylene glycol ethylmethyl ether, propylene glycol monoethyl ether acetate, propylene glycol monomethyl ether acetate, dihydroxypropane single-ether, cyclohexanone,
One of ethylene glycol monoethyl ether acetate a variety of is mixed with arbitrary proportion.
Wherein, the organic solvent is mixed by propylene glycol methyl ether acetate and diethylene glycol ethylmethyl ether 1 ~ 1.5:1 in mass ratio
It closes.
Wherein, the pressure of the pump is 0.04 ~ 0.06MPa.
Wherein, the filtration membrane material used in the filter for PP, PES, PTFE, Nylon, UPE, GF or
PVDF, filtration membrane aperture are 0.1 ~ 5um.
Wherein, the fineness of the black carbon particles is 30 ~ 100nm.
Wherein, the organic solvent is selected from propylene glycol methyl ether acetate, glycol monoethyl ether, ethylene glycol monobutyl ether, diethyl
Glycol ethyl methyl ether, propylene glycol monoethyl ether acetate, propylene glycol monomethyl ether acetate, dihydroxypropane single-ether, cyclohexanone, ethylene glycol list
One of ethyl ether acetate ester is a variety of.
Wherein, effective concentration is used to be exposed the cleaning of part for 0.043% KOH developer solution in the step (7).
Wherein, the detection defect equipment is the AOI of the model GPI-1100 of Synapseimaging company production
Tester；The defect of detection is the defect of influence matrix form, and quantity controls within 400.
The utility model has the advantages that the present invention compared with traditional technology, has the advantage that
(1) it is filtered with multilayer film superimposion, liquid forms orderly regular matrix in glass baseplate surface with photoresist, and toasts and be
Final matrix shape；
(2) coated film of the present invention makes defect situation be greatly improved, and film surface is smooth, can final optimization pass colored filter
Performance has help to the raising of display effect.
Specific embodiment
Embodiment 1:
The method for manufacturing black matrix" film: black carbon particles are dissolved in organic solvent (propylene glycol methyl ether acetate and diethyl
Glycol ethyl methyl ether 1.5:1 in mass ratio mixing) in, it is stirred to form black glue solution；Black glue solution in container is passed through into pump
Filling device is sent into after being pumped into filter；Black glue solution is coated on transparent glass substrate by filling device, formation has
The coating of matrix shape；It is vacuumized by VCD and extracts the organic solvent of 80 ~ 85wt% on transparent glass substrate in coating out (its
Middle propylene glycol methyl ether acetate is completely drawn out, remainder diethylene glycol ethylmethyl ether), one layer of wet film is formed, is made surplus in coating
Remaining organic solvent and black carbon particles rest on glass baseplate surface；Glass substrate is put in 80 ~ 90 DEG C, 70 of progress in heating plate
The prebake conditions of ~ 90s control whole volatilize away of the remaining organic solvent in wet film and form dry film；It is exposed on dry film surface, makes to advise
Matrix Pattern then stays in above；Develop to Matrix Pattern, unexposed portion is washed away, forms prefabricated matrix；It will be prefabricated
Matrix is placed in 230 DEG C of baking oven, is fired 30min, is cooled to room temperature then at dustless indoor seasoning；It will be cooled to the matrix of room temperature
Defect is detected under AOI tester, is controlled defect within 400, is obtained improved black matrix" film.
Embodiment 2:
Reference implementation example 1, when pumping photoresist to filter, generate pressure loss, for each mitron road, because of photoresist
Viscosity is smaller, and the pressure loss can be calculated as follows；r=Fa·(1/D)·ρ·(V2/ 2), in which: r is the pressure loss, and Fa is to rub
Resistance coefficient is wiped, ρ is fluid density, and V is mean flow rate, and D is internal diameter of the pipeline, consider the factor of crushing, to guarantee to fill flow,
Suitable pipeline distance is selected between pump and filter；It is suitable between selection pump and filter by calculating and measured result
The range that pipeline distance is 0.5 ~ 1.2m.
Embodiment 3:
Reference implementation example 1, is transmitted using magnetic drive pump, and the filter uses the PP material in the aperture 0.1um using filter membrane piece
Matter, filtration flow-rate 546g/min, defect/ea 993.(defect/ea is defect number)
Embodiment 4:
Reference implementation example 1, is transmitted using magnetic drive pump, and the filter uses the PP material in the aperture 0.2um using filter membrane piece
Matter, filtration flow-rate 630g/min, defect/ea 1335.
