CN108732106A - Reflection difference optical measuring device and its measurement method - Google Patents
Reflection difference optical measuring device and its measurement method Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
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Abstract
Present disclose provides a kind of reflection difference optical measuring device and its measurement methods, including incident source, incident source processing unit, beam splitter, reflection difference component, outgoing source processing unit and outgoing source；Light beam enters measuring device by incident source, and is formed collimated light beam after the processing of incident source processing unit；Collimated light beam after beam splitter by generating outgoing beam；Outgoing beam passes through reflection difference component vertical incidence sample surfaces；After reflection difference component and beam splitter being sequentially passed through again by the outgoing beam of sample surfaces, input outgoing source processing unit；Outgoing beam convergence by being emitted source processing unit enters outgoing source；Angle between the incident beam and outgoing beam of sample surfaces is 0 °.The setting of beam splitter in the disclosure, input path and emitting light path is integrated into set of device, small in volume, dependable performance, and the optical texture of vertical incidence realizes that the operating distance of unlimited length, measurement accuracy are not influenced by operating distance, is easy to adjust.
Description
Technical field
This disclosure relates to surface optical representational field and micro-nano technical field of measurement and test more particularly to a kind of unlimited working distance
From reflection difference optical measuring device and its measurement method.
Background technology
Reflection difference optical measuring technique has high sensitivity to the surface/interface optics anisotropic of substance, and has
Non-contact, non-intrusion type, lossless, measuring environment require the features such as low.This technology measures incident polarization caused by sample surfaces
The polarization state of light changes, and then analyzes the Wuli-Shili-Renli system approach at material surface/interface.This technology is extensive at present
Surface characteristic research applied to metal, semiconductor, organic film etc. and field of industrial production.
The operating distance of traditional reflection difference optical measuring device is fixed.Usually make input path and anti-in design
Penetrate that light path is misaligned, and the relative position of each device is fixed, therefore the operating distance of optical measuring device is definite value.But work as
When sample position cannot meet designed operating distance, just will appear incident light cannot correctly be irradiated on sample and (or) anti-
Penetrate the problem of light cannot enter optical detector.At this moment need to readjust the relative position of sample and optical measuring device, even
Redesign optical measuring device.
The design of early stage adjustable input path and (or) reflected light path relative position solves above-mentioned to a certain extent
The problem of operating distance.But its complicated Machine Design increases cost, reduces reliability, and it is excessive during adjustment
Rely on the technical merit of tester.
Invention content
(1) technical problems to be solved
Present disclose provides a kind of reflection difference optical measuring device and its measurement methods, at least partly to solve the above institute
The technical issues of proposition.
(2) technical solution
According to one aspect of the disclosure, a kind of reflection difference optical measuring device is provided, including：Incident source；It is incident
Source processing unit is handled the light in incident source to export parallel incident beam；Beam splitter, the incidence that incident source is exported
Light beam is reflected into light path, and the outgoing beam by beam splitter is made to continue to be transmitted in light path；Reflection difference component, to incident light
Beam and/or outgoing beam carry out the modulation in polarization state and/or phase delay；Outgoing source processing unit, makes outgoing beam converge
Into outgoing source；Outgoing source collects outgoing beam and outputs it measuring device；The incident beam and outgoing beam of sample surfaces
Between angle be 0 °.
In some embodiments of the present disclosure, reflection difference component includes：Polarizer, being used for will be via beam splitter incidence
Non-polarized light is modulated to linearly polarized photon, while outgoing beam the shaking on current polarization direction for detecting sample surfaces
Width；Modulator is used to that vertical incidence sample surfaces after phase delay will to be generated via the linearly polarized photon of polarizer incidence；Sample
After the outgoing beam on surface carries out polarization state detection by input polarization device after modulator again, it is input to beam splitter.
In some embodiments of the present disclosure, further include：First rotating device, connect with polarizer, the first rotating device
It is static behind rotation a to azimuth；Second rotating device, connect with modulator, and the second rotating device is in measurement process each time
It is required to n angle of rotation, wherein n > 3；First rotating device and the second rotating device are driven by stepper motor.
