CN109084692A - Differential type displacement sensor and its measurement method with refracting telescope - Google Patents
Differential type displacement sensor and its measurement method with refracting telescope Download PDFInfo
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- CN109084692A CN109084692A CN201811308037.5A CN201811308037A CN109084692A CN 109084692 A CN109084692 A CN 109084692A CN 201811308037 A CN201811308037 A CN 201811308037A CN 109084692 A CN109084692 A CN 109084692A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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Abstract
The present invention provides a kind of differential type displacement sensor and its measurement method with refracting telescope, the displacement sensor, including laser beam, are incident to the reflecting surface of triangular wave reflecting mirror；It is divided microscope group, including spectroscope and reflective mirror, and spectroscope and reflective mirror setting in a certain angle, and the laser beam of the reflective surface of triangular wave reflecting mirror is made to be incident to spectroscope, a part of laser beam is successively incident to refracting telescope one after spectroscope and mirror reflection, and another part laser beam is incident to refracting telescope two after spectroscope transmits；The incoming position variable quantity of processing system, the laser beam for being received according to photodetector one and photodetector two calculates the change in displacement value of testee.The present invention has the differential type displacement sensor of refracting telescope, by the setting of refracting telescope one and refracting telescope two, the angle of laser light incident to photodetector is reduced, so as to improve the measurement accuracy of displacement sensor.
Description
Technical field
The present invention relates to field of measuring technique, in particular to a kind of differential type displacement sensor and its survey with refracting telescope
Amount method.
Background technique
Displacement measurement new principle based on optical triangulation amplifying method is on the basis of optical triangulation amplifying method, in conjunction with three
What angle wave optical device and high-precision PSD (Position Seitive Device, position sensitive (sensitivity) detector) were realized.
Triangular wave optical device segments linear displacement at equal intervals, while reducing optical device machining accuracy and size requirement, reduces
The size requirement of high-precision PSD realizes high precision position shift measurement in a small range.However displacement sensor in the prior art,
For example, application No. is 201810481648.3, the displacement of offer in entitled " differential type displacement sensor and its measurement method "
Sensor, displacement measurement principle and structure in reading head and triangular wave optical reflection component as shown in Figure 1, as shown in Figure 1, occur
After relative displacement, amplify by optical triangulation, horizontal thin tail sheep amplifies on photodetector (PSD), can be by length
The precision of measurement greatly promotes.However the measuring and amplifying multiple of its displacement sensor is related with PSD incidence angle, the amplification of sensor
Multiple is easy to be affected, as when being incident in the incidence angle of laser beam of PSD and increasing, the measurement accuracy of PSD itself can under
Drop.
Summary of the invention
The purpose of the present invention is to provide a kind of differential type displacement sensings with refracting telescope for improving displacement measurement accuracy
Device and its measurement method.
To achieve the goals above, the present invention the following technical schemes are provided:
A kind of differential type displacement sensor with refracting telescope, comprising:
Triangular wave reflecting mirror, including several reflectings surface；
Laser beam is incident to a reflecting surface of triangular wave reflecting mirror；
It is divided microscope group, including spectroscope and reflective mirror, and spectroscope and reflective mirror setting in a certain angle, and makes triangle
The laser beam of the reflective surface of wave reflection mirror is incident to spectroscope, and a part of laser beam is successively through spectroscope and mirror reflection
After be incident to refracting telescope and reflect together, another part laser beam is incident to refracting telescope two and is rolled over after spectroscope transmits
It penetrates；
Photodetector one for receiving the laser beam reflected through refracting telescope one, and measures its incoming position；
Photodetector two for receiving the laser beam reflected through refracting telescope two, and measures its incoming position；
The incoming position of processing system, the laser beam for being received according to photodetector one and photodetector two becomes
Change the change in displacement value that meter calculates testee.
Setting position in the scheme advanced optimized, between photodetector one and photodetector two and light splitting microscope group
Meet relationship: it is identical as the incidence angle of photodetector two to be incident to photodetector one respectively after being divided microscope group.For example, point
Light microscopic and reflective mirror are in 90 degree of angle settings, and photodetector one is arranged in parallel with photodetector two.So set, can
So that ensureing that photodetector one divides with photodetector two when the angle of the reflecting surface of triangular wave reflecting mirror changes
Suo little not be consistent with the multiple of amplification, simplify calculating process.
In the scheme advanced optimized, the refracting telescope one is bonded with photodetector one, the refracting telescope two and photoelectricity
Detector two is bonded.
In the scheme advanced optimized, the laser beam is P-polarized light.
In the scheme advanced optimized, the plane of incidence of the refracting telescope one and exit facet are plane, and the plane of incidence with go out
The face of penetrating is parallel to each other；The plane of incidence and exit facet of the refracting telescope two are plane, and the plane of incidence is parallel to each other with exit facet
Further include shell in the scheme advanced optimized, laser beam is emitted to obtain by laser source, laser source, light splitting microscope group,
Refracting telescope one, refracting telescope two, photodetector one, photodetector two are fixedly installed in shell, form reading head.
In the scheme advanced optimized, the reading head is at least two, and the position between at least two reading head
Set relationship satisfaction: in measurement process, at least one reading head can read laser beam in photodetector one and photoelectricity
Incoming position variable quantity on detector two.
On the other hand, the embodiment of the present invention provides a kind of using the above-mentioned differential type displacement sensing with refracting telescope simultaneously
The method of device progress displacement measurement, comprising the following steps:
Testee is fixed on triangular wave reflecting mirror or reading head；
Adjust laser beam, triangular wave reflecting mirror, light splitting microscope group, refracting telescope one, refracting telescope two, photodetector one, photoelectricity
The positional relationship of detector two, so that the laser beam of the reflective surface of triangular wave reflecting mirror is incident to spectroscope, a part swashs
Light beam is successively incident to refracting telescope one after spectroscope and mirror reflection, is incident to photodetector after the refraction of refracting telescope one
One；Another part laser beam is incident to refracting telescope two after spectroscope transmits, and is incident to photodetection after the refraction of refracting telescope two
Device two；
Emit laser beam, the laser beam is incident to spectroscope after the reflective surface of the triangular wave reflecting mirror
Group is detected the initial bit of the reflection laser beam after light splitting microscope group reflection and after the refraction of refracting telescope one by photodetector one
It sets, is detected the initial bit of the transmission laser beam by photodetector two after light splitting microscope group transmission and after the refraction of refracting telescope two
It sets；
Testee displacement, in displacement process, photodetector one and photodetector two detect laser beam respectively
Position variation, until testee stop be displaced；
Processing system is handled by the change in location detected to photodetector one with photodetector two, is obtained
The shift value of testee.
Compared with prior art, the invention has the following advantages:
The present invention has the differential type displacement sensor of refracting telescope, by the setting of multiple reading heads, in measurement process,
If some reading head cannot read the location variation of laser beam, switches to another reading head and measure, therefore can
Effective measurement can be realized in displacement process to ensure, realize continuous dislocation measurement.
By the setting of refracting telescope one and refracting telescope two, while so that increasing displacement sensor amplification factor, reduces and swash
Light is incident to the angle of photodetector, therefore displacement sensor can guarantee photodetector while improving amplification factor
Measurement stability, the measurement accuracy of displacement sensor in other words can be improved.
It is plane by the plane of incidence and exit facet of the refracting telescope one, and the plane of incidence is parallel to each other with exit facet；Folding
It penetrates the plane of incidence of mirror two and exit facet is plane, and the plane of incidence is parallel to each other with exit facet.So that being incident to swashing for refracting telescope
Optical position variable quantity is identical as the laser position variable quantity of photodetector is incident to, so that simplifying displacement measurement calculates public affairs
Formula.
By using polarization laser, the intensity that laser is incident to photodetector by refraction is increased, refraction is reduced
Mirror reflects the ratio of incident light, in other words can reduce requirement of the photodetector to laser light incident intensity.
It is bonded by the refracting telescope with photodetector, the laser beam after avoiding refracting telescope from reflecting reflects again.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly introduced, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as to model
The restriction enclosed for those of ordinary skill in the art without creative efforts, can also be according to these
Attached drawing obtains other relevant drawings.
Fig. 1 show the displacement measurement schematic illustration of displacement sensor in the prior art.
The measurement that Fig. 2 show a kind of differential type displacement sensor with refracting telescope of structure of the offer of embodiment 1 is former
Manage schematic diagram.
Fig. 3 show the measurement of the differential type displacement sensor with refracting telescope of another structure of the offer of embodiment 1
Schematic illustration.
Fig. 4 show the measurement of the differential type displacement sensor with refracting telescope of another structure of the offer of embodiment 1
Schematic illustration.
The measurement that Fig. 5 show a kind of differential type displacement sensor with refracting telescope of structure of the offer of embodiment 2 is former
Manage schematic diagram.
Figure label explanation:
Laser source 1, laser beam 2, triangular wave reflecting mirror 3, reflecting surface 31, light splitting microscope group 4, spectroscope 41, reflective mirror 42,
Refracting telescope 1, refracting telescope 26, photodetector 1, photodetector 28, shell 9.
Specific embodiment
Below in conjunction with attached drawing in the embodiment of the present invention, technical solution in the embodiment of the present invention carries out clear and complete
Description.It should be appreciated that specific embodiment described herein is used only for explaining the present invention, it is not intended to limit the present invention.Base
In the embodiment of the present invention, those skilled in the art's every other implementation obtained under the premise of no creative work
Example, belongs to protection scope of the present invention.
Embodiment 1
Referring to Fig. 2, providing a kind of differential type displacement sensor with refracting telescope, including laser source in the present embodiment
1, triangular wave reflecting mirror 3 is divided microscope group 4, refracting telescope 1, refracting telescope 26, photodetector 1, photodetector 28.
Wherein, laser source 1 is for launching laser beam 2, and a reflecting surface 31 of directive triangular wave reflecting mirror 3；Light splitting
Microscope group 4, including spectroscope 41 and reflective mirror 42, and spectroscope 41 and reflective mirror 42 are vertically arranged, the reflection of triangular wave reflecting mirror 3
The laser beam 2 of face reflection is incident to spectroscope 41, and a part of laser beam 2 is successively incident to folding after spectroscope and mirror reflection
Mirror 1 is penetrated, another part laser beam 2 is incident to refracting telescope 26 after spectroscope transmits；Photodetector 1 and photodetection
Device 28 is arranged in parallel, and to be incident to photodetector 1 identical as the incidence angle of photodetector 28 for laser beam 2；Photoelectricity is visited
It surveys device 1 and receives the laser beam reflected through refracting telescope 1, and measure its incoming position；Photodetector 28 is received through refracting telescope
The laser beam of 26 refractions, and measure its incoming position；Processing system, for according to photodetector 1 and photodetector two
The incoming position variable quantity of 8 laser beams 2 received calculates the change in displacement value of testee.
Readily comprehensible, when the angle of incident ray and photodetector receiving plane is too small, the hot spot of incident ray can be sent out
The offset of raw center of gravity, impacts the measurement accuracy of photodetector.By the setting of refracting telescope one and refracting telescope two, so that
While increasing displacement sensor amplification factor, the angle of laser light incident to photodetector is reduced, therefore displacement can be improved
The measurement accuracy of sensor.And in the present solution, in order to avoid refraction occurs again for the laser beam after refracting telescope reflects to survey
Accuracy of measurement impacts, and the refracting telescope is bonded with photodetector.
In further embodiment, the plane of incidence of the refracting telescope 1 and exit facet are plane, and the plane of incidence and outgoing
Face is parallel to each other.So that being incident to the laser position variable quantity of refracting telescope 1 and being incident to the laser position of photodetector 1
Variable quantity is identical, so that simplifying displacement measurement calculates formula.In scheme, the plane of incidence and exit facet of refracting telescope 26 are also equal
For plane, and the plane of incidence is parallel to each other with exit facet, so that being incident to the laser position variable quantity of refracting telescope 26 and being incident to light
The laser position variable quantity of electric explorer 28 is identical, so that simplifying displacement measurement calculates formula.
As a kind of preferably embodiment, the laser beam 2 is P-polarized light.By using polarised light, laser is increased
The intensity of photodetector is incident to by refraction, reduce laser beam with when big incident angles to refracting telescope laser beam it is anti-
Rate is penetrated, the ratio of refracting telescope reflection incident light is reduced, in other words can reduce photodetector and laser light incident intensity is wanted
It asks.
As shown in Fig. 2, the laser beam 2 before displacement is indicated by the solid line, the laser beam 2 after displacement is represented by dashed line, laser beam 2
Transmission path it is as follows:
Before displacement, laser source 1 emits a reflecting surface 31 of the laser beam 2 to triangular wave reflecting mirror 3, triangular wave reflecting mirror 3
Reflecting surface 31 by laser beam 2 reflex to light splitting microscope group 4 in spectroscope 41, a part of laser beam 2 be first split mirror 41 reflection
Refracting telescope 1 is reflexed to reflective mirror 42, then through reflective mirror 42, is incident to photodetector 1 after the refraction of refracting telescope 1
(PSD2 in figure), another part laser beam 2 is incident to refracting telescope 26 after spectroscope transmits, and enters after the refraction of refracting telescope 26
It being incident upon photodetector 28 (PSD1 in figure), PSD1 receives the laser beam of spectroscope transmission, and measures incoming position, this
The first incoming position of Shi Jiwei, PSD2 receive the laser beam of mirror reflection, and measure incoming position, are denoted as second at this time and enter
Penetrate position.
It (is shown as in Fig. 2 to left dislocation, laser source 1, light splitting microscope group 4, refracting telescope 1, refracting telescope two when displacement after displacement
6, photodetector 1,28 synchronous shift of photodetector), it is same to triangular wave reflecting mirror 3 that laser source 1 emits laser beam 2
Laser beam 2 is reflexed to the spectroscope 41 in light splitting microscope group 4, a part by the reflecting surface of one reflecting surface 31, triangular wave reflecting mirror 3
The mirror 41 that is first split of laser beam 2 reflexes to reflective mirror 42, then reflexes to refracting telescope 1 through reflective mirror 42, reflects through refracting telescope 1
It is incident to photodetector 1 (PSD2 in figure) afterwards, another part laser beam 2 is incident to refracting telescope two after spectroscope transmits
6, it is incident to photodetector 28 (PSD1 in figure) after the refraction of refracting telescope 26, PSD1 receives the laser of spectroscope transmission
Beam, and incoming position is measured, it is denoted as third incoming position at this time, PSD2 receives the laser beam of mirror reflection, and measures
Incoming position is denoted as the 4th incoming position at this time.
The displacement variable that PSD1 can be obtained by the first incoming position and third incoming position, by the second incoming position and
Four incoming positions can obtain the displacement variable of PSD2, take the weighted average of the displacement variable of PSD1 and PSD2 to be used as and have
The displacement variable of the differential type displacement sensor of refracting telescope can accurately calculate testee further according to the amplification factor of system
Displacement.
In the present embodiment, by the setting of photodetector 1 and photodetector 28 and light splitting microscope group 4, work as triangular wave
The angle of several reflectings surface of reflecting mirror there are when mismachining tolerance, i.e., the angle difference of reflecting surface when, photodetector 1
The amplification factor of (PSD2 in such as Fig. 2) reduces, and the amplification factor of photodetector 28 (PSD1 in such as Fig. 2) increases,
Synthesis result (has the differential type displacement sensor of refracting telescope) can keep having
The amplification factor of the differential type displacement sensor entirety of refracting telescope is constant, thus can eliminate reflecting surface angle mismachining tolerance and
Amplification factor is influenced, in other words can ensure that the amplification factor of the differential type displacement sensor with refracting telescope is anti-not by triangular wave
Penetrate the influence of 3 processing technology of mirror.
It should be noted that in the present embodiment, based on the considerations of facilitating operation and assembly, by spectroscope 41 and reflective mirror 42
It is arranged in 90 degree of angles, and photodetector 1 is arranged in parallel with photodetector 28.But as embodiment, divide
Light microscopic group can also have other settings, photodetector 1 and the not parallel setting of photodetector 28, such as Fig. 3 institute at this time
Show, as long as meeting following condition:
Spectroscope 41 and the setting in a certain angle of reflective mirror 42, and make the laser of the reflective surface of triangular wave reflecting mirror
Beam is incident to spectroscope 41, and a part of laser beam 2 mirror 41 that is first split reflexes to reflective mirror 42, then reflexes to folding through reflective mirror 42
Mirror 1 is penetrated, photodetector 1 is incident to after the refraction of refracting telescope 1, another part laser beam 2 is after the transmission of spectroscope 41
It is incident to refracting telescope 26, is incident to photodetector 28 after the refraction of refracting telescope 26.
For example, when spectroscope and reflective mirror are arranged in non-90 degree angle, when the angle hair of the reflecting surface of triangular wave reflecting mirror
Changing, the displacement measured respectively using PSD1 and PSD2 will a diminution (relative to the displacement of testee, be still
Magnifying state is only the diminution of amplification factor), an increase, but diminution is different from the multiple increased, such as the position of PSD1
The amplification factor moved after increasing is d1 times, and the amplification factor after the displacement of PSD2 is reduced is d2 times, then entire with folding at this time
Penetrate the shift value (i.e. the shift value of testee) of the differential type displacement sensor of mirror then are as follows:
It is further to note that setting can also be passed through when spectroscope and reflective mirror are arranged in non-90 degree angle
Positional relationship between PSD1 and PSD2 so that the incidence angle for being incident to the laser beam of PSD1 and PSD2 is identical, and then is realized and is worked as
When the angle of the reflecting surface of triangular wave reflecting mirror changes, the change in displacement measured respectively using PSD1 and PSD2 is reduced respectively
The identical multiple with increase, as shown in figure 3, to simplify calculating process.
It should also be noted that, the reflecting surface 31 of triangular wave reflecting mirror 3 and the angle of horizontal plane are 30 degree in Fig. 2-3, enter
The incidence angle for being incident upon the laser beam 2 of the reflecting surface 31 of triangular wave reflecting mirror 3 is 30 degree, so the reflecting surface of triangular wave reflecting mirror 3
The laser beam of 31 reflections is to be incident to refracting telescope 1 vertically, an only example shown in Fig. 2-3, to triangular wave in the present embodiment
There is no limit be incident to the incident angle of the reflecting surface of triangular wave reflecting mirror 3 to laser beam 2 to the angle of the reflecting surface of reflecting mirror 3
Also there is no limit, such as shown in Fig. 4.
Can refering to fig. 1, the differential type displacement sensor with refracting telescope can also include shell 9, laser source 1, triangle
Wave reflection mirror 3, light splitting microscope group 4, refracting telescope 1, refracting telescope 26, photodetector 1, photodetector 28 are fixedly installed
In in shell 9, forming reading head, the laser beam 2 and its reflected beams that laser source 1 emits can pass through the transmitting-receiving of reading head
End face.Laser source 1, light splitting microscope group 4, refracting telescope 1, refracting telescope 26, photodetector 7 and photodetector 8 are fixedly installed
In in shell 9, mutual position can be kept to fix, can also ensure and keep synchronous shift between each component.
It when measurement, can be fixed on testee, be read using by triangular wave reflecting mirror 3 according to practical situations
Head remains stationary, and when testee is subjected to displacement, relative motion occurs for triangular wave reflecting mirror 3 and reading head, and reading head can
The triangular wave reflecting mirror 3 i.e. shift value of testee is obtained with measurement；Alternatively, measured object can also be fixed on using by reading head
On body, triangular wave reflecting mirror 3 is remained stationary, and testee, which is subjected to displacement, drives reading head movement, reading head and triangle wave reflection
Relative displacement occurs for mirror 3, and reading head can measure the relative displacement between reading head and triangular wave reflecting mirror 3, so obtain by
Survey the shift value of object；Measurement selects triangular wave reflecting mirror 3 or reading head to be fixed on testee, improves measurement just
Benefit.
When carrying out displacement measurement using the above-mentioned differential type displacement sensor with refracting telescope, its step are as follows:
Testee is fixed on triangular wave reflecting mirror or reading head by step 1；
Step 2, adjustment laser beam, triangular wave reflecting mirror, light splitting microscope group, refracting telescope one, refracting telescope two, photodetector
One, the positional relationship of photodetector two, so that the laser beam of the reflective surface of triangular wave reflecting mirror is incident to spectroscope, one
Part of laser beam is successively incident to refracting telescope one after spectroscope and mirror reflection, is incident to photoelectricity after the refraction of refracting telescope one
Detector one；Another part laser beam is incident to refracting telescope two after spectroscope transmits, and is incident to light after the refraction of refracting telescope two
Electric explorer two；
Step 3, emits laser beam, and the laser beam is incident to after the reflective surface of the triangular wave reflecting mirror
It is divided microscope group, the reflection laser beam is detected by photodetector one after light splitting microscope group reflection and after the refraction of refracting telescope one
Initial position detects the transmission laser beam by photodetector two after light splitting microscope group transmission and after the refraction of refracting telescope two
Initial position；
Step 4, testee displacement, in displacement process, photodetector one detects respectively with photodetector two
The variation of the position of laser beam, until testee stops being displaced；
Step 5, processing system pass through at the change in location that detects to photodetector one with photodetector two
Reason, obtains the shift value of testee.
Embodiment 2
It can be refering to Fig. 5, described in the differential type displacement sensor with refracting telescope and embodiment 2 in the present embodiment
Differential type displacement sensor with refracting telescope is compared, and difference is: the differential type with refracting telescope provided in the present embodiment
In displacement sensor, including two reading heads, two reading header structures are consistent, and at symmetrically placed.
Continuous dislocation measurement may be implemented in differential type displacement sensor described in the present embodiment with refracting telescope.Specifically
, one for can selecting in two reading heads measures, when laser beam reflection point in one of reading head is located at reflection
Certain positions in face, such as the intersection position on the top of reflecting surface, two reflectings surface, the length of corresponding photodetector have again
Limit, it is thus possible to corresponding photodetector can not be reflected into, which can not just calculate its shift value, another reading
Several laser beam reflection points are located at the other positions of another reflecting surface, can be reflected into corresponding photodetector and can carry out
Conversion measurement, can be realized testee mobile per a moment, in the laser beam that each reflecting surface is reflected on triangular wave reflecting mirror 3
At least one can be reflected into corresponding photodetector, and processing system, which can toggle, at this time calculates in different reading heads
The laser beam position of photodetector one and photodetector two changes, and is overlapped accumulative, is displaced with realizing to testee
The measurement of variation, measurement method is simple, reliable, easy to operate, and can be improved measurement accuracy.
Two sets of measuring systems, which can be all set in a shell, forms a reading head, can also two sets of measuring systems point
It is not set in a shell, separately constitutes two reading heads.Specifically, matching including two laser sources, each laser source correspondence
Have a set of component facility, include in the component facility light splitting microscope group, refracting telescope one, refracting telescope two, photodetector one with
Photodetector two.Two laser sources and two sets of component facilities are fixedly installed in a shell, form a reading head.Or
Person, laser source, the component facility to match with laser source form a reading head, another laser source, another set of laser source phase
Matched component facility is fixedly installed in another shell, forms another reading head.
In the present solution, light splitting microscope group can be integrally formed component, convenient for manufacture, and ensure that mutual angle is solid
Fixed, spectroscope and reflective mirror are the production of same raw material at this time, have the function of light splitting, in order to enhance the reflective effect of reflective mirror
Total reflection film can be arranged in the reflecting surface of reflective mirror in fruit；It is also possible to be connected and composed by spectroscope and reflective mirror, due to reflective
Mirror only plays reflex, so reflective mirror can use total reflection mirror.
It is readily comprehensible, in the present embodiment, the purpose that two reading heads are set be avoid wherein one group of photodetector connect
When can not receive laser beam, laser beam can be received by another group of photodetector, realize displacement measurement, therefore in addition to such as Fig. 5
Shown in outside set-up mode, can also have other set-up modes, as long as reading head is arranged in a staggered manner, so that two laser beams exist respectively
The original incident point position of first reflecting surface is different.Such as the laser beam projected in second reading head can be incident to place
In another first reflecting surface that the first reflecting surface of laser beam incidence is ipsilateral, can also be incident in laser beam it is incident the
Another first reflecting surface (seeing Fig. 5) of one reflecting surface opposite side can also be incident to incident same anti-of laser beam
Face is penetrated, but incidence point position is different.
When carrying out displacement measurement using the differential type displacement sensor for having refracting telescope described in the present embodiment, step is such as
Under:
Testee is fixed on triangular wave reflecting mirror or reading head by step 1；
Step 2, adjustment laser beam, triangular wave reflecting mirror, light splitting microscope group, refracting telescope one, refracting telescope two, photodetector
One, the positional relationship of photodetector two, so that the laser beam of the reflective surface of triangular wave reflecting mirror is incident to spectroscope, one
Part of laser beam is successively incident to refracting telescope one after spectroscope and mirror reflection, is incident to photoelectricity after the refraction of refracting telescope one
Detector one；Another part laser beam is incident to refracting telescope two after spectroscope transmits, and is incident to light after the refraction of refracting telescope two
Electric explorer two；
Step 3, emits laser beam, and the laser beam is incident to after the reflective surface of the triangular wave reflecting mirror
It is divided microscope group, the reflection laser beam is detected by photodetector one after light splitting microscope group reflection and after the refraction of refracting telescope one
Initial position detects the transmission laser beam by photodetector two after light splitting microscope group transmission and after the refraction of refracting telescope two
Initial position；
Step 4, testee displacement, in displacement process, the change of the incoming position of photodetector detection laser beam
Change, until testee stops being displaced；When the photodetector can not receive the laser beam of reflection, then another reading is switched to
Multiple aforesaid operations process that number is nose heave；
Step 5, processing system pass through at the change in location that detects to photodetector one with photodetector two
Reason, obtains the shift value of testee.
The above description is merely a specific embodiment, but scope of protection of the present invention is not limited thereto, any
Those familiar with the art can easily think of the change or the replacement in the technical scope disclosed by the present invention, all should
It is included within the scope of protection of the present invention.
Claims (9)
1. a kind of differential type displacement sensor with refracting telescope characterized by comprising
Triangular wave reflecting mirror, including several reflectings surface；
Laser beam is incident to the reflecting surface of triangular wave reflecting mirror；
It is divided microscope group, including spectroscope and reflective mirror, and spectroscope and reflective mirror setting in a certain angle, and makes triangular wave anti-
The laser beam for penetrating the reflective surface of mirror is incident to spectroscope, and a part of laser beam successively enters after spectroscope and mirror reflection
It is incident upon refracting telescope to reflect together, another part laser beam is incident to refracting telescope two and is reflected after spectroscope transmits；
Photodetector one for receiving the laser beam reflected through refracting telescope one, and measures its incoming position；
Photodetector two for receiving the laser beam reflected through refracting telescope two, and measures its incoming position；
Processing system, the incoming position variable quantity of the laser beam for being received according to photodetector one and photodetector two
Calculate the change in displacement value of testee.
2. the differential type displacement sensor according to claim 1 with refracting telescope, which is characterized in that photodetector one
Setting position between photodetector two and light splitting microscope group meets relationship: laser beam is incident to light after being divided microscope group respectively
Electric explorer one is identical as the incidence angle of photodetector two.
3. the differential type displacement sensor according to claim 2 with refracting telescope, which is characterized in that spectroscope and reflective
Mirror is in 90 degree of angle settings, and photodetector one is arranged in parallel with photodetector two.
4. the differential type displacement sensor according to claim 1 with refracting telescope, which is characterized in that the refracting telescope one
It is bonded with photodetector one, the refracting telescope two is bonded with photodetector two.
5. the differential type displacement sensor according to claim 1 with refracting telescope, which is characterized in that the laser beam is
P-polarized light.
6. the differential type displacement sensor according to claim 1 with refracting telescope, which is characterized in that the refracting telescope one
The plane of incidence and exit facet be plane, and the plane of incidence is parallel to each other with exit facet；The plane of incidence of the refracting telescope two and outgoing
Face is plane, and the plane of incidence is parallel to each other with exit facet.
7. -6 any differential type displacement sensor with refracting telescope according to claim 1, which is characterized in that further include
Shell, laser beam are emitted to obtain by laser source, laser source, light splitting microscope group, refracting telescope one, refracting telescope two, photodetector one, light
Electric explorer two is fixedly installed in shell, forms reading head.
8. the differential type displacement sensor with refracting telescope according to claim 7 with refracting telescope, which is characterized in that
The reading head is at least two, and the positional relationship between at least two reading head meets: in measurement process, at least
There is a reading head that can read incoming position variable quantity of the laser beam on photodetector one and photodetector two.
9. the measurement method of any differential type displacement sensor with refracting telescope of claim 1-8, which is characterized in that
The following steps are included:
Testee is fixed on triangular wave reflecting mirror or reading head；
Adjust laser beam, triangular wave reflecting mirror, light splitting microscope group, refracting telescope one, refracting telescope two, photodetector one, photodetection
The positional relationship of device two, so that the laser beam of the reflective surface of triangular wave reflecting mirror is incident to spectroscope, a part of laser beam
It is successively incident to refracting telescope one after spectroscope and mirror reflection, is incident to photodetector one after the refraction of refracting telescope one；
Another part laser beam is incident to refracting telescope two after spectroscope transmits, and is incident to photodetector after the refraction of refracting telescope two
Two；
Emit laser beam, the laser beam is incident to light splitting microscope group after the reflective surface of the triangular wave reflecting mirror, passes through
The initial position of the reflection laser beam, warp are detected after light splitting microscope group reflection and after the refraction of refracting telescope one by photodetector one
The initial position of the transmission laser beam is detected after light splitting microscope group transmission and after the refraction of refracting telescope two by photodetector two；
Testee displacement, in displacement process, photodetector one detects the position of laser beam with photodetector two respectively
The variation set, until testee stops being displaced；
Processing system is handled by the change in location detected to photodetector one with photodetector two, is tested
The shift value of object.
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