CN108732224B - Preparation method of double-battery sheet type wide-area oxygen sensor - Google Patents
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Abstract
The invention discloses a novel double-cell type sheet type wide-area oxygen sensor, which is formed by laminating and sintering an oxygen pumping cell, a reference cell, a structural layer and a heating layer, wherein: the oxygen pumping battery comprises a first zirconium oxide casting substrate, an oxygen pumping outer electrode and an oxygen pumping inner electrode; the reference cell comprises a second zirconium dioxide casting substrate, a test electrode and a reference electrode; the diffusion cavity is positioned between the first zirconium oxide casting substrate and the second zirconium oxide casting substrate, and diffusion barriers are arranged on two sides of the diffusion cavity; the structural layer comprises a third zirconia cast substrate; the heating layer includes a fourth zirconia casting substrate, a third insulating layer, and a heater. The preparation method comprises the steps of preparing a zirconium oxide tape casting substrate by a tape casting method, preparing an oxygen pumping inner electrode, an oxygen pumping outer electrode, a diffusion barrier and a diffusion cavity by screen printing, and then sequentially laminating and sintering. The invention adopts pump current internal reference, avoids the oxygen concentration change of reference gas and improves the testing precision of the sensor.
Description
Technical Field
The invention relates to the technical field of oxygen sensors for automobiles, in particular to a double-battery sheet type wide-area oxygen sensor and a preparation method thereof.
Background
With the further improvement of environmental protection and oil saving requirements, the emission standard of automobile exhaust is more and more strict, and meanwhile, the engine technology is increasingly improved, so that the traditional concentration type sheet oxygen sensor cannot meet the requirements of an automobile engine test system in the aspects of measurement range and measurement precision. In this context, third generation wide area oxygen sensors have evolved. The double-battery type sheet-type wide-area oxygen sensor mainly comprises a pump oxygen battery and a reference battery, a cavity is arranged between the pump oxygen battery and the reference battery, and tail gas enters the cavity through diffusion. The reference cell is equivalent to a concentration type sheet oxygen sensor, the other side of the reference cell is in contact with air through an air cavity, and when tail gas enters the cavity, the reference cell can generate a voltage signal due to the oxygen concentration difference on the two sides. The ECU compares this voltage signal to a 450mV standard voltage to control the direction of pumping oxygen. The oxygen pumping battery is equivalent to a limiting current type sheet oxygen sensor, the main function is to pump oxygen, and the limiting current is formed by the combined action of the oxygen pumping battery and a diffusion barrier, the limiting current is linearly related to the lambda value of the air excess rate and corresponds to the lambda value one by one, so the ECU judges the real-time lambda value by collecting limiting current signals. In the prior art, in order to ensure the accuracy of reference gas, a large air cavity exists inside a traditional double-battery sheet type wide-area oxygen sensor, but the air concentration near tail gas can change, and meanwhile, if the sensor is not sealed well, the tail gas can pollute the air, and the measurement precision can be greatly influenced; the air cavity is easy to deform and collapse in the sintering process, so that the yield is influenced to a large extent; meanwhile, the existence of the air cavity inevitably increases the thickness of the chip, which is not beneficial to the miniaturization of the chip; the air cavity also generates heat diffusion, which affects the heating efficiency.
Disclosure of Invention
The invention aims to provide a double-battery sheet type wide-area oxygen sensor and a preparation method thereof, which are used for solving the problems that a large air cavity exists in the traditional double-battery sheet type wide-area oxygen sensor in the prior art, but the concentration of air near tail gas changes, even the tail gas pollutes air, and the measurement precision is influenced.
The invention solves the problems through the following technical scheme:
a double-battery sheet type wide-area oxygen sensor is formed by sintering a pump oxygen battery, a reference battery, a structural layer and a heating layer which are sequentially stacked from top to bottom, wherein:
pumping an oxygen battery: the device comprises a first zirconium oxide casting substrate, an oxygen pumping external electrode arranged on the upper surface of the first zirconium oxide casting substrate and an oxygen pumping internal electrode arranged on the lower surface of the first zirconium oxide casting substrate, wherein the oxygen pumping external electrode is covered with a porous protective layer;
reference cell: the test device comprises a second zirconium dioxide casting substrate, a reference electrode and a test electrode arranged on the upper surface of the second zirconium dioxide casting substrate, wherein a first insulating layer is arranged on the lower surface of the second zirconium dioxide casting substrate, and the reference electrode is arranged on the lower surface of the first insulating layer;
a diffusion barrier and a diffusion cavity are arranged between the oxygen pumping cell and the reference cell, the diffusion cavity is positioned between the first zirconium oxide casting substrate and the second zirconium oxide casting substrate, the diffusion barrier is arranged between the diffusion cavity and two sides of the first zirconium oxide casting substrate and the second zirconium oxide casting substrate and is used for forming a channel for tail gas diffusion and tail gas exchange, and the oxygen pumping inner electrode and the test electrode are positioned in the diffusion cavity;
a heating layer: the heater comprises a fourth zirconium oxide casting substrate, a fifth zirconium oxide casting substrate, a second insulating layer arranged on the lower surface of the fourth zirconium oxide casting substrate, a third insulating layer arranged on the upper surface of the fifth zirconium oxide casting substrate and a heater covered by the second insulating layer and the third insulating layer.
Preferably, the diffusion cavity is a cavity formed between the pump oxygen inner electrode and the test electrode, and the cavity is formed by preparing screen printing slurry from carbon powder, then screen printing the slurry on the pump oxygen inner electrode, and volatilizing the carbon after sintering.
Preferably, the structural layer consists of at least one layer of cast zirconia substrate.
Preferably, the first zirconia casting substrate and the second zirconia casting substrate are provided with electrode lead-out holes.
Preferably, the two-cell type sheet type wide-area oxygen sensor uses an internal reference as a reference atmosphere, and the pump current thereof is 7 muA-30 muA.
A preparation method of a double-battery sheet type wide-area oxygen sensor comprises the following steps:
step S1: preparing a zirconia casting substrate to obtain a first zirconia casting substrate, a second zirconia casting substrate, a third zirconia casting substrate and a fourth zirconia casting substrate;
punching a positioning hole, an electrode leading-out hole and a heater leading-out hole by adopting mechanical punching;
step S2: preparing pump oxygen electrode slurry, diffusion barrier slurry and porous protective layer slurry;
step S3: printing an oxygen pumping external electrode and a lead on the upper surface of the first zirconium oxide casting substrate, printing an oxygen pumping internal electrode and a lead on the lower surface of the first zirconium oxide casting substrate, and leading the oxygen pumping internal electrode out of the upper surface of the first zirconium oxide casting substrate through filling of the through hole; printing a porous protective layer on an oxygen pumping external electrode, printing screen printing slurry prepared by carbon powder with the same area on the oxygen pumping internal electrode to form a diffusion cavity, printing diffusion barrier slurry on two sides of the oxygen pumping internal electrode to form a diffusion barrier, wherein the thickness of the diffusion barrier is the same as that of the diffusion cavity;
step S4: printing a test electrode on the upper surface of the second zirconium dioxide casting substrate, printing a first insulating layer on the lower surface of the second zirconium dioxide casting substrate, then printing a reference electrode, and leading the test electrode and the reference electrode out of the upper surface of the first zirconium oxide casting substrate through hole filling;
step S5: printing a second insulating layer on the lower surface of the third zirconia casting substrate, printing a third insulating layer on the upper surface of the fourth zirconia casting substrate, and then printing a heater on the third insulating layer;
step S6: sequentially laminating the heating layer, the structural layer, the reference battery and the oxygen pumping battery from bottom to top, pressing the laminated layers into a whole by adopting isostatic pressing, and mechanically cutting the whole into a chip green body;
step S7: placing the chip green body into a burning board, placing the burning board into an air circulation furnace for slow glue discharging, wherein the highest glue discharging temperature is 600-800 ℃, and placing the chip green body after glue discharging into a sintering furnace for sintering and molding at 1350-1500 ℃.
Preferably, the step S3, the step S4 and the step S5 are all performed by screen printing.
Preferably, the preparing of the zirconia casting substrate in the step S1 specifically includes:
step S11: doping yttrium oxide with zirconium oxide and aluminum oxide according to the mass percentage (75-100): (0-25) preparing an inorganic component, wherein the content of yttrium oxide in the yttrium oxide doped zirconia is 3-8 mol%;
step S12: mixing an inorganic component, a dispersing agent, an organic solvent, a binder and a plasticizer according to the mass ratio of 100: (1-10): (40-80): (5-15): (5-15) carrying out ball milling to form zirconia ceramic slurry;
step S13: preparing a zirconia casting substrate by adopting a casting method to obtain a first zirconia casting substrate, a second zirconia casting substrate, a third zirconia casting substrate and a fourth zirconia casting substrate.
Preferably, the step S2 specifically includes: platinum powder and carbon are mixed according to the mass percentage: (80-95): (5-20), and adding an organic solvent to prepare pump electrode slurry; zirconium oxide and carbon are mixed according to the mass percentage: (50-90): (10-50), mixing, and adding an organic solvent to prepare diffusion barrier slurry; zirconium oxide and carbon are mixed according to the mass percentage: (50-90): (10-50), and adding an organic solvent to prepare the porous protective layer slurry.
Compared with the prior art, the invention has the following advantages and beneficial effects:
(1) according to the invention, air is used as reference in the traditional structure, and pump current internal reference is changed, so that the change of oxygen concentration of reference gas caused by air pollution or air cavity blockage is avoided, and the sensor testing precision is greatly improved; an air cavity preparation process is eliminated, and a sensor preparation process is simplified; the factors influencing the yield, such as layering, cracks, air cavity collapse and the like easily generated in the structure due to the existence of the air cavities in the processes of isostatic pressing, glue discharging and sintering are avoided; meanwhile, an air cavity is eliminated, so that thermal diffusion caused by the air cavity in the work process is eliminated, the reference battery and the oxygen pumping battery can quickly reach the working temperature and can be heated more uniformly, the thickness of the chip is reduced, and the volume is smaller.
(2) The invention adopts the bilateral diffusion barrier, ensures the full diffusion of the tail gas and eliminates the concentration difference caused by the diffusion barrier; the diffusion barrier is directly communicated with the diffusion cavity, tail gas concentration gradient cannot be generated due to the diffusion cavity, and the pump oxygen inner electrode and the testing electrode are located in the diffusion cavity, so that the testing precision is improved.
(3) The oxygen pumping battery and the reference battery are both provided with a layer of zirconia tape casting substrate, the structure is compact, in addition, the oxygen pumping battery is composed of a layer of zirconia tape casting substrate, the area of an inner electrode of the oxygen pumping battery is the same as that of a diffusion cavity, the impedance is favorably reduced, and the output pump current signal intensity is large and stable.
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a cross-sectional view of the present invention;
1-pump oxygen battery; 2-a reference cell; 3-structural layer; 4-heating layer; 11-a porous protective layer; 12-oxygen pumping outer electrode; 13-a first pin; 14-a second pin; 15-a third pin; 16-a first zirconia cast substrate; 17-pump oxygen inner electrode; 18-a diffusion chamber; 19-diffusion barrier; 21-a test electrode; 22-a second zirconia tape-cast substrate; 23-a first insulating layer; 24-a reference electrode; 41-a fourth zirconia casting substrate; 42-a second insulating layer; 43-a heater; 44-a third insulating layer; 45-fifth zirconia cast substrate; 46-fourth pin.
Detailed Description
The present invention will be described in further detail with reference to examples, but the embodiments of the present invention are not limited thereto.
Example 1:
referring to fig. 1 and 2, a double-cell sheet-type wide-area oxygen sensor is formed by sintering a pump oxygen cell 1, a reference cell 2, a structural layer 3 and a heating layer 4 which are stacked in sequence from top to bottom, wherein:
pump oxygen battery 1: the device comprises a first zirconium oxide casting substrate 16, an oxygen pumping outer electrode 12 and an oxygen pumping inner electrode 17, wherein the oxygen pumping outer electrode 12 and the oxygen pumping inner electrode 17 are symmetrically arranged on the upper surface and the lower surface of the first zirconium oxide casting substrate 16, the oxygen pumping outer electrode 12 is covered with a porous protective layer 11, and the oxygen pumping outer electrode 12 is connected with a pin 13;
reference cell 2: the device comprises a second zirconium dioxide casting substrate 22, a test electrode 21 and a reference electrode 24 which are arranged on the upper surface of the second zirconium dioxide casting substrate 22, wherein a first insulating layer 23 is arranged on the lower surface of the second zirconium dioxide casting substrate 22, the reference electrode 24 is arranged on the first insulating layer 23, electrode lead-out holes are formed in the first zirconium oxide casting substrate 16 and the second zirconium dioxide casting substrate 22, and the reference electrode 24 is connected with a pin 14 through hole filling;
a diffusion barrier 19 and a diffusion cavity 18 are arranged between the oxygen pumping cell 1 and the reference cell 2, the diffusion cavity 18 is positioned between the first zirconium oxide casting substrate 16 and the second zirconium oxide casting substrate 22, the diffusion barrier 19 is arranged between the diffusion cavity 18 and two sides of the first zirconium oxide casting substrate 16 and the second zirconium oxide casting substrate 22 and used for forming a double channel of tail gas diffusion and tail gas exchange, and the oxygen pumping inner electrode 17 and the test electrode 21 are positioned in the diffusion cavity 18; the pump oxygen inner electrode 17 is filled and connected with the pin 15 through a through hole;
structural layer 3: the sensor chip comprises a multilayer zirconia casting substrate, wherein the number of layers of the zirconia casting substrate is flexibly selected according to the required thickness of the sensor chip, and is preferably 1-5;
and a heating layer 4: the novel heater comprises a fourth zirconia casting substrate 41, a fifth zirconia casting substrate 45, a second insulating layer 42 arranged on the lower surface of the fourth zirconia casting substrate, a third insulating layer 44 arranged on the upper surface of the fifth zirconia casting substrate 45 and a heater 43 covered by the second insulating layer 42 and the third insulating layer 44, the heater 43 is prevented from being in direct contact with the fourth zirconia casting substrate 41 and the fifth zirconia casting substrate 45 to cause short circuit of the heater 43, heater leading-out holes are formed in the fourth zirconia casting substrate 41 and the fifth zirconia casting substrate 45, and the heater 43 is connected with a pin 46 through hole filling.
Example 2:
a preparation method of a double-battery sheet type wide-area oxygen sensor comprises the following steps,
step S1: mixing 5mol% of yttrium oxide doped zirconia with alumina according to the mass percentage of 88: 12 preparing inorganic components, adding 5%, 60%, 10% and 10% of dispersing agents, organic solvents, binders and plasticizers in mass percentage of the inorganic components, and performing ball milling to form zirconia ceramic slurry;
preparing a zirconia casting substrate by adopting a casting method to obtain a first zirconia casting substrate, a second zirconia casting substrate, a third zirconia casting substrate and a fourth zirconia casting substrate;
punching a positioning hole, an electrode leading-out hole and a heater leading-out hole by adopting mechanical punching;
step S2: preparing pump oxygen electrode slurry, diffusion barrier slurry and porous protective layer slurry: mixing platinum powder and carbon according to the mass percentage of 88: 12, mixing, and adding an organic solvent to prepare pump electrode slurry; zirconium oxide and carbon are mixed according to the mass percentage of 70: 30, mixing, and adding an organic solvent to prepare diffusion barrier slurry; mixing zirconium oxide and carbon according to the mass percentage of 50: 50, mixing, and adding an organic solvent to prepare porous protective layer slurry;
step S3: printing an oxygen pumping outer electrode and a lead on the upper surface of a first zirconium oxide casting substrate by adopting screen printing, printing an oxygen pumping inner electrode and a lead on the lower surface of the first zirconium oxide casting substrate, and leading the oxygen pumping inner electrode out of the upper surface of the first zirconium oxide casting substrate through filling of a through hole; printing a porous protective layer on an oxygen pumping external electrode, printing screen printing slurry prepared by carbon powder with the same area on the oxygen pumping internal electrode to form a diffusion cavity, printing diffusion barrier slurry on two sides of the oxygen pumping internal electrode to form a diffusion barrier, wherein the thickness of the diffusion barrier is the same as that of the diffusion cavity;
step S4: printing a test electrode on the upper surface of the second zirconium dioxide casting substrate by adopting screen printing, printing a first insulating layer on the lower surface of the second zirconium dioxide casting substrate, then printing a reference electrode, and leading the test electrode and the reference electrode out of the upper surface of the first zirconium oxide casting substrate through hole filling;
step S5: printing a second insulating layer on the lower surface of the third zirconia casting substrate by adopting screen printing, printing a third insulating layer on the upper surface of the fourth zirconia casting substrate, and then printing a heater on the third insulating layer;
step S6: sequentially laminating the heating layer, the structural layer, the reference battery and the oxygen pumping battery from bottom to top, pressing the laminated layers into a whole by adopting isostatic pressing, and mechanically cutting the whole into a chip green body;
step S7: and placing the green chip bodies into a burning bearing plate, placing the burning bearing plate into an air circulating furnace for slow glue discharging, wherein the highest glue discharging temperature is 700 ℃, placing the green chip bodies after glue discharging into a sintering furnace, and sintering and molding at 1500 ℃.
Example 3:
step S1: mixing 8mol% of yttrium oxide doped zirconia with alumina according to the mass percentage of 75: 25 preparing inorganic components, adding dispersing agents, organic solvents, binders and plasticizers which account for 10%, 40%, 5% and 5% of the inorganic components by mass respectively, and performing ball milling to form zirconia ceramic slurry;
preparing a zirconia casting substrate by adopting a casting method to obtain a first zirconia casting substrate, a second zirconia casting substrate, a third zirconia casting substrate and a fourth zirconia casting substrate;
punching a positioning hole, an electrode leading-out hole and a heater leading-out hole by adopting mechanical punching;
step S2: preparing pump oxygen electrode slurry, diffusion barrier slurry and porous protective layer slurry: platinum powder and carbon are mixed according to the mass percentage of 95: 5, mixing, and adding an organic solvent to prepare pump electrode slurry; mixing zirconium oxide and carbon according to the mass percentage of 50: 50, mixing, and adding an organic solvent to prepare diffusion barrier slurry; zirconium oxide and carbon are mixed according to the mass percentage of 90: 10 mixing, and adding an organic solvent to prepare porous protective layer slurry; step S3-step S6 are the same as in example 2, and in step S7, the green chip is placed in a setter plate, the setter plate is placed in an air circulation furnace to carry out slow glue discharging, the highest glue discharging temperature is 700 ℃, and the green chip after glue discharging is placed in a sintering furnace to be sintered and molded at a high temperature of 1350 ℃.
Example 4:
step S1: taking 3mol% of yttrium oxide doped zirconia, and mixing the yttrium oxide doped zirconia with alumina according to the mass percentage of 100: 0 preparing inorganic components, adding dispersing agents, organic solvents, binders and plasticizers which account for 1%, 80%, 15% and 15% of the inorganic components by mass respectively, and performing ball milling to form zirconia ceramic slurry;
preparing a zirconia casting substrate by adopting a casting method to obtain a first zirconia casting substrate, a second zirconia casting substrate, a third zirconia casting substrate and a fourth zirconia casting substrate;
punching a positioning hole, an electrode leading-out hole and a heater leading-out hole by adopting mechanical punching;
step S2: preparing pump oxygen electrode slurry, diffusion barrier slurry and porous protective layer slurry: mixing platinum powder and carbon according to the mass percentage of 80: 20, mixing, and adding an organic solvent to prepare pump electrode slurry; zirconium oxide and carbon are mixed according to the mass percentage of 90: 10 mixing, and adding an organic solvent to prepare diffusion barrier slurry; zirconium oxide and carbon are mixed according to the mass percentage of 70: 30, mixing, and adding an organic solvent to prepare porous protective layer slurry; step S3-step S6 are the same as in example 2, and in step S7, the green chip is placed in a setter plate, the setter plate is placed in an air circulation furnace to carry out slow glue discharging, the glue discharging maximum temperature is 600 ℃, and the green chip after glue discharging is placed in a sintering furnace to be sintered and molded at a high temperature of 1420 ℃.
The material formulations in examples 2-4 were designed to perform the function of the sensor and to be suitable for casting, and the formulations of the three screen printing pastes were also designed to perform the function of the sensor better.
Although the present invention has been described herein with reference to the illustrated embodiments thereof, which are intended to be preferred embodiments of the present invention, it is to be understood that the invention is not limited thereto, and that numerous other modifications and embodiments can be devised by those skilled in the art that will fall within the spirit and scope of the principles of this disclosure.
Claims (3)
1. A preparation method of a double-cell type sheet-type wide-area oxygen sensor is characterized by comprising a double-cell type sheet-type wide-area oxygen sensor which is formed by sintering a pump oxygen cell, a reference cell, a structural layer and a heating layer which are sequentially stacked from top to bottom, wherein:
pumping an oxygen battery: the device comprises a first zirconium oxide casting substrate, an oxygen pumping external electrode arranged on the upper surface of the first zirconium oxide casting substrate and an oxygen pumping internal electrode arranged on the lower surface of the first zirconium oxide casting substrate, wherein the oxygen pumping external electrode is covered with a porous protective layer;
reference cell: the test device comprises a second zirconium dioxide casting substrate, a reference electrode and a test electrode arranged on the upper surface of the second zirconium dioxide casting substrate, wherein a first insulating layer is arranged on the lower surface of the second zirconium dioxide casting substrate, and the reference electrode is arranged on the lower surface of the first insulating layer;
a diffusion barrier and a diffusion cavity are arranged between the oxygen pumping cell and the reference cell, the diffusion cavity is positioned between the first zirconium oxide casting substrate and the second zirconium oxide casting substrate, the diffusion barrier is arranged between the diffusion cavity and two sides of the first zirconium oxide casting substrate and the second zirconium oxide casting substrate and is used for forming a channel for tail gas diffusion and tail gas exchange, the oxygen pumping inner electrode and the test electrode are positioned in the diffusion cavity, and the area of the oxygen pumping inner electrode is the same as that of the diffusion cavity;
the structural layer consists of at least one layer of zirconia tape-casting substrate;
a heating layer: the heating device comprises a fourth zirconium oxide casting substrate, a fifth zirconium oxide casting substrate, a second insulating layer arranged on the lower surface of the fourth zirconium oxide casting substrate, a third insulating layer arranged on the upper surface of the fifth zirconium oxide casting substrate and a heater covered by the second insulating layer and the third insulating layer;
the double-battery sheet type wide-area oxygen sensor adopts an internal reference as a reference atmosphere, and the pump current of the double-battery sheet type wide-area oxygen sensor is 7-30 muA;
the diffusion cavity is a cavity formed between the pump oxygen inner electrode and the test electrode, and the cavity is formed by preparing screen printing slurry from carbon powder, then screen printing the screen printing slurry on the pump oxygen inner electrode, and volatilizing carbon after sintering;
the preparation method comprises the following steps:
step S1: preparing a zirconia casting substrate to obtain a first zirconia casting substrate, a second zirconia casting substrate, a third zirconia casting substrate and a fourth zirconia casting substrate;
the preparation of the zirconia cast substrate specifically comprises:
step S11: doping yttrium oxide with zirconium oxide and aluminum oxide according to the mass percentage (75-100): (0-25) preparing an inorganic component, wherein the content of yttrium oxide in the yttrium oxide doped zirconia is 3-8 mol%;
step S12: mixing an inorganic component, a dispersing agent, an organic solvent, a binder and a plasticizer according to the mass ratio of 100: (1-10): (40-80): (5-15): (5-15) carrying out ball milling to form zirconia ceramic slurry;
step S13: preparing a zirconia casting substrate by adopting a casting method to obtain a first zirconia casting substrate, a second zirconia casting substrate, a third zirconia casting substrate and a fourth zirconia casting substrate;
punching a positioning hole, an electrode leading-out hole and a heater leading-out hole by adopting mechanical punching;
step S2: preparing pump oxygen electrode slurry, diffusion barrier slurry and porous protective layer slurry;
the step S2 specifically includes: platinum powder and carbon are mixed according to the mass percentage: (80-95): (5-20), and adding an organic solvent to prepare pump electrode slurry; zirconium oxide and carbon are mixed according to the mass percentage: (50-90): (10-50), mixing, and adding an organic solvent to prepare diffusion barrier slurry; zirconium oxide and carbon are mixed according to the mass percentage: (50-90): (10-50), mixing, and adding an organic solvent to prepare porous protective layer slurry;
step S3: printing an oxygen pumping external electrode and a lead on the upper surface of the first zirconium oxide casting substrate, printing an oxygen pumping internal electrode and a lead on the lower surface of the first zirconium oxide casting substrate, and leading the oxygen pumping internal electrode out of the upper surface of the first zirconium oxide casting substrate through filling of the through hole; printing a porous protective layer on an oxygen pumping external electrode, printing screen printing slurry prepared by carbon powder with the same area on the oxygen pumping internal electrode to form a diffusion cavity, printing diffusion barrier slurry on two sides of the oxygen pumping internal electrode to form a diffusion barrier, wherein the thickness of the diffusion barrier is the same as that of the diffusion cavity;
step S4: printing a test electrode on the upper surface of the second zirconium dioxide casting substrate, printing a first insulating layer on the lower surface of the second zirconium dioxide casting substrate, then printing a reference electrode, and leading the test electrode and the reference electrode out of the upper surface of the first zirconium oxide casting substrate through hole filling;
step S5: printing a second insulating layer on the lower surface of the third zirconia casting substrate, printing a third insulating layer on the upper surface of the fourth zirconia casting substrate, and then printing a heater on the third insulating layer;
step S6: sequentially laminating the heating layer, the structural layer, the reference battery and the oxygen pumping battery from bottom to top, pressing the laminated layers into a whole by adopting isostatic pressing, and mechanically cutting the whole into a chip green body;
step S7: placing the chip green body into a burning board, placing the burning board into an air circulation furnace for slow glue discharging, wherein the highest glue discharging temperature is 600-800 ℃, and placing the chip green body after glue discharging into a sintering furnace for sintering and molding at 1350-1500 ℃.
2. The method of claim 1, wherein the steps S3, S4 and S5 are performed by screen printing.
3. The method of claim 1, wherein the first and second cast zirconia substrates are provided with electrode exit holes.
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| CN110308190A (en) * | 2019-07-30 | 2019-10-08 | 苏州禾苏传感器科技有限公司 | A kind of band diffusion barrier chip of sheet oxygen sensor |
| CN110487874A (en) * | 2019-09-25 | 2019-11-22 | 中国兵器工业集团第二一四研究所苏州研发中心 | A kind of high-precision wide area type oxygen sensor chip |
| CN112198205B (en) * | 2020-09-16 | 2022-11-29 | 浙江新瓷智能科技股份有限公司 | Oxygen sensor chip with short response time |
| CN114660154B (en) * | 2022-03-11 | 2024-04-16 | 四方光电股份有限公司 | Nitrogen-oxygen sensor chip and preparation method thereof |
| CN117233233B (en) * | 2023-11-14 | 2024-01-30 | 苏州工业园区福特斯汽车电子有限公司 | Intelligent wide-area five-wire oxygen sensor chip and manufacturing method thereof |
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