CN109029409A - Parameter amplification method and its device in a kind of tunable grid structure micromechanical gyro - Google Patents
Parameter amplification method and its device in a kind of tunable grid structure micromechanical gyro Download PDFInfo
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- CN109029409A CN109029409A CN201810621975.4A CN201810621975A CN109029409A CN 109029409 A CN109029409 A CN 109029409A CN 201810621975 A CN201810621975 A CN 201810621975A CN 109029409 A CN109029409 A CN 109029409A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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Abstract
The invention discloses the parameter amplification method and its device in a kind of tunable grid structure micromechanical gyro, this method includes driving signal generation, tuning signal generation, tuning signal amplification, displacement detecting, amplitude and phase five steps of extraction.The device includes tunable micromechanical gyroscope, drive signal generation circuit, capacitor/voltage conversion circuit, tuning signal amplifying circuit, the first D/A converter, A/D converter, the second D/A converter and field programmable gate array chip.Present invention utilizes variable area formula triangular-shaped electrodes to realize that tuning structure without introducing slinky spring effect, the tuning voltage signal of radical sign form is generated using field programmable gate array chip, can be provided separately to direct current tuning capability and parameter amplifying power.This method can be applied to the driven-mode or sensed-mode of micromechanical gyro, can also be applied to other kinds of micromechanical resonator.
Description
Technical field
The present invention relates to the parameter amplification sides in micromechanical gyro more particularly to a kind of tunable grid structure micromechanical gyro
Method and its device.
Background technique
Micromechanical gyro have the characteristics that it is small in size, low in energy consumption, can be mass, industry and civil field have extensively
Application prospect.In recent years, the performance indicator of micromechanical gyro was continuously improved, and showed the potentiality of high-precision applications, such as
Inertial navigation unit.
The principle of parameter amplification is the cyclically-varying of coefficient of elasticity, and a part damping system can be offset under special parameter
Several effects, the quality factor that will lead to device are amplified, and can improve the mechanical sensitivity of device.Micromechanical gyro is called Coriolis
Oscillation gyro is the energy exchange mechanism based on two mode of oscillations, i.e. driven-mode and sensed-mode.For micromechanical gyro
For, parameter amplification can be applied to driven-mode or sensed-mode, but sensed-mode ability is only applied to when mode vectors correlation
Improve sensitivity.
Traditional tunable micro mechanical device is generally based on comb teeth and becomes spacing tuning structure, when application parameter amplifies
Time can introduce slinky spring effect.The triangle that the present invention uses tunes electrode, is a kind of Linear Tuning structure, will not be tuned
In journey introduce slinky spring effect, will not therefore limit device vibration displacement amplitude.In addition, traditional parameter amplification tuning letter
Number form it is general there are three types of: Vt=Vaccos(ωt)、Vt=Vdc+Vaccos(ωt)、Vt=Vdc+VacCos (2 ω t), this three
Kind form all can not directly pass through adjustment parameter VdcAnd VacDirect current tuning capability and parameter amplifying power are provided separately.
The tuning signal for this radical sign form that the present invention uses, can pass through AdcAdjust direct current tuning capability, AacAdjustable parameter amplification
Ability.Compared with other tuning signal forms, there is superiority.This method can be applied to micromechanical gyro driven-mode or
Sensed-mode can also be applied to other kinds of micromechanical resonator.
Summary of the invention
The purpose of the present invention is overcome the deficiencies of the prior art and provide the ginseng in a kind of tunable grid structure micromechanical gyro
Measure amplification method and its device.
Technical scheme is as follows:
Used tuning structure is based on variable area formula triangular-shaped electrodes, and used tuning signal is by field-programmable
The radical sign form that gate array chip generates.
Specific step is as follows for a kind of parameter amplification method in tunable grid structure micromechanical gyro:
1) driving signal generation module generates alternating current drive signal and carrier signal using field programmable gate array chip,
DC driven signal is generated using reference voltage chip, by the amplifier chip of drive signal generation circuit by alternating current drive signal
It carries out being added the raw two-way driving signal of the underproduction with DC driven signal.The form of two-way driving signal is Vd=Vd-DC±Vd-ACcos
(ω t), wherein Vd-ACTo drive DC component, Vd-ACTo drive exchange rate, ω is driving frequency.Drive exchange rate and drive
Dynamic frequency can carry out real-time, tunable to the parameter in field programmable gate array chip by serial communication, when driving frequency is certain
Frequency separation in when being incremented by with fixed intervals, frequency sweep operation can be carried out.Driving signal is output to appointing for micromechanical gyro
The driving signal input of one mode can be completed in the driving electrodes of micromechanical gyro from driving electric signal to electrostatic drive power
Conversion.Carrier signal is output to the carrier signal input terminal of micromechanical gyro.