Embodiment 5:
Reference implementation example 1, is transmitted using magnetic drive pump, and the filter uses the PP material in the aperture 0.5um using filter membrane piece
Matter, filtration flow-rate 790g/min, defect/ea 2085.
Embodiment 6:
Reference implementation example 1, is transmitted using magnetic drive pump, and the filter uses the GF material in the aperture 0.5um using filter membrane piece
Matter, filtration flow-rate 476g/min, defect/ea 413.
Embodiment 7:
Reference implementation example 1, is transmitted using magnetic drive pump, and the filter uses the GF material in the aperture 0.5um using filter membrane piece
Compound with the PP material in the aperture 0.1um, flow velocity is maintained at 455g/min, defect/ea 198.
Embodiment 8:
Reference implementation example 1, is transmitted using magnetic drive pump, and the filter uses the PVDF material in the aperture 1.0um using filter membrane piece
Matter and the PP material in the aperture 0.1um are compound, and flow velocity keeps 309g/min, defect/ea 313.
Embodiment 9:
Reference implementation example 1, is transmitted using diaphragm pump, and the filter uses the PP material in the aperture 0.1um using filter membrane piece
Matter, filtration flow-rate 668g/min, defect/ea 3177.
Embodiment 10:
Reference implementation example 1, is transmitted using diaphragm pump, and the filter uses the PTFE material in the aperture 1.0um using filter membrane piece
Matter, defect/ea N.D.
Embodiment 11:
Reference implementation example 1, is transmitted using diaphragm pump, and the filter uses the UPE material in the aperture 1.0um using filter membrane piece
Matter, defect/ea N.D.
Embodiment 12:
Reference implementation example 1, is transmitted using diaphragm pump, and the filter uses the Nylon in the aperture 1.0um using filter membrane piece
Material, defect/ea N.D.
Embodiment 13:
Reference implementation example 1, is transmitted using magnetic drive pump, and the filter uses the PES material in the aperture 1.0m using filter membrane piece
Matter, filtration flow-rate 53g/min, defect/ea 1174.
Embodiment 14:
Reference implementation example 1, is transmitted using magnetic drive pump, and the filter uses the PTFE material in the aperture 5.0m using filter membrane piece
Matter, filtration flow-rate 630g/min, defect/ea 3745.
Claims (10)
1. a kind of method for manufacturing black matrix" film, which comprises the following steps:
(1) black carbon particles are dissolved in organic solvent, are stirred to form black glue solution；
(2) by the black glue solution in container by being sent into filling device after being pumped into filter；
(3) black glue solution is coated on transparent glass substrate by filling device, forms the coating with matrix shape；
(4) it is vacuumized by VCD and extracts the organic solvent of 80 ~ 85wt% on transparent glass substrate in coating out, one layer of formation is wet
Film makes remaining organic solvent and black carbon particles in coating rest on glass baseplate surface；
(5) glass substrate is put in the prebake conditions that 80 ~ 90 DEG C, 70 ~ 90s are carried out in heating plate, the residue controlled in wet film is organic
Solvent, which all volatilizees away, forms dry film；
(6) it is exposed on dry film surface, stays in the Matrix Pattern of rule above；
(7) develop to Matrix Pattern, unexposed portion is washed away, form prefabricated matrix；
(8) prefabricated matrix is placed in 230 DEG C of baking oven, fires 30min, is cooled to room temperature then at dustless indoor seasoning；
(9) matrix that will be cooled to room temperature detects defect under equipment, controls defect within 400, obtains improved
Black matrix" film.
2. the method for manufacture black matrix" film according to claim 1, which is characterized in that the pump is that continuous power fills
It sets, filter is multilayer filter membrane superimposion.
3. it is according to claim 1 or 2 manufacture black matrix" film method, which is characterized in that it is described pump be diaphragm pump,
Magnetic drive pump, axial-flow pump or gear pump.
4. the method for manufacture black matrix" film according to claim 1 or 2, which is characterized in that the step (1) is organic
Solvent is selected from propylene glycol methyl ether acetate, glycol monoethyl ether, ethylene glycol monobutyl ether, diethylene glycol ethylmethyl ether, propylene glycol list second
Ether acetic acid ester, propylene glycol monomethyl ether acetate, dihydroxypropane single-ether, cyclohexanone, one of ethylene glycol monoethyl ether acetate or
It is a variety of to be mixed with arbitrary proportion.
