CN109060203A - Intrinsical Fabry-Perot pull sensing device and its manufacturing method based on Modulation Based on Optical Fiber Fused Taper - Google Patents
Intrinsical Fabry-Perot pull sensing device and its manufacturing method based on Modulation Based on Optical Fiber Fused Taper Download PDFInfo
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- CN109060203A CN109060203A CN201810882183.2A CN201810882183A CN109060203A CN 109060203 A CN109060203 A CN 109060203A CN 201810882183 A CN201810882183 A CN 201810882183A CN 109060203 A CN109060203 A CN 109060203A
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 109
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 239000000835 fiber Substances 0.000 claims abstract description 39
- 238000000034 method Methods 0.000 claims description 13
- 230000008569 process Effects 0.000 claims description 10
- 239000011521 glass Substances 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims description 4
- 238000012545 processing Methods 0.000 claims description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- 229960000935 dehydrated alcohol Drugs 0.000 claims description 3
- 238000009826 distribution Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 238000002844 melting Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- 238000004886 process control Methods 0.000 claims description 3
- 238000003672 processing method Methods 0.000 claims description 3
- 238000005728 strengthening Methods 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 abstract description 13
- 238000000985 reflectance spectrum Methods 0.000 abstract description 10
- 230000008859 change Effects 0.000 abstract description 5
- 230000004044 response Effects 0.000 abstract description 2
- 230000003287 optical effect Effects 0.000 abstract 1
- 230000008901 benefit Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 238000011017 operating method Methods 0.000 description 2
- 239000004038 photonic crystal Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000010606 normalization Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The present invention proposes a kind of Intrinsical Fabry-Perot pull sensing device and its manufacturing method based on Modulation Based on Optical Fiber Fused Taper.The device inscribes two refraction index changing regions by femtosecond pulse laser inside the cone waist of Modulation Based on Optical Fiber Fused Taper and forms mirror surface, obtains different pull sensing sensitivity by changing Modulation Based on Optical Fiber Fused Taper cone waist diameter.When senser element is by external tensile force, minor change can all occur for chamber length, core diameter and the fiber core refractive index of Modulation Based on Optical Fiber Fused Taper Intrinsical Fabry-Pérot sensor, so that the optical path difference of optical fiber Intrinsical Fabry-Pérot sensor changes, drift motion observation external tensile force variation occurs so as to cause reflectance spectrum.This device combines the thin right cone waist characteristic of Modulation Based on Optical Fiber Fused Taper and optical fiber Intrinsical Fabry-Perot high-resolution sensing characteristics, not only increases sensing sensitivity, resolution ratio, response speed and the reliability of fiber optic sensing device and is with a wide range of applications.
Description
Technical field
The invention belongs to optical fibre device production fields, and in particular to a kind of Intrinsical Fabry-Perot based on Modulation Based on Optical Fiber Fused Taper
Roller force sensing device and its manufacturing method.
Background technique
In recent years, optical fiber stress sensor is widely used in the safety of the great building such as dam, tunnel, Longspan Bridge
In health detection, meanwhile, reliable safety detection is carried out with very big difficulty to such great building.It is built as to large size
Build safety measurement important parameter, high-sensitivity measurement is always a difficult point of optical fibre device production field, it is main because
Element is: optical fiber stress sensor has that manufacture craft is complex, size is larger, at high cost, optical fiber sensitivity is more low asks
Topic.Therefore, the optical fiber stress sensor based on Mach-Zender interferometer and based on photonic crystal fiber is with respect to manufacture craft
Simply, size is small, at low cost, high sensitivity.
