CN109164273B - Permanent magnetic torquer for accelerometer - Google Patents
Permanent magnetic torquer for accelerometer Download PDFInfo
- Publication number
- CN109164273B CN109164273B CN201810818839.4A CN201810818839A CN109164273B CN 109164273 B CN109164273 B CN 109164273B CN 201810818839 A CN201810818839 A CN 201810818839A CN 109164273 B CN109164273 B CN 109164273B
- Authority
- CN
- China
- Prior art keywords
- coil
- silicon
- accelerometer
- permanent magnet
- torquer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/105—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by magnetically sensitive devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Micromachines (AREA)
Abstract
The invention belongs to the technical field of flexible pendulum accelerometers, and particularly relates to a silicon-based coil-based permanent magnet torquer for an inertial navigation accelerometer. The permanent magnetic torquer for the accelerometer comprises a yoke iron, a permanent magnet, a magnetic conductive sheet and a silicon-based coil, wherein the yoke iron is positioned at the bottommost part, the permanent magnet is fixed on the yoke iron, and the magnetic conductive sheet is fixed on the upper surface of the permanent magnet. A permanent magnet air gap is formed between the yoke iron and the magnetic conductive sheet, the silicon-based coil is positioned in the permanent magnet air gap, and when the permanent magnet torquer works, the silicon-based coil is fixed on the accelerometer pendulum sheet through the coil cushion block. According to the invention, the silicon-based coil is adopted to replace an enameled wire wound coil of the accelerometer permanent magnetic torquer, so that the thermal stress between the pendulous reed of the accelerometer and the coil of the permanent magnetic torquer is effectively reduced, and the viscoelasticity of the coil is reduced. The silicon-based coil has better space stability in a permanent magnetic circuit, and the scale factor stability of the accelerometer can be obviously improved.
Description
Technical Field
The invention belongs to the technical field of flexible pendulum accelerometers, and particularly relates to a silicon-based coil-based permanent magnet torquer for an inertial navigation accelerometer.
Background
The flexible accelerometer for inertial navigation is a core component in the inertial navigation equipment, and the temperature and time repeatability of the zero position and the scale factor directly influence the precision level of the inertial navigation. With the continuous progress of modern aerospace technology, the requirement of an inertial navigation system on an accelerometer is higher and higher, and the repeatability improvement of the scale factor of the accelerometer becomes the technical bottleneck of the horizontal improvement of the accelerometer. For a flexible pendulum accelerometer, the stability of its torquer is a key factor in determining the stability of the accelerometer scale factor.
The torquer is composed of two parts, one part is a permanent magnetic circuit composed of a permanent magnet and a yoke, and the other part is a conductive coil fixed on a pendulous reed of the accelerometer. To improve the stability of the torquer, it is necessary to improve the magnetic circuit stability of the permanent magnetic circuit and the stability of the torquer coil in space with temperature and time.
At present, a coil of a permanent magnet torquer of an accelerometer is mostly formed by winding an enameled wire, the wound coil has viscoelasticity characteristics according with materials, and meanwhile, the expansion coefficient of the wound coil is usually different from that of a pendulous reed material of the accelerometer by more than one order of magnitude, such as monocrystalline silicon, quartz and the like. After the coil is fixed on the oscillating piece of the accelerometer, the coil is subjected to thermal stress under the action of temperature and is greatly deformed, and the coil cannot return to an initial position after being subjected to stress deformation due to viscoelasticity, so that the spatial position of the coil of the torquer is permanently changed, and the repeatability of a scale factor is reduced. In order to improve the stability of the scale factor of the accelerometer, common methods include that the accelerometer adopts methods such as a framework coil, and the like, and the methods can improve the nonlinearity of the scale factor of the accelerometer to a certain extent, but the effect is very limited. The silicon-based coil has a stable structure, but has the problems of short winding length and large coil resistance, and is difficult to be directly applied to the torquer for the accelerometer.
The torquer coil for the accelerometer is usually fixed on the pendulum piece of the accelerometer through gluing, the connection mode has the problems of poor positioning consistency and large thermal stress, a cushion block can be added between the coil and the pendulum piece to control the position of the coil and reduce the thermal stress, but the effect of reducing the thermal stress between the coil and the pendulum piece by the structure effect is still very limited.