In some embodiments of the present disclosure, outgoing source processing unit includes：Plane mirror, for reflective beam splitter output
Outgoing beam；Concave mirror, the outgoing beam for converging plane mirror make it into outgoing source.
In some embodiments of the present disclosure, incident source processing unit is off-axis parabolic mirror.
In some embodiments of the present disclosure, incident source is incident optical；Outgoing source is the output optical fiber.
In some embodiments of the present disclosure, beam splitter includes plate beamsplitter mirror, cube beam splitter and/or film beam splitting
Mirror.
In some embodiments of the present disclosure, modulator is achromatic quarter-wave plate；Polarizer includes that film is inclined
Shake piece, wire grid polarizer and/or birefringece crystal.
In some embodiments of the present disclosure, spectral measurement ranges be 250~1000nm, test sample a diameter of 1~
8mm。
A kind of reflection difference measuring method another aspect of the present disclosure provides, including：
Step A：Polarizer drives rotation to remains stationary behind an azimuth by the first rotating device, generates constant bearing angle
Linearly polarized photon；Step B：Modulator rotates n angle under the drive of the second rotating device in measurement process each time
Position θi(i=1,2,3 ... n), wherein n > 3；Step C：Optical detector and the output end of the output optical fiber connect, optical detector pair
N times light intensity data I should be acquired in n angle position of modulatori(i=1,2,3 ... n)；Step D：It is acquired according to optical detector
The light intensity data arrived solves following equation group：
It obtained q, c, s will be solved brings following formula into and can be obtained reflection difference signal：
Wherein i is imaginary unit.
(3) advantageous effect
It can be seen from the above technical proposal that disclosure reflection difference optical measuring device and its measurement method at least have
One of following advantageous effect or in which a part：
(1) input path and emitting light path are integrated into set of device by the setting of beam splitter, and optical texture is simple, body
Small, light-weight, the dependable performance of product.
(2) angle between incident beam and outgoing beam is set as 0 °, it can be achieved that in the position without any device
Adjustment in the case of, be flexibly applied to the scientific research for having different requirements to operating distance and application field, effectively increase instrument
Design efficiency and versatility.
(3) optical texture of vertical incidence sample reduces the change due to optical measuring device and sample relative distance
The measurement error brought.
(4) each optical device interchangeability is good, can replace corresponding preferred device according to different applications.
Description of the drawings
Fig. 1 is the schematic diagram of embodiment of the present disclosure reflection difference optical measuring device.
Fig. 2 is the flow diagram of embodiment of the present disclosure reflection difference measuring method.
【Embodiment of the present disclosure main element symbol description in attached drawing】
1- incident opticals；The off-axis parabolic mirrors of 2-；
3- beam splitters；4- polarizers；
The first rotating devices of 5-；6- modulators；
The second rotating devices of 7-；8- samples；
9- plane mirrors；10- concave mirrors；
11- the output optical fibers.
Specific implementation mode
Present disclose provides a kind of reflection difference optical measuring device and its measurement methods, including：At incident source, incident source
Manage device, beam splitter, reflection difference component, outgoing source processing unit and outgoing source；Light beam enters measuring device by incident source, and
Collimated light beam is formed after the processing of incident source processing unit；Collimated light beam after beam splitter by generating outgoing beam；Outgoing beam
Pass through reflection difference component vertical incidence sample surfaces；Reflection difference component is sequentially passed through again by the outgoing beam of sample surfaces
After beam splitter, input outgoing source processing unit；Outgoing beam convergence by being emitted source processing unit enters outgoing source；Relatively
Angle between the incident beam and outgoing beam of sample surfaces is 0 °.The setting of beam splitter in the disclosure, by input path with
Emitting light path is integrated into set of device, and optical texture is simple, small, light-weight, dependable performance；The light of vertical incidence simultaneously
Structure is learned, the operating distance of unlimited length can be realized, and measurement accuracy is not influenced by operating distance, be easy to adjust.