2) tuning signal generation module produces the tuning signal of radical sign form using field programmable gate array chip, defeated
Tuning signal amplification module is arrived out.
3) tuning signal amplification module is further amplified tuning signal using tuning signal amplifying circuit, and output is extremely
The tuning signal input terminal of tunable micromechanical gyroscope come realize direct current tuning or parameter amplification, in the tuning of micromechanical gyro
The conversion of the tuning power from tuning electric signal to electrostatic can be completed on electrode.
4) displacement detection module is using capacitor/voltage conversion circuit, caused by the output vibration signal by micromechanical gyro
Capacitance variations are converted to voltage signal, and complete carrier modulation, and obtained detectable voltage signals are input to amplitude and phase
Extraction module.
5) sample can into scene for the detectable voltage signals that amplitude and phase extraction module will test that capacitor/voltage module obtains
Program gate array chip, carry out carrier wave demodulation and quadrature demodulation, the rear vector pattern using Coordinate Rotation Digital calculation method come
Amplitude and phase are completed to extract.
Further, the form of the tuning signal of the tuning signal generation module generation is
Wherein, AdcTo tune DC component, AacTo tune exchange rate,To tune phase.Frequency sweep mode is used for parameter amplification effect
Test, when driving signal is frequency sweep mode, ω is incremented by certain frequency separation with fixed intervals, tuning signal at this time
Frequency must always remain as 2 ω, by amplitude and phase extraction module, the frequency response that can draw out parameter amplification front and back is bent
Line, it can be observed that apparent mode amplification；Operating mode is used for angular velocity detection, when driving signal is operating mode, ω
Driving resonance frequency is remained, the frequency of tuning signal still remains 2 ω at this time, can test to obtain micromechanical gyro in parameter
Amplify the performance changes such as sensitivity, angle random walk, the biasing unstability of front and back.
The invention discloses the parameter amplification method device in a kind of tunable grid structure micromechanical gyro, including it is tunable
Micromechanical gyro, drive signal generation circuit, tuning signal amplifying circuit, capacitor/voltage conversion circuit, the first D/A switch
Device, the second D/A converter, A/D converter and field programmable gate array chip.Field programmable gate array chip
First output end is connect with the input terminal of the first D/A converter, the second output terminal of field programmable gate array chip and the
The input terminal of two D/A converters connects.The output end of first D/A converter and the input terminal of drive signal generation circuit connect
It connects, the output end of drive signal generation circuit and the driving signal input of tunable micromechanical gyroscope connect.Second D/A turns
The output end of parallel operation is connect with the input terminal of tuning signal amplifying circuit, the output end of tuning signal amplifying circuit with it is tunable micro-
The tuning signal input terminal of mechanical gyro connects.Tune the vibration displacement output end and capacitor/voltage conversion electricity of micromechanical gyro
The input terminal on road connects, and the input terminal of capacitor/voltage conversion circuit output end and A/D converter connects, A/D converter
Output end and field programmable gate array chip input terminal connect.
Further, the tunable micromechanical gyroscope includes driving end, feedback end, dynamic balance end, test side and tuning
End, tuning tip are to realize tuber function based on variable area triangular-shaped electrodes, and variable area triangular-shaped electrodes are by movable rectangular electrode
It is constituted with fixed triangle shape or variable area triangular-shaped electrodes is made of movable triangular-shaped electrodes and fixed rectangular electrode.
Compared with the prior art, the invention has the beneficial effects that:
1) parameter of the invention amplifies the tuning electrode based on triangle variable area and realizes, will not introduce slinky spring effect,
The work shift of tunable grid structure micromechanical gyro will not therefore be limited.
2) tuning voltage of the parameter of the invention amplification based on a kind of novel radical sign form, can be to direct current tuning capability
It is provided separately with parameter amplifying power.
3) parameter amplification method of the invention can effectively improve the sensitivity of tunable grid structure micromechanical gyro, angle
The performances such as random walk, biasing unstability.
4) parameter amplification method of the invention can not only be applied to the driven-mode or sensed-mode of micromechanical gyro,
It can also be applied to other kinds of micromechanical resonator.
Detailed description of the invention
Fig. 1 is the schematic diagram of the parametric approach in tunable grid structure micromechanical gyro.