Disclosure of Invention
The invention aims to provide a permanent magnetic torquer for an accelerometer, which is used for effectively reducing the thermal stress between a pendulous reed and a coil of the permanent magnetic torquer and obviously improving the scale factor stability of the accelerometer.
The permanent magnetic torquer for the accelerometer comprises a yoke iron, a permanent magnet, a magnetic conductive sheet and a silicon-based coil, wherein the yoke iron is positioned at the bottommost part, the permanent magnet is fixed on the yoke iron, and the magnetic conductive sheet is fixed on the upper surface of the permanent magnet. A permanent magnet air gap is formed between the yoke iron and the magnetic conductive sheet, the silicon-based coil is positioned in the permanent magnet air gap, and when the permanent magnet torquer works, the silicon-based coil is fixed on the accelerometer pendulum sheet through the coil cushion block.
The fixing mode among the silicon-based coil, the coil cushion block and the accelerometer pendulous reed is bonding or glass sintering.
The coil cushion block is a monocrystalline silicon cushion block with a flexible structure so as to release thermal stress between the accelerometer pendulous reed and the coil; the flexible structure can be a supporting structure with small rigidity in the middle and large rigidity at two ends.
Wherein, in order to increase the winding length of the silicon-based coil and the lifting moment coefficient, the silicon-based coil can be a spiral structure stacked by a plurality of layers, and the spiral directions of each layer are opposite, so as to increase the winding length of the coil.
In order to reduce the resistance of the silicon-based coil and improve the conductivity of the silicon-based coil, metal can be filled in the gap of the silicon-based coil or a metal layer can be plated on the surface of the silicon-based coil, and metal eutectic fusion can also be carried out on the surface of the silicon-based coil.
According to the invention, the silicon-based coil is adopted to replace an enameled wire wound coil of the accelerometer permanent magnetic torquer, so that the thermal stress between the pendulous reed of the accelerometer and the coil of the permanent magnetic torquer is effectively reduced, and the viscoelasticity of the coil is reduced. The silicon-based coil has better space stability in a permanent magnetic circuit, and the scale factor stability of the accelerometer can be obviously improved.
Drawings
FIG. 1 is a perspective view of a permanent magnetic torquer and a pendulous reed for an accelerometer;
FIG. 2 is a sectional view of the permanent magnetic torquer and the pendulous reed for the accelerometer;
FIG. 3 is a cross-sectional view of a coil spacer in a permanent magnetic torquer for an accelerometer of the present invention;
fig. 4 is a top view of a silicon-based coil used in the permanent magnetic torquer for the accelerometer of the present invention.
In the figure:
1-yoke iron, 2-permanent magnet, 3-magnetic conductive sheet, 4-silicon-based coil, 5-permanent magnet air gap, 6-coil cushion block, 7-swinging sheet, 8-swinging sheet flexible part, 9-silicon-based coil lead terminal and 10-gap
Detailed Description
For a clearer understanding of the objects, technical solutions and advantages of the present invention, the following detailed description of the present invention will be made with reference to the accompanying drawings and embodiments.
Referring to fig. 1 and 2, the permanent magnetic torquer for the accelerometer based on the silicon-based coil comprises a yoke 1, a permanent magnet 2, a magnetic conductive sheet 3 and a silicon-based coil 4, wherein the yoke 1 is located at the bottommost part of the structure, the permanent magnet 2 is fixed on the yoke by means of glue joint and the like, and the magnetic conductive sheet 3 is fixed on the upper surface of the permanent magnet 2 by means of glue joint and the like. A permanent magnet air gap 5 is arranged between the yoke iron 1 and the magnetic conductive sheet 3, and the silicon-based coil is positioned in the permanent magnet air gap 5.
