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CN109039293A - A kind of automatic biasing barium microwave dielectric filter and its laminated process - Google Patents

A kind of automatic biasing barium microwave dielectric filter and its laminated process Download PDF

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Publication number
CN109039293A
CN109039293A CN201810908824.7A CN201810908824A CN109039293A CN 109039293 A CN109039293 A CN 109039293A CN 201810908824 A CN201810908824 A CN 201810908824A CN 109039293 A CN109039293 A CN 109039293A
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barium
dielectric filter
microwave dielectric
biased
self
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李海东
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Shenzhen Doctoral Intelligent Technology Co Ltd
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Shenzhen Doctoral Intelligent Technology Co Ltd
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    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H1/00Constructional details of impedance networks whose electrical mode of operation is not specified or applicable to more than one type of network
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H5/00One-port networks comprising only passive electrical elements as network components
    • H03H5/006One-port networks comprising only passive electrical elements as network components comprising simultaneously tunable inductance and capacitance
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H1/00Constructional details of impedance networks whose electrical mode of operation is not specified or applicable to more than one type of network
    • H03H2001/0021Constructional details
    • H03H2001/0085Multilayer, e.g. LTCC, HTCC, green sheets

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Abstract

The invention discloses a kind of automatic biasing barium microwave dielectric filter and its laminated process, comprising: inductance element, capacity cell and floor, the inductance element is L-shaped, lamination above and below inductance element vertical spin structure;Through-hole is set on inductance element, inductance interconnections are carried out by through-hole between each layer inductance element, the capacity cell uses vertical finger-inserting type capacitance structure, and the floor is separately positioned on the two sides of capacity cell, and capacity cell and inductance element are interconnected with the floor of two sides respectively.The present invention is by low-temperature sintering barium microwave dielectric filter in conjunction with LTCC/LTCF technology, realize that filter material is compatible with LTCC/LTCF manufacturing process, the miniaturization and batch manufacture for realizing microwave dielectric filter, improve the consistency of device and advantageously reduce cost.

Description

一种自偏置钡微波介质滤波器及其叠层工艺A self-biased barium microwave dielectric filter and its lamination process

技术领域technical field

本发明涉及微波介质滤波器相关技术领域,具体是一种自偏置钡微波介质滤波器及其叠层工艺。The invention relates to the technical field of microwave dielectric filters, in particular to a self-biased barium microwave dielectric filter and a lamination process thereof.

背景技术Background technique

滤波器作为电子电路中的基本元件之一,被广泛地应用于微波通信、雷达导航、电子对抗、卫星通信、导弹制导、测试仪表等系统中。利用它们可以分离或组合各种不同频率的信号,其性能的优劣直接影响整个通信系统的性能指标。As one of the basic components in electronic circuits, filters are widely used in systems such as microwave communications, radar navigation, electronic countermeasures, satellite communications, missile guidance, and test instruments. They can be used to separate or combine signals of various frequencies, and their performance directly affects the performance index of the entire communication system.

LTCC技术,就是将低温烧结陶瓷粉制成厚度精确而且致密的生瓷带,在生瓷带上利用激光打孔、微孔注浆、精密导体浆料印刷等工艺制出所需要的电路图形,并将多个无源元件埋入其中,然后叠压在一起,在900℃左右烧结,制成三维电路网络的无源集成组件,也可制成内置无源元件的三维电路基板,在其表面可以贴装I和有源器件,制成无源/有源集成的功能模块。总之,利用这种工艺可以成功地制造出各种高技术LTCC产品。以多层LT开发的产品具有系统面积最小化、高系统整合度、系统功能最佳化、较短的上市时间及低成本等特性,从而具有相当的竞争力。LTCC technology is to make low-temperature sintered ceramic powder into a green tape with precise thickness and density, and use laser drilling, micro-hole grouting, precision conductor paste printing and other processes to produce the required circuit pattern on the green tape, and Multiple passive components are embedded in it, then stacked together, and sintered at about 900°C to make a passive integrated component of a three-dimensional circuit network, or a three-dimensional circuit substrate with built-in passive components. Mount I and active devices to make passive/active integrated functional modules. In short, various high-tech LTCC products can be successfully manufactured using this process. Products developed with multi-layer LT have the characteristics of minimum system area, high system integration, system function optimization, short time to market and low cost, so they are quite competitive.

发明内容Contents of the invention

本发明的目的在于提供一种自偏置钡微波介质滤波器及其叠层工艺,以解决上述背景技术中提出的问题。The purpose of the present invention is to provide a self-biased barium microwave dielectric filter and its lamination process, so as to solve the problems raised in the above-mentioned background technology.

为实现上述目的,本发明提供如下技术方案:To achieve the above object, the present invention provides the following technical solutions:

一种自偏置钡微波介质滤波器,包括:电感元件、电容元件和地板,所述电感元件呈“L”型,电感元件垂直螺旋结构上下叠层;电感元件上设置通孔,各层电感元件间通过通孔进行电感互连,所述电容元件采用垂直插指型电容结构,所述地板分别设置在电容元件的两侧,电容元件和电感元件分别与两侧的地板互连。A self-biased barium microwave dielectric filter, comprising: an inductance element, a capacitance element and a floor, the inductance element is in an "L" shape, and the inductance element is stacked up and down in a vertical spiral structure; through holes are arranged on the inductance element, and the inductance of each layer The elements are inductively interconnected through through holes, and the capacitive element adopts a vertical finger-type capacitor structure. The floors are respectively arranged on both sides of the capacitive element, and the capacitive element and the inductive element are respectively interconnected with the floors on both sides.

作为本发明进一步的方案:通孔的直径以及电感元件印刷导体的线宽均为0.2mm。As a further solution of the present invention: the diameter of the through hole and the line width of the printed conductor of the inductance element are both 0.2 mm.

一种自偏置钡微波介质滤波器的叠层工艺,包括以下步骤:A lamination process of a self-biased barium microwave dielectric filter, comprising the following steps:

S1:混料、流延,将有机物和由陶瓷和玻璃组成的无机物成分按一定比例混合,用球磨的方法进行碾磨和均匀化,然后浇注在一个移动的载带上,通过干燥区,去除所有的溶剂,通过控制刮刀间隙,流延成所需要的厚度;S1: Mixing and casting, mixing organic matter and inorganic matter composed of ceramics and glass in a certain proportion, grinding and homogenizing by ball milling, and then pouring on a moving carrier belt, passing through the drying area, Remove all the solvent, and cast to the required thickness by controlling the blade gap;

S2:把未烧结瓷带按需要的尺寸进行裁切;S2: cutting the unsintered porcelain tape according to the required size;

S3:利用激光打孔技术形成孔位,孔位直径0.15-0.25mm,用在不同层上以互连电路;S3: Use laser drilling technology to form holes with a diameter of 0.15-0.25mm, which are used on different layers to interconnect circuits;

S4:通孔填充,利用厚膜丝网印刷或模板挤压把导体浆料填充到孔位内;S4: Through-hole filling, using thick film screen printing or template extrusion to fill the conductive paste into the hole;

S5:采用厚膜印刷技术,在箱式或链式炉中对导体浆料进行印刷和烘干;S5: Using thick film printing technology, the conductive paste is printed and dried in a box or chain furnace;

S6:检查、整理和对准不同层,使每层中的对准孔同心并准备叠层,叠层时整理和对准的基板层被热压在一起,热压参数为60-70℃、20MPa下热压15-30min,随后一步共烧叠层;S6: Check, organize and align different layers, make the alignment holes in each layer concentric and prepare for stacking, the substrate layers sorted and aligned are hot-pressed together during stacking, and the hot-pressing parameters are 60-70°C, Hot pressing at 20MPa for 15-30min, followed by one-step co-firing lamination;

S7:排胶、烧结,在200-500℃、5-15min内将叠层共烧至峰值温度900℃,烧成的部件准备好后烧工艺,然后在空气中烧成。S7: Debinding and sintering, co-firing the laminate to a peak temperature of 900°C at 200-500°C for 5-15 minutes, the fired parts are ready for the post-firing process, and then fired in the air.

作为本发明进一步的方案:所述有机物包括:聚合物粘接剂、增塑剂、分散剂和溶剂,各组分的质量分数比为1:0.08:0.5:3。As a further solution of the present invention: the organic matter includes: a polymer binder, a plasticizer, a dispersant and a solvent, and the mass fraction ratio of each component is 1:0.08:0.5:3.

作为本发明进一步的方案:所述聚合物粘接剂采用聚乙烯醇缩丁醛树脂,所述增塑剂采用丁基苯基酞酸酯,所述分散剂为由脂肪酸和酯混合而成的溶剂,所述溶剂采用由质量相等的丁酮和工业酒精混合溶剂。As a further solution of the present invention: the polymer adhesive uses polyvinyl butyral resin, the plasticizer uses butyl phenyl phthalate, and the dispersant is a mixture of fatty acids and esters. Solvent, described solvent adopts the mixed solvent of methyl ethyl ketone and denatured alcohol of equal quality.

作为本发明进一步的方案:在步骤S3中,同时加工对位孔。As a further solution of the present invention: in step S3, alignment holes are processed at the same time.

作为本发明进一步的方案:步骤S7中,烧结在N2链式炉中进行。As a further solution of the present invention: in step S7, the sintering is carried out in a N2 chain furnace.

与现有技术相比,本发明的有益效果是:本发明将低温烧结钡微波介质滤波器与LTCC/LTCF技术结合,实现滤波器材料与LTCC/LTCF制造工艺的兼容,实现微波介质滤波器的小型化和批次制造,提高了器件的一致性并有利于降低成本。Compared with the prior art, the beneficial effect of the present invention is: the present invention combines the low-temperature sintered barium microwave dielectric filter with LTCC/LTCF technology, realizes the compatibility of the filter material and the LTCC/LTCF manufacturing process, and realizes the microwave dielectric filter Miniaturization and batch manufacturing improve the consistency of devices and help reduce costs.

附图说明Description of drawings

图1为一种自偏置钡微波介质滤波器的结构示意图。Fig. 1 is a schematic structural diagram of a self-biased barium microwave dielectric filter.

图2为一种自偏置钡微波介质滤波器中电容元件的结构示意图。Fig. 2 is a schematic structural diagram of a capacitive element in a self-biased barium microwave dielectric filter.

图3为一种自偏置钡微波介质滤波器中电感元件的结构示意图。Fig. 3 is a schematic structural diagram of an inductance element in a self-biased barium microwave dielectric filter.

具体实施方式Detailed ways

下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

请参阅图1~3,本发明实施例中,一种自偏置钡微波介质滤波器,包括:电感元件1、电容元件2和地板3,所述电感元件1呈“L”型,电感元件1垂直螺旋结构上下叠层,相比平面螺旋式、位移式等结构,垂直螺旋结构具有更高的自谐振频率和品质因数,且有利于缩小元器件尺寸;电感元件1上设置直径0.2mm的通孔11,各层电感元件1间通过通孔进行电感互连,通孔11和导体层的连接方式,有助于把电磁场信号导入垂直通孔和下面的导体层,改善了传输性能,电感元件1印刷导体的线宽也为0.2mm,与通孔11直径一致,可减小传输线的不连续性;Please refer to FIGS. 1-3. In an embodiment of the present invention, a self-biased barium microwave dielectric filter includes: an inductance element 1, a capacitance element 2 and a floor 3. The inductance element 1 is in an "L" shape, and the inductance element 1 The vertical spiral structure is stacked up and down. Compared with the planar spiral type and displacement type, the vertical spiral structure has a higher self-resonant frequency and quality factor, and is conducive to reducing the size of components; Through holes 11, inductive interconnection between the inductive elements 1 of each layer is carried out through the through holes, and the connection mode between the through holes 11 and the conductor layer helps to guide the electromagnetic field signal into the vertical through hole and the conductor layer below, which improves the transmission performance, and the inductance The line width of the printed conductor of component 1 is also 0.2 mm, which is consistent with the diameter of the through hole 11, which can reduce the discontinuity of the transmission line;

所述电容元件2采用垂直插指型电容(VIC)结构,可减小端电极面积,从而有效减小滤波器尺寸,所述地板3分别设置在电容元件2的两侧,电容元件2和电感元件1分别与两侧的地板3互连,这样侧面封装、地与地连接的方式可减小对差损和驻波比的影响。The capacitive element 2 adopts a vertical interdigitated capacitor (VIC) structure, which can reduce the area of the terminal electrode, thereby effectively reducing the size of the filter. The floor boards 3 are respectively arranged on both sides of the capacitive element 2. The element 1 is interconnected with the floor boards 3 on both sides, so that the way of side packaging and ground-to-ground connection can reduce the impact on differential loss and standing wave ratio.

一种自偏置钡微波介质滤波器的叠层工艺,包括以下步骤:A lamination process of a self-biased barium microwave dielectric filter, comprising the following steps:

S1:混料、流延,将有机物和由陶瓷和玻璃组成的无机物成分按一定比例混合,用球磨的方法进行碾磨和均匀化,然后浇注在一个移动的载带上,通过一个干燥区,去除所有的溶剂,通过控制刮刀间隙,流延成所需要的厚度;S1: Mixing, casting, mixing organic and inorganic components composed of ceramics and glass in a certain proportion, grinding and homogenizing by ball milling, and then pouring on a moving carrier belt and passing through a drying zone , remove all the solvent, and cast to the required thickness by controlling the blade gap;

S2:把未烧结瓷带按需要的尺寸进行裁切;S2: cutting the unsintered porcelain tape according to the required size;

S3:利用激光打孔技术形成孔位,孔位直径0.15-0.25mm,用在不同层上以互连电路。S3: Use laser drilling technology to form holes with a diameter of 0.15-0.25mm, which are used on different layers to interconnect circuits.

S4:通孔填充,利用厚膜丝网印刷或模板挤压把导体浆料填充到孔位内;S4: Through-hole filling, using thick film screen printing or template extrusion to fill the conductive paste into the hole;

S5:采用厚膜印刷技术,在箱式或链式炉中对导体浆料进行印刷和烘干;S5: Using thick film printing technology, the conductive paste is printed and dried in a box or chain furnace;

S6:检查、整理和对准不同层,使每层中的对准孔同心并准备叠层,叠层时整理和对准的基板层被热压在一起,热压参数为60-70℃、20MPa下热压15-30min,随后一步共烧叠层;S6: Check, organize and align different layers, make the alignment holes in each layer concentric and prepare for stacking, the substrate layers sorted and aligned are hot-pressed together during stacking, and the hot-pressing parameters are 60-70°C, Hot pressing at 20MPa for 15-30min, followed by one-step co-firing lamination;

S7:排胶、烧结,在200-500℃、5-15min内将叠层共烧至峰值温度900℃,烧成的部件准备好后烧工艺,如在顶面上印刷导体和精密电阻器等,然后在空气中烧成。S7: Debinding and sintering, co-firing the laminate to a peak temperature of 900°C within 200-500°C and 5-15min, and the fired parts are ready for post-firing process, such as printing conductors and precision resistors on the top surface, etc. , and then fired in air.

所述有机物包括:聚合物粘接剂、增塑剂、分散剂和溶剂,各组分的质量分数比为1:0.08:0.5:3。The organic matter includes: a polymer binder, a plasticizer, a dispersant and a solvent, and the mass fraction ratio of each component is 1:0.08:0.5:3.

所述聚合物粘接剂采用聚乙烯醇缩丁醛树脂,所述增塑剂采用丁基苯基酞酸酯,使生瓷带具有韧度,所述分散剂为由脂肪酸和酯混合而成的溶剂,所述溶剂采用由质量相等的丁酮和工业酒精混合溶剂。The polymer adhesive uses polyvinyl butyral resin, the plasticizer uses butyl phenyl phthalate to make the green ceramic tape have toughness, and the dispersant is a mixture of fatty acids and esters The solvent, said solvent adopts the mixed solvent of methyl ethyl ketone and denatured alcohol of equal quality.

在步骤S3中,同时加工对位孔,帮助叠片时的对准,用于印刷导体和介质时自动对位。In step S3, alignment holes are processed at the same time to help alignment during lamination and to be used for automatic alignment when printing conductors and media.

步骤S7中,烧结在N2链式炉中进行。In step S7, sintering is carried out in a N2 chain furnace.

对于本领域技术人员而言,显然本发明不限于上述示范性实施例的细节,而且在不背离本发明的精神或基本特征的情况下,能够以其他的具体形式实现本发明。因此,无论从哪一点来看,均应将实施例看作是示范性的,而且是非限制性的,本发明的范围由所附权利要求而不是上述说明限定,因此旨在将落在权利要求的等同要件的含义和范围内的所有变化囊括在本发明内。不应将权利要求中的任何附图标记视为限制所涉及的权利要求。It will be apparent to those skilled in the art that the invention is not limited to the details of the above-described exemplary embodiments, but that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Accordingly, the embodiments should be regarded in all points of view as exemplary and not restrictive, the scope of the invention being defined by the appended claims rather than the foregoing description, and it is therefore intended that the scope of the invention be defined by the appended claims rather than by the foregoing description. All changes within the meaning and range of equivalents of the elements are embraced in the present invention. Any reference sign in a claim should not be construed as limiting the claim concerned.

此外,应当理解,虽然本说明书按照实施方式加以描述,但并非每个实施方式仅包含一个独立的技术方案,说明书的这种叙述方式仅仅是为清楚起见,本领域技术人员应当将说明书作为一个整体,各实施例中的技术方案也可以经适当组合,形成本领域技术人员可以理解的其他实施方式。In addition, it should be understood that although this specification is described according to implementation modes, not each implementation mode only contains an independent technical solution, and this description in the specification is only for clarity, and those skilled in the art should take the specification as a whole , the technical solutions in the various embodiments can also be properly combined to form other implementations that can be understood by those skilled in the art.

Claims (7)

1.一种自偏置钡微波介质滤波器,包括:电感元件、电容元件和地板,其特征在于:所述电感元件呈“L”型,电感元件垂直螺旋结构上下叠层;电感元件上设置通孔,各层电感元件间通过通孔进行电感互连,所述电容元件采用垂直插指型电容结构,所述地板分别设置在电容元件的两侧,电容元件和电感元件分别与两侧的地板互连。1. A self-biased barium microwave dielectric filter, comprising: inductive element, capacitive element and floor, is characterized in that: described inductive element is " L " type, and inductive element vertical helical structure stacks up and down; Arranges on the inductive element Through holes, the inductive elements of each layer are inductively interconnected through through holes, the capacitive elements adopt a vertical finger-type capacitor structure, the floors are respectively arranged on both sides of the capacitive elements, and the capacitive elements and inductive elements are respectively connected to the two sides. Floor interconnects. 2.根据权利要求1所述的一种自偏置钡微波介质滤波器,其特征在于:通孔的直径以及电感元件印刷导体的线宽均为0.2mm。2. A self-biased barium microwave dielectric filter according to claim 1, characterized in that: the diameter of the through hole and the line width of the printed conductor of the inductance element are both 0.2 mm. 3.根据权利要求1或2所述的一种自偏置钡微波介质滤波器的叠层工艺,其特征在于:包括以下步骤:3. a kind of lamination process of self-biased barium microwave dielectric filter according to claim 1 or 2, is characterized in that: comprise the following steps: S1:混料、流延,将有机物和由陶瓷和玻璃组成的无机物成分按一定比例混合,用球磨的方法进行碾磨和均匀化,然后浇注在一个移动的载带上,通过干燥区,去除所有的溶剂,通过控制刮刀间隙,流延成所需要的厚度;S1: Mixing and casting, mixing organic matter and inorganic matter composed of ceramics and glass in a certain proportion, grinding and homogenizing by ball milling, and then pouring on a moving carrier belt, passing through the drying area, Remove all the solvent, and cast to the required thickness by controlling the blade gap; S2:把未烧结瓷带按需要的尺寸进行裁切;S2: cutting the unsintered porcelain tape according to the required size; S3:利用激光打孔技术形成孔位,孔位直径0.15-0.25mm;S3: Use laser drilling technology to form holes with a diameter of 0.15-0.25mm; S4:通孔填充,利用厚膜丝网印刷或模板挤压把导体浆料填充到孔位内;S4: Through-hole filling, using thick film screen printing or template extrusion to fill the conductive paste into the hole; S5:采用厚膜印刷技术,在箱式或链式炉中对导体浆料进行印刷和烘干;S5: Using thick film printing technology, the conductive paste is printed and dried in a box or chain furnace; S6:检查、整理和对准不同层,使每层中的对准孔同心并准备叠层,叠层时整理和对准的基板层被热压在一起,热压参数为60-70℃、20MPa下热压15-30min,随后一步共烧叠层;S6: Check, organize and align different layers, make the alignment holes in each layer concentric and prepare for stacking, the substrate layers sorted and aligned are hot-pressed together during stacking, and the hot-pressing parameters are 60-70°C, Hot pressing at 20MPa for 15-30min, followed by one-step co-firing lamination; S7:排胶、烧结,在200-500℃、5-15min内将叠层共烧至峰值温度900℃,烧成的部件准备好后烧工艺,然后在空气中烧成。S7: Debinding and sintering, co-firing the laminate to a peak temperature of 900°C at 200-500°C for 5-15 minutes, the fired parts are ready for the post-firing process, and then fired in the air. 4.根据权利要求3所述的一种自偏置钡微波介质滤波器的叠层工艺,其特征在于:所述有机物包括:聚合物粘接剂、增塑剂、分散剂和溶剂,各组分的质量分数比为1:0.08:0.5:3。4. The stacking process of a self-biased barium microwave dielectric filter according to claim 3, characterized in that: said organic matter comprises: polymer binder, plasticizer, dispersant and solvent, each group The mass-to-score ratio of points is 1:0.08:0.5:3. 5.根据权利要求3所述的一种自偏置钡微波介质滤波器的叠层工艺,其特征在于:所述聚合物粘接剂采用聚乙烯醇缩丁醛树脂,所述增塑剂采用丁基苯基酞酸酯,所述分散剂为由脂肪酸和酯混合而成的溶剂,所述溶剂采用由质量相等的丁酮和工业酒精混合溶剂。5. The lamination process of a self-biased barium microwave dielectric filter according to claim 3, characterized in that: the polymer adhesive adopts polyvinyl butyral resin, and the plasticizer adopts Butyl phenyl phthalate, the dispersant is a solvent mixed with fatty acid and ester, and the solvent adopts a mixed solvent of methyl ethyl ketone and industrial alcohol with equal mass. 6.根据权利要求3所述的一种自偏置钡微波介质滤波器的叠层工艺,其特征在于:在步骤S3中,同时加工对位孔。6. The lamination process of a self-biased barium microwave dielectric filter according to claim 3, characterized in that: in step S3, alignment holes are processed at the same time. 7.根据权利要求3所述的一种自偏置钡微波介质滤波器的叠层工艺,其特征在于:步骤S7中,烧结在N2链式炉中进行。7. The lamination process of a self-biased barium microwave dielectric filter according to claim 3, characterized in that: in step S7, the sintering is carried out in an N2 chain furnace.
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