CN109163013B

CN109163013B - Linear shaft and rotary shaft combined high-precision two-dimensional static pressure motion system

Info

Publication number: CN109163013B
Application number: CN201811091707.2A
Authority: CN
Inventors: 史德权; 孙涛; 王哲
Original assignee: Harbin Institute of Technology
Current assignee: Harbin Institute of Technology
Priority date: 2018-09-19
Filing date: 2018-09-19
Publication date: 2020-03-13
Anticipated expiration: 2038-09-19
Also published as: CN109163013A

Abstract

In order to improve the assembly precision of the static pressure platform, the invention discloses a high-precision two-dimensional static pressure motion system with a linear shaft and a rotating shaft combined, which comprises a base, a workbench, an upper stop push plate, a lower thrust plate, a transition slide block, a round slide block and the like, wherein the transition slide block is arranged between the upper stop push plate and the lower thrust plate, and the upper end and the lower end of a side thrust plate are respectively fixed on two sides of the upper stop push plate and the lower thrust plate; the circular sliding block is arranged in a central hole of the transition sliding block, a bulge of the workbench penetrates through the central hole of the upper stop push plate to be connected with the circular sliding block, a connecting column of the torque motor penetrates through the central hole of the lower thrust plate to be connected with the circular sliding block, the torque motor is arranged on the connecting column of the torque motor, and the torque motor is arranged in the central hole of the connecting plate in a matching manner; the upper end and the lower end of the end face connecting plate are respectively fixed on the transition sliding block and the connecting plate, the connecting plate is connected with the lower thrust plate through the linear motor, and the lower thrust plate is fixed on the base; the invention belongs to the technical field of precision engineering, and has the advantages of small comprehensive error, high precision and low installation and adjustment difficulty.

Description

Linear shaft and rotary shaft combined high-precision two-dimensional static pressure motion system

Technical Field

The invention belongs to the technical field of precision engineering, and particularly relates to a high-precision two-dimensional static pressure motion system with a linear shaft and a rotary shaft combined.

Background

A high-precision motion system is one of key components in the fields of photoelectric technology, material processing and measurement. In recent years, with the rapid development of subjects such as precision engineering, microelectronic technology, aerospace, bioengineering and the like, a high-precision motion system plays an extremely important role in the modern advanced industrial production and scientific research field, the motion precision of the high-precision motion system directly influences the precision of instruments and equipment, for example, in precision and ultra-precision machining, the high precision of the shape and the size of a part and the ultra-smoothness of a machined surface are ensured, and the high-precision motion system is required to be provided besides a high-precision optimized process and an ultra-stable machining environment condition; in precision measurement and precision instruments, high-precision motion systems are widely applied, and optical adjustment, scanning tunnel microscopes, operation and assembly of miniature parts and the like do not show the importance of the high-precision motion systems.

Guide rails are common components that produce high precision linear motion. The guide rail part requires extremely high linear motion precision, cannot creep, and the guide rail coupling surface cannot be abraded. In the form of coupling of precision guides, sliding frictional contact has been rarely adopted. The guide rails commonly adopted in the field of precision engineering at present are as follows: rolling guide rail, hydrostatic guide rail, aerostatic guide rail.

The rolling guide rail has been applied to general engineering and precision engineering for many years, and the application of the rolling guide rail is expanded due to the improvement of the rolling guide rail technology in recent years. Roller linear rolling bearings have been used in rolling guides in the past, and recirculating roller rolling assemblies and recirculating ball rolling assemblies have been added. The high-precision friction material can be used in occasions with general precision but high rigidity requirements, can achieve micron-grade precision, and has an extremely low friction factor of only 0.002-0.003.

The hydrostatic guide rail has high rigidity and can bear large load, and when the moving speed of the guide rail is not high, the temperature of the hydrostatic guide rail is not seriously increased, so that the hydrostatic guide rail can be used for a high-precision moving system. The hydrostatic guideway has various different structures, which are distinguished according to the surface type of the guideway, and comprises a plane hydrostatic guideway, a double-cylinder hydrostatic guideway and the like; the frame type is divided into a closed frame type and a non-closed frame type; the sliding block type double-slider mechanism is divided into an inner slider type and an outer slider type according to the difference of the slider types, and the outer slider type has various forms such as a U-shaped structure guide rail and a T-shaped structure guide rail.

The gas hydrostatic guide rail has the advantages of high linear motion precision, stable motion, no crawling, nearly zero friction coefficient, no heating and the like, thereby being widely applied in the field of precision engineering. Aerostatic guideways also have a variety of configurations similar to hydrostatic guideways.