Referring to fig. 2 and 3, when the silicon-based coil permanent magnet torquer of the accelerometer works, the silicon-based coil 4 needs to be fixed on the swinging plate 7, and the swinging plate 7 and the silicon-based coil 4 are connected through the coil cushion block 6, wherein the connection mode can be bonding or glass sintering. The coil cushion block 6 is a supporting structure with small rigidity in the middle and large rigidity at two ends and is used for releasing the thermal stress between the swinging sheet and the coil. The permanent magnet 2 is magnetized along the axial direction, and the yoke iron 1 and the magnetic conductive sheet 3 guide the magnetic field generated by the permanent magnet 2 to enter the permanent magnet air gap 5 to form a magnetic field distributed along the radial direction of the magnetic conductive sheet 3. When the silicon-based coil 4 is electrified, due to electromagnetic induction, the silicon-based coil 4 will generate an acting force along the axial direction of the magnetic conductive sheet 3, and the acting force is as follows:
F=BIL
wherein B is the magnetic field strength of the permanent magnet air gap 5, I is the energizing current of the silicon-based coil 4, and L is the length of the lead of the silicon-based coil 4. The swinging piece 7 is subjected to the moment generated by the silicon-based coil 4, the swinging piece rotates around the flexible part 8 of the swinging piece, the direction of the current in the silicon-based coil 4 determines the stress direction of the silicon-based coil 4, and the moment applying control of the swinging piece 7 based on the silicon-based coil permanent magnet torquer can be realized by adjusting the magnitude and the direction of the current in the silicon-based coil 4.
Referring to fig. 4, the silicon-based coil 4 is formed by etching single crystal silicon, and a surface insulation process is required after the silicon-based coil is processed. The silicon-based coil 4 is of a spiral structure, and is subjected to lead energization through two silicon-based coil lead terminals 9. In order to increase the coil wire length, the silicon-based coils 4 may be stacked in multiple layers to increase the coil winding length, wherein the spiral direction of each stacked silicon-based coil is opposite. In order to reduce the resistance of the silicon-based coil 4 and improve the conductivity of the silicon-based coil, metal can be filled in the gap 10 of the silicon-based coil or a metal layer can be plated on the surface of the silicon-based coil 4, and metal eutectic fusion can also be carried out on the surface of the silicon-based coil 4.
Claims (3)
1. A permanent magnetic torquer for an accelerometer comprises a yoke (1), a permanent magnet (2), a magnetic conductive sheet (3) and a silicon-based coil (4), wherein the yoke (1) is located at the bottommost part, the permanent magnet (2) is fixed on the yoke (1), the magnetic conductive sheet (3) is fixed on the upper surface of the permanent magnet (2), a permanent magnetic air gap (5) is formed between the yoke (1) and the magnetic conductive sheet (3), the silicon-based coil is located inside the permanent magnetic air gap (5), when the permanent magnetic torquer works, the silicon-based coil (4) is fixed on an accelerometer pendulous reed (7) through a flexible coil cushion block (6), the fixing modes among the silicon-based coil (4), the flexible coil cushion block (6) and the accelerometer pendulous reed (7) are bonding or glass sintering, the silicon-based coil (4) is of a multi-layer stacked spiral structure, the spiral directions of each layer are opposite, gaps (10) of the silicon-based, the surface of the silicon-based coil (4) is plated with a metal plating layer or is subjected to metal eutectic fusion.
2. A permanent magnetic torquer for an accelerometer as claimed in claim 1 wherein the flexible coil pad (6) is a single crystal silicon pad.
3. The permanent magnetic torquer for an accelerometer of claim 2, wherein the single crystal silicon spacer is a support structure with low rigidity in the middle and high rigidity at the two ends.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810818839.4A CN109164273B (en) | 2018-07-24 | 2018-07-24 | Permanent magnetic torquer for accelerometer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810818839.4A CN109164273B (en) | 2018-07-24 | 2018-07-24 | Permanent magnetic torquer for accelerometer |
Publications (2)
Publication Number | Publication Date |
---|---|
CN109164273A CN109164273A (en) | 2019-01-08 |
CN109164273B true CN109164273B (en) | 2021-04-20 |
Family
ID=64898277