There are optical fiber sensitivity to be difficult to improve, temperature drift is big etc. asks based on the strain transducer of fiber bragg grating for tradition
Topic；Strain transducer based on Mach-Zender interferometer, which generally requires, uses optical fiber dislocation welding and loop detection system,
Processing is difficult to control；Strain transducer higher cost based on photonic crystal fiber.As full optical fiber interference type sensor, optical fiber
Intrinsical Fabry-Perot device sensors are that measurement is realized based on simple optical fiber two-beam interference.When external environment such as temperature
When the factors such as degree, refractive index, stress, strain and magnetic field change, the phase of light beam changes.Compared to other kinds of light
Fiber sensor part, optical fiber Intrinsical Fabry-Perot device is detected with high resolution, easily, multiplexing capacity is strong, anti-interference ability
The advantages that strong.With the emergence and development of femtosecond laser technology, the advantage of ultrashort laser pulse and high peak intensities makes it micro-
Manufacture field is widely used.When femtosecond laser beam focuses on progress micro Process on fiber core, can precisely it control
Working position processed and region, and machining area very little can optimize optical fiber Intrinsical Fabry-Perot device sensors significantly
Performance.Meanwhile Modulation Based on Optical Fiber Fused Taper is as a kind of important foundation optical fibre device, it is carefully straight with special tapered transmission line structure and cone waist
Characteristic, when cone waist diameter is sufficiently small, stress sensing sensitivity will be obviously improved.
Summary of the invention
It is an object of the invention to improve the stress sensing sensitivity of optical fiber Intrinsical Fabry-Perot device, one is provided
Intrinsical Fabry-Perot pull sensing device and its manufacturing method of the kind based on Modulation Based on Optical Fiber Fused Taper.Present invention incorporates optical fiber weldings
The thin right cone waist characteristic of cone easily monitors characteristic harmony using the reflectance spectrum wave crest of fiber Fabry-Pérot cavity under a stretching force
Peak offset of shaking easily detects characteristic, further improves sensing sensitivity, reliability and the application range of fiber optic sensing device.
The present invention adopts the following technical solutions realization:
A kind of Intrinsical Fabry-Perot pull sensing device based on Modulation Based on Optical Fiber Fused Taper, including single mode optical fiber, pass through heating melting
Single mode optical fiber draws out Modulation Based on Optical Fiber Fused Taper, is cone waist in the middle part of Modulation Based on Optical Fiber Fused Taper, and cone waist two sides pass through symmetrical transitional region and connect single mode
Optical fiber；Two refraction index changing regions are inscribed in cone waist by femtosecond laser, optical fiber Intrinsical Fabry-Perot pulling force is formed and passes
Two reflecting mirrors of sensor.
It in the diameter range of cone waist is two reflecting mirrors of 50-125 μm of place's inscription using femtosecond laser, between two reflecting mirrors
Distance range is 100-600 μm, and the pull sensing characteristic under the device is related to cone waist diameter.
A kind of manufacturing method of the Intrinsical Fabry-Perot pull sensing device based on Modulation Based on Optical Fiber Fused Taper, for making
The Intrinsical Fabry-Perot pull sensing device based on Modulation Based on Optical Fiber Fused Taper stated, operating procedure are as follows:
1) prepared by Modulation Based on Optical Fiber Fused Taper: before drawing, intercepting the single mode optical fiber of suitable length, 2cm or so is peelled off among single mode optical fiber
Coat, and with dehydrated alcohol wiped clean；Then single mode optical fiber is placed in fiber clamp, makes the light for peelling off coat
Fibre be in fiber clamp centre, and fixture both sides place each one section of general single mode fiber parallel with prestretching single mode optical fiber with
Fixed prestretching single mode optical fiber；Finally by process control tensile speed, tensile elongation and hydrogen flowing quantity, Modulation Based on Optical Fiber Fused Taper is obtained；
2) femtosecond laser inscribes fiber Fabry-Pérot cavity: the optical fiber for peelling off coat being fixed on glass slide, and will carry glass
Piece is placed on three-dimensional micro Process platform；The focusing objective len for choosing 50 multiplying powers is monitored by CCD where determining femtosecond laser focus
Femtosecond laser is focused on fiber core by position, mobile micro Process platform；Using top-down longitudinal processing method, i.e. optical fiber
Moving direction be parallel to the transmission direction of femtosecond laser beam；When processing, femtosecond laser is focused on into fiber core, allows micro- add
Work platform first alongzAxis direction moves up, and laser focuses on the lower section of fibre core, then alongzAxis direction moves down and point
Electronic shutter is hit, femtosecond laser is made to pass through fibre core, to form internal mirror on fibre core, then edgexAxial cone waist is another
Mobile a certain distance is held to inscribe second reflecting mirror；When single mode optical fiber is inscribed, in order to enable refraction index changing region
Enough preferably covering uniform and stable distributions of fibre core simultaneously obtain higher intetference-fit strengthening, using 20mW recording power into
Row is inscribed, and the distance that micro Process platform moves up and down is respectively 20 μm and 14 μm, and the speed that platform moves up and down is 1 μm/s.
The present invention compared with prior art, has following substantive distinguishing features and remarkable advantage:
1, the advantages of combining both Modulation Based on Optical Fiber Fused Taper device and optical fibre Fabry-perot device is, it can be achieved that high sensitivity, high-resolution
The measurement of the stress sensing of rate and fast-response speed.
2, because of the thin right cone waist structure of Modulation Based on Optical Fiber Fused Taper, when the cone waist diameter of Modulation Based on Optical Fiber Fused Taper Fabry-Perot-type cavity is less than 60 μm
When, stress sensitivity is 5 times of single mode optical fiber Fabry-Pérot sensor.
Detailed description of the invention
Fig. 1 is that the structure based on the Intrinsical Fabry-Perot pull sensing device based on Modulation Based on Optical Fiber Fused Taper in the present invention is shown
It is intended to.
Fig. 2 is that a length of 200 μm of lumen of the present invention of single mode optical fiber Intrinsical Fabry-Perot-type cavity changes with extraneous stress
Reflectance spectrum situation.
Fig. 3 is that a length of 400 μm of lumen of the present invention of single mode optical fiber Intrinsical Fabry-Perot-type cavity changes with extraneous stress
Reflectance spectrum situation.
Fig. 4 be lumen of the present invention it is 200 μm a length of, 400 μm, 600 μm of single mode optical fiber Intrinsical Fabry-Perot device it is anti-
Spectrum is penetrated with stress variation situation.
Fig. 5 is that cone waist diameter is 61 μm in the present invention, the Intrinsical Fabry-Perot of a length of 200 μm of the Modulation Based on Optical Fiber Fused Taper of chamber
The reflectance spectrum situation that device changes with extraneous stress.
Fig. 6 is that cone waist diameter is 61 μm in the present invention, the Intrinsical Fabry-Perot of a length of 400 μm of the Modulation Based on Optical Fiber Fused Taper of chamber
The reflectance spectrum situation that device changes with extraneous stress.
Fig. 7 is that waist diameter is bored in the present invention for 125 μm, 97 μm, 73 μm, 59 μm, 50 μm, a length of 200 μm of the optical fiber welding of chamber
The case where reflection spectrum wavelength changes with extraneous stress is normalized in the Intrinsical Fabry-Perot device of cone.
Specific implementation method
The preferred embodiment of the present invention is simultaneously described with reference to the drawings as follows:
As shown in Figure 1, a kind of Intrinsical Fabry-Perot pull sensing device based on Modulation Based on Optical Fiber Fused Taper, including single mode optical fiber 3,
Modulation Based on Optical Fiber Fused Taper is drawn out by heating melting single mode optical fiber 3, is cone waist 1 in the middle part of Modulation Based on Optical Fiber Fused Taper, cone 1 two sides of waist pass through symmetrical mistake
It crosses region 2 and connects single mode optical fiber 3；Two refraction index changing regions are inscribed in cone waist 1 by femtosecond laser, form optical fiber Intrinsical
Two reflecting mirrors 4 of Fabry-Perot tension sensor.
Two reflecting mirrors 4, two reflecting mirrors 4 are inscribed at the diameter range for boring waist 1 is 50-125 μm using femtosecond laser
Between the long range of distance, that is, chamber be 100-600 μm, pull sensing characteristic under the device is related with 1 diameter of waist is bored.
A kind of manufacturing method of the Intrinsical Fabry-Perot pull sensing device based on Modulation Based on Optical Fiber Fused Taper, for making
The Intrinsical Fabry-Perot pull sensing device based on Modulation Based on Optical Fiber Fused Taper stated, operating procedure are as follows:
1) prepared by Modulation Based on Optical Fiber Fused Taper: before drawing, intercepting the single mode optical fiber 3 of suitable length, the left side 2cm is peelled off among single mode optical fiber 3
Right coat, and with dehydrated alcohol wiped clean；Then single mode optical fiber 3 is placed in fiber clamp, makes to peel off coat
Optical fiber be in the centre of fiber clamp, and place each one section of general single mode parallel with prestretching single mode optical fiber 3 on fixture both sides
Optical fiber is to fix prestretching single mode optical fiber 3；Finally by process control tensile speed, tensile elongation and hydrogen flowing quantity, light is obtained
Fine pyrometric cone；
2) femtosecond laser inscribes fiber Fabry-Pérot cavity: the optical fiber for peelling off coat being fixed on glass slide, and will carry glass
Piece is placed on three-dimensional micro Process platform；The focusing objective len for choosing 50 multiplying powers is monitored by CCD where determining femtosecond laser focus
Femtosecond laser is focused on fiber core by position, mobile micro Process platform；Using top-down longitudinal processing method, i.e. optical fiber
Moving direction be parallel to the transmission direction of femtosecond laser beam；When processing, femtosecond laser is focused on into fiber core, allows micro- add
Work platform first alongzAxis direction moves up, and laser focuses on the lower section of fibre core, then alongzAxis direction moves down and point
Electronic shutter is hit, femtosecond laser is made to pass through fibre core, to form internal mirror on fibre core, then edgexAxial cone waist is another
Mobile a certain distance is held to inscribe second reflecting mirror；When single mode optical fiber is inscribed, in order to enable refraction index changing region
Enough preferably covering uniform and stable distributions of fibre core simultaneously obtain higher intetference-fit strengthening, using 20mW recording power into
Row is inscribed, and the distance that micro Process platform moves up and down is respectively 20 μm and 14 μm, and the speed that platform moves up and down is 1 μm/s.
Referring to figs. 2 and 3, long selection chamber is respectively that 200 μm and 400 μm of single mode optical fiber Intrinsical Fabry-Perot is answered
Force snesor measures, and stress changes to 1N from 0, acquires a data every 0.1N, obtains the situation of change of reflectance spectrum.With
The increase of senser element both ends stress, reflectance spectrum is whole to drift about to long wave length direction.The valley near 1551nm is chosen to carry out
Monitoring, wavelength are as shown in Figure 4 with the change curve of sensor both ends stress.Have between reflectance spectrum wavelength change and the variable quantity of stress
There is good linear relationship.By being calculated, when the chamber of sensor is 200 μm, 400 μm and 600 μm a length of, stress sensitivity point
Not are as follows: 1.322nm/N, 1.336nm/N and 1.382nm/N.
Referring to figs. 5 and 6, the case where trough wavelength near 1565nm and 1574nm is with stress variation is monitored.Work as optical fiber
Diameter reduce, in the case where identical extraneous stress, Modulation Based on Optical Fiber Fused Taper Intrinsical Fabry-Perot strain gauge reflectance spectrum
Drift value is more than single mode optical fiber Intrinsical Fabry-Perot strain gauge.By being calculated, when the interference wave of sensor
At a length of 200 μm and 400 μm, stress sensitivity is respectively 6.669nm/N and 5.984nm/N.
Selected Modulation Based on Optical Fiber Fused Taper cone waist diameter be 125 μm, 97 μm, 73 μm, 59 μm and 50 μm, a length of 200 μm of the optical fiber of chamber
Pyrometric cone Intrinsical Fabry-Perot strain gauge carries out sensing experiment, and normalization reflection spectrum wavelength changes with extraneous stress
Situation is as shown in Figure 7.In the case where identical interference cavity length, with Modulation Based on Optical Fiber Fused Taper Intrinsical Fabry-Perot strain gauge
Bore the reduction of waist diameter, wave length shift gradually increases with extraneous stress slope of a curve, incrementss also with the reduction of radius and
Increase.By the comparison of the two, the stress sensitivity of Modulation Based on Optical Fiber Fused Taper Intrinsical Fabry-Perot strain gauge is single mode optical fiber
4 ~ 5 times or so of Intrinsical Fabry-Perot strain gauge.
Claims (3)
1. a kind of Intrinsical Fabry-Perot pull sensing device based on Modulation Based on Optical Fiber Fused Taper, including single mode optical fiber (3), feature
It is, Modulation Based on Optical Fiber Fused Taper is drawn out by heating melting single mode optical fiber (3), is cone waist (1) in the middle part of Modulation Based on Optical Fiber Fused Taper, bores waist (1) two sides
Single mode optical fiber (3) are connected by symmetrical transitional region (2)；Two refraction index changings are inscribed in cone waist (1) by femtosecond laser
Region forms two reflecting mirrors (4) of optical fiber Intrinsical Fabry-Perot tension sensor.
2. the Intrinsical Fabry-Perot pull sensing device according to claim 1 based on Modulation Based on Optical Fiber Fused Taper, feature exist
In, using femtosecond laser cone waist (1) diameter range be 50-125 μm place inscription two reflecting mirrors (4), two reflecting mirrors (4)
Between distance range be 100-600 μm, pull sensing characteristic under the device is related with waist (1) diameter is bored.
3. a kind of manufacturing method of the Intrinsical Fabry-Perot pull sensing device based on Modulation Based on Optical Fiber Fused Taper, for making basis
Intrinsical Fabry-Perot pull sensing device described in claim 1 based on Modulation Based on Optical Fiber Fused Taper, which is characterized in that operation step
It is rapid as follows:
1) prepared by Modulation Based on Optical Fiber Fused Taper: before drawing, intercepting the single mode optical fiber (3) of suitable length, peels off among single mode optical fiber (3)
The coat of 2cm or so, and with dehydrated alcohol wiped clean；Then single mode optical fiber (3) is placed in fiber clamp, makes to peel off
The optical fiber of coat is in the centre of fiber clamp, and parallel with prestretching single mode optical fiber (3) in each one section of fixture both sides placement
General single mode fiber is to fix prestretching single mode optical fiber (3)；Finally by process control tensile speed, tensile elongation and hydrogen stream
Amount, obtains Modulation Based on Optical Fiber Fused Taper；
2) femtosecond laser inscribes fiber Fabry-Pérot cavity: the optical fiber for peelling off coat being fixed on glass slide, and will carry glass
Piece is placed on three-dimensional micro Process platform；The focusing objective len for choosing 50 multiplying powers is monitored by CCD where determining femtosecond laser focus
Femtosecond laser is focused on fiber core by position, mobile micro Process platform；Using top-down longitudinal processing method, i.e. optical fiber
Moving direction be parallel to the transmission direction of femtosecond laser beam；When processing, femtosecond laser is focused on into fiber core, allows micro- add
Work platform first alongzAxis direction moves up, and laser focuses on the lower section of fibre core, then alongzAxis direction moves down and point
Electronic shutter is hit, femtosecond laser is made to pass through fibre core, to form internal mirror on fibre core, then edgexAxial cone waist is another
Mobile a certain distance is held to inscribe second reflecting mirror；When single mode optical fiber is inscribed, in order to enable refraction index changing region
Enough preferably covering uniform and stable distributions of fibre core simultaneously obtain higher intetference-fit strengthening, using 20mW recording power into
Row is inscribed, and the distance that micro Process platform moves up and down is respectively 20 μm and 14 μm, and the speed that platform moves up and down is 1 μm/s.
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| CN201810882183.2A CN109060203A (en) | 2018-08-06 | 2018-08-06 | Intrinsical Fabry-Perot pull sensing device and its manufacturing method based on Modulation Based on Optical Fiber Fused Taper |
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| CN201810882183.2A CN109060203A (en) | 2018-08-06 | 2018-08-06 | Intrinsical Fabry-Perot pull sensing device and its manufacturing method based on Modulation Based on Optical Fiber Fused Taper |
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| CN104238000A (en) * | 2014-09-24 | 2014-12-24 | 上海大学 | Tapered fiber long-period grating production device and tapered fiber long-period grating production and encapsulation method |
| CN106289339A (en) * | 2016-09-19 | 2017-01-04 | 上海大学 | Fiber F-P pyrostat based on crystallize and manufacture method |
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| US10010251B2 (en) * | 2008-09-11 | 2018-07-03 | Acist Medical Systems, Inc. | Physiological sensor delivery device and method |
| CN102508337A (en) * | 2011-11-03 | 2012-06-20 | 上海大学 | Optical fiber fused taper-based intrinsic Fabry-Perot device and manufacturing method thereof |
| CN103162722A (en) * | 2013-03-13 | 2013-06-19 | 南开大学 | Microfiber Fabry-Perot microcavity sensor and manufacturing method |
| CN103439262A (en) * | 2013-07-16 | 2013-12-11 | 深圳大学 | Volatile organic compound detection device based on optical fiber evanescent field and manufacturing method thereof |
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