In figure, tunable micromechanical gyroscope 1 refers to that driven-mode or sensed-mode devise triangle tuning electrode
Micromechanical gyro, displacement detection module 2 refer to obtaining detectable voltage signals, amplitude and phase using capacitor/voltage conversion circuit
Position signal extraction module 3 refers to the width that detectable voltage signals are calculated using the arrow pattern of Coordinate Rotation Digital calculation method
Degree and phase.
Fig. 2 is the driving signal generation module schematic diagram in the present invention.
Fig. 3 is the tuning signal generation module schematic diagram in the present invention.
Fig. 4 is driving signal and tuning signal timing diagram in the present invention.
Fig. 5 is the device figure of the parametric approach in tunable grid structure micromechanical gyro.
Fig. 6 is the micro mechanical structure schematic diagram in the present invention.
Fig. 7 is drive signal generation circuit figure of the invention.
Fig. 8 is tuning signal amplification circuit diagram of the invention.
Fig. 9 is capacitor/voltage conversion circuit figure of the invention.
Specific embodiment
As shown in Figure 1, the step of parametric approach in tunable grid structure micromechanical gyro, is as follows:
1) driving signal generation module generates alternating current drive signal and carrier signal using field programmable gate array chip,
DC driven signal is generated using reference voltage chip, by the amplifier chip of drive signal generation circuit by alternating current drive signal
It carries out being added the raw two-way driving signal of the underproduction with DC driven signal.The form of two-way driving signal is Vd=Vd-DC±Vd-ACcos
(ω t), wherein Vd-ACTo drive DC component, Vd-ACTo drive exchange rate, ω is driving frequency.Drive exchange rate and drive
Dynamic frequency can carry out real-time, tunable to the parameter in field programmable gate array chip by serial communication, when driving frequency is certain
Frequency separation in when being incremented by with fixed intervals, frequency sweep operation can be carried out.Driving signal is output to appointing for micromechanical gyro
The driving signal input of one mode can be completed in the driving electrodes of micromechanical gyro from driving electric signal to electrostatic drive power
Conversion.Carrier signal is output to the carrier signal input terminal of micromechanical gyro.
2) tuning signal generation module produces the tuning signal of radical sign form using field programmable gate array chip, defeated
Tuning signal amplification module is arrived out.
3) tuning signal amplification module is further amplified tuning signal using tuning signal amplifying circuit, and output is extremely
The tuning signal input terminal of tunable micromechanical gyroscope come realize direct current tuning or parameter amplification, in the tuning of micromechanical gyro
The conversion of the tuning power from tuning electric signal to electrostatic can be completed on electrode.
4) displacement detection module is using capacitor/voltage conversion circuit, caused by the output vibration signal by micromechanical gyro
Capacitance variations are converted to voltage signal, and complete carrier modulation, and obtained detectable voltage signals are input to amplitude and phase
Extraction module.
5) sample can into scene for the detectable voltage signals that amplitude and phase extraction module will test that capacitor/voltage module obtains
Program gate array chip, carry out carrier wave demodulation and quadrature demodulation, the rear vector pattern using Coordinate Rotation Digital calculation method come
Amplitude and phase are completed to extract.
In the present invention, the form of the tuning signal of the tuning signal generation module generation is
Wherein, AdcTo tune DC component, AacTo tune exchange rate,To tune phase.Frequency sweep mode is used for parameter amplification effect
Test, when driving signal is frequency sweep mode, ω is incremented by certain frequency separation with fixed intervals, tuning signal at this time
Frequency must always remain as 2 ω, by amplitude and phase extraction module, the frequency response that can draw out parameter amplification front and back is bent
Line, it can be observed that apparent mode amplification；Operating mode is used for angular velocity detection, when driving signal is operating mode, ω
Driving resonance frequency is remained, the frequency of tuning signal still remains 2 ω at this time, can test to obtain micromechanical gyro in parameter
Amplify the performance changes such as sensitivity, angle random walk, the biasing unstability of front and back.
After a certain mode of micromechanical gyro applies tuning voltage as shown above, the difference equation of the mode becomesTwo-way drive is wherein represented on the right side of equation
Dynamic signal driving force caused by gyro driving signal end, F0For driving force amplitude, ω is driving frequency, and m, c, k are respectively
Equivalent mass, damped coefficient, the coefficient of elasticity of the movable mass of resonator, KTIndicate tuning coefficient.According to standard method of perturbation
The steady state solution and its first derivative and second dervative of vibration displacement x can be solved, then generation returns difference equation, then vibration displacement x can
It is solved by triangulate decomposition method.Especially, resonance frequency, resonance shifts amplitude, resonance shifts at resonance, after tuning
Phase difference is as follows:
By above derivation, it is popular for, tuning effect is by tuning DC component AdcIt determines, the feelings of this and direct current tuning
Condition is consistent.And parameter amplifies/reduces effect, only by tuning exchange rate AacWith tuning phaseIt determines.Maximum resonance
Displacement amplitude existsReach, the smallest resonance shifts amplitude existsReach, and in both feelings
Under condition, resonance shifts phase is all-pi/2.Therefore parametric approach of the present invention can be realized by this voltage form to straight
Flow tuning capability and parameter amplifying power separate regulation.