To make the purpose, technical scheme and advantage of the disclosure be more clearly understood, below in conjunction with specific embodiment, and reference
The disclosure is further described in attached drawing.
Disclosure some embodiments will be done with reference to appended attached drawing in rear and more comprehensively describe to property, some of but not complete
The embodiment in portion will be shown.In fact, the various embodiments of the disclosure can be realized in many different forms, and should not be construed
To be limited to embodiments set forth herein；Relatively, these embodiments are provided so that the disclosure meets applicable legal requirement.
In first exemplary embodiment of the disclosure, a kind of reflection difference optical measuring device and its measurement are provided
Method.Fig. 1 is the schematic diagram of embodiment of the present disclosure reflection difference optical measuring device.As shown in Figure 1, including：Incident source, incidence
Source processing unit, beam splitter 3, reflection difference component, outgoing source processing unit and outgoing source.Here incident source processing unit can be with
Select off-axis parabolic mirror 2.Beam splitter 3 can select 1: 1 unpolarized beam splitting cube.Reflection difference component may include polarization
Device 4 and modulator 6, wherein modulator 6 can select achromatic quarter waveplate, polarizer 4 that can select Glan Thomson
Type polarizing cubic further includes the first rotating device 5 and the second rotating device 7, and the first rotating device 5 is connect with polarizer 4, and second
Rotating device 7 is connect with modulator 6, and the first rotating device 5 and the second rotating device 7 are driven by stepper motor.Outgoing source
Processing unit may include：Plane mirror 9 and concave mirror 10.Incident source can be incident optical 1, and outgoing source can be the output optical fiber
11, it is 200~1000 microns of multimode fibre that incident optical 1 and the output optical fiber 11, which can select core diameter,.
After light beam of light source is by incident optical 1, collimated light beam is become from off-axis parabolic mirror 2, this parallel beam incident
After beam splitter 3, then the outgoing beam generated by beam splitter 3 passes through modulator 6 by becoming linearly polarized photon after polarizer 4,
Modulated beam orthogonal is incident on 8 surface of sample；After the light beam of 8 surface reflection of sample is incident on modulator 6, via polarizer
4 become linearly polarized photon, this linearly polarized photon passes through plane mirror 9 and concave mirror 10 successively via the transmitted light beam after beam splitter 3
After reflection, convergence enters the output optical fiber 11；Angle between the incident beam and outgoing beam on 8 surface of sample is 0 °.
The reflection difference optical measuring device that the disclosure provides, incident beam and outgoing beam relative to sample 8 are
Collimated light beam, and two-beam wire clamp angle is 0 °, therefore optical measuring device is not required to limit operating distance, can realize nothing
Limit the measurement of remote operating distance.The beam diameter of the measure spectrum of the disclosure ranging from 250~1000nm, test sample can be 1
~8mm.In the disclosure, by the port and the first rotating device 5 of incident optical 1 and the output optical fiber 11 and the second rotating device 7
Control port be uniformly arranged in the same side of optical measuring device.
Fig. 2 is the flow diagram of embodiment of the present disclosure reflection difference measuring method.As shown in Fig. 2, including：Step A：
Polarizer 4 drives rotation to remains stationary behind an azimuth by the first rotating device 5, generates the linear polarization at constant bearing angle
Light；Step B：Modulator 6 rotates n angular position under the drive of the second rotating device 7 in measurement process each timei(i
=1,2,3 ... n), wherein n > 3；Step C：Optical detector is connect with the output end of the output optical fiber 11, and optical detector, which corresponds to, to be adjusted
The n angle position acquisition n times light intensity data I of device 6 processedi(i=1,2,3 ... n)；Step D：It is collected according to optical detector
Light intensity data solves following equation group：
It obtained q, c, s will be solved brings following formula into and can be obtained reflection difference signal：
Wherein i is imaginary unit.
The disclosure is in measurement process each time：Polarizer 4 drives rotation to an azimuth by the first rotating device 5 first
Remains stationary afterwards, the azimuth can be any angles, to generate the linearly polarized photon at constant bearing angle；Modulator 6 is second
Under rotating device 7 drives, n angular position is rotated in measurement process each timei(i=1,2,3 ... n), wherein n > 3,
Here each angle all can be any angle, to realize modulation to light beam；The other end of optical detector and the output optical fiber
Connection, wherein optical detector correspond to the n angle position acquisition n times light intensity data I of modulator 6i(i=1,2,3 ... n)；This
The angular position information of a little light intensity datas and modulator 6 is transferred in computer, and the number of reflection difference signal is completed by computer
According to operation.Circular is to solve just to determine equation group or over-determined systems, when angle number n of rotation etc. is with 3, equation
Group is over-determined systems when n is more than 3, you can find out q, c, s just to determine equation group：
Reflection difference signal is further acquired by following formula：
Wherein i is imaginary unit.
So far, one embodiment reflection difference optical measuring device introduction of the disclosure finishes.
So far, attached drawing is had been combined the embodiment of the present disclosure is described in detail.It should be noted that in attached drawing or saying
In bright book text, the realization method for not being painted or describing is form known to a person of ordinary skill in the art in technical field, and
It is not described in detail.In addition, the above-mentioned definition to each element and method be not limited in mentioning in embodiment it is various specific
Structure, shape or mode, those of ordinary skill in the art simply can be changed or replaced to it.
According to above description, those skilled in the art should have clearly disclosure reflection difference optical measuring device
Understanding.
In conclusion in the disclosure beam splitter setting, input path and emitting light path are integrated into set of device, light
Learn simple in structure, small, light-weight, dependable performance；The optical texture of vertical incidence simultaneously, can realize the work of unlimited length
Make distance, and measurement accuracy is not influenced by operating distance, is easy to adjust.
It should also be noted that, the direction term mentioned in embodiment, for example, "upper", "lower", "front", "rear", " left side ",
" right side " etc. is only the direction of refer to the attached drawing, not is used for limiting the protection domain of the disclosure.Through attached drawing, identical element by
Same or similar reference numeral indicates.When that understanding of this disclosure may be caused to cause to obscure, conventional structure will be omitted
Or construction.
And the shape and size of each component do not reflect actual size and ratio in figure, and only illustrate the embodiment of the present disclosure
Content.In addition, in the claims, any reference mark between bracket should not be configured to the limit to claim
System.
It unless there are known entitled phase otherwise anticipates, the numerical parameter in this specification and appended claims is approximation, energy
Enough required characteristic changings according to as obtained by content of this disclosure.Specifically, all be used in specification and claim
The number of the middle content for indicating composition, reaction condition etc., it is thus understood that repaiied by the term of " about " in all situations
Decorations.Under normal circumstances, the meaning expressed refers to including by specific quantity ± 10% variation in some embodiments, at some
± 5% variation in embodiment, ± 1% variation in some embodiments, in some embodiments ± 0.5% variation.
Furthermore word "comprising" does not exclude the presence of element or step not listed in the claims.Before element
Word "a" or "an" does not exclude the presence of multiple such elements.
The word of specification and ordinal number such as " first ", " second ", " third " etc. used in claim, with modification
Corresponding element, itself is not meant to that the element has any ordinal number, does not also represent the suitable of a certain element and another element
Sequence in sequence or manufacturing method, the use of those ordinal numbers are only used for enabling the element with certain name and another tool
There is the element of identical name that can make clear differentiation.
Similarly, it should be understood that in order to simplify the disclosure and help to understand one or more of each open aspect,
Above in the description of the exemplary embodiment of the disclosure, each feature of the disclosure is grouped together into single implementation sometimes
In example, figure or descriptions thereof.However, the method for the disclosure should be construed to reflect following intention：It is i.e. required to protect
The disclosure of shield requires features more more than the feature being expressly recited in each claim.More precisely, as following
Claims reflect as, open aspect is all features less than single embodiment disclosed above.Therefore,
Thus the claims for following specific implementation mode are expressly incorporated in the specific implementation mode, wherein each claim itself
All as the separate embodiments of the disclosure.
Particular embodiments described above has carried out further in detail the purpose, technical solution and advantageous effect of the disclosure
It describes in detail bright, it should be understood that the foregoing is merely the specific embodiment of the disclosure, is not limited to the disclosure, it is all
Within the spirit and principle of the disclosure, any modification, equivalent substitution, improvement and etc. done should be included in the guarantor of the disclosure
Within the scope of shield.
Claims (10)
1. a kind of reflection difference optical measuring device, including：
Incident source；
Incident source processing unit handles to export parallel incident beam the light in the incident source；
The incident beam that incident source exports is reflected into light path by beam splitter, and the outgoing beam by beam splitter is made to continue to transmit
Into light path；
Reflection difference component carries out incident beam and/or outgoing beam the modulation in polarization state and/or phase delay；
Outgoing source processing unit makes outgoing beam convergence enter outgoing source；
Outgoing source collects outgoing beam and outputs it measuring device；
Angle between the incident beam and outgoing beam of the sample surfaces is 0 °.
2. reflection difference optical measuring device according to claim 1, the reflection difference component include：
Polarizer, for linearly polarized photon will to be modulated to via the non-polarized light of beam splitter incidence, while for detecting sample table
Amplitude of the outgoing beam in face on current polarization direction；
Modulator is used to that vertical incidence sample table after phase delay will to be generated via the linearly polarized photon of polarizer incidence
Face；After the outgoing beam of sample surfaces carries out polarization state detection by inputting the polarizer after the modulator again, it is input to
The beam splitter.
3. reflection difference optical measuring device according to claim 2, further includes：
First rotating device is connect with the polarizer, and first rotating device is static after rotating to an azimuth；
Second rotating device is connect with the modulator, and second rotating device is required to revolve in measurement process each time
Turn n angle, wherein n > 3；First rotating device and second rotating device are driven by stepper motor；
Optical detector is connect with the output end in the outgoing source.
4. reflection difference optical measuring device according to claim 1, outgoing source processing unit include：
Plane mirror, the outgoing beam for reflecting the beam splitter output；
Concave mirror, the outgoing beam for converging the plane mirror make it into the outgoing source.
5. reflection difference optical measuring device according to claim 1, incidence source processing unit is that off-axis parabolic is anti-
Penetrate mirror.
6. reflection difference optical measuring device according to any one of claims 1 to 5, the incidence source is incident optical；
The outgoing source is the output optical fiber.
7. reflection difference optical measuring device according to any one of claims 1 to 5, the beam splitter include plate beamsplitter
Mirror, cube beam splitter and/or film beam splitter.
8. reflection difference optical measuring device according to claim 2, the modulator is achromatic quarter-wave
Piece；The polarizer includes film polarizer, wire grid polarizer and/or birefringece crystal.
9. reflection difference optical measuring device according to any one of claims 1 to 5, spectral measurement ranges are 250~
1000nm, a diameter of 1~8mm of test sample.
10. the reflection difference optical measurement side that a kind of reflection difference optical measuring device using described in claim 1 to 9 carries out
Method, including：
Step A：Polarizer drives rotation to remains stationary behind an azimuth by the first rotating device, generates the line at constant bearing angle
Property polarised light；
Step B：Modulator rotates n angular position under the drive of the second rotating device in measurement process each timei(i=
1,2,3 ... n), wherein n > 3；
Step C：Optical detector is connect with the output optical fiber, and the n angle position that optical detector corresponds to modulator acquires n times light intensity
Data Ii(i=1,2,3 ... n)；
Step D：According to the collected light intensity data of optical detector, following equation group is solved：
It obtained q, c, s will be solved brings following formula into and can be obtained reflection difference signal：
Wherein i is imaginary unit.
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| CN112504456A (en) * | 2020-11-18 | 2021-03-16 | 天津大学 | Micro-area differential reflection type spectrum measurement system and method |
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