CN108828263A - A kind of fibre optical sensor measuring micro-fluidic speed and direction based on TFBG - Google Patents
A kind of fibre optical sensor measuring micro-fluidic speed and direction based on TFBG Download PDFInfo
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- CN108828263A CN108828263A CN201810876718.5A CN201810876718A CN108828263A CN 108828263 A CN108828263 A CN 108828263A CN 201810876718 A CN201810876718 A CN 201810876718A CN 108828263 A CN108828263 A CN 108828263A
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- 239000000835 fiber Substances 0.000 title claims abstract description 46
- 230000003287 optical effect Effects 0.000 title claims abstract description 17
- 239000007788 liquid Substances 0.000 claims abstract description 96
- 238000003860 storage Methods 0.000 claims abstract description 32
- 239000012530 fluid Substances 0.000 claims abstract description 31
- 239000013307 optical fiber Substances 0.000 claims abstract description 29
- 238000001228 spectrum Methods 0.000 claims abstract description 28
- 230000005540 biological transmission Effects 0.000 claims abstract description 13
- 230000010287 polarization Effects 0.000 claims abstract description 13
- 238000000034 method Methods 0.000 claims description 7
- 238000000985 reflectance spectrum Methods 0.000 claims description 7
- 238000005253 cladding Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 3
- 238000007747 plating Methods 0.000 claims description 3
- 239000010931 gold Substances 0.000 description 17
- 230000035945 sensitivity Effects 0.000 description 5
- 238000000605 extraction Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010422 painting Methods 0.000 description 2
- 230000002572 peristaltic effect Effects 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011953 bioanalysis Methods 0.000 description 1
- 229960000074 biopharmaceutical Drugs 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005388 cross polarization Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009509 drug development Methods 0.000 description 1
- 238000000684 flow cytometry Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000002032 lab-on-a-chip Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000005477 standard model Effects 0.000 description 1
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- MEYZYGMYMLNUHJ-UHFFFAOYSA-N tunicamycin Natural products CC(C)CCCCCCCCCC=CC(=O)NC1C(O)C(O)C(CC(O)C2OC(C(O)C2O)N3C=CC(=O)NC3=O)OC1OC4OC(CO)C(O)C(O)C4NC(=O)C MEYZYGMYMLNUHJ-UHFFFAOYSA-N 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/26—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring the direct influence of the streaming fluid on the properties of a detecting optical wave
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P13/00—Indicating or recording presence, absence, or direction, of movement
- G01P13/02—Indicating direction only, e.g. by weather vane
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Abstract
The invention discloses a kind of fibre optical sensors that micro-fluidic speed and direction are measured based on TFBG, by light source, Polarization Controller, transmission fiber, optical fiber circulator, light power meter, nm Au, TFBG, sensor, chirped fiber grating, the first fluid passage mouth, second liquid passway, third fluid passage mouth, microfluidic channel, micro-fluidic chip, conduit, the first liquid storage tank, miniflow pump, the second liquid storage tank, spectrometer composition.Light source launches the light that wavelength is 1500nm ~ 1580nm, by the left end of transmission fiber to sensor, TFBG and chirped fiber grating are carved in sensor, and it is fixed on the centre of microfluidic channel, calibrate miniflow pump, flow through liquid from microfluidic channel, TFBG is coated with the part of nm Au and is not coated with the part of nm Au in a liquid, the wave length shift of different situations occurs for the transmitted spectrum detected in spectrometer, and microfluid speed and direction change are characterized using the variation in spectrometer transmitted spectrum.
Description
Technical field
The invention belongs to technical field of optical fiber sensing, and in particular to a kind of to measure micro-fluidic speed and direction based on TFBG
Fibre optical sensor.
Background technique
In recent years, microfluidic control technology is always in fast development, and in chemical synthesis, drug development, bioanalysis and
Optical technology application etc. is widely used.In the application of these lab-on-a-chips, the flow of liquid plays important
Effect, the flow velocity of liquid dominates the cell adherence of bio-pharmaceutical and monoclonal antibody generates, liquid in flow focusing generator
The size and formation speed and flow cytometry of drop and the speed and efficiency of sorting.
