CN108732100B - Tandem mass spectrum for macromolecular research - Google Patents
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- CN108732100B CN108732100B CN201810832104.7A CN201810832104A CN108732100B CN 108732100 B CN108732100 B CN 108732100B CN 201810832104 A CN201810832104 A CN 201810832104A CN 108732100 B CN108732100 B CN 108732100B
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Abstract
The invention relates to the field of molecular spectroscopy, in particular to a tandem mass spectrum for macromolecular research, which comprises a buffer gas outlet, a spray cavity, an electrospray device, a power supply, a buffer gas cavity, a gas outlet, a buffer gas inlet, a vacuum cavity, an ion buncher, a quadrupole mass filter, a detector, a deflector, an octapole guide, a laser and an ion trap, wherein the ion buncher comprises 100 pieces of annular electrode plates from 1 st to 100 th, the central aperture of the annular electrode plates from 1 st to 50 th is 26 mm, the aperture of the annular electrode plates from 51 st to 100 th is linearly reduced from 26 mm to 2 mm, a metal plate with a diameter of seven mm is arranged at the 30 th annular electrode plate, the metal plate is positioned at the center of the central hole of the 30 th annular electrode plate in a parallel and coplanar manner, and is connected with the 30 th annular electrode through four metal support bars which form a cross shape and are 0.5 mm wide, and the metal plate can disperse neutral impurities in ion flow.
Description
Technical Field
The invention relates to the field of molecular spectroscopy, in particular to a tandem mass spectrum which can generate gas-phase macromolecular ions and has high sensitivity and signal stability and is used for macromolecular research.
Background
Tandem mass spectrometry is a common method of studying molecular characteristics, in which sample molecules are typically injected into a vacuum system in the form of ions, and are moved by an electric field generated by electrodes or by a pressure difference in the vacuum system to perform subsequent measurements. Defect one of the prior art: the different vacuum sections in the vacuum cavity are separated by adopting a diverter or a common ion beam-forming device, wherein the diverter has the defect of easy blockage, so that the transmissivity of molecules to be deposited is lower, and the common ion beam-forming device has the defect of being incapable of effectively filtering impurities in ion beam flow; the defects of the prior art are as follows: in the prior art, the purpose of stabilizing electrospray jet flow is achieved by adopting the countercurrent of buffer gas, namely, the flowing direction of the buffer gas is opposite to the direction of the spray jet flow, but the countercurrent of the buffer gas is not layered in space, is difficult to effectively control in time, and is extremely easy to form turbulence, so that the uniformity and the mass flow of spray can be influenced, and the problem can be solved by using the tandem mass spectrum for macromolecular research.
Disclosure of Invention
In order to solve the problems, the tandem mass spectrum for macromolecular research adopts a specially designed ion beam condenser to reduce impurities in ion beam current, and adopts counter flow of buffer gas which has multiple layers in space and can be effectively controlled in time to stabilize electrospray jet flow, so that the uniformity and mass flow of spray are increased.
The technical scheme adopted by the invention is as follows:
the tandem mass spectrum for macromolecular research mainly comprises a buffer gas outlet, a spray cavity, an electrospray device, a high-voltage power supply, a buffer gas cavity, a gas outlet I, a gas outlet II, a buffer gas inlet, a vacuum cavity, an ion beam precipitator, a quadrupole mass filter I, a detector I, a deflector I, an octapole guide, a deflector II, a laser I, an ion trap, a deflector III, a laser II, a quadrupole mass filter II and a detector II, wherein xyz is a three-dimensional coordinate system, the detector I is connected with the deflector I, the vacuum cavity is provided with a vacuum window capable of transmitting light, a laser beam emitted by the laser I can enter the ion trap through the vacuum window and the deflector II, a laser beam emitted by the laser II can enter the ion trap through the vacuum window and the deflector III, the vacuum cavity is divided into a vacuum section I, a vacuum section II, a vacuum section III, a vacuum section IV and a vacuum section V by an ion beam-forming device, a deflection device I, a deflection device II and a deflection device