Preparation method of latticed ZnO spiral type porous hollow nanowire sensor
Technical Field
The invention belongs to the technical field of sensor preparation, and mainly relates to a preparation method of a latticed ZnO spiral type porous hollow nanowire sensor.
Background
The sensor is a very important field in the current scientific development, and can play a positive role in the fields of intelligent home, safe production, environmental protection, national defense and the like. Therefore, high performance sensors have been the subject of efforts by researchers. Si has the advantages of mature preparation process, low cost, large size and the like, so that the Si-based sensor is widely concerned by people. In order to realize Si-based sensors, people generally etch a high-quality Si substrate to obtain a Si nano-array on the Si substrate, and then add an Au electrode and lead out an Au wire to form a complete sensor structure.
However, the minimum detection limit of Si nanoarray sensors is typically 100ppm, far inferior to other semiconductor sensors (5-10 ppm). In addition, its response time is generally 30-50s, i.e., its sensitivity needs to be further improved. In addition to Si-based sensors, ZnO-based sensors have also received attention. ZnO has the advantages of excellent electrical and optical properties, no toxicity, rich raw materials, relatively simple preparation process and the like, thereby being widely applied in the field of semiconductor devices.
At present, the minimum detection limit of the Au/ZnO nano-column array sensor is generally 10ppm, which is superior to that of a Si nano-array sensor. However, the disadvantages of the prior art are:
the preparation process of the ZnO nano-column/nano-wire is complex and has high cost;
2. the electric signal transmission path of the vertically distributed ZnO nano column/nano wire is longer, and the response time of the sensor is longer.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a preparation method of a latticed ZnO spiral type porous hollow nanowire sensor.
The technical scheme adopted by the invention is as follows: a preparation method of a latticed ZnO spiral type porous hollow nanowire sensor comprises the following steps:
A. preparing precursor fiber:
preparing an inorganic substance/PVP spinning solution, and carrying out electrostatic spinning to prepare a latticed spiral inorganic substance/PVP precursor fiber; the mineral/PVP spinning solution is Zn (NO)3)2·4H2O、Zn(CH2COO)2·4H2O、Al(NO3)3·6H2A mixed solution of O and PVP;
B. preparing the nano wire:
calcining the latticed spiral inorganic matter/PVP precursor fiber to obtain latticed Al-doped ZnO spiral porous hollow nanowires;
C. preparing a sensor:
and coating a conductive electrode on the periphery of the latticed Al-doped ZnO spiral porous hollow nanowire, and leading out a lead to obtain the latticed ZnO spiral porous hollow nanowire sensor.
Preferably, the preparation method of the inorganic substance/PVP spinning solution comprises the following steps: adding Zn (NO)3)2·4H2O、Zn(CH2COO)2·4H2O and Al (NO)3)3·6H2Mixing O to obtain an inorganic substance; dissolving inorganic matter in deionized water, adding polyethylene PVP, stirring for 30-90min, and standing to obtain inorganic matter/PVP spinning solution.
Preferably, Zn (NO)3)2·4H2O、Zn(CH2COO)2·4H2O and Al (NO)3)3·6H2The mass ratio of O is 1:0.5-3: 0.01-0.05.
Preferably, the inorganic/PVP spinning solution has a PVP concentration of 40-50 wt% and an inorganic concentration of 8-15 wt%. More preferably, the PVP concentration is 46 wt% and the mineral concentration is 10 wt%.
Preferably, the molecular weight of PVP is 2000-50000.
Preferably, the grid of the grid-shaped spiral inorganic substance/PVP precursor fiber is square, and the side length of the grid-shaped spiral inorganic substance/PVP precursor fiber is 400-2500 nm.
Preferably, in step B, the calcination process is controlled under the following conditions: the heating rate is 1-5 ℃/min, the temperature is increased to 600-900 ℃, and the calcination is carried out for 8-16 hours.
Preferably, the electrode is an Ag electrode, an Au electrode, or a conductive paste.
Preferably, the sensor is a gas sensor.
More specifically, the preparation method of the latticed ZnO spiral type porous hollow nanowire sensor comprises the following specific steps:
(1) zn (NO) with the mass ratio of 1:0.5-3:0.0153)2·4H2O、Zn(CH2COO)2·4H2O and Al (NO)3)3·6H2O, uniformly mixing, dissolving in deionized water, weighing a certain amount of polyvinyl pyrrolidone (PVP (K40)), stirring at room temperature for 30-120min, and standing to obtain a spinning solution, wherein the PVP content in the spinning solution is 46 wt%, and the inorganic salt content is 10 wt%;
(2) preparing a latticed spiral inorganic substance/PVP precursor fiber on ITO conductive glass by adopting electrostatic spinning, wherein the grid is square, and the side length is 400-2500 nm;
(3) transferring the precursor fiber to a box-type resistance furnace, then heating to 900 ℃ at the heating rate of 1-5 ℃/min, and calcining for 8-16 hours to obtain the latticed ZnO spiral porous hollow nanowire;
(4) and coating Ag or Au electrodes or conductive adhesive on the periphery of the latticed ZnO spiral porous hollow nanowires, and leading out a lead to obtain the gas sensor with the finished structure.
The invention has the following beneficial effects: (1) the ZnO nanowire is prepared by electrostatic spinning, so that the controllability is good, and the process complexity and the production cost are favorably reduced; (2) the ZnO nanowires are changed into planar distribution, so that the propagation path of signals is shortened, and the sensitivity of device response is improved.
Drawings
Fig. 1 is a schematic diagram of a latticed Al-doped ZnO porous spiral nanowire gas sensor, wherein 11 is an ITO substrate, 12 is a latticed Al-doped ZnO porous spiral nanowire, and 13 is an electrode.
Detailed Description
For better explanation of the present invention, the following specific examples are further illustrated, but the present invention is not limited to the specific examples.
Example 1
Zn (NO) with the mass ratio of 1:0.5:0.013)2·4H2O、Zn(CH2COO)2·4H2O and Al (NO)3)3·6H2O, uniformly mixing, dissolving in deionized water, weighing a certain amount of polyvinylpyrrolidone (PVP (K40)) with the molecular weight of 2000, stirring for 30min at room temperature, and standing to obtain a spinning solution, wherein the concentration of PVP in the spinning solution is 40 wt%, and the concentration of inorganic salt is 10 wt%;
preparing a latticed spiral inorganic substance/PVP precursor fiber on ITO conductive glass by using electrostatic spinning, wherein a grid is square and the side length is 1000 nm;
transferring the precursor fiber to a box-type resistance furnace, then heating to 600 ℃ at the heating rate of 1 ℃/min, and calcining for 8 hours to obtain the latticed ZnO spiral porous hollow nanowire;
and coating an Au conducting electrode on the periphery of the latticed ZnO spiral porous hollow nanowire, and leading out a conducting wire to obtain the gas sensor.
The structure of the resulting gas sensor is shown in FIG. 1.
Example 2
Zn (NO) with the mass ratio of 1:1:0.0153)2·4H2O、Zn(CH2COO)2·4H2O and Al (NO)3)3·6H2O, uniformly mixing, dissolving in deionized water, weighing a certain amount of polyvinylpyrrolidone (PVP (K40)) with the molecular weight of 30000, stirring at room temperature for 60min, and standing to obtain a spinning solution, wherein the concentration of PVP in the spinning solution is 45 wt%, and the concentration of inorganic salt is 10 wt%;
preparing a latticed spiral inorganic substance/PVP precursor fiber on ITO conductive glass by using electrostatic spinning, wherein a grid is square and the side length is 1000 nm;
transferring the precursor fiber to a box-type resistance furnace, then heating to 600 ℃ at the heating rate of 1 ℃/min, and calcining for 8 hours to obtain the latticed ZnO spiral porous hollow nanowire;
and coating an Au conducting electrode on the periphery of the latticed ZnO spiral porous hollow nanowire, and leading out a conducting wire to obtain the gas sensor.
Example 3
Zn (NO) with the mass ratio of 1:2:0.023)2·4H2O、Zn(CH2COO)2·4H2O and Al (NO)3)3·6H2O, uniformly mixing, dissolving in deionized water, weighing a certain amount of polyvinylpyrrolidone (PVP (K40)) with the molecular weight of 50000, stirring for 90min at room temperature, and standing to obtain a spinning solution, wherein the concentration of PVP in the spinning solution is 50 wt%, and the concentration of inorganic salt is 10 wt%;
preparing a latticed spiral inorganic substance/PVP precursor fiber on ITO conductive glass by using electrostatic spinning, wherein a grid is square and the side length is 1000 nm;
transferring the precursor fiber to a box-type resistance furnace, then heating to 600 ℃ at the heating rate of 1 ℃/min, and calcining for 8 hours to obtain the latticed ZnO spiral porous hollow nanowire;
and coating an Au conducting electrode on the periphery of the latticed ZnO spiral porous hollow nanowire, and leading out a conducting wire to obtain the gas sensor.
Example 4
Zn (NO) with the mass ratio of 1:2.5:0.033)2·4H2O、Zn(CH2COO)2·4H2O and Al (NO)3)3·6H2O, uniformly mixing, dissolving in deionized water, weighing a certain amount of polyvinylpyrrolidone (PVP (K40)) with the molecular weight of 30000, stirring at room temperature for 60min, and standing to obtain a spinning solution, wherein the concentration of PVP in the spinning solution is 45 wt%, and the concentration of inorganic salt is 10 wt%;
preparing a latticed spiral inorganic substance/PVP precursor fiber on ITO conductive glass by using electrostatic spinning, wherein a grid is square and the side length is 1000 nm;
transferring the precursor fiber to a box-type resistance furnace, then heating to 750 ℃ at a heating rate of 3 ℃/min, and calcining for 12 hours to obtain the latticed ZnO spiral porous hollow nanowire;
and coating an Au conducting electrode on the periphery of the latticed ZnO spiral porous hollow nanowire, and leading out a conducting wire to obtain the gas sensor.
Example 5
Zn (NO) with the mass ratio of 1:3:0.053)2·4H2O、Zn(CH2COO)2·4H2O and Al (NO)3)3·6H2O, uniformly mixing, dissolving in deionized water, weighing a certain amount of polyvinylpyrrolidone (PVP (K40)) with the molecular weight of 3, stirring at room temperature for 60min, and standing to obtain a spinning solution, wherein the concentration of PVP in the spinning solution is 45 wt%, and the concentration of inorganic salt is 10 wt%;
preparing a latticed spiral inorganic substance/PVP precursor fiber on ITO conductive glass by using electrostatic spinning, wherein a grid is square and the side length is 1000 nm;
transferring the precursor fiber to a box-type resistance furnace, then heating to 900 ℃ at the heating rate of 5 ℃/min, and calcining for 16 hours to obtain the latticed ZnO spiral porous hollow nanowire;
and coating an Au conducting electrode on the periphery of the latticed ZnO spiral porous hollow nanowire, and leading out a conducting wire to obtain the gas sensor.