Based on TFBG, the i.e. fibre optical sensor of slant Bragg fiber grating, features simple structure, with other measurement method phases
Than, such as microelectromechanical systems（MEMS）, cost is relatively low, and manufacture craft is relatively easy, and sensitivity is higher, to temperature
It is small to spend cross sensitivity degree, real-time and long-range measurement may be implemented.
Applications of surface plasmon resonance, i.e. SPR technique, are widely used in photoelectric sense technology, constructional device letter
Single, sensitivity is higher, and is not easily susceptible to the interference of the extraneous factors such as environment, therefore, it is lesser faint to be suitable for fluid flow
Under the conditions of speed and orientation measurement.
Summary of the invention
In view of the deficiencies of the prior art, the purpose of the present invention is to provide one kind measures micro-fluidic speed and side based on TFBG
To optical fiber sensor device, the variation of liquid flowing changes transmitted spectrum signal strength, and the structural sensitivity is high, convenient for real
It is existing.
The invention is realized by the following technical scheme：A kind of Fibre Optical Sensor measuring micro-fluidic speed and direction based on TFBG
Device device, by light source（1）, Polarization Controller（2）, transmission fiber（3）, optical fiber circulator（4）, light power meter（5）, nanogold painting
Layer（6）, TFBG（7）, sensor（8）, chirped fiber grating（9）, the first fluid passage mouth（10）, second liquid passway
（11）, third fluid passage mouth（12）, microfluidic channel（13）, micro-fluidic chip（14）, conduit（15）, the first liquid storage tank
（16）, miniflow pump（17）, the second liquid storage tank（18）, spectrometer（19）Composition, it is characterised in that：Light source（1）And Polarization Controller
（2）It is connected with each other, then passes through transmission fiber（3）It is connected to optical fiber circulator（4）Left end, optical fiber circulator（4）Lower end
With light power meter（5）It is connected, optical fiber circulator（4）Right end and sensor（8）Left end be connected, sensor（8）Right end pass through
Transmission fiber（3）With spectrometer（19）It is connected, by sensor（8）Along micro-fluidic chip（14）On microfluidic channel（13）
Direction and it is fixed on microfluidic channel（13）Centre, microfluidic channel（13）Include the first fluid passage mouth（10）, second
Fluid passage mouth（11）, third fluid passage mouth（12）Three fluid passage entrances, conduit（15）It is fixed on microfluidic channel
（13）The two of them of upper liquid feeder connection, left end are connected to the first liquid storage tank（16）, right end is connected to the second liquid storage tank
（18）, the first liquid storage tank（16）With the second liquid storage tank（18）Pass through conduit（15）It is connected respectively to miniflow pump（17）Left and right two
End.
The sensor（8）It is to be made of a single mode optical fiber, the TFBG that inclination angle is 8 ° is carved in fibre core（7）With
Chirped fiber grating（9）, surface is coated with the nm Au of half（6）, thickness range 5-500nm, single mode optical fiber
Model Corning SMF-28, operation wavelength are 1500nm ~ 1580nm.
The Polarization Controller（2）By a polarizing film, a half-wave plate and a quarter-wave plate composition.It is described
Spectrometer（19）The model Agilent, 86142B of use.
The miniflow pump（17）Using the peristaltic pump of model BT600M/2*YZ1515X, positive and negative rotation is reversible, can be with
Realize that the microfluidic flow of both direction, rotary speed working range are 0.1 ~ 600rpm.
The micro-fluidic chip（14）Microfluidic channel above（13）With scale, it can directly read liquid and flow through
Length scale.
The working principle of the invention is：Light source（1）Launch the light beam that wavelength is 1500nm ~ 1580nm, is controlled by polarization
Device processed（2）Adjusted polarization state, compensation is by along leading to sensor（8）Optical path fibre-optical bending and distortion caused by polarize shape
Any variation of state, then using transmission fiber（3）It is connected to optical fiber circulator（4）Left end, optical fiber circulator（4）Under
End and light power meter（5）It is connected, optical fiber circulator（4）Right end and sensor（8）Left end be connected, sensor（8）In be carved with
TFBG（7）And chirped fiber grating（9）, so that incident light is excited to claddingmode.In order to measure speed and the direction of microfluid,
Sensor（8）Surface is coated with the nm Au of half（6）, by sensor（8）Along micro-fluidic chip（14）On it is micro-
Fluid channel（13）Direction and it is fixed on microfluidic channel（13）Centre, microfluidic channel（13）Include the first fluid passage
Mouthful（10）, second liquid passway（11）, third fluid passage mouth（12）Three fluid passage entrances, conduit（15）It is fixed on micro-
Fluid channel（13）The two of them of upper liquid feeder connection, left end are connected to the first liquid storage tank（16）, right end is connected to second
Liquid storage tank（18）, the first liquid storage tank（16）With the second liquid storage tank（18）Pass through conduit（15）It is connected respectively to miniflow pump（17）A left side
Right both ends.Pass through calibration miniflow pump（17）, first by liquid from the first liquid storage tank（16）Middle extraction, from microfluidic channel（13）'s
Right side third fluid passage mouth（12）It flows into, by being coated with half nm Au（6）Sensor（8）It is logical from liquid afterwards
Road junction（10）Then miniflow pump is converted in outflow（17）Direction, by liquid from the second liquid storage tank（18）Extraction, flows the other way around
Cross microfluidic channel（13）.Due to sensor（8）After the nm Au on surface immerses in liquid, claddingmode effective refractive index hair
Changing, the disturbance quantity of covering membrane resonance and the sensor being surrounded by liquid（8）Length it is directly related.In four kinds of extreme cases
Under, i.e. sensor（8）Completely in air, completely in a liquid, it is coated with nm Au（6）Part and be not coated with nanometer
Gold plating（4）Part in a liquid, spectrometer（8）In the transmitted spectrum that detects the wave length shifts of different situations occurs, obtain
The transmitted spectrum different to four kinds.Pass through chirped fiber grating（9）Cladding mode resonance region can be chosen, different sensors will be avoided
It crosstalk between signal and is demodulated by the power level of reflectance spectrum, and passes through light power meter（5）Characterize certain wave
Long reflectance spectrum variation；TFBG is flowed through in liquid（7）When, pass through spectrometer（19）The transmitted spectrum in air completely of middle detection
On the basis of, speed and the direction of microfluid are judged by the drift value and drift bearing of wavelength, by selecting spectrometer appropriate
（19）Scan frequency can be observed within a scan period along sensor（8）The whole process of mobile liquid obtains micro-
The flow velocity of flowing liquid and flow direction.Therefore, it can use spectrometer（19）Variation in transmitted spectrum is characterized along sensing
Device（8）The movement of liquid.By selecting spectrometer appropriate（19）Scan frequency, can be observed within a scan period along
Sensor（8）The whole process of mobile liquid.
The beneficial effects of the invention are as follows：Using common standard model Corning SMF-28, the single mode of TFBG is carved in fibre core
Optical fiber, while surface is coated with the nm Au of half, eliminates the interference effect of the extraneous factors such as temperature, simplification finishes
Structure has saved cost, is suitable for real-time and telemeasurement, and is lost in transmission smaller；TFBG is as sensing element, structure
Simply, range of dynamic measurement is wide, is a kind of with the high micro- flow sensor of mechanical stability fiber liquid；For different liquid
Body can be obtained by time spectrum comb by selecting the sampled point of scan frequency and spectrometer appropriate and flow through entire TFBG liquid
The flow velocity of body and direction；Cladding mode resonance region can be chosen by chirped fiber grating, will be avoided between different sensors signal
Crosstalk and demodulated by the power level of reflectance spectrum, and specific specific wavelength reflected light is characterized by light power meter
Spectrum variation.Therefore, the advantages that present invention has structure simple, and loss is small, high sensitivity is the speed and the survey in direction of microfluid
Amount provides a kind of realistic plan.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of fiber optic sensor system that micro-fluidic speed and direction are measured based on TFBG.