5. the method for manufacture black matrix" film according to claim 4, which is characterized in that the organic solvent is by the third two
Alcohol methyl ether acetate and diethylene glycol ethylmethyl ether 1 ~ 1.5:1 in mass ratio mixing.
6. the method for manufacture black matrix" film according to claim 1, which is characterized in that the pressure of the pump is 0.04
~ 0.06MPa, the pipeline distance between pump and filter is 0.5 ~ 1.2m.
7. the method for manufacture black matrix" film according to claim 1, which is characterized in that used in the filter
Filtration membrane material is PP, PES, PTFE, Nylon, UPE, GF or PVDF, and filtration membrane aperture is 0.1 ~ 5um.
8. it is according to claim 1 manufacture black matrix" film method, which is characterized in that the black carbon particles it is thin
Degree is 30 ~ 100nm.
9. the method for manufacture black matrix" film according to claim 1, which is characterized in that the organic solvent is selected from third
Glycol methyl ether acetate, glycol monoethyl ether, ethylene glycol monobutyl ether, diethylene glycol ethylmethyl ether, propylene glycol monoethyl ether acetate, third
Glycol monomethyl ether acetate, dihydroxypropane single-ether, cyclohexanone, one of ethylene glycol monoethyl ether acetate or a variety of.
10. the method for manufacture black matrix" film according to claim 1, which is characterized in that used in the step (7)
The KOH developer solution that effective concentration is 0.043% is exposed the cleaning of part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811308278.XA CN109212907A (en) | 2018-11-05 | 2018-11-05 | A method of manufacture black matrix" film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811308278.XA CN109212907A (en) | 2018-11-05 | 2018-11-05 | A method of manufacture black matrix" film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109212907A true CN109212907A (en) | 2019-01-15 |
Family
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| CN201811308278.XA Pending CN109212907A (en) | 2018-11-05 | 2018-11-05 | A method of manufacture black matrix" film |
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Citations (6)
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|---|---|---|---|---|
| CN1963670A (en) * | 2005-11-10 | 2007-05-16 | 东京应化工业株式会社 | Coating device |
| US20090042113A1 (en) * | 2007-08-10 | 2009-02-12 | Au Optronics Corporation | Manufacturing method of filter and color filter |
| CN103339537A (en) * | 2011-02-25 | 2013-10-02 | 富士胶片株式会社 | Light-shielding composition, method for producing a light-shielding composition, solder resist, method for forming a pattern, and solid-state imaging device |
| CN105093645A (en) * | 2015-08-06 | 2015-11-25 | 深圳市华星光电技术有限公司 | Color filtering substrate and preparing method thereof |
| CN105717737A (en) * | 2016-04-26 | 2016-06-29 | 深圳市华星光电技术有限公司 | Mask and preparation method of CF (color filter) substrate |
| CN107430335A (en) * | 2015-04-01 | 2017-12-01 | 东丽株式会社 | Photosensitive color resin combination |
-
2018
- 2018-11-05 CN CN201811308278.XA patent/CN109212907A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1963670A (en) * | 2005-11-10 | 2007-05-16 | 东京应化工业株式会社 | Coating device |
| US20090042113A1 (en) * | 2007-08-10 | 2009-02-12 | Au Optronics Corporation | Manufacturing method of filter and color filter |
| CN103339537A (en) * | 2011-02-25 | 2013-10-02 | 富士胶片株式会社 | Light-shielding composition, method for producing a light-shielding composition, solder resist, method for forming a pattern, and solid-state imaging device |
| CN107430335A (en) * | 2015-04-01 | 2017-12-01 | 东丽株式会社 | Photosensitive color resin combination |
| CN105093645A (en) * | 2015-08-06 | 2015-11-25 | 深圳市华星光电技术有限公司 | Color filtering substrate and preparing method thereof |
| CN105717737A (en) * | 2016-04-26 | 2016-06-29 | 深圳市华星光电技术有限公司 | Mask and preparation method of CF (color filter) substrate |
Non-Patent Citations (1)
| Title |
|---|
| 周德繁 等: "《液压与气压传动》", 28 February 2013, 哈尔滨工业出版社 * |
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Application publication date: 20190115 |