As shown in Fig. 2, the driving signal generation module is by the driving exchange rate and driving frequency as described in step 1)
Rate generates alternating current drive signal by Coordinate Rotation Digital calculation method in programmable gate array chip at the scene, then passes through driving
The amplifier chip of signal generating circuit carries out alternating current drive signal with DC driven signal to be added the raw driving signal of the underproduction.
As shown in figure 3, the tuning signal generation module is by AC compounent amplitude, the AC compounent as described in step 2)
Phase exchanges tuning letter with the generation of Coordinate Rotation Digital calculation method is passed through in driving frequency at the scene programmable gate array chip
Number, continuation is added with direct current tuning signal in programmable gate array chip at the scene and opens radical sign, obtains tuning signal.
As shown in figure 4, being the timing diagram of driving signal and tuning signal.The driving signal and the tuning signal,In the case where can generate most apparent parametric amplifier effect, in specific implementation, tuning phase be set asIt adjusts
Humorous DC component AdcDirect current tuning capability can be individually adjusted, exchange rate A is tunedacCan independent adjustable parameter amplifying power, AdcWith
AacBigger, direct current tuning capability and parameter amplifying power will be more obvious respectively.In figure, two-way driving signal is Vd=Vd-DC±
Vd-ACCos (ω t), wherein Vd-DC=5V, Vd-ACThe π of=2V, ω=4000 rad/s.Tuning signal is
Wherein Adc=50V, Aac=20V,
As shown in figure 5, the parameter amplification method device in a kind of tunable grid structure micromechanical gyro includes tunable micro-
Mechanical gyro, drive signal generation circuit, tuning signal amplifying circuit, capacitor/voltage conversion circuit, the first D/A converter,
Second D/A converter, A/D converter and field programmable gate array chip.The first of field programmable gate array chip
Output end is connect with the input terminal of the first D/A converter, the second output terminal of field programmable gate array chip with second number/
The input terminal of mode converter connects.The output end of first D/A converter and the input terminal of drive signal generation circuit connect, and drive
The output end of dynamic signal generating circuit and the driving signal input of tunable micromechanical gyroscope connect.Second D/A converter
Output end connect with the input terminal of tuning signal amplifying circuit, the output end of tuning signal amplifying circuit and tunable micromechanics
The tuning signal input terminal of gyro connects.Tune the vibration displacement output end and capacitor/voltage conversion circuit of micromechanical gyro
The input terminal of input terminal connection, capacitor/voltage conversion circuit output end and A/D converter connects, A/D converter it is defeated
The connection of the input terminal of outlet and field programmable gate array chip.
As shown in fig. 6, the tunable micromechanical gyroscope refers to that driven-mode or sensed-mode devise triangle tuning
The micromechanical gyro of electrode.In the specific implementation process, if having added sufficiently large driving signal still in driven-mode does not have
Reach capacity vibration displacement, can be in driven-mode application parameter amplification method；If having been able to reach capacity in driven-mode
Vibration displacement, can be in the sensed-mode application parameter amplification method of mode vectors correlation gyro；Therefore it needs to select according to the actual situation
Which select in the mode application present invention.The tunable grid structure micro-mechanical gyro structure of sensed-mode is given in figure, if
Driven-mode application parameter amplification method only need to design triangle as shown in the figure in driven-mode and tune electrode.Wherein, it drives
End and feedback end represent the driving signal input and vibration displacement output end of driven-mode, and dynamic balance end and test side represent
The driving signal input and vibration displacement output end of sensed-mode, can in one of mode application in two mode
Parameter amplification method.
As shown in fig. 7, the drive signal generation circuit are as follows: alternating current drive signal respectively with first resistor R1With the 5th
Resistance R5One end connection, DC driven signal respectively with second resistance R2With the 7th resistance R7One end connection.First resistor R1
With second resistance R2The other end connect with the negative input end of the first operational amplifier, the 4th resistance R4One end ground connection, the 4th electricity
Hinder R4The other end connect with the positive input terminal of the first operational amplifier.7th resistance R7The other end and the first operational amplifier
Negative input end connection, the 5th resistance R5The other end and second operational amplifier positive input terminal connect, the 6th resistance R6One
End ground connection, the 6th resistance R6The other end and second operational amplifier positive input terminal connect.3rd resistor R3One end and first
The negative input end of operational amplifier connects, 3rd resistor R3The other end connect with the output end of the first operational amplifier, first
The signal of the output end output of operational amplifier is first via driving signal.8th resistance R8One end and second operational amplifier
Negative input end connection, the 8th resistance R8The other end and second operational amplifier output end connect, second operational amplifier
Output end output signal be the second tunnel driving signal.Two-way driving signal can be connected to the driving of tunable micromechanical gyroscope
Signal input part, for driving tunable micromechanical gyroscope to generate vibration displacement.
As shown in figure 8, the tuning signal amplifying circuit are as follows: tuning signal and the 9th resistance R9One end connection, the
Nine resistance R9The other end connect with the negative input end of third operational amplifier.Eleventh resistor R11One end ground connection, the 11st
Resistance R11The other end connect with the positive input terminal of third operational amplifier.Tenth resistance R10One end and third operation amplifier
The negative input end of device connects, the tenth resistance R10The other end connect with the output end of third operational amplifier.Third operation amplifier
The signal of the output end output of device is amplified tuning signal.Amplified tuning signal can be connected to tunable micromechanics top
The tuning signal input terminal of spiral shell, for using direct current tuning or parameter amplification method.
As shown in figure 9, capacitor/the voltage conversion circuit are as follows: two groups of Differential Detections electricity of tunable micromechanical gyroscope
Hold C1And C2One end connect with carrier signal, C1And C2The other end detect capacitance signal and the second tunnel with the first via respectively and examine
Capacitance signal connection is surveyed, two-way detects the capacitance signal negative input end with four-operational amplifier and the 5th operational amplifier respectively
Connection.Twelfth resistor R12With third capacitor C3Parallel connection, one end after parallel connection are connect with the negative input end of four-operational amplifier,
The other end is connect with the output end of four-operational amplifier.Thirteenth resistor R13With the 4th capacitor C4Parallel connection, one end after parallel connection
It is connect with the negative input end of the 5th operational amplifier, the other end is connect with the output end of the 5th operational amplifier.4th operation is put
The positive input terminal of big device and the 5th operational amplifier is all grounded, the output end point of four-operational amplifier and the 5th operational amplifier
It Wei not first via detectable voltage signals and the second tunnel detectable voltage signals.So far, pass through four-operational amplifier and the 5th operation
Amplifier completes the conversion from capacitance signal to voltage signal.14th resistance R14One end and four-operational amplifier it is defeated
Outlet connection, the 14th resistance R14The other end connect with the positive input terminal of the 6th operational amplifier, the 15th resistance R15One
End ground connection, the 15th resistance R15The other end also connect with the positive input terminal of the 6th operational amplifier.16th resistance R16One
End is connect with the output end of the 5th operational amplifier, the 16th resistance R16The other end and the 6th operational amplifier negative input end
Connection, the 17th resistance R17One end connect with the negative input end of the 6th operational amplifier, the 17th resistance R17The other end with
The output end of 6th arithmetic unit connects.The output signal of 6th operational amplifier is detectable voltage signals.It is put by the 6th operation
Big device, which realizes, subtracts each other the difference of first via detectable voltage signals and the second tunnel detectable voltage signals, obtains detection voltage letter
Number.
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| CN111766402A (en) * | 2020-07-01 | 2020-10-13 | 浙江大学 | A kind of tuning control method of micromachined accelerometer |
| CN111780736A (en) * | 2020-05-28 | 2020-10-16 | 深迪半导体(上海)有限公司 | Micro-mechanical structure driving amplitude correction system and method |
| CN112003584A (en) * | 2020-08-28 | 2020-11-27 | 上海应用技术大学 | A Microresonator Control System Based on Time Delay Feedback |
| CN112129278A (en) * | 2020-09-15 | 2020-12-25 | 浙江大学 | Gate structure that reduces capacitance-displacement nonlinearity caused by capacitive fringing |
| CN112945219A (en) * | 2021-02-04 | 2021-06-11 | 浙江大学 | Variable area capacitor structure capable of adjusting elastic coefficient of micro mechanical device more |
| CN116576889A (en) * | 2023-07-13 | 2023-08-11 | 湖南天羿领航科技有限公司 | Ring resonance gyro sensitive structure screening device and application method thereof |
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