Fig. 2 is a kind of fibre optical sensor optical fiber grating structure that micro-fluidic speed and direction are measured based on TFBG.
Fig. 3 is a kind of fibre optical sensor that micro-fluidic speed and direction are measured based on TFBG：Curve 1 represents TFBG and exists completely
Transmitted spectrum in air, curve 2 represent the transmitted spectrum of TFBG completely in a liquid, and curve 3 and curve 4 are respectively represented and be coated with
The part of nm Au and it is not coated with the transmitted spectrum of the part of nm Au in a liquid.
Fig. 4 is the light that a kind of fibre optical sensor liquid for measuring micro-fluidic speed and direction based on TFBG flows through part TFBG
Spectrum variation, figure a indicate that liquid flows to the curve of spectrum to no coating from gold-plated end, and it is gold-plated that figure b indicates that liquid is flowed to from no coating
The curve of spectrum held.
Specific embodiment
Present invention is further described in detail with specific embodiment with reference to the accompanying drawing.
Referring to attached drawing 1 and attached drawing 2, a kind of fibre optical sensor measuring micro-fluidic speed and direction based on TFBG, feature
It is：, by light source（1）, Polarization Controller（2）, transmission fiber（3）, optical fiber circulator（4）, light power meter（5）, nanogold painting
Layer（6）, TFBG（7）, sensor（8）, chirped fiber grating（9）, the first fluid passage mouth（10）, second liquid passway
（11）, third fluid passage mouth（12）, microfluidic channel（13）, micro-fluidic chip（14）, conduit（15）, the first liquid storage tank
（16）, miniflow pump（17）, the second liquid storage tank（18）, spectrometer（19）Composition, it is characterised in that：Light source（1）And Polarization Controller
（2）It is connected with each other, then passes through transmission fiber（3）It is connected to optical fiber circulator（4）Left end, optical fiber circulator（4）Lower end
With light power meter（5）It is connected, optical fiber circulator（4）Right end and sensor（8）Left end be connected, sensor（8）Right end pass through
Transmission fiber（3）With spectrometer（19）It is connected, by sensor（8）Along micro-fluidic chip（14）On microfluidic channel（13）
Direction and it is fixed on microfluidic channel（13）Centre, microfluidic channel（13）Include the first fluid passage mouth（10）, second
Fluid passage mouth（11）, third fluid passage mouth（12）Three fluid passage entrances, conduit（15）It is fixed on microfluidic channel
（13）The two of them of upper liquid feeder connection, left end are connected to the first liquid storage tank（16）, right end is connected to the second liquid storage tank
（18）, the first liquid storage tank（16）With the second liquid storage tank（18）Pass through conduit（15）It is connected respectively to miniflow pump（17）Left and right two
End.The sensor（8）It is to be made of a single mode optical fiber, the TFBG that inclination angle is 8 ° is carved in fibre core（7）And chirp
Fiber grating（9）, surface is coated with the nm Au of half（6）, thickness range 5-500nm, the model of single mode optical fiber
For Corning SMF-28, operation wavelength is 1500nm ~ 1580nm.The Polarization Controller（2）By a polarizing film, a half-wave
Piece and a quarter-wave plate composition.The spectrometer（8）The model Agilent, 86142B of use.The miniflow
Pump（11）Using the peristaltic pump of model BT600M/2*YZ1515X, positive and negative rotation is reversible, and the miniflow of both direction may be implemented
Body flowing, rotary speed working range are 0.1 ~ 600rpm.The micro-fluidic chip（14）Microfluidic channel above（13）It has
Scale can directly read the length scale that liquid flows through.
Light source in the present invention（1）Launch the light beam that wavelength is 1500nm ~ 1580nm, by Polarization Controller（2）Adjustment
Cross polarization state, compensation is by along leading to sensor（8）Optical path fibre-optical bending and distort caused by polarization state any change
Change, then using transmission fiber（3）It is connected to optical fiber circulator（4）Left end, optical fiber circulator（4）Lower end and optical power
Meter（5）It is connected, optical fiber circulator（4）Right end and sensor（8）Left end be connected, sensor（8）In be carved with TFBG（7）And chirp
Fiber grating（9）, so that incident light is excited to claddingmode.In order to measure speed and the direction of microfluid, sensor（8）Surface
It is coated with the nm Au of half（6）, by sensor（8）Along micro-fluidic chip（14）On microfluidic channel（13）Side
To and be fixed on microfluidic channel（13）Centre, microfluidic channel（13）Include the first fluid passage mouth（10）, the second liquid
Body passway（11）, third fluid passage mouth（12）Three fluid passage entrances, conduit（15）It is fixed on microfluidic channel（13）
The two of them of upper liquid feeder connection, left end are connected to the first liquid storage tank（16）, right end is connected to the second liquid storage tank（18）, the
One liquid storage tank（16）With the second liquid storage tank（18）Pass through conduit（15）It is connected respectively to miniflow pump（17）Left and right ends.Pass through school
Quasi- miniflow pump（17）, first by liquid from the first liquid storage tank（16）Middle extraction, from microfluidic channel（13）Right side third liquid
Passway（12）It flows into, by being coated with half nm Au（6）Sensor（8）Afterwards from fluid passage mouth（10）Stream
Out, then conversion miniflow pumps（17）Direction, by liquid from the second liquid storage tank（18）It is logical to flow through microfluid the other way around for extraction
Road（13）.Due to sensor（8）After the nm Au on surface immerses in liquid, claddingmode effective refractive index changes, packet
The disturbance quantity of tunic resonance and the sensor being surrounded by liquid（8）Length it is directly related.Under four kinds of extreme cases, that is, sense
Device（8）Completely in air, completely in a liquid, it is coated with nm Au（6）Part and be not coated with nm Au（4）
Part in a liquid, spectrometer（8）In the transmitted spectrum that detects the wave length shifts of different situations occurs, obtain four kinds of differences
Transmitted spectrum.Pass through chirped fiber grating（9）Cladding mode resonance region can be chosen, will be avoided between different sensors signal
It crosstalk and is demodulated by the power level of reflectance spectrum, and passes through light power meter（5）Characterize specific wavelength reflectance spectrum
Variation；TFBG is flowed through in liquid（7）When, pass through spectrometer（19）Completely in air on the basis of transmitted spectrum of middle detection, by
The drift value and drift bearing of wavelength judge speed and the direction of microfluid, by selecting spectrometer appropriate（19）Scanning frequency
Rate can be observed within a scan period along sensor（8）The whole process of mobile liquid obtains the stream of microfluidic liquid
Speed and flow direction.Therefore, it can use spectrometer（19）Variation in transmitted spectrum is characterized along sensor（8）Liquid
Movement.By selecting spectrometer appropriate（19）Scan frequency can be observed within a scan period along sensor（8）It moves
The whole process of dynamic liquid.
Fig. 3 is a kind of fibre optical sensor that micro-fluidic speed and direction are measured based on TFBG of the present invention：Curve 1 represents TFBG
Complete aerial transmitted spectrum, curve 2 represent the transmitted spectrum of TFBG completely in a liquid, curve 3 and curve 4 generation respectively
Table is coated with the part of nm Au and is not coated with the transmitted spectrum of the part of nm Au in a liquid.
Fig. 4 is that a kind of fibre optical sensor liquid for measuring micro-fluidic speed and direction based on TFBG of the present invention flows through part
The spectrum change of TFBG, figure a indicate that liquid flows to the curve of spectrum of no coating from gold-plated end, and figure b indicates liquid from without plating laminar flow
The curve of spectrum arrived to gold-plated end.
Claims (1)
1. a kind of fibre optical sensor for measuring micro-fluidic speed and direction based on TFBG, by light source（1）, Polarization Controller（2）, pass
Lose fibre（3）, optical fiber circulator（4）, light power meter（5）, nm Au（6）, TFBG（7）, sensor（8）, chirped fiber
Grating（9）, the first fluid passage mouth（10）, second liquid passway（11）, third fluid passage mouth（12）, microfluidic channel
（13）, micro-fluidic chip（14）, conduit（15）, the first liquid storage tank（16）, miniflow pump（17）, the second liquid storage tank（18）, spectrometer
（19）Composition, it is characterised in that：Light source（1）And Polarization Controller（2）It is connected with each other, then passes through transmission fiber（3）It is connected to
Optical fiber circulator（4）Left end, optical fiber circulator（4）Lower end and light power meter（5）It is connected, optical fiber circulator（4）Right end with
Sensor（8）Left end be connected, sensor（8）Right end pass through transmission fiber（3）With spectrometer（19）It is connected, by sensor
（8）Along micro-fluidic chip（14）On microfluidic channel（13）Direction and it is fixed on microfluidic channel（13）Centre, it is micro-
Fluid channel（13）Include the first fluid passage mouth（10）, second liquid passway（11）, third fluid passage mouth（12）Three
Fluid passage entrance, conduit（15）It is fixed on microfluidic channel（13）The two of them of upper liquid feeder connection, left end is connected to
First liquid storage tank（16）, right end is connected to the second liquid storage tank（18）, the first liquid storage tank（16）With the second liquid storage tank（18）By leading
Pipe（15）It is connected respectively to miniflow pump（17）Left and right ends, sensor（8）It is to be made of a single mode optical fiber, is carved in fibre core
Having inclination angle is 8 ° of TFBG（7）And chirped fiber grating（9）, sensor（8）Surface half be coated with nm Au
（6）, thickness range 5-500nm, the model Corning SMF-28 of single mode optical fiber, operation wavelength is 1500nm ~ 1580nm；Sensing
Device（8）After the nm Au on surface immerses in liquid, covering Effective index changes, the disturbance quantity of cladding mode resonance
With the sensor being surrounded by liquid（8）Length it is directly related, work as sensor（8）Completely in air, completely in a liquid, plating
There is nm Au（6）Part and be not coated with nm Au（6）Part in a liquid when, spectrometer in the case of four kinds
（8）In the transmitted spectrum that detects the wave length shifts of different situations occurs, obtain four kinds of different transmitted spectrums, pass through chirped light
Fine grating（9）Cladding mode resonance region can be chosen, the crosstalk between different sensors signal will be avoided and by reflectance spectrum
Power level is demodulated, and passes through light power meter（5）Characterize the variation of specific wavelength reflectance spectrum；TFBG is flowed through in liquid
（7）When, pass through spectrometer（19）The drift value and drift side on the basis of transmitted spectrum, by wavelength in air completely of middle detection
To the speed and direction for judging microfluid, by selecting spectrometer appropriate（19）Scan frequency, can be in a scan period
Interior observation is along sensor（8）The whole process of mobile liquid obtains flow velocity and the flow direction of microfluidic liquid.
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Cited By (3)
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| CN110133320A (en) * | 2019-05-23 | 2019-08-16 | 暨南大学 | Plasma resonance optical fiber hot wire anemometer, detection system and method |
| CN111239888A (en) * | 2020-03-05 | 2020-06-05 | 河南渡盈光电科技有限公司 | Micro-nano optical fiber with fiber grating resonant cavity and micro-nano optical fiber microfluidic device |
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