The precision bearing is the core of rotary motion, and is required to achieve higher rotary precision, stable rotation, no vibration and the like. The precision bearings commonly used in the field of precision engineering are: precision and ultra-precision rolling bearings, hydrostatic bearings, aerostatic bearings. It is becoming increasingly difficult to manufacture higher precision rolling bearings, and therefore hydrostatic and aerostatic bearings are being used more. The hydrostatic bearing has high rotation precision, stable rotation and no vibration. Hydraulic oil enters an oil cavity between the coupling surfaces of the bearings through the pore channels, so that the bearings are suspended in the shaft sleeve and no solid friction is generated. When the shaft is stressed and deflected, the oil-draining gap between the coupling surfaces is changed, so that the oil pressure in the relative oil cavity is unequal, and the pressure difference of the oil pushes the shaft back to the original central position. Hydrostatic bearings can achieve higher stiffness. The working principle of the aerostatic bearing is similar to that of the hydrostatic bearing, the aerostatic bearing has small temperature rise compared with the hydrostatic bearing, and simultaneously ensures higher rotation precision and stable operation, but has small damping coefficient and relatively lower rigidity, and can only bear smaller load. Hydrostatic and aerostatic bearings have many configurations, such as: cylindrical radial and end thrust bearings, double hemispherical bearings, cylindrical radial bearings with spherical one end and cylindrical radial bearings with spherical other end, etc.

At present, no two-dimensional motion system with combined installation of linear motion and rotary motion exists. The current solution is to use a combination of linear guides and a rotating shaft. The linear shaft and the rotating shaft are manufactured or purchased separately and combined for use, and various design structures of high-precision linear guide rails and rotating shafts are respectively arranged in different technical documents at home and abroad. The doctor thesis published by hou national security of the university of harbin in 2013, "research on influence of hydrostatic pressure support on dynamic characteristics of ultra-precise diamond turning machine" discloses a design structure of a linear shaft, the doctor thesis published by guo pavilion of the university of western medicine in 2017, "mechanical characteristic analysis and parameter identification of quantitative hydrostatic pressure rotary table" discloses a design structure of a rotary shaft, and the design structures of the linear shaft and the rotary shaft are combined to serve as a structure of the prior art, so that compared with the structure disclosed by the application, the design structure has the following problems:

(1) the principle error of structural design is large

In the prior art, the layout of the combined use is sequentially provided with a linear shaft, a rotating shaft and external equipment to be adjusted from bottom to top, the distance from a point of the external equipment to be adjusted to the linear shaft is the Abbe distance, and the rotating shaft is manufactured independently, so that the Abbe distance is larger due to the existence of parts such as a base and the like when the combined use is carried out; because the linear axis has a linearity error, when the linear motion is carried out, the external equipment adjusting point generates front and back deflection along the motion direction, and the larger the Abbe distance is, the larger the deflection is, and the more obvious the amplification effect is; in addition, on the vertical plane of the linear axis, the left height and the right height are not absolutely consistent, so when the rotating shaft rotates, an error is generated at an adjusting point, and the larger the Abbe distance is, the larger the error is, and the more obvious the amplification effect is; reducing the abbe distance will reduce the error radically.

(2) Difficulty in adjustment

In the prior art, when the linear shaft and the rotating shaft are combined for use, parts such as a base and the like exist in the height direction of the rotating shaft, and the existence of the parts causes more intermediate links of the assembly size chain, so that the assembly is complicated. Therefore, intermediate links are reduced, and the assembly difficulty is reduced. More importantly, the most ideal installation position of the rotating shaft is that the axis of the rotating shaft falls on the symmetrical plane of the linear shaft. In the prior art, the linear shaft and the rotating shaft are connected and adjusted by adopting a screw connection mode and the like, and the installation and adjustment process has certain difficulty and finally causes larger errors, which greatly influences the working precision.

Disclosure of Invention

The invention aims to improve the assembly precision of a static pressure motion system, and provides a high-precision two-dimensional static pressure motion system with a linear shaft and a rotating shaft combined.

In order to achieve the purpose, the technical scheme adopted by the invention is as follows:

a high-precision two-dimensional static pressure motion system with a linear shaft and a rotary shaft combined is characterized in that: the linear shaft comprises a base, an upper stop push plate, a lower thrust plate, a side thrust plate, a transition sliding block, a connecting plate, two end face connecting plates and at least one linear motor; the rotating shaft comprises a workbench, a circular sliding block, a torque motor connecting column and a torque motor; the transition sliding block is arranged between the upper stop pushing plate and the lower thrust plate, the two side thrust plates are positioned at any two opposite sides of the transition sliding block, and the upper end and the lower end of each side thrust plate are respectively fixed on the upper stop pushing plate and the lower thrust plate; the circular sliding block is arranged in a central hole formed in the transition sliding block in a matching manner, the bulge of the workbench penetrates through the central hole formed in the upper stop push plate to be in threaded connection with the circular sliding block, the torque motor connecting column penetrates through the central hole formed in the lower thrust plate to be in threaded connection with the circular sliding block, the torque motor is arranged on the torque motor connecting column, and the torque motor is arranged in the central hole formed in the connecting plate in a matching manner; the two end face connecting plates are respectively arranged in grooves formed in two opposite sides of the lower thrust plate, the upper end and the lower end of each end face connecting plate are respectively fixed on the transition sliding block and the corresponding connecting plate, the connecting plates are connected with the lower thrust plate through at least one linear motor, and the lower thrust plate is fixed on the base.

Preferably, the number of the linear motors is two, and the other two side surfaces of the connecting plate except the two side surfaces connected with the two end face connecting plates are respectively provided with the linear motors.

Further, the linear motor comprises a linear motor rotor and a linear motor stator, the linear motor rotor is installed on the side face of the connecting plate, and the linear motor stator is installed on the lower surface of the lower thrust plate.

Furthermore, the central holes formed in the upper thrust plate and the lower thrust plate are all elongated holes, and the elongated holes are parallel to the driving route of the linear motor.

Furthermore, the upper surface and the lower surface of the torque motor connecting column are provided with a plurality of through holes I in a penetrating mode, the upper surface and the lower surface of the circular sliding block are provided with a plurality of through holes II in a penetrating mode, the side face of the circular sliding block is provided with a plurality of through holes III in an inward opening mode, and the through holes II are communicated with the through holes III.

Furthermore, go up the lower surface of going up of dead push pedal and upwards open and have a plurality of through-hole IV, the side of going up the dead push pedal inwards opens and has a plurality of through-hole V, and through-hole IV and through-hole V communicate each other.

Furthermore, the lower thrust plate is provided with a plurality of through holes VI from the upper surface downwards, the side surface of the lower thrust plate is provided with a plurality of through holes VII inwards, and the through holes VI and the through holes VII are communicated with each other.

Furthermore, a plurality of through holes VIII are formed in the upper surface and the lower surface of the side thrust plate in a penetrating mode, a plurality of through holes IX are formed in the side surface of the side thrust plate inwards, and the through holes VIII are communicated with the through holes IX.

Furthermore, the through hole IV, the through hole V, the through hole VI, the through hole VII and the through hole IX are all blind holes.

Furthermore, the high-precision two-dimensional static pressure motion system combining the linear shaft and the rotating shaft further comprises a plurality of threaded plugs, and the threaded plugs are used for plugging all the orifices of the through holes I, V and VII and the orifices of the through holes 1X on the outer side wall of the side thrust plate (5).

Compared with the prior art, the invention has the beneficial effects that:

(1) small comprehensive error and high precision in structural principle

Because the high-precision two-dimensional static pressure motion system does not have parts such as a base of a rotating shaft and the like, the height of the workbench is reduced, an external device adjusting point is closer to a linear shaft, and the Abbe distance is reduced. And the reduction of the Abbe distance can effectively reduce the error influence caused by factors such as the straightness of the linear shaft part, the left and right heights of the part and the like.

(2) The installation and adjustment difficulty is low

Because the high-precision two-dimensional static pressure motion system reduces redundant parts such as the base of the rotating shaft, parts needing to be assembled in the height direction are greatly reduced, links of assembling a size chain are reduced, and the assembling difficulty is reduced. The most ideal installation position of the rotating shaft is to enable the axis of the rotating shaft to fall into a linear axial symmetry plane, and the high-precision two-dimensional static pressure motion system belongs to one-time adjustment, namely, the assembly precision is guaranteed through the machining precision of parts, and no combined adjustment process exists. Therefore, the axis of the rotating shaft is easier to fall into the linear axisymmetric plane, and the position of the rotating shaft is more accurate.

(3) Other advantages

Because the linear motor and the torque motor are externally arranged below the lower thrust plate, the heat dissipation of the motor is easy, and the thermal deformation of a static pressure motion system is reduced;

because the upper stop push plate, the side thrust plate and the lower thrust plate can form a closed structure, deformation caused by air pressure or hydraulic pressure is reduced compared with a C-shaped structure.

Drawings

FIG. 1 is a front cross-sectional view of the structure of the present invention;

FIG. 2 is a side cross-sectional view of the structure of the present invention;

FIG. 3 is a perspective view of the structure of the present invention;

FIG. 4 is an exploded view of the structure of the present invention;

FIG. 5 is a front view of the present invention;

FIG. 6 is a left side view of the present invention;

FIG. 7 is a top view of the present invention;

FIG. 8 is a schematic view of an internal via structure according to the present invention;

fig. 9 is a structural view disclosed in the prior art.

In the figure: 1. the base, 2, the workstation, 3, go up the top thrust board, 4, lower thrust board, 5, side thrust board, 6, the transition slider, 7, the round slider, 8, torque motor spliced pole, 9, torque motor, 10, the connecting plate, 11, the terminal surface connecting plate, 12, linear electric motor, 13, the plug screw, 121, linear electric motor active cell, 122, linear electric motor stator, 81, through-hole I, 71, through-hole II, 72, through-hole III, 31, through-hole IV, 32, through-hole V, 41, through-hole VI, 42, through-hole VII, 51, through-hole VIII, 52, through-hole IX, 06, the revolving shaft base, 07, the floating plate, 08, the side floating plate, 09, the lower floating plate, 010 guide rail.

Detailed Description

The present invention will be described in detail with reference to the accompanying drawings.

Detailed description of the invention

A high-precision two-dimensional static pressure motion system with a linear shaft and a rotary shaft combined is characterized in that: the device comprises a linear shaft and a rotating shaft, wherein the linear shaft comprises a base 1, an upper stop push plate 3, a lower thrust plate 4, a side thrust plate 5, a transition sliding block 6, a connecting plate 10, two end face connecting plates 11 and at least one linear motor 12; the rotating shaft comprises a workbench 2, a circular slide block 7, a torque motor connecting column 8 and a torque motor 9; the transition sliding block 6 is arranged between the upper stop pushing plate 3 and the lower thrust plate 4, the two side thrust plates 5 are positioned at any two opposite sides of the transition sliding block 6, and the upper end and the lower end of each side thrust plate 5 are respectively fixed on the upper stop pushing plate 3 and the lower thrust plate 4 through screws; the circular slider 7 is arranged in a central hole formed in the transition slider 6 in a matching manner, the bulge of the workbench 2 penetrates through the central hole formed in the upper stop push plate 3 to be in threaded connection with the circular slider 7, the torque motor connecting post 8 penetrates through the central hole formed in the lower thrust plate 4 to be in threaded connection with the circular slider 7, the torque motor 9 is arranged on the torque motor connecting post 8, and the torque motor 9 is arranged in the central hole formed in the connecting plate 10 in a matching manner; the two end face connecting plates 11 are respectively arranged in grooves formed in two opposite sides of the lower thrust plate 4, the upper end and the lower end of each of the two end face connecting plates 11 are respectively fixed on the transition sliding block 6 and the connecting plate 10 through screws, the connecting plate 10 is connected with the lower thrust plate 4 through at least one linear motor 12, and the lower thrust plate 4 is fixed on the base 1.

The torque motor 9 is mainly used for generating torque to enable a rotary component consisting of the workbench 2, the circular slider 7 and the torque motor connecting column 8 to generate rotary motion; the transition sliding block 6 is mainly used for fixing the horizontal position of the circular sliding block 7, and meanwhile, a rotary component consisting of the workbench 2, the circular sliding block 7 and the torque motor connecting column 8 can synchronously move with the transition sliding block 6 along the moving direction of the transition sliding block. The connecting plate 10 is mainly used for connecting the torque motor 9 and the transition sliding block 6, so that a rotating part consisting of the workbench 2, the circular sliding block 7 and the torque motor connecting column 8 can ensure the self-rotating motion and can synchronously and linearly move with the transition sliding block 6. The working table 2 is mainly used for bearing external equipment which needs to generate displacement.

Detailed description of the invention

A high-precision two-dimensional static pressure motion system with a linear shaft and a rotary shaft combined is characterized in that: the device comprises a linear shaft and a rotating shaft, wherein the linear shaft comprises a base 1, an upper stop push plate 3, a lower thrust plate 4, a side thrust plate 5, a transition sliding block 6, a connecting plate 10, two end face connecting plates 11 and at least one linear motor 12; the rotating shaft comprises a workbench 2, a circular slide block 7, a torque motor connecting column 8 and a torque motor 9; the transition sliding block 6 is arranged between the upper stop pushing plate 3 and the lower thrust plate 4, the two side thrust plates 5 are positioned at any two opposite sides of the transition sliding block 6, and the upper end and the lower end of each side thrust plate 5 are respectively fixed on the upper stop pushing plate 3 and the lower thrust plate 4; the circular slider 7 is arranged in a central hole formed in the transition slider 6 in a matching manner, the bulge of the workbench 2 penetrates through the central hole formed in the upper stop push plate 3 to be in threaded connection with the circular slider 7, the torque motor connecting post 8 penetrates through the central hole formed in the lower thrust plate 4 to be in threaded connection with the circular slider 7, the torque motor 9 is arranged on the torque motor connecting post 8, and the torque motor 9 is arranged in the central hole formed in the connecting plate 10 in a matching manner; the two end face connecting plates 11 are respectively arranged in grooves formed in two opposite sides of the lower thrust plate 4, the upper end and the lower end of each end face connecting plate 11 are respectively fixed on the transition sliding block 6 and the connecting plate 10, the connecting plate 10 is connected with the lower thrust plate 4 through at least one linear motor 12, and the lower thrust plate 4 is fixed on the base 1.

Further, two linear motors 12 are provided, and the linear motors 12 are respectively mounted on the other two side surfaces of the connecting plate 10 excluding the two side surfaces connected to the two end surface connecting plates 11. The linear motor 12 comprises a linear motor mover 121 and a linear motor stator 122, the linear motor mover 121 is installed on the side surface of the connecting plate 10, the linear motor stator 122 is installed on the lower surface of the lower thrust plate 4, and the linear motor mover 121 and the linear motor stator 122 are matched to work.

The number of the linear motors 12 is further limited in the embodiment, and the linear motors 12 are mainly used for drawing the transition sliding block 6 to generate linear displacement.

Detailed description of the invention

Furthermore, the central holes of the upper thrust plate 3 and the lower thrust plate 4 are all elongated holes, and the elongated holes are parallel to the driving route of the linear motor 12.

This embodiment further defines the shape of the central hole provided by the upper thrust plate 3 and the lower thrust plate 4, and gives a space for the rotation shaft to move linearly.

Detailed description of the invention

Furthermore, a plurality of through holes I81 are formed in the upper surface and the lower surface of the torque motor connecting column 8 in a penetrating manner, a plurality of through holes II71 are formed in the upper surface and the lower surface of the circular sliding block 7 in a penetrating manner, a plurality of through holes III72 are formed in the side surface of the circular sliding block 7 in an inward opening manner, and the through holes II71 are communicated with the through holes III 72.

The embodiment specifically describes the position of a through hole I81 arranged on the torque motor connecting column 8 and the positions of a through hole II71 and a through hole III72 arranged on the circular slider 7, gas or liquid is introduced from the through hole I81 arranged on the torque motor connecting column 8, the gas or liquid flows into the circular slider 7 along the through hole I81, the gas or liquid flows to the through hole III72 along the through hole II71 in the circular slider 7, and gas films or liquid films are formed on the upper surface, the lower surface and the side surfaces of the circular slider 7, so that the motion friction force is reduced; these films also serve as a positioning function while reducing the kinetic friction.

Detailed description of the invention

The upper surface and the lower surface of the torque motor connecting column 8 are provided with a plurality of through holes I81 in a penetrating manner, the upper surface and the lower surface of the circular slider 7 are provided with a plurality of through holes II71 in a penetrating manner, the side surface of the circular slider 7 is provided with a plurality of through holes III72 in an inward opening manner, and the through holes II71 and the through holes III72 are communicated.

The upper stop push plate 3 is provided with a plurality of through holes IV31 from the lower surface to the upper surface, the side surface of the upper stop push plate 3 is provided with a plurality of through holes V32 inwards, and the through holes IV31 and the through holes V32 are communicated with each other.

The embodiment specifically describes the arrangement position of the through hole inside the upper thrust plate 3, gas or liquid is introduced into the side through hole V32 of the upper thrust plate 3, the gas or liquid flows to the through hole IV31 along the through hole V32, and an air film or a liquid film is formed on the upper surfaces of the transition slider 6 and the circular slider 7 and the upper surface of the side thrust plate 5, so that the kinetic friction force is reduced.

Detailed description of the invention

The lower thrust plate 4 is provided with a plurality of through holes VI41 downwards from the upper surface, the side surface of the lower thrust plate 4 is provided with a plurality of through holes VII42 inwards, and the through holes VI41 and VII42 are communicated with each other.

The embodiment specifically describes the arrangement position of the through hole in the lower thrust plate 4, gas or liquid is introduced into the side through hole VII42 of the lower thrust plate 4, the gas or liquid flows to the through hole VI41 along the through hole VII42, and a gas film or a liquid film is formed on the lower surfaces of the transition slider 6 and the circular slider 7 and the lower surface of the side thrust plate 5, so that the kinetic friction force is reduced.

Detailed description of the invention

The side thrust plate 5 is provided with a plurality of through holes VII51 through the upper and lower surfaces thereof, the side thrust plate 5 is provided with a plurality of through holes IX52 inward the side surface thereof, and the through holes VII51 and IX52 are communicated with each other.

The embodiment specifically describes the arrangement position of the through hole inside the side thrust plate 5, and the gas or liquid on the upper surface and the lower surface of the side thrust plate 5 flows to the through hole IX52 along the through hole VII51, and forms a gas film or a liquid film on the side surface of the transition slider 6, thereby reducing the kinetic friction force.

Detailed description of the invention

The upper surface and the lower surface of the side thrust plate 5 are provided with a plurality of through holes VII51 in a penetrating way, the side surface of the side thrust plate 5 is provided with a plurality of through holes IX52 inwards, and the through holes VIII51 and the through holes IX52 are communicated with each other.

The through hole IV31, the through hole V32, the through hole VI41, the through hole VII42 and the through hole IX52 are all blind holes.

The through hole IV31, the through hole V32, the through hole VI41, the through hole VII42 and the through hole IX52 are all blind holes, and the probability of leakage of gas or liquid which is introduced into the through holes in the system is prevented.

Detailed description of the invention

The upper surface and the lower surface of the side thrust plate 5 are provided with a plurality of through holes VIII51 in a penetrating way, the side surface of the side thrust plate 5 is provided with a plurality of through holes IX52 inwards, and the through holes VIII51 and the through holes IX52 are communicated with each other.

The high-precision two-dimensional static pressure motion system combining the linear shaft and the rotating shaft further comprises a plurality of threaded plugs 13, and the threaded plugs 13 are used for plugging all the openings of the through hole I81, the through hole V32, the through hole VII42 and the opening of the through hole IX52 on the outer side wall of the side thrust plate 5.

The technical characteristics of the thread plug 13 are added in the embodiment, according to the requirement of actual gas or liquid flow, gas or liquid is introduced into any combination of one or more of the through holes I81, V32, VII42 or IX52 on the outer side wall of the side thrust plate 5, the rest of the through holes are plugged by the thread plug 13, and after the gas or liquid is introduced, the rest of the through holes are plugged by the thread plug so as to avoid the outflow of the gas or liquid.

The working principle is as follows: the upper, lower and side surfaces of the transition sliding block 6 are respectively surrounded by the upper thrust plate 3, the lower thrust plate 4 and the side thrust plate 5, and gas or liquid lubricating oil is respectively introduced at a side through hole V32 of the upper thrust plate 3, a side through hole VII42 of the lower thrust plate 4 and a side through hole IX52 of the side thrust plate 5, so that a gas film or a liquid film is generated on the contact surface of the upper thrust plate 3 and the transition sliding block 6, the contact surface of the lower thrust plate 4 and the transition sliding block 6 and the contact surface of the side thrust plate 5 and the transition sliding block 6; the upper, lower and side surfaces of the round sliding block 7 are surrounded by the upper stop push plate 3, the lower thrust plate 4 and the transition sliding block 6, gas or liquid is introduced into a through hole I81 on the lower surface of the torque motor connecting column 8 and flows into the round sliding block 7 along the channel inside the round sliding block, the gas or liquid flows to a through hole III72 along the through hole II71 in the round sliding block 7, and a gas film or a liquid film is formed on the surface of the round sliding block 7, so that the motion friction force is reduced; these films also serve as a positioning function while reducing the kinetic friction. The left-right symmetrical layout and the upper-lower double-layer film layout can reduce the influence caused by the unbalance loading on the workbench 2; under the traction of the linear motor 12, the transition sliding block 6 and the round sliding block 7 do linear motion relative to each thrust plate; under the action of the torque motor 9, the torque motor 9 drives the torque motor connecting column 8 to further drive the circular slider 7 to rotate, so that the workbench 2 generates rotary motion relative to the transition slider 6.

When the rotary motion type rotary motion machine works, the workbench 2, the circular slide block 7 and the torque motor connecting column 8 can rotate relative to the connecting plate 10 under the driving of the torque motor 9. Gas or liquid is introduced from the through hole I81 on the lower surface of the torque motor connecting column 8, flows to the through hole III72 along the through hole II71 in the circular slider 7, and forms gas films or liquid films on the upper surface, the lower surface and the side surfaces of the circular slider 7, so that the circular slider 7 floats, and the dynamic friction force of the rotary motion is reduced.

When the linear motor works, the connecting plate 10 generates linear motion relative to the lower thrust plate 4, and the connecting plate 10 can drive the transition sliding block 6 and the circular sliding block 7 to generate linear motion. The lower thrust plate 4, the side thrust plate 5 and the upper thrust plate 3 are internally provided with channels, gas or liquid lubricating oil can be introduced from the outside, and under the action of stable gas pressure or hydraulic pressure, a gas film or a liquid film is formed on the outer surface of the contact surface of the lower thrust plate and the transition sliding block 6, so that the friction force during operation is reduced.

The side surfaces of the plates are provided with a plurality of side holes for the fluid to flow in. According to the actual situation, part of the side holes can be selected to be filled with fluid, and the other side holes can be plugged by the threaded plugs 13. And transmitting fluid between the plates through the passages in the up-down direction, so that the fluid is transmitted to each thrust plate, and finally forming a gas or liquid film on the surface of the sliding block.

Under the traction of the linear motor 12, the transition sliding block 6 generates linear displacement relative to each thrust plate. Under the traction of the torque motor 9, a rotary part consisting of the workbench 2, the circular slider 7 and the torque motor connecting post 8 generates angular displacement relative to the transition slider 6. The combined motion of linear and angular displacement may provide two-dimensional motion for the external device.

The structural contrast of this application and prior art is as follows:

(1) comparison of redundancy levels of parts

The structure of the static pressure motion system in the prior art is shown in fig. 9, the prior structure is compared with the structure in the application, the upper stop push plate 3, the lower thrust plate 4 and the side thrust plate 5 in the structure in the application are equivalent to the upper floating plate 07, the lower floating plate 09 and the side floating plate 08 in the structure in the prior art, the same technical effect of the structure disclosed in the prior art can be realized without the revolving shaft base 06 in the application, the installation and processing difficulty is reduced, and the upper stop push plate 3, the lower thrust plate 4, the side thrust plate 5 and the revolving shaft base 06 in the structure in the prior art are redundant relative to the structure in the application.

(2) Comparison of processing and manufacturing difficulties

Compared with the static pressure motion system in the prior art, the static pressure motion system disclosed by the application has the advantages that the form and position tolerance which needs to be focused is obviously reduced, and the processing and manufacturing difficulty is greatly reduced.

The linear shaft part in the static pressure motion system in the prior art:

parts require higher flatness surfaces: the upper surface of the upper floating plate 07, the lower surface of the upper floating plate 07, the upper surface of the lower floating plate 09, the upper surfaces of the side floating plates 08, the lower surfaces of the side floating plates 08, the side surfaces of the two side floating plates 08, which are in contact with the guide rail 010 (the side surfaces of the side floating plates 08 are surfaces on which air floatation or liquid floatation occurs), the upper surfaces of the guide rail 010, the lower surfaces of the guide rail 010 (left and right air floatation positions and positions connected with the base 1), the two side surfaces of the guide rail 010, and the upper surface of the base 1.

Parts require surfaces of higher parallelism: the upper surface and the lower surface of the upper floating plate 07, the respective upper surfaces and the respective lower surfaces of the two side floating plates 08, the upper surface and the lower surface (air floating part) of the guide rail 010, the upper surface and the lower surface (connecting part with the base 1) of the guide rail 010, and the two side surfaces of the guide rail 010.

Surfaces of parts requiring higher perpendicularity: the upper surfaces and the side surfaces of the two side floating plates 08, the lower surfaces and the side surfaces of the side floating plates 08, the upper surfaces and the side surfaces (left) of the guide rails 010, the upper surfaces and the side surfaces (right) of the guide rails 010, the lower surfaces (left) and the side surfaces (right) of the guide rails 010, and the lower surfaces (right) of the guide rails 010 and the side surfaces (right) of the guide rails 010.

Surface requiring matched grinding: two side surfaces of the two side floating plates 08 with which the two side surfaces of the guide rail 010 are in contact are provided; the lower surface of the upper floating plate 07 and the upper surface of the guide rail 010, and the upper surface of the lower floating plate 09 and the lower surface of the guide rail 010.

Part of the rotating shaft in prior art hydrostatic kinematic systems:

parts require higher flatness surfaces: the lower surface of the workbench 2, the contact surface of the upper stop push plate 3 and the side thrust plate 5, the contact surface of the lower thrust plate 4 and the side thrust plate 5, the upper surfaces of the two side thrust plates 5, the lower surfaces of the two side thrust plates 5, the side surfaces of the two side thrust plates 5, the lower surface of the rotating shaft base 06, the contact surface of the rotating shaft base 06 and the side thrust plate 5, the upper surface of the circular slider 7, the lower surface of the circular slider 7, the side surface of the circular slider 7, the connection surface of the upper stop push plate 3 and the circular slider 7, and the connection surface of the lower thrust plate 4 and the circular slider 7.

Parts require surfaces of higher parallelism: the upper surface and the lower surface of the round sliding block 7, the upper surface and the lower surface of the workbench 2, the upper surface and the lower surface of the rotating shaft base 06, the contact surface of the upper stop push plate 3 and the side thrust plate 5, the connection surface of the upper stop push plate 3 and the round sliding block 7, the contact surface of the lower thrust plate 4 and the side thrust plate 5, and the connection surface of the lower thrust plate 4 and the round sliding block 7.

Surfaces of parts requiring higher perpendicularity: the upper surface and the side surface of the circular slider 7, the lower surface and the side surface of the circular slider 7, the upper surface and the side surface of the side thrust plate 5, and the lower surface and the side surface of the side thrust plate 5.

Surface requiring matched grinding: the side surface of the side thrust plate 5 and the outer surface of the round sliding block 7, the lower surface of the upper stop thrust plate 3 and the upper surface of the round sliding block 7, and the lower surface of the lower thrust plate 4 and the lower surface of the round sliding block 7.

The structure disclosed in this application:

parts require higher flatness surfaces: the lower surface of the upper stop push plate 3, the upper surface of the lower thrust plate 4, the upper surfaces of the two side thrust plates 5, the lower surfaces of the two side thrust plates 5, the side surfaces of the two side thrust plates 5, the upper surface of the transition sliding block 6, the lower surface of the transition sliding block 6, the side surfaces of the transition sliding block 6, the inner surface of the transition sliding block 6, the upper and lower side surfaces of the round sliding block 7, the lower surface of the workbench 2, the lower surface of the lower thrust plate 4 and the upper surface of the base 1.

Parts require surfaces of higher parallelism: the upper surface and the lower surface of each of the two side thrust plates 5, the upper surface and the lower surface of the worktable 2, the upper surface and the lower surface of the transitional slider 6, the surfaces of the two sides of the transitional slider 6, the upper surface and the lower surface of the circular slider 7 and the upper surface and the lower surface of the lower thrust plate 4.

Surfaces of parts requiring higher perpendicularity: the upper surface and the side surface of the side thrust plate 5, the lower surface and the side surface of the side thrust plate 5, the upper surface and the side surface (left) of the transition slider 6, the upper surface and the side surface (right) of the transition slider 6, the lower surface and the side surface (left) of the transition slider 6, the lower surface and the side surface (right) of the transition slider 6, the upper surface and the side surface of the round slider 7, and the lower surface and the side surface of the round slider 7.

Surface requiring matched grinding: the upper surface of the transition sliding block 6 and the lower surface of the upper stop push plate 3 are matched and ground, the lower surface of the transition sliding block 6 and the upper surface of the lower thrust plate 4 are matched and ground, the inner surface of the transition sliding block 6 and the outer surface of the round sliding block 7 are matched and ground, the upper surface of the round sliding block 7 and the lower surface of the upper stop push plate 3 are matched and ground, and the lower surface of the round sliding block 7 and the upper surface of the lower thrust plate.

(3) Contrast between difficulty and precision

According to the invention, the process of installing and adjusting the rotary shaft to the linear shaft is replaced by the self-relation of the parts, so that the position relation is ensured, and the machining precision of the parts can be ensured, therefore, the installing and adjusting difficulty is reduced, and the installing and adjusting precision is high.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A high-precision two-dimensional static pressure motion system with a linear shaft and a rotary shaft combined is characterized in that: the device comprises a linear shaft and a rotating shaft, wherein the linear shaft comprises a base (1), an upper stop push plate (3), a lower thrust plate (4), a side thrust plate (5), a transition sliding block (6), a connecting plate (10), two end face connecting plates (11) and at least one linear motor (12); the rotating shaft comprises a workbench (2), a round sliding block (7), a torque motor connecting column (8) and a torque motor (9); the transition sliding block (6) is arranged between the upper stop pushing plate (3) and the lower thrust plate (4), the two side thrust plates (5) are positioned on any two opposite sides of the transition sliding block (6), and the upper end and the lower end of each side thrust plate (5) are respectively fixed on the upper stop pushing plate (3) and the lower thrust plate (4); the circular sliding block (7) is arranged in a central hole formed in the transition sliding block (6) in a matching mode, a bulge of the workbench (2) penetrates through a central hole formed in the upper stop push plate (3) to be in threaded connection with the circular sliding block (7), a torque motor connecting column (8) penetrates through a central hole formed in the lower thrust plate (4) to be in threaded connection with the circular sliding block (7), a torque motor (9) is installed on the torque motor connecting column (8), and the torque motor (9) is arranged in a central hole formed in the connecting plate (10) in a matching mode; the two end face connecting plates (11) are respectively arranged in grooves formed in two opposite sides of the lower thrust plate (4), the upper end and the lower end of each end face connecting plate (11) are respectively fixed on the transition sliding block (6) and the connecting plate (10), the connecting plates (10) are connected with the lower thrust plate (4) through at least one linear motor (12), and the lower thrust plate (4) is fixed on the base (1).

2. A linear-axis and rotary-axis combined high-precision two-dimensional hydrostatic motion system as defined in claim 1, wherein: the number of the linear motors (12) is two, and the other two side surfaces of the connecting plate (10) except the two side surfaces connected with the two end face connecting plates (11) are respectively provided with the linear motors (12).

3. A linear-axis and rotary-axis combined high-precision two-dimensional hydrostatic motion system as defined in claim 1 or 2, wherein: the linear motor (12) comprises a linear motor rotor (121) and a linear motor stator (122), the linear motor rotor (121) is installed on the side face of the connecting plate (10), and the linear motor stator (122) is installed on the lower surface of the lower thrust plate (4).

4. A linear-axis and rotary-axis combined high-precision two-dimensional hydrostatic motion system as defined in claim 1, wherein: the center holes formed in the upper stop push plate (3) and the lower thrust plate (4) are all elongated holes, and the elongated holes are parallel to the driving route of the linear motor (12).

5. A linear-axis and rotary-axis combined high-precision two-dimensional hydrostatic motion system as defined in claim 1, wherein: the torque motor connecting column is characterized in that a plurality of through holes I (81) are formed in the upper surface and the lower surface of the torque motor connecting column (8) in a penetrating mode, a plurality of through holes II (71) are formed in the upper surface and the lower surface of the circular sliding block (7) in a penetrating mode, a plurality of through holes III (72) are formed in the side face of the circular sliding block (7) in an inward opening mode, and the through holes II (71) and the through holes III (72) are communicated.

6. A linear-axis and rotary-axis combined high-precision two-dimensional hydrostatic motion system as defined in claim 5, wherein: go up the lower surface of dead push pedal (3) upwards to open and to have a plurality of through-hole IV (31), the side of dead push pedal (3) is inwards opened and is had a plurality of through-hole V (32), through-hole IV (31) and through-hole V (32) intercommunication each other.

7. A linear-axis and rotary-axis combined high-precision two-dimensional hydrostatic motion system as defined in claim 6, wherein: the lower thrust plate (4) is provided with a plurality of through holes VI (41) downwards from the upper surface, the side surface of the lower thrust plate (4) is provided with a plurality of through holes VII (42) inwards, and the through holes VI (41) and the through holes VII (42) are communicated with each other.

8. A linear-axis and rotary-axis combined high-precision two-dimensional hydrostatic motion system as defined in claim 7, wherein: the upper surface and the lower surface of the side thrust plate (5) are provided with a plurality of through holes VIII (51) in a penetrating mode, the side surface of the side thrust plate (5) is provided with a plurality of through holes IX (52) in an inward opening mode, and the through holes VIII (51) and the through holes IX (52) are communicated with each other.

9. A linear-axis and rotary-axis combined high-precision two-dimensional hydrostatic motion system as defined in claim 8, wherein: the through hole IV (31), the through hole V (32), the through hole VI (41), the through hole VII (42) and the through hole IX (52) are all blind holes.

10. A linear-axis and rotary-axis combined high-precision two-dimensional hydrostatic motion system as defined in claim 8, wherein: the high-precision two-dimensional static pressure motion system combining the linear shaft and the rotating shaft further comprises a plurality of threaded plugs (13), wherein the threaded plugs (13) are used for plugging all the through holes I (81), V (32) and VII (42) and the through hole IX (52) on the outer side wall of the side thrust plate (5).