CN108775977A - Capacitance pressure transducer, based on force balance principle - Google Patents
Capacitance pressure transducer, based on force balance principle Download PDFInfo
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- CN108775977A CN108775977A CN201810641573.0A CN201810641573A CN108775977A CN 108775977 A CN108775977 A CN 108775977A CN 201810641573 A CN201810641573 A CN 201810641573A CN 108775977 A CN108775977 A CN 108775977A
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- pressure
- silicon chip
- electrode silicon
- force balance
- hole
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
- G01L1/148—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors using semiconductive material, e.g. silicon
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention discloses a kind of capacitance pressure transducer, based on force balance principle, pressure sensitive cells include top electrode silicon chip, central electrode silicon chip, lower electrode silicon chip, silicon dioxide insulating layer, moveable mass block, first pressure through-hole, second pressure through-hole；Central electrode silicon chip is located between top electrodes silicon chip and lower electrode silicon chip, it is designed with silicon dioxide insulating layer between top electrode silicon chip and central electrode silicon chip, between central electrode silicon chip and lower electrode silicon chip, moveable mass block is located on central electrode silicon chip, first pressure through-hole and second pressure through-hole are located at the intermediate both sides of central electrode silicon chip, form two two differential capacitors changed simultaneously under the effect of the pressure；It is the matched control interface unit of its pressure sensitive cells by C2V (capacitance is converted to voltage), P-I- (D) (proportional, integral (- differential, it is optional)), FB (feedback), the units composition such as carrier wave, work loop is constituted with sensing unit, realizes the working method of the force balance principle control of pressure sensor.The present invention improves precision, the linearity, enhances anti-interference ability, enhances overvoltage protection ability, improves stability and reliability.
Description
Technical field
The present invention relates to a kind of pressure sensors, are passed more particularly to a kind of silicon capacitance pressure based on force balance principle
Sensor.
Background technology
Pressure sensor (Pressure Transducer) is to experience pressure signal, and can be incited somebody to action according to certain rule
Pressure signal is converted into the device or device of the electric signal of available output.Pressure sensor is usually by pressure-sensing device and letter
Number processing unit composition.Silicon pressure sensing unit uses pressure resistance type and capacity-type sensing element.By different test pressure types,
Pressure sensor can be divided into gauge pressure transducer, differential pressure pick-up and absolute pressure sensor.
Invention content
Technical problem to be solved by the invention is to provide a kind of capacitance pressure transducer, based on force balance principle,
It is characterized in that comprising top electrode silicon chip, central electrode silicon chip, lower electrode silicon chip, silicon dioxide insulating layer, moveable quality
Block, first pressure through-hole, second pressure through-hole form two two differential capacitors changed simultaneously under the effect of the pressure；Separately
One is characterized in that, working method uses force balance principle working method.The work system structure is mainly by pressure sensor core
The units groups such as body, C2V (capacitance is converted to voltage), P-I- (D) (proportional, integral (- differential, optional)), FB (feedback), carrier wave
At.System block diagram is as shown in Figure 2.Its operation principle：Under the action of ambient pressure, pressure sensor core will be transmitted to movably
Pressure conversion on electrode is capacitance (differential capacitance variation), converts capacitance to by C2V converting units and is pressed with the external world
The voltage of power size variation, is then adjusted control by PID control cell voltage amount, and PID unit output is divided into two
Direction：First, externally exporting；Second is that into FB units, after overvoltage adjusts, feed back on the work pole plate of pressure sensor,
The different voltage difference in two capacitance both ends generates intermediate movable polar plate different electrostatic force, which can offset or balance
Effect of the ambient pressure to intermediate movable polar plate, is reduced or eliminated the displacement variable of intermediate active pole plate, makes pressure sensor
Movable plate be in equilbrium position.Referred to as force balance principle.
The positive effect of the present invention is that：The present invention improves precision, the linearity, enhances anti-interference ability, increases
Strong overvoltage protection ability, improves stability and reliability.
Description of the drawings
Fig. 1 is that the present invention is based on the structural schematic diagrams of the capacitance pressure transducer, of force balance principle.
Fig. 2 is that the present invention is based on the schematic diagrams of the capacitance pressure transducer, of force balance principle.
Fig. 3 is that the present invention is based on 1 schematic diagrames of capacitance pressure transducer, structure application case of force balance principle.
Fig. 4 is that the present invention is based on 2 schematic diagrames of capacitance pressure transducer, structure application case of force balance principle.
Fig. 5 is that the present invention is based on 3 schematic diagrames of capacitance pressure transducer, structure application case of force balance principle.
Specific implementation mode
Present pre-ferred embodiments are provided below in conjunction with the accompanying drawings, with the technical solution that the present invention will be described in detail.
As shown in Figure 1, the present invention includes that top electrode silicon chip 1, central electrode silicon chip 2, lower electrode silicon chip 3, silica are exhausted
Edge layer 4, moveable mass block 5, first pressure through-hole 6, second pressure through-hole 7；Central electrode silicon chip 2 is located at top electrode silicon chip
Between 1 and lower electrode silicon chip 3, between top electrodes silicon chip 1 and central electrode silicon chip 2, central electrode silicon chip 2 and lower electrode silicon chip
Silicon dioxide insulating layer 4 is designed between 3, moveable mass block 5 is located on central electrode silicon chip 2,6 He of first pressure through-hole
Second pressure through-hole 7 is located at the intermediate both sides of the mass block 5 of central electrode silicon chip 2.Preferably, the first pressure through-hole,
Two pressure through-holes are all taper pressure guide holes.
Sensor core is made of two concatenated capacitances, and based single crystal silicon materials are a kind of semi-conducting materials, tool
Conductive, the electrode of capacitance is bonded by three silicon chip superpositions, referred to as silicon-silicon-silicon (sandwich) structure.Center pole plate
Making is the movable electrode formed by anisotropic etching in silicon chip, is formed with full symmetric in center pole plate both sides
Island structure, the thickness and width on island are determined by the pressure range ability according to sensor.Top pole plate and bottom end pole plate
On be formed by etching a pressure guide hole for penetrating silicon chip, the two Kong San wafer bondings together when by centring island
Center；Forming one between the silicon pole plate of calmodulin binding domain CaM between silicon electrode has certain thickness silicon dioxide layer so that electrode
Insulation, and top pole plate and bottom end pole plate are bonded in from both sides on the pole plate of center, form two concatenated capacitors up and down.When
When pressure at both sides difference changes, center pole plate generates displacement, and then changes the capacitance size of center pole plate both sides, therefore two
The capacitive differential of a capacitor changes with the variation of both sides different pressures difference.When pressure difference is 0, two capacitances are equal.Institute
State first pressure through-hole, second pressure through-hole is all taper pressure guide hole, taper pressure guide hole can be played in pressure jump and be liquidated
Hit the protective effect of pressure.
The pressure sensor working method uses force balance principle working method, dynamic balance work system structure master
It is (anti-by pressure sensor core, C2V (capacitance is converted to voltage), P-I- (D) (proportional, integral (- differential, optional)), FB
Feedback), the units composition such as carrier wave.System block diagram is as shown in Figure 2.Its operation principle：Under the action of ambient pressure, pressure sensor
The pressure conversion being transmitted on movable electrode is capacitance (differential capacitance variation) by core, by C2V converting units by capacitance
Amount is converted into the voltage with ambient pressure size variation, and control, PID then is adjusted by PID control cell voltage amount
Unit output is divided into both direction：First, externally exporting；Second is that into FB units, after overvoltage adjusts, pressure biography is fed back to
On the work pole plate of sensor, the different voltage difference in two capacitance both ends generates intermediate movable polar plate different electrostatic force, this is quiet
Effect of the ambient pressure to intermediate movable polar plate can be offset or be balanced to electric power, and the displacement that intermediate active pole plate is reduced or eliminated becomes
Change amount makes the movable plate of pressure sensor be in equilbrium position.This operation principle is suitable for the pressure of other structures type
Sensor core is also applied for the capacitance pressure transducer, ceramics processed with other materials as shown in figure three, figure four and figure five
Capacitance and metal capacitance pressure sensor.The features of the present invention substantially increases precision, the linearity, enhances anti-interference energy
Power enhances overvoltage protection ability, improves stability and reliability.
Pressure sensor core can be equivalent to two concatenated variation capacitances or single variation capacitance, for sensitive outer
The pressure change on boundary, including differential pressure, gauge pressure and absolute pressure；When ambient pressure changes, sensor movable electrode is subjected to displacement,
Change the size of capacitance.C2V (capacitance conversion voltage) units are real by way of modulation /demodulation to the capacitance of sensor core
Existing capacitance is converted to voltage, and then extraneous pressure change is converted to readily discernible DC voltage；(proportional integration is micro- by PID
Point) unit carries out Signal Regulation to the voltage that C2V units export, such as processing is amplified in filtering, amplitude, realizes that voltage reaches output
Requirement and force balance principle control requirement.FB (feedback) units adjust amplification factor to PID unit output voltage, full
The requirement of sufficient force balance principle control, and the adjustment to range and sensitivity.It is otherwise isolated from the straight of output and sensor core
Connected, both to reduce noise crosstalk interference is connect, the resolution ratio of pressure sensor is improved.(waveform in Fig. 2, is replaced by just carrier wave
String wave) carrier signal is provided, it is used with C2V unit matchings.This kind of working method is suitable for the condenser type pressure of a variety of different structures
Force snesor structure, according to different sensitive structures, feedback system can be divided into three kinds of different feedback systems：One, differential feedback,
Feedback quantity acts on fixed polar plate, is primarily adapted for use in differential capacitance variation structure；Two, single-ended feedback, feedback quantity acts on quick
Feel on diaphragm/movable plate, is primarily adapted for use in differential capacitance variation structure；Three, single-ended feedback, feedback quantity acts on fixed polar plate
On, it is primarily adapted for use in single capacitance variations structure.
Particular embodiments described above, the technical issues of to the solution of the present invention, technical solution and advantageous effect carry out
It is further described, it should be understood that the above is only a specific embodiment of the present invention, is not limited to
The present invention, all within the spirits and principles of the present invention, any modification, equivalent substitution, improvement and etc. done should be included in this
Within the protection domain of invention.
Claims (6)
1. a kind of capacitance pressure transducer, based on force balance principle, which is characterized in that its pressure sensitive cells includes powering on
Pole silicon chip, central electrode silicon chip, lower electrode silicon chip, silicon dioxide insulating layer, moveable mass block, first pressure through-hole,
Two pressure through-holes；Central electrode silicon chip is located between top electrode silicon chip and lower electrode silicon chip, top electrode silicon chip and central electrode silicon
It is designed with silicon dioxide insulating layer between piece, between central electrode silicon chip and lower electrode silicon chip, during moveable mass block is located at
On heart electrode silicon chip, first pressure through-hole and second pressure through-hole are located at the centre of top electrode silicon chip and lower electrode silicon chip, and
First pressure through-hole and second pressure through-hole are located at the center both sides of the mass block of central electrode, form two effects in pressure
Two differential capacitors changed when similarly hereinafter；C2V (electricity is contained for the matched control interface unit of its pressure sensitive cells
Appearance is converted to voltage), P-I- (D) (proportional, integral (- differential, optional)), FB (feedback), the units such as carrier wave, the realization of C2V units
Convert the capacitance change of sensing unit to voltage variety, the amplitude that P-I- (D) realizes force balance principle control is abundant
The adjustment of degree/phase margin, makes it meet the requirement of force balance principle control, and FB realizes that the electrostatic force of sensing unit is arrived with sensitivity
Ambient pressure reach equilibrium state, carrier wave provides the carrier wave of whole system work.
2. a kind of capacitance pressure transducer, based on force balance principle as described in claim 1, which is characterized in that described
Working method is force balance principle working method.
3. force balance principle working method as claimed in claim 2, which is characterized in that contain C2V, P-I- (D), FB, load
The units such as wave or which part unit.
4. force balance principle working method as claimed in claim 2, which is characterized in that be not limited only to analog circuit realization side
Formula also includes digital circuit mode and software realization mode.
5. force balance principle working method as claimed in claim 2, which is characterized in that be not limited only to described in claim 1
Pressure sensitive cells, be equally applicable to the capacitance pressure transducer, structure of a variety of different structures, such as ceramic capacitor-type pressure
Sensor etc..
6. a kind of capacitance pressure transducer, based on force balance principle as described in claim 1, which is characterized in that described the
One pressure through-hole, second pressure through-hole are all taper pressure guide holes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810641573.0A CN108775977A (en) | 2018-06-21 | 2018-06-21 | Capacitance pressure transducer, based on force balance principle |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810641573.0A CN108775977A (en) | 2018-06-21 | 2018-06-21 | Capacitance pressure transducer, based on force balance principle |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111473724A (en) * | 2020-05-14 | 2020-07-31 | 宁波走运科技有限公司 | Capacitive flexible strain sensor and preparation method thereof |
| CN114199420A (en) * | 2021-12-10 | 2022-03-18 | 中国兵器工业集团第二一四研究所苏州研发中心 | LTCC-based high-temperature-resistant pressure sensor and manufacturing method thereof |
| CN114726363A (en) * | 2022-06-08 | 2022-07-08 | 成都凯天电子股份有限公司 | Self-adaptive closed-loop feedback control system and method for silicon resonant pressure sensor |
| CN115235655A (en) * | 2022-08-02 | 2022-10-25 | 北京智芯传感科技有限公司 | Differential capacitance pressure sensor |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111473724A (en) * | 2020-05-14 | 2020-07-31 | 宁波走运科技有限公司 | Capacitive flexible strain sensor and preparation method thereof |
| CN114199420A (en) * | 2021-12-10 | 2022-03-18 | 中国兵器工业集团第二一四研究所苏州研发中心 | LTCC-based high-temperature-resistant pressure sensor and manufacturing method thereof |
| CN114726363A (en) * | 2022-06-08 | 2022-07-08 | 成都凯天电子股份有限公司 | Self-adaptive closed-loop feedback control system and method for silicon resonant pressure sensor |
| CN115235655A (en) * | 2022-08-02 | 2022-10-25 | 北京智芯传感科技有限公司 | Differential capacitance pressure sensor |
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Application publication date: 20181109 |
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