III in sequence, the vacuum section II and the vacuum section III, the vacuum section III and the vacuum section IV are respectively connected in a yz plane at 90 degrees, the deflection device I, the deflection device II and the deflection device III are respectively positioned at the connection position at the 90 degrees, the vacuum section I and the vacuum section V are respectively positioned at the starting end and the tail end of the vacuum cavity, the starting end is provided with a small hole, and the vacuum cavity is connected with a vacuum pump set; the quadrupole mass filter I is positioned in the vacuum section II, the quadrupole mass filter I and the quadrupole mass filter II can select the mass of the passing ions according to the charge-to-mass ratio of the ions, the octupole rod guide (14) is positioned in the vacuum section III, the ion beam can be guided, the ion trap is positioned in the vacuum section IV, the ions can be trapped in the ion trap and can be cooled by adjusting the electric potential applied to the ion trap, the ion trap is provided with a beam baffle, the ion beam can be blocked, and the quadrupole mass filter II and the detector II are both positioned in the vacuum section V; the electric spraying device is positioned in the spraying cavity, the electric spraying device is provided with a spraying opening, a high-voltage power supply is connected with the electric spraying device through a cable, and atomized liquid can be sprayed out from the spraying opening when the high-voltage power supply outputs a voltage higher than 1000V; in the xy plane, the cross section of the buffer gas cavity is a circle with the diameter of 100 mm, the cross section is provided with a gas outlet II and a gas outlet I, the gas outlet II is a circle with the diameter of 6 mm and is positioned in the center of the cross section of the buffer gas cavity, the gas outlet I is provided with two gas outlets and is symmetrical with the gas outlet II, and the buffer gas cavity can rotate around the central axis of the buffer gas cavity in the z direction; the valve is arranged at the air outlet II and can be controlled to be opened and closed by an external circuit; the ion beam expander consists of a total of 100 annular electrode plates from a 1 st annular electrode plate to a 100 th annular electrode plate, wherein the thickness of each annular electrode plate is 0.5 millimeter, the adjacent annular electrode plates are arranged in parallel and concentrically along the positive direction of the z-axis, the central apertures of the 1 st annular electrode plate to the 50 th annular electrode plate are 26 millimeters, the aperture of the 51 st annular electrode plate to the 100 th annular electrode plate is linearly reduced from 26 millimeters to 2 millimeters, a metal plate with the diameter of seven millimeters is connected to the central hole of the 30 th annular electrode plate through metal support bars, the width of each metal support bar is 0.5 millimeter, the metal support bars are four and uniformly distributed, the metal plates can be concentric with the central hole of the 30 th annular electrode plate, and the metal plates can disperse jet streams of neutral impurities in ion flow.
The invention is based on tandem mass spectrum, which combines electrospray ion source and low temperature ion trap to study cooled gas phase ion, to generate gas phase large ion, cool ion in ion trap, and implement optical fragment spectrum to characterize the spectral property of large ion. The ion beam condenser with special electrode configuration in the device can effectively reduce impurities in ion beam current, thereby obviously improving the sensitivity and signal stability of the device.
The method for researching by utilizing the tandem mass spectrum for macromolecular research comprises the following steps:
firstly, starting a vacuum pump group to enable the vacuum degree of a vacuum section I, a vacuum section II, a vacuum section III, a vacuum section IV and a vacuum section V to respectively reach 1mbar and 1 multiplied by 10 -2 mbar、2×10 -7 mbar、2×10 -9 mbar and 1X 10 -9 mbar；
Secondly, adjusting the position of an electrospray device to enable the spray opening to face the air outlet II, outputting voltage by a high-voltage power supply, spraying solution containing molecules to be researched to a spray cavity by the electrospray device in an atomized liquid drop form, wherein the liquid drop contains the molecules to be researched, other impurities and solvent molecules, adjusting the output voltage of the high-voltage power supply to adjust the shape of liquid spray, and outputting voltage ranges from 2000V to 5000V;
introducing buffer gas into the buffer gas cavity from the buffer gas inlet, and entering the spray cavity through the gas outlet I and the gas outlet II, and finally discharging from the buffer gas outlet, wherein the flow speed range is 1-5 SLM (selective vapor deposition) which is standard gas per liter/min, and simultaneously, the buffer gas cavity rotates around the central axis of the buffer gas cavity in the z direction, the rotating speed is 0.05 cycles/second, the opening and closing of a valve at the gas outlet II are controlled, and the opening and closing interval time is 1 second;
the atomized liquid drops formed at the outlets of the part of electrospray devices enter the buffer gas cavity through the gas outlet I and the gas outlet II and then enter the vacuum cavity, most of solvent in the liquid drops is pumped out of the vacuum cavity by the vacuum pump group, and ion beam composed of ions of molecules to be detected, part of solvent molecules and other impurities remained in the liquid drops continuously move in the vacuum cavity;
the radio frequency voltage of +V and-V is respectively applied to the odd-numbered and even-numbered annular electrodes of the ion beam buncher, the driving frequency of the radio frequency voltage ranges from 100kHz to 600kHz, the typical value of the radio frequency potential is 20V, wherein no radio frequency potential is applied to the 30 th annular electrode, only the direct current potential is applied to 150V, meanwhile, the direct current potentials are applied to the 1 st to 29 th annular electrodes and the 31 st to 100 th annular electrodes of the ion beam buncher, the direct current potential on the 1 st annular electrode is 200V, the direct current potential on the 100 th annular electrode is 10V, and the direct current potentials applied to the 1 st to 29 th annular electrodes and the 31 st to 100 th annular electrodes are linearly reduced;
the ion beam flow passes through the ion beam condenser, then passes through a quadrupole mass filter I, and then enters a vacuum section III after being deflected by a deflector I;
seventhly, the ion beam flow enters a vacuum section IV after passing through the octupole rod guide and being deflected by a deflector II;
the ion trap is provided with a beam baffle which can block ion beam, the ion beam baffle is closed after being opened for 200 microseconds, the ion beam passing through the beam baffle enters the ion trap in the form of ion packets, and the potential of the ion trap is regulated to enable the ion packets to be trapped in the ion trap and cooled;
the laser beam emitted by the laser I or the laser II irradiates an ion packet in the ion trap to perform light excitation reaction, wherein the irradiation time is typically 0.1 seconds;
when the laser stops irradiating, the potential of the ion trap is regulated, so that ion fragments generated by the photo-excitation reaction leave the ion trap and move towards the deflector III;
eleven, the ion fragments are deflected by the deflector III and enter a quadrupole mass filter II, and enter a detector II after mass selection in the quadrupole mass filter II;
and twelve, analyzing the data collected by the detector II, and characterizing the light excitation product.
The beneficial effects of the invention are as follows:
the invention adopts a specially designed ion beam condenser to reduce impurities in ion beam flow, and adopts buffer gas countercurrent which has multiple layers in space and can be effectively controlled in time to stabilize electrospray jet flow, thereby increasing spray uniformity and mass flow.
Drawings
The following is further described in connection with the figures of the present invention:
FIG. 1 is a schematic illustration of the present invention;
FIG. 2 is an x-direction front view of the ion beam expander;
FIG. 3 is a left side view in the z direction of the 30 th ring electrode in the ion beam expander;
fig. 4 is a z-direction left side view of the buffer gas chamber.
In the figure, 1. Buffer gas outlet, 2. Spray chamber, 3. Electrospray device, 4. High voltage power supply, 5. Buffer gas chamber, 6. Gas outlet I,7. Gas outlet II,8. Buffer gas inlet, 9. Vacuum chamber, 9-1. Vacuum section I,9-2. Vacuum section II,9-3. Vacuum section III,9-4. Vacuum section IV,9-5. Vacuum section V,10. Ion beam combiner, 10-1. 30 th ring electrode, 10-2. Metal disk, 10-3. Metal support bar, 11. Quadrupole mass filter I,12. Detector I,13. Deflector I,14. Octapole guide, 15. Deflector II,16. Laser I,17. Ion trap, 18. Deflector III,19. Laser II,20. Quadrupole mass filter II,21. Detector II.
Detailed Description
As shown in figure 1, the invention is schematically illustrated, mainly comprising a buffer gas outlet (1), a spray cavity (2), an electrospray device (3), a high-voltage power supply (4), a buffer gas cavity (5), a gas outlet I (6), a gas outlet II (7), a buffer gas inlet (8), a vacuum cavity (9), an ion beam shaper (10), a quadrupole mass filter I (11), a detector I (12), a deflector I (13), an octupole rod guide (14), a deflector II (15), a laser I (16), an ion trap (17), a deflector III (18), a laser II (19), a quadrupole mass filter II (20) and a detector II (21), xyz is a three-dimensional coordinate system, the detector I (12) is connected to the deflector I (13), the vacuum cavity (9) is provided with a light-transmitting vacuum window, a laser beam emitted by the laser I (16) can enter the ion trap (17) through the vacuum window and the deflector II (15), a laser beam emitted by the laser II (19) can enter the ion trap (17) through the vacuum window and the deflector III (18), the spray cavity (2), the vacuum cavity (9) and the vacuum cavity (9) are connected in sequence, and the vacuum cavity (9) is connected with the vacuum cavity (13) and the vacuum cavity (21) is connected in sequence, the deflector II (15) and the deflector III (18) are sequentially divided into a vacuum section I (9-1), a vacuum section II (9-2), a vacuum section III (9-3), a vacuum section IV (9-4) and a vacuum section V (9-5), the vacuum section II (9-2) and the vacuum section III (9-3), the vacuum section III (9-3) and the vacuum section IV (9-4) are respectively connected in a yz plane at an angle of 90 degrees, the deflector I (13), the deflector II (15) and the deflector III (18) are respectively positioned at the connection position of the angle of 90 degrees, the vacuum section I (9-1) and the vacuum section V (9-5) are respectively positioned at the starting end and the tail end of the vacuum chamber (9), the starting end is provided with small holes, and the vacuum chamber (9) is connected with a vacuum pump set; the quadrupole mass filter I (11) is positioned in the vacuum section II (9-2), the quadrupole mass filter I (11) and the quadrupole mass filter II (20) can select the mass of the passing ions according to the charge-to-mass ratio of the ions, the octupole rod guide (14) is positioned in the vacuum section III (9-3) and can guide the ion beam, the ion trap (17) is positioned in the vacuum section IV (9-4), the ions can be trapped in the ion trap (17) and can be cooled by adjusting the electric potential applied to the ion trap (17), the ion trap (17) is provided with a beam baffle and can block the ion beam, and the quadrupole mass filter II (20) and the detector II (21) are both positioned in the vacuum section V (9-5); the electric spraying device (3) is positioned in the spraying cavity (2), the electric spraying device (3) is provided with a spraying opening, the high-voltage power supply (4) is connected with the electric spraying device (3) through a cable, and when the high-voltage power supply (4) outputs voltage higher than 1000V, atomized liquid can be sprayed out of the spraying opening.
As shown in fig. 2, which is a front view of the ion beam expander in the x direction, fig. 2 shows only the 1 st, 2 nd, 29 th, 30 th, 31 st, 32 nd, 50 th, 51 st, 52 nd, 53 th, 54 th, 99 th and 100 th annular electrode plates, and reflects the positional relationship between the 30 th annular electrode (10-1) and the metal plate (10-2) and the metal support bar (10-3), the ion beam expander (10) is composed of a total of 100 annular electrode plates from the 1 st annular electrode plate to the 100 th annular electrode plate, the thickness of each annular electrode plate is 0.5 mm, the intervals between adjacent annular electrode plates are 0.5 mm, and are arranged in parallel and concentrically along the positive z-axis direction, the central apertures of the 1 st annular electrode plate to the 50 th annular electrode plate are 26 mm, and the apertures of the 51 st annular electrode plate to the 100 th annular electrode plate are linearly reduced from 26 mm to 2 mm.
As shown in FIG. 3, the left view in the z direction of the 30 th annular electrode in the ion beam expander reflects the position relation between the 30 th annular electrode (10-1) and the metal disc (10-2) and the metal support bar (10-3), wherein the metal disc with seven millimeters diameter is connected to the central hole of the 30 th annular electrode disc through the metal support bar (10-3), the width of the metal support bar (10-3) is 0.5 millimeter, the metal support bar (10-3) is provided with four and evenly distributed metal discs, the metal discs can be concentric with the central hole of the 30 th annular electrode disc, and the metal discs can disperse jet flow of neutral impurities in ion flow.
As shown in fig. 4, which is a left view of the buffer gas chamber in the z direction, in the xy plane, the cross section of the buffer gas chamber (5) is a circle with a diameter of 100 mm, the cross section has an air outlet II (7) and an air outlet I (6), the air outlet II (7) is a circle with a diameter of 6 mm and is located at the center of the cross section of the buffer gas chamber (5), the air outlet I (6) has two and is symmetrical with respect to the air outlet II (7), and the buffer gas chamber (5) can rotate around its central axis in the z direction; the air outlet II (7) is provided with a valve, and the opening and closing of the valve can be controlled by an external circuit.
The tandem mass spectrum for macromolecular research mainly comprises a buffer gas outlet (1), a spray cavity (2), an electrospray device (3), a high-voltage power supply (4), a buffer gas cavity (5), a gas outlet I (6), a gas outlet II (7), a buffer gas inlet (8), a vacuum cavity (9), an ion beam shaper (10), a quadrupole mass filter I (11), a detector I (12), a deflector I (13), an octapole guide (14), a deflector II (15), a laser I (16), an ion trap (17), a deflector III (18), a laser II (19), a quadrupole mass filter II (20) and a detector II (21), xyz is a three-dimensional coordinate system, the detector I (12) is connected to the deflector I (13), the vacuum cavity (9) is provided with a light-transmitting vacuum window, a laser beam emitted by the laser I (16) can enter the ion trap (17) through the vacuum window and the deflector II (15), a laser beam emitted by the laser II (19) can enter the ion trap (17) through the vacuum window and the deflector III (18), the buffer gas cavity (9), the vacuum cavity (9) and the ion beam shaper (9) are connected in sequence, the deflector II (15) and the deflector III (18) are sequentially divided into a vacuum section I (9-1), a vacuum section II (9-2), a vacuum section III (9-3), a vacuum section IV (9-4) and a vacuum section V (9-5), the vacuum section II (9-2) and the vacuum section III (9-3), the vacuum section III (9-3) and the vacuum section IV (9-4) are respectively connected in a yz plane at an angle of 90 degrees, the deflector I (13), the deflector II (15) and the deflector III (18) are respectively positioned at the connection position of the angle of 90 degrees, the vacuum section I (9-1) and the vacuum section V (9-5) are respectively positioned at the starting end and the tail end of the vacuum chamber (9), the starting end is provided with small holes, and the vacuum chamber (9) is connected with a vacuum pump set; the quadrupole mass filter I (11) is positioned in the vacuum section II (9-2), the quadrupole mass filter I (11) and the quadrupole mass filter II (20) can select the mass of the passing ions according to the charge-to-mass ratio of the ions, the octupole rod guide (14) is positioned in the vacuum section III (9-3) and can guide the ion beam, the ion trap (17) is positioned in the vacuum section IV (9-4), the ions can be trapped in the ion trap (17) and can be cooled by adjusting the electric potential applied to the ion trap (17), the ion trap (17) is provided with a beam baffle and can block the ion beam, and the quadrupole mass filter II (20) and the detector II (21) are both positioned in the vacuum section V (9-5); the electric spraying device (3) is positioned in the spraying cavity (2), the electric spraying device (3) is provided with a spraying opening, the high-voltage power supply (4) is connected with the electric spraying device (3) through a cable, and when the high-voltage power supply (4) outputs a voltage higher than 1000V, atomized liquid can be sprayed out of the spraying opening; in the xy plane, the cross section of the buffer gas chamber (5) is a circle with the diameter of 100 mm, the cross section is provided with an air outlet II (7) and an air outlet I (6), the air outlet II (7) is a circle with the diameter of 6 mm and is positioned at the center of the cross section of the buffer gas chamber (5), the air outlet I (6) is provided with two air outlets and is symmetrical with the air outlet II (7), and the buffer gas chamber (5) can rotate around the central axis of the buffer gas chamber in the z direction; a valve is arranged at the air outlet II (7) and can be controlled to be opened and closed by an external circuit; the ion beam expander (10) is composed of a total of 100 annular electrode plates from a 1 st annular electrode plate to a 100 th annular electrode plate, the thickness of each annular electrode plate is 0.5 millimeter, the intervals between the adjacent annular electrode plates are 0.5 millimeter, the adjacent annular electrode plates are arranged in parallel and concentrically along the positive direction of the z axis, the central apertures of the 1 st annular electrode plate to the 50 th annular electrode plate are 26 millimeters, the aperture of the 51 st annular electrode plate to the 100 th annular electrode plate is linearly reduced from 26 millimeters to 2 millimeters, a metal plate with the diameter of seven millimeters is connected at the central aperture of the 30 th annular electrode plate through a metal support bar (10-3), the width of the metal support bar (10-3) is 0.5 millimeter, the metal support bars (10-3) are provided with four and evenly distributed holes, the metal plates are concentric with the central aperture of the 30 th annular electrode plate, and the metal plates can disperse jet streams of neutral impurities in ion streams.
The invention adopts the ion beam condenser with special design to improve the ion transmissivity and reduce the impurities in the ion beam flow, and adopts the countercurrent of buffer gas which has multiple layers in space and can be effectively controlled in time to increase the uniformity and the mass flow of spray.
Claims (1)
1. A tandem mass spectrum for macromolecular research mainly comprises a buffer gas outlet (1), a spray cavity (2), an electrospray device (3), a high-voltage power supply (4), a buffer gas cavity (5), a gas outlet I (6), a gas outlet II (7), a buffer gas inlet (8), a vacuum cavity (9), an ion beam shaper (10), a quadrupole mass filter I (11), a detector I (12), a deflector I (13), an octapole guide (14), a deflector II (15), a laser I (16), an ion trap (17), a deflector III (18), a laser II (19), a quadrupole mass filter II (20) and a detector II (21), wherein the detector I (12) is connected to the deflector I (13), the vacuum cavity (9) is provided with a vacuum window capable of transmitting light, a laser beam emitted by the laser I (16) can enter the ion trap (17) through the vacuum window and the deflector II (15), a laser beam emitted by the laser II (19) can enter the ion trap (17) through the vacuum window and the deflector III (18), the spray cavity (2), the quadrupole mass filter II (20) and the detector II (21) are connected in sequence, and the vacuum cavity (9) are connected with the ion beam shaper (13) and the vacuum cavity (9) is connected in sequence, the deflector II (15) and the deflector III (18) are sequentially divided into a vacuum section I (9-1), a vacuum section II (9-2), a vacuum section III (9-3), a vacuum section IV (9-4) and a vacuum section V (9-5), the vacuum section II (9-2) and the vacuum section III (9-3), the vacuum section III (9-3) and the vacuum section IV (9-4) are respectively connected in a yz plane at an angle of 90 degrees, the deflector I (13), the deflector II (15) and the deflector III (18) are respectively positioned at the connection position of the angle of 90 degrees, the vacuum section I (9-1) and the vacuum section V (9-5) are respectively positioned at the starting end and the tail end of the vacuum chamber (9), the starting end is provided with small holes, and the vacuum chamber (9) is connected with a vacuum pump set; the quadrupole mass filter I (11) is positioned in the vacuum section II (9-2), the quadrupole mass filter I (11) and the quadrupole mass filter II (20) can select the mass of the passing ions according to the charge-to-mass ratio of the ions, the octupole rod guide (14) is positioned in the vacuum section III (9-3) and can guide the ion beam, the ion trap (17) is positioned in the vacuum section IV (9-4), the ions can be trapped in the ion trap (17) and can be cooled by adjusting the electric potential applied to the ion trap (17), the ion trap (17) is provided with a beam baffle and can block the ion beam, and the quadrupole mass filter II (20) and the detector II (21) are both positioned in the vacuum section V (9-5); the electric spraying device (3) is positioned in the spraying cavity (2), the electric spraying device (3) is provided with a spraying opening, the high-voltage power supply (4) is connected with the electric spraying device (3) through a cable, when the high-voltage power supply (4) outputs voltage higher than 1000V, atomized liquid can be sprayed out from the spraying opening,
the method is characterized in that: the cross section of the buffer gas cavity (5) is a circle with the diameter of 100 mm, the cross section is provided with an air outlet II (7) and an air outlet I (6), the air outlet II (7) is a circle with the diameter of 6 mm and is positioned in the center of the cross section of the buffer gas cavity (5), the air outlet I (6) is provided with two air outlets and is symmetrical with the air outlet II (7), and the buffer gas cavity (5) can rotate around the central axis of the buffer gas cavity in the z direction; a valve is arranged at the air outlet II (7) and can be controlled to be opened and closed by an external circuit; the ion beam expander (10) is composed of a total of 100 annular electrode plates from a 1 st annular electrode plate to a 100 th annular electrode plate, the thickness of each annular electrode plate is 0.5 millimeter, the intervals between the adjacent annular electrode plates are 0.5 millimeter, the adjacent annular electrode plates are arranged in parallel and concentrically along the positive direction of the z axis, the central apertures of the 1 st annular electrode plate to the 50 th annular electrode plate are 26 millimeters, the aperture of the 51 st annular electrode plate to the 100 th annular electrode plate is linearly reduced from 26 millimeters to 2 millimeters, a metal plate with the diameter of seven millimeters is connected at the central aperture of the 30 th annular electrode plate through a metal support bar (10-3), the width of the metal support bar (10-3) is 0.5 millimeter, the metal support bars (10-3) are provided with four and evenly distributed holes, the metal plates are concentric with the central aperture of the 30 th annular electrode plate, and the metal plates can disperse jet streams of neutral impurities in ion streams.
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