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201810818839.4A Active CN109164273B (en) | 2018-07-24 | 2018-07-24 | Permanent magnetic torquer for accelerometer |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN109164273B (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110829777B (en) * | 2019-10-18 | 2021-09-14 | 中国航空工业集团公司西安飞行自动控制研究所 | Miniature permanent magnetic torquer with high air gap magnetic field intensity |
CN112180121A (en) * | 2020-09-11 | 2021-01-05 | 中国船舶重工集团公司第七0七研究所 | Method for bonding pendulum component of high-stability quartz flexible accelerometer |
CN112131772B (en) * | 2020-09-29 | 2022-05-10 | 哈尔滨工业大学 | Simulation method of non-magnetic conductive layer applied to static characteristic simulation of magnetic latching relay |
CN112540193B (en) * | 2020-12-25 | 2023-04-28 | 中国电子科技集团公司第二十六研究所 | Quartz flexible acceleration detection mass pendulum for isolating disturbance moment and processing method |
CN113640545B (en) * | 2021-07-13 | 2023-07-18 | 西安航天精密机电研究所 | Equivalent adjustable accelerometer and internal fault quick positioning method thereof |
CN113640544B (en) * | 2021-07-13 | 2023-07-18 | 西安航天精密机电研究所 | Moving-coil switchable accelerometer and switching method of logic gate switch thereof |
CN113252944B (en) * | 2021-07-14 | 2021-09-17 | 中国工程物理研究院电子工程研究所 | Quartz flexible accelerometer based on micro torquer and manufacturing method thereof |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0228563A (en) * | 1988-07-19 | 1990-01-30 | Ricoh Co Ltd | Vibration sensor |
US5191794A (en) * | 1990-12-24 | 1993-03-09 | Litton Systems, Inc. | Integrated accelerometer with resilient limit stops |
CN101592678A (en) * | 2009-07-03 | 2009-12-02 | 北京航天控制仪器研究所 | A kind of flexible pendulous accelerometer |
CN104280571A (en) * | 2014-10-15 | 2015-01-14 | 重庆大学 | Electromagnetic balance type acceleration sensor |
CN105471254A (en) * | 2016-02-01 | 2016-04-06 | 英麦科(厦门)微电子科技有限公司 | DC-DC converter |
-
2018
- 2018-07-24 CN CN201810818839.4A patent/CN109164273B/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0228563A (en) * | 1988-07-19 | 1990-01-30 | Ricoh Co Ltd | Vibration sensor |
US5191794A (en) * | 1990-12-24 | 1993-03-09 | Litton Systems, Inc. | Integrated accelerometer with resilient limit stops |
CN101592678A (en) * | 2009-07-03 | 2009-12-02 | 北京航天控制仪器研究所 | A kind of flexible pendulous accelerometer |
CN104280571A (en) * | 2014-10-15 | 2015-01-14 | 重庆大学 | Electromagnetic balance type acceleration sensor |
CN105471254A (en) * | 2016-02-01 | 2016-04-06 | 英麦科(厦门)微电子科技有限公司 | DC-DC converter |
Also Published As
Publication number | Publication date |
---|---|
CN109164273A (en) | 2019-01-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN109164273B (en) | Permanent magnetic torquer for accelerometer | |
KR100779827B1 (en) | Linear motor and linear moving stage device | |
JP5768803B2 (en) | MEMS equipment | |
US8860403B2 (en) | Gradient sensor of a component of a magnetic field with permanent magnet | |
WO2018058809A1 (en) | Linear vibration motor | |
US20180148314A1 (en) | Mirror drive device and method for producing same | |
JPH09140171A (en) | Micro mover | |
CN101907690A (en) | Miniaturized amorphous magnetically soft alloy magnetic core solenoid flux gate sensor | |
EP1365498A2 (en) | Voice coil linear actuator, apparatus using the actuator, and method for manufacturing the actuator | |
US20080100898A1 (en) | Electromagnetic micro-actuator | |
WO2018058807A1 (en) | Linear vibration motor | |
CN101481083A (en) | Miniaturized fluxgate sensor of micro-electro-mechanism system | |
CN109683308B (en) | Electromagnetic driving vibrating mirror capable of reducing swinging motion | |
CN102981131A (en) | Low-noise micro plane fluxgate sensor based on main and auxiliary coil double incentive | |
CN105978200B (en) | A kind of multifrequency complex vibration simulator and its method for realizing multifrequency complex vibration | |
CN107659208A (en) | Two-dimensional linear moving-iron type micro-angular displacement electromagnetic activation device and its start method | |
CN104847825B (en) | Array magnetic suspension gravity compensator | |
JP2013126337A (en) | Power generation device | |
CN104280571A (en) | Electromagnetic balance type acceleration sensor | |
CN113252944B (en) | Quartz flexible accelerometer based on micro torquer and manufacturing method thereof | |
JP3559604B2 (en) | Accelerometer | |
US5693883A (en) | Electromagnetic accelerometer | |
JP5694684B2 (en) | Using pole pieces to induce magnetic flux by MEMS devices, and fabrication methods | |
CN219394957U (en) | Novel motor lower spring plate structure | |
WO2014162521A1 (en) | Actuator |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |