CN109037333A - Silicone carbide metal oxide semiconductor field effect transistor and its manufacturing method - Google Patents
Silicone carbide metal oxide semiconductor field effect transistor and its manufacturing method Download PDFInfo
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- CN109037333A CN109037333A CN201710445261.8A CN201710445261A CN109037333A CN 109037333 A CN109037333 A CN 109037333A CN 201710445261 A CN201710445261 A CN 201710445261A CN 109037333 A CN109037333 A CN 109037333A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 44
- 230000005669 field effect Effects 0.000 title claims abstract description 40
- 229910044991 metal oxide Inorganic materials 0.000 title claims abstract description 39
- 150000004706 metal oxides Chemical class 0.000 title claims abstract description 38
- 229920001296 polysiloxane Polymers 0.000 title claims abstract description 35
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 27
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 40
- 229910052751 metal Inorganic materials 0.000 claims abstract description 39
- 239000002184 metal Substances 0.000 claims abstract description 39
- 238000000034 method Methods 0.000 claims abstract description 39
- 229910052681 coesite Inorganic materials 0.000 claims abstract description 37
- 229910052906 cristobalite Inorganic materials 0.000 claims abstract description 37
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 37
- 229910052682 stishovite Inorganic materials 0.000 claims abstract description 37
- 229910052905 tridymite Inorganic materials 0.000 claims abstract description 37
- 239000000758 substrate Substances 0.000 claims abstract description 23
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 99
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 91
- -1 phosphonium ion Chemical class 0.000 claims description 53
- 238000000151 deposition Methods 0.000 claims description 42
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 37
- 229910052757 nitrogen Inorganic materials 0.000 claims description 29
- 230000008021 deposition Effects 0.000 claims description 27
- 229910052782 aluminium Inorganic materials 0.000 claims description 17
- 238000000137 annealing Methods 0.000 claims description 17
- 238000001816 cooling Methods 0.000 claims description 14
- 238000005530 etching Methods 0.000 claims description 14
- 238000000231 atomic layer deposition Methods 0.000 claims description 13
- 238000001259 photo etching Methods 0.000 claims description 11
- 238000002203 pretreatment Methods 0.000 claims description 11
- REDXJYDRNCIFBQ-UHFFFAOYSA-N aluminium(3+) Chemical compound [Al+3] REDXJYDRNCIFBQ-UHFFFAOYSA-N 0.000 claims description 10
- 150000001875 compounds Chemical class 0.000 claims description 5
- 230000001590 oxidative effect Effects 0.000 claims description 5
- 230000006835 compression Effects 0.000 claims description 4
- 238000007906 compression Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims description 4
- 150000002739 metals Chemical class 0.000 claims description 3
- 229910001092 metal group alloy Inorganic materials 0.000 claims description 2
- 230000005527 interface trap Effects 0.000 abstract description 8
- 238000002513 implantation Methods 0.000 description 13
- 238000002347 injection Methods 0.000 description 12
- 239000007924 injection Substances 0.000 description 12
- 239000000463 material Substances 0.000 description 11
- 150000002500 ions Chemical class 0.000 description 10
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 229910000838 Al alloy Inorganic materials 0.000 description 5
- 229910001069 Ti alloy Inorganic materials 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 5
- 239000002131 composite material Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 230000005684 electric field Effects 0.000 description 5
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 4
- 239000012159 carrier gas Substances 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- 239000012495 reaction gas Substances 0.000 description 4
- 238000004062 sedimentation Methods 0.000 description 4
- 229910000077 silane Inorganic materials 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 239000004411 aluminium Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000001459 lithography Methods 0.000 description 3
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 3
- 239000013049 sediment Substances 0.000 description 3
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001294 propane Substances 0.000 description 2
- 238000003949 trap density measurement Methods 0.000 description 2
- 229910017083 AlN Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(IV) oxide Inorganic materials O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Classifications
-
- H01L29/7802—
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/0445—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising crystalline silicon carbide
- H01L21/048—Making electrodes
- H01L21/049—Conductor-insulator-semiconductor electrodes, e.g. MIS contacts
-
- H01L29/513—
-
- H01L29/66068—
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
The invention discloses a kind of silicone carbide metal oxide semiconductor field effect transistor and its manufacturing method, which successively includes: drain metal, N from bottom to top+Substrate, N‑Drift layer, p-well, the region technotron JFET, N+ source region, the contact zone P+, gate stack, source metal and grid, the gate stack is by High-K medium and SiO2Medium cross direction profiles are constituted.The present invention is by High-K medium and SiO2The cross direction profiles of medium constitute gate stack, reduce the density of SiC MOSFET interface trap, improve channel mobility, improve the forward conduction ability of device, to reduce power loss, in addition, the oxide layer of the present invention growing mixed gate medium by the way of deposit, so that the speed of growth of oxide layer is improved, to reduce process costs.
Description
Technical field
The present invention relates to microelectronics technology more particularly to a kind of silicone carbide metal oxide semiconductor field effect crystal
Pipe and its manufacturing method.
Background technique
SiC becomes one kind of manufacture high temperature, high-power electronic device with its excellent physicochemical characteristics and electrology characteristic
Most advantageous semiconductor material, and there is the power device quality factor much larger than Si material.SiC power device MOSFET
(Metal Oxide Semiconductor Field Effect Transistor, metal oxide semiconductor field effect transistor
Pipe) there are the series of advantages such as input impedance high, switching speed is fast, working frequency is high, high temperature high voltage resistant, in switch voltage-stabilizing electricity
Source, high-frequency heating, automotive electronics and power amplifier etc., which achieve, to be widely applied.
Compared with other wide bandgap semiconductors, one of SiC material is significant advantage is that can pass through the side of hot oxygen
Method directly generates SiO on its surface2, this means that SiC material is production high-power MOS FET and IGBT (Insulated
Gate Bipolar Transistor, insulated gate bipolar transistor) etc. SiC MOS device ideal material.
But, there is the following in the reason of hindering the development of SiC MOS device at present: firstly, the surface of SiC compared with Si material
SiO is formed by oxidation2Speed it is slow, increase process costs.Secondly, a large amount of interface left after SiC thermal oxide is fallen into
Trap, so that SiO2The interface trap density of/SiC usually compares SiO2High 1~2 order of magnitude of the interface trap density of/Si, high boundary
The face density of states will be greatly reduced the mobility of carrier, and conducting resistance is caused to increase, and power loss increases.
Summary of the invention
The main purpose of the present invention is to provide a kind of silicone carbide metal oxide semiconductor field effect transistor and its systems
Make method, it is intended to solve the manufacture of existing silicone carbide metal oxide semiconductor field effect transistor, process costs are high, power damage
Consume larger technical problem.
To achieve the above object, the present invention provides a kind of silicone carbide metal oxide semiconductor field effect transistor, described
Silicone carbide metal oxide semiconductor field effect transistor successively includes: drain metal, N from bottom to top+Substrate, N-Drift layer, P
Trap, the region technotron JFET, N+ source region, the contact zone P+, source metal and grid, which is characterized in that the silicon carbide
Metal Oxide Semiconductor Field Effect Transistor further include:
Gate stack between the contact zone P+ and source metal, the gate stack by High-K medium with
SiO2Medium cross direction profiles are constituted.
Optionally, the SiO2Right above channel between p-well and N+ source region, the High-K medium covers dielectric overlay
The region JFET and other grid regions in addition to right above channel are placed on, to form High-K/SiO2Compound grid structure.
Optionally, the source metal includes the source metal positioned at the right and left, the gate stack with a thickness of
10~150nm, it is longitudinal between grid and the region JFET, it is laterally positioned between two source metals.
In addition, to achieve the above object, the present invention also provides a kind of silicone carbide metal oxide semiconductor field effect crystal
The manufacturing method of pipe, which comprises
Silicon carbide is pre-processed；
Silicon carbide after the pre-treatment deposits High-K medium；
On the silicon carbide for being deposited with High-K medium, SiO is deposited2Medium；
The grid of silicon carbide front deposit doping phosphonium ion after depositing twice, and deposit metal alloy and form source contact
Metal layer and drain contact metal layer, to obtain High-K/SiO2It imitates the silicone carbide metal oxide semiconductor field of compound grid structure
Answer transistor.
Optionally, described to include: to the pretreated step of silicon carbide progress
The N doped with Nitrogen ion is generated in silicon carbide substrates on piece extension-Drift layer；
In the N doped with Nitrogen ion-Aluminium ion is injected on drift layer, to be formed doped with aluminum ions p-well；
Nitrogen ion is being injected doped with the first predeterminable area in aluminum ions p-well, to form the N+ doped with Nitrogen ion
Source region；
Aluminium ion is being injected doped with the second predeterminable area in aluminum ions p-well, to be formed doped with aluminum ions P+
The pretreatment of silicon carbide is realized in contact zone.
Optionally, on the silicon carbide after the pre-treatment, deposit High-K medium the step of include:
Use the silicon carbide deposition thickness of the method for atomic layer deposition after the pre-treatment for the High-K of 10~150nm
Medium, wherein deposition temperature is 200 DEG C~400 DEG C, and deposition time is 30min~120min；
High-K dielectric film is formed by photoetching, etching.
Optionally, described on the silicon carbide for being deposited with High-K medium, deposit SiO2The step of medium includes:
Using the method for atomic layer deposition where the p-well on the silicon carbide for being deposited with High-K medium right above channel,
Deposit the SiO that a layer thickness is 30nm~150nm2Dielectric layer, wherein deposit oxidizing temperature is 300 DEG C, and deposition time is
30min~5h；
SiO is formed by photoetching, etching2Dielectric film.
Optionally, before the step of grid of phosphonium ion is adulterated in the silicon carbide front deposit after depositing twice, institute
State manufacturing method further include:
Annealing cooling treatment is carried out to the silicon carbide after depositing twice, so as to the subsequent silicon carbide after cooling treatment of annealing
The grid of front deposit doping phosphonium ion.
Optionally, it is described to twice deposit after silicon carbide carry out annealing cooling treatment the step of include:
To the print after deposit, under conditions of temperature is 500 ± 5 DEG C, 10%O2: 90%N2Mixed gas in anneal
30min is handled, then cooling treatment, rate are cooled to 5 DEG C/min in Ar compression ring border.
In technical solution proposed by the present invention, silicone carbide metal oxide semiconductor field effect transistor is from bottom to top successively
It include: drain metal, N+Substrate, N-Drift layer, p-well, the region technotron JFET, N+ source region, the contact zone P+, composite grid
Medium, source metal and grid, the gate stack is by High-K medium and SiO2Medium cross direction profiles are constituted, and the present invention is logical
Silicon carbide deposit High-K medium after the pre-treatment is crossed, and deposits SiO on the silicon carbide for being deposited with High-K medium2
Medium reduces the density of interface trap, improves channel mobility, improves the forward conduction ability of device, reduces function
Rate loss, in addition, the oxide layer of the present invention growing mixed gate medium by the way of deposit, so that the speed of growth of oxide layer obtains
To raising, to reduce process costs.
Detailed description of the invention
Fig. 1 is the preferred construction schematic diagram of silicone carbide metal oxide semiconductor field effect transistor of the present invention；
Fig. 2 is the stream of the manufacturing method first embodiment of silicone carbide metal oxide semiconductor field effect transistor of the present invention
Journey schematic diagram；
Fig. 3 is the refinement flow diagram of step S10 in Fig. 2；
Fig. 4 is preferred process flow diagram of the present invention.
The embodiments will be further described with reference to the accompanying drawings for the realization, the function and the advantages of the object of the present invention.
Specific embodiment
It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, it is not intended to limit the present invention.
It should be noted that the manufacturing cost based on silicone carbide metal oxide semiconductor field effect transistor is high, power
Be lost big problem, industry is using surface of SiC nitridation pretreatment, nitrogen oxides, the techniques such as the source N or the source H annealing and
Method is handled, to SiO2The interface quality and overall permanence of/SiC has certain promotion, but and SiO2The interface /Si matter
Amount, which is compared, no small gap.
The present invention passes through the study found that for SiO2/ SiC MOS device, according to Gauss theorem (kSiCESiC=
koxideEoxide), when SiC (k=9.6~10) reaches its critical breakdown electric field (~3MV/cm), SiO2(k=3.9) dielectric layer
In electric field be up to 7.4~7.7MV/cm, so high electric field will the serious reliability for reducing oxide layer.Therefore, using high k
Material replaces SiO2As gate dielectric layer, it is particularly important in the application of SiC MOS device and research to study hafnium.At present
Al2O3、HfO2, AlN and ZrO2Equal hafniums (the high dielectric number meaning, high-k material) have certain research in SiC MOS,
Since interface state density existing between high-k medium and SiC substrate is larger, oxide traps density is larger, can seriously affect
MOSFET element mobility, this problem seriously affect the forward conduction characteristic of SiC high-k MOS device.
It is an object of the invention to be directed to the deficiency of above-mentioned prior art, a kind of High-K/SiO is provided2Composite grid knot
SiC MOSFET (Metal-Oxide-Semiconductor Field Effect Transistor, the silicon-carbide metal oxygen of structure
Compound semiconductor field effect transistor) production method, this method is in traditional simple High-k or SiO2Gate medium is technical,
SiO is grown using atomic layer deposition above channel2, solve existing a large amount of between High-k medium and SiC above channel
Interfacial state reduces the density of interface trap, compared to pure High-k gate device, improves channel mobility, improves device
Forward conduction ability；Compared to pure SiO2Gate device, above JEFT (JUNCTIONFET, junction field effect transistor) area with
And gate medium is made using High-K material in remaining grid region that gate oxide can be effectively relieved under the conditions of reverse-biased based on Gauss theorem
The high electric-field intensity of distribution improves device pressure resistance reliability.
To achieve the above object, the present invention proposes a kind of silicone carbide metal oxide semiconductor field effect transistor.
Referring to Fig.1, Fig. 1 is the structure of silicone carbide metal oxide semiconductor field effect transistor preferred embodiment of the present invention
Schematic diagram.
In the present embodiment, the silicone carbide metal oxide semiconductor field effect transistor SiC MOSFET, from lower and
On successively include: drain metal 1, N+Substrate 2, N-Drift layer 3, p-well 4, the region technotron JFET 5, N+ source region 6, P+ connect
Touch area 7, gate stack, source metal 10 and grid 11, wherein the gate stack is by High-K medium 8 and SiO2It is situated between
9 cross direction profiles of matter are constituted.
Further, the SiO2Medium 9 is covered in right above the channel between p-well 4 and N+ source region 6, the High-K
Medium 8 is covered in the region JFET 5 and remaining grid region in addition to right above channel, to form High-K/SiO2Composite grid knot
Structure.
Further, the source metal 10 includes the source metal positioned at the right and left, the thickness of the gate stack
Degree is 10~150nm, longitudinal between grid 11 and the region JFET 5, is laterally positioned between two source metals 10.
In the present embodiment, referring to Fig.1, drain electrode 1 is the Al/Ti alloy of the 300nm/100nm formed by deposit, is located at
The back side of silicon carbide substrates 2；
N+Substrate 2 is highly doped silicon carbide substrates；
N+Convex area on substrate 2 is the N of 5~100 μm of Nitrogen ions doping-Drift layer 3, wherein the doping of Nitrogen ion is dense
Degree is 1 × 1015cm-3~1 × 1016cm-3；
It is 0.5 μm that p-well 4, which is by injecting the depth that the aluminium ion of preset times is formed, and doping concentration is 3 × 1018cm-3
Region, be located at convex N-The left upper right corner of drift layer 3, the preset times are arranged according to the actual situation, herein without limitation；
It should be noted that the region N- is the region JFET 5 between p trap 4；
N+ source region 6 is located in two p-wells 4 of left and right, be the depth that multiple injection Nitrogen ion is formed is 0.2 μm, adulterates dense
Degree is 1 × 1019cm-3Region, inject the specific number of Nitrogen ion equally without limitation；
It is the depth that multiple injection aluminium ion is formed in p-well 4 and close to N+ source region 6 is 0.5 μm that the contact zone P+ 7, which is located at, is mixed
Miscellaneous concentration is 2 × 1019cm-3Region；
High-K dielectric layer 8 is the High-K material of 10nm~150nm thickness, is laterally positioned in left source metal and right source electrode gold
It is longitudinal to be located on the region JFET 5 between category；
SiO2Dielectric layer 9 is located at right above the channel region of the p-well 4 of left and right two, with a thickness of 10nm~150nm；
Grid 11 is the polysilicon by depositing the 200nm phosphonium ion formed doping, and doping concentration is 5 × 1019cm-3~1 ×
1020cm-3, it is located at SiO28 top of gate dielectric layer；
Source metal 10 is the Al/Ti alloy of the 300nm/100nm formed by deposit, is located at source region N+Contact 6 and P+It connects
The top of touching 7.
In technical solution proposed by the present invention, silicone carbide metal oxide semiconductor field effect transistor is from bottom to top successively
It include: drain metal, N+Substrate, N-Drift layer, p-well, the region technotron JFET, N+ source region, the contact zone P+, composite grid
Medium, source metal and grid, the gate stack is by High-K medium and SiO2Medium cross direction profiles constitute, the present invention by
High-K medium and SiO2The cross direction profiles of medium constitute gate stack, to obtain SiC MOSFET according to gate stack,
The density for reducing SiC MOSFET interface trap, improves channel mobility, the forward conduction ability of device is improved, to subtract
Small-power loss, in addition, the oxide layer of the present invention growing mixed gate medium by the way of deposit, so that the growth speed of oxide layer
Degree is improved, to reduce process costs.
Present invention further propose that a kind of manufacturing method of silicone carbide metal oxide semiconductor field effect transistor.
It is the first of the manufacturing method of silicone carbide metal oxide semiconductor field effect transistor of the present invention referring to Fig. 2, Fig. 2
Embodiment.
In the present embodiment, the manufacturing method of the silicone carbide metal oxide semiconductor field effect transistor includes:
Silicon carbide is pre-processed；
Silicon carbide after the pre-treatment deposits High-K medium；
On the silicon carbide for being deposited with High-K medium, SiO is deposited2Medium；
Twice deposit after silicon carbide front deposit doping phosphonium ion grid, and deposit formed source contact metal layer and
Drain contact metal layer, to obtain High-K/SiO2The silicone carbide metal oxide semiconductor field effect transistor of compound grid structure.
It is the specific step that the manufacture of silicone carbide metal oxide semiconductor field effect transistor is realized in the present embodiment below
It is rapid:
Step S10, pre-processes silicon carbide；
Specifically, include: referring to Fig. 3, the step S10
Step S11 generates the N doped with Nitrogen ion in silicon carbide substrates on piece extension-Drift layer；
In the present embodiment, the silicon carbide substrates piece is N mentioned above+Substrate 2 is mixed in the generation of silicon carbide substrates on piece
The miscellaneous N for having Nitrogen ion-The mode of drift layer are as follows: in the N of silicon carbide substrates on piece 8~9 μm of Nitrogen ions of epitaxial growth doping-Drift
Layer, the doping concentration of Nitrogen ion are 1 × 1015cm-3~2 × 1015cm-3, epitaxial temperature is 1570 DEG C, pressure 100mbar
(100mbar=10kpa), reaction gas are silane and propane, and carrier gas is pure hydrogen, and impurity source is liquid nitrogen.
Further, the N doped with Nitrogen ion is being generated-It, can be first using RCA cleaning standard law to carbonization before drift layer
Silicon substrate film is cleaned, to reduce the interference of impurity.
Step S12, in the N doped with Nitrogen ion-Aluminium ion is injected on drift layer, to be formed doped with aluminum ions p-well；
In the present embodiment, the N doped with Nitrogen ion is being obtained-After drift layer, in the N of Nitrogen ion doping-Drift layer is enterprising
The multiple aluminium ion Selective implantation of row, forming depth is 0.5 μm, and doping concentration is 3 × 1018cm-3P-well, aluminum ions injection
Temperature is 650 DEG C.
Step S13 is injecting Nitrogen ion doped with the first predeterminable area in aluminum ions p-well, to be formed doped with nitrogen
The N+ source region of ion；
In the present embodiment, it after obtaining doped with aluminum ions p-well, is carried out in the p-well of Al-doping multiple
Nitrogen ion Selective implantation, forming depth is 0.2 μm, and doping concentration is 1 × 1019cm-3N+ source region, the injection temperature of Nitrogen ion
Degree is 650 DEG C.
Step S14 is injecting aluminium ion doped with the second predeterminable area in aluminum ions p-well, to be formed doped with aluminium
The contact zone P+ of ion, realizes the pretreatment of silicon carbide.
In the present embodiment, after obtaining doped with aluminum ions p-well, can also Al-doping p-well it is enterprising
The multiple aluminium ion Selective implantation of row, forming depth is 0.2 μm, and doping concentration is 2 × 1019cm-3The contact zone P+, aluminium ion
Injecting temperature is 650 DEG C.
By above-mentioned each step, the pretreatment of silicon carbide is completed.
Step S20, silicon carbide after the pre-treatment deposit High-K medium；
Specifically, the step S20 includes:
Step a uses the silicon carbide deposition thickness of the method for atomic layer deposition after the pre-treatment for 10~150nm's
High-K medium, wherein deposition temperature is 200 DEG C~400 DEG C, and deposition time is 30min~120min；
Step b forms High-K dielectric film by photoetching, etching.
That is, after being pre-processed to silicon carbide, it is thick in SiC epitaxial layer surface deposition using the method for atomic layer deposition
Degree is the High-K gate dielectric layer of 10~150nm, and such as the High-K gate dielectric layer of 50nm, deposition temperature is chosen as 200 DEG C, deposit
Time is chosen as 60min.After the deposition, then by photoetching, etching High-K dielectric film is formed.
Step S30 deposits SiO on the silicon carbide for being deposited with High-K medium2Medium；
Specifically, the step S30 includes:
Step c, using atomic layer deposition method channel where the p-well on the silicon carbide for being deposited with High-K medium just
Top, the SiO that deposit a layer thickness is 30nm~150nm2Dielectric layer, wherein deposit oxidizing temperature is 300 DEG C, deposition time
For 30min~5h；
Step d forms SiO by photoetching, etching2Dielectric film.
That is, on the silicon carbide for being deposited with High-K medium, using the method for atomic layer deposition, channel is being just where p-well
Top deposits the SiO that a layer thickness is 30nm~150nm2Gate dielectric layer, such as the SiO of 50nm2Gate dielectric layer deposits oxidizing temperature
It is 300 DEG C, deposition time is chosen as 2h.After the deposition, then by photoetching, etching SiO is formed2Dielectric film.
It is appreciated that obtaining High-K/SiO by above-mentioned deposition run twice2Gate stack.
Step S40, the grid of the silicon carbide front deposit doping phosphonium ion after depositing twice, and deposit and form source contact
Metal layer and drain contact metal layer, to obtain High-K/SiO2It imitates the silicone carbide metal oxide semiconductor field of compound grid structure
Answer transistor.
In the present embodiment, in High-K/SiO2Deposition preset thickness in composite grid, as the phosphonium ion of 200nm adulterates
The doping concentration of grid, phosphonium ion is chosen as 5 × 1019cm-3~1 × 1020cm-3, deposition temperature is chosen as 600~650 DEG C, forms sediment
It overstocks and is chosen as 60~80Pa by force, reaction gas is silane and hydrogen phosphide, and carrier gas is helium, in addition, can also deposit
The Al/Ti alloy of 300nm/100nm, as the contact metal layer of source electrode and drain electrode, and nitrogen at a temperature of 1100 ± 50 DEG C
It anneals in atmosphere 3 minutes formation Ohmic contacts (Ohmic contact refers to contact of the metal with semiconductor).
In technical solution proposed by the present invention, SiO is grown using atomic layer deposition above channel2, solve on channel
Between square High-k medium and SiC the problem of existing a large amount of interfacial states, so that the density of interface trap is reduced, compared to pure
High-k gate device, improves channel mobility, improves the forward conduction ability of device, reduces power loss, in addition, this
The oxide layer for inventing the growing mixed gate medium by the way of deposit, so that the speed of growth of oxide layer is improved, to drop
Low process costs.
Further, the second embodiment of manufacturing method of the present invention is proposed based on first embodiment.
Manufacturing method second embodiment and the difference of manufacturing method first embodiment are, described before the step S40
Method further include:
Annealing cooling treatment is carried out to the silicon carbide after depositing twice, so as to the subsequent silicon carbide after cooling treatment of annealing
The grid of front deposit doping phosphonium ion.
Specifically, it is described to twice deposit after silicon carbide carry out annealing cooling treatment the step of include:
To the print after deposit, under conditions of temperature is 500 ± 5 DEG C, 10%O2: 90%N2Mixed gas in anneal
30min is handled, then cooling treatment, rate are cooled to 5 DEG C/min in Ar compression ring border.
In the present embodiment, by carrying out cooling treatment to silicon carbide after depositing twice, so that subsequent can quickly form sediment
The grid of product doping phosphonium ion, the grid is preferably polysilicon gate.
Based on the specific descriptions of above-mentioned each embodiment, the present embodiment describes silicon carbide of the present invention with specific scene again
The realization process of the manufacturing method of Metal Oxide Semiconductor Field Effect Transistor.
Referring to figure 4., Fig. 4 is SiC MOSFET manufacturing method detailed process of the invention:
Step 1. is in N+Epitaxial growth N on silicon carbide substrates piece 2-Drift layer 3.
To N+Silicon carbide substrates piece 2 is cleaned using RCA cleaning standard law, then in substrate surface epitaxial growth thickness
It is 8 μm, Nitrogen ion doping concentration is 1 × 1015cm-3N-Drift layer 3, process conditions are: epitaxial temperature is 1570 DEG C, pressure
For 100mbar, reaction gas uses silane and propane, and carrier gas uses pure hydrogen, and impurity source uses liquid nitrogen.
More aluminium ion Selective implantations of step 2. form p-well 4.
(2.1) depositing a layer thickness in silicon carbide plate front by low pressure hot wall chemical vapor sedimentation is 0.2 μm
SiO2Layer, the Al that then deposition thickness is 1 μm again are formed as the barrier layer of 4 ion implanting of p-well by lithography and etching
4 injection region of p-well；
(2.2) under 650 DEG C of environment temperature to p-well injection region carry out four Al ion implantings, successively using 450keV,
Implantation dosage is 7.97 × 10 by the Implantation Energy of 300keV, 200keV and 120keV13cm-2、4.69×1013cm-2、3.27×
1013cm-2With 2.97 × 1013cm-2Aluminium ion, be injected into p-well injection region, formed depth be 0.5 μm, doping concentration be 3 ×
1018cm-3P-well 4；
(2.3) silicon carbide is cleaned using RCA cleaning standard, the protection of C film is made after drying；Then 1700
Ion-activated annealing 10min is carried out in~1750 DEG C of argon atmospheres.
More Nitrogen ion Selective implantations of step 3. form N+ source region 6.
(3.1) depositing a layer thickness in silicon carbide plate front by low pressure hot wall chemical vapor sedimentation is 0.2 μm
SiO2Layer, the Al that then deposition thickness is 1 μm again pass through lithography and etching as the barrier layer of 6 ion implanting of N+ source region well
To form N+ source region injection region；
(3.2) N~+ implantation twice is carried out to 6 injection region of N+ source region under 650 DEG C of environment temperature, successively used
Implantation dosage is 3.9 × 10 by the Implantation Energy of 80keV, 30keV14cm-2、1.88×1014cm-2, it is injected into the injection of N+ source region
Area, forming depth is 0.2 μm, and doping concentration is 1 × 1019cm-3N+ source region 6；
(3.3) silicon carbide is cleaned using RCA cleaning standard, the protection of C film is made after drying；Then 1700
Ion-activated annealing 10min is carried out in~1750 DEG C of argon atmospheres.
More aluminium ion Selective implantations of step 4. form the contact zone P+ 7.
(4.1) depositing a layer thickness in silicon carbide plate front by low pressure hot wall chemical vapor sedimentation is 0.2 μm
SiO2Layer, the Al that then deposition thickness is 1 μm again pass through lithography and etching as the barrier layer of 7 ion implanting of the contact zone P+
To form P+ contact injection region；
(4.2) Al ion implanting twice is carried out to the contact zone P+ 7 under 650 DEG C of environment temperature, successively 90keV, 30keV
Implantation Energy, by implantation dosage be 1.88 × 1014cm-2、3.8×1014cm-2Aluminium ion, be injected into the contact zone p+ injection
Area, forming depth is 0.2 μm, and doping concentration is 2 × 1019cm-3The contact zone P+ 7,；
(4.3) silicon carbide is cleaned using RCA cleaning standard, the protection of C film is made after drying；Then 1700
Ion-activated annealing 10min is carried out in~1750 DEG C of argon atmospheres.
Step 5. deposit growth High-K dielectric layer 8.
(5.1) it on N-type SiC epitaxial wafer after the pre-treatment, is formed sediment using the method for atomic layer deposition on SiC epitaxial layer surface
Product High-K medium, deposition temperature are 200 DEG C, deposition time 60min, and deposition thickness is the High-K gate dielectric layer of 50nm；
(5.2) gate dielectric membrane is formed by photoetching, etching.
Step 6. deposit forms SiO2Dielectric layer 9.
(6.1) method for utilizing atomic layer deposition, the SiO that deposit a layer thickness is 50nm in SiC epitaxial layer2Gate medium
Layer, deposit oxidizing temperature are 300 DEG C, deposition time 2h；
(6.2) gate dielectric membrane is formed by photoetching, etching；
(6.3) to the print after deposit, under conditions of temperature is 500 ± 5 DEG C, 10%O2: 90%N2Mixed gas in
30min is made annealing treatment, then cooling treatment, rate are cooled to 5 DEG C/min in Ar compression ring border.
It is 5 × 10 that step 7. deposit, which forms doping concentration,19cm-3, with a thickness of the grid of the phosphonium ion heavy doping of 200nm.
The polysilicon of growth 200nm, process conditions are deposited in silicon carbide front with low pressure hot wall chemical vapor sedimentation
Be: deposition temperature is 600~650 DEG C, and deposit pressure is 60~80Pa, and reaction gas uses silane and hydrogen phosphide, carrier gas
Using helium.Then polysilicon on gate oxidation films is retained by photoetching, etching, is formed phosphonium ion doping concentration for 5 ×
1019cm-3, with a thickness of the grid 11 of 200nm.
Step 8. deposit forms source contact metal layer and drain contact metal layer.
(8.1) gluing, development are carried out to the front of entire silicon carbide plate, forms N+And P+Contact area deposits 300nm/
The Al/Ti alloy of 100nm makes front form source metal 10 by ultrasonic wave removing later；
(8.2) in the Al/Ti alloy of substrate back deposit 300nm/100nm as drain electrode 1；
(8.3) at a temperature of 1100 ± 50 DEG C, to sample 3 minutes formation Ohm contact electrodes of annealing in nitrogen atmosphere.
The invention has the following advantages over the prior art:
1) SiO of the present invention due to using atomic layer deposition growth above channel2, to reduce pure high-k gate dielectric
High-K medium and SiO at device channel2Between existing a large amount of interfacial states, reduce the density of nearly interface trap, compared to
Pure High-k gate device, improves channel mobility, improves the forward conduction ability of device, reduces power loss.
2) compared to pure SiO2Gate device, the area JEFT top and remaining grid region are made gate medium using High-K material and can be had
Effect alleviates high electric-field intensity of the gate oxide based on Gauss theorem distribution under the conditions of reverse-biased, and it is reliable to improve device pressure resistance
Property.
3) present invention is due to growing gate oxide by the way of deposit, so that the speed of growth of oxide layer is improved,
And handled by postorder deposit after annealing, so that the quality of gate oxide of growth is more preferable.
It should be noted that, in this document, the terms "include", "comprise" or its any other variant are intended to non-row
His property includes, so that the process, method, article or the device that include a series of elements not only include those elements, and
And further include the other elements being not explicitly listed, or further include for this process, method, article or device institute it is intrinsic
Element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that including being somebody's turn to do
There is also other identical elements in the process, method of element, article or device.
The serial number of the above embodiments of the invention is only for description, does not represent the advantages or disadvantages of the embodiments.
Through the above description of the embodiments, those skilled in the art can be understood that above-described embodiment side
Method can be realized by means of software and necessary general hardware platform, naturally it is also possible to by hardware, but in many cases
The former is more preferably embodiment.Based on this understanding, technical solution of the present invention substantially in other words does the prior art
The part contributed out can be embodied in the form of software products, which is stored in storage as described above
In medium (such as ROM/RAM, magnetic disk, CD), including some instructions are used so that a terminal device (can be mobile phone, calculate
Machine, server, air conditioner or network equipment etc.) execute method described in each embodiment of the present invention.
The above is only a preferred embodiment of the present invention, is not intended to limit the scope of the invention, all to utilize this hair
Equivalent structure or equivalent flow shift made by bright specification and accompanying drawing content is applied directly or indirectly in other relevant skills
Art field, is included within the scope of the present invention.
Claims (9)
1. a kind of silicone carbide metal oxide semiconductor field effect transistor successively includes: drain metal, N from bottom to top+Substrate,
N-Drift layer, p-well, the region technotron JFET, N+ source region, the contact zone P+, source metal and grid, which is characterized in that
The silicone carbide metal oxide semiconductor field effect transistor further include:
Gate stack between the contact zone P+ and source metal, the gate stack is by High-K medium and SiO2It is situated between
Matter cross direction profiles are constituted.
2. silicone carbide metal oxide semiconductor field effect transistor as described in claim 1, which is characterized in that the SiO2
For dielectric overlay right above the channel between p-well and N+ source region, the High-K dielectric overlay is in the region JFET and removes channel
Other grid regions other than surface, to form High-K/SiO2Compound grid structure.
3. silicone carbide metal oxide semiconductor field effect transistor as claimed in claim 1 or 2, the source metal include
Positioned at the source metal of the right and left, which is characterized in that the gate stack with a thickness of 10~150nm, it is longitudinal to be located at grid
Between pole and the region JFET, it is laterally positioned between two source metals.
4. a kind of manufacturing method of silicone carbide metal oxide semiconductor field effect transistor, which is characterized in that the manufacturer
Method includes the following steps:
Silicon carbide is pre-processed；
Silicon carbide after the pre-treatment deposits High-K medium；
On the silicon carbide for being deposited with High-K medium, SiO is deposited2Medium；
The grid of silicon carbide front deposit doping phosphonium ion after depositing twice, and deposit metal alloy and form source contact metal
Layer and drain contact metal layer, to obtain High-K/SiO2The silicone carbide metal oxide semiconductor field effect of compound grid structure is brilliant
Body pipe.
5. the manufacturing method of silicone carbide metal oxide semiconductor field effect transistor as claimed in claim 4, feature exist
In described to include: to the pretreated step of silicon carbide progress
The N doped with Nitrogen ion is generated in silicon carbide substrates on piece extension-Drift layer；
In the N doped with Nitrogen ion-Aluminium ion is injected on drift layer, to be formed doped with aluminum ions p-well；
Nitrogen ion is being injected doped with the first predeterminable area in aluminum ions p-well, to form the N+ source region doped with Nitrogen ion；
Aluminium ion is being injected doped with the second predeterminable area in aluminum ions p-well, is being contacted with being formed doped with aluminum ions P+
Area realizes the pretreatment of silicon carbide.
6. the manufacturing method of silicone carbide metal oxide semiconductor field effect transistor as claimed in claim 4, feature exist
In, on the silicon carbide after the pre-treatment, deposit High-K medium the step of include:
The silicon carbide deposition thickness of the method for atomic layer deposition after the pre-treatment is used to be situated between for the High-K of 10~150nm
Matter, wherein deposition temperature is 200 DEG C~400 DEG C, and deposition time is 30min~120min；
High-K dielectric film is formed by photoetching, etching.
7. the manufacturing method of silicone carbide metal oxide semiconductor field effect transistor as claimed in claim 4, feature exist
In, it is described on the silicon carbide for being deposited with High-K medium, deposit SiO2The step of medium includes:
Method using atomic layer deposition right above channel, is depositing where the p-well on the silicon carbide for being deposited with High-K medium
A layer thickness is the SiO of 30nm~150nm2Dielectric layer, wherein deposit oxidizing temperature be 300 DEG C, deposition time be 30min~
5h；
SiO is formed by photoetching, etching2Dielectric film.
8. such as the manufacturing method of the described in any item silicone carbide metal oxide semiconductor field effect transistors of claim 4 to 7,
It is characterized in that, before the step of grid of phosphonium ion is adulterated in the silicon carbide front deposit after depositing twice, the system
Make method further include:
Annealing cooling treatment is carried out to the silicon carbide after depositing twice, so as to the subsequent silicon carbide front after cooling treatment of annealing
The grid of deposit doping phosphonium ion.
9. the manufacturing method of silicone carbide metal oxide semiconductor field effect transistor as claimed in claim 8, feature exist
In, it is described to twice deposit after silicon carbide carry out annealing cooling treatment the step of include:
To the print after deposit, under conditions of temperature is 500 ± 5 DEG C, 10%O2: 90%N2Mixed gas in make annealing treatment
30min, then cooling treatment, rate are cooled to 5 DEG C/min in Ar compression ring border.
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